JP6819949B2 - ブロック共重合体 - Google Patents
ブロック共重合体 Download PDFInfo
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- JP6819949B2 JP6819949B2 JP2019517795A JP2019517795A JP6819949B2 JP 6819949 B2 JP6819949 B2 JP 6819949B2 JP 2019517795 A JP2019517795 A JP 2019517795A JP 2019517795 A JP2019517795 A JP 2019517795A JP 6819949 B2 JP6819949 B2 JP 6819949B2
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- 229920001400 block copolymer Polymers 0.000 title claims description 80
- 229920000642 polymer Polymers 0.000 claims description 100
- 239000000126 substance Substances 0.000 claims description 73
- 125000004432 carbon atom Chemical group C* 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 40
- 125000004429 atom Chemical group 0.000 claims description 31
- 125000000217 alkyl group Chemical group 0.000 claims description 30
- 125000003118 aryl group Chemical group 0.000 claims description 29
- 229920006254 polymer film Polymers 0.000 claims description 27
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 26
- 125000002947 alkylene group Chemical group 0.000 claims description 24
- 239000001257 hydrogen Substances 0.000 claims description 19
- 229910052739 hydrogen Inorganic materials 0.000 claims description 19
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 19
- 125000004419 alkynylene group Chemical group 0.000 claims description 18
- -1 -S (= O) 2- Chemical group 0.000 claims description 17
- 125000005843 halogen group Chemical group 0.000 claims description 17
- 125000004450 alkenylene group Chemical group 0.000 claims description 16
- 125000001424 substituent group Chemical group 0.000 claims description 16
- 229910052717 sulfur Inorganic materials 0.000 claims description 16
- 125000004434 sulfur atom Chemical group 0.000 claims description 14
- 125000003545 alkoxy group Chemical group 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 125000003342 alkenyl group Chemical group 0.000 claims description 12
- 125000000304 alkynyl group Chemical group 0.000 claims description 12
- 125000000732 arylene group Chemical group 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229920005597 polymer membrane Polymers 0.000 claims description 6
- 239000004793 Polystyrene Substances 0.000 claims description 5
- 125000002723 alicyclic group Chemical group 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229920002223 polystyrene Polymers 0.000 claims description 5
- 125000001188 haloalkyl group Chemical group 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 229920000233 poly(alkylene oxides) Polymers 0.000 claims description 2
- 229920000747 poly(lactic acid) Polymers 0.000 claims description 2
- 229920000098 polyolefin Polymers 0.000 claims description 2
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- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 2
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- 239000011593 sulfur Substances 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
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- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 30
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- 238000004519 manufacturing process Methods 0.000 description 14
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 12
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- 229920000428 triblock copolymer Polymers 0.000 description 10
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 9
- 238000009826 distribution Methods 0.000 description 8
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- LVJZCPNIJXVIAT-UHFFFAOYSA-N 1-ethenyl-2,3,4,5,6-pentafluorobenzene Chemical compound FC1=C(F)C(F)=C(C=C)C(F)=C1F LVJZCPNIJXVIAT-UHFFFAOYSA-N 0.000 description 6
- 238000005481 NMR spectroscopy Methods 0.000 description 6
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- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 6
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 6
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- 125000005647 linker group Chemical group 0.000 description 5
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 125000004122 cyclic group Chemical group 0.000 description 4
- 125000001153 fluoro group Chemical group F* 0.000 description 4
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- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- VHYFNPMBLIVWCW-UHFFFAOYSA-N 4-Dimethylaminopyridine Chemical compound CN(C)C1=CC=NC=C1 VHYFNPMBLIVWCW-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- 229920000359 diblock copolymer Polymers 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- 239000000543 intermediate Substances 0.000 description 3
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- PYLWMHQQBFSUBP-UHFFFAOYSA-N monofluorobenzene Chemical compound FC1=CC=CC=C1 PYLWMHQQBFSUBP-UHFFFAOYSA-N 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 239000003505 polymerization initiator Substances 0.000 description 3
- 229910000027 potassium carbonate Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- 238000005160 1H NMR spectroscopy Methods 0.000 description 2
- 239000004342 Benzoyl peroxide Substances 0.000 description 2
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 150000001339 alkali metal compounds Chemical class 0.000 description 2
- 238000010539 anionic addition polymerization reaction Methods 0.000 description 2
- 235000019400 benzoyl peroxide Nutrition 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
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- 229910052731 fluorine Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 239000002073 nanorod Substances 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
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- 150000003839 salts Chemical class 0.000 description 2
- 238000001338 self-assembly Methods 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- PBLNBZIONSLZBU-UHFFFAOYSA-N 1-bromododecane Chemical compound CCCCCCCCCCCCBr PBLNBZIONSLZBU-UHFFFAOYSA-N 0.000 description 1
- 125000005916 2-methylpentyl group Chemical group 0.000 description 1
- 229960000549 4-dimethylaminophenol Drugs 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 241000446313 Lamella Species 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
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- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
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- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
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- ZGRWZUDBZZBJQB-UHFFFAOYSA-N benzenecarbodithioic acid Chemical compound SC(=S)C1=CC=CC=C1 ZGRWZUDBZZBJQB-UHFFFAOYSA-N 0.000 description 1
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- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
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- 150000003498 tellurium compounds Chemical class 0.000 description 1
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Images
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/12—Esters of monohydric alcohols or phenols
- C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
- C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F293/00—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule
- C08F293/005—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/22—Esters containing halogen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/38—Esters containing sulfur
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
- C08F297/026—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type polymerising acrylic acid, methacrylic acid or derivatives thereof
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F299/00—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
- C08F299/02—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
- C08F299/022—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polycondensates with side or terminal unsaturations
- C08F299/024—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polycondensates with side or terminal unsaturations the unsaturation being in acrylic or methacrylic groups
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Description
NMR分析は、三重共鳴5mm探針(probe)を有するVarian Unity Inova(500MHz)分光計を含むNMR分光計を使って常温で遂行した。NMR測定用溶媒(CDCl3)に分析対象物質を約10mg/ml程度の 濃度で希釈させて使用したのであり、化学的移動はppmで表現した。
br=広い信号、s=単一線、d=二重線、dd=二重二重線、t=三重線、dt=二重三重線、q=四重線、p=五重線、m=多重線。
数平均分子量(Mn)および分子量分布はGPC(Gel permeation chromatography)を使って測定した。5mLバイアル(vial)に実施例または比較例のブロック共重合体またはマクロ開始剤などの分析対象物質を入れ、約1mg/mL程度の濃度になるようにTHF(tetrahydro furan)に希釈する。その後、Calibration用標準試料と分析しようとする試料をsyringe filter(pore size:0.45μm)を通じて濾過させた後に測定した。分析プログラムは、Agilent technologies社のChemStationを使用したのであり、試料のelution timeをcalibration curveと比較して重量平均分子量(Mw)および数平均分子量(Mn)をそれぞれ求め、その比率(Mw/Mn)で分子量分布(PDI)を計算した。GPCの測定条件は下記の通りである。
機器:Agilent technologies社の1200 series
コラム:Polymer laboratories社のPLgel mixed B 2個使用
溶媒:THF
コラム温度:35℃
サンプル濃度:1mg/mL、200L注入
標準試料:ポリスチレン(Mp:3900000、723000、316500、52200、31400、7200、3940、485)
下記の化学式Aの化合物(DPM−C12)は次の方式で合成した。250mLフラスコにヒドロキノン(hydroquinone)(10.0g、94.2mmol)および1−ブロモドデカン(1−Bromododecane)(23.5g、94.2mmol)を入れ、100mLのアセトニトリル(acetonitrile)に溶かした後、過量のポタシウムカーボネート(potassium carbonate)を添加し、75℃で約48時間の間窒素条件下で反応させた。反応後に残存するポタシウムカーボネートおよび反応に使ったアセトニトリルも除去した。DCM(dichloromethane)と水の混合溶媒を添加してウォークアップ(work up)し、分離された有機層をMgSO4で脱水した。引き続き、CC(Column Chromatography)でDCM(dichloromethane)で精製して白色固相の中間体を約37%の収得率で得た。
1H−NMR(CDCl3):d6.77(dd、4H);δd4.45(s、1H);d3.89(t、2H);d1.75(p、2H);d1.43(p、2H);d1.33−1.26(m、16H);d0.88(t、3H)。
1H−NMR ( CDCl3):d7.02(dd、2H);δd6.89(dd、2H);d6.32(dt、1H);d5.73(dt、1H);d3.94(t、2H);δd2.05(dd、3H);d1.76(p、2H);δd1.43(p、2H);1.34−1.27(m、16H);d0.88(t、3H)。
製造例1の化合物(DPM−C12)5.0gおよびRAFT(Reversible Addition−Fragmentation chain Transfer)試薬(dCPD−TTC、Didodecyl((2S、2'S)−(ethane−1,2−diylbis(azanediyl))bis(2−cyano−5−oxopentane−5,2−diyl))dicarbonotrithioate)63.9mg、AIBN(Azobisisobutyronitrile)23.7mgおよびアニソール11.87gを25mLフラスコ(Schlenk flask)に入れて窒素雰囲気下常温で30分の間撹はんした後、70℃で4時間の間RAFT(Reversible Addition−Fragmentation chain Transfer)重合反応を遂行した。重合後、反応溶液を抽出溶媒であるメタノール250mLに沈殿させた後、減圧濾過後に乾燥させて、ピンク色のマクロ開始剤を製造した。マクロ開始剤の数平均分子量(Mn)および分子量分布(Mw/Mn)はそれぞれ15.7Kg/molおよび1.22であった。
製造例1の化合物(DPM−C12)5.0gおよびRAFT(Reversible Addition−Fragmentation chain Transfer)試薬(dCPD−TTC、Didodecyl((2S、2'S)−(ethane−1,2−diylbis(azanediyl))bis(2−cyano−5−oxopentane−5,2−diyl))dicarbonotrithioate)61.0mg、AIBN(Azobisisobutyronitrile)22.8mgおよびアニソール11.85gを25mLフラスコ(Schlenk flask)に入れて窒素雰囲気下常温で30分の間撹はんした後、70℃で4時間の間RAFT(Reversible Addition−Fragmentation chain Transfer)重合反応を遂行した。重合後、反応溶液を抽出溶媒であるメタノール250mLに沈殿させた後、減圧濾過後に乾燥させて、ピンク色のマクロ開始剤を製造した。マクロ開始剤の数平均分子量(Mn)および分子量分布(Mw/Mn)はそれぞれ14.1Kg/molおよび1.23であった。
製造例1の化合物(DPM−C12)5.0gおよびRAFT(Reversible Addition−Fragmentation chain Transfer)試薬(CPDB、2−Cyano−2−propyl benzodithioate)106.5mg、AIBN(Azobisisobutyronitrile)39.5mgおよびアニソール12gを25mLフラスコ(Schlenk flask)に入れて窒素雰囲気下常温で30分の間撹はんした後、70℃で4時間の間RAFT(Reversible Addition−Fragmentation chain Transfer)重合反応を遂行した。重合後、反応溶液を抽出溶媒であるメタノール250mLに沈殿させた後、減圧濾過後に乾燥させて、ピンク色のマクロ開始剤を製造した。マクロ開始剤の数平均分子量(Mn)および分子量分布(Mw/Mn)はそれぞれ17.9Kg/molおよび1.27であった。
製造例2で合成されたトリブロック共重合体(A1)を使って自己組織化された高分子膜を形成し、その結果を確認した。具体的には、共重合体をフルオロベンゼンに約0.8重量%の濃度で溶解させ、トレンチパターン(幅150nm、深さ70nm)のあるシリコンウェハー上に約32nmの厚さにスピンコーティングした(コーティング面積:横1.5cm、縦:1.5cm)。その後、常温で約1時間の間乾燥し、再び約180℃の温度で熱的熟成を1時間程度遂行して自己組織化させた。その後、高分子膜に対してSEM(scanning electronmicroscope:SEM)を撮影して自己組織化効率を評価した。図1は実施例1についての結果である。図面から実施例1の場合、適切なラインパターンが形成されたことを確認することができた。
製造例3で合成されたトリブロック共重合体(A2)を使って自己組織化された高分子膜を形成し、その結果を確認した。具体的には、共重合体をフルオロベンゼンに約0.8重量%の濃度で溶解させ、トレンチパターン(幅150nm、深さ70nm)のあるシリコンウェハー上に約32nmの厚さにスピンコーティングした(コーティング面積:横1.5cm、縦:1.5cm)。その後、常温で約1時間の間乾燥し、再び約180℃の温度で熱的熟成を1時間程度遂行して自己組織化させた。その後、高分子膜に対してSEM(scanning electronmicroscope:SEM)を撮影して自己組織化効率を評価した。図2は実施例2についての結果である。図面から実施例1の場合、適切なラインパターンが形成されたことを確認することができた。
製造例4で合成されたジブロック共重合体(A3)を使って自己組織化された高分子膜を形成し、その結果を確認した。具体的には、共重合体をフルオロベンゼンに約0.8重量%の濃度で溶解させ、トレンチパターン(幅150nm、深さ70nm)のあるシリコンウェハー上に約32nmの厚さにスピンコーティングした(コーティング面積:横1.5cm、縦:1.5cm)。その後、常温で約1時間の間乾燥し、再び約180℃の温度で熱的熟成を1時間程度遂行して自己組織化させた。その後、高分子膜に対してSEM(scanning electronmicroscope:SEM)を撮影して自己組織化効率を評価した。図3は比較例1についての結果である。図面から比較例1の場合、実施例1のトリブロック共重合体と類似する分子量特性を有するものであるにも関わらず、適切なパターンが形成されていないため、効果的な相分離がなされていないことを確認することができた。
Claims (15)
- 下記の化学式4で表示される単位を有する高分子セグメントAおよび前記高分子セグメントAとは異なる高分子セグメントBとCを含み、
前記各高分子セグメントがB−A−Cの形態で連結された構造を含む、ブロック共重合体:
[化学式4]
Yは、下記の化学式2で表示され、
[化学式2]
- 鎖は、8個〜20個の鎖形成原子を含む、請求項1に記載のブロック共重合体。
- 鎖形成原子は、炭素、酸素、窒素または硫黄である、請求項1または2に記載のブロック共重合体。
- 鎖形成原子は、炭素または酸素である、請求項1または2に記載のブロック共重合体。
- 鎖は、炭化水素鎖である、請求項1または2に記載のブロック共重合体。
- 環構造は、芳香族環構造または脂環族環構造である、請求項1から5のいずれか一項に記載のブロック共重合体。
- 高分子セグメントBまたはCは、ポリビニルピロリドンセグメント、ポリ乳酸セグメント、ポリビニルピリジンセグメント、ポリスチレンセグメント、ポリアルキレンオキシド セグメント、ポリオレフィンセグメントおよびポリアルキル(メタ)アクリレートセグメントからなる群から選択された一つ以上を含む、請求項1から6のいずれか一項に記載のブロック共重合体。
- 高分子セグメントAの体積分率が0.3〜0.5の範囲内にある、請求項1から10のいずれか一項に記載のブロック共重合体。
- 自己組織化された請求項1から11のいずれか一項に記載されたブロック共重合体を含む、高分子膜。
- ブロック共重合体の数平均分子量が70,000g/mol以下であり、厚さが40nm以下である、請求項12に記載の高分子膜。
- 自己組織化された請求項1から11のいずれか一項に記載されたブロック共重合体を含む高分子膜を基板上に形成することを含む、高分子膜の形成方法。
- 基板および前記基板上に形成されており、自己組織化された請求項1から11のいずれか一項に記載されたブロック共重合体を含む高分子膜を有する積層体で前記ブロック共重合体の高分子セグメントのうちいずれか一つを選択的に除去する過程を含む、パターンの形成方法。
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US9587136B2 (en) | 2013-10-08 | 2017-03-07 | Wisconsin Alumni Research Foundation | Block copolymers with high Flory-Huggins interaction parameters for block copolymer lithography |
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CN105899557B (zh) | 2013-12-06 | 2018-10-26 | 株式会社Lg化学 | 嵌段共聚物 |
US10160822B2 (en) | 2013-12-06 | 2018-12-25 | Lg Chem, Ltd. | Monomer and block copolymer |
KR101770882B1 (ko) * | 2013-12-06 | 2017-08-24 | 주식회사 엘지화학 | 블록 공중합체 |
JP6394042B2 (ja) | 2014-02-13 | 2018-09-26 | Jsr株式会社 | パターン形成用組成物及びパターン形成方法 |
WO2016053007A1 (ko) | 2014-09-30 | 2016-04-07 | 주식회사 엘지화학 | 패턴화 기판의 제조 방법 |
KR101832031B1 (ko) | 2014-09-30 | 2018-02-23 | 주식회사 엘지화학 | 블록 공중합체 |
JP6413888B2 (ja) | 2015-03-30 | 2018-10-31 | Jsr株式会社 | パターン形成用組成物、パターン形成方法及びブロック共重合体 |
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