JP6678815B2 - 導電性ノズルを絶縁して支持するための絶縁部品およびその絶縁部品を検出するためのセンサアセンブリを備えるレーザー加工ヘッド - Google Patents
導電性ノズルを絶縁して支持するための絶縁部品およびその絶縁部品を検出するためのセンサアセンブリを備えるレーザー加工ヘッド Download PDFInfo
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- JP6678815B2 JP6678815B2 JP2019509480A JP2019509480A JP6678815B2 JP 6678815 B2 JP6678815 B2 JP 6678815B2 JP 2019509480 A JP2019509480 A JP 2019509480A JP 2019509480 A JP2019509480 A JP 2019509480A JP 6678815 B2 JP6678815 B2 JP 6678815B2
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- insulating component
- processing head
- laser processing
- insulating
- ferromagnetic material
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- 238000012545 processing Methods 0.000 title claims description 52
- 239000003302 ferromagnetic material Substances 0.000 claims description 22
- 238000009413 insulation Methods 0.000 claims description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 238000012544 monitoring process Methods 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 230000005294 ferromagnetic effect Effects 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000000615 nonconductor Substances 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 claims description 3
- 238000013021 overheating Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 239000006223 plastic coating Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
- B23K26/048—Automatically focusing the laser beam by controlling the distance between laser head and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/0342—Observing magnetic fields related to the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
Claims (6)
- 導電性ノズル(17)をレーザー加工ヘッド(10)において絶縁して支持するための絶縁部品(18)であって、
前記絶縁部品(18)は、
加工レーザービーム路(11)のための中央貫通開口部(20)を有するリング状の電気絶縁体(25)と、
前記絶縁部品(18)を前記レーザー加工ヘッド(10)において支持するために設置された第1の手段と、
導電性ノズル(17)を支持するために設置された第2の手段と、を有し、
前記絶縁部品(18)は、前記レーザー加工ヘッド(10)が備えるセンサにより検出可能に設けられた強磁性体(26)を有する、
絶縁部品。 - 前記電気絶縁体(25)は、内部に前記強磁性体(26)が埋め込まれたセラミック体である、請求項1に記載の絶縁部品。
- 導電性ノズル(17)をレーザー加工ヘッド(10)において絶縁して支持するための絶縁部品(18’)であって、
前記絶縁部品(18’)は、リング状の強磁性体(36)を有し、
前記強磁性体(36)は、
加工レーザービーム路(11)のための中央貫通開口部(20)と、
前記絶縁部品(18’)を前記レーザー加工ヘッド(10)において支持するために設置された第1の手段と、
導電性ノズル(17)を支持するために設置された第2の手段と、を有し、
前記強磁性体(36)は、電気絶縁プラスチック(37)に埋め込まれている、
絶縁部品。 - 前記強磁性体(26,36)は、絶縁部品が取り付けられたレーザー加工ヘッドを過熱から保護することができる程度の低キュリー温度を有する合金からなる、請求項1〜3のいずれか1項に記載の絶縁部品。
- 前記低キュリー温度を有する合金は、ニッケル/コバルト/鉄(NiCoFe)系合金である、請求項4に記載の絶縁部品。
- ハウジング(10)を備えるレーザー加工ヘッドであって、
加工レーザービーム経路(11)が、前記ハウジング(10)を通って導かれており、
前記加工レーザービーム経路(11)が、導電性ノズル(17)を通って加工側に出ており、
前記導電性ノズル(17)が、請求項1〜5のいずれか1項に記載の絶縁部品(18,18’)上に支持されており、
前記絶縁部品(18,18’)が、前記ハウジング(10)上に支持されており、
前記導電性ノズル(17)が、静電容量式距離測定のために距離測定回路(22)の発振回路(24)に電気的に接続されており、
前記絶縁部品(18,18’)の強磁性体(26,36)を検出するためのセンサ(27)が、前記ハウジング(10)に設けられており、
前記センサ(27)が、当該センサにより前記強磁性体(26,36)が検出されなかったときに警告信号を出力する監視回路(29)に接続されている、
レーザー加工ヘッド。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016115415.6 | 2016-08-19 | ||
DE102016115415.6A DE102016115415B4 (de) | 2016-08-19 | 2016-08-19 | Isolationsteil zur isolierten Halterung einer elektrisch leitenden Düse und Laserbearbeitungskopf mit einem Sensor zur Erkennung eines derartigen Isolationsteils |
PCT/EP2017/069227 WO2018033372A1 (de) | 2016-08-19 | 2017-07-28 | Isolationsteil zur isolierten halterung einer elektrisch leitenden düse und laserbearbeitungskopf mit einer sensoranordnung zur erkennung eines derartigen isolationsteils |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019524453A JP2019524453A (ja) | 2019-09-05 |
JP6678815B2 true JP6678815B2 (ja) | 2020-04-08 |
Family
ID=59631732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019509480A Active JP6678815B2 (ja) | 2016-08-19 | 2017-07-28 | 導電性ノズルを絶縁して支持するための絶縁部品およびその絶縁部品を検出するためのセンサアセンブリを備えるレーザー加工ヘッド |
Country Status (7)
Country | Link |
---|---|
US (1) | US11446758B2 (ja) |
EP (1) | EP3500393B1 (ja) |
JP (1) | JP6678815B2 (ja) |
CN (1) | CN109562487B (ja) |
DE (1) | DE102016115415B4 (ja) |
PL (1) | PL3500393T3 (ja) |
WO (1) | WO2018033372A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021058909A (ja) * | 2019-10-07 | 2021-04-15 | 古河機械金属株式会社 | レーザー加工ヘッド及びレーザー加工装置 |
CN112264728B (zh) * | 2020-11-04 | 2024-05-31 | 苏州钋镭自动化科技有限公司 | 一种应用于激光切割头上的新型冷却型陶瓷体 |
KR102459209B1 (ko) | 2021-03-30 | 2022-10-26 | 한국기계연구원 | 자성체 감지를 이용한 미세 노즐 레벨링 장치 및 이를 이용한 프린팅 방법 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1185994A (en) * | 1967-03-20 | 1970-04-02 | Ass Elect Ind | Improvements relating to Tube Welding |
CN87207013U (zh) * | 1987-04-29 | 1988-01-13 | 江苏工学院 | 自动送锡恒温电烙铁 |
DE3719552C1 (en) * | 1987-06-11 | 1988-11-17 | Wolf Woco & Co Franz J | Connection piece |
JPH07109957B2 (ja) * | 1988-06-21 | 1995-11-22 | 松下電器産業株式会社 | 電子部品装着方法 |
DE4035403A1 (de) | 1990-11-07 | 1992-05-14 | Weidmueller C A Gmbh Co | Sensorsystem zur beruehrungslosen abstandsmessung |
CN2097057U (zh) * | 1991-06-24 | 1992-02-26 | 华中理工大学 | 喷嘴与电容传感器一体结构的激光头 |
DE4201640C1 (en) | 1992-01-22 | 1993-02-25 | Weidmueller Interface Gmbh & Co, 4930 Detmold, De | Nozzle for processing workpiece e.g. by laser beam - consists of nozzle body with sensor element of e.g. copper@ attached to insulating body for contactless measurement |
DE4217292C2 (de) * | 1992-05-25 | 1996-07-04 | Precitec Gmbh | Düse zur Bearbeitung eines Werkstücks |
JP3147554B2 (ja) * | 1992-11-30 | 2001-03-19 | 株式会社日平トヤマ | レ−ザ加工機のギャップ量検出装置 |
DE9311281U1 (de) * | 1993-07-28 | 1993-09-23 | Precitec KG, 76571 Gaggenau | Duese zur bearbeitung eines werkstuecks |
DE19906442C2 (de) | 1999-02-16 | 2001-10-18 | Precitec Kg | Verfahren zum Messen des Abstandes zwischen einer Sensorelektrode und einem Werkstück |
DE10121655C1 (de) | 2001-05-03 | 2002-10-31 | Precitec Kg | Laserbearbeitungsanlage und Verfahren zu ihrer Betriebssteuerung |
WO2007073745A1 (de) * | 2005-12-16 | 2007-07-05 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Isolator für eine sensoranordnung einer laserbearbeitungsmaschine |
CN101722966A (zh) * | 2009-12-04 | 2010-06-09 | 孙凯祺 | 铁路轴温超限报警器 |
DE202010004903U1 (de) * | 2010-04-12 | 2010-07-29 | Iht Automation Gmbh & Co. Kg | Schweiß- oder Schneidgerät |
EP2444193A1 (de) * | 2010-10-20 | 2012-04-25 | Bystronic Laser AG | Laserbearbeitungskopf mit einem äusseren Isolationsteil und einem inneren Isolationsteil aus Metall |
DE102010060118A1 (de) | 2010-10-22 | 2012-04-26 | Röhm Gmbh | Stirnseitenmitnehmer |
CN202124028U (zh) * | 2011-06-11 | 2012-01-25 | 冯润昊 | 用于鼓式刹车的温控自动水冷却装置 |
CN202285218U (zh) * | 2011-09-05 | 2012-06-27 | 佛山市高明欧一电子制造有限公司 | 带温度过热安全保护装置的可调温度控制器 |
CN202344128U (zh) * | 2011-11-09 | 2012-07-25 | 昆山科德优激光设备有限公司 | 激光切割机用的绝缘式激光喷嘴 |
WO2013071283A1 (en) * | 2011-11-10 | 2013-05-16 | Ipg Photonics Corporation | Dynamic height adjusting system and method for a head assembly of a laser processing system |
WO2014120176A1 (en) * | 2013-01-31 | 2014-08-07 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with mixing beads |
JP6559454B2 (ja) * | 2015-04-02 | 2019-08-14 | 株式会社東芝 | レーザ溶接ヘッド |
US10238145B2 (en) * | 2015-05-19 | 2019-03-26 | Rai Strategic Holdings, Inc. | Assembly substation for assembling a cartridge for a smoking article |
JP6036938B1 (ja) * | 2015-08-05 | 2016-11-30 | 愛知製鋼株式会社 | 磁気検出装置 |
-
2016
- 2016-08-19 DE DE102016115415.6A patent/DE102016115415B4/de not_active Expired - Fee Related
-
2017
- 2017-07-28 EP EP17752324.8A patent/EP3500393B1/de active Active
- 2017-07-28 US US16/326,155 patent/US11446758B2/en active Active
- 2017-07-28 JP JP2019509480A patent/JP6678815B2/ja active Active
- 2017-07-28 WO PCT/EP2017/069227 patent/WO2018033372A1/de active Search and Examination
- 2017-07-28 CN CN201780050020.1A patent/CN109562487B/zh active Active
- 2017-07-28 PL PL17752324T patent/PL3500393T3/pl unknown
Also Published As
Publication number | Publication date |
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JP2019524453A (ja) | 2019-09-05 |
DE102016115415A1 (de) | 2018-02-22 |
CN109562487A (zh) | 2019-04-02 |
DE102016115415B4 (de) | 2018-04-12 |
US11446758B2 (en) | 2022-09-20 |
WO2018033372A1 (de) | 2018-02-22 |
CN109562487B (zh) | 2022-01-14 |
EP3500393B1 (de) | 2021-04-07 |
EP3500393A1 (de) | 2019-06-26 |
PL3500393T3 (pl) | 2021-08-16 |
US20190202001A1 (en) | 2019-07-04 |
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