JP6509652B2 - 洗浄装置 - Google Patents
洗浄装置 Download PDFInfo
- Publication number
- JP6509652B2 JP6509652B2 JP2015133168A JP2015133168A JP6509652B2 JP 6509652 B2 JP6509652 B2 JP 6509652B2 JP 2015133168 A JP2015133168 A JP 2015133168A JP 2015133168 A JP2015133168 A JP 2015133168A JP 6509652 B2 JP6509652 B2 JP 6509652B2
- Authority
- JP
- Japan
- Prior art keywords
- sponge
- bullet
- wafer
- columnar
- sponge bullet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims description 57
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 210000000078 claw Anatomy 0.000 description 17
- 238000005406 washing Methods 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 238000012856 packing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Description
16 保持テーブル
22 回転手段
26 移動手段
31 洗浄水供給手段
35 スポンジ弾
36 柱状スポンジ
37 ケース部
41 スポンジ弾充填部
42 筒体
51 挟持部
53 可動片
54 爪部
61 スポンジ弾供給手段
W ウエーハ
Claims (1)
- スポンジでウエーハの表面を洗浄する洗浄装置であって、
ウエーハを保持する保持テーブルと、該保持テーブルを回転させる回転手段と、スポンジ弾を直列に装填するスポンジ弾装填部と、該スポンジ弾装填部を該保持テーブルが保持するウエーハの表面に対して接近および離間させる移動手段と、洗浄水を供給する洗浄水供給手段と、を備え、
該スポンジ弾は、柱状スポンジと、該柱状スポンジの先端を露出させて後端を収容するケース部と、を備え、
該スポンジ弾装填部は、該ケース部の外周より大きい内周の筒体と、該筒体から1つの該スポンジ弾の該柱状スポンジを露出させ該ケース部を挟持する挟持部と、を備え、
該挟持部の開閉にて該スポンジ弾を交換可能な事を特徴とする洗浄装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015133168A JP6509652B2 (ja) | 2015-07-02 | 2015-07-02 | 洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015133168A JP6509652B2 (ja) | 2015-07-02 | 2015-07-02 | 洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017017201A JP2017017201A (ja) | 2017-01-19 |
JP6509652B2 true JP6509652B2 (ja) | 2019-05-08 |
Family
ID=57831318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015133168A Active JP6509652B2 (ja) | 2015-07-02 | 2015-07-02 | 洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6509652B2 (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05326474A (ja) * | 1992-05-25 | 1993-12-10 | Hitachi Ltd | 洗浄装置 |
JP2848783B2 (ja) * | 1994-07-04 | 1999-01-20 | 大日本スクリーン製造株式会社 | ブラシ洗浄装置 |
JPH08318226A (ja) * | 1995-05-26 | 1996-12-03 | Enya Syst:Kk | スクラバ洗浄装置 |
JP5592575B1 (ja) * | 2014-01-20 | 2014-09-17 | 株式会社ユニバーサルビュー | 洗浄吸液具及びその製造方法 |
-
2015
- 2015-07-02 JP JP2015133168A patent/JP6509652B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2017017201A (ja) | 2017-01-19 |
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