JP6506873B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP6506873B2
JP6506873B2 JP2018133999A JP2018133999A JP6506873B2 JP 6506873 B2 JP6506873 B2 JP 6506873B2 JP 2018133999 A JP2018133999 A JP 2018133999A JP 2018133999 A JP2018133999 A JP 2018133999A JP 6506873 B2 JP6506873 B2 JP 6506873B2
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insulating layer
layer
oxide semiconductor
electrode
emitting element
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JP2018174155A5 (ja
JP2018174155A (ja
Inventor
山崎 舜平
舜平 山崎
小山 潤
潤 小山
篤志 広瀬
篤志 広瀬
将志 津吹
将志 津吹
耕生 野田
耕生 野田
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株式会社半導体エネルギー研究所
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