JP6496036B2 - 磁気メモリ装置 - Google Patents
磁気メモリ装置 Download PDFInfo
- Publication number
- JP6496036B2 JP6496036B2 JP2017546989A JP2017546989A JP6496036B2 JP 6496036 B2 JP6496036 B2 JP 6496036B2 JP 2017546989 A JP2017546989 A JP 2017546989A JP 2017546989 A JP2017546989 A JP 2017546989A JP 6496036 B2 JP6496036 B2 JP 6496036B2
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- Prior art keywords
- magnetic memory
- memory chip
- magnetic
- portions
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
(実施形態)
以下の実施形態は、磁気抵抗効果素子に印加される磁界の強度を、磁気メモリチップを取り囲む磁性層(磁気シールド層)により制御するための技術を提案する。
図1乃至図3は、磁気メモリ装置の第1の実施形態を示している。図1は、磁気メモリ装置の斜視図であり、図2は、図1のII−II線に沿う断面図であり、図3は、図1のIII−III線に沿う断面図である。
図14乃至図16は、磁気メモリ装置の第2の実施形態を示している。図14は、磁気メモリ装置の斜視図であり、図15は、図14のXV−XV線に沿う断面図であり、図16は、図14のXVI−XVI線に沿う断面図である。
図17乃至図19は、磁気メモリ装置の第3の実施形態を示している。図17は、磁気メモリ装置の斜視図であり、図18は、図17のXVIII−XVIII線に沿う断面図であり、図19は、図17のXIX−XIX線に沿う断面図である。
図20乃至図22は、磁気メモリ装置の第4の実施形態を示している。図20は、磁気メモリ装置の斜視図であり、図21は、図20のXXI−XXI線に沿う断面図であり、図22は、図20のXXII−XXII線に沿う断面図である。
図23乃至図25は、磁気メモリ装置の第5の実施形態を示している。図23は、磁気メモリ装置の斜視図であり、図24は、図23のXXIV−XXIV線に沿う断面図であり、図25は、図23のXXV−XXV線に沿う断面図である。
図26乃至図28は、磁気メモリ装置の第6の実施形態を示している。図26は、磁気メモリ装置の斜視図であり、図27は、図26のXXVII−XXVII線に沿う断面図であり、図28は、図26のXXVIII−XXVIII線に沿う断面図である。
図29乃至図31は、磁気メモリ装置の第7の実施形態を示している。図29は、磁気メモリ装置の斜視図であり、図30は、図29のXXX−XXX線に沿う断面図であり、図31は、図29のXXXI−XXXI線に沿う断面図である。
図32乃至図34は、磁気メモリ装置の第8の実施形態を示している。図32は、磁気メモリ装置の斜視図であり、図33は、図32のXXXIII−XXXIII線に沿う断面図であり、図34は、図33のXXXIV−XXXIV線に沿う断面図である。
図35乃至図37は、磁気メモリ装置の第9の実施形態を示している。図35は、磁気メモリ装置の斜視図であり、図36は、図35のXXXVI−XXXVI線に沿う断面図であり、図37は、図35のXXXVII−XXXVII線に沿う断面図である。
図38乃至図40は、磁気メモリ装置の第10の実施形態を示している。図38は、磁気メモリ装置の斜視図であり、図39は、図38のXXXIX−XXXIX線に沿う断面図であり、図40は、図38のXL−XL線に沿う断面図である。
図41乃至図43は、磁気メモリ装置の第11の実施形態を示している。図41は、磁気メモリ装置の斜視図であり、図42は、図41のXLII−XLII線に沿う断面図であり、図43は、図41のXLIII−XLIII線に沿う断面図である。
図44乃至図46は、磁気メモリ装置の第12の実施形態を示している。図44は、磁気メモリ装置の斜視図であり、図45は、図44のXLV−XLV線に沿う断面図であり、図46は、図44のXLVI−XLVI線に沿う断面図である。
図47乃至図49は、磁気メモリ装置の第13の実施形態を示している。図47は、磁気メモリ装置の斜視図であり、図48は、図47のXLVIII−XLVIII線に沿う断面図であり、図49は、図47のXLIX−XLIX線に沿う断面図である。
図50乃至図52は、磁気メモリ装置の第14の実施形態を示している。図50は、磁気メモリ装置の斜視図であり、図51は、図50のLI−LI線に沿う断面図であり、図52は、図50のLII−LII線に沿う断面図である。
(適用例)
上述の各実施形態において、磁気メモリチップが磁気ランダムアクセスメモリ(MRAM)であるときの適用例を説明する。
(むすび)
以上、実施形態によれば、磁気メモリチップを外部磁界から有効に遮蔽することができる。また、磁気シールド層としての磁性層内に設けられる磁石の種類やサイズを変えなくても、磁気抵抗効果素子の磁化反転特性のシフトを制御し、磁気メモリ装置の性能を向上させることができる。
Claims (19)
- 磁気抵抗効果素子を有する磁気メモリチップ;
互いにスペースを空けて分離されて配置されている第1及び第2の部分を有している磁性層、前記第1の部分は前記磁気メモリチップの第1の主面を覆うこと、前記第2の部分は前記磁気メモリチップの前記第1の主面に対向している第2の主面を覆うこと;
前記磁性層が搭載された回路基板;及び
前記第1及び第2の主面に平行な第1の方向において、前記磁気メモリチップと前記回路基板を接続しているボンディングワイヤを具備する磁気メモリ装置であって、
前記第1の部分は前記第2の部分よりも前記回路基板に近く、
前記第1の方向において、前記第1及び第2の部分の各々は前記磁気メモリチップのサイズよりも大きなサイズを有し、
前記第1及び第2の主面に平行かつ前記第1の方向に直交する第2の方向において、前記第1及び第2の部分の一つは前記磁気メモリチップの複数の側面を覆い、
前記第2の方向において前記第1及び第2の部分はそれぞれ第1及び第2の端を有し、前記第1及び第2の部分間のスペースは前記第1及び第2の端において最も狭い磁気メモリ装置。 - 請求項1の装置において、前記第2の部分は前記磁気メモリチップの前記複数の側面を覆う。
- 請求項2の装置において、前記磁気メモリチップと前記第2の部分との間のスペーサをさらに具備していること。
- 請求項2の装置において、前記磁気メモリチップの前記第1及び第2の主面の一つに隣接している永久磁石をさらに具備していること。
- 請求項4の装置において、前記磁気メモリチップと前記第2の部分との間のスペーサをさらに具備していること、前記永久磁石は前記第1の部分上に設けられており、及び、前記磁気メモリチップは前記永久磁石上に設けられている。
- 請求項4の装置において、前記磁気メモリチップと前記第2の部分との間のスペーサをさらに具備していること、前記磁気メモリチップは前記第1の部分上に設けられており、及び、前記永久磁石は前記スペーサと前記第2の部分との間に設けられている。
- 請求項4の装置において、前記磁気メモリチップは前記第1の部分上に設けられており、及び、前記永久磁石は前記磁気メモリチップと前記第2の部分との間に設けられている。
- 請求項1の装置において、前記第1の部分は前記磁気メモリチップの前記複数の側面を覆う。
- 請求項8の装置において、前記磁気メモリチップと前記第2の部分との間のスペーサをさらに具備していること。
- 請求項8の装置において、前記磁気メモリチップの前記第1及び第2の主面の一つに隣接している永久磁石をさらに具備していること。
- 請求項10の装置において、前記磁気メモリチップと前記第2の部分との間のスペーサをさらに具備していること、前記永久磁石は前記第1の部分上に設けられており、及び、前記磁気メモリチップは前記永久磁石上に設けられている。
- 請求項10の装置において、前記磁気メモリチップと前記第2の部分との間のスペーサをさらに具備していること、前記磁気メモリチップは前記第1の部分上に設けられており、及び、前記永久磁石は前記スペーサと前記第2の部分との間に設けられている。
- 請求項10の装置において、前記磁気メモリチップは前記第1の部分上に設けられており、及び、前記永久磁石は前記磁気メモリチップと前記第2の部分との間に設けられている。
- 磁気抵抗効果素子を有する磁気メモリチップ;
互いにスペースを空けて配置されている第1及び第2の部分を有している磁性層、前記第1の部分は前記磁気メモリチップの第1の主面を覆うこと、前記第2の部分は前記磁気メモリチップの前記第1の主面に対向している第2の主面を覆うこと;
前記磁性層が搭載された回路基板;及び
前記第1及び第2の主面に平行な第1の方向において、前記磁気メモリチップと前記回路基板を接続しているボンディングワイヤを具備する磁気メモリ装置であって、
前記第1の部分は前記第2の部分よりも前記回路基板に近く、
前記第1の方向において、前記第1及び第2の部分の各々は前記磁気メモリチップのサイズよりも大きなサイズを有し、及び
前記第1及び第2の主面に平行かつ前記第1の方向に直交する第2の方向において、前記第1及び第2の部分の一つは前記磁気メモリチップの複数の側面を覆い、
前記第1の方向において、前記第1及び第2の部分は前記磁気メモリチップの前記複数の側面を覆わない磁気メモリ装置。 - 請求項1の装置において、前記回路基板上の樹脂をさらに具備していること、前記樹脂は前記磁性層を覆っていること。
- 請求項1の装置において、前記回路基板は前記ボンディングワイヤを介して前記磁気メモリチップに接続された外部端子を含む。
- 請求項1の装置において、前記磁気抵抗効果素子は前記第1及び第2の主面に垂直な方向に磁化を有する。
- 磁気抵抗効果素子を有する磁気メモリチップ;
互いにスペースを空けて分離されて配置されている第1及び第2の部分を有している磁性層、前記第1の部分は前記磁気メモリチップの第1の主面を覆うこと、前記第2の部分は前記磁気メモリチップの前記第1の主面に対向している第2の主面を覆うこと;
前記磁性層が搭載された回路基板;及び
前記第1及び第2の主面に平行な第1の方向において、前記磁気メモリチップと前記回路基板を接続しているボンディングワイヤを具備する磁気メモリ装置であって、
前記第1の部分は前記第2の部分よりも前記回路基板に近く、
前記第1の方向において、前記第1の部分は前記磁気メモリチップのサイズよりも大きなサイズを有し、及び
前記第1の方向において、前記第2の部分は前記磁気メモリチップのサイズよりも小さなサイズを有し、
前記第2の方向において前記第1及び第2の部分はそれぞれ第1及び第2の端を有し、及び、前記第2の方向において前記第1及び第2の部分は対向する磁気メモリ装置。 - 磁気抵抗効果素子を有する磁気メモリチップ;
互いにスペースを空けて配置されている第1及び第2の部分を有している磁性層、前記第1の部分は前記磁気メモリチップの第1の主面を覆うこと、前記第2の部分は前記磁気メモリチップの前記第1の主面に対向している第2の主面を覆うこと;
前記磁性層が搭載された回路基板;
前記第1及び第2の主面に平行な第1の方向において、前記磁気メモリチップと前記回路基板を接続しているボンディングワイヤ;及び
前記磁気メモリチップの前記第1及び第2の主面の一つに隣接し、前記第1の主面と前記第1の部分との間に、又は、前記第2の主面と前記第2の部分との間に配置された永久磁石を具備する磁気メモリ装置であって、
前記第1の方向において前記第1及び第2の部分の各々は前記磁気メモリチップのサイズよりも大きなサイズを有する。
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US11276649B2 (en) * | 2019-06-28 | 2022-03-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Devices and methods having magnetic shielding layer |
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Family Cites Families (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0226198U (ja) | 1988-08-08 | 1990-02-21 | ||
JPH05120865A (ja) | 1991-10-29 | 1993-05-18 | Hitachi Ltd | ブロツホラインメモリ装置 |
JPH06209054A (ja) * | 1993-01-08 | 1994-07-26 | Mitsubishi Electric Corp | 半導体装置 |
US5902690A (en) * | 1997-02-25 | 1999-05-11 | Motorola, Inc. | Stray magnetic shielding for a non-volatile MRAM |
JP2001250208A (ja) * | 2000-03-02 | 2001-09-14 | Sony Corp | 磁気抵抗効果素子 |
JP2002025015A (ja) * | 2000-07-06 | 2002-01-25 | Sony Corp | 磁気トンネル効果型磁気ヘッド及びその製造方法 |
US6717241B1 (en) * | 2000-08-31 | 2004-04-06 | Micron Technology, Inc. | Magnetic shielding for integrated circuits |
US6515352B1 (en) * | 2000-09-25 | 2003-02-04 | Micron Technology, Inc. | Shielding arrangement to protect a circuit from stray magnetic fields |
JP4818519B2 (ja) * | 2001-02-06 | 2011-11-16 | ルネサスエレクトロニクス株式会社 | 磁気記憶装置 |
US20030099069A1 (en) * | 2001-10-10 | 2003-05-29 | Tdk Corporation | Magnetic head, method of manufacturing same, and head suspension assembly |
JP4157707B2 (ja) * | 2002-01-16 | 2008-10-01 | 株式会社東芝 | 磁気メモリ |
JP2004047656A (ja) * | 2002-07-11 | 2004-02-12 | Sony Corp | 磁気不揮発性メモリ素子およびその製造方法 |
US6838740B2 (en) * | 2002-09-27 | 2005-01-04 | Grandis, Inc. | Thermally stable magnetic elements utilizing spin transfer and an MRAM device using the magnetic element |
JP2004207322A (ja) * | 2002-12-24 | 2004-07-22 | Sony Corp | 磁気メモリ装置 |
US6943993B2 (en) * | 2003-02-11 | 2005-09-13 | Western Digital (Fremont), Inc. | Magnetic recording head with a side shield structure for controlling side reading of thin film read sensor |
JP2005158985A (ja) | 2003-11-26 | 2005-06-16 | Sony Corp | 磁気メモリ装置の実装構造及び実装基板 |
JP2005294376A (ja) * | 2004-03-31 | 2005-10-20 | Toshiba Corp | 磁気記録素子及び磁気メモリ |
JP2006032464A (ja) * | 2004-07-13 | 2006-02-02 | Toshiba Corp | 磁気ランダムアクセスメモリ |
JP4460965B2 (ja) * | 2004-07-22 | 2010-05-12 | 株式会社東芝 | 磁気ランダムアクセスメモリ |
WO2007040167A1 (ja) * | 2005-10-03 | 2007-04-12 | Nec Corporation | 磁気ランダムアクセスメモリ |
JP5068016B2 (ja) * | 2005-11-30 | 2012-11-07 | ルネサスエレクトロニクス株式会社 | 不揮発性記憶装置 |
JP2007273493A (ja) * | 2006-03-30 | 2007-10-18 | Fujitsu Ltd | 磁気メモリ装置及びその製造方法 |
US7795708B2 (en) * | 2006-06-02 | 2010-09-14 | Honeywell International Inc. | Multilayer structures for magnetic shielding |
US8269319B2 (en) * | 2006-10-13 | 2012-09-18 | Tessera, Inc. | Collective and synergistic MRAM shields |
FR2914482B1 (fr) * | 2007-03-29 | 2009-05-29 | Commissariat Energie Atomique | Memoire magnetique a jonction tunnel magnetique |
US7772580B2 (en) * | 2007-08-10 | 2010-08-10 | Qimonda Ag | Integrated circuit having a cell with a resistivity changing layer |
TWI339432B (en) * | 2007-08-13 | 2011-03-21 | Ind Tech Res Inst | Magnetic shielding package structure of a magnetic memory device |
JP5382348B2 (ja) * | 2007-11-05 | 2014-01-08 | 日本電気株式会社 | 磁気抵抗効果素子、及び磁気ランダムアクセスメモリ |
US8482966B2 (en) * | 2008-09-24 | 2013-07-09 | Qualcomm Incorporated | Magnetic element utilizing protective sidewall passivation |
JP5425461B2 (ja) * | 2008-12-26 | 2014-02-26 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US8587993B2 (en) * | 2009-03-02 | 2013-11-19 | Qualcomm Incorporated | Reducing source loading effect in spin torque transfer magnetoresisitive random access memory (STT-MRAM) |
EP2415365B1 (en) * | 2009-03-31 | 2015-07-01 | YKK Corporation | Side release buckle |
JP5470602B2 (ja) * | 2009-04-01 | 2014-04-16 | ルネサスエレクトロニクス株式会社 | 磁気記憶装置 |
US8779538B2 (en) * | 2009-08-10 | 2014-07-15 | Samsung Electronics Co., Ltd. | Magnetic tunneling junction seed, capping, and spacer layer materials |
US8159866B2 (en) * | 2009-10-30 | 2012-04-17 | Grandis, Inc. | Method and system for providing dual magnetic tunneling junctions usable in spin transfer torque magnetic memories |
JP5354376B2 (ja) * | 2009-11-27 | 2013-11-27 | 大日本印刷株式会社 | 半導体装置および半導体装置の製造方法 |
WO2011081197A1 (ja) * | 2009-12-28 | 2011-07-07 | Tdk株式会社 | 磁界検出装置及び電流センサ |
JP5483281B2 (ja) * | 2010-03-31 | 2014-05-07 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置アセンブリ |
US8772886B2 (en) * | 2010-07-26 | 2014-07-08 | Avalanche Technology, Inc. | Spin transfer torque magnetic random access memory (STTMRAM) having graded synthetic free layer |
US8557610B2 (en) * | 2011-02-14 | 2013-10-15 | Qualcomm Incorporated | Methods of integrated shielding into MTJ device for MRAM |
US8466539B2 (en) * | 2011-02-23 | 2013-06-18 | Freescale Semiconductor Inc. | MRAM device and method of assembling same |
JP5542761B2 (ja) * | 2011-09-20 | 2014-07-09 | 株式会社東芝 | 磁気抵抗効果素子およびその製造方法 |
JP5475819B2 (ja) * | 2012-03-20 | 2014-04-16 | 株式会社東芝 | 不揮発性記憶装置 |
JP5829562B2 (ja) * | 2012-03-28 | 2015-12-09 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2013232497A (ja) * | 2012-04-27 | 2013-11-14 | Renesas Electronics Corp | 磁性体装置及びその製造方法 |
JP5813596B2 (ja) * | 2012-08-10 | 2015-11-17 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP5383882B1 (ja) * | 2012-09-26 | 2014-01-08 | 株式会社東芝 | 不揮発性記憶装置 |
US20140110804A1 (en) * | 2012-10-18 | 2014-04-24 | Agency For Science, Technology And Research | Magnetoresistive device and method for forming the same |
US9070692B2 (en) * | 2013-01-12 | 2015-06-30 | Avalanche Technology, Inc. | Shields for magnetic memory chip packages |
US9460768B2 (en) * | 2013-03-14 | 2016-10-04 | Intel Corporation | Cross point array MRAM having spin hall MTJ devices |
US20150008548A1 (en) | 2013-07-03 | 2015-01-08 | Kabushiki Kaisha Toshiba | Magnetic memory device |
US9147833B2 (en) * | 2013-07-05 | 2015-09-29 | Headway Technologies, Inc. | Hybridized oxide capping layer for perpendicular magnetic anisotropy |
JP6010005B2 (ja) * | 2013-09-09 | 2016-10-19 | 株式会社東芝 | 半導体装置及びその製造方法 |
US9041130B2 (en) | 2013-09-09 | 2015-05-26 | Kabushiki Kaisha Toshiba | Magnetic memory device |
JP6074345B2 (ja) | 2013-09-24 | 2017-02-01 | 株式会社東芝 | 半導体装置及びその製造方法 |
US9564403B2 (en) * | 2013-09-27 | 2017-02-07 | Infineon Technologies Ag | Magnetic shielding of perpendicular STT-MRAM |
JP6233285B2 (ja) * | 2014-11-28 | 2017-11-22 | 三菱電機株式会社 | 半導体モジュール、電力変換装置 |
US9576636B1 (en) * | 2015-04-03 | 2017-02-21 | Everspin Technologies, Inc. | Magnetic memory having ROM-like storage and method therefore |
KR102354370B1 (ko) * | 2015-04-29 | 2022-01-21 | 삼성전자주식회사 | 쉴딩 구조물을 포함하는 자기 저항 칩 패키지 |
KR102437673B1 (ko) * | 2015-09-09 | 2022-08-26 | 삼성전자주식회사 | 반도체 장치 |
US9653182B1 (en) * | 2016-03-01 | 2017-05-16 | Kabushiki Kaisha Toshiba | Testing method, manufacturing method, and testing device of memory device |
-
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