JP6418897B2 - Actuator and pump using the same - Google Patents

Actuator and pump using the same Download PDF

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JP6418897B2
JP6418897B2 JP2014220395A JP2014220395A JP6418897B2 JP 6418897 B2 JP6418897 B2 JP 6418897B2 JP 2014220395 A JP2014220395 A JP 2014220395A JP 2014220395 A JP2014220395 A JP 2014220395A JP 6418897 B2 JP6418897 B2 JP 6418897B2
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coordination polymer
porous coordination
fluid
heater
actuator
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JP2016089847A (en
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和之 藤江
和之 藤江
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京セラ株式会社
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  The present invention relates to an actuator and a pump using the actuator.

  Actuators are used for opening and closing valves, driving machines, and transferring fluids. Various types of actuators such as electromagnetic, electrostatic, piezoelectric, and hydraulic are proposed and put to practical use.

  In recent years, with miniaturization of devices, actuators are also required to be miniaturized. As actuators that can be easily reduced in size, piezoelectric actuators, electrostatic actuators (for example, see Patent Document 1), actuators using a hydrogen storage alloy (for example, see Patent Document 2), and vaporization-condensation of a working medium. An actuator using volume change (for example, refer to Patent Document 3) and the like.

JP 2003-211133 A JP-A-61-192906 JP-A-6-159228

  However, piezoelectric actuators and electrostatic actuators have a problem that the force that can be generated is small and the displacement is extremely small, so that the application of the actuator is limited.

  An actuator using a hydrogen storage alloy can generate a large force and obtain a large displacement, but since hydrogen gas with small molecules is used, the hydrogen gas easily leaks outside the actuator, so it can be used for a long time. There was a problem of being unable to withstand.

  The actuator using the volume change of gas / liquid is easy to miniaturize and can generate large force and large displacement, but the substance evaporated by heating the heater is condensed in the part other than the heater in the actuator, and the liquid As a result, the volume does not expand sufficiently, that is, a large force cannot be generated and a large displacement cannot be maintained, and there is a problem that it cannot withstand long-term use.

  The present invention has been made in view of the above-described problems, and has an object to provide an actuator that can be easily downsized, can withstand long-term use, and can generate a large force and a large displacement, and a pump using the actuator. To do.

The actuator of the present invention includes a housing, a heater, and a movable portion, and an airtight chamber is configured by at least the housing and the movable portion, and a porous coordination polymer is formed inside the airtight chamber. And at least part of the inner wall of the hermetic chamber is covered with a coating layer of the porous coordination polymer, and the porous coordination polymer of the coating layer and the coating layer And the inner wall covered with the same contains the same metal element, and the fluid contains a gas having a molecular weight of 17 or more.
In addition, the actuator of the present invention includes a housing, a heater, and a movable portion, and an airtight chamber is configured by at least the housing and the movable portion, and the heater, A porous coordination polymer and a fluid, wherein the fluid contains a gas having a molecular weight of 17 or more, and at least a part of the surface of the heater is coated with the coating layer of the porous coordination polymer. In addition, the porous coordination polymer of the coating layer and the surface of the heater coated with the coating layer contain the same metal element.

  The pump of the present invention includes the above-described actuator.

  According to the present invention, it is possible to provide an actuator that can be easily miniaturized, can withstand long-term use, and can generate a large force and a large displacement, and a pump using the actuator.

It is sectional drawing which shows typically the actuator which concerns on one Embodiment of this invention. It is sectional drawing which shows typically the actuator which concerns on other embodiment of this invention. It is sectional drawing which shows typically an example of suitable arrangement | positioning of a porous coordination polymer. It is sectional drawing which shows typically an example of suitable arrangement | positioning of a heater and a porous coordination polymer. It is sectional drawing which shows typically the other example of suitable arrangement | positioning of a heater and a porous coordination polymer. It is sectional drawing which shows typically the pump which concerns on one Embodiment of this invention.

  Embodiments of the present invention will be specifically described with reference to the drawings.

  As shown in FIG. 1, an actuator 100 according to an embodiment of the present invention includes a housing 1, a heater 2, and a movable portion 3, and an airtight chamber 4 is formed by the housing 1 and the movable portion 3. It is configured. A porous coordination polymer 5 and a fluid 6 are sealed inside the hermetic chamber 4. In this embodiment, the hermetic chamber 4 is formed by a cylindrical recess and a piston-like movable portion 3 inserted into the recess, and the inner wall of the recess and the side surface of the movable portion 3 are made of a lubricant such as grease (see FIG. (Not shown). Moreover, in this embodiment, the heater 2 is arrange | positioned so that it may contact | adhere to the surface on the opposite side to the bottom face of the recessed part of the housing | casing 1. FIG. Each of the drawings used for explaining the present invention schematically shows a cross section of the actuator 100 parallel to the direction in which the movable part 3 is displaced.

  The porous coordination polymer 5 is also called MOF (Metal-Organic Framework) or PCP (Porous Coordination Polymer), and has a large number of uniform micropores or mesoporous regions derived from the crystal structure. A fluid 6 having a volume much larger than its own volume can be adsorbed.

  The porous coordination polymer 5 can adsorb all or part of the fluid 6 existing inside the hermetic chamber 4 and can desorb the fluid 6 adsorbed by heating.

  In the actuator 100 of the present embodiment, the porous coordination polymer 5 is heated through the bottom of the casing 1 due to the heat generated by the heater 2, and the fluid 6 adsorbed on the porous coordination polymer 5 is desorbed. To do. As a result, the pressure inside the hermetic chamber 4 increases, and the movable part 3 is displaced in the direction of increasing the volume of the hermetic chamber 4.

  On the other hand, when the heating of the heater 2 is stopped, the porous coordination polymer 5 is cooled, and the fluid 6 is adsorbed by the porous coordination polymer 5. As a result, the pressure inside the hermetic chamber 4 decreases, and the movable part 3 is displaced in a direction to reduce the volume of the hermetic chamber 4.

  Since the adsorption / desorption of the fluid 6 to / from the porous coordination polymer 5 is reversible, the operation of the movable portion 3 is also reversible, and the actuator 100 can realize a stable operation.

Thus, the actuator 100 changes the volume of the fluid 6 existing inside the hermetic chamber 4 and displaces the movable part 3 by adsorbing and desorbing the fluid 6 to and from the porous coordination polymer 5. It works by. Since the porous coordination polymer 5 can adsorb the fluid 6 having a volume much larger than its own volume, the fluid 6 adsorbed on the porous coordination polymer 5 is desorbed by heating, so that the fluid 6 The volume is greatly expanded, and the movable part 3 constituting a part of the hermetic chamber 4 can be greatly displaced. Therefore, the amount of the porous coordination polymer 5 necessary for the operation of the actuator 100 may be small, and the miniaturization can be easily realized.

  In addition, since the porous coordination polymer 5 can reversibly adsorb and desorb the fluid 6, the actuator 100 according to the present embodiment can maintain a large amount of displacement even when used repeatedly. The actuator 100 can be used repeatedly while maintaining a large amount of displacement from the viewpoint that water, hydrocarbon, or the like having a relatively large molecular weight and a low possibility of leakage can be used as the fluid 6.

  The fluid 6 is a fluid or gas in the operating environment of the actuator 100 (operating temperature, pressure, hereinafter, sometimes simply referred to as operating environment). It is particularly desirable to use the fluid 6 that is a gas in the operating environment. As a result, since the gas is not condensed (liquefied) or condensed during the operation of the actuator 100, a more stable displacement amount can be obtained.

  Here, in the operating environment of the actuator 100, if the fluid 6 is less than the amount to be condensed in the airtight chamber 4, the fluid 6 is regarded as a gas. That is, if the vapor pressure of the fluid 6 in the hermetic chamber 4 is an amount that does not reach the saturated vapor pressure, the fluid 6 is a gas.

  As the fluid 6, water having a molecular weight of 17 or more, carbon dioxide, carbon monoxide, ammonia, methanol, ethanol, acetone, toluene, benzene, hexane and the like are desirable. When a fluid having a molecular weight smaller than 17 is used as the fluid 6, the fluid 6 is likely to leak from the hermetic chamber 4, and there is a concern that the amount of displacement may be reduced when it is used repeatedly.

  Since water and carbon dioxide have polarity, it is desirable because the amount of adsorption to the porous coordination polymer 5 can be increased and the displacement of the actuator 100 can be increased. Furthermore, water and carbon dioxide are desirable because they are nonflammable and harmless, and have high safety.

  The type of the fluid 6 can be identified by collecting the fluid 6 in the hermetic chamber 4 with a micro syringe or the like and performing gas chromatography or the like.

As the porous coordination polymer 5 used for the actuator 100, for example,
Zn 4 O (BDC) 3 (hereinafter referred to as MOF-5)
Zn (MeIM) 2 (hereinafter referred to as ZIF-8)
M (OH) (BDC) (M is at least one selected from Al, Cr, and Fe. Hereinafter, referred to as M-MIL-53)
Al (OH) (fumarate)
VO (BDC) (hereinafter referred to as V-MIL-47)
M 3 O (fumarate) 3 X (M is at least one selected from Fe, Cr, Al. X is a monovalent anion such as F , OH −, and hereinafter referred to as M-MIL-88A)
M 3 O (BDC) 3 X (M is at least one selected from Fe, Cr, Al. X is a monovalent anion such as F , OH −, and hereinafter referred to as M-MIL-88B)
M 3 O (2,6-NDC) 3 X (M is at least one selected from Fe, Cr, Al. X is a monovalent anion such as F , OH −, etc., hereinafter referred to as M-MIL-88C) )
M 3 O (BPDC) 3 X (M is at least one selected from Fe, Cr, Al. X is a monovalent anion such as F , OH −, and hereinafter referred to as M-MIL-88D)
M ′ 2 (DOBDC) (M ′ is at least one selected from Zn, Fe, Ni, Co, Mg, and Cu. Hereinafter, it is described as M′-MOF-74.)
Al (OH) (1,4-NDC)
Cr 3 OX (BDC) 3 (X is a monovalent anion such as F , OH −, and hereinafter referred to as Cr-MIL-101.)
Al 8 (OH) 15 (BTC) 3 (hereinafter referred to as Al-MIL-110)
Cu 3 (BTC) 2 (hereinafter referred to as HKUST-1)
Zr 6 O 4 (OH) 4 (fumarate) 6 or Zr 6 O 6 (fumarate) 6 (hereinafter referred to as MOF-801)
Zr 6 O 4 (OH) 4 (BDC) 6 or Zr 6 O 6 (BDC) 6 ( hereinafter referred to as UiO-66.)
Zr 6 O 4 (OH) 4 (BPDC) 6 or Zr 6 O 6 (BPDC) 6 ( hereinafter referred to as UiO-67.)
Zr 6 O 4 (OH) 4 (TPDC) 6 or Zr 6 O 6 (TPDC) 6 ( hereinafter referred to as UiO-68.)
ZrO (BDC) (hereinafter referred to as MIL-140)
Zn 4 O (BTB) 2 (hereinafter referred to as MOF-177)
Etc.

The abbreviations used in the above chemical formula are:
H 2 (BDC): terephthalic acid H (MeIM): 2-methylimidazole H 2 (fumarate): fumaric acid H 4 (DOBDC): 2,5-dihydroxyterephthalic acid H 2 (1,4-NDC): 1, 4-naphthalenedicarboxylic acid H 2 (2,6-NDC): 2,6-naphthalenedicarboxylic acid H 3 (BTC): 1,3,5-benzenetricarboxylic acid H 2 (BPDC): 4,4′-biphenyldicarboxylic acid Acid H 2 (TPDC): 4,4 ″ -p-terphenyldicarboxylic acid H 3 (BTB): represents a residue in which H + is dissociated in 1,3,5-tris (4-carboxyphenyl) benzene .

  The porous coordination polymer 5 is a crystalline substance having a main chain in which an organic ligand is coordinated to a metal ion. The porous coordination polymer 5 has a large number of micropores or mesopore region pores derived from the crystal structure. Since the pores are formed by a network having a crystal structure, the diameter of the pores and the interaction with adsorbed molecules are uniform. That is, the interaction between the fluid 6 and the inner wall of the pore of the porous coordination polymer 5 is uniform, and the number of molecules adsorbed per pore is also uniform, so that the porous coordination having a specific adsorption ability The polymer 5 can be produced with good reproducibility.

The porous coordination polymer 5 is composed of a combination of a metal ion and an organic ligand, and there are many types. For example, in the porous coordination polymer 5 as described above, all or part of the organic ligands that are constituent elements thereof may be substituted with other ligands (for example, terephthalic acid 2 -Substitution with hydroxyterephthalic acid, etc.). Further, it may have a structure in which a part of the ligand is missing. Examples of the functional group include alkyl groups such as —CH 3 , —OH, —COOH, —NH 2 , —SO 3 H, —SO 3 Li, —SO 3 Na, and the like. For example, all or part of the metal ions constituting the porous coordination polymer 5 described above may be substituted with other metal ions. The valence of the metal ion is desirably the same as that described above.

  Thus, since the porous coordination polymer 5 has many types and high designability, the porous coordination polymer 5 having an appropriate interaction can be selected or designed according to the type of the fluid 6. Is possible.

  The kind of the porous coordination polymer 5 can be identified by a diffraction pattern obtained by X-ray diffraction (XRD) measurement. Further, the type of the porous coordination polymer 5 may be identified by various spectroscopic methods such as infrared spectroscopy (IR) and nuclear magnetic resonance spectroscopy (NMR) and elemental analysis. In addition, it can also identify with the pore diameter distribution calculated | required by the gas adsorption measurement, and the specific surface area calculated | required by BET method.

  Examples of the porous material that can adsorb / desorb the fluid 6 include zeolite and mesoporous silica in addition to the porous coordination polymer 5. For example, zeolite is used instead of the porous coordination polymer 5. In this case, since the zeolite has a large interaction with the fluid 6, it is necessary to heat it to a higher temperature in order to desorb the fluid 6. Therefore, when zeolite is used, the energy efficiency is lower than that of the actuator 100 using the porous coordination polymer 5. In addition, there is a concern that the periphery of the actuator 100 may be unnecessarily heated, and in that case, energy efficiency further decreases.

  Further, mesoporous silica has a weak interaction with the fluid 6, and the amount of adsorption of the fluid 6 is very small compared to the porous coordination polymer 5. Therefore, when mesoporous silica is used, the amount of displacement is very small compared to the actuator 100 using the porous coordination polymer 5.

  An example of a particularly desirable combination of the porous coordination polymer 5 and the fluid 6 is a combination of the porous coordination polymer 5 having water absorption and the fluid 6 containing water. The fluid 6 may leak out from the airtight chamber 4 although it is a small amount, and as a result, there is a concern that the amount of displacement of the actuator 100 decreases with time. However, when the actuator 100 is used in the air, since the air contains a large amount of water, even if water molecules leak from the hermetic chamber 4, the water molecules present outside the hermetic chamber 4 are gas. Supplied from the outside of the closed chamber 4 to the inside of the hermetic chamber 4, the displacement amount of the actuator 100 becomes stable over a long period of time.

  That is, when the porous coordination polymer 5 has water absorption and the fluid 6 contains water, the actuator 100 can exhibit a stable displacement over a long period of time.

  Examples of the porous coordination polymer 5 having water absorption include M-MIL-53, Al (OH) (fumarate), V-MIL-47, M-MIL-88A, M-MIL-88B, and M-MIL. -88C, M-MIL-88D, M'-MOF-74, Al (OH) (1,4-NDC), Cr-MIL-101, Al-MIL-110, HKUST-1, MOF-801, UiO- 66, UiO-67, UiO-68, MIL-140 and the like. In particular, M-MIL-53, Al (OH) (fumarate), MOF-801, and UiO-66 are desirable because they have high water absorption and are stable against water.

  The amount of water contained in the fluid 6 is preferably 30% to 70%, particularly 40% to 60% in terms of humidity. If the humidity is too low, the amount of moisture adsorbed on the porous coordination polymer 5 decreases, and the displacement of the actuator 100 decreases. If the humidity is too high, moisture is condensed inside the hermetic chamber 4 due to a change in the external temperature, and the displacement amount of the actuator 100 is reduced. The fluid 6 may be anything as long as it contains moisture, but is most preferably air because it can be easily sealed in the hermetic chamber 4.

Another example of a particularly desirable combination of the porous coordination polymer 5 and the fluid 6 includes a combination of the hydrophobic porous coordination polymer 5 and the fluid 6 containing a hydrophobic hydrocarbon. . Since hydrocarbon has a larger molecular size (molecular weight) than water and carbon dioxide, it is difficult to leak from the hermetic chamber 4. Further, since the porous coordination polymer 5 is hydrophobic, even if moisture enters the hermetic chamber 4 from the outside of the hermetic chamber 4, the adsorption behavior of the fluid 6 on the porous coordination polymer 5 does not change. The displacement amount of the actuator 100 becomes stable over a long period of time.

  That is, since the porous coordination polymer 5 is hydrophobic and the fluid 6 contains a hydrophobic hydrocarbon, the actuator 100 can exhibit a stable displacement over a long period of time.

  Examples of the hydrophobic porous coordination polymer 5 include ZIF-8.

  The hydrocarbon contained in the fluid 6 is preferably one having 3 to 10 carbon atoms in the molecule, and particularly preferably 6 to 10 carbon atoms. When the number of carbon atoms in the hydrocarbon molecule is large, the amount of adsorption to the porous coordination polymer 5 increases, and the displacement of the actuator 100 increases. Further, since the molecular size (molecular weight) is large, it is difficult to leak out from the hermetic chamber 4, and the actuator 100 can exhibit a stable displacement over a long period of time. In addition, when there are too many carbon numbers, it will be easy to condense and become a liquid and the displacement amount of the actuator 100 will become small.

The hydrocarbon preferably has no functional group having polarity such as —OH, —COOH, —NH 2 , —SO 3 H. Hydrocarbons whose molecules are composed only of C and H are particularly desirable because of their small polarity. Specifically, toluene, benzene, hexane and the like are desirable. If the polarity of the hydrocarbon is small, condensation does not occur and the actuator 100 operates stably. Furthermore, since it can adsorb | suck to hydrophobic hydrophobic coordination polymer 5 in large quantities, the displacement of the actuator 100 becomes large.

  Although FIG. 1 shows a case where one movable part 3 is provided for one hermetic chamber 4, two or more movable parts 3 may be provided for one hermetic chamber 4. In this case, two or more movable parts 3 can be operated simultaneously.

  FIG. 2 schematically shows a cross section of the actuator 100 when the movable portion 3 is a diaphragm. When the movable part 3 has a piston shape as shown in FIG. 1, a slight gap is easily generated between the casing 1 and the movable part 3, and the fluid 6 leaks from the hermetic chamber 4 through the gap, and the actuator 100 operates. There are times when it stops. However, when the movable part 3 is a diaphragm 3a, the hermetic chamber 4 can be reliably sealed. Therefore, by making the movable part 3 the diaphragm 3a, the leakage of the fluid 6 from the hermetic chamber 4 can be more reliably suppressed, and the displacement amount of the actuator 100 becomes stable over a long period of time.

  Although FIG. 2 shows the case where the diaphragm 3a is joined to the housing 1 by the adhesive 7, the diaphragm 3a and the housing 1 may be joined by other methods. Examples of other joining methods include fusion, brazing, soldering, ultrasonic joining, and welding. Further, it may be simply crimped by a method such as screwing.

  The material of the diaphragm 3a may be anything as long as it can seal the fluid 6 such as rubber, resin, metal, glass, ceramics and the like. In particular, by using rubber or resin having a large displacement, it is desirable that the actuator 100 can have a large displacement. Silicone resins including silicone rubber are particularly desirable from the viewpoint of the amount of deformation and durability.

  The shape of the diaphragm 3a may be a bellows shape, a wave shape, or the like in order to increase the amount of displacement in addition to a flat plate shape as shown in FIG.

Hereinafter, the arrangement of the heater 2, the hermetic chamber 4, and the porous coordination polymer 5 will be described in detail with reference to the drawing in which the movable portion 3 is a diaphragm. However, these can also be applied to the piston-shaped movable portion 3. is there.

  As shown in FIG. 3, it is desirable that at least a part of the inner wall of the hermetic chamber 4 is covered with a coating layer of a porous coordination polymer 5. By covering at least a part of the inner wall of the hermetic chamber 4 with the porous coordination polymer 5, the heat of the heater 2 is efficiently transmitted to the porous coordination polymer 5 through the housing 1. As a result, the adsorption / desorption of the fluid 6 in the porous coordination polymer 5 occurs rapidly with respect to the behavior of the heater 2, and the displacement amount of the actuator 100 increases and the response to the behavior of the heater 2 becomes fast.

  As a method for forming a coating layer of the porous coordination polymer 5 on the inner wall of the hermetic chamber 4, for example, the porous coordination polymer 5 and a binder are dispersed in a solvent, applied to the concave portion of the housing 1, and the solvent is applied. It can be evaporated. In this case, the coating layer contains a binder in addition to the porous coordination polymer 5. Alternatively, the porous coordination polymer 5 may be deposited directly on the surface of the recess of the housing 1. In this case, the recess of the housing 1 may be left in contact with the precursor solution of the porous coordination polymer 5 to deposit the porous coordination polymer 5 on the surface of the recess. The coating layer of the porous coordination polymer 5 may be formed on the inner wall of the movable part 3 that forms the hermetic chamber 4.

  At this time, it is desirable that the porous coordination polymer 5 of the coating layer and the inner wall of the hermetic chamber 4 coated with the coating layer contain the same metal element. Since the porous coordination polymer 5 of the coating layer and the inner wall of the hermetic chamber 4 coated thereon contain the same metal element, the porous coordination polymer 5 is continuously formed between the coating layer and the inner wall of the porous coordination polymer 5. An interface is formed, and the thermal conductivity of the interface is improved. As a result, the adsorption / desorption of the fluid 6 in the porous coordination polymer 5 occurs more rapidly with respect to the behavior of the heater 2, and the displacement of the actuator 100 increases and the response to the behavior of the heater 2 becomes faster. Become.

  In the above example, the heater 2 is in close contact with the surface of the housing 1 opposite to the recess, or is bonded via a layer of adhesive, adhesive tape, grease, solder, etc., for example, as shown in FIG. Instead of the larger heater 2 than the case 1, a small heater 2 may be embedded in the case 1, or the conductor wiring 2a of the heater 2 is provided directly on the surface or inside of the case 1. May be. Further, the heater 2 may be embedded in the movable part 3, or the conductor wiring 2 a of the heater 2 may be provided directly on the surface or inside of the movable part 3. When the conductor wiring 2a of the heater 2 is provided, the base material on which the conductor wiring 2a is formed is preferably an insulating material.

  Note that the difference between the maximum temperature of the porous coordination polymer 5 heated by the heater 2 and the temperature when not heated is preferably within 100 ° C., and more preferably within 50 ° C. If the maximum temperature is too high, the porous coordination polymer 5 is cooled, the speed of adsorbing the fluid 6 is slowed, and the operation of the actuator 100 is slowed.

  In order to promote the cooling of the porous coordination polymer 5 after the heating by the heater 2 is stopped, a radiating fin or the like may be provided in the housing 1. Moreover, you may cool the housing | casing 1 by cooling means, such as air cooling and water cooling.

  As the heater 2, a Peltier module that can be cooled as well as heated may be used. The Peltier module can be heated and cooled simply by changing the direction of direct current. When the fluid 6 is desorbed from the porous coordination polymer 5, heating is performed using the Peltier module, and when the fluid 6 is adsorbed to the porous coordination polymer 5, cooling is performed using the Peltier module. The actuator 100 can be operated at high speed.

The heater 2 may be disposed inside the hermetic chamber 4. For example, the heater 2 main body may be disposed inside the hermetic chamber 4, or the conductor wiring 2 a (hereinafter referred to as “heater 2”) is provided on the inner wall of the hermetic chamber 4.
You may provide simply the conductor wiring 2a.

  When the conductor wiring 2a is provided on the inner wall of the hermetic chamber 4, it is desirable that at least a part of the conductor wiring 2a is covered with a coating layer of the porous coordination polymer 5 as shown in FIG. By covering at least a part of the conductor wiring 2 a with the porous coordination polymer 5, the heat of the conductor wiring 2 a is efficiently transmitted to the porous coordination polymer 5. As a result, the adsorption / desorption of the fluid 6 in the porous coordination polymer 5 occurs rapidly with respect to the behavior of the conductor wiring 2a, the displacement of the actuator 100 increases, and the response to the behavior of the conductor wiring 2a is fast. Become.

  As a method for forming the coating layer of the porous coordination polymer 5 on the conductor wiring 2a, for example, the porous coordination polymer 5 and the binder are dispersed in a solvent, applied to the conductor wiring 2a, and the solvent is evaporated. Good. In this case, the coating layer contains a binder in addition to the porous coordination polymer 5. Further, the porous coordination polymer 5 may be directly deposited on the surface of the conductor wiring 2a. In this case, the conductor wiring 2a may be left in contact with the precursor solution of the porous coordination polymer 5 to deposit the porous coordination polymer 5 on the conductor wiring 2a.

  At this time, it is desirable that the porous coordination polymer 5 of the covering layer and the conductor wiring 2a covered by the covering layer contain the same metal element. Since the porous coordination polymer 5 and the conductor wiring 2a coated thereon contain the same metal element, a continuous interface is formed between the coating layer of the porous coordination polymer 5 and the conductor wiring 2a. As a result, the thermal conductivity of the interface is improved. As a result, the adsorption / desorption of the fluid 6 in the porous coordination polymer 5 becomes more rapid with respect to the behavior of the conductor wiring 2a, the displacement of the actuator 100 increases, and the response to the behavior of the conductor wiring 2a increases. Become faster.

  A desirable combination of the conductor wiring 2a and the porous coordination polymer 5 is, for example, a case where the conductor wiring 2a contains copper and the porous coordination polymer 5 is HKUST-1. Since copper has high thermal conductivity, the heat conduction to the porous coordination polymer 5 becomes extremely good. As a material of the conductor wiring 2a, copper, a copper nickel alloy, and a copper manganese alloy are particularly desirable.

  Note that the coating layer of the porous coordination polymer 5 may be provided on the surface of the heater 2 body when the heater 2 body is disposed inside the hermetic chamber 4 as shown in FIG.

  As shown in FIG. 6, the pump 200 including the actuator 100 as described above can transfer a transfer fluid such as gas or liquid at a large flow rate. This is because the actuator 100 as described above has a large displacement, so that a large amount of transfer fluid can be transferred by the reciprocating motion of the movable portion 3. Since the actuator 100 can be easily downsized, the pump 200 can also be easily downsized and can be suitably used as a liquid discharge head, a micro pump, or the like.

  A pump 200 shown in FIG. 6 includes an actuator 100 and a pump chamber 8. The actuator 100 includes a housing 1, a heater 2, and a diaphragm 3 a, and an airtight chamber 4 is configured by the housing 1 and the diaphragm 3 a, and a porous coordination height is provided on the inner wall of the airtight chamber 4 on the heater 2 side. A covering layer of molecules 5 is provided, and a fluid 6 is sealed inside the hermetic chamber 4. The pump chamber 8 has a suction port 9 and a discharge port 10 and is provided at a position facing the airtight chamber 4 through the diaphragm 3a. In such a pump 100, since the diaphragm 3a is greatly displaced and the transfer fluid can be efficiently transferred from the suction port 9 and the discharge port 10, the flow rate of the transfer fluid can be increased. A plurality of suction ports 9 and discharge ports 10 may be provided for each pump chamber 8, and it is particularly desirable that both have check valves. By providing the check valve, the backflow of the transfer fluid can be prevented and the transfer fluid can be transferred efficiently.

  Hereinafter, the actuator of the present invention will be described in detail based on examples.

First, hydrophilic UiO-66, HKUST-1, and hydrophobic ZIF-8 were prepared as porous coordination polymers. A commercially available Basolite (registered trademark) Z1200 (manufactured by Sigma-Aldrich) was used as the ZIF-8 powder. XRD measurement was performed and it was confirmed that the structure had a ZIF-8 structure. As shown in the literature (for example, P. Kusgens et al., Microporous Mesoporous Mater., 2009, 120, 325.), ZIF-8 is a hydrophobic porous coordination polymer that hardly adsorbs water. It is.

UiO-66 powder was synthesized as follows. 2.1 g of zirconium chloride and 1.5 g of H 2 (BDC) were dissolved in 150 ml of N, N-dimethylformamide (hereinafter referred to as DMF). This solution was sealed in a pressure vessel and heated at 120 ° C. for 24 hours. After cooling, the contents of the pressure vessel were suction filtered to obtain a white powder. After washing by pouring DMF onto the filter paper, the recovered powder was immersed in methanol and allowed to stand for 24 hours. This was suction filtered again and dried at room temperature for 30 minutes. Furthermore, it was dried for 12 hours while evacuating at 150 ° C. In order to adsorb moisture (molecular weight 18) in the air, it was left in the air at room temperature for 24 hours. X-ray diffraction (hereinafter simply referred to as XRD) measurement of the obtained powder was performed, and it was confirmed that UiO-66 was synthesized. In addition, literature (for example, H. Furukawa et al., J. Am. Chem. Soc., 2014, 136, 4369.
) UiO-66 is a hydrophilic porous coordination polymer with water absorption.

  A method for synthesizing HKUST-1 will be described later.

  As a housing, a copper disc having a thickness of 2 mm and a diameter of 20 mm is prepared, a concave portion having a depth of 0.5 mm and a diameter of 3 mm is provided at the center of one surface, and a ceramic heater of 5 mm × 5 mm is provided on the other surface. Placed through silicone grease. The tip of a sheathed thermocouple having a thickness of 0.5 mm was bonded to the heater for temperature measurement.

  As the movable part, an acrylic column (diameter 3 mm, thickness 2 mm), a silicone rubber sheet (thickness 0.1 mm), and a polyethylene sheet (thickness 0.05 mm) were prepared. Hereinafter, acrylic may be referred to as A, silicone rubber as SG, and polyethylene as PE.

  A predetermined porous coordination polymer powder was filled in the recess of the casing to half the depth of the recess (0.25 mm), and the movable part was attached. The acrylic cylinder (A) is inserted into the recess so that the outer peripheral surface to which the grease is applied is in contact with the inner peripheral surface of the recess to form an airtight chamber, and the actuator of the piston structure (P) as shown in FIG. Was made. The silicone rubber sheet (SG) and the polyethylene sheet (PE) are arranged so as to cover the concave portion, and the concave portion is sealed by bonding with an adhesive at the outer edge portion of the concave portion to form an airtight chamber, as shown in FIG. An actuator having such a diaphragm structure (D) was produced.

  Air, methane (molecular weight 16), and toluene (molecular weight 92) were used as the fluid sealed in the hermetic chamber. When encapsulating methane, bring the powder of porous coordination polymer in a state where it is dried for 12 hours while evacuating at 150 ° C. to remove adsorbed moisture, etc. into a glove box filled with methane gas, An actuator was fabricated in the glove box. When encapsulating toluene, a drop of toluene was dropped into the recess, and a predetermined amount of porous coordination polymer powder was filled into the recess, and the liquid toluene was evaporated or absorbed by the porous coordination polymer. After confirming the above, an actuator was manufactured.

  The filled porous alignment molecules, the encapsulated fluid and the movable part were combined as shown in Table 1 (Sample Nos. 1 to 7).

  A sample as shown in FIG. 3 in which the inner wall of the recess was coated with a porous coordination polymer was prepared as follows. A copper disc similar to that described above was used for the casing.

  To 100 mg of UiO-66 powder, 5 mg of polytetrafluoroethylene (hereinafter referred to as PTFE) was added as a binder, ethanol was added, and the mixture was stirred in a mortar to obtain a slurry. This slurry was poured into the recess and left to dry in the air for 24 hours. Thereby, the coating layer of UiO-66 was formed on the bottom surface and the inner peripheral surface (inner wall) of the recess. In the obtained UiO-66, ion-exchanged water was poured into the recesses and left for 12 hours, whereby the ethanol adsorbed in the pores of UiO-66 was replaced with water. Thereafter, the ion-exchanged water in the recesses is discharged, vacuumed at room temperature for 12 hours to remove residual moisture and residual ethanol, and then left in the air for 24 hours, so that moisture (into the pores of UiO-66) A molecular weight of 18) was adsorbed.

In order to synthesize HKUST-1, a reaction solution in which 5 mg of H 3 (BTC) was dissolved in 10 mL of ethanol was prepared. A casing masked with tape except for the recesses was immersed in the reaction solution and left for 72 hours. In addition, a copper plate having a size of 1 cm × 1 cm and a thickness of 0.5 mm was simultaneously immersed for XRD measurement of the porous coordination polymer. After immersion, the housing and the copper plate were taken out and the masking tape was removed. The casing and the copper plate were washed with ethanol, dried at room temperature for 12 hours, and further heated for 12 hours while evacuating at 80 ° C. to remove the ethanol. Both the concave portion of the housing and the copper plate for measurement had a blue surface. The XRD measurement of the copper plate for measurement confirmed the diffraction peaks of copper and HKUST-1, and confirmed that the HKUST-1 coating layer having copper as the central metal was present on the copper surface. In addition, literature (for example, P. Kusgens et al., Microporous
As shown in Mesoporous Mater., 2009, 120, 325.), HKUST-1 is a hydrophilic porous coordination polymer with water absorption. The casing was left in the air at room temperature for 24 hours to adsorb moisture (molecular weight 18) to HKUST-1.

  Moreover, what prepared the thing which adhere | attached the polyimide sheet which formed the copper heater wiring on the surface to one main surface of the acrylic disk (thickness 0.5mm, diameter 20mm) which has a through-hole of diameter 3mm as a housing | casing was prepared. . In addition, the polyimide sheet was arrange | positioned so that a heater wiring and an acrylic disk might oppose, and it adhere | attached via the adhesive agent at the peripheral part of the through-hole of an acrylic disk. In other words, the bottom surface of the concave portion of the acrylic disk housing is a polyimide sheet, and a copper heater wiring is provided on the bottom surface of the concave portion. Hereinafter, polyimide may be referred to as PI.

  A coating layer of UiO-66 or HKUST-1 was formed on the casing made of this acrylic disk and a polyimide sheet with copper heater wiring (hereinafter sometimes simply referred to as an acrylic casing) by the same method as described above. . In the case of this acrylic case, the coating layer of the porous coordination polymer was formed on the surface of the heater wiring.

  A silicone rubber sheet (SG) is disposed so as to cover the concave portion of the housing in which UiO-66 and HKUST-1 are formed on the inner wall of the concave portion or the heater wiring surface, and the concave portion is adhered by an adhesive at the outer edge of the concave portion. Was produced, and actuators having a diaphragm structure (D) as shown in FIGS. 3 and 4 were produced (Sample Nos. 8 to 11).

  In addition, since the actuator (sample No. 10, 11) using the acrylic housing is provided with a conductor wiring of the heater on the polyimide sheet (PI), a ceramic heater was not used. The sheath thermocouple for temperature measurement was bonded to a portion facing the conductor wiring of the polyimide sheet.

<Evaluation method>
A variable voltage direct current power source was connected to the heater, the heater temperature reached 80 ° C. in 3 seconds, and the operation was set to turn off the heater when the actuator displacement reached the maximum. The maximum displacement (Dmax) of the movable part was measured by installing a ruler next to the movable part and observing the displacement with a loupe. Further, the time (T) from when the maximum temperature of 80 ° C. was reached until the displacement amount of the movable part was maximized was measured. Further, the operation of heating and cooling to room temperature was repeated 50 cycles, and the maximum displacement (Dmax (50)) after 50 cycles was measured. Table 1 shows the initial maximum displacement amount (Dmax (0)), the maximum displacement amount arrival time (T), and the maximum displacement amount after 50 cycles (Dmax (50)) of each sample.

<Result>
Sample No. which is an actuator having a porous coordination polymer and a fluid containing a gas having a molecular weight of 17 or more in the recess of the housing. In 2 to 4 and 6 to 11, the initial maximum displacement amount (Dmax (0)) of the movable part due to the heating of the heater was 0.1 mm or more. In particular, sample no. In 7 to 11, the displacement amount was particularly large, and the maximum displacement arrival time (T) was shortened. This is presumably because the heat conductivity by the heater with respect to the porous coordination polymer was improved by coating the inner surface of the recess with the porous coordination polymer.

  On the other hand, Sample No. having no porous coordination polymer in the recesses. 1 and the sample No. 1 whose molecular weight of the fluid in the recess is smaller than 17. In 5, the displacement of the movable part could not be confirmed. Sample No. In the case of 1, in the case of free expansion, the volume of air that is a fluid in the hermetic chamber should expand by about 20% by heating at 80 ° C., but the diaphragm was not displaced by the tension of the silicone rubber diaphragm. Conceivable. Sample No. In the case of 5, since the amount of methane that can be adsorbed by UiO-66 is small, the fluid adsorption effect of the porous coordination polymer cannot be obtained, the diaphragm tension is superior to the free expansion pressure of methane, and the diaphragm is displaced. Probably not.

  Sample No. In No. 2, the displacement of the movable part could not be confirmed after 50 cycles. However, the seal between the concave part and the piston was not sufficient, and the air as the fluid in the concave part leaked out of the concave part. It seems that it has stopped.

  Sample No. No. 6 uses a hydrophobic porous coordination polymer, and it is considered that the fluid that contributed to the displacement was a molecule other than water, such as the residue of the solvent used in the synthesis. For this reason, it is considered that the displacement of the movable part is relatively small, and the solvent residue leaks out of the recess and does not displace after 50 cycles.

DESCRIPTION OF SYMBOLS 1: Housing | casing 2: Heater 2a: Conductor wiring 3: Movable part 3a: Diaphragm 4: Airtight chamber 5: Porous coordination polymer 6: Fluid 7: Adhesive 8: Pump chamber 9: Inlet 10: Exhaust 100 : Actuator 200: Pump

Claims (9)

  1. A housing, a heater, and a movable portion are provided, and at least the housing and the movable portion constitute an airtight chamber,
    Having a porous coordination polymer and fluid inside the hermetic chamber;
    Fluid is seen containing a gas having a molecular weight of more than 17,
    At least a part of the inner wall of the hermetic chamber is covered with a coating layer of the porous coordination polymer, and the porous coordination polymer of the coating layer and the inner wall covered with the coating layer Containing the same metal element .
  2. A housing, a heater, and a movable portion are provided, and at least the housing and the movable portion constitute an airtight chamber,
      Inside the hermetic chamber, the heater, the porous coordination polymer and the fluid,
      The fluid comprises a gas having a molecular weight of 17 or greater;
      At least a part of the surface of the heater is coated with the coating layer of the porous coordination polymer, the porous coordination polymer of the coating layer, and the heater coated with the coating layer An actuator characterized in that the surface contains the same metal element.
  3. The actuator according to claim 1 or 2 , wherein the porous coordination polymer has water absorption and the fluid contains water.
  4. The actuator according to claim 1 or 2 , wherein the porous coordination polymer has hydrophobicity and the fluid contains a hydrocarbon.
  5. The movable part, an actuator according to any one of claims 1 to 4, characterized in that a diaphragm.
  6. The actuator according to claim 5 , wherein the diaphragm is formed of a silicone resin.
  7. The heater, the actuator according to any one of claims 1 to 6, characterized in that the casing is the inner wall arranged conductor wires.
  8. Pump comprising an actuator according to any one of claims 1-7.
  9. A pump chamber at a position opposed to the airtight chamber via the movable part, according to claim 8 wherein the pump chamber, characterized in that it comprises at least one or more inlet and at least one outlet Pump.
JP2014220395A 2014-10-29 2014-10-29 Actuator and pump using the same Active JP6418897B2 (en)

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JPS61192906A (en) * 1985-02-21 1986-08-27 Nippon Denso Co Ltd Actuator utilizing hydrogen-occluded alloy
JP3145745B2 (en) * 1991-09-30 2001-03-12 日本電産株式会社 Micro pump
JPH06159228A (en) * 1992-11-26 1994-06-07 Japan Aviation Electron Ind Ltd Actuator
JP4942135B2 (en) * 2005-06-20 2012-05-30 国立大学法人 筑波大学 Liquid feeding device
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