JP6341928B2 - エピタキシャルウェハおよびその製造方法 - Google Patents
エピタキシャルウェハおよびその製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 156
- 239000010703 silicon Substances 0.000 claims description 156
- 229910052710 silicon Inorganic materials 0.000 claims description 156
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 154
- 229910052757 nitrogen Inorganic materials 0.000 claims description 77
- 239000000758 substrate Substances 0.000 claims description 49
- 238000000151 deposition Methods 0.000 claims description 30
- 230000008021 deposition Effects 0.000 claims description 28
- 150000001875 compounds Chemical class 0.000 claims description 26
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 24
- 239000002243 precursor Substances 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 13
- 229910021529 ammonia Inorganic materials 0.000 claims description 12
- 239000012686 silicon precursor Substances 0.000 claims description 11
- 238000000137 annealing Methods 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- 239000002019 doping agent Substances 0.000 claims description 3
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 83
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 32
- 239000001301 oxygen Substances 0.000 description 32
- 229910052760 oxygen Inorganic materials 0.000 description 32
- 238000005247 gettering Methods 0.000 description 14
- 239000012535 impurity Substances 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000007373 indentation Methods 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000006911 nucleation Effects 0.000 description 4
- 238000010899 nucleation Methods 0.000 description 4
- 238000007553 Vickers microindentation test Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- OLBVUFHMDRJKTK-UHFFFAOYSA-N [N].[O] Chemical compound [N].[O] OLBVUFHMDRJKTK-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000007544 microindentation test Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- -1 silane (SiH 4 ) Chemical class 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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Description
この発明は、エピタキシャルウェハ、およびエピタキシャルウェハを製造する方法に向けられる。
第1の側および第2の側を有するシリコン基板ウェハを設けることと、
ある成膜温度で、シリコン基板ウェハの第1の側上にシリコンエピタキシャル層を、およびオプションとしてシリコンエピタキシャル層の上に1つ以上のさらなるエピタキシャル層を成膜することとを含み、シリコンエピタキシャル層、または1つ以上のさらなるエピタキシャル層の少なくとも1つ、またはシリコンエピタキシャル層および1つ以上のさらなるエピタキシャル層の少なくとも1つは、1つ以上のシリコン前駆物質化合物および1つ以上の窒素前駆物質化合物を含有する成膜ガス雰囲気の存在下で化学蒸着法によって成膜され、成膜温度は940℃以下、および成膜ガス雰囲気において1つ以上のシリコン前駆物質化合物および1つ以上の窒素前駆物質化合物の分解を引起すのに十分な温度以上であり、この方法はさらに、シリコンエピタキシャル層、または1つ以上のさらなるエピタキシャル層の少なくとも1つ、またはシリコンエピタキシャル層および1つ以上のさらなるエピタキシャル層の少なくとも1つを、成膜中に、1×1016原子/cm3以上および1×1020原子/cm3以下の濃度の窒素でドープすることを含む。
以下、この発明は、図面の参照によってより詳細に説明される。
図7Aに従うエピタキシャルウェハは、シリコン基板ウェハS、シリコン基板ウェハの第1の側に成膜されるシリコンエピタキシャル層E、およびシリコンエピタキシャル層の上に成膜されるさらなるエピタキシャル層Lを含む。シリコンエピタキシャル層Eはこの発明に従って窒素(N)でドープされ、一方、さらなるエピタキシャル層Lは窒素でドープされない。
エピタキシャルウェハの異なる3つのサンプルが調製され、それらの2つはこの発明(サンプル1および2)を表し、残りの1つは比較例(サンプル3)を表した。
エピタキシャルウェハの異なる2つのサンプルが調製され、サンプル4はこの発明を表し、サンプル5は比較例を表した。
Claims (7)
- 第1の側および第2の側を有するシリコン基板ウェハと、前記シリコン基板ウェハの前記第1の側上に成膜されるシリコンエピタキシャル層とを含み、前記シリコンエピタキシャル層は4×1018 原子/cm3 以上2×10 19 原子/cm3以下の濃度の窒素でドープされた、エピタキシャルウェハ。
- 前記シリコンエピタキシャル層は窒素でドープされ、前記シリコンエピタキシャル層の上に成膜されるさらなるシリコンエピタキシャル層は窒素でドープされない、請求項1に記載のエピタキシャルウェハ。
- 前記シリコンエピタキシャル層は完全にまたは部分的に前記シリコン基板ウェハを被覆する、請求項1または請求項2に記載のエピタキシャルウェハ。
- 前記シリコンエピタキシャル層は、元素周期表のIII属またはV属に属する少なくとも1つの電気的に活性なドーパントでさらにドープされる、請求項1〜3の1つに記載のエピタキシャルウェハ。
- エピタキシャルウェハを製造する方法であって、
第1の側および第2の側を有するシリコン基板ウェハを与えることと、
ある成膜温度で、前記シリコン基板ウェハの前記第1の側上にシリコンエピタキシャル層を成膜することとを含み、
前記シリコンエピタキシャル層は、1つ以上のシリコン前駆物質化合物およびアンモニアを含有する成膜ガス雰囲気の存在下で化学蒸着法によって成膜され、前記成膜温度は940℃以下、および前記成膜ガス雰囲気において前記1つ以上のシリコン前駆物質化合物およびアンモニアの分解を引起すのに十分な温度以上であり、前記方法はさらに、前記シリコンエピタキシャル層を、前記成膜中に、4×1018 原子/cm3 以上2×10 19 原子/cm3以下の濃度の窒素でドープすることを含む、方法。 - 前記シリコンエピタキシャル層は前記アンモニアの存在下において成膜され、さらなるシリコンエピタキシャル層が1つ以上の窒素前駆物質化合物がない状態で前記シリコンエピタキシャル層上に成膜される、請求項5に記載の方法。
- 前記エピタキシャルウェハをエピ後アニールすることをさらに含む、請求項5または請求項6に記載の方法。
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US201261733977P | 2012-12-06 | 2012-12-06 | |
US61/733,977 | 2012-12-06 | ||
PCT/EP2013/075313 WO2014086742A1 (en) | 2012-12-06 | 2013-12-03 | Epitaxial wafer and a method of manufacturing thereof |
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JP2016500475A JP2016500475A (ja) | 2016-01-12 |
JP6341928B2 true JP6341928B2 (ja) | 2018-06-13 |
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US (1) | US9691632B2 (ja) |
EP (1) | EP2959500B1 (ja) |
JP (1) | JP6341928B2 (ja) |
KR (1) | KR101709026B1 (ja) |
CN (1) | CN104838474B (ja) |
SG (1) | SG11201504374YA (ja) |
TW (1) | TWI541864B (ja) |
WO (1) | WO2014086742A1 (ja) |
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JP6032186B2 (ja) * | 2013-11-29 | 2016-11-24 | 信越半導体株式会社 | シリコンエピタキシャルウエーハの評価方法 |
US10627719B2 (en) | 2016-08-12 | 2020-04-21 | Inpria Corporation | Methods of reducing metal residue in edge bead region from metal-containing resists |
JP6299835B1 (ja) * | 2016-10-07 | 2018-03-28 | 株式会社Sumco | エピタキシャルシリコンウェーハおよびエピタキシャルシリコンウェーハの製造方法 |
JP6855124B2 (ja) | 2017-05-08 | 2021-04-07 | 株式会社ディスコ | ゲッタリング層形成方法 |
EP4044216A1 (en) | 2021-02-16 | 2022-08-17 | Siltronic AG | Method for testing the stress robustness of a semiconductor substrate |
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JP4779519B2 (ja) * | 2005-09-08 | 2011-09-28 | 株式会社Sumco | エピタキシャルウェーハの製造方法 |
JP2009200231A (ja) | 2008-02-21 | 2009-09-03 | Sumco Corp | エピタキシャルウェーハ及びその製造方法 |
JP2009212354A (ja) * | 2008-03-05 | 2009-09-17 | Sumco Corp | シリコン基板の製造方法 |
JP2010141272A (ja) | 2008-12-15 | 2010-06-24 | Sumco Corp | エピタキシャルウェーハとその製造方法 |
JP2011253978A (ja) | 2010-06-03 | 2011-12-15 | Sumco Corp | エピタキシャル基板およびその製造方法 |
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KR20150066590A (ko) | 2015-06-16 |
SG11201504374YA (en) | 2015-07-30 |
KR101709026B1 (ko) | 2017-02-21 |
EP2959500B1 (en) | 2019-02-27 |
CN104838474B (zh) | 2018-04-27 |
CN104838474A (zh) | 2015-08-12 |
JP2016500475A (ja) | 2016-01-12 |
TW201423843A (zh) | 2014-06-16 |
US9691632B2 (en) | 2017-06-27 |
US20150303071A1 (en) | 2015-10-22 |
EP2959500A1 (en) | 2015-12-30 |
TWI541864B (zh) | 2016-07-11 |
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