JP6297841B2 - Sheet sticking apparatus and a sticking method - Google Patents

Sheet sticking apparatus and a sticking method Download PDF

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JP6297841B2
JP6297841B2 JP2014009444A JP2014009444A JP6297841B2 JP 6297841 B2 JP6297841 B2 JP 6297841B2 JP 2014009444 A JP2014009444 A JP 2014009444A JP 2014009444 A JP2014009444 A JP 2014009444A JP 6297841 B2 JP6297841 B2 JP 6297841B2
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adhesive sheet
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sticking
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JP2015137118A (en
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文男 牧野
文男 牧野
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リンテック株式会社
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本発明は、被着体に接着シートを貼付するシート貼付装置および貼付方法に関する。 The present invention relates to a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

従来、物品等の被着体に接着シートを貼付するシート貼付装置が知られている(例えば、特許文献1参照)。 Is conventionally known sheet sticking apparatus for sticking an adhesive sheet to an adherend of an article such as a (e.g., see Patent Document 1).
特許文献1に記載のシート貼付装置は、スポンジ(保持手段)を各々支持する3本のロッドを独立してスライド自在に支持し、各スポンジを被着体の被着面の凹凸に追従して変位させ、当該各スポンジでラベル(接着シート)を被着面に押圧して貼付するように構成されている。 Sheet sticking apparatus described in Patent Document 1, slidably supported independently three rods, each supporting the sponge (holding means), to follow the respective sponge to the unevenness of the adherend surface of the adherend It is displaced, and labels in the respective sponge (adhesive sheet) is configured to attached by pressing to the adherend surface.

特開平5−310238号公報 JP-5-310238 discloses

しかしながら、特許文献1に記載されたような従来のシート貼付装置では、保持手段がスポンジで構成されているため、スポンジの側面から吸引用のエアが漏れて、接着シートを保持し続けることができず落下させてしまったり、接着シート全体に適切な押圧力を付与することができなかったりするという不都合がある。 However, in the conventional sheet sticking apparatus described in Patent Document 1, since the holding means is formed of a sponge, leaking air suction from the side of the sponge, it can continue to hold the adhesive sheet or worse dropped not, there is a disadvantage that may not be able to impart an appropriate pressing force to the entire adhesive sheet.

本発明の目的は、接着シートを確実に保持することができ、接着シート全体に適切な押圧力を付与することができるシート貼付装置および貼付方法を提供することにある。 An object of the present invention, it is possible to reliably hold the adhesive sheet is to provide a sheet sticking apparatus and sticking method capable of imparting the appropriate pressing force to the entire adhesive sheet.

本発明のシート貼付装置は、接着シートを保持する保持手段と、前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、前記保持手段は、前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段とを備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の圧力を前記接着シートの押圧中に調整することを特徴とする。 Sheet sticking apparatus of the present invention includes: a holding means for holding an adhesive sheet, retractably provided to said holding means with respect to an adherend, to press the adhesive sheet held by said holding means to said adherend and a pressing means for affixing said holding means includes a holding surface for holding the adhesive sheet, provided the fluid to be stored, a deformation allowing means for allowing the deformation of the holding surface, the said deformable means and filling means for filling the fluid, and a discharge means for discharging the fluid from the deformation allowing means, the pressure of the deformable within acceptable means to control the filling means and the discharge means during the pressing of the adhesive sheet and adjusting.

本発明のシート貼付装置接着シートを保持する保持手段と、前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、前記保持手段は、 前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段を備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の流体の量を増減させ、前記被着体に貼付された接着シートに対する押圧動作を1回または複数回行う貼付補助動作が可能に設けられていることを特徴とする Sheet sticking apparatus of the present invention includes: a holding means for holding an adhesive sheet, retractably provided to said holding means with respect to an adherend, to press the adhesive sheet held by said holding means to said adherend and a pressing means for affixing said holding means includes a holding surface for holding the adhesive sheet, provided the fluid to be stored, a deformation allowing means for allowing the deformation of the holding surface, the said deformable means and filling means for filling the fluid, and a discharge means for discharging the fluid from the deformation allowing means, said filling means and the discharge means is controlled to the increase or decrease the amount of fluid in the deformation allowing means, the object wherein the sticking assist operation for pressing operation one or more times for the adhesive sheet stuck on adherend is provided to be.

本発明のシート貼付方法は、接着シートを保持面で保持する工程と、内部に流体を貯留可能に設けられた変形許容手段で前記保持面の変形を許容しながら、前記保持面で保持した接着シートを被着体に押圧して貼付する工程と、前記変形許容手段内の流体を充填または排出して前記変形許容手段内の圧力を前記接着シートの押圧中に調整する工程とを実施することを特徴とする。 Sheet sticking method of the present invention includes the steps of holding the adhesive sheet in the holding surface, while permitting the deformation of the holding surface with deformable means provided fluid inside the can store was held at the holding surface adhesion a step of sticking to press the sheet to the adherend, be carried out and a step of adjusting the pressure in the fluid the deformation allowing means is filled or discharged in the deformation allowing means during pressing of the adhesive sheet the features.

本発明によれば、流体を貯留可能な変形許容手段により保持面の変形を許容するため、従来のようにスポンジの側面から吸引用のエアが漏れるような不都合を防止し、接着シートを確実に保持することができ、接着シート全体に適切な押圧力を付与することができる。 According to the present invention, in order to permit the deformation of the holding surface by possible deformation allowing means storing the fluid, to prevent conventional inconveniences air leakage of suction from the side of the sponge like, an adhesive sheet reliably can be held, it is possible to impart appropriate pressing force to the entire adhesive sheet.

また、保持手段に充填手段を設ければ、簡易な構成で保持面の変形を許容することができる。 Further, by providing the filling means to the holding means, it is possible to permit the deformation of the holding surface with a simple configuration.
さらに、貼付補助動作を可能にすれば、接着シートに念押しの押圧力を付与して当該接着シートを被着体に確実に貼付することができる。 Further, if the enable sticking auxiliary operation, by applying a pressing force of the press just in case the adhesive sheet the adhesive sheet can be reliably stuck on an adherend.

本発明の一実施形態に係るシート貼付装置の側面図。 Side view of a sheet sticking apparatus according to an embodiment of the present invention. シート貼付装置の動作説明図。 Operation explanatory diagram of the sheet sticking apparatus.

以下、本発明の一実施形態を図面に基づいて説明する。 Hereinafter, an embodiment of the present invention with reference to the accompanying drawings.
なお、以下において、基準となる図を挙げることなく、例えば、上、下、左、右、または、手前、奥といった方向を示した場合は、全て図1を正規の方向(付した番号が適切な向きとなる方向)から観た場合を基準とし、上、下、左、右方向が紙面に平行な方向であり、手前、奥方向が紙面に直交する方向とする。 In the following, without mention diagram as a reference, for example, up, down, left, right, or front, when showing the direction such far, all Figure 1 normal direction (denoted by the number appropriate with respect to the case where viewed from a direction as consisting direction), up, down, left, is a direction parallel rightward in the drawing sheet, front, rear direction is the direction perpendicular to the paper surface.

図1において、シート貼付装置10は、接着シートASを保持する保持手段20と、保持手段20を被着体WKに対して進退可能に設けられ、保持手段20で保持した接着シートASを被着体WKに押圧して貼付する押圧手段30とを備え、接着シートASを供給する供給手段40と、左右方向や前後方向等の所定方向に被着体WKを搬送するコンベアやロボット等の搬送手段CVとの近傍に配置されている。 In Figure 1, a sheet sticking device 10 includes a holding means 20 for holding the adhesive sheet AS, provided with holding means 20 to be movable forward and backward relative to the adherend WK, depositing adhesive sheet AS held by the holding means 20 and a pressing means 30 for affixing to press the body WK, adhesive and sheet supplying means 40 for supplying the aS, the left-right direction and the conveying means of a conveyor or a robot or the like for conveying the adherend WK in a predetermined direction in the longitudinal direction such It is disposed in the vicinity of the CV.

保持手段20は、接着シートASを保持する保持部材21と、保持部材21に流体としての気体を充填する加圧ポンプやタービン等の充填手段22と、保持部材21から気体を排出する減圧ポンプや解放バルブ(電磁弁)等の排出手段23とを備えている。 Holding means 20, a holding member 21 for holding the adhesive sheet AS, the filling means 22 such as a gas pressurizing pump or turbine filling as a fluid to the holding member 21, Ya vacuum pump for discharging gas from the holding member 21 release valve and a discharge unit 23 (solenoid valve) and the like.
保持部材21は、フレーム24と、外縁部がフレーム24の下面に支持されるとともに、下面が接着シートASを保持する保持面25Aとされ、ゴムや樹脂等の変形可能な部材によって構成されて気体を貯留可能に設けられ、保持面25Aの変形を許容する変形許容手段としての変形許容部25と、クーロン力によって保持面25Aに接着シートASを引き付けて保持可能な静電チャック26とを備えている。 Holding member 21 includes a frame 24, together with the outer edge portion is supported on the lower surface of the frame 24, the lower surface is a holding surface 25A for holding the adhesive sheet AS, is constituted by a deformable member such as rubber or resin gaseous the provided so as to be stored, the deformation allowing portion 25 of the deformation allowing means for allowing the deformation of the holding surface 25A, and a chuck 26 capable of holding attract adhesive sheet aS on the holding surface 25A by the Coulomb force there. 変形許容部25は、配管22Aを介して充填手段22に接続されるとともに、配管23Aを介して排出手段23に接続された貯留室27を備え、側面が蛇腹のように伸縮する構成となっている。 Deformation allowing portion 25 is connected to the filling means 22 via a pipe 22A, includes a storage chamber 27 connected to the discharge means 23 through a pipe 23A, has a configuration in which the side surface is expanded or contracted as bellows there.

押圧手段30は、出力軸31Aで保持部材21のフレーム24を支持する駆動機器としての直動モータ31を備えている。 Pressing means 30 includes a linear motor 31 as a driving device for supporting the frame 24 of the holding member 21 with the output shaft 31A.

供給手段40は、基材シートBSの一方の面に接着剤AD層を有する接着シートASが当該接着剤AD層を介して帯状の剥離シートRLの一方の面に仮着された原反RSを支持する支持ローラ41と、原反RSを案内する複数のガイドローラ42と、剥離シートRLを折り返して当該剥離シートRLから接着シートASを剥離する剥離板43と、駆動機器としての回動モータ44Aによって駆動される駆動ローラ44との間に剥離シートRLを挟み込むピンチローラ45と、剥離シートRLを回収する回収ローラ46とを備え、その全体がフレーム47に支持されている。 Supply means 40, an adhesive sheet AS is temporarily adhered to the raw RS on one surface of the release liner RL of the strip through the adhesive AD layer having an adhesive AD layer on one surface of the substrate sheet BS a support roller 41 for supporting a plurality of guide rollers 42 for guiding the raw sheet RS, a peeling plate 43 for peeling the adhesive sheet aS folded release sheet RL from the release liner RL, rotary motor 44A as the driving device peeling the pinch roller 45 sandwich the sheet RL, and a collecting roller 46 for collecting the release liner RL, entirety of which is supported by the frame 47 between the drive roller 44 driven by.

以上のシート貼付装置10において、被着体WKに接着シートASを貼付する手順について説明する。 In the sheet sticking apparatus 10 described above, the procedure for sticking the adhesive sheet AS to the adherend WK.
先ず、原反RSを図1に示すようにセットする。 First, it sets the raw RS as shown in Figure 1. そして、図示しない操作パネルやパーソナルコンピュータ等の入力手段を介して運転開始の信号を入力すると、保持手段20が充填手段22および排出手段23を駆動し、貯留室27内を所定の圧力(第1圧力)に調整した後、供給手段40が回動モータ44Aを駆動し、原反RSを繰り出す。 Then, when the input signal of the start operation through the input means such as a control panel or a personal computer, not shown, holding means 20 drives the filling means 22 and discharge means 23, reservoir 27 within the predetermined pressure (first after adjusting the pressure), the supply means 40 drives the rotation motor 44A, feed the raw RS. 次いで、剥離板43上に位置する先頭の接着シートASが所定位置に到達したことを光学センサや撮像手段等の図示しない検知手段が検知すると、供給手段40が回動モータ44Aの駆動を停止し、シート貼付装置10がスタンバイ状態となる。 Then, when the adhesive sheet AS of the head located on the release plate 43 is not shown, such as an optical sensor or an imaging means that has reached a predetermined position detecting means detects the supply means 40 stops driving of the rotation motor 44A , sheet sticking apparatus 10 is in the standby state.

そして、搬送手段CVがコンベア等を駆動し、図1に示すように、被着体WKを保持部材21の下方所定位置で停止させる。 The conveying means CV drives the conveyor and the like, as shown in FIG. 1, is stopped at the lower position of the retaining member 21 to the adherend WK. 次に、供給手段40が回動モータ44Aを駆動し、接着シートASを供給し、保持手段20が静電チャック26を駆動し、供給された接着シートASを保持面25Aで保持する。 Next, the supply means 40 drives the rotation motor 44A, to supply the adhesive sheet AS, holding means 20 drives the electrostatic chuck 26 to hold the supplied adhesive sheet AS in the holding surface 25A. 次いで、押圧手段30が直動モータ31を駆動し、保持部材21を被着体WKに向かって下降させる。 Then, the pressing means 30 drives the linear motor 31 is lowered toward the holding member 21 to the adherend WK. そして、接着シートASが被着体WKの被着面WK1に当接すると、図1中二点鎖線で示すように、変形許容部25が変形することにより保持面25Aの変形が許容されて被着面WK1の凹凸に追従し、接着シートAS全体を被着面WK1に押圧して貼付する。 When the adhesive sheet AS abuts on the objective surface WK1 of the adherend WK, as indicated by two-dot chain lines in FIG. 1, the allowed deformation of the holding surface 25A by deformable portion 25 is deformed follow the irregularities of Chakumen WK1, it stuck to press the entire adhesive sheet AS to the adherend surface WK1. この際、接着シートASは、貯留室27内の気体の圧力(第1圧力)によって、全体的に適切で均等な押圧力が付与される。 At this time, the adhesive sheet AS is the pressure of the gas in the storage chamber 27 (first pressure), generally appropriate and uniform pressing force is applied.

ここで、貯留室27内の圧力を検出する圧力センサやロードセル等の図示しない検知手段を設け、当該検知手段の検知結果を基にして保持手段20が排出手段23を駆動し、貯留室27内の圧力(第1圧力)を保った状態で気体を徐々に排出するように構成してもよい。 Here, the detection means (not shown) such as a pressure sensor or a load cell for detecting the pressure in the storage chamber 27 is provided, the holding means 20 based on the detection result of the detecting means to drive the discharge means 23, storage chamber 27 it may be configured to gradually discharge the gas while maintaining the pressure (first pressure) of. このとき、押圧手段30が直動モータ31を駆動し、保持部材21を下降させることができる。 In this case, it is possible to pressing means 30 drives the linear motor 31 to lower the holding member 21. これにより、保持面25Aの変形を促進させることができ、被着面WK1の凹凸が大きい場合でも、当該凹凸に保持面25Aを追従させることができ、被着面WK1に接着シートASを密着させることができる。 Thus, it is possible to facilitate the deformation of the holding surface 25A, even if unevenness of the adherend surface WK1 is large, it is possible to follow the holding surface 25A to the relief, brought into close contact with the adhesive sheet AS to the adherend surface WK1 be able to. また、貯留室27内の圧力を保った状態で、気体を徐々に排出して被着面WK1に接着シートASを密着させた後、保持手段20が充填手段22を駆動し、貯留室27内の圧力を第1圧力よりも高い第2圧力として、接着シートAS全体に大きな押圧力を付与する構成としてもよい。 Further, while maintaining the pressure in the storage chamber 27, after the gas is gradually discharged in close contact with the adhesive sheet AS to the adherend surface WK1, the holding means 20 drives the filling means 22, storage chamber 27 the pressure of the second pressure higher than the first pressure, may be configured to impart large pressing force to the entire adhesive sheet aS. なお、貯留室27内の気体を徐々に排出して被着面WK1に接着シートASを密着させるとき、貯留室27内の圧力を第1圧力よりも低い第3圧力としてもよい。 Incidentally, when gradually exhausting gas in the storage chamber 27 is adhered an adhesive sheet AS to the adherend surface WK1, it may be lower third pressure than the first pressure the pressure in the storage chamber 27.

次に、押圧手段30が直動モータ31の駆動を停止させた状態で、保持手段20が静電チャック26の駆動を停止し、接着シートASの保持を解除する。 Then, with the pressing means 30 stops the driving of the linear motor 31, the holding means 20 stops driving of the electrostatic chuck 26, releases the hold of the adhesive sheet AS. そして、保持手段20が充填手段22および排出手段23を駆動し、貯留室27内の気体の量を増減させ、被着体WKに貼付された接着シートASに対する押圧動作を1回または複数回行う貼付補助動作を実行する。 The holding means 20 drives the filling means 22 and discharge means 23, to increase or decrease the amount of gas in the reservoir chamber 27, carried out one or more times a pressing operation for the adhesive sheet AS affixed to the adherend WK to run a patch auxiliary operations. この貼付補助動作は、図2に示すように、変形許容部25を収縮させて、被着体WKに貼付された接着シートASに対して保持面25Aを少なくとも1度離間させてから、再度貯留室27内の圧力を第1圧力にして当接させる。 The sticking auxiliary operation, as shown in FIG. 2, the deformation allowing portion 25 is contracted, since at least once to separate the holding surface 25A against the adhesive sheet AS affixed to the adherend WK, reservoir again the pressure in the chamber 27 in the first pressure is brought into contact. このような貼付補助動作を行った後、押圧手段30が直動モータ31を駆動し、保持部材21を図1中実線で示す位置に復帰させ、搬送手段CVがコンベア等を駆動し、接着シートASが貼付された被着体WKを次工程の装置等に搬送し、以降上記同様の動作が繰り返される。 After such sticking assistance operation, the pressing means 30 drives the linear motor 31, the holding member 21 is returned to the position shown in Figure 1 the solid line, the transport means CV drives the conveyor or the like, the adhesive sheet conveying the adherend WK the aS is attached to a device such as the next step, the same operation is repeated later. なお、貼付補助動作を行う度に第1圧力よりも高い第4圧力、第5圧力・・・となるように、貯留室27内の圧力を段階的に上昇させ、念押しの押圧が確実に接着シートASに付与されるように構成してもよい。 Incidentally, sticking higher than the first pressure whenever performing the auxiliary operation fourth pressure, such that the fifth pressure.., Stepwise increasing the pressure in the storage chamber 27, the pressing of reminds reliably it may be configured to be imparted to the adhesive sheet aS. また、貼付補助動作を行う際、保持面25Aを接着シートASから離間させなくてもよい。 Also, when performing the sticking assist operation, the holding surface 25A may not be separated from the adhesive sheet AS.

以上のような実施形態によれば、気体を貯留可能な変形許容部25により保持面25Aの変形を許容するため、従来のようにスポンジの側面から吸引用のエアが漏れるような不都合を防止し、接着シートASを確実に保持することができ、接着シートAS全体に適切な押圧力を付与することができる。 According to the above-described embodiments, in order to permit the deformation of the holding surface 25A by the deformable portion 25 capable of storing the gas, to prevent conventional inconveniences air leakage of suction from the side of the sponge as , it is possible to reliably hold the adhesive sheet aS, it is possible to impart an appropriate pressing force to the entire adhesive sheet aS.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。 The best arrangement for carrying out the present invention, and a method has been disclosed in the description, the present invention is not limited thereto. すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。 That is, the present invention is mainly illustrated with respect to specific embodiments, and have been described, without departing from the spirit and purpose of the scope of the present invention, with respect to the embodiments described above, the shape, material, quantity or any other detailed configuration, in which a person skilled in the art can make various modifications. また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれるものである。 Also, description of specific shapes, the description limiting the like material, which has been described as examples to enable easy understanding of the present invention, does not limit the present invention, their shape, material descriptions using names of parts removing part or all of the limitations such as are intended to be included in the present invention.

例えば、保持手段20が排出手段23を駆動し、変形許容部25を縮めた状態で供給手段40から接着シートASを受け取り、押圧手段30が直動モータ31を駆動し、図2に示すように、接着シートASが被着面WK1に当接することのない位置で保持部材21の下降を停止させた後、保持手段20が充填手段22を駆動し、図1中二点鎖線で示すように、接着シートASを被着体WKに押圧して貼付する構成でもよい。 For example, the holding means 20 drives the discharge means 23 receives the adhesive sheet AS from the supply means 40 in a compressed state the deformation allowing portion 25, the pressing means 30 drives the linear motor 31, as shown in FIG. 2 after the adhesive sheet aS is to stop the descent of the holding member 21 at a position not to contact the adherend surface WK1, the holding means 20 drives the filling means 22, as indicated by two-dot chain lines in FIG. 1, an adhesive sheet AS may be configured to be attached by pressing to the adherend WK.
また、保持手段20は、接着シートASが貼付された被着体WKを搬送手段CVで次工程の装置等に搬送しながら、貼付補助動作を行ってもよい。 The holding means 20, the adherend WK adhesive sheet AS is attached in a transport means CV while carrying the apparatus and the like of the next step may be performed affixing auxiliary operation.
さらに、保持手段20は、貼付補助動作を行わなくてもよい。 Furthermore, the holding means 20 may not perform the sticking assistance operation.

また、保持部材21は、変形許容部25のみで貯留室27を構成してもよい。 The holding member 21 may constitute a storage chamber 27 only at the deformable portion 25.
さらに、充填手段22が貯留室27に供給する流体は、大気、単体ガス、混合ガス、水やオイル等の液体、ジェル状体等であってもよい。 Furthermore, the fluid supplied to the filling means 22 reservoir 27 is atmospheric, simple gas, mixed gas, liquid such as water or oil, it may be a gel-like material or the like.
また、保持手段20は、充填手段22が加熱された流体を貯留室27に供給する構成とし、接着シートASの接着剤AD層を温めて流動性を向上させて接着しやすくする接着力向上手段を採用してもよい。 The holding means 20, the fluid-filled unit 22 is heated constitutes a supplying the storage chamber 27, the adhesive sheet AS adhesion improving means for warming the adhesive AD layer improves the fluidity to facilitate bonded of the may be adopted.
さらに、接着シートASを冷却して貼付する場合、保持手段20は、充填手段22が冷却された流体を貯留室27に供給する構成とすることができる。 Furthermore, if sticking the adhesive sheet AS is cooled, the holding means 20 can be filling means 22 is configured for supplying cooled fluid in the reservoir chamber 27.
また、保持手段20は、減圧ポンプや真空エジェクタ等の減圧手段によって保持面25Aで接着シートASを吸引保持する構成でもよい。 The holding means 20, an adhesive sheet AS may be configured to suction held by the holding surface 25A by vacuum means such as vacuum pumps and vacuum ejector. この場合、減圧手段からフレーム24を貫通し、貯留室27内を通って保持面25Aに連通する変形自在なホースやパイプ等の管を設ければよい。 In this case, through the frame 24 from the pressure reducing means may be provided to the tube, such as a deformable hose or pipe which communicates with the holding surface 25A through the retention chamber 27.
さらに、保持手段20は、接着剤や粘着剤によって接着シートASを保持する構成としてもよい。 Furthermore, the holding means 20 may be configured to hold the adhesive sheet AS by an adhesive or a pressure sensitive adhesive.
また、保持手段20は、充填手段22および排出手段23を設けずに、予め貯留室27内の圧力を所定の圧力としておいてもよい。 The holding means 20, without providing the charging means 22 and discharge means 23, may have been the pressure of the pre-storage chamber 27 to a predetermined pressure.

また、押圧手段30は、被着体WKに接着シートASを貼付した後、直動モータ31を駆動し、当該被着体WKに貼付された接着シートASに対して保持面25Aを離間させてから、再度保持面25Aを接着シートASに押し付ける再押圧動作を1回または複数回行ってもよい。 The pressing means 30, after sticking the adhesive sheet AS on the adherend WK, drives the linear motor 31, by separating the holding surface 25A against the adhesive sheet AS affixed to the adherend WK from it may be performed one or more times to re-pressing operation for pressing the holding surface 25A again to the adhesive sheet AS. この場合、再押圧動作を行う度に、保持手段20が充填手段22および排出手段23を駆動し、第1圧力よりも高い第6圧力、第7圧力・・・となるように、貯留室27内の圧力を段階的に上昇させ、念押しの押圧が確実に接着シートASに付与されるように構成してもよい。 In this case, each time for re-pressing operation, the holding means 20 drives the filling means 22 and discharge means 23, the sixth pressure higher than the first pressure, so that the seventh pressure ..., reservoir 27 the pressure of the inner increased stepwise, may be configured to push the push precaution is applied to ensure that the adhesive sheet aS. この再押圧動作を行う際も、保持面25Aを接着シートASから離間させてもよいし、離間させなくてもよい。 Even when performing the re-pressing operation, to the holding surface 25A may be separated from the adhesive sheet AS, may not be separated.
さらに、押圧手段30は、被着体WKを搬送手段CVで次工程の装置等に搬送しながら、接着シートASの貼付動作や再押圧動作を行ってもよい。 Further, the pressing means 30, while conveying the apparatus or the like in the next step by the conveying means CV adherends WK, may be performed sticking operation and re-pressing operation of the adhesive sheet AS.
また、供給手段40を設けずに、人手で接着シートASを保持手段20に供給してもよい。 Also, without providing the supply means 40 may supply the adhesive sheet AS to the holding means 20 by hand.

また、本発明における接着シートASおよび被着体WKの材質、種別、形状等は、特に限定されることはない。 The material of the adhesive sheet AS and Hichakutai WK in the present invention, the type, shape, etc., are not particularly limited. 例えば、接着シートASは、感圧接着性、感熱接着性等の接着形態に限定されることはなく、感熱接着性のものが採用された場合は、当該接着シートASを加熱する適宜な加熱手段を設ければよい。 For example, the adhesive sheet AS is pressure sensitive adhesive, it is not limited to adhesion form of the heat-sensitive adhesive or the like, if one of the heat-sensitive adhesive is employed, a suitable heating means for heating the adhesive sheet AS the may be provided. また、このような接着シートASは、例えば、接着剤AD層だけの単層のもの、基材シートBSと接着剤AD層との間に中間層を有するもの、基材シートBSの上面にカバー層を有する等3層以上のもの、更には、基材シートBSを接着剤AD層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。 The cover such adhesive sheet AS, for example, a single layer of only the adhesive AD layer, and an intermediate layer between the substrate sheet BS and the adhesive AD layer, the upper surface of the base sheet BS more than three layers such as a layer, further, may be as a so-called double-sided adhesive sheet which can be peeled from the adhesive AD layer base sheet BS, the double-sided adhesive sheet is a single layer or and having an intermediate layer of a double layer may be of the intermediate layer without a single layer or multiple layers. また、被着体WKとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。 As the adherend WK, for example, food, resin containers, a silicon semiconductor wafer and a compound semiconductor wafer of a semiconductor wafer, a circuit board, an information recording substrate such as an optical disc, a glass plate, steel, ceramics, wood plate or a resin plate or the like , it may also be targeted, such as member or article of any form. なお、接着シートASを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体WKに貼付することができる。 Incidentally, functions of the adhesive sheet AS, instead of application specific reading, e.g., the label information, wherein decorative label, a protective sheet, dicing tape, die attach film, the die bonding tape, any such recording layer forming resin sheet any sheet shape, a film, it is possible to affix the tape to any adherend WK as described above.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。 Means and processes of the present invention, the operation described for their means and steps, never be limited as long as it can fulfill the function or process, let alone, construct simply the embodiment shown in the embodiment Ya not be at all limited to the process. 例えば、保持手段は、接着シートを保持する保持面と、流体を貯留可能に設けられ、保持面の変形を許容する変形許容手段とを備えているものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。 For example, the holding means comprises a holding surface for holding an adhesive sheet, provided the fluid to be stored, as long as it has a deformation allowing means for allowing the deformation of the holding surface, light of the original technical common knowledge application combined, never be limited as long as it is within the scope (explanation thereof will be omitted for other means and processes).
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。 The driving device in the embodiment, the rotary motor, linear motor, linear motor, single-axis robot, electric equipment such as an articulated robot, an air cylinder, a hydraulic cylinder, an actuator such as a rodless cylinder and the rotary cylinder on may be employed, (some of which overlap with those exemplified in the embodiment) that they also may be employed that directly or indirectly combinations.

10 シート貼付装置 20 保持手段 22 充填手段 23 排出手段 25 変形許容部(変形許容手段) 10 sheet sticking device 20 retaining means 22 filling means 23 discharging means 25 deformable portion (deformation allowing means)
25A 保持面 30 押圧手段 AD 接着剤 AS 接着シート BS 基材シート WK 被着体 25A holding surface 30 pressing means AD adhesive AS adhesive sheet BS substrate sheet WK adherend

Claims (3)

  1. 接着シートを保持する保持手段と、 Holding means for holding an adhesive sheet,
    前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、 Retractably provided to said holding means with respect to the adherend, an adhesive sheet held by said holding means and a pressing means for affixing to press the adherend,
    前記保持手段は、前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段とを備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の圧力を前記接着シートの押圧中に調整することを特徴とするシート貼付装置。 Said holding means includes a holding surface for holding the adhesive sheet, provided the fluid to be stored, a deformation allowing means for allowing the deformation of the holding surface, and filling means for filling the fluid into the deformation allowing means, sheet and adjusting the pressure of the deformable equipped with the permissible means and discharging means for discharging said fluid, said filling means and said said deformable means controls the discharge means during the pressing of the adhesive sheet sticking apparatus.
  2. 接着シートを保持する保持手段と、 Holding means for holding an adhesive sheet,
    前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、 Retractably provided to said holding means with respect to the adherend, an adhesive sheet held by said holding means and a pressing means for affixing to press the adherend,
    前記保持手段は、 前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段を備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の流体の量を増減させ、前記被着体に貼付された接着シートに対する押圧動作を1回または複数回行う貼付補助動作が可能に設けられていることを特徴とすシート貼付装置。 Said holding means includes a holding surface for holding the adhesive sheet, provided the fluid to be stored, a deformation allowing means for allowing the deformation of the holding surface, and filling means for filling the fluid into the deformation allowing means, and a discharge means for discharging the fluid from the deformation allowing means, said filling means and the controls the discharge means to increase or decrease the amount of fluid in the deformation allowing means, adhesive sheet, wherein the affixed to the adherend sheet sticking device characterized by sticking aid operation for pressing operation one or more times is provided to be against.
  3. 接着シートを保持面で保持する工程と、 A step of holding an adhesive sheet with the holding surface,
    内部に流体を貯留可能に設けられた変形許容手段で前記保持面の変形を許容しながら、前記保持面で保持した接着シートを被着体に押圧して貼付する工程と While allowing deformation of the holding surface with deformable means provided a fluid to be stored inside, a step of sticking by pressing the adhesive sheet held by the holding surface to the adherend,
    前記変形許容手段内の流体を充填または排出して前記変形許容手段内の圧力を前記接着シートの押圧中に調整する工程とを実施することを特徴とするシート貼付方法。 Sheet sticking method which comprises carrying out the step of adjusting the pressure in the deformation allowing means is filled or discharged fluid in the deformable means while pressing the adhesive sheet.
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