JP6223424B2 - Photoelectric conversion element - Google Patents

Description

  The present invention relates to a photoelectric conversion element.

  In recent years, a solar cell that directly converts solar energy into electric energy has been rapidly expected as a next-generation energy source particularly from the viewpoint of global environmental problems. There are various types of solar cells, such as those using compound semiconductors or organic materials, but the mainstream is currently using silicon crystals.

  Currently, the most manufactured and sold solar cells have a structure in which electrodes are respectively formed on a light receiving surface that is a surface on which sunlight is incident and a back surface that is opposite to the light receiving surface.

  However, when an electrode is formed on the light receiving surface, sunlight is reflected and absorbed by the electrode, so that the amount of incident sunlight is reduced by the area of the electrode. For this reason, development of solar cells in which electrodes are formed on the back surface is also being promoted (see, for example, JP 2009-524916 A (Patent Document 1)).

  FIG. 22 is a schematic cross-sectional view of the amorphous / crystalline silicon heterojunction device described in Patent Document 1. As shown in FIG. 22, in the amorphous / crystalline silicon heterojunction device described in Patent Document 1, an intrinsic hydrogenated amorphous silicon transition layer 102 is formed on the back surface of the crystalline silicon wafer 101, and an intrinsic hydrogenated amorphous silicon transition layer is formed. An n-doped region 103 and a p-doped region 104 of hydrogenated amorphous silicon are formed in 102, and electrodes 105 are provided on the n-doped region 103 and the p-doped region 104, and an insulating property is provided between the electrodes 105. A reflective layer 106 is provided.

  In the amorphous / crystalline silicon heterojunction device described in Patent Document 1 shown in FIG. 22, the n-doped region 103 and the p-doped region 104 are formed by using a lithography and / or shadow masking process (for example, Patent Document 1). Paragraph [0020] etc.).

Special table 2009-524916

  However, when the n-doped region 103 and the p-doped region 104 are formed using lithography, the n-doped region 103 and the p-doped region 104 have a high etching selectivity with respect to the intrinsic hydrogenated amorphous silicon transition layer 102. Although it is necessary to etch the n-doped region 103 and the p-doped region 104, Patent Document 1 does not describe such an etching method having a large etching selectivity.

  The thickness of the stacked body of the intrinsic hydrogenated amorphous silicon transition layer 102 and the n-doped region 103 and the thickness of the stacked body of the intrinsic hydrogenated amorphous silicon transition layer 102 and the p-doped region 104 are several to several tens. Since it is nm (paragraph [0018] of Patent Document 1), the intrinsic hydrogenated amorphous silicon transition layer 102 is very thin. Thus, it is very difficult to etch the n-doped region 103 and the p-doped region 104 leaving the very thin intrinsic hydrogenated amorphous silicon transition layer 102.

  When the n-doped region 103 and the p-doped region 104 are formed using a shadow masking process, a mask is used when forming the n-doped region 103 and the p-doped region 104 by plasma CVD (Chemical Vapor Deposition). Since the separation between the n-doped region 103 and the p-doped region 104 becomes difficult due to the wraparound of the gas to the back surface, the patterning accuracy becomes very poor. Therefore, the gap between the n-doped region 103 and the p-doped region 104 is reduced. The interval needs to be increased. However, when the interval between the n-doped region 103 and the p-doped region 104 is increased, the region in which neither the n-doped region 103 nor the p-doped region 104 is formed becomes larger. The conversion efficiency of the heterojunction device is lowered.

  In addition, since the width of the n-doped region 103 is designed to be narrower than the width of the p-doped region 104, the width of the n-doped region 103 is narrowed. For this reason, the parasitic resistance of the electrode 105 formed on the n-doped region 103 is increased.

  Furthermore, since the electrode material used for the electrode 105 formed on the n-doped region 103 and the electrode material used for the electrode 105 formed on the p-doped region 104 are the same, the n-doped region 103 and the p-doped Since a material having an optimal work function cannot be used for each of the regions 104, the parasitic resistance of the electrode 105 tends to increase. In addition, since light is transmitted from the region between the electrodes 105, conversion efficiency tends to decrease.

  In view of the above circumstances, an object of the present invention is to provide a photoelectric conversion element that can be manufactured with high yield and has high characteristics.

  The present invention includes a semiconductor, an intrinsic layer containing hydrogenated amorphous silicon provided on the semiconductor, a first conductivity type layer of a first conductivity type covering a part of the intrinsic layer, and a part of the intrinsic layer. A second conductivity type layer to be coated, a first insulating layer covering a part of the intrinsic layer, a first electrode provided on the first conductivity type layer, and a second conductivity type layer; A first electrode having a first lower electrode in contact with the first conductivity type layer, and a first upper electrode provided on the first lower electrode, wherein the first conductivity type includes: A part of the layer and a part of the second conductivity type layer are photoelectric conversion elements located above a region where the intrinsic layer and the insulating layer are in contact. With this configuration, the first conductivity type layer can be patterned on the insulating layer, and the damage to the semiconductor and the intrinsic layer can be reduced when the first conductivity type layer is patterned. A photoelectric conversion element which can be manufactured with high yield and has high characteristics can be obtained.

  ADVANTAGE OF THE INVENTION According to this invention, it can manufacture with a high yield and can provide a photoelectric conversion element with a high characteristic.

FIG. 3 is a schematic cross-sectional view of the heterojunction back contact cell according to the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating an example of the method for manufacturing the heterojunction back contact cell of the first embodiment. FIG. 6 is a schematic cross-sectional view of a heterojunction back contact cell according to a second embodiment. 6 is a schematic cross-sectional view of a heterojunction back contact cell according to Embodiment 3. FIG. (A) is typical sectional drawing of the heterojunction type | mold back contact cell of Example 1, (b) is typical sectional drawing along XIXb-XIXb of (a). (A) is typical sectional drawing of the heterojunction back contact cell of Example 2, (b) is typical sectional drawing along XXb-XXb of (a). (A) is typical sectional drawing of the heterojunction type back contact cell of Example 3, (b) is typical sectional drawing along XXIb-XXIb of (a). 1 is a schematic cross-sectional view of an amorphous / crystalline silicon heterojunction device described in Patent Document 1. FIG. 6 is a schematic diagram of a configuration of a photoelectric conversion module according to Embodiment 4. FIG. It is the schematic of the structure of the solar energy power generation system of Embodiment 5. FIG. It is the schematic of an example of a structure of the photoelectric conversion module array shown in FIG. It is the schematic of the structure of the solar energy power generation system of Embodiment 6. FIG.

  Embodiments of the present invention will be described below. In the drawings of the present invention, the same reference numerals represent the same or corresponding parts.

<Embodiment 1>
FIG. 1 is a schematic cross-sectional view of a heterojunction back contact cell according to Embodiment 1, which is an example of the photoelectric conversion element of the present invention. The heterojunction back contact cell of Embodiment 1 includes a semiconductor 1 made of n-type single crystal silicon, an intrinsic layer 4 containing i-type hydrogenated amorphous silicon covering the entire back surface of the semiconductor 1, and an intrinsic layer. N-type layer 6 containing n-type hydrogenated amorphous silicon covering a part of the back surface of 4 and p-type layer 8 containing p-type hydrogenated amorphous silicon covering a part of the back surface of intrinsic layer 4 And a first insulating layer 5 covering a part of the back surface of the intrinsic layer 4. Here, the n-type layer 6, the p-type layer 8, and the first insulating layer 5 cover different regions on the back surface of the semiconductor 1.

  The first insulating layer 5 is formed in a strip shape. The n-type layer 6 has a shape in which the concave portion has a groove portion 6b extending linearly in the normal direction of the paper surface of FIG. 1 and a flap portion 6c extending from the upper ends of both side walls of the groove portion 6b to the outer side of the groove portion 6b. Is formed. The p-type layer 8 has a shape in which the concave portion has a groove portion 8b that extends linearly in the normal direction of the paper surface of FIG. 1 and a flap portion 8c that extends from the upper ends of both side walls of the groove portion 8b to the outer side of the groove portion 8b. Is formed.

  A part of the back surface of the first insulating layer 5 is covered with a flap portion 6 c that is an end region of the n-type layer 6, and another part of the back surface of the first insulating layer 5 is covered with a second insulating layer 7. Has been. A part of the back surface of the flap portion 6 c of the n-type layer 6 is covered with the second insulating layer 7. The entire back surface of the second insulating layer 7 is covered with a flap portion 8 c that is an end region of the p-type layer 8.

  A first lower electrode 91 in contact with the n-type layer 6 is provided so as to bury the groove 6b of the n-type layer 6 and cover a part of the back surface of the flap portion 6c. A second electrode 10 is provided in contact with the p-type layer 8 so as to bury the groove 8b of the p-type layer 8 and cover a part of the back surface of the flap 8c. The first lower electrode 91 also covers a part of the back surface of the flap portion 8 c of the p-type layer 8.

  A first upper electrode 92 is provided on the first lower electrode 91, and the first lower electrode 91 and the first upper electrode 92 constitute the first electrode 9. The third insulating layer 11 is provided between the first lower electrode 91 and the second electrode 10 and between the first upper electrode 92 and the second electrode 10, respectively.

  The end portion 6a which is the outer end surface of the flap portion 6c of the n-type layer 6 and the end portion 8a which is the outer end surface of the flap portion 8c of the p-type layer 8 are respectively formed by the intrinsic layer 4 and the first insulating layer 5. It is located above (on the back side of) the region R2 in contact. The width W2 of the region R2 where the intrinsic layer 4 and the first insulating layer 5 are in contact with each other can be, for example, 10 μm to 300 μm.

  The end 6 a of the n-type layer 6 is located on the back surface of the first insulating layer 5, and the end 8 a of the p-type layer 8 is located on the back surface of the second insulating layer 7. Accordingly, the end portion 8 a of the p-type layer 8 is located above the end portion 6 a of the n-type layer 6 with the second insulating layer 7 interposed therebetween.

  The end portion 91 a of the first lower electrode 91 and the end portion 10 a of the second electrode 10 have a portion located above the second insulating layer 7. That is, the end 91 a above the flap portion 8 c of the p-type layer 8 of the first lower electrode 91 is located above the second insulating layer 7. The end portion 91 a of the first lower electrode 91 and the end portion 10 a of the second electrode 10 are located on the p-type layer 8 on the second insulating layer 7.

The first lower electrode 91, the first upper electrode 92, the second electrode 10, and the third insulating layer 11 are similar to the first insulating layer 5, the n-type layer 6, the second insulating layer 7, and the p-type layer 8. 1 has a shape extending linearly in the normal direction of the paper surface. An end portion 9 1 a which is an end surface in the direction perpendicular to the extending direction of the first lower electrode 91 and an end portion 10 a which is an end surface in the direction perpendicular to the extending direction of the second electrode 10 are on the first insulating layer 5. It has a portion located above the n-type layer 6.

  The thickness of the intrinsic layer 4 in the region R1 where the intrinsic layer 4 and the n-type layer 6 are in contact is t1, and the width W1 of the region R1 where the intrinsic layer 4 and the n-type layer 6 are in contact is, for example, 50 μm or more and 500 μm or less. It can be.

  Further, the thickness of the intrinsic layer 4 in the region R3 where the intrinsic layer 4 and the p-type layer 8 are in contact is t2, and the width W3 of the region R3 where the intrinsic layer 4 and the p-type layer 8 are in contact is, for example, 0. It can be 6 mm or more and 2 mm or less.

  The structure on the back surface side of the semiconductor 1 is the above structure, but the texture structure 2 is formed on the light receiving surface opposite to the back surface of the semiconductor 1, and the reflection that also serves as a passivation film on the texture structure 2. A prevention film 3 is formed. The antireflection film 3 may be a laminated film in which an antireflection layer is laminated on a passivation layer.

  Hereinafter, an example of a method for manufacturing the heterojunction back contact cell of the first embodiment will be described with reference to schematic cross-sectional views of FIGS. First, as shown in FIG. 2, an intrinsic layer 4 made of i-type hydrogenated amorphous silicon is laminated on the entire back surface of the semiconductor 1 subjected to RCA cleaning by, for example, plasma CVD, and then the back surface of the intrinsic layer 4 is formed. The first insulating layer 5 is laminated on the entire surface by, eg, plasma CVD. Here, as described above, an antireflection film (not shown) that also serves as a texture structure (not shown) and a passivation film is formed on the light receiving surface of the semiconductor 1. In this specification, “i-type” means an intrinsic semiconductor.

  The semiconductor 1 is not limited to n-type single crystal silicon, and a conventionally known semiconductor may be used, for example. The thickness of the semiconductor 1 is not particularly limited, but can be, for example, 50 μm or more and 300 μm or less, and preferably 70 μm or more and 150 μm or less. Further, the specific resistance of the semiconductor 1 is not particularly limited, but may be, for example, 0.5 Ω · cm to 10 Ω · cm.

  The texture structure of the light receiving surface of the semiconductor 1 can be formed by, for example, texture etching the entire surface of the light receiving surface of the semiconductor 1.

  For example, a silicon nitride film, a silicon oxide film, or a stacked body of a silicon nitride film and a silicon oxide film can be used as the antireflection film serving also as a passivation film on the light receiving surface of the semiconductor 1. Further, the thickness of the antireflection film can be set to, for example, about 100 nm. The antireflection film can be deposited by, for example, a sputtering method or a plasma CVD method.

  The thickness of the intrinsic layer 4 laminated on the entire back surface of the semiconductor 1 is not particularly limited, but can be, for example, 1 nm or more and 10 nm or less, and more specifically about 4 nm.

  The first insulating layer 5 laminated on the entire back surface of the intrinsic layer 4 is not particularly limited as long as it is a layer made of an insulating material, but is preferably made of a material that can be etched without substantially damaging the intrinsic layer 4. As the first insulating layer 5, for example, a silicon nitride layer, a silicon oxide layer, or a stacked body of a silicon nitride layer and a silicon oxide layer formed using a plasma CVD method or the like can be used. In this case, for example, by using hydrofluoric acid, the first insulating layer 5 can be etched with little damage to the intrinsic layer 4. Although the thickness of the 1st insulating layer 5 is not specifically limited, For example, it can be about 100 nm.

  Next, as shown in FIG. 3, a resist 21 having an opening 22 is formed on the back surface of the first insulating layer 5. Then, the back surface of the intrinsic layer 4 is exposed from the opening 22 of the resist 21 by removing the portion of the first insulating layer 5 exposed from the opening 22 of the resist 21.

  Here, the resist 21 having the opening 22 can be formed by, for example, a photolithography method or a printing method. The first insulating layer 5 can be removed by, for example, wet etching using hydrofluoric acid or the like, or etching using an etching paste containing hydrofluoric acid. For example, when the first insulating layer 5 made of silicon nitride and / or silicon oxide is removed by wet etching using hydrofluoric acid or the like or etching using an etching paste containing hydrofluoric acid, Since it is less susceptible to hydrofluoric acid than silicon nitride and silicon oxide, the first insulating layer 5 can be selectively removed without substantially invading the intrinsic layer 4 made of i-type hydrogenated amorphous silicon. For example, when the first insulating layer 5 is wet etched using hydrofluoric acid (for example, a concentration of about 0.1 to 5%), the wet etching can be stopped at the back surface of the intrinsic layer 4.

  Thereafter, after removing all the resist 21 from the back surface of the first insulating layer 5, as shown in FIG. 4, the exposed back surface of the intrinsic layer 4 and the first insulating layer 5 are covered so as to cover the n-type hydrogenated amorphous. An n-type layer 6 made of silicon is laminated by, for example, a plasma CVD method.

  The thickness of the n-type layer 6 that covers the exposed back surface of the intrinsic layer 4 and the first insulating layer 5 is not particularly limited, but may be, for example, about 10 nm.

As the n-type impurity contained in the n-type layer 6, for example, phosphorus can be used, and the n-type impurity concentration of the n-type layer 6 can be set to about 5 × 10 ²⁰ / cm ³ , for example.

  Next, as shown in FIG. 5, a resist 31 having an opening 32 is formed on the back surface of the n-type layer 6. Then, the back surface of the first insulating layer 5 is exposed from the opening 32 of the resist 31 by removing the portion of the n-type layer 6 exposed from the opening 32 of the resist 31.

  Here, the resist 31 having the opening 32 can be formed by, for example, a photolithography method or a printing method. The n-type layer 6 is removed by, for example, wet etching using an alkaline aqueous solution such as an aqueous tetramethylammonium hydroxide solution, an aqueous potassium hydroxide solution, or an aqueous sodium hydroxide solution, so that the first insulating layer 5 is almost completely removed. The n-type layer 6 can be selectively removed without attacking.

  Thereafter, after removing all the resist 31 from the back surface of the n-type layer 6, the second insulating layer 7 is formed so as to cover the exposed back surface of the first insulating layer 5 and the n-type layer 6 as shown in FIG. For example, lamination is performed by plasma CVD, and then a resist 41 having an opening 42 is formed on the back surface of the second insulating layer 7. Then, the back surface of the intrinsic layer 4 is exposed from the opening 42 of the resist 41 by removing the portion of the second insulating layer 7 exposed from the opening 42 of the resist 41 and the first insulating layer 5 immediately below the portion. .

The second insulating layer 7 is not particularly limited as long as it is a layer made of an insulating material. However, it is preferable that the second insulating layer 7 be made of a material that can be etched without almost invading the hydrogenated amorphous silicon. As the second insulating layer 7, for example, a silicon nitride layer, a silicon oxide layer, or a stacked body of a silicon nitride layer and a silicon oxide layer formed using a plasma CVD method or the like can be used. In this case, for example, by using hydrofluoric acid, it is possible to etch the second insulating layer 7 with almost no damage to the hydrogenated amorphous silicon. Although the thickness of the 2nd insulating layer 7 is not specifically limited, For example, it is 100 nm or more and 1000 nm or less.

  The resist 41 having the opening 42 can be formed by, for example, a photolithography method or a printing method. The removal of the second insulating layer 7 and the first insulating layer 5 can be performed, for example, by wet etching using hydrofluoric acid or the like, or etching using an etching paste containing hydrofluoric acid. For example, when the first insulating layer 5 and the second insulating layer 7 made of silicon nitride and / or silicon oxide are removed by wet etching using hydrofluoric acid or the like or etching using an etching paste containing hydrofluoric acid. Since hydrogenated amorphous silicon is less susceptible to hydrofluoric acid than silicon nitride and silicon oxide, the first insulating layer 5 and the second insulating layer hardly invade the intrinsic layer 4 made of i-type hydrogenated amorphous silicon. Layer 7 can be selectively removed.

  Thereafter, after all the resist 41 is removed from the back surface of the second insulating layer 7, the exposed back surface of the intrinsic layer 4, the first insulating layer 5, the n-type layer 6, and the second insulating layer 7, as shown in FIG. A p-type layer 8 made of p-type hydrogenated amorphous silicon is laminated by, for example, a plasma CVD method so as to cover a laminate including

The thickness of the p-type layer 8 is not particularly limited, but can be about 10 nm, for example.
As the p-type impurity contained in the p-type layer 8, for example, boron can be used, and the p-type impurity concentration of the p-type layer 8 can be set to about 5 × 10 ²⁰ / cm ³ , for example.

  Next, as shown in FIG. 8, a resist 51 having an opening 52 is formed on the back surface of the p-type layer 8. Thereafter, the portion of the p-type layer 8 exposed from the opening 52 of the resist 51 is removed.

  Here, the resist 51 having the opening 52 can be formed by, for example, a photolithography method or a printing method. The p-type layer 8 can be removed, for example, by wet etching using a mixed liquid of hydrofluoric acid and nitric acid. A reactive ion etching method may be used instead of the wet etching.

  When the p-type layer 8 is wet-etched using a mixed solution of hydrofluoric acid and nitric acid, the mixing ratio (volume ratio) of hydrofluoric acid and nitric acid is, for example, hydrofluoric acid: nitric acid = 1: 100. Can do. Further, the wet etching of the p-type layer 8 is performed slowly so that the second insulating layer 7 immediately below the p-type layer 8 is completely removed and the back surface of the n-type layer 6 is not exposed. It is preferable to carry out by making the thickness sufficiently thick.

  Next, as shown in FIG. 9, after removing the portion of the second insulating layer 7 exposed from the opening 52 of the resist 51 to expose the back surface of the n-type layer 6, the resist 51 is completely removed. The removal of the second insulating layer 7 can be performed, for example, by wet etching using hydrofluoric acid or the like, or etching using an etching paste containing hydrofluoric acid. For example, when the second insulating layer 7 made of silicon nitride and / or silicon oxide is removed by wet etching using hydrofluoric acid or the like or etching using an etching paste containing hydrofluoric acid, Since it is less susceptible to hydrofluoric acid than silicon nitride and silicon oxide, the second insulating layer 7 can be selectively removed without substantially damaging the n-type layer 6 made of n-type hydrogenated amorphous silicon. .

  Next, as shown in FIG. 10, the second electrode 10 is formed on the back surface of the n-type layer 6 and the back surface of the p-type layer 8.

  As the second electrode 10, a conductive material can be used without particular limitation, but a material having a work function of 4.7 eV or more is preferably used, and in particular, at least platinum and ITO (Indium Tin Oxide) are used. It is more preferable to use a material including one. When a material having a work function of 4.7 eV or more is used as the second electrode 10, particularly when a material containing at least one of platinum and ITO is used, the second electrode 10 is provided between the second electrode 10 and the p-type layer 8. The resistance can be reduced, and the conversion efficiency of the photoelectric conversion element tends to increase.

  Although the formation method of the 2nd electrode 10 is not specifically limited, For example, sputtering method or a vapor deposition method etc. can be used.

  The second electrode 10 may be, for example, one in which a metal layer such as silver or aluminum is formed on the ITO layer. When using a configuration in which a metal layer is provided on the ITO layer as the second electrode 10, the thickness of the ITO layer can be, for example, 5 nm to 100 nm, and the thickness of the metal layer is, for example, 1 μm to 5 μm. It can be as follows.

  Next, as shown in FIG. 11, a resist 61 having an opening 62 is formed on the back surface of the second electrode 10. The resist 61 having the opening 62 can be formed by, for example, a photolithography method or a printing method.

  Next, as shown in FIG. 12, the portion of the second electrode 10 exposed from the opening 62 of the resist 61 is removed. Here, when the second electrode 10 is composed of a laminate of an ITO layer and a silver layer on the ITO layer, for example, after removing the silver layer with a commercially available silver etchant, the ITO is added with hydrochloric acid or the like. A method of removing the layer by etching is conceivable.

  Thereafter, after all the resist 61 is removed from the back surface of the second electrode 10, the third insulating layer 11 is formed so as to cover the exposed back surface of the second electrode 10 and the n-type layer 6 as shown in FIG. Lamination is performed by plasma CVD. Here, in order to take out the second electrode 10 to the outside, a part of the second electrode 10 is masked so that the third insulating layer 11 is not formed.

  The third insulating layer 11 is not particularly limited as long as it is a layer made of an insulating material, but it is preferable that the third insulating layer 11 be made of a material that can be etched without substantially damaging the n-type layer 6. As the third insulating layer 11, for example, a silicon nitride layer, a silicon oxide layer, or a stacked body of a silicon nitride layer and a silicon oxide layer formed using a plasma CVD method or the like can be used. In this case, for example, by using hydrofluoric acid, the first insulating layer 5 can be etched with almost no damage to the n-type layer 6. Although the thickness of the 3rd insulating layer 11 is not specifically limited, For example, it is 100 nm or more and 1000 nm or less.

  Next, as shown in FIG. 14, a resist 71 having an opening 72 is formed on the back surface of the second electrode 10. The resist 71 having the opening 72 can be formed by, for example, a photolithography method or a printing method.

  Next, as shown in FIG. 15, the back surface of the n-type layer 6 is exposed from the opening 72 of the resist 71 by removing the third insulating layer 11 exposed from the opening 72 of the resist 71. The removal of the third insulating layer 11 can be performed, for example, by wet etching using hydrofluoric acid or the like. Since the n-type layer 6 is hardly eroded by hydrofluoric acid, when the third insulating layer 11 is removed by wet etching using hydrofluoric acid, the etching of the third insulating layer 11 is performed on the back surface of the n-type layer 6. Stop at.

  Next, as shown in FIG. 16, all the resist 71 is removed from the back surface of the third insulating layer 11.

  Next, as shown in FIG. 1, the first lower electrode 91 is formed on the back surface of the n-type layer 6, and then the first upper electrode is formed so as to cover the back surfaces of the first lower electrode 91 and the third insulating layer 11. The electrode 92 is formed and the first electrode 9 is formed. Here, in order to take out the second electrode 10 to the outside, a part of the second electrode 10 is masked so that the first electrode 9 is not formed.

  As the first lower electrode 91 and the first upper electrode 92, a conductive material can be used without any particular limitation, but a material having a work function of less than 4.7 eV is preferably used. It is more preferable to use a material containing at least one of zinc. Further, as the first lower electrode 91 and the first upper electrode 92, materials can be selected independently of the second electrode 10, and the same material as the second electrode 10 may be used. When a material having a work function of less than 4.7 eV is used as the first lower electrode 91 and the first upper electrode 92, particularly when a material containing at least one of aluminum and zinc oxide is used, the first lower electrode Since the resistance between 91 and the n-type layer 6 can be reduced, the conversion efficiency of the photoelectric conversion element tends to increase.

  Although the formation method of the 1st electrode 9 is not specifically limited, For example, sputtering method or a vapor deposition method etc. can be used.

  Moreover, you may use the 1st electrode 9 which formed the metal layer, such as silver or aluminum, on the zinc oxide layer, for example. In the case of using a structure in which a silver layer is provided on the zinc oxide layer as the first electrode 9, the thickness of the zinc oxide layer can be, for example, 5 nm or more and 100 nm or less, and the thickness of the silver layer can be, for example, 1 μm or more It can be 5 μm or less.

  As described above, the heterojunction back contact cell of the first embodiment can be manufactured.

  As described above, in the first embodiment, patterning of n-type layer 6 and p-type layer 8 can be performed on first insulating layer 5 and second insulating layer 7, respectively. Thereby, since the damage which the semiconductor 1 and the intrinsic layer 4 receive at the time of patterning of the n-type layer 6 and the p-type layer 8 can be reduced, a heterojunction type back contact cell can be manufactured with a high yield, The characteristics can be enhanced.

  In the first embodiment, the first lower electrode 91 is formed so that the inter-electrode distance L between the end portion 91a of the first lower electrode 91 and the end portion 10a of the second electrode 10 that are adjacent to each other is reduced. And the second electrode 10 can be formed. Therefore, the amount of light incident from the light receiving surface of the semiconductor 1 and transmitted through the semiconductor 1 is reduced between the first lower electrode 91 and the second electrode 10, and the amount of light reflected to the semiconductor 1 side is reduced. Can do a lot. Even if light is transmitted from between the first lower electrode 91 and the second electrode 10, the amount of light reflected by the first upper electrode 92 to the semiconductor 1 side can be increased. Therefore, the characteristics of the heterojunction back contact cell can be improved.

  In the first embodiment, it is not necessary to form the n-type layer 6 and the p-type layer 8 using a shadow masking process. Thereby, since the n-type layer 6 and the p-type layer 8 can be formed with high precision, the heterojunction back contact cell can be manufactured with a high yield and the characteristics can be enhanced.

  In the first embodiment, the first electrode 9 has a two-layer electrode structure of the first lower electrode 91, the first upper electrode 92, and the parasitic resistance can be reduced.

  Furthermore, in the first embodiment, since the material of the first electrode 9 on the n-type layer 6 and the material of the second electrode 10 on the p-type layer 8 can be selected independently, the first electrode Since a material having an optimal work function can be selected for each of the ninth electrode 10 and the second electrode 10, the parasitic resistance can be reduced.

  In particular, in the first embodiment, the end 6a of the n-type layer 6 and the end 8a of the p-type layer 8 are respectively in the first insulating layer 5 in the region R2 where the intrinsic layer 4 and the first insulating layer 5 are in contact with each other. Is located above. Therefore, since the patterning of the n-type layer 6 and the p-type layer 8 can be performed on the first insulating layer 5, the semiconductor 1 and the intrinsic layer 4 are damaged when the n-type layer 6 and the p-type layer 8 are patterned. Can be reduced.

  In the first embodiment, the end portion 8 a of the p-type layer 8 is positioned above the end portion 6 a of the n-type layer 6 with the second insulating layer 7 interposed therebetween. Therefore, the n-type layer 6 and the p-type layer 8 can be insulated in the thickness direction by the second insulating layer 7. Further, since the second insulating layer 7 is provided between the n-type layer 6 and the p-type layer 8, the p-type layer 8 can be patterned with almost no damage to the n-type layer 6. .

In the first embodiment, the end portion 91 a of the first lower electrode 91 and the end portion 10 a of the second electrode 10 are located on the second insulating layer 7. Therefore, since the patterning of the first lower electrode 91 and the second electrode 10 can be performed on the second insulating layer 7, the semiconductor 1, the intrinsic layer 4, and n are patterned when the first lower electrode 91 and the second electrode 10 are patterned. Damage to the mold layer 6 can be reduced. In this case, the interelectrode distance L between the end portion 91a of the first lower electrode 91 and the end portion 10a of the second electrode 10 which are adjacent to each other can be reduced. Since the amount of light transmitted from between the second electrodes 10 can be reduced and the amount of light reflected to the semiconductor 1 side can be increased, the characteristics of the heterojunction back contact cell can be improved.

In the first embodiment, the end portion 9 1 a of the first lower electrode 91 and the end portion 10 a of the second electrode 10 are respectively positioned on the p-type layer 8 provided on the second insulating layer 7. doing. Accordingly, the patterning of the first lower electrode 9 1 and the second electrode 10, it is possible to carry out on the second insulating layer 7, in patterning of the first lower electrode 91 and the second electrode 10, the semiconductor 1, the intrinsic layer 4. Damage to the n-type layer 6 can be reduced. Further, in this case, it is possible to reduce the inter-electrode distance L between the end portion 10a of the end portion 9 1 a and the second electrode 10 of the first lower electrode 91 facing adjacent first lower electrode Since the amount of light transmitted from between 91 and the second electrode 10 can be reduced and the amount of light reflected to the semiconductor 1 side can be increased, the characteristics of the heterojunction back contact cell can be improved. .

  Moreover, in Embodiment 1, it is preferable that the conductivity of the p-type layer 8 is 0.28 S / cm or less. In this case, since the inter-electrode distance L between the first lower electrode 91 and the second electrode 10 can be 10 μm or less, the light transmitted from between the first lower electrode 9 and the second electrode 10 And the amount of light reflected to the semiconductor 1 side can be increased. Thereby, the characteristics of the heterojunction back contact cell can be improved.

  In the first embodiment, since the p-type layer 8 is formed after the n-type layer 6 is formed, a good passivation effect on the back surface of the semiconductor 1 by the intrinsic layer 4 can be obtained. That is, when the p-type layer 8 is formed before the n-type layer 6 is formed, the minority carrier lifetime of the intrinsic layer 4 covered with the p-type layer 8 is reduced by the annealing effect when the n-type layer 6 is stacked. However, when the p-type layer 8 is formed after the n-type layer 6 is formed, such a decrease in minority carrier lifetime can be suppressed.

  In the first embodiment, the thickness t2 of the intrinsic layer 4 in the region R3 in contact with the p-type layer 8 is preferably larger than the thickness t1 of the intrinsic layer 4 in the region R1 in contact with the n-type layer 6. When the thickness t2 of the intrinsic layer 4 immediately below the p-type layer 8 is larger than the thickness t1 of the intrinsic layer 4 immediately below the n-type layer 6, the intrinsic layer 4 can provide a good passivation effect on the back surface of the semiconductor 1. Can be obtained.

  In the above description, the first conductivity type is n-type and the second conductivity type is p-type. However, it goes without saying that the first conductivity type may be p-type and the second conductivity type may be n-type. .

  In the above description, the case where n-type hydrogenated amorphous silicon is used as the n-type layer 6 is described. However, the present invention is not limited to this, and n-type microcrystalline silicon or the like may be used.

  In the above description, the case where p-type hydrogenated amorphous silicon is used as the p-type layer 8 has been described. However, the present invention is not limited to this, and p-type microcrystalline silicon or the like may be used.

<Embodiment 2>
FIG. 17 is a schematic cross-sectional view of a heterojunction back contact cell according to Embodiment 2, which is another example of the photoelectric conversion element of the present invention. In the heterojunction back contact cell of the second embodiment, the end 9 1 a of the first lower electrode 91 is located on the back surface of the n-type layer 6 and the end 10 a of the second electrode 10 is p. It is characterized by being located on the back surface of the mold layer 8.

  Also in the second embodiment, the end 6a of the n-type layer 6 and the end 8a of the p-type layer 8 are located above the first insulating layer 5 in the region R2 where the intrinsic layer 4 and the first insulating layer 5 are in contact with each other. The n-type layer 6 and the p-type layer 8 can be patterned on the first insulating layer 5. Therefore, also in the second embodiment, the damage received by the semiconductor 1 and the intrinsic layer 4 can be reduced, so that the heterojunction back contact cell can be manufactured with a high yield and its characteristics can be improved. it can. Further, since the n-type layer 6 and the p-type layer 8 are insulated in the thickness direction by the second insulating layer 7, the shunt resistance between the first electrode 9 and the second electrode 10 is remarkably increased. Can do.

The heterojunction back contact cell according to the second embodiment is such that the end portion 9 1 a of the first lower electrode 91 is located on the back surface of the n-type layer 6, so that the end portion of the first lower electrode 91 is 9 1 a is different from the heterojunction back contact cell of the first embodiment in which a 1 a is located on the back surface of the p-type layer 8, but the p-type layer 8 is made of p-type hydrogenated amorphous silicon In that case, either of the configurations of the first embodiment and the second embodiment may be used.

When the p-type layer 8 is composed of p-type microcrystalline silicon, the p-type microcrystalline silicon has higher conductivity than the p-type hydrogenated amorphous silicon. The configuration of the type back contact cell is preferred. In this case, the distance L between electrodes is heterozygous back contact of the first embodiment when sufficiently large between the end 10a of the end portion 9 1 a and the second electrode 10 of the first lower electrode 91 Although a cell configuration may be used, it becomes more difficult to increase the amount of light reflected to the semiconductor 1 side as the interelectrode distance L increases.

Further, when the n-type and p-type conductivity types are switched, the configuration of the heterojunction back contact cell of the first embodiment is preferable. Also in this case, the inter-electrode distance L is heterozygous back contact of the second embodiment when sufficiently large between the end 10a of the end portion 9 1 a and the second electrode 10 of the first lower electrode 91 Although a cell configuration may be used, it becomes more difficult to increase the amount of light reflected to the semiconductor 1 side as the interelectrode distance L increases.

  Since the description other than the above in Embodiment 2 is the same as that in Embodiment 1, the description thereof is omitted here.

<Embodiment 3>
FIG. 18 is a schematic cross-sectional view of a heterojunction back contact cell according to Embodiment 3, which is still another example of the photoelectric conversion element of the present invention. The heterojunction back contact cell of Embodiment 3 is characterized in that the n-type layer 6 is formed after the p-type layer 8 is formed.

  Also in the third embodiment, the end 6a of the n-type layer 6 and the end 8a of the p-type layer 8 are formed in the region R2 where the intrinsic layer 4 and the first insulating layer 5 are in contact with each other. The n-type layer 6 and the p-type layer 8 can be patterned on the first insulating layer 5. Therefore, also in the third embodiment, since the damage received by the semiconductor 1 and the intrinsic layer 4 can be reduced, the heterojunction back contact cell can be manufactured with a high yield and the characteristics can be enhanced. it can. Further, since the n-type layer 6 and the p-type layer 8 are insulated in the thickness direction by the second insulating layer 7, the shunt resistance between the first electrode 9 and the second electrode 10 is remarkably increased. Can do.

  Since the description other than the above in the third embodiment is the same as that in the first and second embodiments, the description thereof is omitted here.

  Hereinafter, as another aspect of the present invention, a photoelectric conversion module (Embodiment 4) and a photovoltaic power generation system (Embodiment 5 and Embodiment 6) each including the heterojunction back contact cell according to Embodiments 1 to 3 will be described. explain.

  Since the heterojunction back contact cell of Embodiments 1 to 3 has high characteristics, the photoelectric conversion module and the photovoltaic power generation system including the same also have high characteristics.

<Embodiment 4>
The fourth embodiment is a photoelectric conversion module using the heterojunction back contact cell of the first to third embodiments as a photoelectric conversion element.

<Photoelectric conversion module>
FIG. 23 shows an outline of the configuration of the photoelectric conversion module of the fourth embodiment which is an example of the photoelectric conversion module of the present invention using the heterojunction back contact cell of the first to third embodiments as a photoelectric conversion element. Referring to FIG. 23, the photoelectric conversion module 1000 of Embodiment 4 includes a plurality of photoelectric conversion elements 1001, a cover 1002, and output terminals 1013 and 1014.

  The plurality of photoelectric conversion elements 1001 are arranged in an array and connected in series. FIG. 23 illustrates an arrangement in which the photoelectric conversion elements 1001 are connected in series. However, the arrangement and connection method are not limited to this, and the photoelectric conversion elements 1001 may be connected in parallel. The series and the parallel may be combined. It may be an array. For each of the plurality of photoelectric conversion elements 1001, the heterojunction back contact cell according to any of Embodiments 1 to 3 is used. The photoelectric conversion module 1000 is not limited to the above description as long as at least one of the plurality of photoelectric conversion elements 1001 includes any one of the photoelectric conversion elements of Embodiments 1 to 3. The photoelectric conversion module 1000 may have any configuration. . Further, the number of photoelectric conversion elements 1001 included in the photoelectric conversion module 1000 can be any integer of 2 or more.

  The cover 1002 is composed of a weather resistant cover and covers the plurality of photoelectric conversion elements 1001.

  The output terminal 1013 is connected to the photoelectric conversion element 1001 arranged at one end of the plurality of photoelectric conversion elements 1001 connected in series.

  The output terminal 1014 is connected to the photoelectric conversion element 1001 arranged at the other end of the plurality of photoelectric conversion elements 1001 connected in series.

<Embodiment 5>
Embodiment 5 is a photovoltaic power generation system using the heterojunction back contact cell of Embodiments 1 to 3 as a photoelectric conversion element. Since the photoelectric conversion element of the present invention has high characteristics (such as conversion efficiency), the photovoltaic power generation system of the present invention including the photoelectric conversion element can also have high characteristics. Note that the photovoltaic power generation system is a device that appropriately converts the power output from the photoelectric conversion module and supplies it to a commercial power system or an electric device.

<Solar power generation system>
A solar power generation system is a device that converts power output from a photoelectric conversion module as appropriate and supplies it to a commercial power system or an electrical device.

  In FIG. 24, the outline of the structure of the solar power generation system of Embodiment 5 which is an example of the solar power generation system of this invention which used the heterojunction type | mold back contact cell of Embodiment 1-3 as a photoelectric conversion element is shown. . Referring to FIG. 24, the photovoltaic power generation system 2000 of the fifth embodiment includes a photoelectric conversion module array 2001, a connection box 2002, a power conditioner 2003, a distribution board 2004, and a power meter 2005. As described later, the photoelectric conversion module array 2001 includes a plurality of photoelectric conversion modules 1000 (Embodiment 4).

  The photovoltaic power generation system 2000 generally includes photovoltaic power generation systems such as “Home Energy Management System (HEMS)” and “Building Energy Management System (BEMS)”. By monitoring the power generation amount of 2000, monitoring / controlling the power consumption amount of each electrical device connected to the solar power generation system 2000, the energy consumption can be reduced.

  The connection box 2002 is connected to the photoelectric conversion module array 2001. The power conditioner 2003 is connected to the connection box 2002. Distribution board 2004 is connected to power conditioner 2003 and electrical equipment 2011. The power meter 2005 is connected to the distribution board 2004 and the commercial power system. Note that a storage battery may be connected to the power conditioner 2003. In this case, output fluctuation due to fluctuations in the amount of sunlight can be suppressed, and power stored in the storage battery can be supplied to the electric equipment 2011 or the commercial power system even in a time zone without sunlight. Further, the storage battery may be built in the power conditioner 2003.

<Operation>
The photovoltaic power generation system 2000 of the fifth embodiment operates as follows, for example.

  The photoelectric conversion module array 2001 converts sunlight into electricity to generate DC power, and supplies the DC power to the connection box 2002.

  The connection box 2002 receives DC power generated by the photoelectric conversion module array 2001 and supplies the DC power to the power conditioner 2003.

  The power conditioner 2003 converts the DC power received from the connection box 2002 into AC power and supplies it to the distribution board 2004. Note that a part of the DC power received from the connection box 2002 may be supplied to the distribution board 2004 as it is without being converted to AC power. In addition, when a storage battery is connected to the power conditioner 2003 (or when the storage battery is built in the power conditioner 2003), the power conditioner 2003 appropriately receives a part or all of the DC power received from the connection box 2002. Can be converted into electric power and stored in a storage battery. The electric power stored in the storage battery is appropriately supplied to the power conditioner 2003 side according to the power generation amount of the photoelectric conversion module and the power consumption amount of the electric equipment 2011, and is appropriately converted into power and supplied to the distribution board 2004. Is done.

  The distribution board 2004 supplies at least one of AC power received from the power conditioner 2003 and commercial power received via the power meter 2005 to the electrical equipment 2011. The distribution board 2004 supplies the AC power received from the power conditioner 2003 to the electrical equipment 2011 when the AC power received from the power conditioner 2003 is larger than the power consumption of the electrical equipment 2011. The surplus AC power is supplied to the commercial power system via the power meter 2005.

  Further, the distribution board 2004 electrically converts the AC power received from the commercial power system and the AC power received from the power conditioner 2003 when the AC power received from the power conditioner 2003 is less than the power consumption of the electrical equipment 2011. Supplied to the equipment 2011.

  The power meter 2005 measures the power in the direction from the commercial power system to the distribution board 2004, and measures the power in the direction from the distribution board 2004 to the commercial power system.

<Photoelectric conversion module array>
The photoelectric conversion module array 2001 will be described.

  FIG. 25 shows an outline of an example of the configuration of the photoelectric conversion module array 2001 shown in FIG. Referring to FIG. 25, a photoelectric conversion module array 2001 includes a plurality of photoelectric conversion modules 1000 and output terminals 2013 and 2014.

  The plurality of photoelectric conversion modules 1000 are arranged in an array and connected in series. FIG. 25 illustrates an arrangement in which the photoelectric conversion modules 1000 are connected in series. However, the arrangement and connection method are not limited to this, and the photoelectric conversion modules 1000 may be arranged in parallel or may be combined in series and parallel. It is good also as an arrangement. Note that the number of photoelectric conversion modules 1000 included in the photoelectric conversion module array 2001 can be any integer of 2 or more.

  The output terminal 2013 is connected to the photoelectric conversion module 1000 located at one end of the plurality of photoelectric conversion modules 1000 connected in series.

  The output terminal 2014 is connected to the photoelectric conversion module 1000 located at the other end of the plurality of photoelectric conversion modules 1000 connected in series.

  The above description is merely an example, and the solar power generation system of the fifth embodiment is not limited to the above description as long as it includes at least one heterojunction back contact cell of the first to third embodiments. A configuration is also possible.

<Embodiment 6>
The sixth embodiment is a photovoltaic power generation system that is larger than the photovoltaic power generation system described as the fifth embodiment. The photovoltaic power generation system of the sixth embodiment also includes at least one heterojunction back contact cell of the first to third embodiments. Since the photoelectric conversion element of the present invention has high characteristics (such as conversion efficiency), the photovoltaic power generation system of the present invention including the photoelectric conversion element can also have high characteristics.

<Large-scale solar power generation system>
In FIG. 26, the outline of the structure of the solar power generation system of Embodiment 6 which is an example of the large-scale solar power generation system of this invention is shown. Referring to FIG. 26, solar power generation system 4000 of the sixth embodiment includes a plurality of subsystems 4001, a plurality of power conditioners 4003, and a transformer 4004. The photovoltaic power generation system 4000 is a larger scale photovoltaic power generation system than the photovoltaic power generation system 2000 of the fifth embodiment shown in FIG.

  The plurality of power conditioners 4003 are each connected to the subsystem 4001. In the photovoltaic power generation system 4000, the number of the power conditioners 4003 and the subsystems 4001 connected thereto can be any integer of 2 or more. Note that a storage battery may be connected to the power conditioner 4003. In this case, output fluctuations due to fluctuations in the amount of sunlight can be suppressed, and power stored in the storage battery can be supplied even in a time zone without sunlight. Further, the storage battery may be incorporated in the power conditioner 4003.

  The transformer 4004 is connected to a plurality of power conditioners 4003 and a commercial power system.

  Each of the plurality of subsystems 4001 includes a plurality of module systems 3000. The number of module systems 3000 in the subsystem 4001 can be any integer greater than or equal to two.

  Each of the plurality of module systems 3000 includes a plurality of photoelectric conversion module arrays 2001, a plurality of connection boxes 3002, and a current collection box 3004. The number of the junction box 3002 in the module system 3000 and the photoelectric conversion module array 2001 connected to the junction box 3002 can be any integer of 2 or more.

  The current collection box 3004 is connected to a plurality of connection boxes 3002. The power conditioner 4003 is connected to a plurality of current collection boxes 3004 in the subsystem 4001.

<Operation>
Solar power generation system 4000 of the sixth embodiment operates as follows, for example.

  The plurality of photoelectric conversion module arrays 2001 of the module system 3000 convert sunlight into electricity to generate DC power, and supply the DC power to the current collection box 3004 via the connection box 3002. A plurality of current collection boxes 3004 in the subsystem 4001 supplies DC power to the power conditioner 4003. Further, the plurality of power conditioners 4003 convert DC power into AC power and supply the AC power to the transformer 4004. When a storage battery is connected to the power conditioner 4003 (or when the storage battery is built in the power conditioner 4003), the power conditioner 4003 receives a part or all of the DC power received from the current collection box 3004. Power can be appropriately converted and stored in the storage battery. The electric power stored in the storage battery is appropriately supplied to the power conditioner 4003 side according to the power generation amount of the subsystem 4001, appropriately converted into electric power, and supplied to the transformer 4004.

  The transformer 4004 converts the voltage level of the AC power received from the plurality of power conditioners 4003 and supplies it to the commercial power system.

  The solar power generation system 4000 only needs to include at least one heterojunction back contact cell according to the first to third embodiments, and all the photoelectric conversion elements included in the solar power generation system 4000 are embodiments. The heterojunction back contact cell of 1 to 3 may not be used. For example, all of the photoelectric conversion elements included in one subsystem 4001 are the heterojunction back contact cells of Embodiments 1 to 3, and some or all of the photoelectric conversion elements included in another subsystem 4001 are implemented. In some cases, the heterojunction back contact cell of the first to third embodiments may not be used.

  FIG. 19A shows a cross-sectional structure of the heterojunction back contact cell of Example 1, and FIG. 19B shows a schematic cross-sectional view taken along XIXb-XIXb of FIG. 19A. In FIG. 19A, L represents the interelectrode distance between the end portion 91 a of the adjacent first lower electrode 91 and the end portion 10 a of the second electrode 10, and t represents the p-type layer 8. Indicates the thickness. In FIG. 19B, A indicates the length of one side of the plane of the heterojunction back contact cell of Example 1, and d indicates the electrode pitch.

The inter-electrode distance L, the conductivity σ of the p-type layer 8, the thickness t of the p-type layer 8, the operating voltage V _op , the operating current I _op , the allowable rate α of the inter-electrode leakage current, the cell The length A of one side of the plane, the electrode pitch d, and the relationship of the following formula (I) are satisfied.

  Thus, for example, σ = 1 × 10^-FourS / cm, t = 10 nm, V_op= 0.7V, I _op= 40 mA / cm², Α = 0.01, A = 10 cm, and d = 1 mm, the distance L between the electrodes should satisfy the relationship of L ≧ 0.35 nm from the above formula (I). Recognize.

  Further, the following formula (II) can be derived from the above formula (I).

Therefore, for example, when L ≦ 1 μm, the conductivity σ of the p-type layer 8 only needs to satisfy the relationship of σ ≦ 2.8 × 10 ⁻¹ S / cm.

  FIG. 20A shows a cross-sectional structure of the heterojunction back contact cell of Example 2, and FIG. 20B shows a schematic cross-sectional view taken along XXb-XXb of FIG. The heterojunction back contact cell of Example 2 is different from the heterojunction back contact cell of Example 1 in that an intrinsic layer 44 containing i-type hydrogenated amorphous silicon is provided immediately below the p-type layer 8. Is different.

  In the heterojunction back contact cell of Example 2, since the thickness of the intrinsic layer directly under the n-type layer 6 and the thickness of the intrinsic layer directly under the p-type layer 8 can be controlled independently, conversion efficiency Thus, a heterojunction back contact cell having high characteristics such as can be more easily manufactured.

  That is, as the thickness of the intrinsic layer immediately below the n-type layer 6 is thinner, the parasitic resistance can be reduced in the intrinsic layer 4 with almost no loss of minority carrier lifetime, while the intrinsic property immediately below the p-type layer 8 is reduced. A thicker layer can increase the minority carrier lifetime in the intrinsic layer. Therefore, the thickness of the intrinsic layer immediately below the p-type layer 8 (in Example 2, the total thickness of the intrinsic layer 4 and the intrinsic layer 44) is set to the thickness of the intrinsic layer immediately below the n-type layer 6 (Example 2). Then, by increasing the thickness of the intrinsic layer 4), characteristics such as conversion efficiency can be improved.

FIG. 21A shows a cross-sectional structure of the heterojunction back contact cell of Example 3, and FIG. 21B shows a schematic cross-sectional view along XXIb-XXIb of FIG. 21A. In the heterojunction back contact cell of Example 3, the end 9 1 a of the first lower electrode 91 is located on the back surface of the n-type layer 6, and the n-type layer 6 is formed in a dot shape. This is different from the heterojunction back contact cell of Example 1.

  Also in the heterojunction back contact cell of Example 3, the semiconductor 1 and the intrinsic layer 4 can be manufactured with a high yield by reducing the damage received by the semiconductor 1 and the intrinsic layer 4, and the characteristics can be enhanced.

<Summary>
The present invention includes a semiconductor, an intrinsic layer containing hydrogenated amorphous silicon provided on the semiconductor, a first conductivity type layer of a first conductivity type covering a part of the intrinsic layer, and a part of the intrinsic layer. A second conductivity type layer to be coated, a first insulating layer covering a part of the intrinsic layer, a first electrode provided on the first conductivity type layer, and a second conductivity type layer; A photoelectric conversion element that is located above a region where the intrinsic layer and the insulating layer are in contact with each other. is there. With this configuration, the first conductivity type layer can be patterned on the insulating layer, and the damage to the semiconductor and the intrinsic layer can be reduced when the first conductivity type layer is patterned. A photoelectric conversion element which can be manufactured with high yield and has high characteristics can be obtained.

  The present invention includes a semiconductor, an intrinsic layer containing hydrogenated amorphous silicon provided on the semiconductor, a first conductivity type layer of a first conductivity type covering a part of the intrinsic layer, and a part of the intrinsic layer. A second conductivity type layer to be coated, a first insulating layer covering a part of the intrinsic layer, a first electrode provided on the first conductivity type layer, and a second conductivity type layer; A first lower electrode in contact with the first conductivity type layer, and a first upper electrode provided on the first lower electrode, and the first lower electrode. And a second electrode, and between the first upper electrode and the second electrode, respectively, are photoelectric conversion elements provided with a second insulating layer. With such a structure, a photoelectric conversion element that can be manufactured with high yield and has high characteristics can be provided.

  In the photoelectric conversion element of the present invention, it is preferable that the end of the second conductivity type layer is located above the end of the first conductivity type layer with the second insulating layer interposed therebetween. With such a configuration, the second conductive type layer can be patterned on the insulating layer, and damage to the semiconductor and the intrinsic layer can be reduced when the second conductive type layer is patterned. Further, since the first conductivity type layer and the second conductivity type layer are insulated in the thickness direction, the shunt resistance can be remarkably increased. Therefore, the photoelectric conversion element can be manufactured with high yield and has high characteristics.

  In the photoelectric conversion element of the present invention, the first electrode includes a first lower electrode in contact with the first conductivity type layer, and a first upper electrode provided on the first lower electrode, and the first lower electrode, A second insulating layer is preferably provided between the second electrode and between the first upper electrode and the second electrode. With this configuration, since the first upper electrode is formed on the region between the first lower electrode and the second electrode, the region between the first lower electrode and the second electrode is removed. By reflecting the leaking light with the first upper electrode, it is possible to suppress photoelectric conversion loss. Moreover, since the first upper electrode is formed on the second electrode, the area of the first upper electrode can be increased, and the resistance of the first electrode can be reduced.

  In the photoelectric conversion element of the present invention, it is preferable that the end portion of the first lower electrode and the end portion of the second electrode have a portion located above the second insulating layer. With this configuration, the first lower electrode and the second electrode can be patterned on the second insulating layer, and the semiconductor, the intrinsic layer, and the first conductivity type layer are damaged by the patterning. Can be prevented.

  Moreover, in the photoelectric conversion element of this invention, it is preferable that the electrical conductivity of a 2nd conductivity type layer is 0.28 S / cm or less. With this configuration, the interelectrode distance between the first lower electrode and the second electrode can be made 10 μm or less, so that the light transmitted from between the first lower electrode and the second electrode can be reduced. Since the amount can be reduced and the amount of light reflected to the semiconductor side can be increased, the characteristics of the photoelectric conversion element can be improved.

  Moreover, in the photoelectric conversion element of this invention, it is preferable that a 2nd conductivity type is a p-type. With such a configuration, it is possible to obtain a good passivation effect on the semiconductor surface by the intrinsic layer.

  Moreover, in the photoelectric conversion element of this invention, it is preferable that the thickness of the intrinsic layer in the area | region which contact | connects a 2nd conductivity type layer is thicker than the thickness of the intrinsic layer in the area | region which contact | connects a 1st conductivity type layer. With such a configuration, it is possible to obtain a good passivation effect on the semiconductor surface by the intrinsic layer.

  Although the embodiments and examples of the present invention have been described above, it is also planned from the beginning to appropriately combine the configurations of the above-described embodiments and examples.

  It should be understood that the embodiments and examples disclosed herein are illustrative and non-restrictive in every respect. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  INDUSTRIAL APPLICATION This invention can be utilized for the manufacturing method of a photoelectric conversion element and a photoelectric conversion element, and can be suitably used especially for the manufacturing method of a heterojunction type back contact cell and a heterojunction type back contact cell.

1 semiconductor, 2 texture structure, 3 antireflection film, 4 intrinsic layer, 5 first insulating layer, 6
n-type layer, 6a end, 6b groove, 6c flap, 7 second insulating layer, 8 p-type layer, 8a end, 8b groove, 8c flap, 9 first electrode, 10 second electrode, 10a end , 11 3rd insulating layer, 21 resist, 22 opening, 31 resist, 32 opening, 41 resist, 42 opening, 44 intrinsic layer, 51 resist, 52 opening, 61 resist, 62 opening, 71 resist, 72 Opening, 91 first lower electrode, 91a end, 92 first upper electrode, 101 crystalline silicon wafer, 102 intrinsic hydrogenated amorphous silicon transition layer, 103 n doped region, 104 p doped region, 105 electrode, 106 reflective layer, 1000 photoelectric conversion module, 1001 photoelectric conversion element, 1002 cover, 1013, 1014 output terminal, 2000 photovoltaic power generation system, 2001
Photoelectric conversion module array, 2002 connection box, 2003 power conditioner, 2004 distribution board, 2005 power meter, 2011 electrical equipment, 2013, 2014 output terminal, 3000 module system, 3002 connection box, 3004 current collection box, 4000 sunlight Power generation system, 4001 subsystem, 4003 power conditioner, 4004 transformer.

Claims (5)

Semiconductors,
An intrinsic layer containing hydrogenated amorphous silicon provided on the semiconductor;
A first conductivity type layer of a first conductivity type covering a part of the intrinsic layer;
A second conductivity type layer of a second conductivity type covering a part of the intrinsic layer;
A first insulating layer covering a part of the intrinsic layer;
A first electrode provided on the first conductivity type layer;
A second electrode provided on the second conductivity type layer,
The photoelectric conversion element, wherein a part of the first conductivity type layer and a part of the second conductivity type layer are located above a region where the intrinsic layer and the first insulating layer are in contact with each other.   2. The photoelectric conversion element according to claim 1, wherein an end portion of the second conductivity type layer is located above an end portion of the first conductivity type layer with the second insulating layer interposed therebetween. The first electrode includes a first lower electrode in contact with the first conductivity type layer, and a first upper electrode provided on the first lower electrode,
3. The third insulating layer is provided between the first lower electrode and the second electrode and between the first upper electrode and the second electrode, respectively. Photoelectric conversion element. The first electrode includes a first lower electrode in contact with the first conductivity type layer, and a first upper electrode provided on the first lower electrode,
The end of the end portion and the second electrode of the first lower electrode has a portion which is located above the second insulating layer, a photoelectric conversion element according to claim 2.   The photoelectric conversion element of any one of Claim 1 to 4 whose said 2nd conductivity type is a p-type.

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