JP6111290B2 - 太陽電池 - Google Patents
太陽電池 Download PDFInfo
- Publication number
- JP6111290B2 JP6111290B2 JP2015117741A JP2015117741A JP6111290B2 JP 6111290 B2 JP6111290 B2 JP 6111290B2 JP 2015117741 A JP2015117741 A JP 2015117741A JP 2015117741 A JP2015117741 A JP 2015117741A JP 6111290 B2 JP6111290 B2 JP 6111290B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- solar cell
- type
- dopant
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010410 layer Substances 0.000 claims description 188
- 239000002019 doping agent Substances 0.000 claims description 80
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 68
- 229920005591 polysilicon Polymers 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 59
- 229910052751 metal Inorganic materials 0.000 claims description 55
- 239000002184 metal Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 36
- 238000004519 manufacturing process Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- 239000011241 protective layer Substances 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 239000005388 borosilicate glass Substances 0.000 claims description 4
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 4
- 238000011065 in-situ storage Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 42
- 239000000377 silicon dioxide Substances 0.000 description 21
- 235000012239 silicon dioxide Nutrition 0.000 description 21
- 238000009792 diffusion process Methods 0.000 description 15
- 238000002513 implantation Methods 0.000 description 11
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 238000007639 printing Methods 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022433—Particular geometry of the grid contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0368—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors
- H01L31/03682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Description
[項目1]
通常動作時に太陽光線を集めるべく太陽側を向いた前面と、前記前面に対向する後面とを備える太陽電池であって、
シリコン基板と、
前記基板の後面側表面の上に形成され、前記基板との間で後面接合を形成する第1のドープトポリシリコン層と、
前記基板の前面側表面の上に形成され、前記基板に電気的な接続を行う第2のドープトポリシリコン層と、
前記第1のドープトポリシリコン層と前記基板の前記後面側表面との間の第1の誘電体層と、
前記第2のドープトポリシリコン層と前記基板の前記前面側表面との間の第2の誘電体層と、
前記太陽電池の前記後面の前記第1のドープトポリシリコン層に電気的な接続を行う第1の金属コンタクトと、
前記太陽電池の前記前面の前記第2のドープトポリシリコン層に電気的な接続を行う第2の金属コンタクトとを備え、
前記第1の金属コンタクトおよび前記第2の金属コンタクトは、前記太陽電池から外部の電気回路へ給電することができるよう構成される太陽電池。
[項目2]
前記基板のテクスチャ加工された前面側表面の上に反射保護層をさらに備える項目1に記載の太陽電池。
[項目3]
前記反射保護層は窒化珪素を含む項目2に記載の太陽電池。
[項目4]
前記基板はN型シリコン基板を含み、前記第1のドープトポリシリコン層はP型ドープトポリシリコンを含み、前記第2のドープトポリシリコン層はN型ドープトポリシリコンを含む項目1に記載の太陽電池。
[項目5]
前記第1の金属コンタクトは、前記第1の誘電体層の上に形成されたアルミニウムを含み、前記第1の誘電体層は二酸化珪素を含む項目1に記載の太陽電池。
[項目6]
前記第1の誘電体層は、10および50オングストロームの間の厚みに形成された二酸化珪素を含む項目1に記載の太陽電池。
[項目7]
前記第1の金属コンタクトの上に形成された第3の金属コンタクトをさらに備える項目1に記載の太陽電池。
[項目8]
前記第1のドープトポリシリコン層の上に形成された酸化物層をさらに備え、
前記第1の金属コンタクトは、前記太陽電池の前記後面の酸化物層とともに赤外線反射層を形成する項目1に記載の太陽電池。
[項目9]
通常動作時に太陽光線を集めるべく太陽側を向いた前面と、前記前面に対向する後面とを備える太陽電池を製造する方法であって、
前記太陽電池の前記後面のN型シリコン基板の後面側表面の上に第1の材料層を形成するステップと、
前記第1の材料層の上に、P型ドーパントを含む第1のドーパント源層を形成するステップと、
前記太陽電池の前記前面の前記N型シリコン基板の前面側表面の上に第2の材料層を形成するステップと、
前記第2の材料層の上に、N型ドーパントを含む第2のドーパント源層を形成するステップと、
前記第1のドーパント源層からP型ドーパントを前記第1の材料層へと拡散して、前記シリコン基板との間の後面接合を形成するステップと、
前記第2のドーパント源層からN型ドーパントを前記第2の材料層へと拡散するステップとを備える方法。
[項目10]
前記第1のドーパント源層および前記第2のドーパント源層からドーパントを拡散する前に、前記第1のドーパント源層の上に第1のキャップ層を形成し、前記第2のドーパント源層の上に第2のキャップ層を形成するステップをさらに備える項目9に記載の方法。
[項目11]
前記第1のドーパント源層は、ホウケイ酸塩ガラスを含む項目9に記載の方法。
[項目12]
前記第2のドーパント源層は、リンガラスを含む項目9に記載の方法。
[項目13]
前記第1の材料層および前記第2の材料層はポリシリコンを含む項目9に記載の方法。
[項目14]
前記N型シリコン基板の前記前面側表面をテクスチャ加工するステップと、
前記N型シリコン基板の前記テクスチャ加工された前面側表面の上に反射保護層を形成するステップとをさらに備える項目9に記載の方法。
[項目15]
前記反射保護層は窒化珪素を含む項目14に記載の方法。
[項目16]
前記第1のドーパント源層から前記P型ドーパントを前記第1の材料層へと拡散するステップ、および、前記第2のドーパント源層から前記N型ドーパントを前記第2の材料層へと拡散するステップは、インサイチュに行われる項目9に記載の方法。
[項目17]
通常動作時に太陽光線を集めるべく太陽側を向いた前面と、前記前面に対向する後面とを備える太陽電池であって、
N型シリコン基板と、
前記太陽電池の前記前面の前記N型シリコン基板のテクスチャ加工された表面と、
前記N型シリコン基板の前記テクスチャ加工された表面の上の反射保護層と、
前記N型シリコン基板との間で後面接合を形成するP型ポリシリコン層と、
前記太陽電池の前記前面の上のN型ポリシリコン層と、
前記太陽電池の前記前面から前記N型ポリシリコン層に電気的な接続を行う負極の金属コンタクトと、
前記太陽電池の前記後面から前記P型ポリシリコン層に電気的な接続を行う正極の金属コンタクトとを備える太陽電池。
[項目18]
前記反射保護層は窒化珪素の層を含む項目17に記載の太陽電池。
[項目19]
前記P型ポリシリコン層の上の第1の誘電体キャップ層と、前記N型ポリシリコン層の上の第2の誘電体キャップ層とをさらに備える項目17に記載の太陽電池。
[項目20]
前記正極の金属コンタクトは、前記P型ポリシリコン層の上に形成された誘電体層との間で赤外線反射層を形成する金属を含む項目17に記載の太陽電池。
Claims (10)
- 通常動作時に太陽光線を集めるべく太陽側を向いた前面と、前記前面に対向する後面とを備える太陽電池を製造する方法であって、
前記太陽電池の前記後面のN型シリコン基板の後面側表面の上に第1の材料層を形成するステップと、
前記第1の材料層の上に、P型ドーパントを含む第1のドーパント源層を形成するステップと、
前記太陽電池の前記前面の前記N型シリコン基板の前面側表面の上に第2の材料層を形成するステップと、
前記第2の材料層の上に、N型ドーパントを含む第2のドーパント源層を形成するステップと、
前記N型シリコン基板の前記前面側表面の一部をテクスチャ加工するステップと、
前記第1のドーパント源層からP型ドーパントを前記第1の材料層へと拡散して、前記シリコン基板との間の後面接合を形成するステップと、
前記第2のドーパント源層からN型ドーパントを前記第2の材料層へと拡散するステップと、
N型ドーパントを前記テクスチャ加工された前記前面側表面の前記一部へと拡散して、N型ドープ領域を形成するステップと
を備える方法。 - 前記第1のドーパント源層および前記第2のドーパント源層からドーパントを拡散する前に、前記第1のドーパント源層の上に第1のキャップ層を形成し、前記第2のドーパント源層の上に第2のキャップ層を形成するステップをさらに備える請求項1に記載の方法。
- 前記第1のドーパント源層は、ホウケイ酸塩ガラスを含む請求項1又は2に記載の方法。
- 前記第2のドーパント源層は、リンガラスを含む請求項1から3のいずれか一項に記載の方法。
- 前記第1の材料層および前記第2の材料層はポリシリコンを含む請求項1から4のいずれか一項に記載の方法。
- 前記N型シリコン基板の前記テクスチャ加工された前記前面側表面の前記一部の上に反射保護層を形成するステップ
をさらに備える請求項1から5のいずれか一項に記載の方法。 - 前記反射保護層は窒化珪素を含む請求項6に記載の方法。
- 前記第1のドーパント源層から前記P型ドーパントを前記第1の材料層へと拡散するステップ、および、前記第2のドーパント源層から前記N型ドーパントを前記第2の材料層へと拡散するステップは、インサイチュに行われる請求項1から7のいずれか一項に記載の方法。
- 前記P型ドーパントが拡散された前記第1の材料層に電気的な接続を行う第1の金属コンタクトを形成するステップと、
前記太陽電池の前記前面のテクスチャ加工がされていない領域に、前記N型ドーパントが拡散された前記第2の材料層に電気的な接続を行う第2の金属コンタクトを形成するステップと、
をさらに備える、請求項1から8のいずれか一項に記載の方法。 - 太陽電池であって、
基板の後面側表面の上に形成され、前記基板との間で後面接合を形成する第1のドープトポリシリコン層と、
前記基板の前面側表面の上に形成され、前記基板に電気的な接続を行う第2のドープトポリシリコン層と、
前記第1のドープトポリシリコン層と前記基板の前記後面側表面との間の第1の誘電体層と、
前記第2のドープトポリシリコン層と前記基板の前記前面側表面との間の第2の誘電体層と、
前記第1のドープトポリシリコン層の上に形成された第3の誘電体層と、
前記第3の誘電体層に形成されたコンタクト穴によって前記太陽電池の前記後面の前記第1のドープトポリシリコン層に電気的な接続を行う第1の金属コンタクトと、
前記太陽電池の前記前面の前記第2のドープトポリシリコン層に電気的な接続を行う第2の金属コンタクトと
を備え、
前記第1の金属コンタクトは、前記第3の誘電体層とともに赤外線反射層を形成し、
前記第1の金属コンタクトおよび前記第2の金属コンタクトは、前記太陽電池から外部の電気回路へ給電することができるよう構成される太陽電池。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/166,266 | 2008-07-01 | ||
US12/166,266 US8207444B2 (en) | 2008-07-01 | 2008-07-01 | Front contact solar cell with formed electrically conducting layers on the front side and backside |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013257321A Division JP5763159B2 (ja) | 2008-07-01 | 2013-12-12 | 太陽電池 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015179874A JP2015179874A (ja) | 2015-10-08 |
JP6111290B2 true JP6111290B2 (ja) | 2017-04-05 |
Family
ID=41463417
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011516531A Active JP5438104B2 (ja) | 2008-07-01 | 2009-06-23 | 前面および後面に形成された導電層を有するフロントコンタクト型太陽電池 |
JP2013257321A Active JP5763159B2 (ja) | 2008-07-01 | 2013-12-12 | 太陽電池 |
JP2015117741A Active JP6111290B2 (ja) | 2008-07-01 | 2015-06-10 | 太陽電池 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011516531A Active JP5438104B2 (ja) | 2008-07-01 | 2009-06-23 | 前面および後面に形成された導電層を有するフロントコンタクト型太陽電池 |
JP2013257321A Active JP5763159B2 (ja) | 2008-07-01 | 2013-12-12 | 太陽電池 |
Country Status (7)
Country | Link |
---|---|
US (4) | US8207444B2 (ja) |
EP (2) | EP2311102B1 (ja) |
JP (3) | JP5438104B2 (ja) |
KR (1) | KR101481858B1 (ja) |
CN (2) | CN202094163U (ja) |
ES (1) | ES2923117T3 (ja) |
WO (1) | WO2010002635A1 (ja) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
JP5442453B2 (ja) * | 2007-02-15 | 2014-03-12 | マサチューセッツ インスティテュート オブ テクノロジー | 凹凸化された表面を備えた太陽電池 |
US8222516B2 (en) * | 2008-02-20 | 2012-07-17 | Sunpower Corporation | Front contact solar cell with formed emitter |
US7851698B2 (en) * | 2008-06-12 | 2010-12-14 | Sunpower Corporation | Trench process and structure for backside contact solar cells with polysilicon doped regions |
US20220209037A1 (en) * | 2008-06-12 | 2022-06-30 | Sunpower Corporation | Trench process and structure for backside contact solar cells with polysilicon doped regions |
US8207444B2 (en) | 2008-07-01 | 2012-06-26 | Sunpower Corporation | Front contact solar cell with formed electrically conducting layers on the front side and backside |
CN102113132B (zh) | 2008-07-16 | 2013-09-25 | 应用材料公司 | 使用掺杂层屏蔽的混合异质结太阳能电池制造 |
JP5615837B2 (ja) | 2008-12-10 | 2014-10-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | スクリーン印刷パターンの位置合せのための強化された視覚システム |
US10190030B2 (en) | 2009-04-24 | 2019-01-29 | Alger Alternative Energy, Llc | Treated geothermal brine compositions with reduced concentrations of silica, iron and lithium |
US9034294B1 (en) | 2009-04-24 | 2015-05-19 | Simbol, Inc. | Preparation of lithium carbonate from lithium chloride containing brines |
US8637428B1 (en) | 2009-12-18 | 2014-01-28 | Simbol Inc. | Lithium extraction composition and method of preparation thereof |
US9051827B1 (en) | 2009-09-02 | 2015-06-09 | Simbol Mining Corporation | Selective removal of silica from silica containing brines |
US8741256B1 (en) | 2009-04-24 | 2014-06-03 | Simbol Inc. | Preparation of lithium carbonate from lithium chloride containing brines |
US10935006B2 (en) | 2009-06-24 | 2021-03-02 | Terralithium Llc | Process for producing geothermal power, selective removal of silica and iron from brines, and improved injectivity of treated brines |
US9911781B2 (en) | 2009-09-17 | 2018-03-06 | Sionyx, Llc | Photosensitive imaging devices and associated methods |
US9673243B2 (en) | 2009-09-17 | 2017-06-06 | Sionyx, Llc | Photosensitive imaging devices and associated methods |
EP3594382A3 (en) | 2010-02-17 | 2020-03-18 | All American Lithium LLC | Processes for preparing highly pure lithium carbonate |
US8692198B2 (en) | 2010-04-21 | 2014-04-08 | Sionyx, Inc. | Photosensitive imaging devices and associated methods |
DE102010028189B4 (de) * | 2010-04-26 | 2018-09-27 | Solarworld Industries Gmbh | Solarzelle |
WO2011140273A2 (en) * | 2010-05-04 | 2011-11-10 | Sionyx, Inc. | Photovoltaic devices and associated methods |
FR2959872B1 (fr) * | 2010-05-05 | 2013-03-15 | Commissariat Energie Atomique | Cellule photovoltaique a face arriere structuree et procede de fabrication associe. |
CN106449684B (zh) | 2010-06-18 | 2019-09-27 | 西奥尼克斯公司 | 高速光敏设备及相关方法 |
DE102010054370A1 (de) * | 2010-12-13 | 2012-06-14 | Centrotherm Photovoltaics Ag | Verfahren zur Herstellung von Siliziumsolarzellen mit vorderseitiger Textur und glatter Rückseitenoberfläche |
JP5541139B2 (ja) * | 2010-12-16 | 2014-07-09 | 日立化成株式会社 | n型拡散層形成組成物、n型拡散層の製造方法、及び太陽電池セルの製造方法 |
JP5541138B2 (ja) * | 2010-12-16 | 2014-07-09 | 日立化成株式会社 | p型拡散層形成組成物、p型拡散層の製造方法及び太陽電池セルの製造方法 |
US9496308B2 (en) | 2011-06-09 | 2016-11-15 | Sionyx, Llc | Process module for increasing the response of backside illuminated photosensitive imagers and associated methods |
EP2732402A2 (en) | 2011-07-13 | 2014-05-21 | Sionyx, Inc. | Biometric imaging devices and associated methods |
KR101223033B1 (ko) | 2011-07-29 | 2013-01-17 | 엘지전자 주식회사 | 태양 전지 |
US20130125968A1 (en) * | 2011-11-18 | 2013-05-23 | Sunpreme, Ltd. | Low-cost solar cell metallization over tco and methods of their fabrication |
US9166074B2 (en) * | 2011-12-09 | 2015-10-20 | The Board Of Trustees Of The Leland Stanford Junior University | Metal silicide nanowire arrays for anti-reflective electrodes in photovoltaics |
KR101860919B1 (ko) * | 2011-12-16 | 2018-06-29 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
CN104067395A (zh) * | 2012-01-10 | 2014-09-24 | 日立化成株式会社 | 掩模形成用组合物、太阳能电池用基板的制造方法及太阳能电池元件的制造方法 |
KR101329855B1 (ko) * | 2012-01-31 | 2013-11-14 | 현대중공업 주식회사 | 양면수광형 태양전지의 제조방법 |
DE102012204346A1 (de) * | 2012-03-19 | 2013-09-19 | Gebr. Schmid Gmbh | Verfahren zur Herstellung eines beidseitig unterschiedlich dotierten Halbleiterwafers |
US9064764B2 (en) | 2012-03-22 | 2015-06-23 | Sionyx, Inc. | Pixel isolation elements, devices, and associated methods |
JP5546616B2 (ja) * | 2012-05-14 | 2014-07-09 | セリーボ, インコーポレイテッド | トンネル酸化物を有する後面接合太陽電池 |
MY184055A (en) * | 2012-05-29 | 2021-03-17 | Solexel Inc | Structures and methods of formation of contiguous and non-contiguous base regions for high efficiency back-contact solar cells |
US20140130854A1 (en) * | 2012-11-12 | 2014-05-15 | Samsung Sdi Co., Ltd. | Photoelectric device and the manufacturing method thereof |
US9312406B2 (en) | 2012-12-19 | 2016-04-12 | Sunpower Corporation | Hybrid emitter all back contact solar cell |
KR20150130303A (ko) | 2013-02-15 | 2015-11-23 | 사이오닉스, 아이엔씨. | 안티 블루밍 특성 및 관련 방법을 가지는 높은 동적 범위의 cmos 이미지 센서 |
WO2014151093A1 (en) | 2013-03-15 | 2014-09-25 | Sionyx, Inc. | Three dimensional imaging utilizing stacked imager devices and associated methods |
CN103413859B (zh) | 2013-06-27 | 2016-03-16 | 友达光电股份有限公司 | 太阳能电池与其制作方法 |
US9209345B2 (en) | 2013-06-29 | 2015-12-08 | Sionyx, Inc. | Shallow trench textured regions and associated methods |
US9577134B2 (en) * | 2013-12-09 | 2017-02-21 | Sunpower Corporation | Solar cell emitter region fabrication using self-aligned implant and cap |
CN112349794B (zh) * | 2013-12-20 | 2023-07-14 | 太阳能公司 | 太阳能电池的金属结合部和触点的单步形成 |
US9246046B1 (en) * | 2014-09-26 | 2016-01-26 | Sunpower Corporation | Etching processes for solar cell fabrication |
DE102014220121A1 (de) * | 2014-10-02 | 2016-04-07 | Gebr. Schmid Gmbh | Bifaciale Solarzelle und Verfahren zur Herstellung |
US9882070B2 (en) * | 2016-06-10 | 2018-01-30 | Aalto University Foundation | Photodetector structures and manufacturing the same |
USD822890S1 (en) | 2016-09-07 | 2018-07-10 | Felxtronics Ap, Llc | Lighting apparatus |
NL2017872B1 (en) | 2016-11-25 | 2018-06-08 | Stichting Energieonderzoek Centrum Nederland | Photovoltaic cell with passivating contact |
US10775030B2 (en) | 2017-05-05 | 2020-09-15 | Flex Ltd. | Light fixture device including rotatable light modules |
US10604414B2 (en) | 2017-06-15 | 2020-03-31 | Energysource Minerals Llc | System and process for recovery of lithium from a geothermal brine |
USD862777S1 (en) | 2017-08-09 | 2019-10-08 | Flex Ltd. | Lighting module wide distribution lens |
USD832494S1 (en) | 2017-08-09 | 2018-10-30 | Flex Ltd. | Lighting module heatsink |
USD846793S1 (en) | 2017-08-09 | 2019-04-23 | Flex Ltd. | Lighting module locking mechanism |
USD877964S1 (en) | 2017-08-09 | 2020-03-10 | Flex Ltd. | Lighting module |
USD833061S1 (en) | 2017-08-09 | 2018-11-06 | Flex Ltd. | Lighting module locking endcap |
USD872319S1 (en) | 2017-08-09 | 2020-01-07 | Flex Ltd. | Lighting module LED light board |
USD832495S1 (en) | 2017-08-18 | 2018-10-30 | Flex Ltd. | Lighting module locking mechanism |
USD862778S1 (en) | 2017-08-22 | 2019-10-08 | Flex Ltd | Lighting module lens |
USD888323S1 (en) | 2017-09-07 | 2020-06-23 | Flex Ltd | Lighting module wire guard |
JP7206660B2 (ja) * | 2018-07-17 | 2023-01-18 | セイコーエプソン株式会社 | 光電変換素子、光電変換モジュールおよび電子機器 |
JP2020167243A (ja) | 2019-03-29 | 2020-10-08 | パナソニック株式会社 | 太陽電池セル集合体、及び、太陽電池セルの製造方法 |
DE102019114498A1 (de) * | 2019-05-29 | 2020-12-03 | Hanwha Q Cells Gmbh | Wafer-Solarzelle, Solarmodul und Verfahren zur Herstellung der Wafer-Solarzelle |
US20230161243A1 (en) | 2021-11-09 | 2023-05-25 | Sumitomo Chemical Company, Limited | Salt, acid generator, resin, resist composition and method for producing resist pattern |
US20230305392A1 (en) | 2022-03-24 | 2023-09-28 | Sumitomo Chemical Company, Limited | Salt, acid generator, resin, resist composition and method for producing resist pattern |
Family Cites Families (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3961997A (en) * | 1975-05-12 | 1976-06-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Fabrication of polycrystalline solar cells on low-cost substrates |
US4427839A (en) | 1981-11-09 | 1984-01-24 | General Electric Company | Faceted low absorptance solar cell |
JPS61121425A (ja) * | 1984-11-19 | 1986-06-09 | Nippon Telegr & Teleph Corp <Ntt> | シリコンへの水素添加方法 |
US4665277A (en) | 1986-03-11 | 1987-05-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Floating emitter solar cell |
US4927770A (en) * | 1988-11-14 | 1990-05-22 | Electric Power Research Inst. Corp. Of District Of Columbia | Method of fabricating back surface point contact solar cells |
US5217539A (en) * | 1991-09-05 | 1993-06-08 | The Boeing Company | III-V solar cells and doping processes |
US5479018A (en) | 1989-05-08 | 1995-12-26 | Westinghouse Electric Corp. | Back surface illuminated infrared detector |
US5053083A (en) * | 1989-05-08 | 1991-10-01 | The Board Of Trustees Of The Leland Stanford Junior University | Bilevel contact solar cells |
US5030295A (en) * | 1990-02-12 | 1991-07-09 | Electric Power Research Institut | Radiation resistant passivation of silicon solar cells |
US5057439A (en) * | 1990-02-12 | 1991-10-15 | Electric Power Research Institute | Method of fabricating polysilicon emitters for solar cells |
US5164019A (en) * | 1991-07-31 | 1992-11-17 | Sunpower Corporation | Monolithic series-connected solar cells having improved cell isolation and method of making same |
US5356488A (en) * | 1991-12-27 | 1994-10-18 | Rudolf Hezel | Solar cell and method for its manufacture |
US5266125A (en) | 1992-05-12 | 1993-11-30 | Astropower, Inc. | Interconnected silicon film solar cell array |
JP3203076B2 (ja) * | 1992-11-30 | 2001-08-27 | シャープ株式会社 | 宇宙用シリコン太陽電池 |
US5369291A (en) * | 1993-03-29 | 1994-11-29 | Sunpower Corporation | Voltage controlled thyristor |
US5360990A (en) * | 1993-03-29 | 1994-11-01 | Sunpower Corporation | P/N junction device having porous emitter |
JPH0786271A (ja) * | 1993-09-17 | 1995-03-31 | Fujitsu Ltd | シリコン酸化膜の作製方法 |
JP2661676B2 (ja) * | 1994-09-06 | 1997-10-08 | 株式会社日立製作所 | 太陽電池 |
DE19522539C2 (de) * | 1995-06-21 | 1997-06-12 | Fraunhofer Ges Forschung | Solarzelle mit einem, eine Oberflächentextur aufweisenden Emitter sowie Verfahren zur Herstellung derselben |
US5641362A (en) * | 1995-11-22 | 1997-06-24 | Ebara Solar, Inc. | Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell |
US5620904A (en) * | 1996-03-15 | 1997-04-15 | Evergreen Solar, Inc. | Methods for forming wraparound electrical contacts on solar cells |
US6552414B1 (en) | 1996-12-24 | 2003-04-22 | Imec Vzw | Semiconductor device with selectively diffused regions |
US6262359B1 (en) * | 1999-03-17 | 2001-07-17 | Ebara Solar, Inc. | Aluminum alloy back junction solar cell and a process for fabrication thereof |
US6632730B1 (en) * | 1999-11-23 | 2003-10-14 | Ebara Solar, Inc. | Method for self-doping contacts to a semiconductor |
US6274402B1 (en) * | 1999-12-30 | 2001-08-14 | Sunpower Corporation | Method of fabricating a silicon solar cell |
US6423568B1 (en) * | 1999-12-30 | 2002-07-23 | Sunpower Corporation | Method of fabricating a silicon solar cell |
US6337283B1 (en) * | 1999-12-30 | 2002-01-08 | Sunpower Corporation | Method of fabricating a silicon solar cell |
US6387726B1 (en) * | 1999-12-30 | 2002-05-14 | Sunpower Corporation | Method of fabricating a silicon solar cell |
JP3732993B2 (ja) * | 2000-02-09 | 2006-01-11 | シャープ株式会社 | 太陽電池セルおよびその製造方法 |
US6313395B1 (en) * | 2000-04-24 | 2001-11-06 | Sunpower Corporation | Interconnect structure for solar cells and method of making same |
US6333457B1 (en) * | 2000-08-29 | 2001-12-25 | Sunpower Corporation | Edge passivated silicon solar/photo cell and method of manufacture |
DE10042733A1 (de) * | 2000-08-31 | 2002-03-28 | Inst Physikalische Hochtech Ev | Multikristalline laserkristallisierte Silicium-Dünnschicht-Solarzelle auf transparentem Substrat |
JP3490964B2 (ja) * | 2000-09-05 | 2004-01-26 | 三洋電機株式会社 | 光起電力装置 |
DE10045249A1 (de) * | 2000-09-13 | 2002-04-04 | Siemens Ag | Photovoltaisches Bauelement und Verfahren zum Herstellen des Bauelements |
KR100366349B1 (ko) * | 2001-01-03 | 2002-12-31 | 삼성에스디아이 주식회사 | 태양 전지 및 그의 제조 방법 |
CA2370731A1 (en) * | 2001-02-07 | 2002-08-07 | Ebara Corporation | Solar cell and method of manufacturing same |
US6524880B2 (en) | 2001-04-23 | 2003-02-25 | Samsung Sdi Co., Ltd. | Solar cell and method for fabricating the same |
WO2003047005A2 (en) * | 2001-11-26 | 2003-06-05 | Shell Solar Gmbh | Manufacturing a solar cell with backside contacts |
JP2004140087A (ja) * | 2002-10-16 | 2004-05-13 | Canon Inc | 太陽電池用多結晶シリコン基板とその製造法、及びこの基板を用いた太陽電池の製造法 |
EP1421968B1 (de) | 2002-11-19 | 2009-10-14 | Pajunk GmbH & Co. KG Besitzverwaltung | Vorrichtung zur Fixierung von Katheter und Filter |
US7388147B2 (en) * | 2003-04-10 | 2008-06-17 | Sunpower Corporation | Metal contact structure for solar cell and method of manufacture |
US6998288B1 (en) * | 2003-10-03 | 2006-02-14 | Sunpower Corporation | Use of doped silicon dioxide in the fabrication of solar cells |
WO2005083799A1 (en) | 2004-02-24 | 2005-09-09 | Bp Corporation North America Inc | Process for manufacturing photovoltaic cells |
US7838868B2 (en) | 2005-01-20 | 2010-11-23 | Nanosolar, Inc. | Optoelectronic architecture having compound conducting substrate |
US20060130891A1 (en) | 2004-10-29 | 2006-06-22 | Carlson David E | Back-contact photovoltaic cells |
WO2006053128A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pallet based system for forming thin-film solar cells |
EP1693903B1 (en) * | 2005-02-18 | 2011-05-18 | Clean Venture 21 Corporation | Array of spherical solar cells and its method of fabrication |
US7494607B2 (en) * | 2005-04-14 | 2009-02-24 | E.I. Du Pont De Nemours And Company | Electroconductive thick film composition(s), electrode(s), and semiconductor device(s) formed therefrom |
US7375378B2 (en) * | 2005-05-12 | 2008-05-20 | General Electric Company | Surface passivated photovoltaic devices |
US20070023081A1 (en) * | 2005-07-28 | 2007-02-01 | General Electric Company | Compositionally-graded photovoltaic device and fabrication method, and related articles |
US7468485B1 (en) * | 2005-08-11 | 2008-12-23 | Sunpower Corporation | Back side contact solar cell with doped polysilicon regions |
US7339728B2 (en) | 2005-10-11 | 2008-03-04 | Cardinal Cg Company | Low-emissivity coatings having high visible transmission and low solar heat gain coefficient |
CN100490183C (zh) * | 2005-11-28 | 2009-05-20 | 三菱电机株式会社 | 太阳能电池单元及其制造方法 |
US7737357B2 (en) * | 2006-05-04 | 2010-06-15 | Sunpower Corporation | Solar cell having doped semiconductor heterojunction contacts |
US7928317B2 (en) * | 2006-06-05 | 2011-04-19 | Translucent, Inc. | Thin film solar cell |
KR100880946B1 (ko) * | 2006-07-03 | 2009-02-04 | 엘지전자 주식회사 | 태양전지 및 그 제조방법 |
WO2008047567A1 (en) * | 2006-09-27 | 2008-04-24 | Kyocera Corporation | Solar cell device and method for manufacturing the same |
US20080173347A1 (en) * | 2007-01-23 | 2008-07-24 | General Electric Company | Method And Apparatus For A Semiconductor Structure |
JP2007281530A (ja) * | 2007-07-31 | 2007-10-25 | Sanyo Electric Co Ltd | 太陽電池モジュール |
US20090159111A1 (en) * | 2007-12-21 | 2009-06-25 | The Woodside Group Pte. Ltd | Photovoltaic device having a textured metal silicide layer |
US8222516B2 (en) | 2008-02-20 | 2012-07-17 | Sunpower Corporation | Front contact solar cell with formed emitter |
US8207444B2 (en) | 2008-07-01 | 2012-06-26 | Sunpower Corporation | Front contact solar cell with formed electrically conducting layers on the front side and backside |
US20110132444A1 (en) * | 2010-01-08 | 2011-06-09 | Meier Daniel L | Solar cell including sputtered reflective layer and method of manufacture thereof |
-
2008
- 2008-07-01 US US12/166,266 patent/US8207444B2/en active Active
-
2009
- 2009-06-23 EP EP09774087.2A patent/EP2311102B1/en active Active
- 2009-06-23 CN CN200990100357XU patent/CN202094163U/zh not_active Expired - Lifetime
- 2009-06-23 CN CN2011204267846U patent/CN202487587U/zh not_active Expired - Lifetime
- 2009-06-23 WO PCT/US2009/048295 patent/WO2010002635A1/en active Application Filing
- 2009-06-23 EP EP19151843.0A patent/EP3496164B1/en active Active
- 2009-06-23 JP JP2011516531A patent/JP5438104B2/ja active Active
- 2009-06-23 KR KR1020117002460A patent/KR101481858B1/ko active IP Right Grant
- 2009-06-23 ES ES19151843T patent/ES2923117T3/es active Active
-
2012
- 2012-05-30 US US13/483,941 patent/US9437755B2/en active Active
-
2013
- 2013-12-12 JP JP2013257321A patent/JP5763159B2/ja active Active
-
2015
- 2015-06-10 JP JP2015117741A patent/JP6111290B2/ja active Active
-
2016
- 2016-08-05 US US15/230,191 patent/US10475945B2/en active Active
-
2019
- 2019-10-07 US US16/594,417 patent/US20200052140A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
EP2311102A4 (en) | 2016-06-08 |
KR101481858B1 (ko) | 2015-01-13 |
WO2010002635A1 (en) | 2010-01-07 |
US20200052140A1 (en) | 2020-02-13 |
JP2011527112A (ja) | 2011-10-20 |
US20100000597A1 (en) | 2010-01-07 |
JP2015179874A (ja) | 2015-10-08 |
US20170033251A1 (en) | 2017-02-02 |
ES2923117T3 (es) | 2022-09-23 |
CN202487587U (zh) | 2012-10-10 |
JP2014068034A (ja) | 2014-04-17 |
EP3496164B1 (en) | 2022-04-20 |
US9437755B2 (en) | 2016-09-06 |
CN202094163U (zh) | 2011-12-28 |
KR20110038092A (ko) | 2011-04-13 |
US20140034122A1 (en) | 2014-02-06 |
JP5763159B2 (ja) | 2015-08-12 |
EP2311102B1 (en) | 2019-01-16 |
EP2311102A1 (en) | 2011-04-20 |
EP3496164A1 (en) | 2019-06-12 |
US8207444B2 (en) | 2012-06-26 |
US10475945B2 (en) | 2019-11-12 |
JP5438104B2 (ja) | 2014-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6111290B2 (ja) | 太陽電池 | |
US20230021009A1 (en) | Front contact solar cell with formed emitter | |
US8569614B2 (en) | Solar cell and method of manufacturing the same | |
JP2010502002A (ja) | 薄膜太陽モジュール | |
KR101198438B1 (ko) | 양면 수광형 국부화 에미터 태양전지 및 그 제조 방법 | |
KR101198430B1 (ko) | 양면 수광형 국부화 에미터 태양전지 및 그 제조 방법 | |
KR101181625B1 (ko) | 국부화 에미터 태양전지 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150709 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150709 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160526 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160607 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20160906 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161104 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170110 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170209 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170313 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6111290 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |