JP5996566B2 - ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 - Google Patents
ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 Download PDFInfo
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- JP5996566B2 JP5996566B2 JP2014024950A JP2014024950A JP5996566B2 JP 5996566 B2 JP5996566 B2 JP 5996566B2 JP 2014024950 A JP2014024950 A JP 2014024950A JP 2014024950 A JP2014024950 A JP 2014024950A JP 5996566 B2 JP5996566 B2 JP 5996566B2
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- workpiece
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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JP2014024950A JP5996566B2 (ja) | 2014-02-12 | 2014-02-12 | ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 |
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JP2014024950A JP5996566B2 (ja) | 2014-02-12 | 2014-02-12 | ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 |
Publications (3)
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JP2015153837A JP2015153837A (ja) | 2015-08-24 |
JP2015153837A5 JP2015153837A5 (de) | 2016-07-07 |
JP5996566B2 true JP5996566B2 (ja) | 2016-09-21 |
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JP2014024950A Active JP5996566B2 (ja) | 2014-02-12 | 2014-02-12 | ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6955202B2 (ja) * | 2017-09-04 | 2021-10-27 | 日本電気硝子株式会社 | 膜付き基板の製造方法 |
US11458635B2 (en) * | 2018-05-09 | 2022-10-04 | Intelligrated Headquarters, Llc | Method and system for manipulating articles |
US11318620B2 (en) | 2018-05-09 | 2022-05-03 | Intelligrated Headquarters, Llc | Method and system for manipulating items |
US10822177B2 (en) | 2018-05-09 | 2020-11-03 | Intelligrated Headquarters, Llc | Method and system for manipulating articles |
WO2020175401A1 (ja) * | 2019-02-28 | 2020-09-03 | 日東電工株式会社 | 接着デバイス、これを用いた移載装置、及び移載方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6387439A (ja) * | 1986-09-29 | 1988-04-18 | Hitachi Ltd | 板状体の保持装置 |
JP4690572B2 (ja) * | 2000-11-30 | 2011-06-01 | キヤノンアネルバ株式会社 | 基板重ね合わせ装置 |
JP4030038B2 (ja) * | 2001-08-21 | 2008-01-09 | 株式会社村田製作所 | 通気性ワーク取り出し・保持装置及び通気性ワークの取り扱い方法 |
ATE420751T1 (de) * | 2003-11-21 | 2009-01-15 | Mitsuboshi Diamond Ind Co Ltd | Vakuumsaugkopf und vakuumsaugvorrichtung und tisch, der diese/n verwendet |
DE202007007721U1 (de) * | 2007-05-31 | 2007-08-09 | Jonas & Redmann Automationstechnik Gmbh | Greifer, insbesondere Bernoulli-Greifer |
DE102009010164A1 (de) * | 2009-02-23 | 2010-09-02 | Grenzebach Maschinenbau Gmbh | Vorrichtung und Verfahren zum berührungslosen Erfassen von Glasplatten |
JP2012030941A (ja) * | 2010-07-30 | 2012-02-16 | Japan Finetech Co Ltd | ワーク搬送装置及びワーク搬送方法 |
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JP2015153837A (ja) | 2015-08-24 |
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