JP5952158B2 - Vibration isolator - Google Patents

Vibration isolator Download PDF

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JP5952158B2
JP5952158B2 JP2012224143A JP2012224143A JP5952158B2 JP 5952158 B2 JP5952158 B2 JP 5952158B2 JP 2012224143 A JP2012224143 A JP 2012224143A JP 2012224143 A JP2012224143 A JP 2012224143A JP 5952158 B2 JP5952158 B2 JP 5952158B2
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fixed plate
movable plate
soft resin
vibration
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JP2014077458A (en
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碇 一郎
一郎 碇
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株式会社ユニロック
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Description

本発明は、例えば顕微鏡や天秤等の振動の影響を受けやすい種々の精密機器を作業台等に対して弾性的に支持し、作業台等の振動が精密機器に伝播することを抑制するための除振装置に関するものである。   The present invention elastically supports various precision devices, such as a microscope and a balance, which are easily affected by vibrations, with respect to a work table or the like, and suppresses vibrations of the work table or the like from propagating to the precision devices. The present invention relates to a vibration isolator.

従来、このような除振装置として、例えば特許文献1には、弾性部材とダンパー部を組み合わせた除振装置が開示されている。図7は特許文献1に記載された除振装置30の概略図である。   Conventionally, as such a vibration isolation device, for example, Patent Document 1 discloses a vibration isolation device in which an elastic member and a damper portion are combined. FIG. 7 is a schematic diagram of a vibration isolation device 30 described in Patent Document 1.

除振装置30には、作業台上などに水平に固定配置された固定板31が設けられる。また、固定板31の上方には、少なくとも三本の弾性部材32が設けられる。さらに、弾性部材32の上方には可動板33が設けられる。すなわち、可動板33は、弾性部材32を介して、固定板31に対して相対的に移動可能に支持される。   The vibration isolator 30 is provided with a fixed plate 31 that is horizontally fixed on a work table or the like. In addition, at least three elastic members 32 are provided above the fixed plate 31. Further, a movable plate 33 is provided above the elastic member 32. In other words, the movable plate 33 is supported so as to be movable relative to the fixed plate 31 via the elastic member 32.

固定板31および可動板33の間には、各弾性部材32に隣接して、ダンパー部34が配置される。ダンパー部34は、主に、受け部材35、ダンパー材36、支軸37から構成される。受け部材35は、可動板33に固定される。受け部材35内には、受け部材35と同軸に且つ摺動可能に、略円板状のダンパー材36が設けられる。ダンパー材36の中央付近には、支軸37の一端が連結される。支軸37の他端は、揺動手段38を介して固定板31に対して揺動可能に固定される。   A damper portion 34 is disposed between the fixed plate 31 and the movable plate 33 adjacent to each elastic member 32. The damper portion 34 mainly includes a receiving member 35, a damper material 36, and a support shaft 37. The receiving member 35 is fixed to the movable plate 33. A substantially disc-shaped damper material 36 is provided in the receiving member 35 so as to be slidable coaxially with the receiving member 35. One end of a support shaft 37 is connected near the center of the damper material 36. The other end of the support shaft 37 is fixed to the fixed plate 31 via the swinging means 38 so as to be swingable.

可動板33上には精密機器などが載置される。弾性部材32は、精密機器等の荷重に応じて変形して、精密機器等の荷重を受ける。この状態で、固定板31側が振動すると、ダンパー部34において、粘弾性体から成る円板状のダンパー材36が受け部材35内で摺動する。また、ダンパー材36を支持する支軸37が揺動手段38によって揺動する。この際に、受け部材35内部でダンパー材36が変形することによって、鉛直方向および水平方向にばね性を発揮するとともに、振動に対して減衰性を発現する。   A precision instrument or the like is placed on the movable plate 33. The elastic member 32 is deformed according to the load of the precision instrument or the like and receives the load of the precision instrument or the like. In this state, when the fixed plate 31 side vibrates, a disk-shaped damper material 36 made of a viscoelastic material slides within the receiving member 35 in the damper portion 34. Further, the support shaft 37 that supports the damper material 36 is swung by the swinging means 38. At this time, the damper member 36 is deformed inside the receiving member 35, thereby exhibiting a spring property in the vertical direction and the horizontal direction and expressing a damping property against vibration.

このような構成の除振装置30によれば、簡単な構成により、荷重が変化しても、振動に対する減衰特性およびバネ特性の変化が抑制され、除振性能の劣化が低減される。   According to the vibration isolator 30 having such a configuration, even if the load changes, the vibration damping device 30 can be prevented from changing the damping characteristic and the spring characteristic, and the deterioration of the vibration isolation performance can be reduced.

特開2012―141027号公報JP 2012-141027 A

除振装置30の除振特性は、弾性部材32のばね性とダンパー部34のばね性の合成ばね定数、およびダンパー材36の減衰性の双方に依存する。一方、ダンパー材36に使用する低反発ゴムのばね性、つまり硬度、および減衰性は温度によって変化が大きいという特性を有する。すなわち、除振装置30の除振性能は、温度依存性が高い。このため、種々の環境温度において使用した場合、除振特性の変化が大きくなり、所望する安定した除振性能を得られないという問題がある。   The vibration isolation characteristics of the vibration isolation device 30 depend on both the spring characteristics of the elastic member 32 and the spring characteristics of the damper portion 34 and the damping characteristics of the damper material 36. On the other hand, the spring property, that is, the hardness and the damping property of the low resilience rubber used for the damper material 36 has a characteristic that the change greatly depends on the temperature. That is, the vibration isolation performance of the vibration isolation device 30 is highly temperature dependent. For this reason, when it is used at various environmental temperatures, there is a problem that the change in the vibration isolation characteristic becomes large and the desired stable vibration isolation performance cannot be obtained.

本発明は、以上の点に鑑み、簡単な構成で、除振装置の使用環境温度が変化しても、バネ特性および減衰特性の変化が抑制され、所望する安定した除振性能を有する除振装置を提供することを目的とする。   In view of the above points, the present invention has a simple configuration, and even if the use environment temperature of the vibration isolator changes, the change in the spring characteristics and the damping characteristics is suppressed, and the desired vibration isolation performance is achieved. An object is to provide an apparatus.

前述した目的を達成するために、本発明は、固定板と、前記固定板の上方に配置された弾性部材と、前記固定板に対して前記弾性部材を介して相対的に移動可能に支持された可動板と、前記固定板および前記可動板の間に配置されたダンパー部と、を具備し、前記ダンパー部は、前記固定板または前記可動板の一方に設けられた壁部と、前記壁部に設けられた粘弾性材と、前記壁部に対して前記粘弾性材を介して接合されている揺動部材と、前記固定板または前記可動板の他方に設けられ、前記固定板および前記可動板の対向面に対して略垂直方向に固定された保持材と、前記保持材に固定された磁石と、を具備し、前記磁石と前記揺動部材が磁気吸着していることを特徴とする除振装置である。   In order to achieve the above-described object, the present invention is supported by a fixed plate, an elastic member disposed above the fixed plate, and a relatively movable support member with respect to the fixed plate via the elastic member. A movable plate, and a damper portion disposed between the fixed plate and the movable plate, and the damper portion includes a wall portion provided on one of the fixed plate or the movable plate, and the wall portion. A provided viscoelastic material, a swinging member joined to the wall portion via the viscoelastic material, and provided on the other of the fixed plate or the movable plate, the fixed plate and the movable plate And a magnet fixed to the holding material, and the magnet and the swinging member are magnetically attracted to each other. It is a vibration device.

前記揺動部材には、前記磁石との間に軟質樹脂板が配置されていることが望ましい。また、前記ダンパー部における前記軟質樹脂板の厚さが0.5mm以下であることが望ましい。   It is desirable that a soft resin plate is disposed between the swing member and the magnet. Moreover, it is desirable that the thickness of the soft resin plate in the damper portion is 0.5 mm or less.

前記壁部は、互いに対向するように1対設けられ、前記揺動部材の端部は分岐して、前記揺動部材のそれぞれの前記端部は、前記粘弾性材を介してそれぞれの前記壁部に接合されていてもよい。   The wall portions are provided in a pair so as to be opposed to each other, the end portions of the swinging member are branched, and the end portions of the swinging member are connected to the walls via the viscoelastic material. It may be joined to the part.

本発明によれば、磁石と揺動部材の摩擦力により発生した動摩擦力と、温度依存性が小さい粘弾性材により振動を減衰させるため、温度による性能変化を抑制することができる。したがって、温度依存性の小さい除振装置を提供できる。   According to the present invention, since the vibration is attenuated by the dynamic friction force generated by the friction force between the magnet and the swing member and the viscoelastic material having small temperature dependence, it is possible to suppress the performance change due to temperature. Therefore, it is possible to provide a vibration isolator having a small temperature dependency.

また、軟質樹脂板の厚みや材質を適切に選択し、揺動部材表面に軟質樹脂板を配置することにより、軟質樹脂板の動摩擦力が最適となるように設計することができる。また、磁石の球面で軟質樹脂板表面に窪みを生じさせることができるため、微小振動における磁石と軟質樹脂板の接点の滑りを防止させることができる。また、互いに対向する1対の壁部を設け、揺動部材の端部を2つに分岐させることにより、水平の微小振動に対して、均等に減衰力を与えることができる。また、水平方向の振動成分に対しても、粘弾性体にせん断変形させることで、減衰力を得ることができる。   In addition, by appropriately selecting the thickness and material of the soft resin plate and disposing the soft resin plate on the surface of the swing member, it is possible to design the dynamic friction force of the soft resin plate to be optimum. In addition, since the concave surface can be formed on the surface of the soft resin plate by the spherical surface of the magnet, it is possible to prevent the contact between the magnet and the soft resin plate from slipping in a minute vibration. Further, by providing a pair of wall portions facing each other and branching the end portion of the swinging member into two, a damping force can be evenly applied to the horizontal minute vibration. Also, a damping force can be obtained by shearing the viscoelastic body against a horizontal vibration component.

本発明によれば、除振装置の使用環境温度が変化しても、バネ特性および減衰特性の温度中変化が抑制され、所望する安定した除振性能を有する簡単な構成の除振装置を提供することができる。   According to the present invention, there is provided a vibration isolator having a simple configuration that suppresses changes in spring characteristics and damping characteristics during temperature even when the use environment temperature of the vibration isolator changes, and has a desired stable vibration isolation performance. can do.

本発明による除振装置10の使用状態における構成を示す概略側面図。The schematic side view which shows the structure in the use condition of the vibration isolator 10 by this invention. 除振装置10におけるダンパー部20の構成を示す拡大断面図。FIG. 3 is an enlarged cross-sectional view illustrating a configuration of a damper unit 20 in the vibration isolation device 10. ダンパー部20の構成を示す斜視図。The perspective view which shows the structure of the damper part 20. FIG. ダンパー部20が鉛直方向に揺動した際の状態を示す図。The figure which shows the state at the time of the damper part 20 rock | fluctuating to a perpendicular direction. ダンパー部20が鉛直方向に微小振動した際の状態を示す図。The figure which shows the state at the time of the damper part 20 carrying out a minute vibration in the perpendicular direction. ダンパー部20が水平方向に微小振動した際の状態を示す図。The figure which shows the state at the time of the damper part 20 carrying out a micro vibration in the horizontal direction. 従来の除振装置30の概略図。Schematic of the conventional vibration isolator 30. FIG.

以下、この発明の好適な実施形態を図1から図6を参照しながら、詳細に説明する。尚、以下に述べる実施形態は、本発明の好適な具体例であるから、技術的に好ましい種々の限定が付されているが、本発明の範囲は、以下の説明において特に本発明を限定する旨の記載がない限り、これらの態様に限られるものではない。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS. The embodiments described below are preferable specific examples of the present invention, and thus various technically preferable limitations are given. However, the scope of the present invention particularly limits the present invention in the following description. As long as there is no description of the effect, it is not restricted to these aspects.

図1は、本発明による除振装置10の実施形態の使用状態における構成を示す概略側面図である。除振装置10は、固定板11、可動板12、コイルバネ13およびダンパー部20等から構成されている。固定板11は、作業台14などの上に水平に固定配置される。例えば、固定板11は、四隅の底面に設けられたゴム足11aを介して作業台14上に載置されている。   FIG. 1 is a schematic side view showing the configuration of an embodiment of a vibration isolation device 10 according to the present invention in use. The vibration isolator 10 includes a fixed plate 11, a movable plate 12, a coil spring 13, a damper portion 20, and the like. The fixed plate 11 is horizontally fixed on the work table 14 or the like. For example, the fixed plate 11 is placed on the work table 14 via rubber feet 11a provided on the bottom surfaces of the four corners.

固定板11上には、弾性部材であるコイルバネ13が複数個設けられる。各コイルバネ13は、それぞれ固定板11および可動板12の四隅付近において、固定板11に対して垂直に延びるように配置される。各コイルバネ13は、それぞれコイルバネ下端13aが固定板11に対して固定される。また、コイルバネ上端13bには、可動板12が固定される。したがって、可動板12は、固定板11の上方に所定間隔をあけて水平に配置される。なお、固定板11および可動板12は例えば金属等の板状部材から構成される。   A plurality of coil springs 13, which are elastic members, are provided on the fixed plate 11. Each coil spring 13 is disposed so as to extend perpendicularly to the fixed plate 11 in the vicinity of the four corners of the fixed plate 11 and the movable plate 12. Each coil spring 13 has a coil spring lower end 13 a fixed to the fixed plate 11. The movable plate 12 is fixed to the coil spring upper end 13b. Therefore, the movable plate 12 is horizontally disposed above the fixed plate 11 with a predetermined interval. Note that the fixed plate 11 and the movable plate 12 are made of a plate-like member such as metal.

可動板12の上面には、顕微鏡や天秤等の精密機器15が設置される。ここで、各コイルバネ13は、可動板12上に載置された精密機器15および可動板12の重量による荷重を受けて、そのバネ定数で決まる撓み量だけ弾性変形する。   On the upper surface of the movable plate 12, a precision device 15 such as a microscope or a balance is installed. Here, each coil spring 13 receives a load due to the weight of the precision device 15 and the movable plate 12 placed on the movable plate 12, and is elastically deformed by an amount of deflection determined by its spring constant.

固定板11と可動板12との間であって、コイルバネ13の近傍には、ダンパー部20が設けられる。図2はダンパー部20の構成を示す拡大断面図であり、図3は、ダンパー部20の斜視図である。ダンパー部20は、保持材21、揺動部材24、壁部23等から構成される。保持材21は可動板12の下面に対して略垂直に下方に向けて設けられる。保持材21の先端には、ボール磁石22が固着される。保持材21は鋼材等の磁性材である。ボール磁石22はその磁化軸が水平方向になるように、かつ、磁極が保持材21に対向するように配置される。なお、保持材21は、可動板12の中心からほぼ等距離の位置に複数配置される。   A damper portion 20 is provided between the fixed plate 11 and the movable plate 12 and in the vicinity of the coil spring 13. FIG. 2 is an enlarged cross-sectional view showing the configuration of the damper portion 20, and FIG. 3 is a perspective view of the damper portion 20. The damper portion 20 includes a holding member 21, a swing member 24, a wall portion 23, and the like. The holding member 21 is provided downward substantially perpendicular to the lower surface of the movable plate 12. A ball magnet 22 is fixed to the tip of the holding material 21. The holding material 21 is a magnetic material such as a steel material. The ball magnet 22 is arranged such that its magnetization axis is in the horizontal direction and the magnetic pole faces the holding material 21. Note that a plurality of holding members 21 are arranged at substantially equal distances from the center of the movable plate 12.

壁部23は、固定板11の上面に対して略垂直に、上方に向けて配置される。壁部23は、互いに対向するように1対設けられる。壁部23のそれぞれの対向面側には、粘弾性材26を介して揺動部材24が接合される。なお、粘弾性材26の材質は、温度依存性の低い材料であることが望ましく、例えばウレタンゲル等が適している。   The wall portion 23 is disposed upward substantially perpendicular to the upper surface of the fixed plate 11. A pair of wall portions 23 are provided so as to face each other. The swing member 24 is joined to each facing surface side of the wall portion 23 via a viscoelastic material 26. The material of the viscoelastic material 26 is desirably a material having low temperature dependence, and for example, urethane gel is suitable.

揺動部材24は、正面視において略逆Y字形の形状であり、揺動部材24の一方の端部(下端側)は複数の壁部対向部24bに分岐する。すなわち、分岐したそれぞれ壁部対向部24bが、壁部23と対向して配置され、粘弾性材26を介して接合される。なお、図3に示すように、本実施形態では、正面視において壁部対向部24bは二つに分岐するとともに、平面視においてそれぞれの壁部23に対して2か所で接合される。すなわち、壁部23と壁部対向部24bとは、それぞれ粘弾性材26を介して4か所で接合される。   The swing member 24 has a substantially inverted Y shape when viewed from the front, and one end (lower end side) of the swing member 24 branches into a plurality of wall facing portions 24b. That is, each branched wall portion facing portion 24 b is disposed to face the wall portion 23 and joined via the viscoelastic material 26. As shown in FIG. 3, in the present embodiment, the wall facing portion 24 b branches into two in front view and is joined to each wall portion 23 at two locations in plan view. That is, the wall part 23 and the wall part opposing part 24b are joined in four places via the viscoelastic material 26, respectively.

なお、壁部23と壁部対向部24bの間には、極軟質な粘弾性材26が圧縮された状態で挟持されている。粘弾性材26を圧縮して取付けることにより、粘弾性材26と壁部23および揺動部材24の接着をおこなう必要がなく、接着剤成分による粘弾性材26の変質の恐れがない。また、接着剤の剥離による部材の脱落や移動の可能性がなくなる。このため、減衰特性が安定し、除振装置10の除振性能が良好になる。   Note that an extremely soft viscoelastic material 26 is sandwiched between the wall portion 23 and the wall portion facing portion 24b in a compressed state. By compressing and attaching the viscoelastic material 26, it is not necessary to bond the viscoelastic material 26 to the wall portion 23 and the swinging member 24, and there is no fear of alteration of the viscoelastic material 26 due to the adhesive component. Further, there is no possibility of the member dropping or moving due to the peeling of the adhesive. For this reason, the damping characteristic is stabilized, and the vibration isolation performance of the vibration isolation device 10 is improved.

揺動部材24の他方の端部(上端側)は、保持材対向部24aであり、保持材21と対向するように配置される。保持材対向部24aには軟質樹脂板25が固着される。保持材21は、ボール磁石22の磁力によって、軟質樹脂板25を挟んで保持材対向部24aに吸着する。ここで、軟質樹脂板25の厚さは約0.5mm以下であることが望ましい。軟質樹脂板25が厚すぎると、ボール磁石22と保持材対向部24aとの吸着力が弱くなるためである。なお、揺動部材24の材質は鋼材等の磁性材である。また、軟質樹脂板25は軟質のポリオレフィンや塩化ビニル、ポリエチレン等が適している。   The other end (upper end side) of the swing member 24 is a holding material facing portion 24 a and is disposed so as to face the holding material 21. A soft resin plate 25 is fixed to the holding material facing portion 24a. The holding material 21 is attracted to the holding material facing portion 24 a by sandwiching the soft resin plate 25 with the magnetic force of the ball magnet 22. Here, the thickness of the soft resin plate 25 is desirably about 0.5 mm or less. This is because if the soft resin plate 25 is too thick, the attractive force between the ball magnet 22 and the holding material facing portion 24a becomes weak. The material of the swing member 24 is a magnetic material such as steel. For the soft resin plate 25, soft polyolefin, vinyl chloride, polyethylene, or the like is suitable.

次に、除振装置10の動作について説明する。図4は、作業者が精密機器15(図1参照)を操作した際など、精密機器15が大きく揺動した際において、可動板12が固定板11に対して鉛直方向に揺動した際の状態を示す図である。図4(a)は、固定板11に対して可動板12が離れる方向に揺動した状態を示す図、図4(b)は、固定板11と可動板12とが近付く方向に揺動した状態を示す図である。   Next, the operation of the vibration isolation device 10 will be described. FIG. 4 shows a state in which the movable plate 12 swings in the vertical direction with respect to the fixed plate 11 when the precision device 15 swings greatly, such as when the operator operates the precision device 15 (see FIG. 1). It is a figure which shows a state. 4A shows a state in which the movable plate 12 swings in a direction away from the fixed plate 11, and FIG. 4B swings in a direction in which the fixed plate 11 and the movable plate 12 approach each other. It is a figure which shows a state.

図4(a)に示すように、可動板12が固定板11から離れる方向に鉛直上方向(図中矢印Aa方向)に移動すると、ボール磁石22は軟質樹脂板25の表面を摺動して上方(図中矢印Aa方向)に移動する。このとき、ボール磁石22には、軟質樹脂板25との間に、保持材21の移動方向と逆向きである下方(図中矢印Bb方向)の動摩擦力が生じる。動摩擦力は摩擦減衰力として働き、可動板12側の揺動の運動エネルギーを熱エネルギーに変換して、精密機器15の揺動は素早く収束する。   As shown in FIG. 4A, when the movable plate 12 moves vertically upward (in the direction of arrow Aa) in the direction away from the fixed plate 11, the ball magnet 22 slides on the surface of the soft resin plate 25. Move upward (in the direction of arrow Aa). At this time, a downward dynamic friction force (in the direction of arrow Bb in the figure) opposite to the moving direction of the holding material 21 is generated between the ball magnet 22 and the soft resin plate 25. The dynamic friction force acts as a friction damping force, converts the kinetic energy of the swing on the movable plate 12 side into thermal energy, and the swing of the precision device 15 quickly converges.

また、揺動部材24は、ボール磁石22との摩擦によって上方に引っ張られる。したがって、揺動部材24は壁部23に対して上方に移動する。この際、粘弾性材26が上方向にせん断変形する。したがって、揺動部材24は、粘弾性材26によって、下方向(図中矢印Eb方向)に減衰力が働く。このように、可動板12が上方に移動する際には、ボール磁石22と軟質樹脂板25との動摩擦力と、粘弾性材26の減衰性によって、可動板12の運動エネルギーが吸収される。   Further, the swing member 24 is pulled upward by friction with the ball magnet 22. Therefore, the swing member 24 moves upward with respect to the wall portion 23. At this time, the viscoelastic material 26 is sheared upward. Therefore, the oscillating member 24 is damped by the viscoelastic material 26 in the downward direction (the direction of the arrow Eb in the figure). Thus, when the movable plate 12 moves upward, the kinetic energy of the movable plate 12 is absorbed by the dynamic frictional force between the ball magnet 22 and the soft resin plate 25 and the damping property of the viscoelastic material 26.

一方、図4(b)に示すように、可動板12が固定板11に近付く方向に鉛直下方向(図中矢印Ab方向)に移動すると、ボール磁石22は軟質樹脂板25の表面を摺動して下方(図中矢印Ab方向)に移動する。このとき、ボール磁石22には、軟質樹脂板25との間に、保持材21の移動方向と逆向きである上方(図中矢印Ba方向)の動摩擦力が生じる。   On the other hand, as shown in FIG. 4B, when the movable plate 12 moves vertically downward (in the direction of arrow Ab in the figure) in the direction approaching the fixed plate 11, the ball magnet 22 slides on the surface of the soft resin plate 25. Then, it moves downward (in the direction of arrow Ab in the figure). At this time, an upward dynamic frictional force (in the direction of arrow Ba in the figure) opposite to the moving direction of the holding material 21 is generated between the ball magnet 22 and the soft resin plate 25.

また、揺動部材24は、ボール磁石22との摩擦によって下方に引っ張られ、壁部23に対して下方に移動する。この際、粘弾性材26が下方向にせん断変形する。したがって、揺動部材24は、粘弾性材26によって、上方向(図中矢印Ea方向)に減衰力が働く。このように、可動板12が下方に移動する際にも、ボール磁石22と軟質樹脂板25との動摩擦力と、粘弾性材26の減衰性によって、可動板12の運動エネルギーが吸収される。   The swing member 24 is pulled downward by friction with the ball magnet 22 and moves downward with respect to the wall portion 23. At this time, the viscoelastic material 26 is sheared downward. Therefore, the swinging member 24 has a damping force acting upward (in the direction of arrow Ea in the figure) by the viscoelastic material 26. Thus, even when the movable plate 12 moves downward, the kinetic energy of the movable plate 12 is absorbed by the dynamic frictional force between the ball magnet 22 and the soft resin plate 25 and the damping property of the viscoelastic material 26.

以上のように図4(a)と図4(b)に示した動作を繰り返すことにより、振動は収束する。ここで、粘弾性材26は、圧縮方向と比べて、せん断方向に変形させることにより、より大きく変形し、より大きい減衰力が働く。その結果大きな振動エネルギーを吸収することができる。また、軟質樹脂板25に生じる動摩擦力は、軟質樹脂板25とボール磁石22の動摩擦係数、および、ボール磁石22と保持材対向部24aの吸着力の大きさに比例する。動摩擦係数と磁石吸着力の大きさは、常温域(0℃〜50℃)においては、ほぼ一定である。よって動摩擦力の大きさは使用環境温度範囲で変化しない。したがって、除振装置10は、使用環境温度範囲において、除振特性の変化がほとんどない。   As described above, the vibration converges by repeating the operations shown in FIGS. 4 (a) and 4 (b). Here, the viscoelastic material 26 is deformed more greatly by being deformed in the shear direction than in the compression direction, and a greater damping force is exerted. As a result, large vibration energy can be absorbed. The dynamic friction force generated in the soft resin plate 25 is proportional to the dynamic friction coefficient between the soft resin plate 25 and the ball magnet 22 and the magnitude of the attractive force between the ball magnet 22 and the holding material facing portion 24a. The magnitude of the dynamic friction coefficient and the magnet attracting force are substantially constant in the normal temperature range (0 ° C. to 50 ° C.). Therefore, the magnitude of the dynamic friction force does not change in the operating environment temperature range. Therefore, the vibration isolator 10 has almost no change in vibration isolation characteristics in the operating environment temperature range.

次に、微小な床の振動が作業台14等を伝播して除振装置10に達した時の、ダンパー部20の動作について説明する。図5(a)は、固定板11に対して可動板12が鉛直方向に離れる方向揺動した状態を示す図、図5(b)は、固定板11と可動板12とが近付く方向に揺動した状態を示す図である。   Next, the operation of the damper unit 20 when a minute floor vibration propagates through the work table 14 and reaches the vibration isolation device 10 will be described. FIG. 5A is a diagram showing a state in which the movable plate 12 is swung in the vertical direction with respect to the fixed plate 11, and FIG. 5B is a diagram in which the fixed plate 11 and the movable plate 12 are moved closer to each other. It is a figure which shows the state which moved.

ここで、前述のように、ボール磁石22は軟質樹脂板25を介して保持材対向部24aと磁気吸着する。すなわち、軟質樹脂板25は、ボール磁石22によって押圧される。したがって、軟質樹脂板25の表面には、ボール磁石22の球面形状によって、その接触個所にわずかな窪みが生じる。すなわち、軟質樹脂板25の硬度は、ボール磁石22と保持材対向部24aとの磁気吸着力によって変形可能な程度であることが望ましい。このように、この窪みの影響と磁気吸着力により、ボール磁石22は、軟質樹脂板25に対して、静止力が作用する。なお、このように窪みを形成するためには、軟質樹脂板25の厚みは、0.1mm以上であることが望ましい。   Here, as described above, the ball magnet 22 is magnetically attracted to the holding material facing portion 24 a via the soft resin plate 25. That is, the soft resin plate 25 is pressed by the ball magnet 22. Therefore, on the surface of the soft resin plate 25, a slight depression is generated at the contact portion due to the spherical shape of the ball magnet 22. That is, it is desirable that the hardness of the soft resin plate 25 be such that it can be deformed by the magnetic attractive force between the ball magnet 22 and the holding material facing portion 24a. Thus, the static force acts on the soft resin plate 25 in the ball magnet 22 due to the influence of the depression and the magnetic attraction force. In addition, in order to form a dent in this way, the thickness of the soft resin plate 25 is desirably 0.1 mm or more.

図5(a)に示すように、可動板12が固定板11から離れる方向に鉛直上方向(図中矢印Aa方向)に微小移動すると、ボール磁石22と軟質樹脂板25の接触位置は変化せずに、壁部対向部24bと壁部23の位置が相対変化する。すなわち、微小振動の場合には、振幅による変位力より、軟質樹脂板25に対するボール磁石22の静止力のほうが大きい。このため、ボール磁石22と軟質樹脂板25の接触位置は変化せずに、壁部対向部24bと壁部23の位置が相対変化する。このとき壁部対向部24bと壁部23の間に圧縮挟持された粘弾性材26は、せん断方向上方向に引っ張られる。したがって、これと逆向きである下方(図中矢印Eb方向)に減衰力が働く。このため、可動板12の上方向への運動エネルギーが吸収される。   As shown in FIG. 5 (a), when the movable plate 12 moves slightly in the vertical upward direction (the direction of arrow Aa in the figure) in the direction away from the fixed plate 11, the contact position between the ball magnet 22 and the soft resin plate 25 changes. Instead, the positions of the wall facing portion 24b and the wall portion 23 change relatively. That is, in the case of minute vibration, the static force of the ball magnet 22 against the soft resin plate 25 is greater than the displacement force due to the amplitude. For this reason, the contact position between the ball magnet 22 and the soft resin plate 25 does not change, and the positions of the wall facing portion 24b and the wall 23 change relatively. At this time, the viscoelastic material 26 compressed and sandwiched between the wall facing portion 24b and the wall portion 23 is pulled upward in the shearing direction. Accordingly, a damping force acts downward (in the direction of arrow Eb in the figure) that is opposite to this. For this reason, the upward kinetic energy of the movable plate 12 is absorbed.

同様に、図5(b)に示すように、可動板12が固定板11に近づく方向に鉛直下方向(図中矢印Ab方向)に微小移動すると、ボール磁石22と軟質樹脂板25の接触位置は変化せずに、壁部対向部24bと壁部23の位置が相対変化する。このとき壁部対向部24bと壁部23の間に圧縮挟持された粘弾性材26は、せん断方向下方向に引っ張られる。したがって、これと逆向きである上方(図中矢印Ea方向)に減衰力が働く。このため、可動板12の下方向への運動エネルギーが吸収される。以上のように図5(a)と図5(b)に示した動作を繰り返し、振動を収束することができる。   Similarly, as shown in FIG. 5B, when the movable plate 12 moves slightly vertically downward (in the direction of arrow Ab in the figure) in a direction approaching the fixed plate 11, the contact position between the ball magnet 22 and the soft resin plate 25. Without changing, the positions of the wall facing portion 24b and the wall portion 23 change relative to each other. At this time, the viscoelastic material 26 compressed and sandwiched between the wall facing portion 24b and the wall portion 23 is pulled downward in the shearing direction. Accordingly, a damping force acts upward (in the direction of arrow Ea in the figure), which is opposite to this. For this reason, the downward kinetic energy of the movable plate 12 is absorbed. As described above, the operation shown in FIGS. 5A and 5B can be repeated to converge the vibration.

図6は、固定板11に対して、可動板12が平行(水平方向)に揺動した状態を示す図である。図6(a)に示すように、可動板12が固定板11に対して、略平行に一方の方向(図中右側であって、図中Ca方向)に微小移動すると、揺動部材24は、ボール磁石22と軟質樹脂板25の接点を軸に回転して傾斜する。このとき、一対の壁部23に設けられる粘弾性材26は、それぞれ、壁部23と壁部対向部24bとの間でせん断変形する。このせん断変形の復元力により、揺動部材24には、傾斜方向の逆向きであるFa方向(図中左側)にそれぞれ減衰力が働く。   FIG. 6 is a diagram illustrating a state in which the movable plate 12 swings in parallel (horizontal direction) with respect to the fixed plate 11. As shown in FIG. 6A, when the movable plate 12 is slightly moved in one direction (right side in the drawing and Ca direction in the drawing) substantially parallel to the fixed plate 11, the swing member 24 is moved. The ball magnet 22 and the soft resin plate 25 are tilted by rotating around the contact point. At this time, the viscoelastic material 26 provided on the pair of wall portions 23 undergoes shear deformation between the wall portion 23 and the wall portion facing portion 24b. Due to the restoring force of the shear deformation, a damping force acts on the swing member 24 in the Fa direction (left side in the figure) which is the reverse direction of the tilt direction.

同様に、図6(b)に示すように、可動板12が固定板11に対して、略平行に他方の方向(図中左側であって、図中Cb方向)に微小移動すると、揺動部材24の傾斜によって、粘弾性材26は、壁部23と壁部対向部24bとの間でせん断変形する。このせん断変形の復元力により、揺動部材24には、傾斜方向の逆向きであるFb方向(図中右側)にそれぞれ減衰力が働く。   Similarly, as shown in FIG. 6B, when the movable plate 12 is slightly moved in the other direction (the left side in the drawing and the Cb direction in the drawing) substantially parallel to the fixed plate 11, the swinging motion is caused. Due to the inclination of the member 24, the viscoelastic material 26 undergoes shear deformation between the wall portion 23 and the wall portion facing portion 24b. Due to the restoring force of the shear deformation, a damping force acts on the swing member 24 in the Fb direction (right side in the figure) which is the reverse direction of the tilt direction.

なお、前述したように、可動板12の水平方向への揺動の際に、粘弾性材26は、その厚さ方向に圧縮変形させるよりも、面内方向にせん断変形させるほうが柔らかい。したがって、圧縮変形をさせるよりも、せん断変形をさせた方がより大きく変形させることができる。本発明では、可動板12の水平方向への揺動時に、一対の壁部23の間で揺動部材24を傾けることで、粘弾性材26をせん断変形させることができる。したがって、より多くの振動エネルギーを吸収することができ、除振装置10の除振特性が向上する。以上のように図6(a)と図6(b)に示した動作を繰り返すことで、振動を収束することができる。   As described above, when the movable plate 12 is swung in the horizontal direction, the viscoelastic material 26 is softer to be shear-deformed in the in-plane direction than to be compressively deformed in the thickness direction. Accordingly, the shear deformation can be more greatly deformed than the compressive deformation. In the present invention, the viscoelastic material 26 can be shear-deformed by tilting the swing member 24 between the pair of wall portions 23 when the movable plate 12 swings in the horizontal direction. Therefore, more vibration energy can be absorbed, and the vibration isolation characteristics of the vibration isolation device 10 are improved. As described above, the vibration can be converged by repeating the operations shown in FIGS. 6A and 6B.

以上、本発明の除振装置10を用いれば、可動板12上に種々の質量の精密機器15が搭載されたとしても、コイルバネ13は、可動板12に対して下向きに作用する質量に応じた荷重に応じた撓み量を鉛直方向に生ずる。また、ボール磁石22が軟質樹脂板25上で摺動可能であることから、上述した撓み量の分だけ、保持材21が揺動部材24に対して鉛直方向に沿って移動可能となる。したがって、コイルバネ13の撓み量によって、ダンパー部20におけるボール磁石22と軟質樹脂板25の接触位置が鉛直方向に変化するものの、ボール磁石22と軟質樹脂板25の接触状態を一定にすることができる。   As described above, when the vibration isolator 10 of the present invention is used, even if the precision device 15 with various masses is mounted on the movable plate 12, the coil spring 13 corresponds to the mass acting downward with respect to the movable plate 12. A deflection amount corresponding to the load is generated in the vertical direction. Further, since the ball magnet 22 is slidable on the soft resin plate 25, the holding member 21 can move along the vertical direction with respect to the swing member 24 by the amount of bending described above. Therefore, although the contact position between the ball magnet 22 and the soft resin plate 25 in the damper portion 20 changes in the vertical direction depending on the amount of bending of the coil spring 13, the contact state between the ball magnet 22 and the soft resin plate 25 can be made constant. .

また、ボール磁石22と軟質樹脂板25の接触部には摩擦力が生じるため、保持材21が揺動部材24に対して移動する際の動摩擦力によって減衰力を得ることができる。このように、精密機器15の操作などにより、大きな揺動が生じると、動摩擦力の減衰作用によって、可動板12(精密機器15)の揺れが早く収束する。   Further, since a frictional force is generated at the contact portion between the ball magnet 22 and the soft resin plate 25, a damping force can be obtained by the dynamic frictional force when the holding member 21 moves relative to the swing member 24. As described above, when a large swing occurs due to the operation of the precision instrument 15 or the like, the swing of the movable plate 12 (the precision instrument 15) converges quickly due to the damping action of the dynamic friction force.

なお、動摩擦力は使用環境温度範囲でその大きさが変化しないので、除振装置10に搭載した精密機器15の揺動の収束もこの温度範囲で変化しない。また、動摩擦力の大きさはボール磁石22の保持材対向部24aを吸引する力および軟質樹脂板25の材料に依存する。したがって、ボール磁石22の吸引力つまり磁力と軟質樹脂板25の材質を適切に選択することにより、除振装置10の揺動収束特性を最適なものに決定することができる。   In addition, since the magnitude | size of dynamic friction force does not change in a use environment temperature range, the convergence of the rocking | fluctuation of the precision instrument 15 mounted in the vibration isolator 10 does not change in this temperature range. The magnitude of the dynamic friction force depends on the force for attracting the holding member facing portion 24 a of the ball magnet 22 and the material of the soft resin plate 25. Therefore, by properly selecting the attractive force, that is, the magnetic force of the ball magnet 22 and the material of the soft resin plate 25, the swing convergence characteristic of the vibration isolator 10 can be determined to be optimum.

一方、床から作業台14を介して伝播する振動は、微小な振幅である。この場合には、振幅による変位力が、ボール磁石22の吸引力によって生じているボール磁石22と軟質樹脂板25との静止摩擦力を超えない。また、ボール磁石22の球面により軟質樹脂板25に生じた微小な窪みのために、ボール磁石22と軟質樹脂板25の滑りが抑制される。したがって、揺動部材24は保持材21によって押されて、粘弾性材26をせん断方向に変形させることができる。なお、ボール磁石22は、軟質樹脂板25との接触面が球状であるため、窪みを生じさせやすく、また、窪みが生じた場合でも、大きな揺動の際には容易に軟質樹脂板25に対して摺動しやすい。   On the other hand, the vibration propagating from the floor via the work table 14 has a minute amplitude. In this case, the displacement force due to the amplitude does not exceed the static friction force between the ball magnet 22 and the soft resin plate 25 generated by the attractive force of the ball magnet 22. In addition, due to the minute depression generated in the soft resin plate 25 by the spherical surface of the ball magnet 22, the slip between the ball magnet 22 and the soft resin plate 25 is suppressed. Therefore, the swing member 24 can be pushed by the holding material 21 to deform the viscoelastic material 26 in the shear direction. Since the ball magnet 22 has a spherical contact surface with the soft resin plate 25, it is easy to generate a recess. Even when a recess is generated, the ball magnet 22 is easily formed on the soft resin plate 25 in the case of a large swing. It is easy to slide against.

揺動部材24と壁部23に挟持された粘弾性材26は、その厚み方向には変形しにくく、ばね性が大きいが、せん断方向には変形し易くばね性が小さい。したがって粘弾性材26のせん断変形により減衰作用が生じ、除振装置10の除振特性は共振周波数における共振ゲインピークが小さくなる。また、粘弾性材26は極軟質なゲル材であり、その硬度や減衰特性の温度依存性が小さいものであるため、除振装置10の除振特性の温度依存性を小さくすることができる。   The viscoelastic material 26 sandwiched between the swing member 24 and the wall portion 23 is not easily deformed in the thickness direction and has a large spring property, but is easily deformed in the shear direction and has a small spring property. Accordingly, a damping action is generated by shear deformation of the viscoelastic material 26, and the vibration isolation characteristics of the vibration isolation device 10 have a small resonance gain peak at the resonance frequency. Further, since the viscoelastic material 26 is an extremely soft gel material, and the temperature dependence of the hardness and damping characteristics thereof is small, the temperature dependence of the vibration isolation characteristics of the vibration isolation device 10 can be reduced.

以上、添付図を参照しながら、本発明の形態を説明したが、本発明の技術的範囲は、前述した形態に左右されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において各種の変更例または修正例に想到し得ることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although the form of this invention was demonstrated referring an accompanying drawing, the technical scope of this invention is not influenced by the form mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

例えば、上述した除振装置10においては、可動板12は、固定板11に対して、四隅付近に配置された四個のコイルバネ13により支持され、可動板12の中心からほぼ等距離の位置に配置されているダンパー部20により除振された例について説明したが、本発明はこれに限られない。精密機器15が搭載される可動板12が固定板11に対してバランスよく支持されれば、少なくとも三個以上のコイルバネ13及びダンパー部20により支持されるようにしてもよいことは明らかである。その際、各コイルバネ13及びダンパー部20の配置場所は、これらの加重平均位置が精密機器15の重心と垂直方向に整列するように選定されればよい。   For example, in the vibration isolator 10 described above, the movable plate 12 is supported by the four coil springs 13 disposed in the vicinity of the four corners with respect to the fixed plate 11, and is at a substantially equidistant position from the center of the movable plate 12. Although the example in which vibration is isolated by the disposed damper portion 20 has been described, the present invention is not limited to this. Obviously, if the movable plate 12 on which the precision device 15 is mounted is supported in a balanced manner with respect to the fixed plate 11, it may be supported by at least three coil springs 13 and damper portions 20. At this time, the arrangement locations of the coil springs 13 and the damper portions 20 may be selected so that their weighted average positions are aligned in the vertical direction with the center of gravity of the precision device 15.

また、上述した実施形態においては、固定板11に対して可動板12を支持するために、コイルバネ13が使用されているが、これに限らず、他の種類の金属製弾性部材が使用されてもよいことは明らかである。   In the above-described embodiment, the coil spring 13 is used to support the movable plate 12 with respect to the fixed plate 11, but not limited to this, other types of metal elastic members are used. It is clear that it is good.

10………除振装置
11………固定板
11a……ゴム足
12………可動板
13………コイルバネ
13a……コイルバネ下端
13b……コイルバネ上端
14………作業台
15………精密機器
20………ダンパー部
21………保持材
22………ボール磁石
23………壁部
24………揺動部材
24a……保持材対向部
24b……壁部対向部
25………軟質樹脂板
26………粘弾性材
30………除振装置
31………固定板
32………弾性部材
33………可動板
34………ダンパー部
35………受け部材
36………ダンパー材
37………支軸
38………揺動手段
DESCRIPTION OF SYMBOLS 10 ......... Vibration isolator 11 ......... Fixed plate 11a ... Rubber foot 12 ......... Movable plate 13 ......... Coil spring 13a ... Coil spring lower end 13b ... Coil spring upper end 14 ......... Work table 15 ......... Precision Equipment 20 ......... Damper 21 ......... Holding material 22 ......... Ball magnet 23 ......... Wall 24 ......... Oscillating member 24a ... Holding material facing part 24b ... Wall facing part 25 ......... Soft resin plate 26 ......... Viscoelastic material 30 ......... Vibration isolation device 31 ......... Fixed plate 32 ......... Elastic member 33 ......... Movable plate 34 ......... Damper portion 35 ......... Receiving member 36 ... ... Damper material 37 ......... Support shaft 38 ......... Oscillating means

Claims (4)

固定板と、
前記固定板の上方に配置された弾性部材と、
前記固定板に対して前記弾性部材を介して相対的に移動可能に支持された可動板と、
前記固定板および前記可動板の間に配置されたダンパー部と、を具備し、
前記ダンパー部は、
前記固定板または前記可動板の一方に設けられた壁部と、
前記壁部に設けられた粘弾性材と、
前記壁部に対して前記粘弾性材を介して接合されている揺動部材と、
前記固定板または前記可動板の他方に設けられ、前記固定板および前記可動板の対向面に対して略垂直方向に固定された保持材と、
前記保持材に固定された磁石と、
を具備し、
前記磁石と前記揺動部材が磁気吸着していることを特徴とする除振装置。
A fixed plate,
An elastic member disposed above the fixed plate;
A movable plate supported to be movable relative to the fixed plate via the elastic member;
A damper portion disposed between the fixed plate and the movable plate,
The damper part is
A wall provided on one of the fixed plate or the movable plate;
A viscoelastic material provided on the wall;
A swing member joined to the wall portion via the viscoelastic material;
A holding member provided on the other of the fixed plate or the movable plate and fixed in a substantially vertical direction with respect to opposing surfaces of the fixed plate and the movable plate;
A magnet fixed to the holding material;
Comprising
A vibration isolation device, wherein the magnet and the swing member are magnetically attracted.
前記揺動部材には、前記磁石との間に軟質樹脂板が配置されていることを特徴とする請求項1に記載の除振装置。   The vibration isolator according to claim 1, wherein a soft resin plate is disposed between the swing member and the magnet. 前記ダンパー部における前記軟質樹脂板の厚さが0.5mm以下であることを特徴とする請求項2に記載の除振装置。   The vibration isolator according to claim 2, wherein a thickness of the soft resin plate in the damper portion is 0.5 mm or less. 前記壁部は、互いに対向するように1対設けられ、前記揺動部材の端部は分岐して、前記揺動部材のそれぞれの前記端部は、前記粘弾性材を介してそれぞれの前記壁部に接合されていることを特徴とする請求項1から請求項3いずれかに記載の除振装置。   The wall portions are provided in a pair so as to be opposed to each other, the end portions of the swinging member are branched, and the end portions of the swinging member are connected to the walls via the viscoelastic material. The vibration isolator according to any one of claims 1 to 3, wherein the vibration isolator is joined to the portion.
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