JP5947704B2 - 積層体の検査方法、積層体検査装置および積層体製造装置 - Google Patents
積層体の検査方法、積層体検査装置および積層体製造装置 Download PDFInfo
- Publication number
- JP5947704B2 JP5947704B2 JP2012258504A JP2012258504A JP5947704B2 JP 5947704 B2 JP5947704 B2 JP 5947704B2 JP 2012258504 A JP2012258504 A JP 2012258504A JP 2012258504 A JP2012258504 A JP 2012258504A JP 5947704 B2 JP5947704 B2 JP 5947704B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- laminate
- light intensity
- shadow
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007689 inspection Methods 0.000 title claims description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000000034 method Methods 0.000 title description 24
- 238000010030 laminating Methods 0.000 claims description 28
- 238000005286 illumination Methods 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 12
- 238000004804 winding Methods 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000003475 lamination Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 description 73
- 239000004020 conductor Substances 0.000 description 39
- 239000011295 pitch Substances 0.000 description 6
- 230000002787 reinforcement Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
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- 230000035699 permeability Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/58—Testing of lines, cables or conductors
- G01R31/59—Testing of lines, cables or conductors while the cable continuously passes the testing apparatus, e.g. during manufacture
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012258504A JP5947704B2 (ja) | 2012-11-27 | 2012-11-27 | 積層体の検査方法、積層体検査装置および積層体製造装置 |
PCT/JP2013/080629 WO2014084043A1 (ja) | 2012-11-27 | 2013-11-13 | 積層体の検査方法、積層体検査装置および積層体製造装置 |
CN201320746658.8U CN203949629U (zh) | 2012-11-27 | 2013-11-22 | 层叠体检查装置 |
PH12015501064A PH12015501064A1 (en) | 2012-11-27 | 2015-05-14 | Method for inspecting layered body, device for inspecting layered body, and device for manufacturing layered body. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012258504A JP5947704B2 (ja) | 2012-11-27 | 2012-11-27 | 積層体の検査方法、積層体検査装置および積層体製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014106078A JP2014106078A (ja) | 2014-06-09 |
JP5947704B2 true JP5947704B2 (ja) | 2016-07-06 |
Family
ID=50827689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012258504A Active JP5947704B2 (ja) | 2012-11-27 | 2012-11-27 | 積層体の検査方法、積層体検査装置および積層体製造装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5947704B2 (zh) |
CN (1) | CN203949629U (zh) |
PH (1) | PH12015501064A1 (zh) |
WO (1) | WO2014084043A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019168315A (ja) * | 2018-03-23 | 2019-10-03 | 三菱電機株式会社 | 測定装置、回路基板、表示装置、および測定方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6464945A (en) * | 1987-09-07 | 1989-03-10 | Olympus Optical Co | Sheet position detecting device |
DE3934933A1 (de) * | 1989-10-20 | 1991-04-25 | Pfaff Ag G M | Anordnung und verfahren zum detektieren einer werkstueckkante |
JPH08304032A (ja) * | 1994-06-27 | 1996-11-22 | Honshu Paper Co Ltd | コンデンサ用金属化フィルムのマージン部幅および金属蒸着膜厚さ測定方法 |
JPH08122022A (ja) * | 1994-10-24 | 1996-05-17 | Furukawa Electric Co Ltd:The | フラットケーブルの寸法測定装置 |
-
2012
- 2012-11-27 JP JP2012258504A patent/JP5947704B2/ja active Active
-
2013
- 2013-11-13 WO PCT/JP2013/080629 patent/WO2014084043A1/ja active Application Filing
- 2013-11-22 CN CN201320746658.8U patent/CN203949629U/zh not_active Expired - Lifetime
-
2015
- 2015-05-14 PH PH12015501064A patent/PH12015501064A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO2014084043A1 (ja) | 2014-06-05 |
PH12015501064A1 (en) | 2015-07-27 |
CN203949629U (zh) | 2014-11-19 |
JP2014106078A (ja) | 2014-06-09 |
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