JP5823706B2 - Semiconductor device - Google Patents

Semiconductor device Download PDF

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JP5823706B2
JP5823706B2 JP2011041939A JP2011041939A JP5823706B2 JP 5823706 B2 JP5823706 B2 JP 5823706B2 JP 2011041939 A JP2011041939 A JP 2011041939A JP 2011041939 A JP2011041939 A JP 2011041939A JP 5823706 B2 JP5823706 B2 JP 5823706B2
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electrode member
semiconductor chip
semiconductor device
support member
base
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JP2012178528A (en
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西村 直樹
直樹 西村
博明 岸本
博明 岸本
和則 稲見
和則 稲見
内田 稔雄
稔雄 内田
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Sansha Electric Manufacturing Co Ltd
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この発明は、半導体装置に関し、特に、外部導体固定用のボルトが嵌合される電極部材を備えた半導体装置に関する。   The present invention relates to a semiconductor device, and more particularly to a semiconductor device provided with an electrode member into which a bolt for fixing an outer conductor is fitted.

従来の半導体装置において、図8に示すように、半導体チップ(あるいは導体層)101上に、外部導体103固定用のボルト104が嵌合される電極部材102が半田付けで固定されるものがある。特許文献1には、半導体チップがマウントされる導体層にこのような電極部材が固定された例が開示されている。   In a conventional semiconductor device, as shown in FIG. 8, an electrode member 102 on which a bolt 104 for fixing an external conductor 103 is fitted is fixed on a semiconductor chip (or conductor layer) 101 by soldering. . Patent Document 1 discloses an example in which such an electrode member is fixed to a conductor layer on which a semiconductor chip is mounted.

特開平9−321216号公報(図1参照。)JP-A-9-32216 (see FIG. 1)

この従来の半導体装置では、電極構造が簡素化されるので薄型化に寄与する一方で、ボルト104の着脱時にトルクが電極部材102の固定部Fに作用し、電極部材102が剥離する不具合が発生していた。このトルクは、回転モーメントとして作用するものである。したがって、電極部材102の固定力の強度は、固定部Fの面積の大小よりも、固定部Fの中心からの距離、換言すれば、エッジ間距離(図中L1で現す。)に依存する。特に、この電極部材102は製造上の制約により、下部にテーパ102Aが形成されていて、その固定部Fに向かって外径が縮小する形状故に、エッジ間距離を増やすことが難しかった。   In this conventional semiconductor device, since the electrode structure is simplified, it contributes to a reduction in thickness. On the other hand, when the bolt 104 is attached / detached, a torque acts on the fixing portion F of the electrode member 102 and the electrode member 102 is peeled off. Was. This torque acts as a rotational moment. Therefore, the strength of the fixing force of the electrode member 102 depends on the distance from the center of the fixing portion F, in other words, the distance between the edges (indicated by L1 in the drawing) rather than the size of the area of the fixing portion F. In particular, this electrode member 102 has a taper 102A formed in the lower portion due to manufacturing restrictions, and because the outer diameter decreases toward the fixed portion F, it is difficult to increase the distance between the edges.

本発明は、上記の課題に鑑みて、外部導体固定用のボルトが嵌合される電極部材を使用した半導体装置において、ボルト着脱時に固定部に作用するトルクによる電極部材の剥離を抑制することを目的とする。   In view of the above-described problems, the present invention provides a semiconductor device using an electrode member to which a bolt for fixing an external conductor is fitted, and suppresses peeling of the electrode member due to torque acting on the fixing portion when the bolt is attached or detached. Objective.

この発明の半導体装置は、ベース板と、前記ベース板の上方に配置された半導体チップと、前記半導体チップの上方に配置され、外部導体固定用のボルトが嵌合されるとともに、前記半導体チップに接続される電極部材と、を有し、前記ベース板、前記半導体チップ、及び前記電極部材が樹脂で封止されるものである。そして、前記電極部材は上部が大径で下部が小径に形成された異径の柱形を呈し、前記電極部材と前記半導体チップとの間に金属製の支持部材を設け、該支持部材は、前記電極部材の前記小径の下部の高さ以上の高さ寸法を有し垂直方向に延びる脚部、前記脚部に連設し前記電極部材の中心方向に延びる足部、及び前記電極部材の下部が嵌入される貫通穴が形成された台部を有し、少なくとも一対の前記脚部と足部の対が前記台部を挟んで対向する方向に配置され、
前記支持部材は、その足部で前記半導体チップ上に固定され、前記電極部材は、その小径の下部が前記支持部材の台部の貫通穴に嵌入されるとともに、その大径の上部の底面で前記支持部材の台部上に支持固定されるものである。
The semiconductor device according to the present invention includes a base plate, a semiconductor chip disposed above the base plate, and a bolt for fixing an external conductor, which is disposed above the semiconductor chip, and is attached to the semiconductor chip. The base plate, the semiconductor chip, and the electrode member are sealed with resin. The electrode member has a columnar shape with a different diameter, the upper part having a large diameter and the lower part having a small diameter, and a metal support member is provided between the electrode member and the semiconductor chip. A leg portion having a height dimension equal to or higher than a height of the lower portion of the small diameter of the electrode member, a leg portion extending in the vertical direction and extending in the center direction of the electrode member, and a lower portion of the electrode member Is disposed in a direction in which at least a pair of the leg portion and the foot portion is opposed to each other with the base portion interposed therebetween,
The support member is fixed on the semiconductor chip by its foot portion , and the electrode member has a small-diameter lower portion fitted into a through-hole in the base portion of the support member, and a bottom surface of the large-diameter upper portion. And is supported and fixed on the base portion of the support member.

この構成によると、電極部材は、大径の上部の底面で支持部材の台部に支持固定される。これにより、電極部材の固定部のエッジ間距離が増し、支持部材に対する固定力が強化される。   According to this configuration, the electrode member is supported and fixed to the base portion of the support member at the bottom surface of the upper portion having a large diameter. Thereby, the distance between the edges of the fixing portion of the electrode member is increased, and the fixing force with respect to the support member is strengthened.

また、前記支持部材は、前記台部を安定的に支えることが出来るように、前記足部が連設される前記脚部を複数有することが望ましい。例えば、平面視で前記台部に対して対向する方向に二股で脚部を形成するなど、台部に関して線対称となる関係で複数の脚部を設けると、支持部材がより安定する。   In addition, the support member preferably includes a plurality of the leg portions to which the foot portions are continuously provided so that the base portion can be stably supported. For example, if a plurality of leg portions are provided in a line-symmetrical relationship with respect to the base portion, such as forming a leg portion in two directions in a direction facing the base portion in plan view, the support member becomes more stable.

さらに、前記電極部材の周囲にローレット加工が施すと、そのギザギザが封止樹脂に食い込み、周方向の回転に対して大きな摩擦を生じる。これにより、ボルトの着脱時に固定部にトルクが作用しても、電極部材が容易に回転しないように出来る。   Further, when the knurling process is performed around the electrode member, the knurled bites into the sealing resin, and a large friction is generated against the rotation in the circumferential direction. Thereby, even if a torque acts on the fixing portion when the bolt is attached or detached, the electrode member can be prevented from easily rotating.

この発明によれば、ボルト着脱時に固定部に作用するトルクによる電極部材の剥離を抑制することが可能となる。   According to this invention, it becomes possible to suppress peeling of the electrode member due to torque acting on the fixed portion when the bolt is attached or detached.

本発明の一実施形態に係る半導体装置を示す平面図(a)及び正面図(b)である。1A and 1B are a plan view and a front view showing a semiconductor device according to an embodiment of the present invention. 上記半導体装置を示す、図1(a)におけるx−x線断面図である。FIG. 2 is a sectional view taken along line xx in FIG. 1A showing the semiconductor device. 上記半導体装置の回路図である。It is a circuit diagram of the semiconductor device. 支持部材を示す展開図である。It is an expanded view which shows a supporting member. 支持部材を示す平面図(a)及び斜視図(b)である。It is the top view (a) and perspective view (b) which show a support member. 半導体チップ、支持部材、電極部材の取付関係を説明する上記半導体装置の要部の分解立面図である。It is a decomposition | disassembly elevational view of the principal part of the said semiconductor device explaining the attachment relationship of a semiconductor chip, a supporting member, and an electrode member. 本発明に係る半導体チップ、支持部材、電極部材の取付関係を説明する上記半導体装置の要部の断面図(a)を、従来技術に係る半導体装置の要部の断面図(b)と合わせて示すもの。The cross-sectional view (a) of the main part of the semiconductor device for explaining the mounting relationship of the semiconductor chip, the support member, and the electrode member according to the present invention is combined with the cross-sectional view (b) of the main part of the semiconductor device according to the prior art. What to show. 従来技術に係る半導体装置、半導体チップ、支持部材、電極部材の取付関係を説明する要部の断面図である。It is sectional drawing of the principal part explaining the attachment relation of the semiconductor device which concerns on a prior art, a semiconductor chip, a supporting member, and an electrode member.

この発明の一実施形態に係る半導体装置の構成を、図面を用いて説明する。   A configuration of a semiconductor device according to an embodiment of the present invention will be described with reference to the drawings.

図1に示すように、この実施形態に係る半導体装置10は、ベース板1に樹脂製のケース2がモールドされ、左右端部に後述する固定具13が設けられている。また、半導体装置10の上面には、電極部材8が露出して埋め込まれている。   As shown in FIG. 1, in the semiconductor device 10 according to this embodiment, a resin case 2 is molded on a base plate 1, and fixtures 13 described later are provided on left and right ends. Further, the electrode member 8 is exposed and embedded on the upper surface of the semiconductor device 10.

図2に、図1(a)のx−x断面図を示す。図2に示すように、この実施形態に係る半導体装置10は、大きく、ベース板1、半導体チップ6、支持部材7、及び電極部材8を有する。   FIG. 2 is a sectional view taken along line xx of FIG. As shown in FIG. 2, the semiconductor device 10 according to this embodiment is large and includes a base plate 1, a semiconductor chip 6, a support member 7, and an electrode member 8.

ベース板1は、高熱伝導性の金属(例えば、銅やアルミニウムなど)の板材を所定のサイズにカットして作製される。ベース板1は、半導体チップ6から発生する熱を外部に放熱するためのヒートシンクとして機能する。   The base plate 1 is produced by cutting a plate material of a metal having high thermal conductivity (for example, copper or aluminum) into a predetermined size. The base plate 1 functions as a heat sink for radiating heat generated from the semiconductor chip 6 to the outside.

半導体チップ6は、ベース板1の上方に配置される。より具体的には、ベース板1上にセラミック基板4が接着剤などにより固定され、さらにセラミック基板4上に端子板5が半田付けで固定され、端子板5上に半導体チップ6が半田付けで固定される。本実施の形態では、半導体チップは例えば、ダイオードである。   The semiconductor chip 6 is disposed above the base plate 1. More specifically, the ceramic substrate 4 is fixed on the base plate 1 with an adhesive or the like, the terminal plate 5 is fixed on the ceramic substrate 4 by soldering, and the semiconductor chip 6 is soldered on the terminal plate 5. Fixed. In the present embodiment, the semiconductor chip is, for example, a diode.

端子板5は、細長い板金の長手方向についてその中央付近をプレス加工により凸状に隆起させた形状を呈する。端子板5は、面一に形成された両側の取付部51の下面でセラミック基板4上に半田付けで固定される。端子板5の中央部に形成された、上方に突出する支持部52には貫通穴53が設けられる。この支持部52には、後述する電極部材8が支持固定される。上記半導体チップ6は、端子板5の取付部51上に半田付けで固定されている。   The terminal board 5 has a shape in which the vicinity of the center of the elongated sheet metal is raised in a convex shape by pressing. The terminal plate 5 is fixed to the ceramic substrate 4 by soldering at the lower surfaces of the mounting portions 51 on both sides formed on the same plane. A through hole 53 is provided in a support portion 52 that protrudes upward and is formed in the center portion of the terminal board 5. An electrode member 8 to be described later is supported and fixed to the support portion 52. The semiconductor chip 6 is fixed on the mounting portion 51 of the terminal board 5 by soldering.

電極部材8は、上部81が大径で下部82が小径に形成された同心の2段の円柱形を呈する。電極部材8の軸心には上部81の上面から下方に向かって下部82を貫通しない程度の深さのボルト穴83が設けられており、ボルト穴83に外部導体12固定用のボルト11が螺合されるようになっている。なお、電極部材8の外形は一例であり、円柱形に限られず、ナットのように六角柱形やその他の角柱形でも構わない。   The electrode member 8 has a concentric two-stage cylindrical shape in which an upper part 81 is formed with a large diameter and a lower part 82 is formed with a small diameter. A bolt hole 83 having a depth that does not penetrate the lower part 82 from the upper surface of the upper part 81 downward is provided in the axial center of the electrode member 8, and the bolt 11 for fixing the external conductor 12 is screwed into the bolt hole 83. It is supposed to be combined. In addition, the external shape of the electrode member 8 is an example, and is not limited to a cylindrical shape, but may be a hexagonal column shape or other rectangular column shape such as a nut.

支持部材7は、金属製の板材を、図4の展開図に示すような形状にカットしたものから作製される。図4に示すように、円形の台部71の周囲から外側に延びて長さの等しい4つの耳片721A〜721Dが形成されている。本実施の形態では、図示の如く、対をなす耳片721A,721B及び耳部721C,721Dがそれぞれ二股に形成されている。二股の一方の耳片721A、721Cは台部71を挟んで対向する方向に延びて形成される。同様に、二股の他方の耳片721B、721Dも台部71を挟んで対向する方向に延びて形成される。なお、台部71の形状、耳片の数及び配置は一例であり、上記に限定されない。   The support member 7 is produced from a metal plate material cut into a shape as shown in the developed view of FIG. As shown in FIG. 4, four ear pieces 721 </ b> A to 721 </ b> D having the same length extending from the periphery of the circular base 71 are formed. In the present embodiment, as shown in the figure, paired ear pieces 721A and 721B and ear portions 721C and 721D are respectively formed in two branches. One of the two forked ear pieces 721A and 721C is formed to extend in a direction facing each other with the base 71 interposed therebetween. Similarly, the other forked ear pieces 721B and 721D are also formed to extend in directions facing each other with the base 71 interposed therebetween. In addition, the shape of the base part 71, the number and arrangement | positioning of an ear piece are examples, and are not limited above.

そして、図4に点線で示す、各耳片721A〜721Dに2箇所設定された折り曲げ部位で山折りするように直角に曲げ加工することにより、図5に示すような高さの等しい垂直方向に延びる4つの脚部72A〜72D及び各脚部に連設され前記電極部材の中心方向に延びる足部74が形成される。脚部72Aとそれに連接する足部74の組と、脚部72Cとそれに連接する足部74の組は、台部71を挟んで対向する方向に配置される。脚部72Bとそれに連接する足部74の組と、脚部72Dとそれに連接する足部74の組も、台部71を挟んで対向する方向に配置される。足部74は、支持部材7を半導体チップ6に半田付けで固定する際の取付面積を稼いで取付を強固にする目的がある。足部74は、平面視で内側に向けて各脚部72A〜72Dから張り出し、その先端は台部71の占有領域に達している。これにより、支持部材7の実装面積が足部74を設けたことで増加することはないようになっている。 Then, shown in dotted lines in FIG. 4, by a right angle bent so as to mountain fold at sites bending which is two places set on each ear piece 721A~721D, the height of equal vertical direction as shown in FIG. 5 foot 74 is provided continuously on four legs 72A~72D and leg portions extending extending toward the center of the electrode member is formed. The pair of leg part 72A and the foot part 74 connected to the leg part 72A and the pair of leg part 72C and the foot part 74 connected to the leg part 72A are arranged in a direction facing each other with the base part 71 interposed therebetween. A pair of the leg portion 72B and the foot portion 74 connected to the leg portion 72B, and a set of the leg portion 72D and the foot portion 74 connected to the leg portion 72D are also arranged in a direction facing each other with the base portion 71 interposed therebetween. The legs 74 have a purpose of increasing the mounting area when the support member 7 is fixed to the semiconductor chip 6 by soldering, thereby strengthening the mounting. The foot portion 74 protrudes from the leg portions 72 </ b> A to 72 </ b> D inward in a plan view, and the tip thereof reaches the occupied area of the base portion 71. As a result, the mounting area of the support member 7 is not increased by providing the feet 74.

支持部材7の台部71の中央には、図5に示すように、貫通穴73がプレス加工により形成されている。この貫通穴73の直径は、上記電極部材8の小径の下部82を嵌入出来るように、この電極部材8の下部82の直径と略等しい寸法に設定される。本実施の形態では、貫通穴73は円形であるが、貫通穴73の形状は、電極部材8の形状に対応して決まるものであり、円形に限られない。   As shown in FIG. 5, a through hole 73 is formed in the center of the base portion 71 of the support member 7 by pressing. The diameter of the through hole 73 is set to be approximately equal to the diameter of the lower portion 82 of the electrode member 8 so that the lower portion 82 of the electrode member 8 can be fitted. In the present embodiment, the through hole 73 is circular, but the shape of the through hole 73 is determined according to the shape of the electrode member 8 and is not limited to a circular shape.

図7(a)に示すように、支持部材7の脚部72の高さ(図中H1で現す。)は、電極部材8の小径の下部82の高さ(図中H2で現す。)以上の寸法に設定される。これにより、電極部材81の下部82を貫通穴73に嵌入することにより、電極部材8の上部81を台部71上に支持することが出来る。また、図5に示すように、支持部材7の足部74は貫通穴73の方に張り出しているものの、丸みを帯びた先端形状に形成されているために、電極部材8の下部82が支持部材7の脚部72の下端近くまで達するような場合でも、電極部材8の下部82と支持部材7の足部74とが接触するのを回避することが可能となる。   As shown in FIG. 7A, the height of the leg portion 72 of the support member 7 (indicated by H1 in the figure) is equal to or higher than the height of the lower portion 82 of the small diameter of the electrode member 8 (indicated by H2 in the figure). Set to the dimensions of Accordingly, the upper portion 81 of the electrode member 8 can be supported on the base portion 71 by fitting the lower portion 82 of the electrode member 81 into the through hole 73. Further, as shown in FIG. 5, although the foot portion 74 of the support member 7 protrudes toward the through hole 73, the lower portion 82 of the electrode member 8 is supported by the rounded tip shape. Even when reaching the vicinity of the lower end of the leg portion 72 of the member 7, it is possible to avoid contact between the lower portion 82 of the electrode member 8 and the foot portion 74 of the support member 7.

図6に示すように、支持部材7は、その脚部72A〜72Dから張り出した足部74で半導体チップ6上に半田付けで固定される。図示のごとく、支持部材7の脚部72が4つあることに対応して、半導体チップ6は4つに分割されている。すべての半導体チップ6A〜6Dは、共通の端子板5(図2参照。)及び支持部材7と接続されるので並列の関係になっている。これにより、半導体チップ6A〜6Dの一部が故障しても、装置としての動作停止に及ぶことがないので、半導体装置10の信頼性が向上する。なお、ここで説明した半導体チップ6の分割数は一例にすぎない。例えば、二股の脚部(72A,72B)または(72C,72D)をまとめて固定する二分割品で半導体チップ6を構成することも可能である。   As shown in FIG. 6, the support member 7 is fixed to the semiconductor chip 6 by soldering with a foot portion 74 protruding from the leg portions 72 </ b> A to 72 </ b> D. As illustrated, the semiconductor chip 6 is divided into four corresponding to the four leg portions 72 of the support member 7. Since all the semiconductor chips 6A to 6D are connected to the common terminal plate 5 (see FIG. 2) and the support member 7, they are in a parallel relationship. Thereby, even if a part of the semiconductor chips 6A to 6D breaks down, the operation of the device is not stopped, so that the reliability of the semiconductor device 10 is improved. In addition, the division | segmentation number of the semiconductor chip 6 demonstrated here is only an example. For example, the semiconductor chip 6 can be configured by a two-part product in which the bifurcated legs (72A, 72B) or (72C, 72D) are fixed together.

図2及び図6に示すように、電極部材8は、その小径の下部82が支持部材7の台部71の貫通穴73に嵌入されるとともに、その大径の上部81の底面で支持部材7の台部71上に半田付けで固定される。また、電極部材8は、図2に示すように、端子板5の支持部52にも同様にして支持固定される。これにより、図3に、半導体装置10の回路図の一例を示すように、ダイオードである半導体チップ6のカソードが端子板5を介して電極部材8に接続され、半導体チップ6のアノードが支持部材7を介して別の電極部材8に接続されている。   As shown in FIGS. 2 and 6, the electrode member 8 has a small-diameter lower portion 82 fitted into the through hole 73 of the base portion 71 of the support member 7 and the bottom surface of the large-diameter upper portion 81. It is fixed on the base 71 by soldering. Further, as shown in FIG. 2, the electrode member 8 is supported and fixed in the same manner to the support portion 52 of the terminal board 5. Thereby, as shown in FIG. 3 as an example of a circuit diagram of the semiconductor device 10, the cathode of the semiconductor chip 6 which is a diode is connected to the electrode member 8 via the terminal plate 5, and the anode of the semiconductor chip 6 is the support member. 7 is connected to another electrode member 8.

さらにベース板1上には、樹脂製のケース2がモールドされる。ケース2は、セラミック基板4、端子板5、支持部材7、及び電極部材8を収容するとともに、電極部材8の上面部を露出させるようにこれらを取り囲んでいる。半導体装置10は、ベース板1とケース2の両端に設けられた固定具13を用いて、両端部で被取り付け部に締結固定される。ケース2内には、樹脂9が封入される。これにより、収容部品(4〜8)が封止される。図6に示すように、電極部材8には、周囲にローレット加工が施されているため、そのギザギザが封止樹脂9に食い込み、周方向の回転に対して大きな摩擦を生じる。これにより、ボルト11の着脱時にトルクが作用しても、ケース2に対して電極部材8が容易に回転しないように出来る。外部導体12は、各電極部材8の封止樹脂9の外側に露出した上面にボルト11を用いて固定される。   Further, a resin case 2 is molded on the base plate 1. The case 2 houses the ceramic substrate 4, the terminal plate 5, the support member 7, and the electrode member 8, and surrounds them so that the upper surface portion of the electrode member 8 is exposed. The semiconductor device 10 is fastened and fixed to the attached portion at both ends by using the fixtures 13 provided at both ends of the base plate 1 and the case 2. A resin 9 is sealed in the case 2. Thereby, an accommodation component (4-8) is sealed. As shown in FIG. 6, the electrode member 8 is knurled on the periphery, so that the jaggedness bites into the sealing resin 9 and generates a large friction against the rotation in the circumferential direction. Thereby, even if a torque acts at the time of attachment / detachment of the bolt 11, the electrode member 8 can be prevented from easily rotating with respect to the case 2. The outer conductor 12 is fixed to the upper surface of each electrode member 8 exposed to the outside of the sealing resin 9 using bolts 11.

本実施の形態によると、図7(a)に示すように、電極部材8は、大径の上部81の底面で支持部材7の台部71に支持固定される。これにより、電極部材8の固定部のエッジF間の距離(図中L2で現す。)が、従来技術における同距離(図7(b)のL1参照。)よりも増し(すなわち、L2>L1)、支持部材7に対する固定力が強化される。したがって、ボルト11の着脱時に固定部のエッジFに作用するトルクによる電極部材8の剥離を抑制することが可能となる。   According to the present embodiment, as shown in FIG. 7A, the electrode member 8 is supported and fixed to the base portion 71 of the support member 7 on the bottom surface of the large-diameter upper portion 81. As a result, the distance between the edges F of the fixed portion of the electrode member 8 (shown as L2 in the figure) is greater than the same distance in the prior art (see L1 in FIG. 7B) (that is, L2> L1). ), The fixing force to the support member 7 is strengthened. Therefore, peeling of the electrode member 8 due to torque acting on the edge F of the fixing portion when the bolt 11 is attached or detached can be suppressed.

上述の実施形態の説明は、すべての点で例示であって、制限的なものではないと考えられるべきである。この発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、この発明の範囲には、特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。   The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above-described embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

1…ベース板
2…ケース
6,6A〜6B…半導体チップ
7…支持部材
8…電極部材
9…封止樹脂
DESCRIPTION OF SYMBOLS 1 ... Base plate 2 ... Case 6, 6A-6B ... Semiconductor chip 7 ... Support member 8 ... Electrode member 9 ... Sealing resin

Claims (5)

ベース板と、
前記ベース板の上方に配置された半導体チップと、
前記半導体チップの上方に配置され、外部導体固定用のボルトが嵌合されるとともに、前記半導体チップに接続される電極部材と、
を有し、前記ベース板、前記半導体チップ、及び前記電極部材が樹脂で封止される半導体装置において、
前記電極部材は上部が大径で下部が小径に形成された異径の柱形を呈し、
前記電極部材と前記半導体チップとの間に金属製の支持部材を設け、
該支持部材は、前記電極部材の前記小径の下部の高さ以上の高さ寸法を有し垂直方向に延びる脚部、前記脚部に連設し前記電極部材の中心方向に延びる足部、及び前記電極部材の下部が嵌入される貫通穴が形成された台部を有し、少なくとも一対の前記脚部と足部の対が前記台部を挟んで対向する方向に配置され、
前記支持部材は、前記足部で前記半導体チップ上に固定されていて、前記電極部材は、その小径の下部が前記支持部材の台部の貫通穴に嵌入されているとともに、その大径の上部の底面で前記支持部材の台部上に支持固定されている半導体装置。
A base plate,
A semiconductor chip disposed above the base plate;
An electrode member disposed above the semiconductor chip and fitted with a bolt for fixing an outer conductor, and connected to the semiconductor chip;
In the semiconductor device in which the base plate, the semiconductor chip, and the electrode member are sealed with resin,
The electrode member has a columnar shape with different diameters in which the upper part has a large diameter and the lower part has a small diameter,
A metal support member is provided between the electrode member and the semiconductor chip,
The support member includes a leg portion having a height dimension equal to or greater than a height of the lower portion of the small diameter of the electrode member, a leg portion extending in the vertical direction, and a foot portion extending in the center direction of the electrode member. It has a base part in which a through hole into which the lower part of the electrode member is inserted is formed, and is disposed in a direction in which at least a pair of the leg part and the foot part are opposed to each other with the base part interposed therebetween,
The support member be secured by the foot portion on said semiconductor chip, said electrode member, together with the lower portion of the smaller diameter is fitted into the through hole of the base portion of the support member, the upper portion of the large-diameter The semiconductor device which is supported and fixed on the base part of the supporting member at the bottom surface.
前記台部を挟んで対向する方向に配置される各組の脚部と足部は、それぞれ複数有する請求項1に記載の半導体装置。   2. The semiconductor device according to claim 1, wherein each set includes a plurality of leg portions and foot portions arranged in directions facing each other with the base portion interposed therebetween. 前記各組の脚部と足部は二股で形成された請求項2に記載の半導体装置。   The semiconductor device according to claim 2, wherein the leg portion and the foot portion of each set are formed in two forks. 各組の脚部と足部に対応して前記半導体チップが複数に分割され、各半導体チップに前記各組の足部が各々固定される請求項2または3に記載の半導体装置。   4. The semiconductor device according to claim 2, wherein the semiconductor chip is divided into a plurality of parts corresponding to the legs and feet of each set, and the legs of each set are fixed to each semiconductor chip. 5. 前記電極部材の周囲にローレット加工が施された請求項1〜4のいずれかに記載の半導体装置。   The semiconductor device according to claim 1, wherein a knurling process is performed around the electrode member.
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