JP5759440B2 - Metal oxide film thickness measuring device and film thickness inspection device - Google Patents

Description

  The present invention relates to a metal oxide film thickness measuring apparatus for measuring the film thickness of a metal oxide film such as tin oxide formed on the surface of a glass container such as a glass bottle in a non-contact manner, and its film thickness measurement. The present invention relates to a film thickness inspection apparatus using the apparatus.

  Many glass bottles manufactured in bottle factories have a lubricious coating called “cold end coating” on their surfaces to prevent the surface from scratching and the strength of the glass bottle from being reduced. Yes. In order to apply this cold end coating, a coating called “hot end coating” is applied as a base under a high temperature condition immediately after the bottle molding. This “hot end coating” is a very thin film of tin oxide and titanium oxide at the nanometer level. If this type of metal oxide coating (hereinafter also simply referred to as “coating”) is too thick, when the glass bottle is washed with alkali in the line filling the contents, the coating peels off and the glass bottle There is a possibility that an iris phenomenon may occur on the surface. Moreover, when too thin, there exists a possibility that the surface of a glass bottle may be damaged, and the intensity | strength reduction of a glass bottle is caused.

  In the bottle factory, the film thickness of the tin oxide film formed on the surface of the glass bottle is set for each glass bottle in accordance with the user's usage conditions, and the film thickness of the film is measured in the inspection process. The film thickness is managed to an appropriate value by removing glass bottles that are not appropriate as defective products.

  Conventionally, a film thickness measuring device manufactured by American Glass Research (hereinafter referred to as “AGR”) has been widely used to measure the film thickness of the tin oxide film. This film thickness measuring device manufactured by AGR Co., Ltd. applies a liquid with a refractive index close to that of glass (this is called “index liquid”) to the surface of the glass bottle, and then applies light toward the surface of the glass bottle. Then, the refracted light at the surface of the coating and the refracted light at the interface between the coating and the glass bottle are measured, and the film thickness is measured from the difference between them (see the column “Prior Art” in Patent Document 1). This measurement is performed manually. As shown in FIG. 7, a glass bottle G is placed on a rotatable table 90 and supported freely by a clamp mechanism 91, and the head portion 92 is mounted on the glass bottle G. The head portion 92 and the glass bottle G are optically coupled to each other through the index liquid by being applied to the surface. When the measurement is started by rotating the table 90 by the motor drive unit 93, the film thickness of the coating is measured at a predetermined measurement point on the outer periphery of the glass bottle G by the head unit 92. The measurement result is output by CTU (Coating Thickness Units) which is an optical unit unique to AGR.

Japanese Patent Laid-Open No. 9-315838

  In the above-described film thickness measuring device 9 manufactured by AGR, since the index liquid is applied to the surface of the glass bottle G, there is a problem that the glass bottle G becomes dirty. A film thickness measuring device of a type that does not use an index solution has also been proposed (see Patent Document 1). The proposed film thickness measuring device has a terminal for resistance measurement, and a film thickness measuring device 9 manufactured by AGR Co., Ltd. Since the head part 92 is brought into contact with the surface of the glass bottle G, the glass bottle G may be damaged.

  A non-contact film thickness measuring device can be considered instead of the contact type described above, but when the head part is fixed away from the surface of the glass bottle, the head part and the glass bottle are not aligned due to the tolerance or eccentricity of the bottle part. Since the distance varies, the measured value of the film thickness varies according to the distance, and the reliability of the film thickness measurement result cannot be obtained.

The present invention has been made paying attention to the above-mentioned problems, and can measure the film thickness of a metal oxide film such as tin oxide formed on the surface of a glass container in a non-contact manner. An object of the present invention is to provide a metal oxide film thickness measuring apparatus capable of accurately measuring the film thickness without being affected by the eccentricity or the eccentricity.
Another object of the present invention is to use the above-mentioned film thickness measuring apparatus for the film thickness inspection of the metal oxide film formed on the outer peripheral surface of the glass container, and the glass container having an inappropriate film thickness. It is an object of the present invention to provide a metal oxide film thickness inspection apparatus capable of managing the film thickness to an appropriate value by detecting and eliminating the above.

The metal oxide film thickness measuring apparatus according to the present invention measures the film thickness of a metal oxide film formed on the surface of a glass container in a non-contact manner, and irradiates the glass container with light. A light quantity measuring sensor including a head part having a light receiver and a light receiver that receives light reflected from the coating of the glass container, and a measurement circuit part that obtains measurement data according to the amount of light received by the light receiver, and the light quantity A distance measurement sensor for measuring the distance between the head portion of the measurement sensor and the glass container, and measurement data is taken in from the measurement circuit unit of the light quantity measurement sensor, and the received light amount of the reflected light is converted into film thickness calculation data for the film, and the film The thickness calculation data includes an arithmetic control device that executes a calculation by an arithmetic expression that becomes a value corrected according to the distance measurement value obtained by the distance measurement sensor . The arithmetic control device has a memory in which a plurality of arithmetic expressions according to the distance between the head portion of the light quantity measurement sensor and the glass container are stored, and the distance measurement value obtained by the distance measurement sensor The film thickness calculation data is obtained by selecting a corresponding arithmetic expression from a plurality of arithmetic expressions stored in the memory and executing an operation according to the selected arithmetic expression .

In order to measure the film thickness of a metal oxide film such as tin oxide formed on the surface of a glass bottle with the film thickness measuring apparatus having the above-described configuration, the head part of the light quantity measuring sensor is disposed at a position facing the glass bottle. Then, light is irradiated toward the glass bottle from the light projector of the head unit. The irradiated light is reflected by the coating of the glass bottle, the reflected light is received by the light receiver of the head unit, and measurement data corresponding to the amount of received reflected light is acquired by the measurement circuit unit. The amount of reflected light received increases when the film thickness is large, and decreases when the film thickness is small. The arithmetic and control unit captures the measurement data from the measurement circuit section of the light quantity sensor, and the amount of reflected light received is the film thickness. The film thickness calculation data is obtained by executing the calculation for converting to.
In this case, even if the film thickness is the same, the amount of reflected light decreases when the distance between the head and the glass bottle is large, and increases when the distance is small. The distance to the bottle is measured by the distance measuring sensor, and the arithmetic control device takes in an arithmetic expression corresponding to the distance measurement value obtained by the distance measuring sensor, that is, the film thickness calculation data is taken in from the distance measuring sensor. The film thickness of the film is calculated by selecting an arithmetic expression that is a value corrected according to the measured value of the distance . Thus, the calculated film thickness of the coating is corrected to a value corresponding to the distance between the head portion of the light quantity measurement sensor and the glass container.

An apparatus for inspecting a film thickness of a metal oxide film according to the present invention inspects whether or not the film thickness of a metal oxide film formed on the surface of a glass container is appropriate. In a downstream position of a conveyor for conveying the formed glass containers, a film thickness measuring apparatus for measuring the film thickness of the coating in a non-contact manner for a plurality of glass containers arranged on the conveyor, and a film thickness measuring apparatus along the conveyor And a discharging mechanism that removes glass containers that are disposed and whose film thickness is not appropriate from the conveyor. The film thickness measuring device has a projector that irradiates light toward a glass container on a conveyor, and a head unit that has a light receiver that receives light reflected from the coating of the glass container, and the amount of reflected light received by the light receiver. A light quantity measurement sensor including a measurement circuit unit for obtaining corresponding measurement data, a distance measurement sensor for measuring a distance between the head part of the light quantity measurement sensor and the glass container, and measurement data from the measurement circuit part of the light quantity measurement sensor. performing operations a received light amount of uptake reflected light by an arithmetic expression which is a corrected value in accordance with the measured value of the distance that the thickness calculation data of the film is converted vital the film thickness calculating data obtained by the distance measuring sensor An arithmetic and control unit. The head part of the light quantity measurement sensor and the distance measurement sensor are respectively arranged at positions facing the glass container along the conveyor. The arithmetic control device has a memory in which a plurality of arithmetic expressions according to the distance between the head portion of the light quantity measurement sensor and the glass container are stored, and the distance measurement value obtained by the distance measurement sensor A corresponding arithmetic expression is selected from a plurality of arithmetic expressions stored in the memory, and the film thickness calculation data is obtained by executing an operation according to the selected arithmetic expression, and the film thickness calculation data is used to obtain the film thickness. It is determined whether or not the film thickness is appropriate, and a signal for removing the glass container determined to be inappropriate from the conveyor is generated and output to the discharge mechanism.

To inspect whether the film thickness of the metal oxide film formed on the surface of the glass bottle, for example, is appropriate by the film thickness inspection apparatus having the above-described configuration, it faces the glass bottle along the conveyor that conveys the glass bottle. The head part of the light quantity measuring sensor and the distance measuring sensor are respectively arranged at the positions. When light is emitted from the projector of the head unit of the light quantity measurement sensor toward the glass bottle conveyed by the conveyor, the irradiated light is reflected by the coating of the glass bottle, and the reflected light is received by the light receiver of the head unit. In addition, measurement data corresponding to the amount of received reflected light is acquired by the measurement circuit unit. The amount of reflected light received increases when the film thickness is large, and decreases when the film thickness is small. The arithmetic and control unit captures the measurement data from the measurement circuit section of the light quantity sensor, and the amount of reflected light received is the film thickness. The film thickness calculation data is obtained by executing the calculation for converting to.
In this case, even if the film thickness is the same, the amount of reflected light decreases when the distance between the head and the glass bottle is large, and increases when the distance is small. The distance to the bottle is measured by the distance measuring sensor, and the arithmetic control device takes in an arithmetic expression corresponding to the distance measurement value obtained by the distance measuring sensor, that is, the film thickness calculation data is taken in from the distance measuring sensor. The film thickness of the film is calculated by selecting an arithmetic expression that is a value corrected according to the measured value of the distance . Thus, the calculated film thickness of the coating is corrected to a value corresponding to the distance between the head portion of the light quantity measurement sensor and the glass container. Then, the arithmetic and control unit determines whether the glass bottle thickness is appropriate based on the film thickness calculation data obtained by the film thickness measuring device, and removes the glass bottle determined to be inappropriate from the conveyor. A signal is generated and output to the discharge mechanism. Upon receiving this signal, the discharging mechanism removes defective glass bottles from the conveyor in response to the signal from the arithmetic control unit at a downstream position of the film thickness measuring device along the conveyor.

According to this invention, the film thickness of the metal oxide film such as tin oxide formed on the surface of the glass container can be measured in a non-contact manner, and it is caused by the barrel diameter tolerance or eccentricity of the glass container. Thus, even if the distance between the amplifier part of the light quantity measuring sensor and the glass container is fluctuated, the film thickness of the coating can be accurately measured without being affected by it.
Moreover, according to this invention, since the glass container with an inappropriate film thickness can be detected and eliminated, the film thickness can be controlled to an appropriate value.

It is a top view which shows schematic structure of the film thickness test | inspection apparatus of the metal oxide film which is one Example of this invention. It is sectional drawing which shows the structure of a film thickness measuring apparatus. It is a top view which shows schematic structure of the film thickness inspection apparatus which concerns on another Example. It is explanatory drawing which shows the calculation formula for converting the received light quantity of reflected light into the film thickness of a film, and the method of deriving the calculation formula. To convert the amount of reflected light received to the film thickness when the distance between the head part of the light quantity measuring sensor and the glass bottle is 0.5 mm, 1.0 mm, 1.5 mm, 2.0 mm, or 2.5 mm It is explanatory drawing which shows the computing equation of and the method of deriving the computing equation. It is a flowchart which shows the flow of control by the arithmetic control apparatus for a film thickness test | inspection. It is a front view which shows the state which is measuring the film thickness of a metal oxide film with the conventional film thickness measuring apparatus.

  FIG. 1 shows a schematic configuration of a metal oxide film thickness inspection apparatus 1 according to an embodiment of the present invention and a state in which the film thickness inspection apparatus 1 is inspected for a glass bottle G. The film thickness inspection apparatus 1 in the illustrated example measures the film thickness of the metal oxide film formed on the surface of the glass bottle G and inspects whether or not the film thickness is appropriate. The inspection target is not limited to a glass bottle, but may be another glass container. The glass bottle G to be inspected has a cold end coating on the surface and a hot end coating as a base. The film thickness measuring device 3 measures the film thickness of the tin oxide film formed at least on the surface of the barrel portion of the glass bottle G by hot end coating at the upper position of the barrel portion, and the measured value of the thickness is within the standard. The suitability of the film thickness is determined based on whether or not there is. The metal oxide film is not limited to a tin oxide film, and may be a titanium oxide film, for example. In the implementation, it is desirable to measure the film thickness at the upper part and the lower part of the body part to determine whether the film thickness is appropriate. In this case, the light quantity measurement sensor 4 and the distance measurement sensor 5 described later are used. 2 sets are prepared and arranged at respective positions above and below.

  The glass bottle G is subjected to the hot end coating in a high temperature state immediately after being formed by a bottle making machine (not shown), and a tin oxide film is mainly formed on the entire surface of the body portion. Thereafter, the cold end coating is applied after a slow cooling step. The glass bottles G subjected to these coating processes are sent to the inspection process by the conveyor 2 shown in FIG. In the inspection process, the glass bottles G are inspected for defects. At the inspection station where the film thickness inspection apparatus 1 is installed, all glass bottles G are formed on the surface of each glass bottle G. The film thickness of the hot end coating is measured, and whether or not the film thickness is within the standard is judged.

  The film thickness inspection apparatus 1 is configured to transfer tin oxide by hot-end coating on the conveyor 2 that conveys a plurality of glass bottles G in an upright posture and a plurality of glass containers G arranged on the conveyor 2 at substantially constant intervals. A glass container G that is disposed at a downstream position of the film thickness measuring device 3 that measures the film thickness of the coating in a non-contact manner and the film thickness measuring device 3 along the conveyor 2 and is determined to have an inappropriate film thickness of the tin oxide film. It has a discharge mechanism 7 for removing the defective product from the conveyor 2 onto the tray 70.

  The conveyor 2 is provided with left and right guides 21 and 22 for transporting the glass bottles G in a line, and the film thickness measuring device 3 is provided on the downstream side of the transport path by the conveyor 2. A defective product discharge mechanism 7 and a tray 70 are respectively provided at locations where 21 and 22 are interrupted. The discharge mechanism 7 pushes the glass bottle G onto the tray 70 by blowing air toward the glass bottle G determined to be defective, and removes the glass bottle G from the conveyor 2. The discharge mechanism 7 is not limited to the non-contact type as in the illustrated example, and may be a contact type that reciprocates the pressing plate.

  The film thickness measuring device 3 includes a light amount measuring sensor 4, a distance measuring sensor 5, and an arithmetic control device 6, and a bottle detection sensor 8 is disposed upstream of the light amount measuring sensor 4. The bottle detection sensor 8 is constituted by, for example, a photoelectric sensor, detects that the glass bottle G has passed and entered the film thickness inspection region, and outputs a bottle detection signal i to the arithmetic and control unit 6.

  As shown in FIG. 2, the light quantity measurement sensor 4 includes a head portion 41 and a measurement circuit portion 40. The head unit 41 receives light reflected from the tin oxide coating 10 on the glass bottle G and a projector 42 that irradiates the glass bottle G on the conveyor 2 with uniform light of a single wavelength, and obtains a light reception signal. And a light receiver 43. The measurement circuit unit 40 includes circuits such as an amplifier circuit and an A / D converter, and after receiving and amplifying the received light signal obtained by the light receiver 43, the amplified signal is converted into a digital quantity, and the reflected light Measurement data corresponding to the amount of received light is obtained. The amount of reflected light from the coating 10 of the glass bottle G increases as the thickness of the coating 10 increases. Therefore, the amount of reflected light received by the light receiver 43 also increases as the thickness of the coating 10 increases. . The arithmetic and control unit 6 is constituted by a microcomputer, and the CPU which is the main body of control and calculation fetches measurement data from the measurement circuit unit 40 and calculates the received light amount of the reflected light to the film thickness of the film 10. To obtain film thickness calculation data. Although details of this calculation will be described later, the calculation is executed using any one of the arithmetic expressions selected from a plurality of arithmetic expressions (regression expressions described later) stored in a memory (not shown).

  In the embodiment of FIG. 1, the film thickness of the coating 10 is measured at one point on the outer peripheral surface of the glass bottle G facing the head portion 41 of the light quantity measurement sensor 4. Thus, in the method of guiding the glass bottle G to each inspection station by the intermittently rotating star wheel 22, the glass bottle G is introduced on the rotation center of the rotary table 23 provided in the inspection station, and the rotary table 23 is By rotating, the film thickness of the coating can be measured at a plurality of points on the outer peripheral surface of the glass bottle G.

The graph shown in FIG. 4 shows an approximate curve for converting the amount of reflected light into the film thickness of the coating 10 of the glass bottle G, and a quadratic function formula representing the approximate curve. In the graph of the figure, the horizontal axis x represents the measurement data obtained by irradiating the surface of the glass bottle G with light from the projector 42 of the light quantity measuring sensor 4 and receiving the reflected light from the glass bottle G with the light receiver 43. The vertical axis y represents the film thickness of the tin oxide film formed on the surface of the glass bottle G, and the reflection obtained for a number of samples of the glass bottle G having variations in the film thickness of the film. A set of measurement data of the amount of received light and a measured value of the film thickness of the tin oxide film measured by the above-described film thickness measuring device manufactured by AGR is plotted on the xy coordinate plane. The measurement of the amount of reflected light received is performed in a state where the head portion 41 of the light amount measurement sensor 4 is in contact with the surface of the glass bottle G.
In the figure, P is an approximate curve that closely approximates the distribution of the above points, the equation S1 in the rectangular frame R is a regression equation representing this approximate curve P with a quadratic function, and the equation S2 is a correlation coefficient. .

  According to the approximate curve P shown in FIG. 4, it can be seen that the relationship between the film thickness of the tin oxide film and the amount of reflected light received is such that the amount of reflected light received increases as the film thickness increases. . When light strikes the tin oxide film, it is thought that free electrons, etc. existing in the film absorb the energy of the light and cause resonance vibration, and the vibration energy is emitted as reflected light. It is presumed that the number of free electrons in the depth direction increases, that is, increases according to the film thickness.

  From the above, when measurement data of the amount of reflected light received is obtained by performing light projection and light reception with the head portion 41 of the light quantity measurement sensor 4 in contact with the surface of the glass bottle G, FIG. 4 shows. Although the film thickness of the glass bottle G can be obtained by the approximate curve P or the regression equation of the formula S1, the head portion 41 of the light quantity measuring sensor 4 is not brought into contact with the surface of the glass bottle G, and a gap is provided between them. In this case, as the distance increases, the amount of light reflected by the light receiver 43 gradually decreases, and the measurement data of the amount of received light becomes a small value. Therefore, the regression equation of Equation S1 shown in FIG. However, the calculated value is not an appropriate value, and correction processing according to the distance between the head portion 41 of the light quantity measuring sensor 4 and the glass bottle G is necessary.

  Returning to FIG. 1, the film thickness measuring device 3 uses a distance measuring sensor 5 to measure the distance between the head portion 41 of the light quantity measuring sensor 4 and the glass bottle G. Measurement data is taken into the arithmetic and control unit 6. The head part 41 of the light quantity measurement sensor 4 and the head part of the distance measurement sensor 5 are arranged side by side along the conveyor 2 so as to face the glass bottles G on the conveyor 2. Is the distance between the head part of the distance measuring sensor 5 and the glass bottle G, and is also the distance between the head part 41 of the light quantity measuring sensor 4 and the glass bottle G. In this embodiment, the distance measuring sensor 5 is a displacement sensor (product model number: “ZW series”) manufactured by OMRON Corporation in which a coaxial confocal optical system is incorporated in the head portion. It is not limited.

  The head part 41 of the light quantity measuring sensor 4 and the head part of the distance measuring sensor 5 are oriented in a direction perpendicular to the direction of conveyance of the glass bottle G by the conveyor 2 (indicated by an arrow in FIG. 1) and pass through. It is positioned and fixed so as to be the same distance as the glass bottle G. The glass bottle G has a barrel tolerance and eccentricity, and even if the glass bottles G are aligned, the position on the conveyor 2 varies, so the distance between the head 41 of the light quantity measuring sensor and the glass bottle G is constant. Instead, it fluctuates. Since the measured value of the film thickness of the glass bottle G varies depending on the distance between the head portion 41 and the glass bottle G, the arithmetic and control unit 6 calculates that the calculated data of the film thickness of the film 10 is a distance. The calculation is performed by an arithmetic expression that becomes a value corrected according to the distance measured by the measurement sensor 5.

  Specifically, the head of the light quantity measuring sensor 4 is stored in a memory (not shown) for storing a regression equation for executing a calculation for converting the amount of reflected light received by the light quantity measuring sensor 4 into the film thickness of the film. A plurality of regression equations corresponding to the distance between the portion 41 and the glass bottle G are stored, and the arithmetic and control unit 6 selects the regression equation according to the distance measurement data obtained by the distance measurement sensor 5, and The calculation based on the selected regression equation is executed.

5 (1) to 5 (5) show the case where the distance between the head portion 41 of the light quantity measuring sensor 4 and the glass bottle G is 0.5 mm, 1.0 mm, 1.5 mm, 2.0 mm, and 2.5 mm. 2 shows an approximate curve for converting the amount of reflected light received into the film thickness of the glass bottle G and a mathematical expression of a quadratic function representing the approximate curve.
For example, the graph of FIG. 5 (1) shows a large number of glasses in which the film thickness of the tin oxide film varies when the distance between the head portion 41 of the light quantity measuring sensor 4 and the glass bottle G is 0.5 mm. A set of the measurement data of the amount of reflected light obtained for the bottle G sample and the measurement value of the film thickness of the tin oxide film measured by the above-described AGR film thickness measuring device is on the xy coordinate plane. Plotted. In the figure, P1 is an approximate curve that closely approximates the distribution of the above points, the equation S1 in the rectangular frame R1 is a regression equation that represents the approximate curve P1 as a quadratic function, and the equation S2 is a correlation coefficient. .
Similarly, in the graphs of FIGS. 5 (2) to 5 (5), the distance between the head portion 41 of the light quantity measurement sensor 4 and the glass bottle G is 1.0 mm, 1.5 mm, 2.0 mm, and 2.5 mm. P2 to P5 are approximate curves that closely approximate the distribution of points on the xy coordinate plane, and each mathematical expression S1 in the rectangular frames R2 to R5 represents the approximate curves P2 to P5 as a quadratic function. The regression equation and each equation S2 are correlation coefficients.

From the above, when the measurement data of the received light amount of the reflected light is obtained by performing light projection and light reception with the head portion 41 of the light amount measurement sensor 4 separated from the surface of the glass bottle G, the distance by the distance measurement sensor 5 is obtained. According to the measurement data, any one of the regression equations shown in FIGS. 5 (1) to (5) is selected, and the film thickness of the glass bottle G is calculated by executing the calculation based on the selected regression equation. .
For convenience of explanation, it is assumed that the distance measurement value is 0.5 mm, 1.0 mm, 1.5 mm, 2.0 mm, or 2.5 mm, but the distance measurement value is, for example, In the case of an intermediate value between 0.5 mm and 1.0 mm (for example, 0.6 mm), the regression equation shown in FIG. 5 (1) and the regression equation shown in FIG. 5 (2) are selected, and FIG. Obtained by proportionally allocating the difference between the values obtained by executing the calculation by each regression equation (1/5 in this example) to the value obtained by executing the calculation by the regression equation shown in 1) The value is added to calculate the film thickness of the glass bottle G.

  Further, in this embodiment, the approximate curves P1 to P1 when the distance between the head portion 41 of the light quantity measuring sensor 4 and the glass bottle G is 0.5 mm, 1.0 mm, 1.5 mm, 2.0 mm, and 2.5 mm. Although P5 and the regression equation are obtained, the addition calculation of the value by the proportional distribution described above may be omitted by obtaining the approximate curve and the regression equation for different distances in smaller units (for example, 0.1 mm unit). it can.

FIG. 6 shows the flow of control by the CPU of the arithmetic and control unit 6 when the film thickness of the glass bottle G is inspected by the film thickness inspection apparatus 1 shown in FIG. In the figure, “ST” (abbreviation of “STEP”) indicates each procedure in the flow of control.
In ST1 of the figure, the arithmetic and control unit 6 stands by for the bottle detection signal i sent from the bottle detection sensor 8. When the glass bottle G on the conveyor 2 passes the position of the bottle detection sensor 8, the determination of ST 1 becomes “YES”, and the arithmetic and control unit 6 outputs a measurement start signal to the light quantity measurement sensor 4 and the distance measurement sensor 5. (ST2). The light quantity measurement sensor 4 receives the measurement start signal, emits light from the projector 42 of the head unit 41, and acquires the measurement data of the amount of reflected light received by the measurement circuit unit 40, while the distance measurement sensor 5 receives the measurement start signal. In response, a light projection operation is performed to measure the distance between the glass bottle G, that is, the distance between the head portion 41 of the light quantity measuring sensor 4 and the glass bottle G, and obtain measurement data. The arithmetic and control unit 6 samples the respective measurement data from the light quantity measurement sensor 4 and the distance measurement sensor 5 at a constant cycle, and stores them in the memory (ST3).

  When the glass bottle G passes in front of the light quantity measurement sensor 4 and the distance measurement sensor 5, the arithmetic and control unit 6 outputs a measurement end signal to the light quantity measurement sensor 4 and the distance measurement sensor 5, and determines the amount of reflected light received. Each operation of measurement and distance measurement is stopped (ST4). In the next ST5, the arithmetic and control unit 6 specifies the maximum value of the measurement data of the reflected light reception amount as the reception amount of the reflected light, and in the subsequent ST6, determines the minimum value of the distance measurement data as the head unit 41 of the light quantity measurement sensor 4. After selecting the distance between the measured value and the glass bottle G, the regression equation corresponding to the minimum value of the distance measurement data is selected, and the glass bottle G is determined from the maximum value of the measurement data of the amount of reflected light by the selected regression equation. The film thickness of the film is calculated (ST7).

  In the next ST8, the arithmetic and control unit 6 determines whether or not the calculated value of the film thickness is within the standard (ST8). If the determination is “NO”, the arithmetic and control unit 6 generates a discharge signal j for removing the corresponding glass bottle G from the conveyor 2 and outputs it to the discharge mechanism 7 (ST9). Upon receiving this discharge signal j, the discharge mechanism 7 blows air to the glass bottle G to discharge the defective glass bottle G from the conveyor 2 onto the tray 70.

DESCRIPTION OF SYMBOLS 1 Film thickness inspection apparatus 2 Conveyor 3 Film thickness measurement apparatus 4 Light quantity measurement sensor 5 Distance measurement sensor 6 Arithmetic control apparatus 7 Discharge mechanism 10 Film | membrane 40 Measurement circuit part 41 Head part 42 Light projector 43 Light receiver G Glass bottle

Claims (2)

A device for measuring the film thickness of a metal oxide film formed on the surface of a glass container in a non-contact manner, receiving a light projecting to irradiate light toward the glass container and reflected light from the film of the glass container A light quantity measurement sensor including a head part having a light receiver and a measurement circuit part for obtaining measurement data corresponding to the amount of reflected light received by the light receiver, and a distance between the head part of the light quantity measurement sensor and the glass container is measured. distance measurement sensor, the distance converted vital the film thickness calculating data amount of received light in the film thickness calculation data of the film of the reflected light captures measurement data from the measurement circuit part of the light intensity measuring sensor is obtained by the distance measuring sensor It consists of a calculation control device executing the calculation by the calculation formula to be corrected value depending on the measured values, the arithmetic and control unit, the distance between the head portion and the glass container of the light amount measurement sensor A plurality of arithmetic expressions stored in the memory, and a calculation expression corresponding to a distance measurement value obtained by the distance measuring sensor is selected from the plurality of arithmetic expressions stored in the memory. An apparatus for measuring a film thickness of a metal oxide film, wherein the film thickness calculation data is obtained by executing a calculation according to the selected calculation formula . An apparatus for inspecting whether the film thickness of the metal oxide film formed on the surface of the glass container is appropriate, a conveyor for conveying the glass container having the metal oxide film formed on the surface, and on the conveyor A film thickness measuring device that measures the film thickness of the coating film in a non-contact manner for a plurality of glass containers arranged in a row, and a glass container that is disposed at a downstream position of the film thickness measuring device along the conveyor on the conveyor The film thickness measuring device includes a projector that irradiates light toward a glass container on a conveyor, and a head unit that includes a light receiver that receives reflected light from the coating of the glass container; A light quantity measurement sensor including a measurement circuit unit that obtains measurement data according to the amount of light reflected by the light receiver, and a distance measurement that measures the distance between the head part of the light quantity measurement sensor and the glass container. Sensor and the measured values of the distances in terms vital the film thickness calculating data amount of received reflected light in the film thickness calculation data of the film captures the measurement data from the measurement circuit part of the light intensity measuring sensor is obtained by the distance measuring sensor And a calculation control device that executes a calculation according to an arithmetic expression that is a value corrected according to the head, and the head part of the light quantity measurement sensor and the distance measurement sensor are respectively arranged at positions facing the glass container along the conveyor The arithmetic control device has a memory in which a plurality of arithmetic expressions are stored according to the distance between the head portion of the light quantity measurement sensor and the glass container, and the distance measurement obtained by the distance measurement sensor is measured. An arithmetic expression corresponding to the value is selected from a plurality of arithmetic expressions stored in the memory, and the film thickness calculation data is obtained by executing an operation according to the selected arithmetic expression. Together, said thickness of the coating by the membrane thickness calculating data to determine whether a proper, a glass container is judged not to be appropriate to generate a signal for the elimination from the conveyor output to the discharge mechanism A metal oxide film thickness inspection device.

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