JP5728183B2 - Multi-branched polyimide material, heat-resistant film, and method for producing multi-branched polyimide film - Google Patents

Multi-branched polyimide material, heat-resistant film, and method for producing multi-branched polyimide film Download PDF

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JP5728183B2
JP5728183B2 JP2010199872A JP2010199872A JP5728183B2 JP 5728183 B2 JP5728183 B2 JP 5728183B2 JP 2010199872 A JP2010199872 A JP 2010199872A JP 2010199872 A JP2010199872 A JP 2010199872A JP 5728183 B2 JP5728183 B2 JP 5728183B2
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film
polyimide
branched
stretching
polyamic acid
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JP2012057010A (en
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山田 保治
保治 山田
酒井 純
純 酒井
俊輔 谷江
俊輔 谷江
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Ibiden Co Ltd
Kyoto Institute of Technology NUC
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Kyoto Institute of Technology NUC
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C55/00Shaping by stretching, e.g. drawing through a die; Apparatus therefor
    • B29C55/02Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets
    • B29C55/04Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets uniaxial, e.g. oblique
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2079/00Use of polymers having nitrogen, with or without oxygen or carbon only, in the main chain, not provided for in groups B29K2061/00 - B29K2077/00, as moulding material
    • B29K2079/08PI, i.e. polyimides or derivatives thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

Description

本発明は、多分岐ポリイミド系材料、耐熱性フィルム、及び多分岐ポリイミド系フィルムの製造方法に係り、特に、半導体素子の層間絶縁膜又は保護膜、又は、各種電子機器又は太陽電池等に用いられるフレキシブルプリント配線板のベースフィルム又はカバーレイ等の用途に用いられる多分岐ポリイミド系材料に関するものである。   The present invention relates to a multibranched polyimide-based material, a heat-resistant film, and a method for producing a multibranched polyimide-based film, and is particularly used for an interlayer insulating film or a protective film of a semiconductor element, various electronic devices, solar cells, or the like. The present invention relates to a multi-branched polyimide material used for a base film or a coverlay of a flexible printed wiring board.

ポリイミドは、耐熱性に優れていることに加えて、電気絶縁性、耐薬品性、耐放射線性及び機械的特性等においても優れていることから、従来より、様々な用途に用いられている。特に、近年は、様々な電子部品に多く用いられている。具体的には、半導体素子における層間絶縁膜又は保護膜としてフィルム状のポリイミドが用いられている。また、各種電子機器又は太陽電池等において採用されるフレキシブルプリント配線板のベースフィルム又はカバーレイ等の構成材料として、様々な組成のポリイミドが用いられている。   In addition to being excellent in heat resistance, polyimide is also excellent in electrical insulation, chemical resistance, radiation resistance, mechanical properties, and the like, and thus has been conventionally used in various applications. In particular, in recent years, it is widely used for various electronic components. Specifically, a film-like polyimide is used as an interlayer insulating film or a protective film in a semiconductor element. In addition, polyimides having various compositions are used as constituent materials for base films or coverlays of flexible printed wiring boards employed in various electronic devices or solar cells.

半導体素子においてポリイミドフィルムを用いるに際しては、ポリイミドフィルム及び半導体素子の各々における寸法安定性が同程度であること、より具体的には、ポリイミドフィルム及び半導体素子の各々における線熱膨張係数(CTE)の値を同程度とすることが重要であると言われている。これは、例えばポリイミドフィルムからなる保護膜にて覆われた被着体(半導体素子)において温度変化が生じた場合でも、被着体の温度変化に伴う界面応力(ポリイミドフィルムと半導体素子との界面に生ずる応力)の発生を極力抑え、ポリイミドフィルムの割れや剥離等を防止することができるためである。このため、昨今、従来より低い線熱膨張係数を有するポリイミドの開発が求められており、例えば、特許文献1(国際公開第2005/113647号)においては、極めて剛直な分子鎖若しくは高い分子鎖配向を有するポリエステルイミドを与え得る前駆体として、所定の化学式より表わされる繰り返し単位を含むことを特徴とするポリエステルイミド前駆体が、提案されている。   When using a polyimide film in a semiconductor element, the dimensional stability in each of the polyimide film and the semiconductor element is about the same, more specifically, the coefficient of linear thermal expansion (CTE) in each of the polyimide film and the semiconductor element. It is said that it is important to make the values comparable. This is because, for example, even when a temperature change occurs in an adherend (semiconductor element) covered with a protective film made of a polyimide film, the interface stress accompanying the temperature change of the adherend (the interface between the polyimide film and the semiconductor element) This is because the generation of stress) can be suppressed as much as possible, and cracking or peeling of the polyimide film can be prevented. For this reason, recently, development of a polyimide having a lower linear thermal expansion coefficient than before has been demanded. For example, in Patent Document 1 (International Publication No. 2005/113647), an extremely rigid molecular chain or a high molecular chain orientation is required. As a precursor capable of giving a polyesterimide having a characteristic, a polyesterimide precursor characterized by containing a repeating unit represented by a predetermined chemical formula has been proposed.

一方、ポリイミドを始めとする樹脂フィルムについては、一般に、延伸処理を施すことにより、樹脂フィルム内の分子配向を制御して、線膨張係数(CTE)を制御する(一般的には低下させる)ことが広く知られている。   On the other hand, for resin films including polyimide, in general, by performing stretching treatment, the molecular orientation in the resin film is controlled to control (generally reduce) the coefficient of linear expansion (CTE). Is widely known.

例えば、特許文献2(特開平2009−67042号公報)においては、ポリイミド前駆体の溶媒溶液を支持体上にキャストし、該溶媒溶液中の溶媒を除去し自己支持性フィルムとして支持体から剥離し、自己支持性フィルムを初期加熱温度80〜300℃で幅方向に延伸し、その後最終加熱温度350〜580℃で加熱することを特徴とするポリイミドフィルムの製造方法が提案されている。特許文献2の製造方法における自己支持性フィルムの延伸倍率は、好ましくは1.01〜1.12倍であるとされている。ここで、特許文献2における延伸倍率とは、同特許文献の明細書(段落[0050])に示されているように、延伸後の幅方向の長さをAとし、延伸前の幅方向の長さをBとした場合に、式:(A−B)/Bより算出されるものであるが、本願明細書の以下の記載及び特許請求の範囲における「延伸倍率」にあっても、上記式より算出されるものと同義である。   For example, in Patent Document 2 (Japanese Patent Laid-Open No. 2009-67042), a solvent solution of a polyimide precursor is cast on a support, the solvent in the solvent solution is removed, and the film is peeled from the support as a self-supporting film. A method for producing a polyimide film has been proposed in which a self-supporting film is stretched in the width direction at an initial heating temperature of 80 to 300 ° C. and then heated at a final heating temperature of 350 to 580 ° C. The stretch ratio of the self-supporting film in the production method of Patent Document 2 is preferably 1.01 to 1.12 times. Here, as shown in the specification of the patent document (paragraph [0050]), the draw ratio in Patent Document 2 is A in the width direction after stretching, and the width direction before stretching. When the length is B, it is calculated from the formula: (A−B) / B. However, even in the “drawing ratio” in the following description and claims of the present application, the above It is synonymous with what is calculated from a formula.

また、特許文献3(特開平8−174659号公報)においては、ICの実装技術の一つであるTAB(Tape Automated Bonding)方式に用いられる、ベースフィルム層、接着剤層及び保護層からなるTAB用テープであって、かかるベースフィルム層として、ポリイミドフィルムを、加熱下で一軸方向に10〜100%の延伸倍率にて延伸させたものが提案されている。   In Patent Document 3 (Japanese Patent Laid-Open No. 8-174659), a TAB comprising a base film layer, an adhesive layer, and a protective layer used in a TAB (Tape Automated Bonding) method which is one of IC mounting techniques. As a base film layer, a tape obtained by stretching a polyimide film at a stretch ratio of 10 to 100% in a uniaxial direction under heating has been proposed.

加えて、特許文献4(特許第2999116号公報)においては、所定の化学式で表わされる繰り返し単位で示される分岐ポリイミドが提案されている。特許文献4において、分岐ポリイミドは、直鎖ポリイミドに僅かに多分岐部位が導入されたものであり、同様の分子量を有する従来の直鎖ポリイミドと比較して、押出成形等の溶融成形時に同等の溶融粘度を示し、且つ、同等の原反フィルムを得ることが出来、更にはより均一な延伸が可能であると、記載されている。   In addition, Patent Document 4 (Japanese Patent No. 2999116) proposes a branched polyimide represented by a repeating unit represented by a predetermined chemical formula. In Patent Document 4, the branched polyimide is one in which a slightly multi-branched portion is introduced into a linear polyimide, and is equivalent to that at the time of melt molding such as extrusion molding as compared with a conventional linear polyimide having the same molecular weight. It is described that it exhibits a melt viscosity and an equivalent raw film can be obtained, and that further uniform stretching is possible.

しかしながら、本発明者等が調査した限りにおいて、これまでに提案され、或いは現在、使用されている各種の合成樹脂にあっては、線熱膨張係数(CTE)を15ppm/℃よりも低い範囲に制御可能な樹脂の組成は限定的であり、また、その多くの樹脂は大きな延伸、具体的には1倍以上の延伸倍率による延伸処理が必要なものである。その理由は、大きな延伸倍率の延伸処理によって生じた分子配向が、延伸処理後の熱処理(アニール処理)によっても消失せず、延伸の効果を維持することができるからである。   However, as far as the present inventors have investigated, in various synthetic resins that have been proposed or are currently used, the coefficient of linear thermal expansion (CTE) is in a range lower than 15 ppm / ° C. The composition of the controllable resin is limited, and many of the resins require large stretching, specifically, stretching treatment at a stretching ratio of 1 or more. The reason is that the molecular orientation generated by the stretching process with a large stretching ratio does not disappear even by the heat treatment (annealing process) after the stretching process, and the stretching effect can be maintained.

このように、寸法安定性に優れた合成樹脂材料、換言すれば、線熱膨張係数(CTE)の低い合成樹脂材料が少ない(限定的である)にも拘わらず、特に電子機器等の分野においては合成樹脂材料の用途が急速に拡大している現状においては、優れた機械的特性と共に優れた寸法安定性を有する新規な合成樹脂材料の開発が切望されている。   As described above, in spite of few (limited) synthetic resin materials having excellent dimensional stability, in other words, synthetic resin materials having a low linear thermal expansion coefficient (CTE), they are particularly limited in the field of electronic devices. In the present situation where the use of synthetic resin materials is rapidly expanding, development of new synthetic resin materials having excellent mechanical properties and excellent dimensional stability is eagerly desired.

国際公開第2005/113647号International Publication No. 2005/113647 特開平2009−67042号公報JP 2009-67042 A 特開平8−174659号公報JP-A-8-174659 特許第2999116号公報Japanese Patent No. 2999116

本発明は、かかる事情を背景にして為されたものであって、その解決すべき課題とするところは、優れた機械的特性と共に優れた寸法安定性を発揮する多分岐ポリイミド系材料、耐熱性フィルム、及び多分岐ポリイミド系フィルムの製造方法を提供することにある。   The present invention has been made in the background of such circumstances, and the problem to be solved is a multi-branched polyimide material exhibiting excellent dimensional stability as well as excellent mechanical properties, heat resistance It is providing the manufacturing method of a film and a multi-branch polyimide film.

本発明は、かかる課題を解決するために、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの中間反応物である多分岐ポリアミド酸からなるフィルムに対して、延伸倍率が0.05〜0.40倍の延伸処理、及び、イミド化処理を施して得られる、50〜250℃における平均線熱膨張係数が−1.0〜27.2ppm/℃である多分岐ポリイミドからなる多分岐ポリイミド系材料を、その要旨とするものである。この場合、平均線熱膨張係数の測定は、延伸の方向と同じ方向である。
In order to solve this problem, the present invention stretches a film composed of a multibranched polyamic acid that is an intermediate reaction product of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene. The average coefficient of linear thermal expansion at 50 to 250 ° C. obtained by subjecting the stretching treatment to 0.05 to 0.40 times and the imidization treatment is −1.0 to 27.2 ppm / ° C. The gist of the invention is a multi-branched polyimide material made of branched polyimide. In this case, the average linear thermal expansion coefficient is measured in the same direction as the stretching direction.

なお、かかる本発明に従う多分岐ポリイミド系材料にあっては、好ましくは、前記延伸倍率が0.10〜0.40倍であり、前記平均線熱膨張係数が−1.0〜10.6ppm/℃である
In the multi-branched polyimide material according to the present invention, preferably, the draw ratio is 0.10 to 0.40 and the average linear thermal expansion coefficient is -1.0 to 10.6 ppm / ° C.

一方、本発明は、上述した各態様の多分岐ポリイミド系材料からなる耐熱性フィルムも、その要旨とするものである。   On the other hand, this invention also makes the summary the heat resistant film which consists of the multibranched polyimide-type material of each aspect mentioned above.

更に、本発明は、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとを、重合させ、多分岐ポリアミド酸からなるフィルムとし、前記多分岐ポリアミド酸からなるフィルムを、延伸倍率が0.05〜0.40倍となるように、延伸処理し、イミド化処理を施ことを特徴とする多分岐ポリイミド系フィルムの製造方法も、その要旨とするものである。かかる多分岐ポリイミド系フィルムの製造方法においては、好ましくは、延伸倍率が0.10〜0.40倍とされる。
Further, in the present invention, pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene are polymerized to form a film made of multibranched polyamic acid, and a film made of the multibranched polyamic acid, as the draw ratio is 0.40 times 0.05, and stretching method of the hyperbranched polyimide-based film, characterized in that to facilities imidization process also it is intended to its gist. In the method for producing such a multibranched polyimide film, the draw ratio is preferably 0.10 to 0.40.

本発明に従う多分岐ポリイミド系材料にあっては、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとを脱水縮合して得られる、50〜250℃における平均線熱膨張係数が−1.0〜27.2ppm/℃と低い特定の多分岐ポリイミドからなるものであるので、優れた機械的特性と共に優れた寸法安定性を発揮することができる。
In the multibranched polyimide material according to the present invention, the average linear thermal expansion at 50 to 250 ° C. obtained by dehydration condensation of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene. Since it is made of a specific multi-branched polyimide having a low coefficient of -1.0 to 27.2 ppm / ° C, it can exhibit excellent dimensional stability as well as excellent mechanical properties.

また、本発明に従う多分岐ポリイミド系材料にあっては、250℃程度の熱処理後にも安定しているので、平均線熱膨張係数が−1.0〜27.2ppm/℃と低い特定の多分岐ポリイミドからなるものであるので、優れた機械的特性と共に優れた寸法安定性を発揮することができる。
Further, in the multi-branched polyimide material according to the present invention, since it is stable even after heat treatment at about 250 ° C., the specific linear thermal expansion coefficient is as low as −1.0 to 27.2 ppm / ° C. Since it consists of a branched polyimide, it can exhibit excellent dimensional stability as well as excellent mechanical properties.

また、上記の多分岐ポリイミドが、特に、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの中間反応物である多分岐ポリアミド酸からなるフィルムに対して、延伸倍率が0.05〜0.40倍の延伸処理、及び、イミド化処理を施したものである場合には、延伸倍率を上記範囲内において適宜に設定することにより、イミド化して得られる多分岐ポリイミドの50〜250℃における平均線熱膨張係数を、−1.0〜27.2ppm/℃の範囲内において所望とする値とすることが可能となり、所望とする多分岐ポリイミド系材料とすることができる。
In addition, the above-mentioned multibranched polyimide is particularly suitable for a film composed of a multibranched polyamic acid that is an intermediate reaction product of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene. Is obtained by imidization by appropriately setting the stretching ratio within the above range when the film is subjected to a stretching treatment of 0.05 to 0.40 times and an imidization treatment. The average linear thermal expansion coefficient at 50 to 250 ° C. can be set to a desired value within a range of −1.0 to 27.2 ppm / ° C., and a desired multi-branched polyimide material is obtained. Can do.

そして、そのような多分岐ポリイミド系材料からなる耐熱性フィルムにあっては、材料が有する優れた機械的特性及び寸法安定性を特に有利に享受することが可能である。   And in the heat-resistant film which consists of such a multibranched polyimide type material, it is possible to enjoy especially advantageous the mechanical characteristics and dimensional stability which material has.

本発明の実施例1〜4及び比較例1についての熱分析測定におけるTMA曲線を示す図である。It is a figure which shows the TMA curve in the thermal analysis measurement about Examples 1-4 and Comparative Example 1 of this invention. 本発明の実施例1〜4及び比較例1〜4について、50〜250℃における延伸倍率と平均線熱膨張係数との関係を示すグラフである。It is a graph which shows the relationship between the draw ratio in 50-250 degreeC, and an average linear thermal expansion coefficient about Examples 1-4 of this invention and Comparative Examples 1-4. 本発明の実施例1〜4及び比較例2〜4について、延伸倍率とヤング率との関係を示すグラフである。It is a graph which shows the relationship between a draw ratio and a Young's modulus about Examples 1-4 of this invention, and Comparative Examples 2-4. 本発明の実施例1〜4及び比較例2〜4について、延伸倍率と破断強度との関係を示すグラフである。It is a graph which shows the relationship between a draw ratio and breaking strength about Examples 1-4 of this invention, and Comparative Examples 2-4.

本発明に従う多分岐ポリイミド系材料は、無水ピロメリット酸(以下、PMDAともいう)と1,3,5−トリス(4−アミノフェノキシ)ベンゼン(以下、TAPOB ともいう)とを重合して得られる多分岐ポリイミドの中でも、50〜250℃における平均線熱膨張係数が−1.0〜27.2ppm/℃と比較的低いものにて構成されている。尚、多分岐ポリイミドとは、一つの分子内に多数の末端を有し、分子構造が所謂、樹木状構造を呈するポリイミドを意味するものである。
The multi-branched polyimide material according to the present invention is obtained by polymerizing pyromellitic anhydride (hereinafter also referred to as PMDA) and 1,3,5-tris (4-aminophenoxy) benzene (hereinafter also referred to as TAPOB). Among multi-branched polyimides, the average linear thermal expansion coefficient at 50 to 250 ° C. is relatively low at −1.0 to 27.2 ppm / ° C. The multi-branched polyimide means a polyimide having a so-called tree-like structure having many terminals in one molecule.

本発明の効果が生じるメカニズムについては、推測であるが、以下のように考えている。多分岐ポリイミドはランダムな三次元構造をとり、その分子構造内は多くのベンゼン環により構成され、非常に剛直な骨格を有している。延伸処理を行なわない場合は、多分岐構造は略球状であり、分子鎖の自由度が低く、変形が起こりにくい。ここで、延伸処理を行なうと、直鎖構造ではポリマー鎖が伸びきり、鎖状態へと変化し、配向していくのに対し、多分岐構造では略球状の分子が全体で楕円状へ変化し、面配向する。そのため、わずかな延伸倍率であっても、配向の効果が強く現れると考えられる。したがって、多分岐ポリイミドは、僅かな延伸倍率であっても分子鎖の配向性が上がるため、延伸方向に対する応力に対して変形し難く、線膨張係数の低下、ヤング率、破断強度が向上すると考えられる。   About the mechanism in which the effect of this invention produces, although it is speculation, it thinks as follows. Multi-branched polyimide has a random three-dimensional structure, and its molecular structure is composed of many benzene rings and has a very rigid skeleton. When the stretching process is not performed, the multi-branched structure is substantially spherical, the degree of freedom of the molecular chain is low, and deformation does not easily occur. Here, when the stretching process is performed, in the linear structure, the polymer chain is stretched and changed into a chain state and oriented, whereas in the multi-branched structure, the substantially spherical molecule changes into an elliptical shape as a whole. , Plane orientation. Therefore, it is considered that the effect of orientation appears strongly even at a slight stretching ratio. Therefore, it is considered that multi-branched polyimide is not easily deformed with respect to the stress in the stretching direction because the orientation of the molecular chain is increased even at a slight stretching ratio, and the linear expansion coefficient is lowered, Young's modulus, and breaking strength are improved. It is done.

また、本発明に従う耐熱性フィルムは、上記多分岐ポリイミド系材料からなる耐熱フィルムである。さらに、本発明に従う多分岐ポリイミドフィルムの製造方法は、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとを、重合させ、多分岐ポリアミド酸からなるフィルムとし、前記多分岐ポリアミド酸からなるフィルムを、延伸倍率が0.05〜0.40倍となるように、延伸処理し、イミド化処理を施した多分岐ポリイミド系フィルムの製造方法である。
Moreover, the heat resistant film according to the present invention is a heat resistant film made of the above multi-branched polyimide material. Furthermore, the method for producing a multi-branched polyimide film according to the present invention comprises polymerizing pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene to form a film composed of a multi-branched polyamic acid. This is a method for producing a multi-branched polyimide film in which a film comprising a branched polyamic acid is stretched so as to have a stretching ratio of 0.05 to 0.40 times and imidized.

本発明に従う多分岐ポリイミド系材料(耐熱フィルム、即ち多分岐ポリイミド系フィルム)にあっては、有利には、以下に述べる手法に従って製造することができる。   The multi-branched polyimide material (heat-resistant film, ie, multi-branched polyimide film) according to the present invention can be advantageously manufactured according to the method described below.

先ず、無水ピロメリット酸と、1,3,5−トリス(4−アミノフェノキシ)ベンゼンとを反応させて、多分岐ポリアミド酸を合成する。   First, pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene are reacted to synthesize a multibranched polyamic acid.

ここで、かかる合成の際に用いられる無水ピロメリット酸及び1,3,5−トリス(4−アミノフェノキシ)ベンゼンは、何れも、市販品を用い得ることは勿論のこと、本発明に従う多分岐ポリイミド系材料を製造する為に自らが合成したものを用いることも可能である。   Here, as the pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene used in the synthesis, both commercially available products can be used as well as the multi-branch according to the present invention. It is also possible to use a material synthesized by itself for producing a polyimide material.

また、無水ピロメリット酸及び1,3,5−トリス(4−アミノフェノキシ)ベンゼンを重合することによる多分岐ポリアミド酸の合成は、比較的低温、具体的には100℃以下、好ましくは50℃以下の温度条件下において実施することが好ましい。ここで、多分岐ポリアミド酸の合成の温度条件の下限は、使用する溶媒(後述する、溶媒α)の融点以上であることが好ましい。これよりも低い温度の場合、溶媒が凍り、合成に支障をきたすからである。例えば、溶媒として、N,N−ジメチルアセトアミド(DMAc)を使用する場合は、多分岐ポリアミド酸の合成の温度が−20℃以上であることが好ましい。尚、合成時間(反応時間)は、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの反応が十分に進行するように、設定した温度条件及び両化合物の使用量に応じて、適宜に決定される。   In addition, the synthesis of a multi-branched polyamic acid by polymerizing pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene is relatively low temperature, specifically 100 ° C. or less, preferably 50 ° C. It is preferable to carry out under the following temperature conditions. Here, the lower limit of the temperature condition for the synthesis of the multibranched polyamic acid is preferably equal to or higher than the melting point of the solvent to be used (solvent α described later). This is because if the temperature is lower than this, the solvent freezes and hinders synthesis. For example, when N, N-dimethylacetamide (DMAc) is used as the solvent, the temperature for synthesizing the multibranched polyamic acid is preferably −20 ° C. or higher. The synthesis time (reaction time) was set so that the reaction between pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene proceeded sufficiently and the amount of both compounds used. It is determined appropriately according to

さらに、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの反応は、無水ピロメリット酸を、1モルとした場合に、1,3,5−トリス(4−アミノフェノキシ)ベンゼンを、0.3〜1.2モル当量となるような割合で配合し、実施することが好ましい。更には、無水ピロメリット酸を、1モルとした場合に、1,3,5−トリス(4−アミノフェノキシ)ベンゼンを、0.4〜1.1モル当量となるような割合で配合し、実施することがより好ましい。   Furthermore, the reaction between pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene is carried out by using 1,3,5-tris (4-amino) Phenoxy) benzene is preferably blended at a ratio of 0.3 to 1.2 molar equivalents. Furthermore, when 1 mol of pyromellitic anhydride is used, 1,3,5-tris (4-aminophenoxy) benzene is blended at a ratio of 0.4 to 1.1 mol equivalent, More preferably.

加えて、無水ピロメリット酸及び1,3,5−トリス(4−アミノフェノキシ)ベンゼンを重合することによる多分岐ポリアミド酸の合成は、有利には、下記の所定の溶媒(本明細書において溶媒αとする)内にて実施される。かかる合成の際に用いられる溶媒αとしては、N,N−ジメチルアセトアミド(DMAc)、N−メチル−2−ピロリドン、ジメチルホルムアミド、ジメチルスルホキシド、テトラメチルスルホン、ヘキサメチルスルホン、ヘキサメチルフォスホアミド等の非プロトン性極性溶媒、m−クレゾール、o−クレゾール、m−クロロフェノール、o−クロロフェノール等のフェノール系溶媒、又は、ジオキサン、テトラヒドロフラン、ジグライム等のエーテル系溶媒等を、例示することが出来る。これらの溶媒は、単独で、若しくは二種以上のものからなる混合溶媒として、使用することが可能である。また、上記の如き溶媒を用いた無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの反応は、好ましくは、窒素ガス又は各種希ガス等の不活性ガス雰囲気下において、実施される。   In addition, the synthesis of multi-branched polyamic acid by polymerizing pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene is advantageously carried out in the following prescribed solvent (herein the solvent (with α). Examples of the solvent α used in the synthesis include N, N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone, dimethylformamide, dimethylsulfoxide, tetramethylsulfone, hexamethylsulfone, hexamethylphosphoamide and the like. Non-protic polar solvents, phenol solvents such as m-cresol, o-cresol, m-chlorophenol, o-chlorophenol, or ether solvents such as dioxane, tetrahydrofuran, diglyme, etc. . These solvents can be used alone or as a mixed solvent composed of two or more kinds. Further, the reaction of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene using a solvent as described above is preferably performed in an inert gas atmosphere such as nitrogen gas or various rare gases. Implemented.

無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとを重合することによる多分岐ポリアミド酸の合成は、上述した種々の条件等に従い、例えば、以下の如き手順に従って実施される。即ち、室温下において、所定の容器に溶媒α及び無水ピロメリット酸を投入し、撹拌することにより、先ず、溶媒αに無水ピロメリット酸を溶解させて無水ピロメリット酸溶液を得る。次いで、容器内を窒素雰囲気とした状態で無水ピロメリット酸溶液を撹拌しながら、別途準備した、溶媒αに1,3,5−トリス(4−アミノフェノキシ)ベンゼン(TAPOB )を溶解してなるTAPOB 溶液を、無水ピロメリット酸溶液に対して徐々に加え、所定の時間、撹拌することにより、多分岐ポリアミド酸溶液を得ることが出来る。   The synthesis of hyperbranched polyamic acid by polymerizing pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene is carried out according to the above-mentioned various conditions, for example, according to the following procedure. The That is, by adding the solvent α and pyromellitic anhydride to a predetermined container at room temperature and stirring, first, pyromellitic anhydride is dissolved in the solvent α to obtain a pyromellitic anhydride solution. Next, while stirring the pyromellitic anhydride solution in a nitrogen atmosphere inside the container, 1,3,5-tris (4-aminophenoxy) benzene (TAPOB) is dissolved in a solvent α prepared separately. A multi-branched polyamic acid solution can be obtained by gradually adding the TAPOB solution to the pyromellitic anhydride solution and stirring the solution for a predetermined time.

なお、無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの重合は、スチレン換算の数平均分子量が5000〜100000である多分岐ポリアミド酸が得られるように実施することが好ましく、スチレン換算の数平均分子量が10000〜50000である多分岐ポリアミド酸が得られるように実施することが、より好ましい。多分岐ポリアミド酸の数平均分子量が小さ過ぎると、製膜性が悪く、十分な強度を有するフィルムを作成することが困難であり、その一方、多分岐ポリアミド酸の数平均分子量が大き過ぎると、溶媒α内での無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの重合においてゲルが生じ、均質なフィルムとならない。   The polymerization of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene is carried out so as to obtain a multibranched polyamic acid having a styrene-equivalent number average molecular weight of 5,000 to 100,000. It is more preferable to carry out so as to obtain a multibranched polyamic acid having a styrene-equivalent number average molecular weight of 10,000 to 50,000. If the number average molecular weight of the multibranched polyamic acid is too small, the film-forming property is poor and it is difficult to create a film having sufficient strength, while the number average molecular weight of the multibranched polyamic acid is too large, In the polymerization of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene in the solvent α, a gel is formed and a homogeneous film is not formed.

以上の如くして合成された多分岐ポリアミド酸溶液を用いて、本発明の多分岐ポリイミド系材料を構成する、50〜250℃における平均線熱膨張係数が−1.0〜27.2ppm/℃の多分岐ポリイミドが得られる。ここで、50〜250℃における平均線熱膨張係数とは、引張荷重が50mN、昇温速度が5℃/分、窒素雰囲気(窒素流入速度は100mL/分)の条件下の熱機械分析において、まず、5℃/分の昇温速度で室温(例えば25℃)から350℃まで一旦、昇温させ、室温(例えば25℃)まで冷却した後に再度、5℃/分で昇温させる。次に、試験片(多分岐ポリイミドフィルム)における引張方向(延伸方向)の、250℃時の試験片の長さから50℃時の試験片の長さを差し引いて、寸法変化を求め、この寸法変化を、室温(例えば25℃)時における引張前の試験片の長さと、測定温度の温度差(200℃)で除した値であり、平均線膨張係数ともいう(JIS−K−0129:2005、JIS−K−7197:1991参照)。
Using the multi-branched polyamic acid solution synthesized as described above, the average linear thermal expansion coefficient at 50 to 250 ° C. constituting the multi-branched polyimide material of the present invention is −1.0 to 27.2 ppm / A hyperbranched polyimide at 0 ° C. is obtained. Here, the average linear thermal expansion coefficient at 50 to 250 ° C. is a thermomechanical analysis under the conditions of a tensile load of 50 mN, a temperature increase rate of 5 ° C./min, and a nitrogen atmosphere (nitrogen inflow rate is 100 mL / min). First, the temperature is once raised from room temperature (for example, 25 ° C.) to 350 ° C. at a temperature rising rate of 5 ° C./minute, cooled to room temperature (for example, 25 ° C.), and then heated again at 5 ° C./minute. Next, by subtracting the length of the test piece at 50 ° C. from the length of the test piece at 250 ° C. in the tensile direction (stretching direction) of the test piece (multi-branched polyimide film), the dimensional change is obtained and this dimension is obtained. The change is a value obtained by dividing the change by the temperature difference (200 ° C.) between the length of the test piece before tension at room temperature (for example, 25 ° C.) and the measurement temperature (JIS-K-0129: 2005). JIS-K-7197: 1991).

そのような所定の線熱膨張係数を有する多分岐ポリイミドを得るためには、有利には、以下の手法が採用される。即ち、上述の如き手法に従って調製した多分岐ポリアミド酸溶液を用いて、先ずは延伸処理(一軸延伸処理)を施すことが可能な形状を呈する多分岐ポリアミド酸成形体を作製し、次いで、この多分岐ポリアミド酸成形体に対して、延伸処理(一軸延伸処理)及びイミド化処理を施すことによって、本発明の多分岐ポリイミド系材料を構成する多分岐ポリイミドが得られる。   In order to obtain a multi-branched polyimide having such a predetermined linear thermal expansion coefficient, the following method is advantageously employed. That is, using a multi-branched polyamic acid solution prepared according to the above-described method, first, a multi-branched polyamic acid molded body having a shape that can be subjected to a stretching treatment (uniaxial stretching treatment) is produced, and then this multi-branched polyamic acid molded body is produced. By subjecting the branched polyamic acid molded body to stretching treatment (uniaxial stretching treatment) and imidization treatment, a multi-branched polyimide constituting the multi-branched polyimide material of the present invention is obtained.

ここで、延伸処理(一軸延伸処理)を施すことが可能な形状としては、多分岐ポリイミド系材料の用途に応じて、フィルム状、板状、棒状等の各種の形状が採用され得るが、フィルム状が好ましい。   Here, as a shape that can be subjected to stretching treatment (uniaxial stretching treatment), various shapes such as a film shape, a plate shape, and a rod shape can be adopted depending on the use of the multi-branched polyimide material. The shape is preferred.

延伸処理(一軸延伸処理)を施すことが可能な形状を呈する多分岐ポリアミド酸成形体の作製は、その形状に応じた手法であって従来より公知のものであれば、如何なる手法であっても採用可能である。具体的には、フィルム状の多分岐ポリアミド酸成形体(多分岐ポリアミド酸フィルム)の作製手法としては、所定の基板上に多分岐ポリアミド酸溶液を薄く拡げ、溶媒を除去することによって多分岐ポリアミド酸フィルムを得るキャスト法を例示することが出来る。   The production of a multi-branched polyamic acid molded article having a shape that can be subjected to a stretching treatment (uniaxial stretching treatment) is a technique according to the shape, and any technique can be used as long as it is conventionally known. It can be adopted. Specifically, as a method for producing a film-like multibranched polyamic acid molded product (multibranched polyamic acid film), a multibranched polyamide acid solution is thinly spread on a predetermined substrate and the solvent is removed to remove the multibranched polyamide. A casting method for obtaining an acid film can be exemplified.

次いで、そのようにして得られた、延伸処理(一軸延伸処理)を施すことが可能な形態を呈する多分岐ポリアミド酸成形体に対して、延伸処理(一軸延伸処理)及びイミド化処理が施される。   Next, the thus obtained multi-branched polyamic acid molded article having a form capable of being subjected to a stretching treatment (uniaxial stretching treatment) is subjected to a stretching treatment (uniaxial stretching treatment) and an imidization treatment. The

ここで、延伸処理(一軸延伸処理)における延伸倍率は、0.05〜0.40倍であることが好ましく、より好ましくは0.10〜0.40倍であり、更に好ましくは0.20〜0.40倍である。0.05倍未満の延伸倍率では、最終的に得られる多分岐ポリイミドにおいて延伸処理による効果(平均線熱膨張係数の低下)を効果的に享受し得ない恐れがあり、その一方、0.40倍を超える延伸処理を施すと、多分岐ポリアミド酸成形体の破断伸びを超えるため、フィルムが破断する恐れがあるからである。本願明細書及び特許請求の範囲における延伸倍率とは、以下の式より算出されるものを意味する。尚、延伸速度は延伸倍率に影響を及ぼさなかったため、延伸倍率は下記のように延伸方向の長さから求めることができる。
[延伸倍率]=(X’−X)/X
但し、Xは延伸処理前の延伸方向におけるフィルム長さであり、X’は延伸処理 後の延伸方向におけるフィルム長さである。
Here, the draw ratio in the drawing treatment (uniaxial drawing treatment) is preferably 0.05 to 0.40 times, more preferably 0.10 to 0.40 times, and still more preferably 0 . 20 to 0.40 times. The draw ratio of less than 0.05 times, there is a risk which can not be enjoyed effects of stretching a (lower average coefficient of linear thermal expansion) effectively in hyperbranched polyimide finally obtained, while, 0.40 This is because if the stretching treatment exceeds twice, the elongation at break of the multi-branched polyamic acid molded product is exceeded, and the film may be broken. The draw ratio in the present specification and claims means that calculated from the following formula. Since the stretching speed did not affect the stretching ratio, the stretching ratio can be determined from the length in the stretching direction as follows.
[Stretch ratio] = (X′−X) / X
However, X is the film length in the stretching direction before the stretching treatment, and X ′ is the film length in the stretching direction after the stretching treatment.

なお、延伸処理の手法としては、一軸延伸が可能な手法であれば、従来より公知の如何なる手法についても採用可能であり、各種の一軸延伸装置等を用いて実施することができる。   In addition, as a technique for the stretching treatment, any conventionally known technique can be adopted as long as it is a technique capable of uniaxial stretching, and it can be carried out using various uniaxial stretching apparatuses.

一方、イミド化処理は、ポリアミド酸をイミド化せしめる処理方法として従来より公知のものであれば、如何なるものであっても採用することが可能である。そのような公知の処理方法の中でも、特に加熱処理(例えば還元雰囲気で250〜350℃)が有利に採用される。   On the other hand, any imidation treatment can be adopted as long as it is a conventionally known treatment method for imidizing polyamic acid. Among such known processing methods, heat treatment (for example, 250 to 350 ° C. in a reducing atmosphere) is particularly advantageously employed.

本発明において、ポリアミド酸成形体に対する延伸処理及びイミド化処理は、それぞれの処理によって所望とする効果が得られる限りにおいて、その実施順序は特に限定されるものではない。例えば、延伸処理を施した後にイミド化処理を実施する場合のみならず、延伸処理とイミド化処理を同時に進行させることも可能である。   In the present invention, the order of carrying out the stretching treatment and the imidization treatment on the polyamic acid molded product is not particularly limited as long as a desired effect is obtained by each treatment. For example, not only when the imidization treatment is performed after the stretching treatment, but also the stretching treatment and the imidization treatment can proceed simultaneously.

そして、多分岐ポリアミド酸成形体に対して延伸処理及びイミド化処理を施すことによって、目的とする本発明の多分岐ポリイミドが得られるのである。このようにして得られた多分岐ポリイミドは、50〜250℃における平均線熱膨張係数(CTE)が−1.0〜27.2ppm/℃と比較的低いものであり、ポリイミドが本来的に有する優れた機械的特性に加えて、室温よりも高温である50〜250℃において優れた寸法安定性をも発揮する。多分岐ポリイミドの50〜250℃における平均線熱膨張係数(CTE)は−1.0〜10.6ppm/℃が特に好ましい。その結果、かかる多分岐ポリイミドからなる本発明の多分岐ポリイミド系材料は、半導体素子の層間絶縁膜又は保護膜、又は、各種電子機器又は太陽電池等に用いられるフレキシブルプリント配線板等のベースフィルム又はカバーレイ等の用途において、有利に用いることができる。
And the target multibranched polyimide of this invention is obtained by performing an extending | stretching process and an imidation process with respect to a multibranched polyamic-acid molded object. The multibranched polyimide thus obtained has a relatively low average linear thermal expansion coefficient (CTE) at -250 to 250 ° C, -1.0 to 27.2 ppm / ° C. In addition to the excellent mechanical properties, excellent dimensional stability is exhibited at 50 to 250 ° C., which is higher than room temperature. The average linear thermal expansion coefficient (CTE) at 50 to 250 ° C. of the multibranched polyimide is particularly preferably −1.0 to 10.6 ppm / ° C. As a result, the multi-branched polyimide material of the present invention comprising such a multi-branched polyimide is an interlayer insulating film or protective film of a semiconductor element, or a base film such as a flexible printed wiring board used for various electronic devices or solar cells, or the like. It can be advantageously used in applications such as coverlays.

以上、本発明の代表的な一実施形態について詳述してきたが、本発明は、上述した実施形態に限定されるものではない。例えば、上述の如き平均線熱膨張係数が所定範囲内にある多分岐ポリイミドと他の樹脂材料との混合物からなる材料にあっても、本発明の目的を阻害しない限りにおいて、本発明に係る多分岐ポリイミド系材料の範疇に含まれる。   The representative embodiment of the present invention has been described in detail above, but the present invention is not limited to the above-described embodiment. For example, even in the case of a material composed of a mixture of a multi-branched polyimide having an average linear thermal expansion coefficient within a predetermined range as described above and another resin material, the multiple according to the present invention may be used as long as the object of the present invention is not impaired. Included in the category of branched polyimide materials.

以下に、本発明の実施例を幾つか示し、本発明を更に具体的に明らかにすることとするが、本発明が、そのような実施例の記載によって、何等の制約をも受けるものでないことは、言うまでもないところである。また、本発明には、以下の実施例の他にも、更には、上述の具体的記述以外にも、本発明の趣旨を逸脱しない限りにおいて、当業者の知識に基づいて、種々なる変更、修正、改良等を加え得るものであることが、理解されるべきである。   Some examples of the present invention will be shown below to clarify the present invention more specifically. However, the present invention is not limited by the description of such examples. Needless to say. In addition to the following examples, the present invention includes various modifications based on the knowledge of those skilled in the art without departing from the spirit of the present invention, in addition to the above-described specific description. It should be understood that modifications, improvements, etc. can be made.

なお、以下の実施例及び比較例において得られたポリイミドフィルムについては、以下の各手法に従って、平均線熱膨張係数(CTE)、ヤング率、破断強度及び破断伸びを、それぞれ測定又は算出した。   In addition, about the polyimide film obtained in the following example and the comparative example, according to each following method, average linear thermal expansion coefficient (CTE), Young's modulus, breaking strength, and breaking elongation were measured or calculated, respectively.

−平均線熱膨張係数(CTE)−
SEIKO instruments. Inc. 製の熱機械分析装置(熱・応力・歪測定装置、型式名:TMA/SS6100)を用いて、熱機械分析を行なった。具体的には、引張荷重が50mN、昇温速度が5℃/分、窒素雰囲気(窒素流入速度は100mL/分)で、測定温度50〜250℃の範囲で測定を行なった。まず、5℃/分の昇温速度で室温(例えば25℃)から350℃まで一旦、昇温させ、室温(例えば25℃)まで冷却した後に再度、5℃/分で昇温させる。次に、試験片(多分岐ポリイミドフィルム)における引張方向(延伸方向)の、250℃時の試験片の長さから50℃時の試験片の長さを差し引いて、寸法変化を求め、この寸法変化を、室温(例えば25℃)時における引張前の試験片の長さと、測定温度の温度差(200℃)で除して、平均線熱膨張係数(CTE)を求めた。尚、この試験は、試験片(多分岐ポリイミドフィルム又は直鎖ポリイミドフィルム)として、0.03mmの膜厚に作製したフィルムを適宜延伸した後、30mm×3mmの大きさに切り出したものを使用して、行なった。そのため、平均線熱膨張係数測定時の試験片の厚みは必ずしも同じ(0.03mm)ではない。
-Average linear thermal expansion coefficient (CTE)-
Thermomechanical analysis was performed using a thermomechanical analyzer (thermal / stress / strain measuring apparatus, model name: TMA / SS6100) manufactured by SEIKO instruments. Specifically, the measurement was performed at a measurement temperature of 50 to 250 ° C. under a tensile load of 50 mN, a temperature increase rate of 5 ° C./min, and a nitrogen atmosphere (nitrogen inflow rate was 100 mL / min). First, the temperature is once raised from room temperature (for example, 25 ° C.) to 350 ° C. at a temperature rising rate of 5 ° C./minute, cooled to room temperature (for example, 25 ° C.), and then heated again at 5 ° C./minute. Next, by subtracting the length of the test piece at 50 ° C. from the length of the test piece at 250 ° C. in the tensile direction (stretching direction) of the test piece (multi-branched polyimide film), the dimensional change is obtained and this dimension is obtained. The change was divided by the length of the test piece before tension at room temperature (for example, 25 ° C.) and the temperature difference (200 ° C.) between the measured temperatures to determine the average linear thermal expansion coefficient (CTE). In this test, as a test piece (multi-branched polyimide film or linear polyimide film), a film prepared to a film thickness of 0.03 mm was appropriately stretched and then cut into a size of 30 mm × 3 mm. I did it. Therefore, the thickness of the test piece at the time of measuring the average linear thermal expansion coefficient is not necessarily the same (0.03 mm).

−ヤング率、破断強度及び破断伸び−
JTトーシ社製卓上型引張試験機(商品名:リトルセンスターLSC-05/30 )を用いて、実施例及び比較例における、延伸後のポリイミドフィルム(多分岐ポリイミド)の試験片(縦5mm×横40mm)について、引張速度5mm/分、室温(25℃)にて引張試験を実施した。この際、応力の計算には、試験片の断面積が必要となる。試験前(破断前)の試験片の厚みを6箇所で測定して、平均値を求め、試験片の断面積を計算した。得られた応力−歪曲線の初期勾配からヤング率(GPa)を算出し、フィルムが破断した時の強度及び伸びの長さから、破断強度(MPa)及び破断伸び(%)を求めた。尚、破断伸び(%)は、以下の式から求めることができる。
破断伸び(%)=[(破断時の試験片長さ−試験前の試験片長さ)/試験前の試験片 長さ]×100
-Young's modulus, breaking strength and breaking elongation-
Using a tabletop tensile tester (trade name: Little Senster LSC-05 / 30) manufactured by JT Toshi Co., Ltd., test pieces of stretched polyimide film (multi-branched polyimide) in Examples and Comparative Examples (length 5 mm × A tensile test was performed at a tensile speed of 5 mm / min and room temperature (25 ° C.). At this time, the cross-sectional area of the test piece is required for calculating the stress. The thickness of the test piece before the test (before breakage) was measured at six locations, the average value was obtained, and the cross-sectional area of the test piece was calculated. The Young's modulus (GPa) was calculated from the initial gradient of the obtained stress-strain curve, and the breaking strength (MPa) and breaking elongation (%) were determined from the strength and elongation length when the film was broken. The elongation at break (%) can be obtained from the following equation.
Elongation at break (%) = [(length of specimen at break−length of specimen before test) / length of specimen before test] × 100

以下に、具体的なサンプル(ポリイミドフィルム)の作製条件と、平均線熱膨張係数、ヤング率、破断強度及び破断伸びの測定又は算出結果を示す。   The measurement conditions or calculation results of specific sample (polyimide film) production conditions, average linear thermal expansion coefficient, Young's modulus, breaking strength, and breaking elongation are shown below.

−実施例1〜4−
撹拌機、窒素導入管、塩化カルシウム管及び温度計を備えた100mLのフラスコに、40mLのN,N−ジメチルアセトアミド(DMAc)を加え、無水ピロメリット酸(PMDA):0.65g(3ミリモル)を溶解させた。この溶液を窒素気流下に攪拌しながら、20mLのDMAcに溶解させた1,3,5−トリス(4−アミノフェノキシ)ベンゼン(TAPOB ):0.64g(1.6ミリモル)を徐々に加えた後、更に25℃で3時間、撹拌し、酸無水物末端多分岐ポリアミド酸を合成した。得られた酸無水物末端多分岐ポリアミド酸のDMAc溶液をポリエステルフィルム上にキャストし、85℃で1時間、乾燥し、半乾燥状態の多分岐ポリアミド酸フィルムを得た。多分岐ポリアミド酸フィルムの大きさは80mm×80mm×0.03mmである。
-Examples 1-4
To a 100 mL flask equipped with a stirrer, nitrogen introduction tube, calcium chloride tube and thermometer, 40 mL of N, N-dimethylacetamide (DMAc) was added and pyromellitic anhydride (PMDA): 0.65 g (3 mmol) Was dissolved. While stirring this solution under a nitrogen stream, 0.64 g (1.6 mmol) of 1,3,5-tris (4-aminophenoxy) benzene (TAPOB) dissolved in 20 mL of DMAc was gradually added. Thereafter, the mixture was further stirred at 25 ° C. for 3 hours to synthesize an acid anhydride-terminated multibranched polyamic acid. The obtained DMAc solution of acid anhydride-terminated multi-branched polyamic acid was cast on a polyester film and dried at 85 ° C. for 1 hour to obtain a semi-dried multi-branched polyamic acid film. The size of the multi-branched polyamic acid film is 80 mm × 80 mm × 0.03 mm.

得られた半乾燥状態の多分岐ポリアミド酸フィルムの両端を平行に延伸冶具に固定し、元のフィルムの寸法(延伸方向の長さ)を基準として、実施例1については0.05倍、実施例2については0.10倍、実施例3については0.20倍、実施例4については0.40倍の延伸倍率となるまで、両端の治具間隔を広げることで一軸延伸処理を実施した。かかる一軸延伸処理後の各フィルムに対して、窒素雰囲気下、100℃で1時間、200℃で1時間、更に300℃で1時間、加熱処理を施し、多分岐ポリイミドフィルム(実施例1〜4)を得た。各多分岐ポリイミドフィルムの物性値[平均線熱膨張係数(CTE)、ヤング率、破断強度及び破断伸び]の測定値又は算出結果を、下記表1に示す。   Both ends of the obtained semi-dried multi-branched polyamic acid film were fixed in parallel to a stretching jig, and 0.05 times for Example 1 was carried out based on the dimensions of the original film (length in the stretching direction). The uniaxial stretching process was performed by widening the jig interval at both ends until the stretching ratio was 0.10 times for Example 2, 0.20 times for Example 3, and 0.40 times for Example 4. . Each of the films after the uniaxial stretching treatment was subjected to a heat treatment in a nitrogen atmosphere at 100 ° C. for 1 hour, 200 ° C. for 1 hour, and further at 300 ° C. for 1 hour. ) Table 1 below shows measured values or calculation results of physical property values [average linear thermal expansion coefficient (CTE), Young's modulus, breaking strength, and breaking elongation] of each multi-branched polyimide film.

−比較例1−
実施例1〜4と同様の手法によって得られた多分岐ポリアミド酸フィルムについて、一軸延伸処理を施すことなく(延伸倍率は0.00倍)、実施例1〜4と同様の条件で加熱処理を施し、多分岐ポリイミドフィルムを得た。多分岐ポリイミドフィルムの大きさは80mm×80mm×0.03mmである。この多分岐ポリイミドフィルムの物性値[平均線熱膨張係数(CTE)、ヤング率、破断強度及び破断伸び]の測定値又は算出結果を、下記表1に示す。
-Comparative Example 1-
About the multibranched polyamic acid film obtained by the same method as in Examples 1 to 4, heat treatment was performed under the same conditions as in Examples 1 to 4 without performing uniaxial stretching (stretching ratio is 0.00). To give a multi-branched polyimide film. The size of the multi-branched polyimide film is 80 mm × 80 mm × 0.03 mm. Table 1 below shows measured values or calculation results of physical property values [average linear thermal expansion coefficient (CTE), Young's modulus, breaking strength, and breaking elongation] of this multi-branched polyimide film.

−比較例2〜4−
撹拌機、窒素導入管、塩化カルシウム管及び温度計を備えた100mLのフラスコに、20mLのN,N−ジメチルアセトアミド(DMAc)を加え、4,4−オキシジアニリン(ODA ):0.40g(2ミリモル)を溶解させた。この溶液を窒素気流下に撹拌しながら、無水ピロメリット酸(PMDA):0.44g(2ミリモル)を固体状態で徐々に加えた後、更に25℃で3時間、撹拌し、直鎖ポリアミド酸を合成した。得られた直鎖ポリアミド酸のDMAc溶液をポリエステルフィルム上にキャストし、85℃で1時間、乾燥し、半乾燥状態の直鎖ポリアミド酸フィルムを得た。直鎖ポリアミド酸フィルムの大きさは80mm×80mm×0.03mmである。
-Comparative Examples 2-4-
To a 100 mL flask equipped with a stirrer, nitrogen introduction tube, calcium chloride tube and thermometer, 20 mL of N, N-dimethylacetamide (DMAc) was added and 4,4-oxydianiline (ODA): 0.40 g ( 2 mmol) was dissolved. While stirring this solution under a nitrogen stream, pyromellitic anhydride (PMDA): 0.44 g (2 mmol) was gradually added in a solid state, and further stirred at 25 ° C. for 3 hours to obtain linear polyamic acid. Was synthesized. The obtained DMAc solution of linear polyamic acid was cast on a polyester film and dried at 85 ° C. for 1 hour to obtain a semi-dried linear polyamic acid film. The size of the linear polyamic acid film is 80 mm × 80 mm × 0.03 mm.

得られた半乾燥状態の直鎖ポリアミド酸フィルムを延伸冶具に固定し、元のフィルムの寸法(延伸方向の長さ)を基準として、比較例3については0.25倍、比較例4については0.50倍の延伸倍率にて、実施例1〜4と同様に、一軸延伸処理を実施した。尚、比較例2については一軸延伸処理を実施しなかった(延伸倍率は0.00倍)。その後、各フィルムに対して、窒素雰囲気下、100℃で1時間、200℃で1時間、更に300℃で1時間、加熱処理を施し、直鎖ポリイミドフィルム(比較例2〜4)を得た。各直鎖ポリイミドフィルムの物性値[平均線熱膨張係数(CTE)、ヤング率、破断強度及び破断伸び]の測定値又は算出結果を、下記表1に示す。   The obtained semi-dried linear polyamic acid film was fixed to a stretching jig, and 0.25 times for Comparative Example 3 and Comparative Example 4 based on the original film dimension (length in the stretching direction). A uniaxial stretching process was performed in the same manner as in Examples 1 to 4 at a stretching ratio of 0.50. In Comparative Example 2, the uniaxial stretching process was not performed (the stretching ratio was 0.00). Thereafter, each film was subjected to heat treatment at 100 ° C. for 1 hour, 200 ° C. for 1 hour, and further at 300 ° C. for 1 hour to obtain a linear polyimide film (Comparative Examples 2 to 4). . Table 1 below shows measured values or calculation results of physical property values [average linear thermal expansion coefficient (CTE), Young's modulus, breaking strength, and breaking elongation] of each linear polyimide film.

図1に、実施例1〜4、比較例1のそれぞれの試験片を熱分析測定した結果のTMA曲線[縦軸変化量(%)、横軸温度(℃)]を示す。また、図2に、実施例1〜4及び比較例1〜4の50〜250℃における延伸倍率(倍)と平均線熱膨張係数(CTE)(ppm/℃)との関係のグラフを示す。   FIG. 1 shows a TMA curve [vertical change amount (%), horizontal axis temperature (° C.)] as a result of thermal analysis measurement of each test piece of Examples 1 to 4 and Comparative Example 1. Moreover, the graph of the relationship between the draw ratio (times) in 50-250 degreeC of Examples 1-4 and Comparative Examples 1-4 and average linear thermal expansion coefficient (CTE) (ppm / degreeC) in FIG. 2 is shown.

Figure 0005728183
Figure 0005728183

表1及び図2のグラフからも明らかなように、本発明の多分岐ポリイミド系材料からなるポリイミドフィルム(実施例1〜4)にあっては、延伸方向(MD方向)に対し、延伸倍率が増大するに伴い、著しい平均線熱膨張係数の低下が見られた。特に、延伸倍率が0.2〜0.4倍のポリイミドフィルム(実施例3、4)については、平均線熱膨張係数が低く、特定の温度領域において平均線熱膨張係数が0ppm/℃より小さくなるという特異な性質が確認された。これに対して、比較例1の延伸倍率が0.00倍の多分岐ポリイミドフィルムは、平均線熱膨張係数が31.2ppm/℃であり、実施例1〜4の−1.0〜27.3ppm/℃より高いことが確認できる。また、比較例2、比較例3及び比較例4の直鎖ポリイミドフィルムは、延伸方向(MD方向)に対し、延伸倍率が大きくなるにつれて平均線熱膨張係数の低下は認められたものの、実施例1〜4のような著しい平均線熱膨張係数の低下は認められなかった。その結果、比較例1〜4は実施例1〜4に比べて寸法安定性に劣ることがわかる。   As is clear from the graphs of Table 1 and FIG. 2, in the polyimide films (Examples 1 to 4) made of the multi-branched polyimide material of the present invention, the draw ratio is in the draw direction (MD direction). A significant decrease in the average linear thermal expansion coefficient was observed as it increased. In particular, the polyimide film (Examples 3 and 4) having a draw ratio of 0.2 to 0.4 times has a low average linear thermal expansion coefficient, and the average linear thermal expansion coefficient is less than 0 ppm / ° C. in a specific temperature range. The peculiar property of becoming was confirmed. On the other hand, the multi-branched polyimide film having a draw ratio of 0.00 times in Comparative Example 1 has an average linear thermal expansion coefficient of 31.2 ppm / ° C., and is −1.0 to 27. It can be confirmed that it is higher than 3 ppm / ° C. Moreover, although the linear polyimide film of the comparative example 2, the comparative example 3, and the comparative example 4 showed the fall of an average linear thermal expansion coefficient as the draw ratio became large with respect to the extending | stretching direction (MD direction), an Example No significant decrease in average linear thermal expansion coefficient such as 1 to 4 was observed. As a result, it turns out that Comparative Examples 1-4 is inferior to dimensional stability compared with Examples 1-4.

さらに、図3に、実施例1〜4及び比較例2〜4の延伸倍率(倍)とヤング率(GPa)との関係のグラフを、図4に実施例1〜4及び比較例2〜4の延伸倍率(倍)と破断強度(MPa)との関係のグラフを、それぞれ示す。   3 is a graph showing the relationship between the draw ratio (times) and Young's modulus (GPa) of Examples 1 to 4 and Comparative Examples 2 to 4, and FIG. 4 is Examples 1 to 4 and Comparative Examples 2 to 4. The graphs of the relationship between the draw ratio (times) and the breaking strength (MPa) are respectively shown.

表1及び図3、図4のグラフから、延伸処理により、延伸方向(MD方向)のヤング率及び破断強度については、多分岐ポリイミドフィルム(実施例1〜4)は増加傾向を示し、直鎖ポリイミドフィルム(比較例1、2)は同程度であることが分る。
From the graphs in Table 1 and FIGS. 3 and 4, the multi-branched polyimide films (Examples 1 to 4) show an increasing tendency with respect to the Young's modulus and the breaking strength in the stretching direction (MD direction) by the stretching treatment. It turns out that a polyimide film (Comparative Examples 1 and 2) is comparable.

Claims (5)

無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとの中間反応物である多分岐ポリアミド酸からなるフィルムに対して、延伸倍率が0.05〜0.40倍の延伸処理、及び、イミド化処理を施して得られる、50〜250℃における平均線熱膨張係数が−1.0〜27.2ppm/℃である多分岐ポリイミドからなる多分岐ポリイミド系材料。 Stretching with a draw ratio of 0.05 to 0.40 times with respect to a film made of multi-branched polyamic acid which is an intermediate reaction product of pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene process, and are obtained by performing imidization, hyperbranched polyimide-based material consisting of hyperbranched polyimide average linear thermal expansion coefficient at 50 to 250 ° C. is a -1.0~ 27.2 ppm / ℃. 前記延伸倍率が0.10〜0.40倍であり、前記平均線熱膨張係数が−1.0〜10.6ppm/℃である請求項1に記載の多分岐ポリイミド系材料。The multi-branched polyimide material according to claim 1, wherein the draw ratio is 0.10 to 0.40 and the average linear thermal expansion coefficient is -1.0 to 10.6 ppm / ° C. 請求項1又は請求項2に記載の多分岐ポリイミド系材料からなる耐熱性フィルム。   A heat resistant film made of the multi-branched polyimide-based material according to claim 1. 無水ピロメリット酸と1,3,5−トリス(4−アミノフェノキシ)ベンゼンとを、重合させ、多分岐ポリアミド酸からなるフィルムとし、
前記多分岐ポリアミド酸からなるフィルムを、延伸倍率が0.05〜0.40倍となるように、延伸処理し、
イミド化処理を施ことを特徴とする多分岐ポリイミド系フィルムの製造方法。
Pyromellitic anhydride and 1,3,5-tris (4-aminophenoxy) benzene are polymerized to form a film made of multi-branched polyamic acid,
The film comprising the multi-branched polyamic acid is stretched so that the stretching ratio is 0.05 to 0.40 times,
Method for producing a hyperbranched polyimide-based film, characterized in that to facilities imidization process.
前記延伸倍率が0.10〜0.40倍である請求項4に記載の多分岐ポリイミド系フィルムの製造方法。The method for producing a multibranched polyimide film according to claim 4, wherein the draw ratio is 0.10 to 0.40.
JP2010199872A 2010-09-07 2010-09-07 Multi-branched polyimide material, heat-resistant film, and method for producing multi-branched polyimide film Expired - Fee Related JP5728183B2 (en)

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