JP5670060B2 - パターン・メディア用テンプレートおよびその製造方法 - Google Patents

パターン・メディア用テンプレートおよびその製造方法 Download PDF

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Publication number
JP5670060B2
JP5670060B2 JP2010010240A JP2010010240A JP5670060B2 JP 5670060 B2 JP5670060 B2 JP 5670060B2 JP 2010010240 A JP2010010240 A JP 2010010240A JP 2010010240 A JP2010010240 A JP 2010010240A JP 5670060 B2 JP5670060 B2 JP 5670060B2
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JP
Japan
Prior art keywords
layer
deposition
resist pattern
pattern
resist
Prior art date
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Expired - Fee Related
Application number
JP2010010240A
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English (en)
Japanese (ja)
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JP2010167782A5 (https=
JP2010167782A (ja
Inventor
ワン ゾンギャン
ワン ゾンギャン
アール．ブーンストラ トーマス
アール．ブーンストラ トーマス
エイチ．オストロウスキー マーク
エイチ．オストロウスキー マーク
ブイ．デムチョウク アレクサンドル
ブイ．デムチョウク アレクサンドル
ペン シリン
ペン シリン
ガオ カイゾン
ガオ カイゾン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of JP2010167782A publication Critical patent/JP2010167782A/ja
Publication of JP2010167782A5 publication Critical patent/JP2010167782A5/ja
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/743—Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/86—Re-recording, i.e. transcribing information from one magnetisable record carrier on to one or more similar or dissimilar record carriers
    • G11B5/865—Re-recording, i.e. transcribing information from one magnetisable record carrier on to one or more similar or dissimilar record carriers by contact "printing"

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2010010240A 2009-01-21 2010-01-20 パターン・メディア用テンプレートおよびその製造方法 Expired - Fee Related JP5670060B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/357,296 US20100183957A1 (en) 2009-01-21 2009-01-21 Method of Patterned Media Template Formation and Templates
US12/357,296 2009-01-21

Publications (3)

Publication Number Publication Date
JP2010167782A JP2010167782A (ja) 2010-08-05
JP2010167782A5 JP2010167782A5 (https=) 2013-02-14
JP5670060B2 true JP5670060B2 (ja) 2015-02-18

Family

ID=42337218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010010240A Expired - Fee Related JP5670060B2 (ja) 2009-01-21 2010-01-20 パターン・メディア用テンプレートおよびその製造方法

Country Status (2)

Country Link
US (1) US20100183957A1 (https=)
JP (1) JP5670060B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8771529B1 (en) * 2010-09-30 2014-07-08 Seagate Technology Llc Method for imprint lithography
US8771847B2 (en) 2011-10-14 2014-07-08 Seagate Technology Reader stop-layers
JP6136271B2 (ja) * 2013-01-08 2017-05-31 大日本印刷株式会社 インプリントモールドの製造方法
US9466325B2 (en) * 2013-07-10 2016-10-11 Seagate Technology Llc Patterned growth guiding mechanism
US9269384B1 (en) 2015-05-29 2016-02-23 Seagate Technology Llc Template misalignment and eccentricity error compensation for a patterned medium

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01243426A (ja) * 1988-03-25 1989-09-28 Hitachi Ltd レジスト膜のエツチング方法
JPH0242723A (ja) * 1988-08-02 1990-02-13 Nec Corp 微細パターン形成方法
JPH02260423A (ja) * 1989-03-31 1990-10-23 Hitachi Ltd 有機膜のドライエッチング方法
JPH0494536A (ja) * 1990-08-10 1992-03-26 Fujitsu Ltd レジストパターンの形成方法
US5618383A (en) * 1994-03-30 1997-04-08 Texas Instruments Incorporated Narrow lateral dimensioned microelectronic structures and method of forming the same
US7268082B2 (en) * 2004-04-30 2007-09-11 International Business Machines Corporation Highly selective nitride etching employing surface mediated uniform reactive layer films
JP2006276266A (ja) * 2005-03-28 2006-10-12 Toshiba Corp レティクルおよびそれを用いた磁気ディスク媒体の製造方法ならびに磁気ディスク媒体
US7537866B2 (en) * 2006-05-24 2009-05-26 Synopsys, Inc. Patterning a single integrated circuit layer using multiple masks and multiple masking layers
US7807575B2 (en) * 2006-11-29 2010-10-05 Micron Technology, Inc. Methods to reduce the critical dimension of semiconductor devices
JP2008276907A (ja) * 2007-03-30 2008-11-13 Fujifilm Corp モールド構造体、及びそれを用いたインプリント方法、並びに磁気記録媒体及びその製造方法
US7758981B2 (en) * 2007-07-25 2010-07-20 Hitachi Global Storage Technologies Netherlands B.V. Method for making a master disk for nanoimprinting patterned magnetic recording disks, master disk made by the method, and disk imprinted by the master disk

Also Published As

Publication number Publication date
US20100183957A1 (en) 2010-07-22
JP2010167782A (ja) 2010-08-05

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