JP5631344B2 - Magnetostriction measuring method and magnetostriction measuring apparatus - Google Patents

Magnetostriction measuring method and magnetostriction measuring apparatus Download PDF

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JP5631344B2
JP5631344B2 JP2012039544A JP2012039544A JP5631344B2 JP 5631344 B2 JP5631344 B2 JP 5631344B2 JP 2012039544 A JP2012039544 A JP 2012039544A JP 2012039544 A JP2012039544 A JP 2012039544A JP 5631344 B2 JP5631344 B2 JP 5631344B2
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由人 城門
由人 城門
池田 哲
哲 池田
暁史 沓掛
暁史 沓掛
嗣教 金田
嗣教 金田
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本発明は、磁性材料の磁気歪を測定するための磁気歪測定方法及び磁気歪測定装置に関するものである。   The present invention relates to a magnetostriction measuring method and a magnetostriction measuring apparatus for measuring magnetostriction of a magnetic material.

磁性材料は、磁界中で使用されると、磁界の影響を受けて伸縮する磁気歪が生じる。この磁気歪は、磁性材料を磁界中で使用する電磁機器等において振動や騒音を発生させる原因となる。そのため、磁性材料の磁気歪は、電磁機器等を設計する際に材料選択の重要な要因となっている。   When a magnetic material is used in a magnetic field, it undergoes magnetostriction that expands and contracts under the influence of the magnetic field. This magnetostriction causes vibration and noise in an electromagnetic device using a magnetic material in a magnetic field. Therefore, the magnetostriction of the magnetic material is an important factor in selecting the material when designing an electromagnetic device or the like.

この磁性材料の磁気歪を測定する方法には、従来から様々な方法が考えられているが、微細な歪量を良好に測定できる方法として、磁界中に置かれた磁性材料の変位量をレーザードップラー振動計で測定することによって磁性材料の磁気歪を測定する磁気歪測定方法が知られている。   Various methods for measuring the magnetostriction of this magnetic material have been conceived in the past, but as a method for measuring fine strain well, the amount of displacement of the magnetic material placed in a magnetic field can be measured with a laser. A magnetostriction measuring method for measuring magnetostriction of a magnetic material by measuring with a Doppler vibrometer is known.

従来の磁気歪測定方法は、大きく分けて2種類の方法がある。   Conventional magnetostriction measurement methods are roughly classified into two types.

第1の磁気歪測定方法では、磁界を形成するためのコイルの中に試料となる磁性材料を配置し、試料の一端を固定して他端を自由端とし、試料の自由端側に反射体を取付け、この反射体に向けてレーザードップラー振動計からレーザー光を照射することで、試料の磁気歪を測定する(非特許文献1参照。)。   In the first magnetostriction measurement method, a magnetic material to be a sample is placed in a coil for forming a magnetic field, one end of the sample is fixed and the other end is a free end, and a reflector is placed on the free end side of the sample. Is attached, and the magnetostriction of the sample is measured by irradiating laser light from the laser Doppler vibrometer toward the reflector (see Non-Patent Document 1).

第2の磁気歪測定方法では、磁界を形成するためのコイルの中に試料となる磁性材料を配置し、試料上の均一磁場領域内に2個の反射体を取付け、それぞれの反射体に向けてレーザードップラー振動計からレーザー光を照射することで、試料の磁気歪を測定する(非特許文献2参照。)。   In the second magnetostriction measurement method, a magnetic material to be a sample is arranged in a coil for forming a magnetic field, two reflectors are attached in a uniform magnetic field region on the sample, and directed to each reflector. Then, the magnetostriction of the sample is measured by irradiating the laser beam from the laser Doppler vibrometer (see Non-Patent Document 2).

IEC/TR 62581 TECHNICAL REPORTIEC / TR 62581 TECHNICICAL REPORT 「磁気ひずみ測定における光学式測定法とストレインゲージ法の比較」MAG−98−65"Comparison of optical measurement method and strain gauge method in magnetostriction measurement" MAG-98-65

ところが、上記第1の磁気歪測定方法では、コイルの両端部に不均一な磁場領域が形成されるために、均一磁場による磁気歪を正確に測定することができず、磁気歪の測定精度が低いものであった。   However, in the first magnetostriction measurement method, since the nonuniform magnetic field regions are formed at both ends of the coil, the magnetostriction due to the uniform magnetic field cannot be accurately measured, and the magnetostriction measurement accuracy is high. It was low.

また、上記第2の磁気歪測定方法では、2個の反射体それぞれに向けてレーザー光を照射して測定を行わなければならず、2点間の変位量を同時に測定することができず、磁気歪の測定精度が低いものであった。   Further, in the second magnetostriction measurement method, measurement must be performed by irradiating each of the two reflectors with laser light, and the displacement amount between the two points cannot be measured simultaneously. The measurement accuracy of magnetostriction was low.

そこで、請求項1に係る本発明では、磁界中に置かれた試料上の均一磁場領域内の第1標点と第2標点との間の変位量を光学的測定手段で測定することで試料の磁気歪を測定する磁気歪測定方法において、コイルで生成される磁界の中央側に形成される磁場が均一となる均一磁場領域内に第1標点と第2標点とを設け、光学的測定手段から放射された光を、第1標点で第2標点へ向けて反射させ、第2標点で第1標点へ向けて反射させ、第1標点で光学的測定手段へと反射させることにした。
Therefore, in the present invention according to claim 1, the amount of displacement between the first and second target points in the uniform magnetic field region on the sample placed in the magnetic field is measured by the optical measuring means. In a magnetostriction measurement method for measuring magnetostriction of a sample, a first target point and a second target point are provided in a uniform magnetic field region in which a magnetic field formed on the center side of a magnetic field generated by a coil is uniform, and optical The light emitted from the target measuring means is reflected at the first target point toward the second target point, reflected at the second target point toward the first target point, and then at the first target point to the optical measuring means. And decided to reflect.

また、請求項2に係る本発明では、前記請求項1に係る本発明において、前記試料に接続したヨークを避けて前記試料の伸延方向に対して斜めに向けて前記光学的測定手段から光を放射することにした。   Further, in the present invention according to claim 2, in the present invention according to claim 1, light is emitted from the optical measuring means in an oblique direction with respect to the extending direction of the sample, avoiding the yoke connected to the sample. I decided to radiate.

また、請求項3に係る本発明では、磁界中に置かれた試料上の均一磁場領域内の第1標点と第2標点との間の変位量を光学的測定手段で測定することで試料の磁気歪を測定する磁気歪測定装置において、コイルで生成される磁界の中央側に形成される磁場が均一となる均一磁場領域内に第1標点と第2標点とを設け、第1標点に第1反射体を設けるとともに、第2標点に第2反射体を設け、光学的測定手段から放射された光が、第1反射体で第2反射体へ向けて反射され、第2反射体で第1反射体へ向けて反射され、第1反射体で光学的測定手段へと反射されるように、前記第1反射体及び第2反射体を配置することにした。 In the present invention according to claim 3, the amount of displacement between the first and second target points in the uniform magnetic field region on the sample placed in the magnetic field is measured by the optical measuring means. In a magnetostriction measuring apparatus for measuring a magnetostriction of a sample, a first target point and a second target point are provided in a uniform magnetic field region in which a magnetic field formed on the center side of a magnetic field generated by a coil is uniform . A first reflector is provided at one reference point, a second reflector is provided at the second reference point, and light emitted from the optical measuring means is reflected toward the second reflector by the first reflector, The first reflector and the second reflector are arranged so as to be reflected toward the first reflector by the second reflector and reflected to the optical measuring means by the first reflector.

また、請求項4に係る本発明では、前記請求項3に係る本発明において、前記光学的測定手段から放射された光が、前記試料に接続したヨークを避けて前記試料の伸延方向に対して斜めに前記第1反射体に入射するように、前記光学的測定手段を配置することにした。   Further, in the present invention according to claim 4, in the present invention according to claim 3, the light emitted from the optical measuring means is directed to the extending direction of the sample while avoiding the yoke connected to the sample. The optical measuring means is arranged so as to enter the first reflector obliquely.

そして、本発明では、以下に記載する効果を奏する。   And in this invention, there exists an effect described below.

すなわち、本発明では、磁界中に置かれた試料上の均一磁場領域内の第1標点と第2標点との間の変位量を光学的測定手段で測定することで試料の磁気歪を測定する磁気歪測定方法(磁気歪測定装置)において、光学的測定手段から放射された光を、第1標点で第2標点へ向けて反射させ、第2標点で第1標点へ向けて反射させ、第1標点で光学的測定手段へと反射させることにしているために、均一磁場領域内の2点間の変位量を同時に測定することができ、試料の磁気歪を精度良く測定することができる。   That is, in the present invention, the magnetostriction of the sample is measured by measuring the amount of displacement between the first and second target points in the uniform magnetic field region on the sample placed in the magnetic field by the optical measuring means. In the magnetostriction measurement method (magnetostriction measurement apparatus) to be measured, the light emitted from the optical measuring means is reflected toward the second target point at the first target point, and then to the first target point at the second target point. Because it reflects to the optical measuring means at the first target point, the displacement between two points in the uniform magnetic field region can be measured at the same time, and the magnetostriction of the sample is accurate. It can be measured well.

特に、試料に接続したヨークを避けて試料の伸延方向に対して斜めに向けて光学的測定手段から光を放射することにした場合には、試料の表裏に複ヨークを接続した状態でも試料の磁気歪を測定することができ、試料の磁気歪をより一層精度良く測定することができる。   In particular, when it is decided to radiate light from the optical measuring means obliquely with respect to the extending direction of the sample while avoiding the yoke connected to the sample, even if the multiple yokes are connected to the front and back of the sample, The magnetostriction can be measured, and the magnetostriction of the sample can be measured with higher accuracy.

本発明に係る磁気歪測定装置を示す側面断面図。1 is a side sectional view showing a magnetostriction measuring apparatus according to the present invention. 同平面断面図。FIG. 本発明に係る磁気歪測定方法を示す説明図。Explanatory drawing which shows the magnetostriction measuring method which concerns on this invention. 本発明に係る磁気歪測定装置を示す平面断面図(a)、側面断面図(b)。The plane sectional view (a) and side sectional view (b) which show the magnetostriction measuring device concerning the present invention.

以下に、本発明に係る磁気歪測定方法及び磁気歪測定装置の具体的な構成について図面を参照しながら説明する。   Hereinafter, specific configurations of a magnetostriction measuring method and a magnetostriction measuring apparatus according to the present invention will be described with reference to the drawings.

図1及び図2に示すように、磁気歪測定装置1は、ケーシング2に中空状のコイルホルダー3を取付けている。   As shown in FIGS. 1 and 2, the magnetostriction measuring apparatus 1 has a hollow coil holder 3 attached to a casing 2.

コイルホルダー3の外周部には、コイル4を巻回している。このコイル4には、所定の磁界を発生させるための回路が接続されている。   A coil 4 is wound around the outer periphery of the coil holder 3. A circuit for generating a predetermined magnetic field is connected to the coil 4.

また、コイルホルダー3の中空部には、測定対象となる試料5を保持した試料ホルダー6を載置している。   A sample holder 6 holding a sample 5 to be measured is placed in the hollow portion of the coil holder 3.

試料5は、矩形板状の磁性材料からなり、試料ホルダー6の中空部にコイル4の伸延方向に沿って伸縮自在に挿入している。   The sample 5 is made of a rectangular plate-like magnetic material, and is inserted into the hollow portion of the sample holder 6 so as to be stretchable along the extending direction of the coil 4.

試料ホルダー6は、上部左側及び上部右側に矩形貫通状の開口7,8を形成している。そして、試料5には、試料ホルダー6の開口7,8を利用して第1反射体9及び第2反射体10を貼着している。なお、試料ホルダー6は、歪ゲージ等を貼着するために更に開口を設けてもよい。   The sample holder 6 has rectangular penetrating openings 7 and 8 formed on the upper left side and the upper right side. Then, the first reflector 9 and the second reflector 10 are attached to the sample 5 using the openings 7 and 8 of the sample holder 6. The sample holder 6 may further be provided with an opening for attaching a strain gauge or the like.

また、磁気歪測定装置1は、ケーシング2にレーザードップラー振動計等の光学的に変位量を測定することができる光学的測定手段11を光の照射方向を調節可能に取付けている。この光学的測定手段11は、光(レーザー光)を照射するとともに反射された光(レーザー光)を受光して変位量を測定するものであり、レーザードップラー振動計では、照射光と反射光のドップラー効果による波長変動から変位量を測定する。   In the magnetostriction measuring apparatus 1, an optical measuring means 11 such as a laser Doppler vibrometer that can optically measure the amount of displacement is attached to the casing 2 so that the direction of light irradiation can be adjusted. This optical measuring means 11 irradiates light (laser light) and receives reflected light (laser light) and measures the amount of displacement. In the laser Doppler vibrometer, the irradiation light and reflected light are measured. The displacement is measured from the wavelength variation due to the Doppler effect.

さらに、磁気歪測定装置1は、試料5の自由端部間に表裏一対のヨーク12,13からなる複ヨーク14を接続できるようにしている。ヨーク12,13を試料5に接続することで、試料5に加わる磁界の分布や試料5の内部の磁束の分布を均一にすることができる。   Further, the magnetostriction measuring apparatus 1 is configured such that a multiple yoke 14 composed of a pair of front and back yokes 12 and 13 can be connected between the free ends of the sample 5. By connecting the yokes 12 and 13 to the sample 5, the distribution of the magnetic field applied to the sample 5 and the distribution of the magnetic flux inside the sample 5 can be made uniform.

次に、上記磁気歪測定装置1を用いて試料5の磁気歪を測定する方法(磁気歪測定方法)について説明する(図3参照。)。   Next, a method (magnetostriction measurement method) for measuring the magnetostriction of the sample 5 using the magnetostriction measurement apparatus 1 will be described (see FIG. 3).

磁気歪測定方法は、コイル4で生成する磁界によって試料5に生じる磁気歪を、光学的測定手段11によって測定する試料5の表面上の2点間の変位量から測定するものである。   In the magnetostriction measuring method, the magnetostriction generated in the sample 5 by the magnetic field generated by the coil 4 is measured from the amount of displacement between two points on the surface of the sample 5 measured by the optical measuring means 11.

ここで、試料5の表面上の2点をそれぞれ第1標点15、第2標点16とし、第1標点15と第2標点16の水平距離をL0とする。第1標点15及び第2標点16は、コイル4で生成される磁界の中央側に形成される磁場が均一となる均一磁場領域内に設ける。 Here, two points on the surface of the sample 5 are defined as a first reference point 15 and a second reference point 16, respectively, and a horizontal distance between the first reference point 15 and the second reference point 16 is L 0 . The first reference point 15 and the second reference point 16 are provided in a uniform magnetic field region where the magnetic field formed on the center side of the magnetic field generated by the coil 4 is uniform.

第1標点15及び第2標点16には、それぞれ反射面を内側に向けて第1反射体9及び第2反射体10が設けられている。   The first and second reflectors 15 and 16 are provided with a first reflector 9 and a second reflector 10, respectively, with the reflecting surfaces facing inward.

光学的測定手段11は、試料5の伸延方向に対してθ/2だけ傾けて斜めに向けて光を第1反射体9へ照射するように配置している。第1反射体9は、反射面を試料5の伸延方向に対して直交させて配置し、光学的測定手段11から試料5の伸延方向に対してθ/2の入射角度で入光する光を第2反射体10へ向けてθ/2の反射角度で反射するようにしている。第2反射体10は、反射面を試料5の伸延方向に対してθ/2だけ傾けて配置し、第1反射体9で反射された光を全て第1反射体9へ向けて反射するようにしている。   The optical measuring means 11 is arranged so as to irradiate the first reflector 9 with light inclined obliquely by θ / 2 with respect to the extending direction of the sample 5. The first reflector 9 has a reflecting surface arranged perpendicular to the extending direction of the sample 5, and receives light incident from the optical measuring means 11 at an incident angle of θ / 2 with respect to the extending direction of the sample 5. The light is reflected toward the second reflector 10 at a reflection angle of θ / 2. The second reflector 10 is arranged such that the reflection surface is inclined by θ / 2 with respect to the extending direction of the sample 5 so that all the light reflected by the first reflector 9 is reflected toward the first reflector 9. I have to.

これにより、光学的測定手段11から放射された光は、第1反射体9の反射面で第2反射体10へ向けて反射され、その後、第2反射体10の反射面で第1反射体9へ向けて反射され、その後、第1反射体9の反射面で光学的測定手段11へと反射される。   Thereby, the light radiated from the optical measuring means 11 is reflected toward the second reflector 10 by the reflecting surface of the first reflector 9, and then the first reflector is reflected by the reflecting surface of the second reflector 10. 9 and then reflected to the optical measuring means 11 on the reflecting surface of the first reflector 9.

なお、試料5の磁気歪を測定する際には、予め治具を用いて試料5の表面上の第1標点15及び第2標点16に第1反射体9及び第2反射体10を貼着しておき、その後、光学的測定手段11の光の照射方向を微調節してから測定を行う。   When the magnetostriction of the sample 5 is measured, the first reflector 9 and the second reflector 10 are placed on the first and second target points 15 and 16 on the surface of the sample 5 using a jig in advance. Then, the measurement is performed after finely adjusting the light irradiation direction of the optical measuring means 11.

光学的測定手段11で測定される第1標点15と第2標点16との間の変位量をΔSとし、第1標点15の水平方向(試料5の伸延方向)の変位量をδ1とし、第2標点16の水平方向(試料5の伸延方向)の変位量をδ2とし、第2標点16の光線方向(試料5の伸延方向に対してθ/2だけ傾いた方向)の変位量をδ3とすると、
ΔS=2・δ1/cos(θ/2)+δ2・cos(θ/2)−δ3
δ3=2・δ1・tan(θ/2)・sin(θ/2)
と表せる。
The displacement amount between the first gauge point 15 and the second gauge point 16 measured by the optical measuring means 11 is ΔS, and the displacement amount of the first gauge point 15 in the horizontal direction (the extending direction of the sample 5) is δ. 1, and the displacement amount in the horizontal direction of the second reference points 16 (extending direction of the sample 5) and [delta] 2, a direction inclined by theta / 2 relative to the extending direction of the light beam direction (sample 5 of the second gauge 16 ) 3 )
ΔS = 2 · δ 1 / cos (θ / 2) + δ 2 · cos (θ / 2) −δ 3
δ 3 = 2 ・ δ 1・ tan (θ / 2) ・ sin (θ / 2)
It can be expressed.

磁気歪によって磁性材料である試料5は、コイル4で生成される磁界の方向(試料5の伸延方向)に沿って均一磁場領域内で一様に伸縮することから、δ=δ1=δ2とすると、
ΔS=2・δ/cos(θ/2)+δ・cos(θ/2)−δ3
δ3=2・δ・tan(θ/2)・sin(θ/2)
となり、
ΔS=2・δ/cos(θ/2)+δ・cos(θ/2)−2・δ・tan(θ/2)・sin(θ/2)
となる。
Since the sample 5 which is a magnetic material due to magnetostriction expands and contracts uniformly in the uniform magnetic field region along the direction of the magnetic field generated by the coil 4 (the extending direction of the sample 5), δ = δ 1 = δ 2 Then,
ΔS = 2 · δ / cos (θ / 2) + δ · cos (θ / 2) −δ 3
δ 3 = 2 ・ δ ・ tan (θ / 2) ・ sin (θ / 2)
And
ΔS = 2 · δ / cos (θ / 2) + δ · cos (θ / 2) -2 · δ · tan (θ / 2) · sin (θ / 2)
It becomes.

これから、
δ=ΔS/(2/cos(θ/2)+cos(θ/2)−2・tan(θ/2)・sin(θ/2))
となる。
from now on,
δ = ΔS / (2 / cos (θ / 2) + cos (θ / 2) −2 · tan (θ / 2) · sin (θ / 2))
It becomes.

ここで求めたい磁気歪は、第1標点15と第2標点16との間の水平方向(試料5の伸延方向)の変位量をΔLとすると、ΔL/L0で表される。 The magnetostriction to be obtained here is represented by ΔL / L 0, where ΔL is the amount of displacement in the horizontal direction (the extending direction of the sample 5) between the first and second target points 15 and 16.

そして、第1標点15と第2標点16との間の水平方向(試料5の伸延方向)の変位量であるΔLは、第1標点15の水平方向(試料5の伸延方向)の変位量δ1と、第2標点16の水平方向(試料5の伸延方向)の変位量δ2との合計であることから、
ΔL=δ1+δ2
であり、
前記同様δ=δ1=δ2とすると、
ΔL=2・δとなり、上記式より
ΔL=2・ΔS/(2/cos(θ/2)+cos(θ/2)−2・tan(θ/2)・sin(θ/2))
となる。
And ΔL, which is the amount of displacement in the horizontal direction (extension direction of the sample 5) between the first reference point 15 and the second reference point 16, is the horizontal direction of the first reference point 15 (extension direction of the sample 5). a displacement [delta] 1 because the sum of the displacement [delta] 2 in the horizontal direction of the second reference points 16 (extending direction of the sample 5),
ΔL = δ 1 + δ 2
And
As before, assuming δ = δ 1 = δ 2 ,
ΔL = 2 · δ. From the above equation, ΔL = 2 · ΔS / (2 / cos (θ / 2) + cos (θ / 2) -2 · tan (θ / 2) · sin (θ / 2))
It becomes.

したがって、磁気歪は、光学的測定手段11で測定される第1標点15と第2標点16との間の変位量ΔSから上記式を用いて算出することができる。   Accordingly, the magnetostriction can be calculated from the displacement ΔS between the first and second target points 15 and 16 measured by the optical measuring means 11 using the above formula.

以上に説明したように、本発明は、磁界中に置かれた試料5の表面上の均一磁場領域内の第1標点15と第2標点16との間の変位量を光学的測定手段11で測定することで試料5の磁気歪を測定する磁気歪測定方法(磁気歪測定装置1)であり、光学的測定手段11から放射された光を、第1標点15において第1反射体9によって第2標点16へ向けて反射させ、第2標点16において第2反射体10によって第1標点15へ向けて反射させ、第1標点15において第1反射体9によって光学的測定手段11へと反射させるように構成している。   As described above, the present invention provides an optical measuring means for measuring the amount of displacement between the first reference point 15 and the second reference point 16 in the uniform magnetic field region on the surface of the sample 5 placed in the magnetic field. 11 is a magnetostriction measuring method (magnetostriction measuring apparatus 1) for measuring the magnetostriction of the sample 5 by measuring at 11, and the light radiated from the optical measuring means 11 is reflected at the first gage 15 at the first reflector. 9 is reflected toward the second point 16, reflected at the second point 16 by the second reflector 10 toward the first point 15, and optically reflected at the first point 15 by the first reflector 9. It is configured to be reflected to the measuring means 11.

そのため、本発明では、光学的測定手段11を用いた測定を1回行うだけで均一磁場領域内の2点間の変位量を同時に測定することができるので、試料5の磁気歪を精度良く測定することができる。   Therefore, in the present invention, the displacement between two points in the uniform magnetic field region can be measured simultaneously by performing the measurement using the optical measuring means 11 only once, so that the magnetostriction of the sample 5 can be accurately measured. can do.

本発明の磁気歪測定方法(磁気歪測定装置1)は、光学的測定手段11から放射された光が、第1反射体9で第2反射体10へ向けて反射され、第2反射体10で第1反射体9へ向けて反射され、第1反射体9で光学的測定手段11へと反射されるように、第1標点15に設けた第1反射体9と第2標点16に設けた第2反射体10とを配置していればよく、図1及び図2に示すように、試料5の伸延方向に対して水平方向に所定の角度(ここでは、θ/2)で斜めに向けて光学的測定手段11から光を照射した場合に限られず、たとえば、図4に示すように、試料5の伸延方向に対して垂直方向に所定の角度で斜めに向けて光学的測定手段11から光を照射してもよい。   In the magnetostriction measuring method (magnetostriction measuring apparatus 1) of the present invention, the light radiated from the optical measuring means 11 is reflected by the first reflector 9 toward the second reflector 10, and the second reflector 10 is reflected. Are reflected toward the first reflector 9 and reflected by the first reflector 9 toward the optical measuring means 11. The first reflector 9 and the second benchmark 16 provided at the first gage 15 2 and the second reflector 10 provided in FIG. 1, and as shown in FIGS. 1 and 2, at a predetermined angle (here, θ / 2) in the horizontal direction with respect to the extending direction of the sample 5. For example, as shown in FIG. 4, the optical measurement is performed obliquely at a predetermined angle in a direction perpendicular to the extending direction of the sample 5. Light may be emitted from the means 11.

また、図1及び図2に示すように、試料5にヨーク12,13を接続した場合には、ヨーク12,13を避けて試料5の伸延方向に対して斜めに向けて光学的測定手段11から光を照射することで、光学的測定手段11から照射した光が複ヨーク14で遮られてしまうのを防止することができる。   As shown in FIGS. 1 and 2, when the yokes 12 and 13 are connected to the sample 5, the optical measuring means 11 is directed obliquely with respect to the extending direction of the sample 5 while avoiding the yokes 12 and 13. It is possible to prevent the light irradiated from the optical measuring means 11 from being blocked by the double yoke 14 by irradiating the light from the light.

以上に説明したように、本発明では、磁界中に置かれた試料5の表面上の均一磁場領域内の第1標点15と第2標点16との間の変位量を光学的測定手段11で測定することで試料5の磁気歪を測定する磁気歪測定方法(磁気歪測定装置1)において、光学的測定手段11から放射された光を、第1標点15で第2標点16へ向けて反射させ、第2標点16で第1標点15へ向けて反射させ、第1標点15で光学的測定手段11へと反射させることにしているために、均一磁場領域内の2点間の変位量を同時に測定することができ、試料5の磁気歪を精度良く測定することができる。   As described above, in the present invention, the amount of displacement between the first reference point 15 and the second reference point 16 in the uniform magnetic field region on the surface of the sample 5 placed in the magnetic field is optically measured. In the magnetostriction measurement method (magnetostriction measuring apparatus 1) for measuring the magnetostriction of the sample 5 by measuring at 11, the light emitted from the optical measuring means 11 is converted into the second reference point 16 at the first reference point 15. In the uniform magnetic field region because it is reflected toward the first target point 15 at the second target point 16 and reflected to the optical measuring means 11 at the first target point 15. The amount of displacement between the two points can be measured simultaneously, and the magnetostriction of the sample 5 can be measured with high accuracy.

また、本発明では、試料5に接続したヨーク12,13を避けて試料5の伸延方向に対して斜めに向けて光学的測定手段11から光を放射することによって、試料5の表裏に複ヨーク14を接続した状態でも試料5の磁気歪を測定することができ、試料5の磁気歪をより一層精度良く測定することができる。   Further, in the present invention, light is emitted from the optical measuring means 11 obliquely with respect to the extending direction of the sample 5 while avoiding the yokes 12 and 13 connected to the sample 5, so Even when 14 is connected, the magnetostriction of the sample 5 can be measured, and the magnetostriction of the sample 5 can be measured with higher accuracy.

1 磁気歪測定装置 2 ケーシング
3 コイルホルダー 4 コイル
5 試料 6 試料ホルダー
7,8 開口 9 第1反射体
10 第2反射体 11 光学的測定手段
12,13 ヨーク 14 複ヨーク
15 第1標点 16 第2標点
DESCRIPTION OF SYMBOLS 1 Magnetostriction measuring apparatus 2 Casing 3 Coil holder 4 Coil 5 Sample 6 Sample holder
7,8 Aperture 9 First reflector
10 Second reflector 11 Optical measuring means
12,13 York 14 Double yoke
15 1st mark 16 2nd mark

Claims (4)

磁界中に置かれた試料上の均一磁場領域内の第1標点と第2標点との間の変位量を光学的測定手段で測定することで試料の磁気歪を測定する磁気歪測定方法において、
コイルで生成される磁界の中央側に形成される磁場が均一となる均一磁場領域内に第1標点と第2標点とを設け、
光学的測定手段から放射された光を、第1標点で第2標点へ向けて反射させ、第2標点で第1標点へ向けて反射させ、第1標点で光学的測定手段へと反射させることを特徴とする磁気歪測定方法。
Magnetostriction measuring method for measuring magnetostriction of sample by measuring displacement amount between first and second target points in uniform magnetic field region on sample placed in magnetic field by optical measuring means In
The first and second target points are provided in a uniform magnetic field region where the magnetic field formed on the center side of the magnetic field generated by the coil is uniform,
The light emitted from the optical measuring means is reflected by the first reference point toward the second reference point, reflected by the second reference point toward the first reference point, and the optical measurement means by the first reference point. A method of measuring magnetostriction, which is reflected to the surface.
前記試料に接続したヨークを避けて前記試料の伸延方向に対して斜めに向けて前記光学的測定手段から光を放射することを特徴とする請求項1に記載の磁気歪測定方法。   2. The magnetostriction measuring method according to claim 1, wherein light is emitted from the optical measuring means obliquely with respect to the extending direction of the sample while avoiding a yoke connected to the sample. 磁界中に置かれた試料上の均一磁場領域内の第1標点と第2標点との間の変位量を光学的測定手段で測定することで試料の磁気歪を測定する磁気歪測定装置において、
コイルで生成される磁界の中央側に形成される磁場が均一となる均一磁場領域内に第1標点と第2標点とを設け、
第1標点に第1反射体を設けるとともに、第2標点に第2反射体を設け、
光学的測定手段から放射された光が、第1反射体で第2反射体へ向けて反射され、第2反射体で第1反射体へ向けて反射され、第1反射体で光学的測定手段へと反射されるように、前記第1反射体及び第2反射体を配置したことを特徴とする磁気歪測定装置。
A magnetostriction measuring apparatus for measuring magnetostriction of a sample by measuring a displacement amount between the first and second target points in a uniform magnetic field region on a sample placed in a magnetic field by an optical measuring means. In
The first and second target points are provided in a uniform magnetic field region where the magnetic field formed on the center side of the magnetic field generated by the coil is uniform,
While providing a 1st reflector in the 1st standard point, providing a 2nd reflector in the 2nd standard point,
Light emitted from the optical measuring means is reflected by the first reflector toward the second reflector, reflected by the second reflector toward the first reflector, and optical measuring means by the first reflector. The magnetostriction measuring apparatus, wherein the first reflector and the second reflector are arranged so as to be reflected toward the surface.
前記光学的測定手段から放射された光が、前記試料に接続したヨークを避けて前記試料の伸延方向に対して斜めに前記第1反射体に入射するように、前記光学的測定手段を配置したことを特徴とする請求項3に記載の磁気歪測定装置。
The optical measurement means is arranged so that light emitted from the optical measurement means is incident on the first reflector obliquely with respect to the extending direction of the sample, avoiding a yoke connected to the sample. The magnetostriction measuring apparatus according to claim 3.
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