JP5534748B2 - 不揮発性半導体記憶装置及びその製造方法 - Google Patents
不揮発性半導体記憶装置及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 121
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 238000003860 storage Methods 0.000 claims description 81
- 239000001301 oxygen Substances 0.000 claims description 35
- 229910052760 oxygen Inorganic materials 0.000 claims description 35
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 34
- 229910052710 silicon Inorganic materials 0.000 claims description 27
- 239000010703 silicon Substances 0.000 claims description 27
- 238000003949 trap density measurement Methods 0.000 claims description 26
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 6
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical group [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 238000005036 potential barrier Methods 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 106
- 230000004888 barrier function Effects 0.000 description 30
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 230000004048 modification Effects 0.000 description 26
- 238000012986 modification Methods 0.000 description 26
- 238000000034 method Methods 0.000 description 24
- 239000000463 material Substances 0.000 description 23
- 230000014759 maintenance of location Effects 0.000 description 22
- 238000005229 chemical vapour deposition Methods 0.000 description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 229910052814 silicon oxide Inorganic materials 0.000 description 18
- 229910052581 Si3N4 Inorganic materials 0.000 description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 17
- 230000006866 deterioration Effects 0.000 description 13
- 230000005684 electric field Effects 0.000 description 13
- 238000000231 atomic layer deposition Methods 0.000 description 12
- 239000000470 constituent Substances 0.000 description 12
- 239000012535 impurity Substances 0.000 description 11
- 238000002955 isolation Methods 0.000 description 11
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 8
- 229910052796 boron Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000005546 reactive sputtering Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- -1 for example Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 240000004050 Pentaglottis sempervirens Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/4234—Gate electrodes for transistors with charge trapping gate insulator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
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Description
(1) 第1の実施形態
(1−1) 基本構造
図1(a)は、MONOS型メモリセルのチャネル長方向の断面図であり、図1(b)は、MONOS型メモリセルのチャネル幅方向の断面図である。
以下、第1の実施形態の変形例について図面を参照しながら説明する。
図5(a)は、第1の実施形態の変形例におけるMONOS型メモリセルのチャネル長方向に沿った断面図であり、素子構造自体は、図1と同じである。
以下、第1の実施形態の変形例について図面を参照しながら説明する。
次に、図7〜図10を用いて、第1の実施形態におけるMONOS型メモリセルトランジスタの製造方法を説明する。
(2−1) 基本構造
図14(a)は、SOI(Silicon on Insulator)技術を適用したディプレッション型−MONOS型メモリセルのチャネル長方向の断面図であり、図14(b)は、図14(a)のメモリセルのチャネル幅方向の断面図である。
以下、第2の実施形態の変形例について図面を参照しながら説明する。
次に、図13〜図17を用いて、第2の実施形態におけるディプレッション型−MONOS型メモリセルの製造方法を説明する。
以下、BiCS(Bit Cost Scalable)技術を適用したメモリ(以下、BiCSメモリ)を例に本発明の第3の実施形態について図面を参照しながら説明する。
図18(a)は、BiCSメモリの1つのメモリセルを示した鳥瞰図である。図18(b)は、図18(a)のメモリセルのA−A線に沿った断面図を示している。ここで、隣接したメモリセルとの間隔は、例えば、50nm程度であるとする。
次に、図19〜図22を用いて、第3の実施形態に係わるBiCSメモリの製造方法を説明する。
本発明のメモリ構造は、NAND型、NOR型のメモリセル双方に適用することが出来る。
本発明によれば、ゲート電極からリークした電子のエネルギーの増加を抑制し、トンネル絶縁膜の絶縁性の劣化を防止できる。
Claims (6)
- 制御ゲート電極とセル間絶縁膜とが交互に積層された積層構造と、
前記積層構造に形成されたホール内に設けられた柱状の半導体層と、
前記ホール内であって前記半導体層の外周表面に形成された第1の絶縁膜と、
前記ホール内であって前記第1の絶縁膜の外周表面に形成された電荷蓄積膜と、
前記ホール内であって前記電荷蓄積膜の外周表面に形成された第2の絶縁膜と、
を具備し、
前記ホールのホール径は、前記ホールの下部よりも上部の方が大きく、
前記電荷蓄積膜及び第2の絶縁膜の少なくとも一方に、散乱によって電子のエネルギーを減少させる非弾性散乱層が少なくとも一層含まれ、
前記非弾性散乱層は、前記ホールの下部に対応する部分よりも前記ホールの上部に対応する部分の方が厚いことを特徴とする不揮発性半導体記憶装置。 - 前記第2の絶縁膜に前記非弾性散乱層が形成されている場合、
前記非弾性散乱層は、シリコンで構成され、窒素、酸素の少なくとも1つを含んでいることを特徴とする請求項1に記載の不揮発性半導体記憶装置。 - 前記非弾性散乱層は、ハフニウムと酸素を含んだハフニウム酸化膜であることを特徴とする請求項1に記載の不揮発性半導体記憶装置。
- 前記非弾性散乱層の電位障壁は、前記制御ゲート電極側と前記半導体層側で異なることを特徴とする請求項1乃至3いずれか1項に記載の不揮発性半導体記憶装置。
- 前記非弾性散乱層のトラップ密度は、前記制御ゲート電極側と前記半導体層側で異なることを特徴とする請求項1乃至3いずれか1項に記載の不揮発性半導体記憶装置。
- 半導体層の表面に制御ゲート電極と第1の絶縁膜が交互に積層された積層膜を形成する工程と
前記積層膜をエッチングして前記半導体層が露出するホールを形成する工程と、
前記ホールの内壁に第2の絶縁膜を形成する工程と、
前記第2の絶縁膜の内壁に電荷蓄積膜を形成する工程と、
前記電荷蓄積膜の内壁に第3の絶縁膜を形成する工程と、
前記第3の絶縁膜の内壁に半導体領域を形成する工程と
を具備し、
前記ホールのホール径は、前記ホールの下部よりも上部の方が大きく、
前記電荷蓄積膜及び第2の絶縁膜を形成する工程の少なくとも一方に、散乱によって電子のエネルギーを減少させる非弾性散乱層を少なくとも一層形成する工程が含まれ、
前記非弾性散乱層は、前記ホールの下部に対応する部分よりも前記ホールの上部に対応する部分の方が厚いことを特徴とする不揮発性半導体記憶装置の製造方法。
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JP2009194542A JP5534748B2 (ja) | 2009-08-25 | 2009-08-25 | 不揮発性半導体記憶装置及びその製造方法 |
US12/855,212 US8759901B2 (en) | 2009-08-25 | 2010-08-12 | Nonvolatile semiconductor memory device including a charge storage layer and semiconductor region in a groove |
KR1020100081947A KR101140479B1 (ko) | 2009-08-25 | 2010-08-24 | 불휘발성 반도체 기억 장치 및 그 제조 방법 |
US14/284,638 US9406811B2 (en) | 2009-08-25 | 2014-05-22 | Nonvolatile semiconductor memory device including a charge storage layer formed on first and second insulating layers |
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JP6045983B2 (ja) * | 2013-01-31 | 2016-12-14 | 株式会社東芝 | 半導体記憶装置 |
JP6334268B2 (ja) * | 2014-05-30 | 2018-05-30 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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CN107533978B (zh) | 2015-06-04 | 2021-01-08 | 东芝存储器株式会社 | 半导体存储装置及其制造方法 |
JP6448503B2 (ja) * | 2015-09-10 | 2019-01-09 | 東芝メモリ株式会社 | 不揮発性半導体記憶装置 |
JP6901972B2 (ja) * | 2015-12-09 | 2021-07-14 | キオクシア株式会社 | 半導体装置及びその製造方法 |
US10032935B2 (en) | 2016-03-16 | 2018-07-24 | Toshiba Memory Corporation | Semiconductor memory device with charge-diffusion-less transistors |
JP2019057540A (ja) | 2017-09-19 | 2019-04-11 | 東芝メモリ株式会社 | 記憶素子 |
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JP2019207950A (ja) | 2018-05-29 | 2019-12-05 | 東芝メモリ株式会社 | 半導体装置およびその製造方法 |
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JP2008078376A (ja) * | 2006-09-21 | 2008-04-03 | Oki Electric Ind Co Ltd | 半導体記憶装置 |
JP2009016615A (ja) * | 2007-07-05 | 2009-01-22 | Toshiba Corp | 半導体記憶装置 |
JP2009054886A (ja) | 2007-08-28 | 2009-03-12 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP4594973B2 (ja) * | 2007-09-26 | 2010-12-08 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2009094237A (ja) * | 2007-10-05 | 2009-04-30 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP2009146942A (ja) | 2007-12-11 | 2009-07-02 | Toshiba Corp | 不揮発性半導体記憶装置 |
US8008707B2 (en) * | 2007-12-14 | 2011-08-30 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device provided with charge storage layer in memory cell |
JP2009152498A (ja) * | 2007-12-21 | 2009-07-09 | Toshiba Corp | 不揮発性半導体メモリ |
JP2009164433A (ja) * | 2008-01-08 | 2009-07-23 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP2009200443A (ja) * | 2008-02-25 | 2009-09-03 | Toshiba Corp | 不揮発性半導体記憶装置、及びその製造方法 |
JP2010021204A (ja) * | 2008-07-08 | 2010-01-28 | Toshiba Corp | 半導体装置及びその製造方法 |
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US8759901B2 (en) | 2014-06-24 |
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US20140252453A1 (en) | 2014-09-11 |
US9406811B2 (en) | 2016-08-02 |
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KR20110021679A (ko) | 2011-03-04 |
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