JP5499021B2 - Substrate transport apparatus and substrate transport method - Google Patents

Description

  The present invention relates to a substrate transfer apparatus and a substrate transfer method for carrying out a substrate stacked and stored in a storage unit, for example, for manufacturing a flat substrate such as a semiconductor wafer.

  In the manufacturing process of a substrate such as a semiconductor wafer, a substrate transporting device is indispensable that includes a storage portion such as a cassette for temporarily stacking and storing the substrates, and for loading and unloading the substrate into and from the storage portion. In general, the substrate is taken into and out of the storage unit by an arm that moves forward and backward in a direction parallel to the substrate.

  For example, the substrate is carried in by inserting the substrate placed or held on the arm into the storage portion according to the movement of the arm. Further, the substrate is placed or held on an arm inserted in the lower portion of the substrate, and the substrate is carried out by pulling out the arm to the outside (see Patent Document 1).

  By the way, support portions made of protrusions or grooves are formed at equal intervals on the inner wall of a general storage portion, and by supporting the edge of the substrate on this support portion, each substrate is spaced at regular intervals. Retained. An example of such a storage unit will be described with reference to FIG. That is, the housing 10 of the storage unit 1 is provided with an opening 10a on the front side thereof. On the left and right inner side surfaces of the housing 10, horizontal plate-like lateral support portions 11 are provided. The horizontal support portion 11 supports the left and right lower surfaces of the substrate S.

  Further, at the left and right corners on the back side of the housing 10, back support portions 12 that are protruding portions are provided. The back support portion 12 supports the bottom surface of the back side of the substrate S. In addition, in order to allow the difference in the height of the board | substrate S inserted in the contact surface with the board | substrate S in the back support part 12, the inclination is provided.

Japanese Patent Laid-Open No. 11-220003

  By the way, in the storage unit as described above, there is a possibility that a phenomenon occurs in which the substrate is held in the form of riding on the back support unit when the substrate is stored. That is, as shown by the dotted line in FIG. 8, if the substrates S are supported so as to come into contact with the front side of the back support portion 12, the substrates S are parallel to each other (see FIG. 7). However, as shown by the solid line in FIG. 8, when the substrate S is supported in contact with a high position on the back side of the back support portion 12, the back side of the substrate S is inclined upward, so Parallelism cannot be maintained (see FIG. 9).

  When such a state (hereinafter referred to as “backing”) occurs, there is a possibility that the removal of the substrate S may fail because the arm cannot hold the substrate S successfully. This depth may occur even when the substrate S is automatically inserted by the arm. However, when inserting the test substrate S, it is necessary for the operator to insert the substrate S by hand, and in that case, there is a high possibility that the back will occur.

  It is not only when the edge portion of the substrate S rides on the back support portion 12 of the storage portion 1 that the backrest occurs. For example, in a cassette or the like in which the back support portion 12 is not provided, a form in which the back side edge portion of the substrate S is hooked on the inner back surface of the cassette or the like and is supported in an inclined state is also conceivable.

  The present invention has been proposed to solve the above-described problems of the prior art, and the purpose thereof is normal even when the substrate in the storage unit is not held in a normal position. It is an object of the present invention to provide a substrate transfer apparatus and a substrate transfer method capable of performing a normal take-out operation after correction to a correct position.

In order to achieve the above object, the present invention includes a storage unit that stores a substrate, a support unit that supports the substrate in the storage unit, a moving unit that unloads the substrate from an opening provided in the storage unit , A substrate transport device having a drive mechanism for driving the moving unit;
A detection unit for detecting an abnormality based on a shift of a substrate support position from a normal position toward a direction opposite to the opening ;
When an abnormality is detected by the detection unit, the moving unit controls the drive mechanism so as to move in a direction away from the substrate while moving the substrate toward the opening and returning the substrate to a normal position. A control device;
It is characterized by having. In addition, this invention can be grasped | ascertained also as invention of a board | substrate conveyance method.

In another aspect, a storage unit that stores a substrate, a support unit that supports the substrate in the storage unit, a moving unit that unloads the substrate from an opening provided in the storage unit, and the moving unit with respect to the substrate A substrate transport apparatus having a driving mechanism for moving in a first direction parallel to and a second direction perpendicular to the substrate;
A detection unit for detecting an abnormality based on a shift of the substrate support position from the normal position toward the direction opposite to the opening ;
When the abnormality is detected by the detection unit, the moving unit moves from the substrate by moving in the second direction after moving the substrate in the first direction to the normal position. A control device for controlling the drive mechanism so as to be separated;
It is characterized by having.

  In the invention as described above, even when an abnormality occurs in the position of the substrate, the detection unit detects this, and the moving unit moves in the direction of correcting the position of the substrate and moves away from the substrate. Since the substrate is repositioned, the substrate returns to a normal position.

In another aspect, the moving portion is provided with a holding portion that holds the substrate supported by the support portion, and the holding portion includes an abutting portion that abuts an edge of the substrate, and the abutting portion. A movable part provided so as to be movable in the direction of contact with and away from the edge of the substrate so that the substrate can be sandwiched between, and the detection unit based on the position of the movable part, The present invention is characterized in that an abnormality in the position of the substrate can be detected.
In the above aspect, since the contact position between the movable part and the substrate varies depending on the position of the substrate, an abnormality in the position of the substrate can be detected easily and reliably.

In another aspect, the control device includes a storage unit that stores a position of a normal substrate, a position of the movable unit that is detected by the detection unit, and a position of a normal substrate that is stored in the storage unit. And a determining unit that determines a moving distance of the moving unit for correcting the position of the substrate.
In the above aspect, since the moving part is moved according to the amount of deviation of the substrate, it can be accurately returned to the normal position.

Another aspect has the 2nd detection part which detects the presence or absence of a board | substrate, and when the said control apparatus detects that there is no board | substrate by the said 2nd detection part, from the said position where there was no board | substrate. The drive mechanism is controlled so as to omit the unloading operation by the moving unit.
In the above-described aspect, when there is no substrate, useless operation can be omitted, and the speed of taking out the substrate can be increased.

In another aspect, the control device controls the drive mechanism so that the moving unit performs an operation of carrying out another substrate when the second detection unit detects that there is no substrate. It is characterized by that.
In the aspect as described above, it is possible to quickly shift to the operation of carrying out another substrate.

  As described above, according to the present invention, even if the substrate in the storage unit is not held at the normal position, the substrate transfer apparatus capable of performing a normal take-out operation after the correction to the normal position. And a substrate transfer method.

It is a top sectional view showing the time of advance of the head in one embodiment of the present invention. FIG. 2 is a cross-sectional plan view illustrating the head when retracting in the embodiment of FIG. 1. It is a functional block diagram which shows the structure of the control apparatus of embodiment of FIG. It is a flowchart which shows the procedure of the process of embodiment of FIG. It is process drawing which shows the operation | movement at the time of the normal of the board | substrate position of embodiment of FIG. It is process drawing which shows the operation | movement at the time of abnormality of the board | substrate position of embodiment of FIG. It is a see-through | perspective inside side view which shows the accommodating part of a cassette. FIG. 8 is an enlarged view showing a back-end state in the storage unit of FIG. 7. It is a see-through | perspective inside side view which shows the backrest state in the accommodating part of FIG.

Next, the best mode for carrying out the present invention (hereinafter referred to as an embodiment) will be specifically described with reference to the drawings.
[Constitution]
First, the configuration of the present embodiment will be described with reference to FIGS. That is, this embodiment has a storage unit 1, a moving unit 2, and a holding unit 3, as shown in FIG. The storage unit 1 is the same as that illustrated in FIG. In addition, let the opening 10a side in the accommodating part 1 be a near side (left side in a figure), and let the opposite side be a back side (right side in a figure). Further, regarding the movement of the arm 21 and the head 33b described below, the movement toward the back side is referred to as “forward”, and the movement toward the near side is referred to as “retreat”.

  The moving unit 2 has a plate-like arm 21 on which the substrate S is placed. The arm 21 can be moved up and down in a direction perpendicular to the substrate S in the storage unit 1 by a drive mechanism 21a (see FIG. 3) and in a direction parallel to the substrate S (left and right in the figure). It is provided to be slidable.

  As the drive mechanism 21a for driving the arm 21 in this way, for example, a mechanism that converts the rotation of the servo motor into a driving force in the vertical and horizontal directions in the figure by a rack and a pinion, Although the thing driven to an up-down direction and a left-right direction etc. can be considered, since all the well-known techniques are applicable, description is abbreviate | omitted.

  The holding unit 3 includes a contact portion 31 provided at an end on the back side of the arm 21 and a movable portion 32 provided on the near side of the arm 21. The contact portion 31 is a pair of protrusions that are fixed to the arm 21 and contact the edge on the back side of the substrate S. The movable part 32 has a pressing part 33 and a driving part 34. The pressing portion 33 is a plunger having a connector 33a and a head 33b provided at the tip thereof. The connector 33a is a rod extending in the left-right direction in the drawing. The head 33b is a pair of columnar members that come in contact with and separate from the front edge of the substrate S as the connector 33a moves.

  The drive unit 34 includes a fixed cylinder 34a, a movable cylinder 34b, and an urging member 34c. The fixed cylinder 34a is fixed to the arm 21 and connected to the pressure reducing means 34d (see FIG. 3, for example, a pump) via a pipe. The movable cylinder 34b has a fixed cylinder 34a inserted therein, and is provided to be slidable in the left-right direction in the drawing with respect to the fixed cylinder 34a. The moving cylinder 34b and the fixed cylinder 34a constitute a vacuum cylinder. The end of the connecting tool 33a is fixed to the tip of the moving cylinder 34b.

  The urging member 34c is provided between the movable cylinder 34b and the fixed cylinder 34a, and urges the movable cylinder 34b to the back side. For example, the urging member 34c may be a compression coil spring, but is not limited thereto. The moving cylinder 34b urged rearward by the urging member 34c is predetermined by a stopper (not shown) or the like provided on the arm 21 even when the head 33b moving in accordance therewith does not contact the substrate S. It is configured to stop at the moving end.

  Further, the arm 21 is provided with a sensor 13 (see FIG. 3). This sensor 13 is a means for detecting whether or not the head 33b moving according to the moving cylinder 34b has exceeded the position when the substrate S is normally held with the contact portion 31, and the deviation of the support position of the substrate S is detected. The detection part which detects abnormality based on this is comprised. If it has such a function, the kind and installation position of the sensor 13 are free. For example, the sensor 13 may be detected by mechanical contact with the moving cylinder 34b, the coupling tool 33a, or the head 33b, or may be detected by non-contact such as laser or infrared rays. Since there is, explanation is omitted. The sensor 13 may detect that the head 33b is in contact with the above-described stopper (not shown) provided on the arm 21.

  As shown in FIG. 3, the arm 21 and the head 33 b perform a predetermined operation when the drive mechanism 21 a, the decompression unit 34 d, and the like are controlled by the control device 100. The control device 100 is configured, for example, by realizing the following functions using a dedicated electronic circuit or a computer that operates with a predetermined program.

  That is, the control device 100 includes a head control unit 110, an arm control unit 120, a determination unit 130, a recovery operation instruction unit 140, a storage unit 150, and the like. The head controller 110 is means for moving the head 33b forward and backward by controlling the pressure reducing means 34d.

  The arm control unit 120 is means for moving the arm 21 by controlling the drive mechanism 21a. The arm control unit 120 includes an elevation instruction unit 121 that positions the arm 21 at a desired height of the substrate S, and an insertion / extraction instruction unit 122 that moves the arm 21 forward and backward.

  The determination unit 130 is a unit that determines an abnormal placement of the substrate S based on a signal from the sensor 13. The recovery operation instruction unit 140 is means for instructing the arm control unit 120 to perform a recovery operation at the time of abnormality by an interruption based on the determination of the determination unit 130. In this recovery operation, after the arm 21 is retracted by the distance from the normal position of the substrate S to the stop position of the head 33b, the arm 21 is once lowered and returned to the normal operation again. That is, the recovery operation instruction unit 140 operates as a determination unit that determines the moving distance of the moving unit (arm 21) for correcting the position of the substrate S in the event of an abnormality.

  The storage unit 150 stores information such as various data and settings. The information stored in the storage unit 150 includes, for example, the operation amounts and operation timings of the arm 21 and the head 33b during normal operation and recovery operation, the normal position of the substrate S (for example, the stop position of the head 33 during normal operation), and the like. However, it is not limited to this. These pieces of information can be set in the storage unit 150 in advance or can be input using the following input device.

  In addition, description will be given for an input device such as a switch, a touch panel, a keyboard, and a mouse for an operator to operate the control device 100, and an output device such as a display, a lamp, and a meter for confirming the state of the control device 100. Omitted.

[Action]
The operation of the present embodiment having the above-described configuration will be described with reference to the flowchart of FIG. 4 and the process diagrams of FIGS. Note that a method for transporting a substrate and a computer program for operating the transport apparatus according to the procedure described below are also one embodiment of the present invention.

[Normal operation]
First, the take-out operation when the substrate S is normally stored in the storage unit 1 will be described with reference to FIGS. That is, at the start of the take-out operation, the head controller 110 operates the decompression means 34d to move the moving cylinder 34b against the biasing member 34c and retract the head 33b (step 401).

  Next, according to the setting stored in advance in the storage unit 150 or the input from the input device, the elevation instruction unit 121 instructs the operation of the drive mechanism 21a to correspond to the lower portion of the target substrate S in the storage unit 1. The arm 21 is positioned at the height (step 402, FIG. 5A).

  Then, the insertion / ejection instruction unit 122 instructs the operation of the drive mechanism 21a to insert the arm 21 below the target substrate S (step 403, FIG. 5B). As a result, the holding unit 3 comes to the lower part of the substrate S. In this state, the raising / lowering instruction part 121 raises the arm 21 by instructing the operation of the drive mechanism 21a (step 404, FIG. 5C).

  Then, since the board | substrate S is lifted by the arm 21, it leaves | separates from the horizontal support part 11 (FIG.5 (D)). In addition, the rectangular dotted line in FIG.5 (D)-(G) shows the board | substrate S at the time of being normally supported by the horizontal support part 11. FIG.

  Next, when the head controller 110 stops the decompression unit 34d, the moving cylinder 34b is moved by the urging force of the urging member 34c, and the head 33b moves forward (step 405). Thereby, the head 33b contacts the substrate S (FIG. 5E). Then, the substrate S is urged and moved by the head 33b, and the substrate S is held between the head 33b and the contact portion 31 (FIG. 5F). At this time, if the substrate S is in a normal position, the head 33b does not advance further, and no abnormality is detected by the sensor 13 (step 406).

  Thereafter, the insertion / extraction instruction section 122 instructs the operation of the drive mechanism 21a to retract the arm 21 and pull out the arm 21 from the storage section 1 (step 409, FIG. 5G). As a result, the substrate S placed on the arm 21 is unloaded from the storage unit 1.

[Operation when an error occurs]
With respect to the normal operation as described above, the operation in the case where “backing” has occurred in the target substrate S will be described with reference to FIGS. 4 and 6. First, the operations from FIGS. 6A to 6D (steps 401 to 404) are the same as the operations from FIGS. 5A to 5D. In addition, the rectangular dotted line in FIGS. 6D to 6H indicates the substrate S when it is normally supported by the lateral support portion 11.

  After that, the head controller 110 stops the decompression unit 34d, and when the head 33b moves forward by the urging force of the urging member 34c (step 405), the head 33b contacts the substrate S (FIG. 6E). At this time, since “backing” has occurred in the substrate S, the contact position of the head 33b with the substrate S exceeds the normal position and is stopped by the stopper (FIG. 6F). . When such an operation of the head 33b is detected by the sensor 13, the determination unit 130 determines that an abnormality has occurred in the position of the substrate S (step 406).

  Then, the recovery operation instruction unit 140 instructs the arm control unit 120 to perform a recovery operation. Thereby, since the insertion / extraction instruction part 122 in the arm control part 120 instructs the operation of the drive mechanism 21a, the arm 21 is the same as the deviation amount (distance b in the figure) from the normal position of the head 33b (the figure b). Medium distance b ′), the vehicle moves backward (step 407, FIG. 6G).

  Subsequently, when the lift instruction unit 121 instructs the operation of the drive mechanism 21a, the arm 21 is lowered and separated from the substrate S (step 408, FIG. 6H). When the substrate S is relatively thick, depending on the angle of inclination, there is a possibility that the substrate S cannot be returned to the normal position unless the arm 21 is further retracted at the stage of FIG. In that case, at the stage of FIG. 6 (H), it is necessary to start the descent from the position where the arm 21 has retracted “the distance formed by the thickness and inclination of the substrate S (indicated by h in the figure)”. However, if the thickness of the substrate S is assumed to be about 2 mm, there is no problem even if such steps are not taken.

  Thereby, since the board | substrate S descend | falls to the horizontal support part 11 with dead weight, the board | substrate S is supported in a normal position (FIG. 6 (I)). Further, the head 33b is moved backward (step 409), is positioned at the same position as step 401, and the arm 21 is moved forward (step 410), and then the processing of steps 404 to 405 described above (FIG. 6C). (E)) is performed again, and if there is still an abnormality, the above recovery operation is performed (steps 407 to 410, FIGS. 6F to 6I). When the abnormality disappears (step 406), the insertion / extraction instruction unit 122 instructs the operation of the drive mechanism 21a to retract the arm 21 and pull out the arm 21 from the storage unit 1 (step 411). As a result, the substrate S placed on the arm 21 is unloaded from the storage unit 1.

[effect]
According to the present embodiment as described above, even if the back-end phenomenon occurs when the substrate S is stored, this can be detected and the arm 21 can automatically perform the recovery operation. Failure to extract S is prevented.

  Further, since the recovery operation is performed by detecting that the head 33b has exceeded the normal position, there is no need to add a special complicated mechanism to the existing substrate transfer apparatus, and the cost is low. Can be configured.

[Other Embodiments]
The present invention is not limited to the embodiment as described above. For example, the storage unit, the lateral support unit, the back support unit, the head, the arm, and the like are free in size, shape, number, etc., as long as they can exhibit the same functions as described above. The number of substrates stored in the storage unit is not limited to a specific number.

  In the above embodiment, the drive mechanism for driving the arm is moved away from the substrate by lowering the arm after the arm is retracted to return the horizontal position of the substrate during the recovery operation. Such return of the substrate by the arm and separation from the substrate may be realized by one operation, for example, by lowering the arm in an oblique direction (front side) by a drive mechanism.

  Moreover, the drive part which drives a movable part is not limited to the thing by said vacuum cylinder and biasing member. Any known technique can be applied as long as the head can be brought into and out of contact with the substrate, such as one using another cylinder or one driven by a motor using a rack and pinion. Further, in the above-described embodiment, the urging member urges the head toward the substrate side, but the urging member urges the head in a direction away from the substrate and resists this at the start of conveyance. It is good also as a structure driven to a direction.

  In the above-described embodiment, the position of the substrate is corrected by moving the arm backward by a distance between the normal stop position of the head and the abnormal stop position of the head. However, it may be configured such that the head is stopped when it comes into contact with the abnormal substrate, and the stop position is detected by a sensor. In this case, the control device includes a determination unit that calculates the distance between the stop position at the time of abnormality and the stop position at the normal time (for example, stored in the storage unit 150 in advance as described above) as the movement distance of the arm. The correct position correction may be performed by providing the arm control unit 120 so as to return the arm by the distance determined by the determination unit.

  In the above embodiment, when the recovery operation is repeated a predetermined number of times, it is also possible to prevent unnecessary repetition by terminating the process. For example, when the determination unit determines that there is an abnormality in the control device, the count unit that counts the number, and the count number by the count unit reaches a predetermined number stored in advance in the storage unit (or a predetermined number) It is conceivable to provide an end instruction unit for ending the processing when the number of times is exceeded. In addition, when an abnormality based on the substrate displacement is detected, an output indicating that the substrate is displaced, such as an error, is output from an output unit such as a display device or a lamp connected to the control device. It is also possible.

  Note that there is a case where the substrate is not present at a specific stage for some reason and cannot be taken out. In that case, the processing can be terminated by repeating the recovery operation a predetermined number of times with the above-described configuration. However, a sensor (second detection unit) that detects the presence or absence of a substrate may be provided, and when this sensor detects that there is no substrate, the control device may be configured to omit the recovery operation. As a result, useless operations can be omitted, and the speed of the substrate removal operation can be increased.

  Then, after the recovery operation is omitted in this way, the process may be shifted to the next process. As the next processing, for example, from the output unit such as a display device or a lamp connected to the control device, an error is reported to notify the operator that there is no substrate, or the control device is It is conceivable to control the drive mechanism so as to take out the substrate (other substrate) at this stage. As a result, a quick response by an operator or the like, a quick transition to another board unloading operation, and the like are possible.

  The type of sensor that detects the presence or absence of a substrate may be any sensor that can detect the presence or absence of a substrate. For example, as in the case of the sensor 13 described above, a sensor that detects by mechanical contact, a sensor that detects by non-contact such as laser or infrared, and the like can be considered, but the present invention is not limited thereto. The installation position of the sensor is also free. For example, it is determined that there is no substrate when a sensor is provided on the head 33b and stopped without touching anything, and it is determined that there is no substrate when a sensor is provided on the arm 21 and the presence of the substrate cannot be detected optically. However, it is not limited to this. Furthermore, the sensor 13 can also be used as a sensor for detecting the presence or absence of a substrate.

  The size, shape, material, etc. of the substrate are also free, and can be applied to everything that will be employed in the future. Therefore, it can be applied not only to a semiconductor wafer but also to any substrate such as a disk substrate for recording medium, a substrate for liquid crystal or organic EL. In other words, the “substrate” described in the claims is not limited to a disk shape or the like, but is a concept that widely includes flat products.

DESCRIPTION OF SYMBOLS 1 ... Storage part 2 ... Moving part 3 ... Holding part 10 ... Housing 10a ... Opening 11 ... Lateral support part 12 ... Back support part 13 ... Sensor 21 ... Arm 31 ... Contact part 32 ... Movable part 33 ... Pressing part 33a ... Connecting tool 33b ... head 34 ... driving unit 34a ... fixed tube 34b ... moving tube 34c ... biasing member 100 ... control device 110 ... head control unit 120 ... arm control unit 121 ... lifting instruction unit 122 ... insertion / extraction instruction unit 130 ... determination Unit 140 ... Recovery operation instruction unit 150 ... Storage unit

Claims (8)

Substrate transport having a storage unit that stores a substrate, a support unit that supports the substrate in the storage unit, a moving unit that carries the substrate out of an opening provided in the storage unit, and a drive mechanism that drives the moving unit In the device
A detection unit for detecting an abnormality based on a shift of a substrate support position from a normal position toward a direction opposite to the opening ;
When an abnormality is detected by the detection unit, the moving unit controls the drive mechanism so as to move in a direction away from the substrate while moving the substrate toward the opening and returning the substrate to a normal position. A control device;
A substrate transfer apparatus comprising: A storage unit that stores the substrate, a support unit that supports the substrate in the storage unit, a moving unit that unloads the substrate from an opening provided in the storage unit, and a first moving unit that is parallel to the substrate. A substrate transport apparatus having a direction and a driving mechanism for moving in a second direction perpendicular to the substrate,
A detection unit for detecting an abnormality based on a shift of the substrate support position from the normal position toward the direction opposite to the opening ;
When the abnormality is detected by the detection unit, the moving unit moves from the substrate by moving in the second direction after moving the substrate in the first direction to the normal position. A control device for controlling the drive mechanism so as to be separated;
A substrate transfer apparatus comprising:   3. The control device according to claim 1, wherein the control device further controls the drive mechanism to perform an operation of unloading the substrate again after moving in a direction away from the substrate or in the second direction. The board | substrate conveyance apparatus of description.   The moving unit is provided with a holding unit that holds the substrate supported by the support unit,
  The holding part is
  A contact portion that contacts the edge of the substrate;
  A movable part provided so as to be movable in the direction of contacting and separating from the edge of the substrate so that the substrate can be sandwiched between the contact part and
Have
  3. The substrate transfer apparatus according to claim 1, wherein the detection unit is provided so as to be able to detect an abnormality in the position of the substrate based on the position of the movable unit.   The controller is
  A storage unit for storing the position of a normal substrate;
  A determining unit that determines a moving distance of the moving unit for correcting the position of the substrate based on the position of the movable unit detected by the detecting unit and the position of the normal substrate stored in the storage unit; ,
The substrate transfer apparatus according to claim 4, further comprising:   A second detector for detecting the presence or absence of the substrate;
  The control device controls the drive mechanism such that when the second detection unit detects that there is no substrate, the operation of carrying out the moving unit from the position where there is no substrate is omitted. The substrate transfer apparatus according to claim 1. The control device controls the drive mechanism so that the moving unit performs an operation of carrying out another substrate when the second detection unit detects that there is no substrate. The substrate transfer apparatus according to claim 6 . In a substrate carrying method in which a substrate supported by a support unit in a storage unit is carried out by a moving unit driven by a drive mechanism from an opening provided in the storage unit .
The detection unit detects the abnormal position of the substrate,
A substrate transporting method , wherein , when an abnormality is detected by a detection unit, the moving unit moves the substrate toward the opening to move the substrate away from the substrate while returning the substrate to a normal position .

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