JP5441840B2 - ３次元形状測定装置 - Google Patents

３次元形状測定装置 Download PDF

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Publication number
JP5441840B2
JP5441840B2 JP2010151199A JP2010151199A JP5441840B2 JP 5441840 B2 JP5441840 B2 JP 5441840B2 JP 2010151199 A JP2010151199 A JP 2010151199A JP 2010151199 A JP2010151199 A JP 2010151199A JP 5441840 B2 JP5441840 B2 JP 5441840B2
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Japan
Prior art keywords
unit
lattice
grating
pattern
transfer
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JP2010151199A
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English (en)
Japanese (ja)
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JP2011013219A (ja
Inventor
▲偵▼ 許
文 榮 全
弘 ▲眠▼ 金
相 圭 尹
鐘 圭 洪
Original Assignee
コー・ヤング・テクノロジー・インコーポレーテッド
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Priority claimed from KR1020090060865A external-priority patent/KR101121982B1/ko
Priority claimed from KR1020100000721A external-priority patent/KR101133653B1/ko
Application filed by コー・ヤング・テクノロジー・インコーポレーテッド filed Critical コー・ヤング・テクノロジー・インコーポレーテッド
Publication of JP2011013219A publication Critical patent/JP2011013219A/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP2010151199A 2009-07-03 2010-07-01 ３次元形状測定装置 Active JP5441840B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020090060865A KR101121982B1 (ko) 2009-07-03 2009-07-03 3차원 형상 측정장치
KR10-2009-0060865 2009-07-03
KR10-2010-0000721 2010-01-06
KR1020100000721A KR101133653B1 (ko) 2010-01-06 2010-01-06 기판 검사장치 및 이를 이용한 기판 검사방법

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012164066A Division JP5887225B2 (ja) 2009-07-03 2012-07-24 ３次元形状測定装置

Publications (2)

Publication Number Publication Date
JP2011013219A JP2011013219A (ja) 2011-01-20
JP5441840B2 true JP5441840B2 (ja) 2014-03-12

Family

ID=43412420

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2010151199A Active JP5441840B2 (ja) 2009-07-03 2010-07-01 ３次元形状測定装置
JP2012164066A Active JP5887225B2 (ja) 2009-07-03 2012-07-24 ３次元形状測定装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012164066A Active JP5887225B2 (ja) 2009-07-03 2012-07-24 ３次元形状測定装置

Country Status (4)

Country Link
US (1) US8754936B2 (de)
JP (2) JP5441840B2 (de)
CN (2) CN101943570B (de)
DE (1) DE102010030833B4 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101311251B1 (ko) * 2010-11-12 2013-09-25 주식회사 고영테크놀러지 검사장치
JP5765651B2 (ja) * 2011-02-01 2015-08-19 Ｊｕｋｉオートメーションシステムズ株式会社 ３次元測定装置
KR101245148B1 (ko) * 2011-03-10 2013-03-19 주식회사 미르기술 영상 선명도가 개선된 비전검사장치
KR101295760B1 (ko) * 2011-03-10 2013-08-13 주식회사 미르기술 다중 격자 무늬를 이용한 비전검사장치
AT511223B1 (de) * 2011-03-18 2013-01-15 A Tron3D Gmbh Vorrichtung zum aufnehmen von bildern von dreidimensionalen objekten
US9402036B2 (en) * 2011-10-17 2016-07-26 Rudolph Technologies, Inc. Scanning operation with concurrent focus and inspection
JP5640025B2 (ja) * 2012-01-27 2014-12-10 Ckd株式会社 三次元計測装置
EP2853855B1 (de) * 2012-05-22 2016-12-07 Koh Young Technology Inc. Höhenmessverfahren für eine vorrichtung zur messung dreidimensionaler formen
TWI460394B (zh) * 2012-07-20 2014-11-11 Test Research Inc 三維影像量測裝置
JP5780659B2 (ja) 2013-06-13 2015-09-16 ヤマハ発動機株式会社 ３次元形状測定装置
JP6195801B2 (ja) * 2014-03-11 2017-09-13 協和界面科学株式会社 観察用光学装置および接触角計
JP6571185B2 (ja) * 2015-06-19 2019-09-04 ヤマハ発動機株式会社 部品実装装置および部品実装方法
JP6846441B2 (ja) * 2016-02-01 2021-03-24 ケーエルエー コーポレイション 物体の表面の光学的三次元トポグラフィ計測システム
CN109387514A (zh) * 2018-10-30 2019-02-26 德星技术（苏州）有限公司 一种过滤网三维检测系统
CN109764817A (zh) * 2019-01-14 2019-05-17 南京信息工程大学 非接触式透镜中心厚测量系统及方法
JP7308689B2 (ja) * 2019-08-06 2023-07-14 株式会社キーエンス 三次元形状測定装置
CN112729165A (zh) * 2020-12-21 2021-04-30 江苏烽禾升智能科技有限公司 一种基于机械视觉的三维扫描系统及测试方法
US20230366823A1 (en) * 2022-04-19 2023-11-16 Velocity Image Processing LLC Auto focus system for inspection of high-density parts

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3619065A (en) * 1967-07-29 1971-11-09 Kenneth Leslie Agnew Verification of three-dimensional shapes by means of contour lines
JPS6026161B2 (ja) 1977-08-17 1985-06-22 新日本製鐵株式会社 電磁超音波による金属管偏肉測定装置
US4564295A (en) * 1983-03-07 1986-01-14 New York Institute Of Technology Apparatus and method for projection moire topography
DE4134546A1 (de) 1991-09-26 1993-04-08 Steinbichler Hans Verfahren und vorrichtung zur bestimmung der absolut-koordinaten eines objektes
DE4318851A1 (de) * 1993-06-07 1994-12-08 Zeiss Carl Jena Gmbh Anordnung und Verfahren zur Erfassung und Vermessung von Oberflächen
JPH0719825A (ja) 1993-06-23 1995-01-20 Sharp Corp 基板検査装置
US5461455A (en) * 1993-08-23 1995-10-24 International Business Machines Corporation Optical system for the projection of patterned light onto the surfaces of three dimensional objects
DE4416108C2 (de) * 1994-05-06 2000-05-11 Fraunhofer Ges Forschung Vorrichtung zum berührungsfreien Vermessen einer Objektoberfläche
JPH11242189A (ja) * 1997-12-25 1999-09-07 Olympus Optical Co Ltd 像形成法、像形成装置
DE19919584A1 (de) * 1999-04-29 2000-11-02 Klaus Koerner Verfahren und Anordnung zur 3D-Aufnahme
JP2002257527A (ja) * 2001-03-02 2002-09-11 Aval Data Corp 三次元計測法および三次元計測装置
JP3936270B2 (ja) * 2002-10-03 2007-06-27 株式会社山武 ３次元計測装置及び３次元計測方法
KR100615576B1 (ko) 2003-02-06 2006-08-25 주식회사 고영테크놀러지 3차원형상 측정장치
US7286246B2 (en) * 2003-03-31 2007-10-23 Mitutoyo Corporation Method and apparatus for non-contact three-dimensional surface measurement
JP4077754B2 (ja) * 2003-04-04 2008-04-23 オリンパス株式会社 ３次元形状測定装置
JP4382430B2 (ja) 2003-09-29 2009-12-16 Ｎｅｃエンジニアリング株式会社 頭部の三次元形状計測システム
JP2005135935A (ja) 2003-10-28 2005-05-26 Nikon Corp シアリング干渉計測装置
JP4335024B2 (ja) * 2004-01-27 2009-09-30 オリンパス株式会社 ３次元形状測定方法及びその装置
JP2005233780A (ja) * 2004-02-19 2005-09-02 Olympus Corp 高さ測定方法及びその装置
WO2005090905A1 (en) * 2004-03-16 2005-09-29 Spiral Scratch Limited Optical profilometer apparatus and method
WO2006044185A2 (en) * 2004-10-13 2006-04-27 Akrometrix, Llc Systems and methods for measuring sample surface flatness of continuously moving samples
US7830528B2 (en) * 2005-12-14 2010-11-09 Koh Young Technology, Inc. 3D image measuring apparatus and method thereof
KR100722245B1 (ko) 2006-03-23 2007-05-29 주식회사 고영테크놀러지 3차원형상 측정장치
KR20080043047A (ko) * 2006-11-13 2008-05-16 주식회사 고영테크놀러지 새도우 모아레를 이용한 3차원형상 측정장치
KR100870930B1 (ko) * 2007-05-08 2008-11-28 주식회사 고영테크놀러지 다방향 영사식 모아레 간섭계 및 이를 이용한 검사방법
KR100839167B1 (ko) * 2007-09-18 2008-06-17 주식회사 엔씨비네트웍스 모아레 무늬 발생기를 적용한 위상천이 영사식 3차원형상측정장치 및 그 방법

Also Published As

Publication number Publication date
JP5887225B2 (ja) 2016-03-16
CN102840840A (zh) 2012-12-26
JP2012255792A (ja) 2012-12-27
US8754936B2 (en) 2014-06-17
CN101943570B (zh) 2014-04-30
DE102010030833B4 (de) 2014-07-03
DE102010030833A1 (de) 2011-04-07
CN101943570A (zh) 2011-01-12
JP2011013219A (ja) 2011-01-20
US20110001818A1 (en) 2011-01-06

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