JP5438039B2 - 透過型電子顕微鏡グリッドの製造方法、及び該透過型電子顕微鏡グリッドに用いられるグラフェンシート−カーボンナノチューブフィルム複合構造体の製造方法 - Google Patents
透過型電子顕微鏡グリッドの製造方法、及び該透過型電子顕微鏡グリッドに用いられるグラフェンシート−カーボンナノチューブフィルム複合構造体の製造方法 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 442
- 229910021389 graphene Inorganic materials 0.000 title claims description 204
- 239000002238 carbon nanotube film Substances 0.000 title claims description 128
- 239000002131 composite material Substances 0.000 title claims description 68
- 230000005540 biological transmission Effects 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000006185 dispersion Substances 0.000 claims description 37
- 238000001035 drying Methods 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000002041 carbon nanotube Substances 0.000 description 96
- 229910021393 carbon nanotube Inorganic materials 0.000 description 96
- 125000000524 functional group Chemical group 0.000 description 29
- 239000003960 organic solvent Substances 0.000 description 21
- 238000005259 measurement Methods 0.000 description 15
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 239000002105 nanoparticle Substances 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000003917 TEM image Methods 0.000 description 7
- 150000001721 carbon Chemical group 0.000 description 7
- 125000004432 carbon atom Chemical group C* 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 239000002079 double walled nanotube Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000002109 single walled nanotube Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- -1 FG-COO-CNT Chemical class 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 125000003172 aldehyde group Chemical group 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002077 nanosphere Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 125000004355 nitrogen functional group Chemical group 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 125000002743 phosphorus functional group Chemical group 0.000 description 1
- VKJKEPKFPUWCAS-UHFFFAOYSA-M potassium chlorate Chemical compound [K+].[O-]Cl(=O)=O VKJKEPKFPUWCAS-UHFFFAOYSA-M 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 125000004354 sulfur functional group Chemical group 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
- Y10T156/108—Flash, trim or excess removal
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Description
110 支持体
112 穿孔
120 グラフェンシート−カーボンナノチューブフィルム複合構造体
122 カーボンナノチューブ構造体
124 グラフェンシート
126 微孔
128 カーボンナノチューブワイヤ
143a カーボンナノチューブフィルム
143b カーボンナノチューブセグメント
145 カーボンナノチューブ
200 測定試料
Claims (3)
- 複数の微孔を有する少なくとも一つのカーボンナノチューブ構造体、及び官能性グラフェンシートの分散溶液を提供する第一ステップと、
前記官能性グラフェンシートの分散溶液で前記カーボンナノチューブ構造体を浸漬させる第二ステップと、
前記分散溶液で浸漬された前記カーボンナノチューブ構造体を乾燥して、前記カーボンナノチューブ構造体と前記官能性グラフェンシートとを複合させて、グラフェンシート−カーボンナノチューブフィルム複合構造体を形成する第三ステップと、
少なくとも一つの穿孔を有する支持体、を提供し、前記グラフェンシート−カーボンナノチューブフィルム複合構造体を前記支持体に被覆し、該グラフェンシート−カーボンナノチューブフィルム複合構造体の一部を前記穿孔の上に懸架させる第四ステップと、
を含むことを特徴とする透過型電子顕微鏡グリッドの製造方法。 - 複数の微孔を有する少なくとも一つのカーボンナノチューブ構造体、及び官能性グラフェンシートの分散溶液を提供する第一ステップと、
前記官能性グラフェンシートの分散溶液で前記カーボンナノチューブ構造体を浸漬させる第二ステップと、
前記分散溶液で浸漬された前記カーボンナノチューブ構造体を乾燥して、前記カーボンナノチューブ構造体と前記官能性グラフェンシートとを複合させて、グラフェンシート−カーボンナノチューブフィルム複合構造体を形成する第三ステップと、
少なくとも一つの穿孔を有する複数の支持体を提供し、前記複数の支持体を間隔をおいて並列させ、前記グラフェンシート−カーボンナノチューブフィルム複合構造体を前記複数の支持体に設置して、隣接する前記支持体の間の隙間に対応して、前記グラフェンシート−カーボンナノチューブフィルム複合構造体をカットする第四ステップと、
を含むことを特徴とする複数の透過型電子顕微鏡グリッドの製造方法。 - 複数の微孔を有する少なくとも一つのカーボンナノチューブ構造体、及び官能性グラフェンシートの分散溶液を提供する第一ステップと、
前記官能性グラフェンシートの分散溶液で前記カーボンナノチューブ構造体を浸漬させる第二ステップと、
前記分散溶液で浸漬された前記カーボンナノチューブ構造体を乾燥して、前記カーボンナノチューブ構造体と前記官能性グラフェンシートとを複合させて、グラフェンシート−カーボンナノチューブフィルム複合構造体を形成する第三ステップと、
を含むことを特徴とするグラフェンシート−カーボンナノチューブフィルム複合構造体の製造方法。
Applications Claiming Priority (2)
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CN2010101264085A CN102194623B (zh) | 2010-03-17 | 2010-03-17 | 透射电镜微栅的制备方法 |
CN201010126408.5 | 2010-03-17 |
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JP2011198750A JP2011198750A (ja) | 2011-10-06 |
JP5438039B2 true JP5438039B2 (ja) | 2014-03-12 |
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US (1) | US8404070B2 (ja) |
JP (1) | JP5438039B2 (ja) |
CN (1) | CN102194623B (ja) |
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CN102194633B (zh) * | 2010-03-17 | 2013-08-28 | 清华大学 | 透射电镜微栅 |
CN101887829B (zh) * | 2010-04-14 | 2013-03-13 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
CN101866803B (zh) * | 2010-04-14 | 2013-03-13 | 北京富纳特创新科技有限公司 | 透射电镜微栅 |
CN102315058B (zh) * | 2010-07-07 | 2013-12-11 | 清华大学 | 透射电镜微栅及其制备方法 |
US20130277573A1 (en) * | 2011-01-07 | 2013-10-24 | Dune Sciences, Inc. | Functionalized carbon membranes |
KR101335683B1 (ko) * | 2011-10-06 | 2013-12-03 | 한국전기연구원 | 2차원 나노소재에 의해 전도성이 향상된 1차원 전도성 나노소재기반 전도성 필름 |
KR101370680B1 (ko) * | 2011-11-30 | 2014-03-06 | 동의대학교 산학협력단 | 그래핀-탄소나노튜브 복합 재료의 제조 방법 |
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US20140179512A1 (en) * | 2012-12-20 | 2014-06-26 | Sunpower Technologies Llc | Photocatalyst for the production of hydrogen |
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CN107564910B (zh) * | 2016-07-01 | 2020-08-11 | 清华大学 | 半导体器件 |
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JP2011198750A (ja) | 2011-10-06 |
US8404070B2 (en) | 2013-03-26 |
US20110226413A1 (en) | 2011-09-22 |
CN102194623B (zh) | 2013-11-20 |
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