JP5401714B2 - Prevention method of tin whisker by electroless plating - Google Patents
Prevention method of tin whisker by electroless plating Download PDFInfo
- Publication number
- JP5401714B2 JP5401714B2 JP2007336812A JP2007336812A JP5401714B2 JP 5401714 B2 JP5401714 B2 JP 5401714B2 JP 2007336812 A JP2007336812 A JP 2007336812A JP 2007336812 A JP2007336812 A JP 2007336812A JP 5401714 B2 JP5401714 B2 JP 5401714B2
- Authority
- JP
- Japan
- Prior art keywords
- tin
- film
- silver
- acid
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims description 162
- 238000007772 electroless plating Methods 0.000 title claims description 25
- 238000000034 method Methods 0.000 title claims description 22
- 230000002265 prevention Effects 0.000 title description 24
- 238000007747 plating Methods 0.000 claims description 224
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 126
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 claims description 120
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 94
- 229910052709 silver Inorganic materials 0.000 claims description 94
- 239000004332 silver Substances 0.000 claims description 94
- 239000000203 mixture Substances 0.000 claims description 36
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 269
- 239000010410 layer Substances 0.000 description 175
- 239000002585 base Substances 0.000 description 57
- -1 alkane sulfonic acid Chemical class 0.000 description 54
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 54
- 230000015572 biosynthetic process Effects 0.000 description 42
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 38
- SUMDYPCJJOFFON-UHFFFAOYSA-N isethionic acid Chemical compound OCCS(O)(=O)=O SUMDYPCJJOFFON-UHFFFAOYSA-N 0.000 description 29
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 27
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 26
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 20
- 229940098779 methanesulfonic acid Drugs 0.000 description 19
- JALQQBGHJJURDQ-UHFFFAOYSA-L bis(methylsulfonyloxy)tin Chemical compound [Sn+2].CS([O-])(=O)=O.CS([O-])(=O)=O JALQQBGHJJURDQ-UHFFFAOYSA-L 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
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- 238000007654 immersion Methods 0.000 description 14
- 229920002114 octoxynol-9 Polymers 0.000 description 14
- 150000003839 salts Chemical class 0.000 description 14
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- 229910000679 solder Inorganic materials 0.000 description 10
- WHOZNOZYMBRCBL-OUKQBFOZSA-N (2E)-2-Tetradecenal Chemical compound CCCCCCCCCCC\C=C\C=O WHOZNOZYMBRCBL-OUKQBFOZSA-N 0.000 description 8
- 229910052797 bismuth Inorganic materials 0.000 description 8
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 8
- 229940044654 phenolsulfonic acid Drugs 0.000 description 8
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 7
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 7
- KWIUHFFTVRNATP-UHFFFAOYSA-O N,N,N-trimethylglycinium Chemical compound C[N+](C)(C)CC(O)=O KWIUHFFTVRNATP-UHFFFAOYSA-O 0.000 description 7
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 7
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 7
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- 230000000694 effects Effects 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 125000000217 alkyl group Chemical group 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 229910001128 Sn alloy Inorganic materials 0.000 description 5
- URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 description 4
- TXPKUUXHNFRBPS-UHFFFAOYSA-N 3-(2-carboxyethylamino)propanoic acid Chemical compound OC(=O)CCNCCC(O)=O TXPKUUXHNFRBPS-UHFFFAOYSA-N 0.000 description 4
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 4
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical class NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 4
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 4
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 4
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- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- 239000008139 complexing agent Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 4
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 4
- 229960003330 pentetic acid Drugs 0.000 description 4
- KIDHWZJUCRJVML-UHFFFAOYSA-N putrescine Chemical compound NCCCCN KIDHWZJUCRJVML-UHFFFAOYSA-N 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000011734 sodium Chemical class 0.000 description 4
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 4
- 150000003585 thioureas Chemical class 0.000 description 4
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical class OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 3
- DIZBQMTZXOUFTD-UHFFFAOYSA-N 2-(furan-2-yl)-3h-benzimidazole-5-carboxylic acid Chemical compound N1C2=CC(C(=O)O)=CC=C2N=C1C1=CC=CO1 DIZBQMTZXOUFTD-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical class C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- 150000004996 alkyl benzenes Chemical class 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 239000003093 cationic surfactant Substances 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 150000003568 thioethers Chemical class 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- FFYRIXSGFSWFAQ-UHFFFAOYSA-N 1-dodecylpyridin-1-ium Chemical class CCCCCCCCCCCC[N+]1=CC=CC=C1 FFYRIXSGFSWFAQ-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- KJWMCPYEODZESQ-UHFFFAOYSA-N 4-Dodecylphenol Chemical compound CCCCCCCCCCCCC1=CC=C(O)C=C1 KJWMCPYEODZESQ-UHFFFAOYSA-N 0.000 description 2
- 229930185605 Bisphenol Natural products 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 2
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- FLVIGYVXZHLUHP-UHFFFAOYSA-N N,N'-diethylthiourea Chemical compound CCNC(=S)NCC FLVIGYVXZHLUHP-UHFFFAOYSA-N 0.000 description 2
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- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 2
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- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 description 1
- 235000018417 cysteine Nutrition 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 150000004985 diamines Chemical class 0.000 description 1
- ZUVOYUDQAUHLLG-OLXYHTOASA-L disilver;(2r,3r)-2,3-dihydroxybutanedioate Chemical compound [Ag+].[Ag+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O ZUVOYUDQAUHLLG-OLXYHTOASA-L 0.000 description 1
- 229960000735 docosanol Drugs 0.000 description 1
- WRZXKWFJEFFURH-UHFFFAOYSA-N dodecaethylene glycol Chemical compound OCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO WRZXKWFJEFFURH-UHFFFAOYSA-N 0.000 description 1
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 1
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- BPSQMWSZGQGXHF-UHFFFAOYSA-N dodecyl-ethyl-dimethylazanium Chemical class CCCCCCCCCCCC[N+](C)(C)CC BPSQMWSZGQGXHF-UHFFFAOYSA-N 0.000 description 1
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 1
- HBRNMIYLJIXXEE-UHFFFAOYSA-N dodecylazanium;acetate Chemical compound CC(O)=O.CCCCCCCCCCCCN HBRNMIYLJIXXEE-UHFFFAOYSA-N 0.000 description 1
- VICYBMUVWHJEFT-UHFFFAOYSA-N dodecyltrimethylammonium ion Chemical class CCCCCCCCCCCC[N+](C)(C)C VICYBMUVWHJEFT-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- WUUOYCPDGWDPRO-UHFFFAOYSA-N ethyl-dimethyl-octadecylazanium Chemical class CCCCCCCCCCCCCCCCCC[N+](C)(C)CC WUUOYCPDGWDPRO-UHFFFAOYSA-N 0.000 description 1
- 229950006191 gluconic acid Drugs 0.000 description 1
- 235000013922 glutamic acid Nutrition 0.000 description 1
- 239000004220 glutamic acid Substances 0.000 description 1
- 235000013905 glycine and its sodium salt Nutrition 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- FYAQQULBLMNGAH-UHFFFAOYSA-N hexane-1-sulfonic acid Chemical compound CCCCCCS(O)(=O)=O FYAQQULBLMNGAH-UHFFFAOYSA-N 0.000 description 1
- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine monohydrate Substances O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 description 1
- BRWIZMBXBAOCCF-UHFFFAOYSA-N hydrazinecarbothioamide Chemical compound NNC(N)=S BRWIZMBXBAOCCF-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 1
- LSHROXHEILXKHM-UHFFFAOYSA-N n'-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCN LSHROXHEILXKHM-UHFFFAOYSA-N 0.000 description 1
- AQGNVWRYTKPRMR-UHFFFAOYSA-N n'-[2-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCNCCN AQGNVWRYTKPRMR-UHFFFAOYSA-N 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- OVLGNUHSJCCFPG-UHFFFAOYSA-N nonoxybenzene;sulfuric acid Chemical compound OS(O)(=O)=O.CCCCCCCCCOC1=CC=CC=C1 OVLGNUHSJCCFPG-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229940055577 oleyl alcohol Drugs 0.000 description 1
- XMLQWXUVTXCDDL-UHFFFAOYSA-N oleyl alcohol Natural products CCCCCCC=CCCCCCCCCCCO XMLQWXUVTXCDDL-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 229960003104 ornithine Drugs 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- RJQRCOMHVBLQIH-UHFFFAOYSA-M pentane-1-sulfonate Chemical compound CCCCCS([O-])(=O)=O RJQRCOMHVBLQIH-UHFFFAOYSA-M 0.000 description 1
- 229940044652 phenolsulfonate Drugs 0.000 description 1
- HKOOXMFOFWEVGF-UHFFFAOYSA-N phenylhydrazine Chemical compound NNC1=CC=CC=C1 HKOOXMFOFWEVGF-UHFFFAOYSA-N 0.000 description 1
- 229940067157 phenylhydrazine Drugs 0.000 description 1
- 229920001515 polyalkylene glycol Chemical class 0.000 description 1
- 229920000137 polyphosphoric acid Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Chemical class 0.000 description 1
- WSHYKIAQCMIPTB-UHFFFAOYSA-M potassium;2-oxo-3-(3-oxo-1-phenylbutyl)chromen-4-olate Chemical compound [K+].[O-]C=1C2=CC=CC=C2OC(=O)C=1C(CC(=O)C)C1=CC=CC=C1 WSHYKIAQCMIPTB-UHFFFAOYSA-M 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 1
- HNDXKIMMSFCCFW-UHFFFAOYSA-N propane-2-sulphonic acid Chemical compound CC(C)S(O)(=O)=O HNDXKIMMSFCCFW-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- AOHJOMMDDJHIJH-UHFFFAOYSA-N propylenediamine Chemical compound CC(N)CN AOHJOMMDDJHIJH-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 229910001958 silver carbonate Inorganic materials 0.000 description 1
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
- 229940071575 silver citrate Drugs 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- XNGYKPINNDWGGF-UHFFFAOYSA-L silver oxalate Chemical compound [Ag+].[Ag+].[O-]C(=O)C([O-])=O XNGYKPINNDWGGF-UHFFFAOYSA-L 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 1
- 229910000367 silver sulfate Inorganic materials 0.000 description 1
- WYCFMBAHFPUBDS-UHFFFAOYSA-L silver sulfite Chemical compound [Ag+].[Ag+].[O-]S([O-])=O WYCFMBAHFPUBDS-UHFFFAOYSA-L 0.000 description 1
- NEMJXQHXQWLYDM-JJKGCWMISA-M silver;(2r,3s,4r,5r)-2,3,4,5,6-pentahydroxyhexanoate Chemical compound [Ag+].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O NEMJXQHXQWLYDM-JJKGCWMISA-M 0.000 description 1
- GURNTNKIRDSILY-UHFFFAOYSA-M silver;ethanesulfonate Chemical compound [Ag+].CCS([O-])(=O)=O GURNTNKIRDSILY-UHFFFAOYSA-M 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- KZOJQMWTKJDSQJ-UHFFFAOYSA-M sodium;2,3-dibutylnaphthalene-1-sulfonate Chemical compound [Na+].C1=CC=C2C(S([O-])(=O)=O)=C(CCCC)C(CCCC)=CC2=C1 KZOJQMWTKJDSQJ-UHFFFAOYSA-M 0.000 description 1
- WUWHFEHKUQVYLF-UHFFFAOYSA-M sodium;2-aminoacetate Chemical compound [Na+].NCC([O-])=O WUWHFEHKUQVYLF-UHFFFAOYSA-M 0.000 description 1
- MWZFQMUXPSUDJQ-KVVVOXFISA-M sodium;[(z)-octadec-9-enyl] sulfate Chemical compound [Na+].CCCCCCCC\C=C/CCCCCCCCOS([O-])(=O)=O MWZFQMUXPSUDJQ-KVVVOXFISA-M 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229940035044 sorbitan monolaurate Drugs 0.000 description 1
- 235000011071 sorbitan monopalmitate Nutrition 0.000 description 1
- 229940031953 sorbitan monopalmitate Drugs 0.000 description 1
- 239000001570 sorbitan monopalmitate Substances 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- PXQLVRUNWNTZOS-UHFFFAOYSA-N sulfanyl Chemical class [SH] PXQLVRUNWNTZOS-UHFFFAOYSA-N 0.000 description 1
- 230000019635 sulfation Effects 0.000 description 1
- 238000005670 sulfation reaction Methods 0.000 description 1
- 229940117986 sulfobetaine Drugs 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 description 1
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- UVZICZIVKIMRNE-UHFFFAOYSA-N thiodiacetic acid Chemical compound OC(=O)CSCC(O)=O UVZICZIVKIMRNE-UHFFFAOYSA-N 0.000 description 1
- YODZTKMDCQEPHD-UHFFFAOYSA-N thiodiglycol Chemical compound OCCSCCO YODZTKMDCQEPHD-UHFFFAOYSA-N 0.000 description 1
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- 229910000597 tin-copper alloy Inorganic materials 0.000 description 1
- PDSVZUAJOIQXRK-UHFFFAOYSA-N trimethyl(octadecyl)azanium Chemical class CCCCCCCCCCCCCCCCCC[N+](C)(C)C PDSVZUAJOIQXRK-UHFFFAOYSA-N 0.000 description 1
- UNXRWKVEANCORM-UHFFFAOYSA-N triphosphoric acid Chemical compound OP(O)(=O)OP(O)(=O)OP(O)(O)=O UNXRWKVEANCORM-UHFFFAOYSA-N 0.000 description 1
- QUTYHQJYVDNJJA-UHFFFAOYSA-K trisilver;2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Ag+].[Ag+].[Ag+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QUTYHQJYVDNJJA-UHFFFAOYSA-K 0.000 description 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/48—Coating with alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
- C22C13/02—Alloys based on tin with antimony or bismuth as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/06—Alloys based on silver
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1689—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
Description
本発明は無電解メッキによるスズホイスカーの防止方法に関して、スズメッキ面にピンホールを発生させることなく、簡便にスズホイスカーを防止できる方法を提供する。 The present invention relates to a method for preventing tin whiskers by electroless plating, and provides a method that can easily prevent tin whiskers without generating pinholes on the tin plating surface.
スズメッキ皮膜はハンダ付け性向上やエッチングレジストなどの用途で、弱電工業並びに電子工業の部品などに汎用されているが、スズホイスカーが発生し易いことは周知である。スズホイスカーは短絡の原因となり、プリント基板やフィルムキャリアなどの各種電子部品の信頼性を低下させるため、最近の配線パターンの高密度化、微細化が進む現状では、特にこのホイスカーの防止が強く要請されている。
スズホイスカーの防止方法としては、メッキ後にアニール処理やリフロー処理を行う方法、スズ系層に鉛やビスマスなどの異種金属を少量含有させる方法、或は特定の異種金属の下地層を形成した上にスズ皮膜を被覆する方法などがある。
そこで、スズホイスカーの防止に関する従来技術を挙げると、次の通りである。
Tin plating films are widely used in parts such as weak electrical industry and electronic industry for purposes such as improving solderability and etching resists, but it is well known that tin whiskers are likely to occur. Tin whiskers cause a short circuit and reduce the reliability of various electronic components such as printed circuit boards and film carriers. Therefore, in recent circumstances where the density and miniaturization of wiring patterns are progressing, this whisker is strongly demanded. Has been.
Methods for preventing tin whiskers include annealing and reflow treatment after plating, adding a small amount of dissimilar metals such as lead and bismuth to the tin-based layer, or forming a base layer of a specific dissimilar metal There is a method of coating a tin film.
Therefore, conventional techniques related to tin whisker prevention are as follows.
本出願人は、先に、特許文献1で、簡便な操作でホイスカーを防止するために、銀、ビスマスなどから選ばれた単一金属の下地薄膜を浸漬処理で形成し、この下地薄膜の上にスズ又はスズ合金メッキ皮膜(上層)を形成してホイスカーを防止することを開示した(請求項1)。
また、同様に、特許文献2で、フィルムキャリアーなどの微細パターン上に銀、ビスマスなどから選ばれた単一金属の下地皮膜を置換メッキで形成し、下地皮膜を加熱した後に、スズ皮膜(上層)を置換メッキで形成して、ホイスカーを防止することを開示した(請求項1)。
In order to prevent whisker by simple operation, the present applicant previously formed a single metal base thin film selected from silver, bismuth, etc. by immersion treatment in Patent Document 1, It was disclosed that a whisker is prevented by forming a tin or tin alloy plating film (upper layer).
Similarly, in Patent Document 2, a single metal base film selected from silver, bismuth and the like is formed on a fine pattern such as a film carrier by displacement plating, and after heating the base film, a tin film (upper layer) ) Is formed by displacement plating to prevent whiskers (Claim 1).
特許文献3には、ハンダ濡れ性を確保しながら、ホイスカーを防止する目的で(段落12、84)、基材の上に、金属Xと金属Yが混在したメッキA層(下地)/金属XのコーティングB層(上層)を形成した電子部品材料(金属Xは錫であり、金属Yは銀、ビスマス、銅等である)が開示されている(請求項1)。
上記コーティングB層(上層)の膜厚は0.05〜1.0μmであり(請求項4、段落38)、1.0μm以上ではホイスカー発生の恐れがあること(段落38)、また、上記メッキA層(下地)の厚みは1〜50μmが可能であることが記載されている(段落39)。この場合、メッキA層(下地)の厚みとコーティングB層(上層)の厚みとの関係では、メッキA層(下地)をコーティングB層(上層)よりかなり厚く形成することが説明されている(段落40)。
In Patent Document 3, for the purpose of preventing whisker while ensuring solder wettability (paragraphs 12 and 84), a plating A layer (base) / metal X in which metal X and metal Y are mixed on a base material is disclosed. An electronic component material (metal X is tin and metal Y is silver, bismuth, copper, etc.) having a coating B layer (upper layer) is disclosed (claim 1).
The film thickness of the coating B layer (upper layer) is 0.05 to 1.0 μm (Claim 4, Paragraph 38), and whisker may be generated at a thickness of 1.0 μm or more (Paragraph 38). It is described that the thickness of the A layer (base) can be 1 to 50 μm (paragraph 39). In this case, the relationship between the thickness of the plating A layer (base) and the thickness of the coating B layer (upper layer) describes that the plating A layer (base) is formed to be considerably thicker than the coating B layer (upper layer) ( Paragraph 40).
特許文献4には、溶融処理などの煩雑な工程を経ることなく、ホイスカーを防止する目的で(段落1、6、8)、銀、ビスマスなどの金属5重量%以下でスズが95重量%以上のスズ合金の下地皮膜の上に、スズ又はスズ合金の上層皮膜を形成する方法が開示されている(請求項1)。
上記下地皮膜の膜厚は0.1〜20μm、上層皮膜の膜厚は0.025〜5μmであって(請求項2)、この2層構造のスズ系皮膜にあっては、上層は非常に薄くて良く(段落12)、上層厚みは下地の50%以下が好ましく、25%以下がより好ましい(段落20)ことが記載されている。
In Patent Document 4, for the purpose of preventing whiskers without going through complicated steps such as melting treatment (paragraphs 1, 6, and 8), 5 wt% or less of metal such as silver or bismuth and 95 wt% or more of tin A method of forming an upper layer film of tin or a tin alloy on an undercoat film of the tin alloy is disclosed (claim 1).
The film thickness of the base film is 0.1 to 20 μm, and the film thickness of the upper film is 0.025 to 5 μm (Claim 2). In this two-layered tin-based film, the upper layer is very It may be thin (paragraph 12), and the upper layer thickness is preferably 50% or less of the underlayer, more preferably 25% or less (paragraph 20).
特許文献5には、ハンダ付け性を向上する目的で(段落1、7、41)、銀又は銀合金(中間層)/スズ又はスズ合金(表面層)/ビスマス又はインジウムを含むスズ合金(最表層部)からなる金属被覆材が開示されている(請求項1)。
上記銀合金(中間層)はスズ−銀合金を含み(段落14)、中間層の厚みは0.05〜10μm、表層層の厚みはリフロー処理との関係で0.05〜20μmである(段落13、18)ことが記載されている。
In Patent Document 5, for the purpose of improving solderability (paragraphs 1, 7, and 41), silver or silver alloy (intermediate layer) / tin or tin alloy (surface layer) / tin alloy containing bismuth or indium (the most A metal coating material comprising a surface layer portion is disclosed (claim 1).
The silver alloy (intermediate layer) contains a tin-silver alloy (paragraph 14), the intermediate layer has a thickness of 0.05 to 10 μm, and the surface layer has a thickness of 0.05 to 20 μm in relation to the reflow treatment (paragraph). 13, 18).
上記特許文献1〜2は銀、ビスマスなどの単一金属の下地皮膜を形成し、この下地皮膜の上にスズ皮膜を形成するものであるが、例えば、銀の下地層の上に無電解メッキによりスズ皮膜を形成すると、この上層のスズ皮膜にピンホールが発生し、ハンダ濡れ性や接合強度が低下するなどの弊害がある。
また、特許文献4の実施例1〜2は、純スズ皮膜(3μm)の下地層の上にごく薄いスズ−コバルト合金皮膜(上層;1.25μm)を形成したものであり、この上層は純スズ皮膜ではないため、ホイスカー防止に有効である反面、ハンダ濡れ性などが純スズ層に劣る問題が残る。
さらに、特許文献3の実施例1〜2では、スズ−銅合金のメッキA層(3.21μm)を下地として、スズコーティングB層(上層;0.5μm)を形成したものであり(段落58)、基本的に下地層をより厚く、スズ皮膜(上層)をより薄く形成するため、無電解メッキにより下地と上層を形成する場合には、コストと時間を要する。
The above Patent Documents 1 and 2 form a single metal base film such as silver or bismuth and form a tin film on the base film. For example, electroless plating is performed on a silver base layer. When a tin film is formed by this, pinholes are generated in the upper tin film, and there are problems such as reduced solder wettability and bonding strength.
In Examples 1 and 2 of Patent Document 4, a very thin tin-cobalt alloy film (upper layer; 1.25 μm) is formed on an underlayer of a pure tin film (3 μm). Since it is not a tin film, it is effective for whisker prevention, but the problem that solder wettability is inferior to that of a pure tin layer remains.
Furthermore, in Examples 1 and 2 of Patent Document 3, a tin coating B layer (upper layer: 0.5 μm) is formed using a tin-copper alloy plating A layer (3.21 μm) as a base (paragraph 58). ) Basically, since the underlayer is made thicker and the tin film (upper layer) is made thinner, it takes cost and time to form the underlayer and the upper layer by electroless plating.
本発明は、下地層の上にスズ皮膜を形成する2層メッキ方式において、当該スズ皮膜にピンホールを発生させることなく、簡便にスズホイスカーの発生を防止することを技術的課題とする。 An object of the present invention is to easily prevent the generation of tin whiskers without generating pinholes in the tin coating in a two-layer plating method in which a tin coating is formed on an underlayer.
本発明者らは下地層として、上記従来技術のような銀皮膜ではなく、スズ−銀合金皮膜を薄く形成し、そして、その上層に純粋なスズ皮膜を下地に比して厚く形成し、下地皮膜の銀の含有量を多めの適正範囲に特定化すると、ピンホールを上層のスズ皮膜に発生させることなくハンダ濡れ性や接合強度を良好に確保しながら、簡便にスズホイスカーの発生を防止でき、特に、下地皮膜は0.5μm以下にごく薄く形成しても、また、下地層での銀の比率はごく少なくても、充分にホイスカーを防止できるとの知見を得た。
そして、この知見に基づいて、下地皮膜の膜厚と、下地及び上層の合計皮膜の膜厚とを特定化し、且つ、下地のスズ−銀合金皮膜における銀の組成を特定化すると、上層のスズ皮膜のスズホイスカーとピンホールを有効に防止できること、また、下地及び上層の皮膜全体での銀の組成を適正化し、或は、下地/上層の膜厚比率を適正化すると、ホイスカー防止効果をより向上できることを見い出し、本発明を完成した。
The present inventors formed a thin tin-silver alloy film instead of the silver film as in the above prior art as the underlayer, and formed a pure tin film on the upper layer thicker than the underlayer, If the silver content of the film is specified within a large appropriate range, it is possible to easily prevent the occurrence of tin whiskers while ensuring good solder wettability and bonding strength without generating pinholes in the upper tin film. In particular, the inventors have found that whisker can be sufficiently prevented even if the undercoat is formed very thin to 0.5 μm or less, and even if the silver ratio in the underlayer is very small.
And based on this knowledge, when the film thickness of the undercoat and the total film thickness of the undercoat and the upper layer are specified, and the composition of silver in the underlayer tin-silver alloy film is specified, the upper tin layer It can effectively prevent tin whisker and pinholes in the film, and by optimizing the composition of the silver in the entire underlayer and upper layer, or by optimizing the film thickness ratio of the underlayer / upper layer, the whisker prevention effect can be improved. The present invention has been completed by finding that it can be improved.
即ち、本発明1は、被メッキ物に無電解スズ−銀合金メッキ皮膜よりなる下地皮膜を形成した後、
当該下地皮膜の上に無電解スズメッキ皮膜(上層皮膜)を形成するスズホイスカーの防止方法であって、
下地皮膜の膜厚が0.025〜0.5μmであり、且つ、下地と上層皮膜の合計膜厚が0.1〜6μmであり、
下地の合金皮膜中の銀の組成比率が5〜90重量%であり、
上記被メッキ物が銅張り積層基板、チップ・オン・フィルム(COF)又はTABのフィルムキャリアであることを特徴とする無電解メッキによるスズホイスカーの防止方法である。
That is, the present invention 1 is to form an undercoat made of an electroless tin-silver alloy plating film on an object to be plated,
A method for preventing a tin whisker that forms an electroless tin plating film (upper layer film) on the base film,
The film thickness of the base film is 0.025 to 0.5 μm, and the total film thickness of the base film and the upper film is 0.1 to 6 μm,
The composition ratio of silver in the underlying alloy film is 5 to 90% by weight,
A method for preventing tin whiskers by electroless plating, wherein the object to be plated is a copper-clad laminated substrate, a chip-on-film (COF) or a TAB film carrier.
本発明2は、上記本発明1において、下地と上層の皮膜全体での銀の重量比率が0.1〜50重量%であることを特徴とする無電解メッキによるスズホイスカーの防止方法である。 The present invention 2 is the method for preventing tin whiskers by electroless plating according to the present invention 1, wherein the weight ratio of silver in the entire coating of the base and the upper layer is 0.1 to 50% by weight.
本発明3は、上記本発明1又は2において、スズ−銀合金よりなる下地皮膜の膜厚Aと、スズよりなる上層皮膜の膜厚Bにおいて、
下地皮膜と上層皮膜の膜厚比率が、B(上層)/A(下地)=1.2〜30であることを特徴とする無電解メッキによるスズホイスカーの防止方法である。
The present invention 3, in the present invention 1 or 2, tin - and the thickness A of the base film made of silver alloy, the thickness B of the upper layer coating consisting of tin,
A method for preventing tin whiskers by electroless plating, wherein the film thickness ratio of the base film and the upper film is B (upper layer) / A (base) = 1.2-30.
本発明4は、上記本発明1〜3のいずれかにおいて、下地皮膜を形成する際の無電解メッキ浴の浴温が5〜60℃であることを特徴とする無電解メッキによるスズホイスカーの防止方法である。 Invention 4 is the prevention of tin whisker by electroless plating, wherein the temperature of the electroless plating bath when forming the undercoat is 5 to 60 ° C. Is the method.
本発明では、下地皮膜の膜厚と下地及び上層の合計膜厚とを適正範囲に特定化し、且つ、下地での銀の組成を適正範囲に特定化するため、上層のスズ皮膜にピンホールを発生させることなくハンダ濡れ性、接合強度並びに皮膜外観を良好に確保しながら、従来のアニール法などのような煩雑な手法を用いることなく、簡便な方法でスズホイスカーを有効に防止できる。
また、下地及び上層の皮膜全体での銀の組成、或は、下地/上層の膜厚比率を適正範囲に特定化すると、ホイスカーの発生をより良く防止できる。
In the present invention, in order to specify the film thickness of the base film and the total film thickness of the base and the upper layer within an appropriate range, and to specify the composition of silver in the base within the appropriate range, pinholes are formed in the upper tin film. Tin whisker can be effectively prevented by a simple method without using a complicated method such as a conventional annealing method, while ensuring good solder wettability, bonding strength and coating appearance without generating them.
In addition, when the composition of silver in the entire film of the base and the upper layer or the film thickness ratio of the base / upper layer is specified within an appropriate range, the generation of whiskers can be better prevented.
本発明は、被メッキ物に無電解スズ−銀合金メッキによる下地皮膜を形成し、当該下地皮膜に無電解スズメッキによる上層皮膜を形成するスズホイスカーの防止方法であって、下地皮膜の膜厚、下地及び上層の合計膜厚、下地の合金皮膜中の銀の組成比率を夫々特定化した所定の電子部品を被メッキ物とする無電解メッキによるスズホイスカーの防止方法である。 The present invention is a tin whisker prevention method for forming a base film by electroless tin-silver alloy plating on an object to be plated, and forming an upper film by electroless tin plating on the base film, the film thickness of the base film, This is a method for preventing tin whiskers by electroless plating using a predetermined electronic component in which the total film thickness of the base and upper layers and the composition ratio of silver in the base alloy film are specified.
本発明1の下地皮膜は無電解メッキによって形成されたスズ−銀合金メッキ皮膜であり、上層皮膜は無電解メッキにより形成されたスズ皮膜である。
無電解メッキにより下地と上層の皮膜を形成する本発明1の第一の特徴は、下地と上層の膜厚を適正範囲に特定化したことにある。
即ち、下地皮膜の膜厚は0.025〜0.5μmであり、好ましくは0.03〜0.4μmである。下地皮膜の膜厚は0.5μm以下の薄い膜厚でも充分にホイスカーを防止できる反面、0.025μmより薄いとホイスカー防止効果が低下してしまう。
また、下地と上層の合計膜厚は0.1〜6μmであり、好ましくは0.15〜4μmであり、より好ましくは0.2〜3μmである。0.1μmより薄いとホイスカー防止効果が低下し、6μmより厚くしても、無電解メッキでホイスカー防止効果やハンダ濡れ性はあまり変わらないうえ、厚付けは無電解メッキに適さない側面がある。
さらに、本発明3に示すように、下地皮膜の膜厚Aと上層皮膜の膜厚Bとの比率は、B(上層)/A(下地)=1.2〜30が好ましく、2〜20がより好ましい。即ち、本発明では、下地皮膜(スズ−銀合金皮膜)はごく薄く、上層皮膜(スズ皮膜)は下地に対して厚く形成することが基本原理であり、この点で、下地(めっきA層)の厚みを上層(コーティング層B)よりかなり厚く形成する冒述の特許文献3(B/A=0.001〜1)とは、膜厚比率の設計思想が逆である。
The undercoating of the present invention 1 is a tin-silver alloy plating film formed by electroless plating, and the upper film is a tin film formed by electroless plating.
The first feature of the first aspect of the present invention in which the film of the base and the upper layer is formed by electroless plating is that the film thickness of the base and the upper layer is specified in an appropriate range.
That is, the film thickness of the undercoat is 0.025 to 0.5 μm, preferably 0.03 to 0.4 μm. Whiskering can be sufficiently prevented even if the film thickness of the undercoat is as thin as 0.5 μm or less, but if it is thinner than 0.025 μm, the whisker prevention effect is lowered.
The total film thickness of the underlayer and the upper layer is 0.1 to 6 μm, preferably 0.15 to 4 μm, and more preferably 0.2 to 3 μm. If the thickness is less than 0.1 μm, the whisker prevention effect is reduced, and even if the thickness is greater than 6 μm, the whisker prevention effect and solder wettability are not significantly changed by electroless plating, and thickening is not suitable for electroless plating.
Furthermore, as shown in the present invention 3 , the ratio of the film thickness A of the undercoat to the film thickness B of the upper coat is preferably B (upper layer) / A (undercoat) = 1.2 to 30, preferably 2 to 20 More preferred. That is, in the present invention, the basic principle is that the base film (tin-silver alloy film) is very thin and the upper film (tin film) is thicker than the base. In this respect, the base (plating A layer) The design concept of the film thickness ratio is opposite to the aforementioned Patent Document 3 (B / A = 0.001 to 1) in which the thickness of the film is formed to be considerably thicker than the upper layer (coating layer B).
上記本発明1の第二の特徴は、スズ−銀合金からなる下地皮膜の銀の組成を適正範囲に特定化したことにある。
下地皮膜の銀比率は5〜90重量%であり、好ましくは7〜70重量%、より好ましくは10〜60重量%である。
上述のように、下地皮膜は薄いので、銀比率を増してホイスカー防止効果を担保する必要があり、銀比率が5重量%以下ではホイスカー防止効果が低下する。さらに、5重量%以下の比率では、無電解メッキに際して、メッキ浴の銀濃度が低過ぎて、メッキ液の補給を頻繁にする必要があり、浴管理が煩雑になる弊害も考えれる。一方、銀比率が90重量%を越えると、冒述の通り、銀皮膜と同様に上層のスズ皮膜にピンホールが発生する恐れが増す。
ちなみに、冒述の特許文献4では、下地皮膜の銀、ビスマスなどの金属組成は5重量%以下に設定されている。
他方、本発明2に示すように、下地と上層の皮膜全体での銀の重量比率は0.1〜50重量%が好ましく、より好ましくは0.5〜30重量%である。50重量%を越えると、ハンダ濡れ性が低下し、接合不良を起こす恐れがある。
The second feature of the present invention 1 is that the composition of silver in the undercoat made of a tin-silver alloy is specified in an appropriate range.
The silver ratio of the undercoat is 5 to 90% by weight, preferably 7 to 70% by weight, and more preferably 10 to 60% by weight.
As described above, since the base film is thin, it is necessary to increase the silver ratio to ensure the whisker prevention effect. When the silver ratio is 5% by weight or less, the whisker prevention effect is lowered. Furthermore, when the ratio is 5% by weight or less, the silver concentration of the plating bath is too low during electroless plating, and it is necessary to replenish the plating solution frequently. On the other hand, when the silver ratio exceeds 90% by weight, the risk of pinholes occurring in the upper tin film increases as in the case of the silver film.
Incidentally, in Patent Document 4 mentioned above, the metal composition such as silver and bismuth of the undercoat is set to 5% by weight or less.
On the other hand, as shown in the present invention 2 , the weight ratio of silver in the entire film of the base and the upper layer is preferably 0.1 to 50% by weight, more preferably 0.5 to 30% by weight. If it exceeds 50% by weight, the solder wettability is lowered and there is a risk of poor bonding.
本発明1の下地皮膜の形成に用いる無電解スズ−銀合金メッキ浴は、可溶性第一スズ塩と、可溶性銀塩と、酸又はその塩と、錯化剤とを基本組成とする。
上記可溶性第一スズ塩及び銀塩は夫々難溶性塩を排除するものではなく、任意の塩類を使用できる。
上記可溶性第一スズ塩としては、後述する有機スルホン酸の第一スズ塩を初め、ホウフッ化第一スズ、スルホコハク酸第一スズ、塩化第一スズ、硫酸第一スズ、酸化第一スズなどが挙げられ、メタンスルホン酸第一スズ、エタンスルホン酸第一スズ、2−ヒドロキシエタン−1−スルホン酸第一スズ、2−ヒドロキシプロパン−1−スルホン酸第一スズ、p−フェノールスルホン酸第一スズなどの有機スルホン酸の塩類が好ましい。
また、上記可溶性銀塩としては、硫酸銀、亜硫酸銀、炭酸銀、スルホコハク酸銀、硝酸銀、有機スルホン酸銀、ホウフッ化銀、クエン酸銀、酒石酸銀、グルコン酸銀、シュウ酸銀、酸化銀などが挙げられ、本来は難溶性の塩化銀なども使用できる。好ましい銀塩としては、メタンスルホン酸銀、エタンスルホン酸銀、2−プロパノールスルホン酸銀、フェノールスルホン酸銀、ホウフッ化銀などが挙げられる。
当該可溶性第一スズ塩或は可溶性銀塩の金属塩としての換算添加量は、夫々0.0001〜200g/Lであり、好ましくは0.1〜80g/Lである。
The electroless tin-silver alloy plating bath used for the formation of the undercoat of the present invention 1 has a basic composition of a soluble stannous salt, a soluble silver salt, an acid or a salt thereof, and a complexing agent.
The soluble stannous salt and silver salt do not exclude hardly soluble salts, and any salts can be used.
Examples of the soluble stannous salt include a stannous salt of an organic sulfonic acid described later, stannous borofluoride, stannous sulfosuccinate, stannous chloride, stannous sulfate, stannous oxide, and the like. Stannous methanesulfonate, stannous ethanesulfonate, stannous 2-hydroxyethane-1-sulfonate, stannous 2-hydroxypropane-1-sulfonate, p-phenolsulfonic acid stannous Organic sulfonic acid salts such as tin are preferred.
Examples of the soluble silver salt include silver sulfate, silver sulfite, silver carbonate, silver sulfosuccinate, silver nitrate, silver organic sulfonate, silver borofluoride, silver citrate, silver tartrate, silver gluconate, silver oxalate, and silver oxide. Originally, poorly soluble silver chloride can be used. Preferred silver salts include silver methanesulfonate, silver ethanesulfonate, silver 2-propanolsulfonate, silver phenolsulfonate, silver borofluoride and the like.
The converted addition amount of the soluble stannous salt or soluble silver salt as a metal salt is 0.0001 to 200 g / L, preferably 0.1 to 80 g / L.
本発明の無電解スズ−銀合金メッキ浴のベースを構成する酸としては、排水処理が比較的容易なアルカンスルホン酸、アルカノールスルホン酸、芳香族スルホン酸等の有機スルホン酸、或は、脂肪族カルボン酸などの有機酸が好ましいが、ホウフッ化水素酸、ケイフッ化水素酸、スルファミン酸、塩酸、硫酸、過塩素酸などの無機酸でも差し支えない。
上記の酸は単用又は併用でき、酸の添加量は0.1〜300g/Lであり、好ましくは20〜120g/Lである。
Examples of the acid constituting the base of the electroless tin-silver alloy plating bath of the present invention include organic sulfonic acids such as alkane sulfonic acid, alkanol sulfonic acid, and aromatic sulfonic acid that are relatively easy to treat waste water, or aliphatic. Organic acids such as carboxylic acids are preferred, but inorganic acids such as borohydrofluoric acid, silicohydrofluoric acid, sulfamic acid, hydrochloric acid, sulfuric acid, and perchloric acid may be used.
The above acid can be used alone or in combination, and the amount of acid added is 0.1 to 300 g / L, preferably 20 to 120 g / L.
上記アルカンスルホン酸としては、化学式CnH2n+1SO3H(例えば、n=1〜5、好ましくは1〜3)で示されるものが使用でき、具体的には、メタンスルホン酸、エタンスルホン酸、1―プロパンスルホン酸、2―プロパンスルホン酸、1―ブタンスルホン酸、2―ブタンスルホン酸、ペンタンスルホン酸などの外、ヘキサンスルホン酸、デカンスルホン酸、ドデカンスルホン酸などが挙げられる。 As the alkane sulfonic acid, those represented by the chemical formula C n H 2n + 1 SO 3 H (for example, n = 1 to 5, preferably 1 to 3) can be used. Specifically, methanesulfonic acid, ethane In addition to sulfonic acid, 1-propanesulfonic acid, 2-propanesulfonic acid, 1-butanesulfonic acid, 2-butanesulfonic acid, pentanesulfonic acid, and the like, hexanesulfonic acid, decanesulfonic acid, dodecanesulfonic acid and the like can be mentioned.
上記アルカノールスルホン酸としては、化学式
CmH2m+1-CH(OH)-CpH2p-SO3H(例えば、m=0〜6、p=1〜5)
で示されるものが使用でき、具体的には、2―ヒドロキシエタン―1―スルホン酸、2―ヒドロキシプロパン―1―スルホン酸、2―ヒドロキシブタン―1―スルホン酸、2―ヒドロキシペンタン―1―スルホン酸などの外、1―ヒドロキシプロパン―2―スルホン酸、3―ヒドロキシプロパン―1―スルホン酸、4―ヒドロキシブタン―1―スルホン酸、2―ヒドロキシヘキサン―1―スルホン酸、2―ヒドロキシデカン―1―スルホン酸、2―ヒドロキシドデカン―1―スルホン酸などが挙げられる。
Examples of the alkanol sulfonic acid include chemical formula C m H 2m + 1 —CH (OH) —C p H 2p —SO 3 H (for example, m = 0 to 6, p = 1 to 5).
In particular, 2-hydroxyethane-1-sulfonic acid, 2-hydroxypropane-1-sulfonic acid, 2-hydroxybutane-1-sulfonic acid, 2-hydroxypentane-1- In addition to sulfonic acid, etc. 1-hydroxypropane-2-sulfonic acid, 3-hydroxypropane-1-sulfonic acid, 4-hydroxybutane-1-sulfonic acid, 2-hydroxyhexane-1-sulfonic acid, 2-hydroxydecane -1-sulfonic acid, 2-hydroxydodecane-1-sulfonic acid and the like.
上記芳香族スルホン酸は、基本的にはベンゼンスルホン酸、アルキルベンゼンスルホン酸、フェノールスルホン酸、ナフタレンスルホン酸、アルキルナフタレンスルホン酸などであって、具体的には、1−ナフタレンスルホン酸、2―ナフタレンスルホン酸、トルエンスルホン酸、キシレンスルホン酸、p―フェノールスルホン酸、クレゾールスルホン酸、スルホサリチル酸、ニトロベンゼンスルホン酸、スルホ安息香酸、ジフェニルアミン―4―スルホン酸などが挙げられる。 The aromatic sulfonic acid is basically benzene sulfonic acid, alkyl benzene sulfonic acid, phenol sulfonic acid, naphthalene sulfonic acid, alkyl naphthalene sulfonic acid, etc., specifically 1-naphthalene sulfonic acid, 2-naphthalene. Examples include sulfonic acid, toluenesulfonic acid, xylenesulfonic acid, p-phenolsulfonic acid, cresolsulfonic acid, sulfosalicylic acid, nitrobenzenesulfonic acid, sulfobenzoic acid, diphenylamine-4-sulfonic acid, and the like.
上記脂肪族カルボン酸としては、一般に、炭素数1〜6のカルボン酸が使用できる。具体的には、酢酸、プロピオン酸、酪酸、クエン酸、酒石酸、グルコン酸、スルホコハク酸、トリフルオロ酢酸などが挙げられる。 Generally as said aliphatic carboxylic acid, a C1-C6 carboxylic acid can be used. Specific examples include acetic acid, propionic acid, butyric acid, citric acid, tartaric acid, gluconic acid, sulfosuccinic acid, and trifluoroacetic acid.
本発明1の無電解スズ−銀合金浴に含有させる錯化剤はメッキ浴を安定化し、スズと銀を共析化する機能を果すものであり、チオ尿素類、アミン類、スルフィド類、メルカプト類などが挙げられる。
上記チオ尿素類はチオ尿素とチオ尿素誘導体である。
当該チオ尿素誘導体としては、1,3―ジメチルチオ尿素、トリメチルチオ尿素、ジエチルチオ尿素(例えば、1,3―ジエチル―2―チオ尿素)、N,N′―ジイソプロピルチオ尿素、アリルチオ尿素、アセチルチオ尿素、エチレンチオ尿素、1,3―ジフェニルチオ尿素、二酸化チオ尿素、チオセミカルバジドなどが挙げられる。
上記アミン類は、アミノ酢酸、アミノプロピオン酸、アミノ吉草酸、アミノ酸などのアミノカルボン酸系化合物、エチレンジアミン、テトラメチレンジアミンなどのポリアミン系化合物、モノエタノールアミン、ジエタノールアミンなどのアミノアルコール系化合物などである。
上記アミン類のうちのアミノカルボン酸系化合物としては、エチレンジアミン四酢酸(EDTA)、エチレンジアミン四酢酸二ナトリウム塩(EDTA・2Na)、ヒドロキシエチルエチレンジアミン三酢酸(HEDTA)、ジエチレントリアミン五酢酸(DTPA)、トリエチレンテトラミン六酢酸(TTHA)、エチレンジアミンテトラプロピオン酸、ニトリロ三酢酸(NTA)、イミノジ酢酸(IDA)、イミノジプロピオン酸(IDP)、メタフェニレンジアミン四酢酸、1,2−ジアミノシクロヘキサン−N,N,N′,N′−四酢酸、ジアミノプロピオン酸、グルタミン酸、オルニチン、システイン、N,N−ビス(2−ヒドロキシエチル)グリシンなどが挙げられる。
また、上記アミン類のうちのポリアミン系化合物、アミノアルコール系化合物としては、エチレンジアミンテトラメチレンリン酸、ジエチレントリアミンペンタメチレンリン酸、アミノトリメチレンリン酸、アミノトリメチレンリン酸五ナトリウム塩、モノエタノールアミン、ジエタノールアミン、トリエタノールアミン、モノプロパノールアミン、ジプロパノールアミン、トリプロパノールアミン、メチレンジアミン、エチレンジアミン、テトラメチレンジアミン、ペンタメチレンジアミン、ヘキサメチレンジアミン、ジエチレントリアミン、テトラエチレンペンタミン、ペンタエチレンヘキサミン、ヘキサエチレンヘプタミン、シンナミルアミン、p―メトキシシンナミルアミンなどが挙げられる。
上記スルフィド類、メルカプト類としては、2,2′−ジチオジアニリン、ジピリジルジスルフィド、チオジグリコール酸、β−チオジグリコール、ビス(ドデカエチレングリコール)チオエーテル、1,2−ビス(2−ヒドロキシエチルチオ)エタン、1,4−ビス(2−ヒドロキシエチルチオ)ブタン、チオグリコール、チオグリコール酸、メルカプトコハク酸などが挙げられる。
The complexing agent contained in the electroless tin-silver alloy bath of the present invention 1 functions to stabilize the plating bath and to co-deposit tin and silver. Thioureas, amines, sulfides, mercapto And the like.
The thioureas are thiourea and thiourea derivatives.
Examples of the thiourea derivative include 1,3-dimethylthiourea, trimethylthiourea, diethylthiourea (for example, 1,3-diethyl-2-thiourea), N, N′-diisopropylthiourea, allylthiourea, acetylthiourea, Examples include ethylenethiourea, 1,3-diphenylthiourea, thiourea dioxide, thiosemicarbazide and the like.
Examples of the amines include aminocarboxylic acid compounds such as aminoacetic acid, aminopropionic acid, aminovaleric acid, and amino acids, polyamine compounds such as ethylenediamine and tetramethylenediamine, and aminoalcohol compounds such as monoethanolamine and diethanolamine. .
Among the amines, aminocarboxylic acid compounds include ethylenediaminetetraacetic acid (EDTA), ethylenediaminetetraacetic acid disodium salt (EDTA · 2Na), hydroxyethylethylenediaminetriacetic acid (HEDTA), diethylenetriaminepentaacetic acid (DTPA), Ethylenetetramine hexaacetic acid (TTHA), ethylenediaminetetrapropionic acid, nitrilotriacetic acid (NTA), iminodiacetic acid (IDA), iminodipropionic acid (IDP), metaphenylenediaminetetraacetic acid, 1,2-diaminocyclohexane-N, N , N ′, N′-tetraacetic acid, diaminopropionic acid, glutamic acid, ornithine, cysteine, N, N-bis (2-hydroxyethyl) glycine, and the like.
Among the amines, polyamine compounds and amino alcohol compounds include ethylenediaminetetramethylene phosphate, diethylenetriaminepentamethylene phosphate, aminotrimethylene phosphate, aminotrimethylene phosphate pentasodium salt, monoethanolamine, Diethanolamine, triethanolamine, monopropanolamine, dipropanolamine, tripropanolamine, methylenediamine, ethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, diethylenetriamine, tetraethylenepentamine, pentaethylenehexamine, hexaethyleneheptamine , Cinnamylamine, p-methoxycinnamylamine and the like.
Examples of the sulfides and mercapts include 2,2′-dithiodianiline, dipyridyl disulfide, thiodiglycolic acid, β-thiodiglycol, bis (dodecaethylene glycol) thioether, and 1,2-bis (2-hydroxyethyl). Thio) ethane, 1,4-bis (2-hydroxyethylthio) butane, thioglycol, thioglycolic acid, mercaptosuccinic acid and the like.
本発明1の無電解スズ−銀合金メッキ浴には上述の成分以外に、目的に応じて界面活性剤、還元剤、隠蔽錯化剤、pH調整剤、緩衝剤、平滑剤、応力緩和剤、光沢剤、半光沢剤、酸化防止剤などのメッキ浴に通常使用される添加剤を混合できることは勿論である。 In addition to the above-described components, the electroless tin-silver alloy plating bath of the present invention 1 includes a surfactant, a reducing agent, a concealing complexing agent, a pH adjusting agent, a buffering agent, a smoothing agent, a stress relaxation agent, Of course, additives usually used in plating baths such as brighteners, semi-brighteners and antioxidants can be mixed.
上記還元剤は、前記金属塩の還元用、及びその析出速度や析出合金比率の調整用などに添加され、リン酸系化合物、アミンボラン類、水素化ホウ素化合物、ヒドラジン誘導体などを単用又は併用できる。
上記リン酸系化合物としては、次亜リン酸、亜リン酸、ピロリン酸、ポリリン酸、或はこれらのアンモニウム、リチウム、ナトリウム、カリウム、カルシウム等の塩が挙げられる。
上記アミンボラン類としては、ジメチルアミンボラン、トリメチルアミンボラン、イソプロピルアミンボラン、モルホリンボランなどが挙げられる。
上記水素化ホウ素化合物としては水素化ホウ素ナトリウムなどが挙げられる。 上記ヒドラジン誘導体としては、ヒドラジン水和物、メチルヒドラジン、フェニルヒドラジンなどが挙げられる。
上記還元剤の添加量は0.1〜200g/Lであり、好ましくは10〜150g/Lである。
The reducing agent is added for reducing the metal salt and adjusting the deposition rate and the ratio of the precipitated alloy, and phosphoric acid compounds, amine boranes, borohydride compounds, hydrazine derivatives, etc. can be used alone or in combination. .
Examples of the phosphoric acid compounds include hypophosphorous acid, phosphorous acid, pyrophosphoric acid, polyphosphoric acid, or salts of ammonium, lithium, sodium, potassium, calcium and the like.
Examples of the amine boranes include dimethylamine borane, trimethylamine borane, isopropylamine borane, morpholine borane and the like.
Examples of the borohydride compound include sodium borohydride. Examples of the hydrazine derivative include hydrazine hydrate, methyl hydrazine, and phenyl hydrazine.
The addition amount of the reducing agent is 0.1 to 200 g / L, preferably 10 to 150 g / L.
上記界面活性剤は、ノニオン系界面活性剤、両性界面活性剤、カチオン系界面活性剤、或はアニオン系界面活性剤が挙げられ、これら各種の活性剤を単用又は併用できる。
その添加量は0.01〜100g/L、好ましくは0.1〜50g/Lである。
Examples of the surfactant include nonionic surfactants, amphoteric surfactants, cationic surfactants, and anionic surfactants. These various surfactants can be used alone or in combination.
The addition amount is 0.01 to 100 g / L, preferably 0.1 to 50 g / L.
上記ノニオン系界面活性剤は、C1〜C20アルカノール、フェノール、ナフトール、ビスフェノール類、C1〜C25アルキルフェノール、アリールアルキルフェノール、C1〜C25アルキルナフトール、C1〜C25アルコキシル化リン酸(塩)、ソルビタンエステル、スチレン化フェノール、ポリアルキレングリコール、C1〜C22脂肪族アミン、C1〜C22脂肪族アミドなどにエチレンオキシド(EO)及び/又はプロピレンオキシド(PO)を2〜300モル付加縮合したものである。 従って、所定のアルカノール、フェノール、ナフトールなどのEO単独の付加物、PO単独の付加物、或は、EOとPOが共存した付加物のいずれでも良く、具体的には、α−ナフトール又はβ−ナフトールのエチレンオキシド付加物(即ち、α−ナフトールポリエトキシレートなど)が好ましい。 The nonionic surfactant, C 1 -C 20 alkanols, phenol, naphthol, bisphenol, C 1 -C 25 alkyl phenols, aryl phenols, C 1 -C 25 alkyl naphthol, C 1 -C 25 alkoxylated phosphoric acid ( salts), sorbitan esters, styrenated phenols, polyalkylene glycols, C 1 -C 22 aliphatic amines, C 1 -C 22 2 to 300 moles of aliphatic amides such as ethylene oxide (EO) and / or propylene oxide (PO) Addition condensation. Accordingly, it may be an EO-only adduct such as a predetermined alkanol, phenol, or naphthol, an adduct of PO alone, or an adduct in which EO and PO coexist. Specifically, α-naphthol or β- Ethylene oxide adducts of naphthol (ie α-naphthol polyethoxylate etc.) are preferred.
エチレンオキシド(EO)及び/又はプロピレンオキシド(PO)を付加縮合させるC1〜C20アルカノールとしては、オクタノール、デカノール、ラウリルアルコール、テトラデカノール、ヘキサデカノール、ステアリルアルコール、エイコサノール、セチルアルコール、オレイルアルコール、ドコサノールなどが挙げられる。
同じくビスフェノール類としては、ビスフェノールA、ビスフェノールB、ビスフェノールF、ビスフェノールSなどが挙げられる。
C1〜C25アルキルフェノールとしては、モノ、ジ、若しくはトリアルキル置換フェノール、例えば、p−ブチルフェノール、p−イソオクチルフェノール、p−ノニルフェノール、p−ヘキシルフェノール、2,4−ジブチルフェノール、2,4,6−トリブチルフェノール、p−ドデシルフェノール、p−ラウリルフェノール、p−ステアリルフェノールなどが挙げられる。
アリールアルキルフェノールとしては、2−フェニルイソプロピルフェノールなどが挙げられる。
C 1 -C 20 alkanols for addition condensation of ethylene oxide (EO) and / or propylene oxide (PO) include octanol, decanol, lauryl alcohol, tetradecanol, hexadecanol, stearyl alcohol, eicosanol, cetyl alcohol, oleyl alcohol , Docosanol and the like.
Similarly, bisphenols include bisphenol A, bisphenol B, bisphenol F, bisphenol S, and the like.
C 1 -C 25 alkylphenols include mono, di, or trialkyl substituted phenols such as p-butylphenol, p-isooctylphenol, p-nonylphenol, p-hexylphenol, 2,4-dibutylphenol, 2,4, Examples include 6-tributylphenol, p-dodecylphenol, p-laurylphenol, and p-stearylphenol.
Examples of the arylalkylphenol include 2-phenylisopropylphenol .
C1〜C25アルキルナフトールのアルキル基としては、メチル、エチル、プロピル、ブチルヘキシル、オクチル、デシル、ドデシル、オクタデシルなどが挙げられ、ナフタレン核の任意の位置にあって良い。
C1〜C25アルコキシル化リン酸(塩)は、下記の一般式(a)で表されるものである。
Ra・Rb・(MO)P=O …(a)
(式(a)中、Ra及びRbは同一又は異なるC1〜C25アルキル、但し、一方がHであっても良い。MはH又はアルカリ金属を示す。)
Examples of the alkyl group of C 1 -C 25 alkyl naphthol include methyl, ethyl, propyl, butylhexyl, octyl, decyl, dodecyl, octadecyl, and the like, which may be at any position of the naphthalene nucleus.
C 1 -C 25 alkoxylated phosphoric acid (salt) is represented by the following general formula (a).
Ra · Rb · (MO) P = O (a)
(In formula (a), R a and R b are the same or different C 1 -C 25 alkyl, provided that one of them may be H. M represents H or an alkali metal.)
ソルビタンエステルとしては、モノ、ジ又はトリエステル化した1,4−、1,5−又は3,6−ソルビタン、例えばソルビタンモノラウレート、ソルビタンモノパルミテート、ソルビタンジステアレート、ソルビタンジオレエート、ソルビタン混合脂肪酸エステルなどが挙げられる。
C1〜C22脂肪族アミンとしては、プロピルアミン、ブチルアミン、ヘキシルアミン、オクチルアミン、デシルアミン、ラウリルアミン、ステアリルアミン、オレイルアミン、エチレンジアミン、プロピレンジアミンなどの飽和及び不飽和脂肪酸アミンなどが挙げられる。
C1〜C22脂肪族アミドとしては、プロピオン酸、酪酸、カプリル酸、カプリン酸、ラウリン酸、ミリスチン酸、パルミチン酸、ステアリン酸、ベヘン酸などのアミドが挙げられる。
Sorbitan esters include mono-, di- or triesterized 1,4-, 1,5- or 3,6-sorbitan, such as sorbitan monolaurate, sorbitan monopalmitate, sorbitan distearate, sorbitan dioleate, Examples include sorbitan mixed fatty acid esters.
C 1 -C 22 aliphatic amines include saturated and unsaturated fatty acid amines such as propylamine, butylamine, hexylamine, octylamine, decylamine, laurylamine, stearylamine, oleylamine, ethylenediamine, propylenediamine, and the like.
C 1 -C 22 aliphatic amides include amides such as propionic acid, butyric acid, caprylic acid, capric acid, lauric acid, myristic acid, palmitic acid, stearic acid, and behenic acid.
上記カチオン系界面活性剤としては、下記の一般式(b)で表される第4級アンモニウム塩
(R1・R2・R3・R4N)+・X- …(b)
(式(b)中、Xはハロゲン、ヒドロキシ、C1〜C5アルカンスルホン酸又は硫酸、R1、R2及びR3は同一又は異なるC1〜C20アルキル、R4はC1〜C10アルキル又はベンジルを示す。)
或は、下記の一般式(c)で表されるピリジニウム塩などが挙げられる。
R6−(C5H5N−R5)+・X- …(c)
(式(c)中、C5H5Nはピリジン環、Xはハロゲン、ヒドロキシ、C1〜C5アルカンスルホン酸又は硫酸、R5はC1〜C20アルキル、R6はH又はC1〜C10アルキルを示す。)
As the cationic surfactant, a quaternary ammonium salt represented by the following general formula (b)
(R 1 · R 2 · R 3 · R 4 N) + · X - ... (b)
(In the formula (b), X is halogen, hydroxy, C 1 -C 5 alkanesulfonic acid or sulfuric acid, R 1 , R 2 and R 3 are the same or different C 1 -C 20 alkyl, and R 4 is C 1 -C 10 represents alkyl or benzyl.)
Or the pyridinium salt etc. which are represented with the following general formula (c) are mentioned.
R 6- (C 5 H 5 N-R 5 ) + · X − (c)
(In formula (c), C 5 H 5 N is a pyridine ring, X is halogen, hydroxy, C 1 -C 5 alkanesulfonic acid or sulfuric acid, R 5 is C 1 -C 20 alkyl, R 6 is H or C 1. ~C 10 represents an alkyl.)
塩の形態のカチオン系界面活性剤の例としては、ラウリルトリメチルアンモニウム塩、ステアリルトリメチルアンモニウム塩、ラウリルジメチルエチルアンモニウム塩、オクタデシルジメチルエチルアンモニウム塩、ジメチルベンジルラウリルアンモニウム塩、セチルジメチルベンジルアンモニウム塩、オクタデシルジメチルベンジルアンモニウム塩、トリメチルベンジルアンモニウム塩、トリエチルベンジルアンモニウム塩、ヘキサデシルピリジニウム塩、ラウリルピリジニウム塩、ドデシルピリジニウム塩、ステアリルアミンアセテート、ラウリルアミンアセテート、オクタデシルアミンアセテートなどが挙げられる。 Examples of cationic surfactants in the form of salts include lauryl trimethyl ammonium salt, stearyl trimethyl ammonium salt, lauryl dimethyl ethyl ammonium salt, octadecyl dimethyl ethyl ammonium salt, dimethyl benzyl lauryl ammonium salt, cetyl dimethyl benzyl ammonium salt, octadecyl dimethyl Examples include benzylammonium salt, trimethylbenzylammonium salt, triethylbenzylammonium salt, hexadecylpyridinium salt, laurylpyridinium salt, dodecylpyridinium salt, stearylamine acetate, laurylamine acetate, octadecylamine acetate and the like.
上記アニオン系界面活性剤としては、アルキル硫酸塩、ポリオキシエチレンアルキルエーテル硫酸塩、ポリオキシエチレンアルキルフェニルエーテル硫酸塩、アルキルベンゼンスルホン酸塩、(モノ、ジ、トリ)アルキルナフタレンスルホン酸塩などが挙げられる。アルキル硫酸塩としては、ラウリル硫酸ナトリウム、オレイル硫酸ナトリウムなどが挙げられる。ポリオキシエチレンアルキルエーテル硫酸塩としては、ポリオキシエチレン(EO12)ノニルエーテル硫酸ナトリウム、ポリオキシエチレン(EO15)ドデシルエーテル硫酸ナトリウムなどが挙げられる。ポリオキシエチレンアルキルフェニルエーテル硫酸塩としては、ポリオキシエチレン(EO15)ノニルフェニルエーテル硫酸塩などが挙げられる。アルキルベンゼンスルホン酸塩としては、ドデシルベンゼンスルホン酸ナトリウムなどが挙げられる。また、(モノ、ジ、トリ)アルキルナフタレンスルホン酸塩としては、ジブチルナフタレンスルホン酸ナトリウムなどが挙げられる。 Examples of the anionic surfactant include alkyl sulfates, polyoxyethylene alkyl ether sulfates, polyoxyethylene alkyl phenyl ether sulfates, alkyl benzene sulfonates, (mono, di, tri) alkyl naphthalene sulfonates, and the like. It is done. Examples of the alkyl sulfate include sodium lauryl sulfate and sodium oleyl sulfate. Examples of the polyoxyethylene alkyl ether sulfate include sodium polyoxyethylene (EO12) nonyl ether sulfate and sodium polyoxyethylene (EO15) dodecyl ether sulfate. Examples of the polyoxyethylene alkylphenyl ether sulfate include polyoxyethylene (EO15) nonylphenyl ether sulfate. Examples of the alkyl benzene sulfonate include sodium dodecylbenzene sulfonate. Examples of the (mono, di, tri) alkyl naphthalene sulfonate include sodium dibutyl naphthalene sulfonate.
上記両性界面活性剤としては、カルボキシベタイン、イミダゾリンベタイン、スルホベタイン、アミノカルボン酸などが挙げられる。また、エチレンオキシド及び/又はプロピレンオキシドとアルキルアミン又はジアミンとの縮合生成物の硫酸化、或はスルホン酸化付加物も使用できる。 Examples of the amphoteric surfactant include carboxybetaine, imidazoline betaine, sulfobetaine, and aminocarboxylic acid. In addition, sulfation of a condensation product of ethylene oxide and / or propylene oxide and an alkylamine or diamine, or a sulfonated adduct can also be used.
代表的なカルボキシベタイン、或はイミダゾリンベタインとしては、ラウリルジメチルアミノ酢酸ベタイン、ミリスチルジメチルアミノ酢酸ベタイン、ステアリルジメチルアミノ酢酸ベタイン、ヤシ油脂肪酸アミドプロピルジメチルアミノ酢酸ベタイン、2−ウンデシル−1−カルボキシメチル−1−ヒドロキシエチルイミダゾリニウムベタイン、2−オクチル−1−カルボキシメチル−1−カルボキシエチルイミダゾリニウムベタインなどが挙げられ、硫酸化及びスルホン酸化付加物としてはエトキシル化アルキルアミンの硫酸付加物、スルホン酸化ラウリル酸誘導体ナトリウム塩などが挙げられる。 Typical carboxybetaines or imidazoline betaines include lauryldimethylaminoacetic acid betaine, myristyldimethylaminoacetic acid betaine, stearyldimethylaminoacetic acid betaine, coconut oil fatty acid amidopropyldimethylaminoacetic acid betaine, 2-undecyl-1-carboxymethyl- Examples thereof include 1-hydroxyethyl imidazolinium betaine, 2-octyl-1-carboxymethyl-1-carboxyethyl imidazolinium betaine, and the sulfated and sulfonated adducts include sulfated adducts of ethoxylated alkylamines, sulfones. Examples include sodium lauric acid derivative sodium salt.
上記スルホベタインとしては、ヤシ油脂肪酸アミドプロピルジメチルアンモニウム−2−ヒドロキシプロパンスルホン酸、N−ココイルメチルタウリンナトリウム、N−パルミトイルメチルタウリンナトリウムなどが挙げられる。
アミノカルボン酸としては、ジオクチルアミノエチルグリシン、N−ラウリルアミノプロピオン酸、オクチルジ(アミノエチル)グリシンナトリウム塩などが挙げられる。
Examples of the sulfobetaines include coconut oil fatty acid amidopropyldimethylammonium-2-hydroxypropanesulfonic acid, N-cocoylmethyl taurine sodium, and N-palmitoylmethyl taurine sodium.
Examples of the aminocarboxylic acid include dioctylaminoethylglycine, N-laurylaminopropionic acid, octyldi (aminoethyl) glycine sodium salt, and the like.
上記隠蔽錯化剤は浴の安定性向上を目的として使用され、銅などの被メッキ物の素地金属から溶出した不純物金属イオンのメッキ浴への悪影響を防止するものであり、具体的には、EDTA、ヒドロキシエチルエチレンジアミントリ酢酸(HEDTA)、イミノジ酢酸(IDA)、イミノジプロピオン酸(IDP)、ニトリロトリ酢酸(NTA)、ジエチレントリアミン五酢酸(DTPA)、トリエチレンテトラミン六酢酸(TTHA)、エチレンジアミン、ヘキサメチレンジアミン、ジエチレントリアミン、クエン酸、酒石酸、コハク酸、マロン酸、グリコール酸、グルコヘプトン酸、グルコン酸、グリシン、ピロリン酸、トリポリリン酸、1−ヒドロキシエタン−1,1−ビスホスホン酸などが挙げられる。 The concealing complexing agent is used for the purpose of improving the stability of the bath, and prevents the adverse effect on the plating bath of impurity metal ions eluted from the base metal of the object to be plated such as copper. EDTA, hydroxyethylethylenediaminetriacetic acid (HEDTA), iminodiacetic acid (IDA), iminodipropionic acid (IDP), nitrilotriacetic acid (NTA), diethylenetriaminepentaacetic acid (DTPA), triethylenetetraminehexaacetic acid (TTHA), ethylenediamine, hexa Examples include methylenediamine, diethylenetriamine, citric acid, tartaric acid, succinic acid, malonic acid, glycolic acid, glucoheptonic acid, gluconic acid, glycine, pyrophosphoric acid, tripolyphosphoric acid, 1-hydroxyethane-1,1-bisphosphonic acid, and the like.
本発明1の無電解スズ−銀合金メッキ浴を用いる場合、浴温は通常より低めの5℃〜60℃が好ましい。
上述の通り、本発明では、無電解スズ−銀合金の下地皮膜をごく薄い0.025〜0.5μmの厚みで形成すれば足りるので、浴温を高くしてメッキを厚付けする必要はない。
また、本発明の無電解メッキを適用する被メッキ物としては、本発明4に示すように、銅張り積層基板、チップ・オン・フィルム(COF)又はTABのフィルムキャリアが好適である。上記銅張り積層基板は、リジッドのプリント基板(PCB)、フレキシブル・プリント基板(FPC)、ボール・グリッド・アレイ(BGA)、チップ・サイズ・パッケージ(CSP)などをいう。
When using the electroless tin-silver alloy plating bath of the present invention 1, the bath temperature is preferably 5 ° C to 60 ° C, which is lower than usual.
As described above, in the present invention, an electroless tin - since it is sufficient to form a primer film of the silver alloy in very thin 0.025~0.5μm thickness, it is not necessary to thickly plated by increasing the bath temperature .
Moreover, as a to-be-plated object to which the electroless plating of the present invention is applied, a copper-clad laminated substrate, a chip-on-film (COF) or a TAB film carrier is suitable as shown in the present invention 4 . The copper-clad laminate is a rigid printed circuit board (PCB), a flexible printed circuit board (FPC), a ball grid array (BGA), a chip size package (CSP), or the like.
以下、本発明の無電解メッキにより被メッキ物上に下地及び上層皮膜の2層メッキを施す実施例、当該実施例の皮膜形成による上層スズ皮膜でのピンホール及びスズホイスカーの発生防止に関する評価試験例を順次説明する。
上記実施例、試験例の「部」、「%」は基本的に重量基準である。
尚、本発明は下記の実施例、試験例に拘束されることなく、本発明の技術的思想の範囲内で任意の変形をなし得ることは勿論である。
Hereinafter, an evaluation test on the prevention of occurrence of pinholes and tin whiskers in an upper tin film by forming the film of the present example by applying a two-layer plating of an underlayer and an upper film on an object to be plated by electroless plating of the present invention Examples will be described sequentially.
“Parts” and “%” in the above examples and test examples are basically based on weight.
Needless to say, the present invention is not limited to the following examples and test examples, and can be arbitrarily modified within the scope of the technical idea of the present invention.
《無電解メッキによる2層皮膜形成の実施例》
下記の実施例1〜9は下地皮膜がスズ−銀合金皮膜の例である。実施例4及び6は下地皮膜の膜厚が本発明の適正範囲の下限(0.025μm)に近い例である。実施例7は下地と上層の皮膜全体の膜厚が本発明の適正範囲の下限(0.1μm)に近い例である。実施例8は下地皮膜での銀比率が本発明の適正範囲の下限(5%)に近い例である。実施例9は下地と上層の皮膜全体での銀比率が本発明2に示す好ましい範囲の上限(50%)より多い例、その他の実施例はすべて当該好ましい範囲内の例である。
一方、下記の比較例1〜4のうち、比較例1は下地皮膜が純粋の銀皮膜の例である。比較例2はスズ−銀合金からなる下地皮膜の銀の比率が本発明の適正範囲の上限(90%)を越える例である。比較例3は同下地皮膜の銀の比率が本発明の適正範囲の下限(5%)より少ない例である。比較例4は下地皮膜の膜厚が本発明の適正範囲の下限(0.025μm)より薄い例である。
<< Example of forming a two-layer film by electroless plating >>
Examples 1-9 The following undercoat tin - an example of a silver alloy film. Examples 4 and 6 are examples in which the film thickness of the undercoat is close to the lower limit (0.025 μm) of the appropriate range of the present invention. Example 7 is an example in which the film thickness of the entire film of the base layer and the upper layer is close to the lower limit (0.1 μm) of the appropriate range of the present invention. Example 8 is an example in which the silver ratio in the undercoat is close to the lower limit (5%) of the appropriate range of the present invention. Example 9 is an example in which the silver ratio in the entire film of the base layer and the upper layer is larger than the upper limit (50%) of the preferable range shown in the present invention 2, and all other examples are examples within the preferable range.
On the other hand, among the following Comparative Examples 1 to 4, Comparative Example 1 is an example in which the base film is a pure silver film. Comparative Example 2 is an example in which the ratio of silver in the undercoat made of a tin-silver alloy exceeds the upper limit (90%) of the appropriate range of the present invention. Comparative Example 3 is an example in which the ratio of silver in the undercoat is less than the lower limit (5%) of the appropriate range of the present invention. Comparative Example 4 is an example in which the film thickness of the undercoat is thinner than the lower limit (0.025 μm) of the appropriate range of the present invention.
(1)実施例1
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.005モル/L
メタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.08μm
スズ−銀合金皮膜の銀比率:46.1%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.15μm
下地層と上層の皮膜全体での銀比率:2.3%
(1) Example 1
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.005 mol / L
Methanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.08 μm
Silver ratio of tin-silver alloy film: 46.1%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlayer and upper layer: 1.15 μm
Silver ratio of the entire underlayer and upper layer: 2.3%
(2)実施例2
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.007モル/L
p−フェノールスルホン酸 :0.10モル/L
メタンスルホン酸 :0.20モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.11μm
スズ−銀合金皮膜の銀比率:49.8%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸 :0.50モル/L
2−ヒドロキシエタンスルホン酸 :1.00モル/L
チオ尿素 :2.30モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :15.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.30μm
下地層と上層の皮膜全体での銀比率:1.7%
(2) Example 2
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.007 mol / L
p-phenolsulfonic acid: 0.10 mol / L
Methanesulfonic acid: 0.20 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.11 μm
Silver ratio of tin-silver alloy film: 49.8%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Methanesulfonic acid: 0.50 mol / L
2-hydroxyethanesulfonic acid: 1.00 mol / L
Thiourea: 2.30 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 15.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.30 μm
Silver ratio of the entire underlayer and upper layer: 1.7%
(3)実施例3
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.25モル/L
メタンスルホン酸銀(Ag+として) :0.006モル/L
2−ヒドロキシエタンスルホン酸 :0.40モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.15μm
スズ−銀合金皮膜の銀比率:52.6%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.40モル/L
2−ヒドロキシエタンスルホン酸 :1.00モル/L
チオ尿素 :2.60モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンノニルフェニルエーテル(EO12モル) :12.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.50μm
下地層と上層の皮膜全体での銀比率:2.8%
(3) Example 3
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath 2-hydroxyethane sulfonate stannous (as Sn 2+ ): 0.25 mol / L
Silver methanesulfonate (as Ag + ): 0.006 mol / L
2-hydroxyethanesulfonic acid: 0.40 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.15 μm
Silver ratio of tin-silver alloy film: 52.6%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.40 mol / L
2-hydroxyethanesulfonic acid: 1.00 mol / L
Thiourea: 2.60 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene nonylphenyl ether (EO12 mol): 12.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.50 μm
Silver ratio of the entire underlayer and upper layer: 2.8%
(4)実施例4
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.004モル/L
メタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.06μm
スズ−銀合金皮膜の銀比率:32.5%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
2−ヒドロキシエタンスルホン酸 :1.30モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンノニルフェニルエーテル(EO12モル) :12.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.25μm
下地層と上層の皮膜全体での銀比率:2.1%
(4) Example 4
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.004 mol / L
Methanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.06 μm
Silver ratio of tin-silver alloy film: 32.5%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.35 mol / L
2-hydroxyethanesulfonic acid: 1.30 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene nonylphenyl ether (EO12 mol): 12.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.25 μm
Silver ratio of the entire underlayer and upper layer: 2.1%
(5)実施例5
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.006モル/L
2−ヒドロキシエタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.09μm
スズ−銀合金皮膜の銀比率:45.8%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
2−ヒドロキシエタンスルホン酸 :1.30モル/L
チオ尿素 :2.50モル/L
次亜リン酸 :0.70モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.56μm
下地層と上層の皮膜全体での銀比率:2.7%
(5) Example 5
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.006 mol / L
2-hydroxyethanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer Film thickness of tin-silver alloy film: 0.09 μm
Silver ratio of tin-silver alloy film: 45.8%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.30 mol / L
2-hydroxyethanesulfonic acid: 1.30 mol / L
Thiourea: 2.50 mol / L
Hypophosphorous acid: 0.70 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Thickness of the entire underlayer and upper layer: 1.56 μm
Silver ratio of the entire underlayer and upper layer: 2.7%
(6)実施例6
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.004モル/L
メタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:20秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.06μm
スズ−銀合金皮膜の銀比率:30.7%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
2−ヒドロキシエタンスルホン酸 :1.30モル/L
チオ尿素 :1.50モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンノニルフェニルエーテル(EO12モル) :12.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:3分
(f)上層
下地層と上層の皮膜全体の膜厚:0.35μm
下地層と上層の皮膜全体での銀比率:4.3%
(6) Example 6
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.004 mol / L
Methanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 20 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.06 μm
Silver ratio of tin-silver alloy film: 30.7%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.35 mol / L
2-hydroxyethanesulfonic acid: 1.30 mol / L
Thiourea: 1.50 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene nonylphenyl ether (EO12 mol): 12.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 3 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 0.35 μm
Silver ratio in the entire coating of the underlayer and upper layer: 4.3%
(7)実施例7
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.005モル/L
2−ヒドロキシエタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:20秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.07μm
スズ−銀合金皮膜の銀比率:28.2%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
2−ヒドロキシエタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
2−ヒドロキシエタンスルホン酸 :1.30モル/L
チオ尿素 :1.50モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンノニルフェニルエーテル(EO12モル) :12.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:3分
(f)上層
下地層と上層の皮膜全体の膜厚:0.30μm
下地層と上層の皮膜全体での銀比率:3.7%
(7) Example 7
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.005 mol / L
2-hydroxyethanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 20 seconds
(c) Underlayer thickness of tin-silver alloy film: 0.07 μm
Silver ratio of tin-silver alloy film: 28.2%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous 2-hydroxyethanesulfonate (as Sn 2+ ): 0.35 mol / L
2-hydroxyethanesulfonic acid: 1.30 mol / L
Thiourea: 1.50 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene nonylphenyl ether (EO12 mol): 12.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 3 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 0.30 μm
Silver ratio of the entire underlayer and upper layer: 3.7%
(8)実施例8
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.005モル/L
メタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.08μm
スズ−銀合金皮膜の銀比率:10.1%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:5分
(f)上層
下地層と上層の皮膜全体の膜厚:0.85μm
下地層と上層の皮膜全体での銀比率:1.1%
(8) Example 8
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.005 mol / L
Methanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.08 μm
Silver ratio of tin-silver alloy film: 10.1%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 5 minutes
(f) Upper layer Total film thickness of the underlayer and upper layer: 0.85 μm
Silver ratio of the entire underlayer and upper layer: 1.1%
(9)実施例9
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.015モル/L
メタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:50℃
メッキ時間:120秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.25μm
スズ−銀合金皮膜の銀比率:80.5%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:3分
(f)上層
下地層と上層の皮膜全体の膜厚:0.61μm
下地層と上層の皮膜全体での銀比率:55.3%
(9) Example 9
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.015 mol / L
Methanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 50 ° C
Plating time: 120 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.25 μm
Silver ratio of tin-silver alloy film: 80.5%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 3 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 0.61 μm
Silver ratio of the entire underlayer and upper layer: 55.3%
(13)比較例1
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解銀メッキにより銀皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解銀メッキによる下地層の形成
下記(a)の組成の無電解銀メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)の銀メッキ皮膜(下地層)を形成した。
(a)無電解銀メッキ浴
メタンスルホン酸銀(Ag+として) :0.06モル/L
メタンスルホン酸 :1.00モル/L
チオ尿素 :0.30モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :5.0g/L
(b)浸漬条件
メッキ浴温:50℃
メッキ時間:60秒
(c)下地層
銀皮膜の膜厚:0.10μm
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.23μm
下地層と上層の皮膜全体での銀比率:1.3%
(13) Comparative Example 1
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (a) below, after forming an underlayer of a silver film on the object to be plated by electroless silver plating, the following As shown in (b), a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless silver plating An electroless silver plating bath having the following composition (a) is constructed, and a silver plating film (c) below (c) is formed on the object to be plated under the conditions (b) below. Underlayer) was formed.
(a) Electroless silver plating bath Silver methanesulfonate (as Ag + ): 0.06 mol / L
Methanesulfonic acid: 1.00 mol / L
Thiourea: 0.30 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 5.0 g / L
(b) Immersion conditions Plating bath temperature: 50 ° C
Plating time: 60 seconds
(c) Underlayer Film thickness of silver film: 0.10 μm
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.23 μm
Silver ratio of the entire underlayer and upper layer: 1.3%
(14)比較例2
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.15モル/L
メタンスルホン酸銀(Ag+として) :0.05モル/L
メタンスルホン酸 :1.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.06μm
スズ−銀合金皮膜の銀比率:98.1%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.25μm
下地層と上層の皮膜全体での銀比率:1.8%
(14) Comparative example 2
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.15 mol / L
Silver methanesulfonate (as Ag + ): 0.05 mol / L
Methanesulfonic acid: 1.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.06 μm
Silver ratio of tin-silver alloy film: 98.1%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.25 μm
Silver ratio of the entire underlayer and upper layer: 1.8%
(15)比較例3
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.003モル/L
メタンスルホン酸 :1.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:45秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.11μm
スズ−銀合金皮膜の銀比率:2.8%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.30μm
下地層と上層の皮膜全体での銀比率:0.09%
(15) Comparative Example 3
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.003 mol / L
Methanesulfonic acid: 1.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 45 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.11 μm
Silver ratio of tin-silver alloy film: 2.8%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.30 μm
Silver ratio of the entire underlayer and upper layer: 0.09%
(16)比較例4
COF(Chip on Film;ESPANEX;新日鐵化学社製)を被メッキ物として、下記(イ)に示す通り、被メッキ物上に無電解スズ−銀合金メッキによりスズ−銀合金皮膜の下地層を形成したのち、下記(ロ)に示す通り、前記下地層の上に無電解スズメッキによりスズ皮膜(上層)を形成した。
(イ)無電解スズ−銀合金メッキによる下地層の形成
下記(a)の組成の無電解スズ−銀合金メッキ浴を建浴し、下記(b)の条件で被メッキ物上に下記(c)のスズ−銀合金メッキ皮膜(下地層)を形成した。
(a)無電解スズ−銀合金メッキ浴
メタンスルホン酸第一スズ(Sn2+として) :0.35モル/L
メタンスルホン酸銀(Ag+として) :0.005モル/L
メタンスルホン酸 :0.30モル/L
チオ尿素 :1.40モル/L
次亜リン酸 :0.75モル/L
ポリオキシエチレンオクチルフェニルエーテル(EO10モル) :15.0g/L
(b)浸漬条件
メッキ浴温:30℃
メッキ時間:3秒
(c)下地層
スズ−銀合金皮膜の膜厚:0.02μm
スズ−銀合金皮膜の銀比率:33.3%
(ロ)無電解スズメッキによる上層の形成
下記(d)の組成の無電解スズメッキ浴を建浴して、下記(e)の条件で下地層の上にスズメッキ皮膜(上層)を形成した。下記(f)には下地と上層の皮膜全体の膜厚及び銀の比率を示す。
(d)無電解スズメッキ浴による上層の形成
メタンスルホン酸第一スズ(Sn2+として) :0.30モル/L
メタンスルホン酸 :1.00モル/L
フェノールスルホン酸 :0.50モル/L
チオ尿素 :2.00モル/L
次亜リン酸 :0.50モル/L
ポリオキシエチレンドデシルフェニルエーテル(EO8モル) :10.0g/L
(e)メッキ条件
メッキ浴温:65℃
メッキ時間:15分
(f)上層
下地層と上層の皮膜全体の膜厚:1.38μm
下地層と上層の皮膜全体での銀比率:1.1%
(16) Comparative Example 4
Using COF (Chip on Film; ESPANEX; manufactured by Nippon Steel Chemical Co., Ltd.) as an object to be plated, as shown in (b) below, an underlayer of a tin-silver alloy film is formed on the object by electroless tin-silver alloy plating. Then, as shown in (b) below, a tin film (upper layer) was formed on the underlayer by electroless tin plating.
(A) Formation of an underlayer by electroless tin-silver alloy plating An electroless tin-silver alloy plating bath having the following composition (a) is constructed, and the following (c) ) Tin-silver alloy plating film (underlayer).
(a) Electroless tin-silver alloy plating bath Stannous methanesulfonate (as Sn 2+ ): 0.35 mol / L
Silver methanesulfonate (as Ag + ): 0.005 mol / L
Methanesulfonic acid: 0.30 mol / L
Thiourea: 1.40 mol / L
Hypophosphorous acid: 0.75 mol / L
Polyoxyethylene octyl phenyl ether (EO 10 mol): 15.0 g / L
(b) Immersion conditions Plating bath temperature: 30 ° C
Plating time: 3 seconds
(c) Underlayer: Tin-silver alloy film thickness: 0.02 μm
Silver ratio of tin-silver alloy film: 33.3%
(B) Formation of upper layer by electroless tin plating An electroless tin plating bath having the following composition (d) was erected, and a tin plating film (upper layer) was formed on the underlayer under the following conditions (e). In the following (f), the film thickness of the whole film of the base and the upper layer and the ratio of silver are shown.
(d) Formation of upper layer by electroless tin plating bath Stannous methanesulfonate (as Sn 2+ ): 0.30 mol / L
Methanesulfonic acid: 1.00 mol / L
Phenolsulfonic acid: 0.50 mol / L
Thiourea: 2.00 mol / L
Hypophosphorous acid: 0.50 mol / L
Polyoxyethylene dodecyl phenyl ether (EO8 mol): 10.0 g / L
(e) Plating conditions Plating bath temperature: 65 ° C
Plating time: 15 minutes
(f) Upper layer Total film thickness of the underlying layer and the upper layer: 1.38 μm
Silver ratio of the entire underlayer and upper layer: 1.1%
《上層のスズ皮膜の評価試験例》
以上の通り、上記実施例1〜12及び比較例1〜4では、無電解メッキにより下地皮膜の上層に各スズ皮膜を形成したが、この上層のスズ皮膜について、ピンホールの発生防止性能、並びにスズホイスカーの発生防止性能を次の要領で評価した。
(1)ピンホール発生防止性能
走査型電子顕微鏡を用いて、形成直後の上層スズ皮膜表面を微視観察し、次の基準でピンホールの発生防止性能の優劣を評価した。
○:上層スズ皮膜にピンホールは発生しなかった。
×:上層スズ皮膜にピンホールが発生した。
<< Evaluation test example of upper tin film >>
As described above, in Examples 1 to 12 and Comparative Examples 1 to 4 described above, each tin film was formed on the upper layer of the base film by electroless plating. The prevention performance of tin whiskers was evaluated as follows.
(1) Pinhole generation prevention performance Using a scanning electron microscope, the surface of the upper tin film immediately after formation was microscopically observed, and the superiority or inferiority of the pinhole generation prevention performance was evaluated according to the following criteria.
A: No pinhole was generated in the upper tin film.
×: Pinholes occurred in the upper tin film.
(2)スズホイスカーの発生防止性能
走査型電子顕微鏡を用いて、形成直後の上層皮膜表面にホイスカーの発生がない状態を確認したうえで、室温下で500時間放置した後、試料の同一視認部位を微視観察して、次の基準でホイスカーの発生防止性能の優劣を評価した。
○:同一視認部位でのホイスカーの発生本数はゼロであった。
×:同視認部位に長さ5μm以上のホイスカーが見い出された。
(2) Tin whisker generation prevention performance Using a scanning electron microscope, after confirming that there is no whisker on the surface of the upper layer immediately after formation, the sample was left at room temperature for 500 hours, and then the same visible part of the sample The whisker generation prevention performance was evaluated based on the following criteria.
○: The number of whiskers generated at the same visually recognized site was zero.
X: A whisker having a length of 5 μm or more was found in the visually recognizing part.
下表はその試験結果である。
ピンホール防止性 ホイスカー防止性
実施例1 ○ ○
実施例2 ○ ○
実施例3 ○ ○
実施例4 ○ ○
実施例5 ○ ○
実施例6 ○ ○
実施例7 ○ ○
実施例8 ○ ○
実施例9 ○ ○
比較例1 × ○
比較例2 × ○
比較例3 ○ ×
比較例4 ○ ×
The table below shows the test results.
Pinhole prevention property Whisker prevention Example 1 ○ ○
Example 2 ○ ○
Example 3 ○ ○
Example 4 ○ ○
Example 5
Example 6 ○ ○
Example 7 ○ ○
Example 8
Example 9
Comparative Example 1 × ○
Comparative Example 2 × ○
Comparative Example 3 ○ ×
Comparative Example 4 ○ ×
上表を見ると、下地皮膜が純粋の銀皮膜である比較例1では、上層のスズ皮膜にホイスカーの発生は認められなかったが、ピンホールが発生し、ハンダ付けに際してハンダ濡れ性や接合強度を損なう恐れがあることが明らかになった。
これに対して、下地層をスズ−銀合金皮膜にした実施例1〜9では、上層のスズ皮膜にホイスカー及びピンホールは発生しなかった。
これにより、上層のスズ皮膜にピンホールを発生させることなく、スズホイスカーを良好に防止するためには、下地層に銀皮膜ではなくスズ−銀合金皮膜を形成する必要性が確認できた。
From the above table, whilst no whisker was observed in the upper tin film in Comparative Example 1 where the base film was a pure silver film, pinholes were generated, and solder wettability and bonding strength during soldering. It has become clear that there is a risk of damage.
In contrast, in Examples 1 to 9 in which the underlayer was a tin-silver alloy film, whiskers and pinholes were not generated in the upper tin film.
Thereby, in order to prevent a tin whisker satisfactorily without generating a pinhole in the upper tin film, it was confirmed that it was necessary to form a tin-silver alloy film instead of a silver film on the underlayer.
また、スズ−銀合金皮膜を下地層とした場合でも、下地皮膜の銀比率が本発明の適正範囲の上限(90%)を越える比較例2では、やはり上記比較例1と同様に、上層のスズ皮膜にピンホールが発生した。逆に、下地皮膜の銀比率が同適正範囲の下限(5%)より少ない比較例3では、上層のスズ皮膜にピンホールは認められなかったが、スズホイスカーが発生した。
従って、上層のスズ皮膜においてピンホール及びホイスカーの発生を防止するには、下地層をスズ−銀合金皮膜にするだけでは充分でなく、下地層の銀の比率を本発明の適正範囲内に特定化することの必要性が確認できた。
Further, even when the tin-silver alloy film is used as the underlayer, in Comparative Example 2 in which the silver ratio of the undercoat exceeds the upper limit (90%) of the appropriate range of the present invention, as in Comparative Example 1 above, Pinholes occurred in the tin film. Conversely, in Comparative Example 3 in which the silver ratio of the base film was less than the lower limit (5%) of the appropriate range, no pinhole was observed in the upper tin film, but tin whiskers were generated.
Therefore, in order to prevent the occurrence of pinholes and whiskers in the upper tin film, it is not sufficient to make the underlayer a tin-silver alloy film, and the silver ratio of the underlayer is specified within the proper range of the present invention. The necessity of making it possible was confirmed.
一方、下地層のスズ−銀合金皮膜の銀比率が本発明の適正範囲内にあっても、下地層の膜厚が本発明の適正範囲の下限(0.025μm)より薄い比較例4では、やはり上記比較例3と同じく、上層のスズ皮膜にホイスカーが発生した。
従って、上層のスズ皮膜においてピンホール及びホイスカーの発生を防止するには、下地層(スズ−銀合金皮膜)の銀の比率を本発明の適正範囲に特定化することに加えて、下地層の膜厚を所定の膜厚以上に制御することの必要性が明らかになった。尚、下地層の膜厚は実施例1〜9に見るように、0.5μm以下のごく薄い場合でもホイスカー発生の防止を良好に担保できる。
On the other hand, even if the silver ratio of the tin-silver alloy film of the underlayer is within the proper range of the present invention, in Comparative Example 4 where the film thickness of the underlayer is thinner than the lower limit (0.025 μm) of the proper range of the present invention, As in the case of Comparative Example 3, whiskers were generated in the upper tin film.
Therefore, in order to prevent the occurrence of pinholes and whiskers in the upper tin film, in addition to specifying the silver ratio of the underlayer (tin-silver alloy film) within the proper range of the present invention, The necessity of controlling the film thickness to a predetermined film thickness or more became clear. In addition, even if the film thickness of a base layer is very thin of 0.5 micrometer or less as seen in Examples 1-9 , prevention of whisker generation can be ensured favorably.
次いで、実施例1〜9を詳細に検討するに、下地層がスズ−銀合金皮膜であるいずれの実施例でも、上層のスズ皮膜のホイスカーとピンホールの発生を防止することができる。この場合、下地層の膜厚、及び下地と上層の皮膜全体の膜厚が本発明の適正範囲内で変化しても、或は、下地層の銀の比率が本発明の適正範囲内で変化しても、ホイスカー防止性能とピンホール防止性能を良好に担保できることが分かる。
特に、実施例8に見るように、銀の比率が10%と少ないスズ−銀合金皮膜を下地層として形成し、或は、実施例4、6に見るように、下地のスズ−銀合金皮膜の膜厚をごく薄い0.06μmで形成した場合でも、上層のスズ皮膜のホイスカーとピンホールの防止性能の両方を担保できる点は注目すべきである。
尚、本試験例の対象はホイスカーとピンホールの発生防止評価であるが、これらに加えて、上層スズ皮膜のハンダ濡れ性を調べたところ、下地と上層の皮膜全体での銀の比率が50%以内の実施例(つまり本発明2の要件を満たす実施例)では、この要件から外れる実施例9に比べて、ハンダ濡れ性はより良い評価であった。
Next, when Examples 1 to 9 are examined in detail, in any of the Examples in which the underlayer is a tin-silver alloy film, it is possible to prevent whisker and pinholes in the upper tin film. In this case, even if the film thickness of the underlayer and the film thickness of the entire film of the underlayer and the upper layer change within the appropriate range of the present invention, or the silver ratio of the underlayer changes within the appropriate range of the present invention. Even so, it can be seen that the whisker prevention performance and the pinhole prevention performance can be favorably secured.
In particular, as seen in Example 8, a tin-silver alloy film having a low silver ratio of 10% was formed as an underlayer, or as seen in Examples 4 and 6 , the underlying tin-silver alloy film was formed. It should be noted that both the whisker of the upper tin film and the prevention of pinholes can be secured even when the film is formed with a very thin film thickness of 0.06 μm.
In addition, although the object of this test example is a whisker and pinhole generation prevention evaluation, in addition to these, when the solder wettability of the upper tin film was examined, the ratio of silver in the entire base film and the upper film was 50. % Of the examples (that is, examples satisfying the requirement of the present invention 2 ) were evaluated with better solder wettability than Example 9 that deviated from this requirement.
Claims (4)
当該下地皮膜の上に無電解スズメッキ皮膜(上層皮膜)を形成するスズホイスカーの防止方法であって、
下地皮膜の膜厚が0.025〜0.5μmであり、且つ、下地と上層皮膜の合計膜厚が0.1〜6μmであり、
下地の合金皮膜中の銀の組成比率が5〜90重量%であり、
上記被メッキ物が銅張り積層基板、チップ・オン・フィルム(COF)又はTABのフィルムキャリアであることを特徴とする無電解メッキによるスズホイスカーの防止方法。 After forming a base film made of an electroless tin-silver alloy plating film on the object to be plated,
A method for preventing a tin whisker that forms an electroless tin plating film (upper layer film) on the base film,
The film thickness of the base film is 0.025 to 0.5 μm, and the total film thickness of the base film and the upper film is 0.1 to 6 μm,
The composition ratio of silver in the underlying alloy film is 5 to 90% by weight,
A method for preventing tin whiskers by electroless plating, wherein the object to be plated is a copper-clad laminate, a chip-on-film (COF), or a TAB film carrier.
下地皮膜と上層皮膜の膜厚比率が、B(上層)/A(下地)=1.2〜30であることを特徴とする請求項1又は2に記載の無電解メッキによるスズホイスカーの防止方法。 Tin - a film thickness A of the base film made of silver alloy, the thickness B of the upper layer coating consisting of tin,
The method for preventing tin whiskers by electroless plating according to claim 1 or 2 , wherein the film thickness ratio of the undercoat and the upper coat is B (upper layer) / A (undercoat) = 1.2 to 30. .
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