JP5313547B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5313547B2 JP5313547B2 JP2008123561A JP2008123561A JP5313547B2 JP 5313547 B2 JP5313547 B2 JP 5313547B2 JP 2008123561 A JP2008123561 A JP 2008123561A JP 2008123561 A JP2008123561 A JP 2008123561A JP 5313547 B2 JP5313547 B2 JP 5313547B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 33
- 239000004065 semiconductor Substances 0.000 title claims description 32
- 238000000034 method Methods 0.000 claims abstract description 81
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 66
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 64
- 238000005121 nitriding Methods 0.000 claims abstract description 55
- 230000008569 process Effects 0.000 claims abstract description 52
- 238000005530 etching Methods 0.000 claims abstract description 39
- 239000010410 layer Substances 0.000 claims description 95
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 69
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 64
- 238000002955 isolation Methods 0.000 claims description 44
- 229910052757 nitrogen Inorganic materials 0.000 claims description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 30
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 18
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 239000011229 interlayer Substances 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 11
- 229920005591 polysilicon Polymers 0.000 claims description 10
- 238000001039 wet etching Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 20
- 229910052710 silicon Inorganic materials 0.000 abstract description 20
- 239000010703 silicon Substances 0.000 abstract description 20
- 238000009413 insulation Methods 0.000 abstract 2
- 238000000926 separation method Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 13
- 229910004298 SiO 2 Inorganic materials 0.000 description 10
- 229910021417 amorphous silicon Inorganic materials 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 8
- 230000014759 maintenance of location Effects 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 6
- 238000009616 inductively coupled plasma Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- MFHHXXRRFHXQJZ-UHFFFAOYSA-N NONON Chemical compound NONON MFHHXXRRFHXQJZ-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- -1 nitrogen ions Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Description
前記電極層と前記素子分離膜とが露出した状態で、これらの部位に窒素含有プラズマを作用させることにより、前記電極層および前記素子分離膜の表面を窒化処理してそれぞれ窒素含有層を形成するプラズマ窒化処理工程と、
前記電極層の表面に形成された窒素含有層を残しながら前記素子分離膜の表面に形成された窒素含有層を選択的に除去する選択エッチング工程と、
を含むことを特徴とする。
以下、本発明の実施の形態について図面を参照して詳細に説明する。図1(a)〜(c)は、本実施の形態に係る半導体装置の製造工程の一部を説明する図面である。図1(a)に示したように、シリコン基板101には、例えばSTI(Shallow Trench Isolation)により凹部(トレンチ)が形成され、その内部に二酸化珪素(SiO2)からなる素子分離膜103が埋め込まれてアクティブ領域とフィールド領域とが区画されている。また、シリコン基板101の表面には、二酸化珪素(SiO2)からなる絶縁膜105が形成され、その上にパターニングされたポリシリコンからなる電極層107が形成されている。
(1)ウエットエッチング条件;
ウエットエッチングには、エッチング液として酸化珪素を溶解し、窒化珪素を溶解し難い希フッ酸(DHF)を用いることが好ましい。この際に使用する希フッ酸の濃度としては、窒素含有層の厚みにより一定の幅が存在するが、例えば0.07%以上1%以下の範囲内が好ましく、0.1%以上0.3%以下の範囲内がより好ましい。また、希フッ酸による処理時間は、窒素含有層の厚みや希フッ酸の濃度により一定の幅が存在するが、窒化酸化珪素膜111を除去し、かつ窒化珪素膜109を出来るだけ残存させる選択エッチング処理の時間的制御性(つまり、時間的マージン)を考慮して例えば10秒以上が好ましく、30秒以上300秒以下の範囲内がより好ましく、150秒以上210秒以下の範囲内が望ましい。
プラズマ窒化処理は、生成されるプラズマの電子温度がウエハ表面で0.7eV以上2eV以下であり、制御性良く数nm(例えば2nm以上5nm以下)の厚さ(深さ)範囲で、かつ一定レベル以上の比較的高濃度(例えば35atom%以上、好ましくは40atom%以上の濃度)で窒素を導入できる方法を採用することが好ましい。このような観点から、本実施の形態では、プラズマ窒化処理に、複数のスロットを有する平面アンテナ(例えばRLSA;ラジアルラインスロットアンテナ)により処理室内にマイクロ波を導入してマイクロ波励起プラズマを形成させるプラズマ処理装置を用いる。なお、プラズマ窒化処理には、誘導結合プラズマ(ICP;Inductively Coupled plasma)方式のプラズマ処理装置を利用することも好ましい。
載置台の温度;500℃
マイクロ波パワー;1500W
マイクロ波パワー密度;2.1W/cm2(透過板の面積1cm2あたり)
Arガス流量;1000mL/min(sccm)
N2ガス流量;200mL/min(sccm)
N2の流量割合(N2/Ar+N2の百分率);16.7%
処理圧力;20Pa
処理時間;90秒
Arガス流量;1000mL/min(sccm)
N2ガス流量;200mL/min(sccm)
N2の流量割合(N2/Ar+N2の百分率);16.7%
処理圧力;20Pa
処理時間;30秒
Arガス流量;980mL/min(sccm)
N2ガス流量;20mL/min(sccm)
N2の流量割合(N2/Ar+N2の百分率);2%
処理圧力;20Pa
処理時間;30秒
Arガス流量;980mL/min(sccm)
N2ガス流量;20mL/min(sccm)
N2の流量割合(N2/Ar+N2の百分率);2%
処理圧力;67Pa
処理時間;60秒
Arガス流量;980mL/min(sccm)
N2ガス流量;20mL/min(sccm)
N2の流量割合(N2/Ar+N2の百分率);2%
処理圧力;127Pa
処理時間;90秒
Arガス流量;980mL/min(sccm)
N2ガス流量;20mL/min(sccm)
N2の流量割合(N2/Ar+N2の百分率);2%
処理圧力;400Pa
処理時間;120秒
次に、図4から図10を参照しながら、本発明の半導体装置の製造方法を不揮発性メモリの製造工程に適用した場合について説明する。図4は、本発明の製造方法を適用して製造可能なフラッシュメモリの概略構成を示す断面図である。このフラッシュメモリ200は、フローティングゲート電極とコントロールゲート電極の間に介在する層間容量膜として、NONON(窒化珪素膜−酸化珪素膜−窒化珪素膜−酸化珪素膜−窒化珪素膜)の積層構造を有するものである。
Claims (2)
- 酸化珪素を主成分とする素子分離膜によってフィールド領域とアクティブ領域が画定され、前記アクティブ領域に、ポリシリコンを主成分とする電極層と、該電極層に接して形成された窒素含有層と、を有する半導体装置の製造方法であって、
前記電極層と前記素子分離膜とが露出した状態で、これらの部位に窒素含有プラズマを作用させることにより、前記電極層および前記素子分離膜の表面を窒化処理してそれぞれ窒素含有層を形成するプラズマ窒化処理工程と、
前記電極層の表面に形成された窒素含有層を残しながら前記素子分離膜の表面に形成された窒素含有層を選択的に除去する選択エッチング工程と、を含み、
前記素子分離膜の表面に形成された窒素含有層が窒化酸化珪素膜であり、
前記電極層の表面に形成された窒素含有層が窒化珪素膜であり、
前記プラズマ窒化処理工程における処理圧力が1.3Pa以上667Pa以下の範囲内であり、
前記プラズマ窒化処理工程により前記電極層に形成された窒素含有層中の窒素濃度が35atom%以上45atom%以下の範囲内であり、
前記選択エッチング工程を、0.07%以上1%以下の範囲内の濃度の希フッ酸溶液を用いてウエットエッチング処理によって行うことを特徴とする半導体装置の製造方法。 - 前記電極層が不揮発性メモリのフローティングゲート電極であり、前記窒化珪素膜が該フローティングゲート電極とコントロールゲート電極との間に介在する層間容量膜の一部分を構成するものであることを特徴とする請求項1に記載の半導体装置の製造方法。
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