JP5299022B2 - Method for manufacturing optical article - Google Patents

Method for manufacturing optical article Download PDF

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JP5299022B2
JP5299022B2 JP2009078377A JP2009078377A JP5299022B2 JP 5299022 B2 JP5299022 B2 JP 5299022B2 JP 2009078377 A JP2009078377 A JP 2009078377A JP 2009078377 A JP2009078377 A JP 2009078377A JP 5299022 B2 JP5299022 B2 JP 5299022B2
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multilayer film
convex
optical
blade
optical article
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JP2010230974A (en
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健彦 上原
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セイコーエプソン株式会社
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing optical articles by which an optical article having highly accurate optical characteristics can be obtained, without exerting influence on the optical characteristics. <P>SOLUTION: In the method for manufacturing an optical article which is obtained by forming a multilayer film 12, at least on one of a first optical substrate 11 and a second optical substrate and bonding the first optical substrate and the second optical substrate together via the multilayer film 12, a shock applying member 20 is slid along the surface of the multilayer film 12, formed at least on one of the first optical substrate 11 and the second optical substrate to peel off projected portions 121 formed on the surface of the multilayer film 12; a plasma polymerization film is formed at least on any one of the surface of the multilayer film 12; the first optical substrate 11 and the second optical substrate and these films are bonded to each other. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a method for manufacturing an optical article.

Conventionally, when manufacturing a polarization conversion element, it is known to form a plurality of optical thin films in order to increase light reflection efficiency. As a method for forming this optical thin film, a vapor deposition method such as PVD or plasma CVD is used (see Patent Document 1).
Also, a method of removing irregularities caused by foreign matters on the optical thin film with a brush (Patent Document 2)
And a method of removing by ion sputtering (see Patent Document 3) is known.

JP-A-10-90520 JP 11-337970 A JP 2006-59835 A

When forming an optical thin film on an optical substrate by vapor deposition, for example, in electron beam heating vapor deposition, if the emission current of the electron beam is increased, excessive energy is added to the evaporation source, the evaporation of the evaporation source is flourishing, and local bumping occurs. It may happen. When this bumping (so-called splash) occurs, bumps fly to the surface of the optical substrate, and a thin film is sequentially deposited on the bumps,
It is formed in a protruding shape and is scattered in the multilayer film as a convex portion.

When an optical article is manufactured by molecularly bonding a plurality of optical substrates with surface-activated plasma polymerization films, if the above-described protruding protrusions are present in the multilayer film formed on the optical substrate, bonding failure occurs. . Since the convex portions prevent the bonding surfaces from being sufficiently close to each other, the molecular bonding cannot be made strong.
When joining with an optical adhesive as in Document 1, the interval between the joining surfaces, that is, the film thickness of the optical adhesive is several μm. However, in the case of molecular bonding, since the film thickness of the plasma polymerization film is between several nm to several hundred nm,
The distance between the bonding surfaces cannot be sufficiently close, and stable molecular bonding cannot be performed.

Also, when removing this convex part by physical processing such as polishing, brush, ion sputtering,
There is a risk of causing scratches, cracks, etc. on the entire thin film. These scratches and cracks adversely affect the optical characteristics of the optical component.

The objective of this invention is providing the manufacturing method of the optical article from which the optical article which does not affect an optical characteristic and has a highly accurate optical characteristic is obtained.

[Application Example 1]
An optical article manufacturing method according to this application example is an optical article manufacturing method in which a multilayer film serving as an optical functional film is formed on at least one surface of a plurality of optical substrates, and molecular bonding is performed with the multilayer film interposed therebetween. , Sliding the impact imparting member along the surface of the multilayer film to detach the convex part of the multilayer film,
Forming a plasma polymerized film on at least one surface of the bonding surface, activating the surface of the bonding surface;
The optical substrates on which the surfaces of the bonding surfaces are activated are bonded together to form molecular bonding.

In the method of manufacturing an optical article according to the above application example, the impact imparting member is slid along the surface of the multilayer film, so that the impact imparting member collides with the convex portion protruding from the surface of the multilayer film, and the convex portion is Detach from the membrane.
When the convex portion has a size of about several μm and the impact applying member is a member having a length of about several tens of millimeters, when the convex portion and the impact applying member collide, a significantly large stress is locally concentrated on the small convex portion. Will do. Due to this large stress, the convex portion can be easily separated from the multilayer film and detached.
Under this condition, when the mass of the convex portion is negligibly small (on the order of a few thousand) compared to the mass of the impact imparting member, the impact is applied to the convex portion with energy several thousand times that of the impact imparting member from the law of conservation of momentum. Can be given.
However, excessive kinetic energy of the impact imparting member having a mass several thousand times that of the convex portion is locally concentrated and transmitted to the convex portion as collision energy.
Therefore, in this application example, when the impact applying member collides with the convex portion, the convex portion is easily separated,
Can be desorbed.

Thereby, the surface of a multilayer film turns into a surface without a protrusion. Therefore, when a plurality of optical substrates are bonded using a plasma polymerized film, they can be brought into close contact with each other without being hindered by protrusions, and a strong molecular bond can be formed.
Therefore, in this application example, it is possible to achieve strong bonding and to obtain an optical article having highly accurate optical characteristics.

[Application Example 2]
In the method for manufacturing an optical article according to this application example, it is preferable that the impact imparting member is curved along the surface shape of the multilayer film.

In the method for manufacturing an optical article according to the above application example, the impact imparting member is curved along the surface shape of the multilayer film, so that the optical substrate warps due to in-plane stress generated by forming the multilayer film on the optical substrate, and the multilayer film Even when is a curved surface instead of a flat surface, the impact applying member can be slid evenly over the entire surface.
Therefore, even if the multilayer film is a curved surface, the impact applying member can be removed by colliding with all the convex portions.

[Application Example 3]
In the method for manufacturing an optical article according to this application example, it is preferable that the impact imparting member is a member having a sharp wedge-shaped cross section at the tip.

In the manufacturing method of the optical article according to the application example, since the tip of the impact imparting member is a member having a sharp and wedge-shaped cross section, when the impact imparting member collides with the convex portion, the tip is sharp. The collision area between the impact applying member and the convex portion is extremely small.
For this reason, the pressure to the surface direction which a convex part receives can be made very high.
Therefore, in this application example, when the convex portion collides with the impact applying member, the convex portion can be easily separated and detached without applying a strong force to the impact applying member.

[Application Example 4]
In the method for manufacturing an optical article according to this application example, it is preferable to use a wire as the impact applying member.

In the method for manufacturing an optical article according to the application example, since the wire is used as the impact applying member, it can be easily bent along the surface shape of the multilayer film.
Further, since the linear wire collides with the convex portion, the convex portion can be easily separated and detached without applying a strong force.

[Application Example 5]
In the method for manufacturing an optical article according to this application example, it is preferable that after removing the convex portions on the surface of the multilayer film, an adhesive tape is applied to the surface of the multilayer film, and further the adhesive tape is peeled off.

In the method for manufacturing an optical article according to the application example, after the convex portion is detached, an adhesive tape is applied to the surface of the multilayer film, and the adhesive tape is further peeled off.
For this reason, after the impact imparting member is slid, if the convex part detached on the multilayer film surface remains on the multilayer film surface due to static electricity or the like, the detached convex part can be obtained by applying an adhesive tape to the multilayer film surface. Can be transferred to the adhesive tape, and the adhesive tape can be peeled from the adhesive tape to remove the convex portions on the surface of the multilayer film.
Therefore, the surface where the detached convex portion does not remain on the surface of the multilayer film can be obtained.

[Application Example 6]
In the method of manufacturing an optical article according to this application example, it is preferable that the impact imparting member is held by a rotatable jig that can freely change the direction of sliding along the surface of the multilayer film.

In the method of manufacturing an optical article according to the application example, the impact imparting member is held by a rotatable jig that can freely change the direction of sliding along the surface of the multilayer film.
It can be slid again from a direction shifted by 90 ° from the direction once slid.
For this reason, depending on the protruding shape of the convex portion, when the impact imparting member is not sufficiently detached even if the impact imparting member is slid from one direction (for example, a convex portion having a sharp surface on the side on which the impact imparting member is adjacent). If there is, the impact force due to the collision with the impact imparting member will escape in the thickness direction, so even if it is not sufficiently applied in the surface direction), the jig is rotated to slide the impact imparting member from a different direction. Therefore, the convex portion can be detached more reliably.
In addition, since it is only necessary to rotate the jig, there is no need to remove the optical substrate on which the convex portion is formed from a predetermined position, change the orientation, and place it again, and the workability is also good. it can.

The expanded sectional view of the location in which the convex part was formed in the multilayer film formed in the glass substrate in 1st Embodiment of this invention. Schematic showing the state which slides the braid | blade in 1st Embodiment of this invention on a multilayer film. The expanded sectional view showing the state which slides the braid | blade in 1st Embodiment of this invention on a multilayer film. The expanded sectional view showing a mode that the braid | blade in 1st Embodiment of this invention remove | deviates the convex part on a multilayer film. The expanded sectional view showing the state which affixes and peels an adhesive tape on the multilayer film in 1st Embodiment of this invention. The expanded sectional view showing the state which formed the plasma polymerization film in the multilayer film after the detachment | leave of the convex part in 1st Embodiment of this invention. The schematic diagram which shows the state which joined the glass substrate and crystal plate in 1st Embodiment of this invention. The schematic perspective view of the convex part removal apparatus which slides the braid | blade in 1st Embodiment of this invention. The sectional side view of the convex part removal apparatus in 1st Embodiment of this invention. Schematic showing the state which slides the wire in 2nd Embodiment of this invention on a multilayer film. The expanded sectional view showing the state which slides the wire in 2nd Embodiment of this invention on a multilayer film. The expanded sectional view showing a mode that the braid | blade in 2nd Embodiment of this invention remove | deviates the convex part on a multilayer film. The sectional side view of the convex part removal apparatus in the modification of this invention.

A first embodiment will be described with reference to FIGS.
In addition, what joined the glass substrate 11 as a 1st optical substrate and the quartz plate 13 as a 2nd optical substrate shown in FIG. 7 is a partial structure of a polarization conversion element, but in order to simplify this, Is described as a polarization conversion element 1 as an optical article.

[Multilayer film formation process]
The multilayer film 12 is formed on the optical substrate by a vapor deposition apparatus equipped with electron beam heating. This multilayer film 12
Is a polarization separation film made of a derivative multilayer film having a polarization separation action as an example, and layers of different materials, for example, a layer of titanium oxide (TiO 2 ) which is a high refractive material layer and a silicon oxide which is a low refractive material layer (SiO 2 ) layers are alternately laminated. These layers have a design example composed of 25 layers.
FIG. 1 is an enlarged cross-sectional view of a portion where a convex portion is formed in a multilayer film formed on the glass substrate of the present embodiment.
Based on FIG. 1, the multilayer film 12 in which the convex part 121 was formed is demonstrated.
As shown in FIG. 1, in the case of forming a multilayer film 12 by depositing a thin film on a glass substrate 11 as a flat optical substrate, when an electron beam emission current is increased, an evaporation source is increased when the electron beam is heated and evaporated. Excessive energy is applied, evaporation of the evaporation source becomes active, and bumping may occur locally.
A projection 121 is formed on the surface of the multilayer film 12 with the splash projected by the projection coming from the bumps as a nucleus.

Further, as shown in FIG. 1, when the splash is generated when a thin film close to the glass substrate 11 is deposited, the thin film is further deposited on the thin film, so that the convex shape becomes larger.
Further, in order to simplify the description in FIG. 1, the multilayer film 12 has a three-layer structure, but is actually formed of a multilayer film 12 (for example, 50 layers) having a larger number of layers.

A method for removing the convex portion will be described with reference to FIGS.
FIG. 2 is a schematic view showing a state in which the blade according to the first embodiment of the present invention is slid on the multilayer film. FIG. 3 is an enlarged cross-sectional view showing a state in which the blade in the first embodiment of the present invention is slid on the multilayer film. FIG. 4 is an enlarged cross-sectional view showing how the blade in the first embodiment of the present invention detaches the convex portion on the multilayer film. FIG. 5 is an enlarged cross-sectional view showing a state in which an adhesive tape is bonded to the multilayer film and peeled off in the first embodiment of the present invention.

As shown in FIG. 2, the glass substrate 11 may be slightly bent due to the in-plane stress due to the tension of the vapor deposition surface by forming the multilayer film 12 by vapor deposition. Thereby, the planar shape of the multilayer film 12 may be similarly curved.
On the other hand, the blade 20 is a long plate-like member having a sharp wedge-shaped cross section, and has appropriate elasticity. The length of the blade 20 is longer than the length of one side of the glass substrate 11.
Specifically, the blade 20 is made of a stainless material (SUS304) having a length of 50 mm, a thickness of 0.2 mm to 0.6 mm, and a Young's modulus of 200 GPa. A configuration in which the sliding is performed at an angle of 20 ° can be exemplified.
The blade 20 preferably has a Young's modulus of 30 GPa to 300 GPa,
The angle of the tip with respect to the multilayer film 12 is preferably 15 ° to 75 °.
Then, when the blade 20 is brought into contact with the multilayer film 12, the blade 20 is brought into contact with the end portion of the glass substrate 11 so that the longitudinal direction is parallel to one side of the glass substrate 11.

In this state, as shown in FIG. 3, the blade 20 is slid along the multilayer film 12 from the end of the glass substrate 11 to the opposite end.
As a result, the blade 20 collides with the convex portions 121 scattered in the multilayer film 12.
Due to this collision, the convex portion 121 receives stress in the plane direction of the multilayer film 12. Moreover, since the tip of the blade 20 is sharp, the collision area with the convex portion 121 is extremely small. For this reason, the pressure which the convex part 121 receives from a collision location becomes a very big thing.
Further, the mass of the convex portion 121 is negligibly small compared to the mass of the blade 20, and the momentary collision energy at which the momentum of the sliding blade 20 is transmitted to the convex portion 121 becomes enormous.

Then, as shown in FIG. 4, since the convex portion 121 is instantaneously detached from the multilayer film 12, the multilayer film 12 around the convex portion 121 is peeled off from the glass substrate 11 without its impact being transmitted due to inertial force. There is nothing.
However, the convex portion 121 is formed starting from the bumped deformed portion A (FIG. 3) inside the multilayer film 12. In such a deformed portion A, stress due to the collision of the blade 20 is concentrated.
For this reason, when the convex part 121 is removed by the blade 20, the frequency of detaching from the deformed portion A is high. And thereby, the hollow B will be formed in the location from which the convex part 121 removed | separated.

Further, as shown in FIG. 5, after the blade 20 slides, an adhesive tape 50 (not shown) is applied to the multilayer film 12 and peeled off. As a result, even when the blade 20 slides and static electricity is generated in the multilayer film 12, even if the detached convex portion 121 remains on the multilayer film 12 due to electrostatic attraction, the multilayer film adheres to the adhesive tape 50. 12 will be removed.
Thereafter, the surface of the multilayer film is preferably ultrasonically cleaned using water, alcohol, an alkaline solution, or the like.

Next, a bonding process using a plasma polymerized film will be described with reference to FIGS.
FIG. 6 is an enlarged cross-sectional view illustrating a state in which a plasma polymerization film is formed on the multilayer film after the protrusions are detached in the first embodiment of the present invention. FIG. 7 is a schematic diagram showing a state in which the glass substrate and the crystal plate of the present embodiment are joined.

[Joint film forming step]
As shown in FIG. 6, the plasma polymerization film 30 is formed on the multilayer film 12 from which the convex portions 121 have been removed. In addition, the formation of the bonding film on the bonding surface of the optical substrate that does not have the multilayer film may be similarly performed.
In the bonding film forming step, the optical substrate is held on the first electrode of the chamber of the plasma polymerization apparatus (not shown). Then, a predetermined amount of oxygen is introduced into the chamber and a high frequency voltage is applied between the first electrode and the second electrode to activate the optical substrate itself (substrate activation).
Thereafter, a mixed gas of a source gas and a carrier gas is supplied into the chamber.
For example, the ratio of the raw material gas in the mixed gas (mixing ratio) is preferably set to about 20% or more and 70% or less, and more preferably about 30% or more and 60% or less. More preferred.
The frequency applied between the first electrode and the second electrode is not particularly limited, but is 1 to 100 MH.
It is preferably about z, and more preferably about 10 to 60 MHz. The output density of the high frequency is not particularly limited, but is preferably about 0.01 to 10 W / cm 2 , and preferably 0.1 to 1
More preferably, it is about W / cm 2 .
The pressure of the chamber during film formation is 133.3 × 10 −5 to 1333 Pa (1 × 10 −5 to
It is preferably about 10 Torr), and 133.3 × 10 −4 to 133.3 Pa (1 ×
More preferably, it is about 10 −4 to 1 Torr).
The raw material gas flow rate is preferably about 0.5 to 200 sccm, more preferably about 1 to 100 sccm.
The carrier gas flow rate is preferably about 5 to 750 sccm, more preferably about 10 to 500 sccm.
The treatment time is preferably about 1 to 10 minutes, more preferably about 4 to 7 minutes.
The temperature of the optical substrate is preferably 25 ° C. or higher, and more preferably 25 to 100 ° C.
By applying a high-frequency voltage between the first electrode and the second electrode, gas molecules existing between these electrodes are ionized to generate plasma. The plasma energy causes the molecules in the source gas to polymerize, and the polymer adheres to and deposits on the surface of the optical substrate or multilayer film. Thereby, a plasma polymerization film is formed on the joint surface.
The average thickness of the bonding layer is 10 to 1000 nm, and preferably 50 to 500 nm. If the average thickness of the bonding layer is less than 10 nm, sufficient bonding strength cannot be obtained, and 1000 n
When it exceeds m, the dimensional accuracy of the joined body is significantly lowered.

[Surface activation process]
The surface activation step includes, for example, a method of irradiating plasma, a method of contacting with ozone gas,
A method of treating with ozone water or a method of treating with alkali can be used.
In this surface activation step, a method of irradiating plasma is preferable in order to efficiently activate the surface of the plasma polymerization film.
Examples of the plasma used in this embodiment include oxygen, argon, nitrogen, air,
Water or the like can be used alone or in combination. Among these, it is preferable to use oxygen.
The time for irradiating the plasma is not particularly limited as long as the molecular bond near the surface of the plasma polymerization film can be broken, but it is preferably about 5 to 30 minutes, more preferably 10 to 60 seconds. preferable.

[Bonding process]
FIG. 7 is a schematic view showing a state in which the glass substrate 11 and the crystal plate 13 of the present embodiment are joined. The glass substrate 11 whose surface of the plasma polymerization film is activated and the quartz plate 13 whose surface is activated are bonded together to be integrated. That is, as shown in FIG. 7, the glass substrate 11 and the quartz plate 13 are pressed against each other in a state of facing each other. An activated plasma polymerized film may be formed on the bonding surface of the quartz plate 13 and bonded, or the glass substrate 11 and the quartz plate 13 may be bonded together.
Alternatively, activated plasma-polymerized films may be formed on both of the bonding surfaces.
Since the activated state of the plasma polymerized film whose surface has been activated relaxes over time, the plasma polymerized film shifts to the bonding step immediately after the surface activation step. Specifically, after the surface activation step, it is preferable to shift to the pasting step within 60 minutes, and it is more preferable to shift within 5 minutes. Within this time, the surface of the plasma polymerized film is maintained in a sufficiently active state, so that sufficient bonding strength can be obtained at the time of bonding.
After the bonding step, it is preferable to pressurize the glass substrate 11 and the crystal plate 13 in order to increase the bonding strength. Specifically, the pressure for pressurization is preferably about 1 to 10 MPa, although it varies depending on the thickness of the glass substrate 11 and the crystal plate 13 and the conditions of the apparatus, etc.
1-5 MPa is more preferable. The pressurization time is not particularly limited, but is 10 sec to 30 min.
It is preferable that it is about.
Furthermore, after pressurizing the glass substrate 11 and the crystal plate 13, the bonding strength can be increased by heating them.
This heating is provided as necessary, and the heating temperature is 25 to 100 ° C., preferably 50 to 100 ° C. If it exceeds 100 ° C, the optical article may be altered or deteriorated. The heating time is preferably about 1 to 30 minutes.
In addition, although this heating process may be performed independently after a pressurization process, it is preferable to carry out simultaneously with a pressurization process, when strengthening joining strength.

As shown in FIG. 7, the crystal plate 13 is placed on the plasma polymerized film 30 to place the glass substrate 11.
And the crystal plate 13 are joined. At this time, the crystal plate 13 and the plasma polymerization film 30 are in close contact with each other because there is no projecting convex portion on the surface of the plasma polymerization film 30 and the surface is generally smooth.
Accordingly, the glass substrate 11 and the quartz plate 13 are strongly molecularly bonded, and the polarization conversion element 1
Is obtained.
In addition, although the hollow B becomes a crater shape, since it is a minute space | gap, the influence on the optical characteristic of the polarization conversion element 1 can be disregarded.

A convex portion removing device for sliding the blade 20 along the surface of the multilayer film 12 will be described with reference to FIGS.
FIG. 8 is a schematic perspective view of the convex portion removing device for sliding the blade in the first embodiment of the present invention. FIG. 9 is a side sectional view of the convex portion removing device according to the first embodiment of the present invention.

As shown in FIGS. 8 and 9, the convex portion removing device 40 includes a blade sliding mechanism 41 and a substrate support mechanism 42.
The blade sliding mechanism 41 includes a main body part 411, a sliding part 412 slidably attached to the main body part 411, three columns 413 erected in the vertical direction from the sliding part 412,
A telescopic elastic member 414 provided at the tip of the column 413 opposite to the sliding portion 412 and a blade support 415 for supporting and fixing the blade 20 provided at the tip of the elastic member 414 are provided.
The substrate support mechanism 42 includes a base 421 and a turntable 422 that is rotatably provided on the base 421.

The operation of the convex portion removing device 40 is as follows.
First, the tip of the blade 20 is brought into contact with the multilayer film 12. At this time, the elastic member 41
4, the tip of the blade 20 is pressed against the multilayer film 12. Further, since this elastic force is applied from three places, the blade 20 is similarly bent along the curve of the glass substrate 11.
The blade 20 slides along the surface of the multilayer film 12 as the sliding portion 412 slides in the horizontal direction.

Next, after the blade 20 slides over the entire surface of the multilayer film 12, the blade 20 is once separated from the multilayer film 12, and in this state, the rotating plate 422 is rotated (for example, rotated 90 °). And
The blade 20 is again brought into contact with the surface of the multilayer film 12 and similarly slid along the surface.
Thereby, the blade 20 is slid with respect to the glass substrate 11 from at least two directions.

In the first embodiment configured as described above, the following operational effects can be obtained.
(1) In the first embodiment, since the blade 20 slides along the surface of the multilayer film 12, the blade 20 slides evenly over the entire surface of the multilayer film 12.
For this reason, the blade 20 collides with the convex part 121 protruding from the surface of the multilayer film 12, and the convex part 121 is separated from the multilayer film 12 by this impact and detached.
As a result, the surface of the multilayer film 12 becomes a surface without protrusions.
It is possible to strengthen the molecular bonding by the plasma polymerized film 30 using the surface of the film as the bonding surface.
Therefore, when the glass substrate 11 and the crystal plate 13 are bonded together, there is no hindrance to bonding due to the convex portions, and the glass substrate 11 and the quartz plate 13 can be brought into close contact with each other.

(2) In the first embodiment, since the blade 20 is curved along the surface shape of the multilayer film 12, the glass substrate 11 is caused by the in-plane stress generated by forming the multilayer film 12 on the glass substrate 11.
However, even when the multilayer film 12 is curved instead of flat, the blade 20 can be slid evenly over the entire surface of the multilayer film 12.
Therefore, even if the multilayer film 12 is a curved surface, it can be a surface having no convex portion, so that it is possible to obtain the polarization conversion element 1 having strong molecular bonding and high-precision optical characteristics.

(3) In the first embodiment, since the tip of the blade 20 is a member having a sharp, wedge-shaped cross section, when the blade 20 collides with the convex portion 121, the tip of the blade 20 is sharp. The collision area with the convex part 121 becomes extremely small.
For this reason, the impact to the surface direction which the convex part 121 receives can be made very high.
Therefore, when the convex part 121 collides with the blade 20, the convex part 121 can be easily separated and detached without applying a strong force to the blade 20.

(4) In the first embodiment, after the blade 20 slides, the adhesive tape 50 is applied to the multilayer film 12.
And then peel off.
For this reason, even if the detached convex portion 121 remains on the multilayer film 12 due to static electricity or the like after the blade 20 slides, it can be transferred by the adhesive tape 50 and removed from the multilayer film 12.
Therefore, in the first embodiment, the surface of the multilayer film 12 can be smoothed more reliably without leaving the convex portions 121 on the multilayer film 12.

(5) In the first embodiment, since the blade 20 is supported by the three blade support portions 415 that are pivotally supported by the elastic member that can expand and contract, the blade 20 is pressed against the multilayer film 12 by the elastic force of the elastic member 414. Will be.
Further, since the blade 20 is supported by the three blade support portions 415, the blade 20
The pressure that presses against the multilayer film 12 becomes uniform.
Therefore, the blade 20 can surely slide on the surface of the multilayer film 12, and the multilayer film 1
2 can collide with all the convex portions 121 on the surface 2.
Therefore, all the convex portions 121 of the multilayer film 12 can be detached and removed only by sliding the blade 20 once along the multilayer film 12.

(6) In the first embodiment, since the glass substrate 11 is placed on the rotatable turntable 422,
The direction in which the blade 20 slides along the surface of the multilayer film 12 can be freely changed.
For example, it can be slid once again from the direction rotated 90 ° from the direction once slid.
For this reason, depending on the protruding shape of the convex portion 121, even when the blade 20 is slid from one direction, the blade 20 cannot be sufficiently separated (for example, the convex portion 121 having a sharp surface on the side where the blade 20 approaches). For example, since the impact force due to the collision with the blade 20 escapes in the thickness direction, the blade 20 is caused to slide from a different direction by rotating the rotating plate 422 even in the case where the impact force is not sufficiently applied to the surface direction. Therefore, the convex part 121 can be separated more reliably.
Further, since it is only necessary to rotate the rotating plate 422, the glass substrate 1 on which the multilayer film 12 is formed.
There is no need to remove 1 from the predetermined position, change the orientation, and arrange it again, and the workability can be improved.

Next, a second embodiment of the present invention will be described with reference to FIGS.
FIG. 10 is a schematic view showing a state in which the wire in the second embodiment of the present invention is slid on the multilayer film. FIG. 11 is an enlarged cross-sectional view showing a state in which the wire in the second embodiment of the present invention is slid on the multilayer film. FIG. 12 is an enlarged cross-sectional view showing a state in which the blade in the second embodiment of the present invention detaches the convex portion on the multilayer film.
The second embodiment is a long blade 20 having a sharp wedge-shaped cross section as compared with the first embodiment.
The point that the wire 60 is used instead of using is different, and the other configuration is the first.
This is the same as the embodiment.

As shown in FIG. 10, the wire 60 is slid along the surface of the curved multilayer film 12A. And the wire 60 will collide with the convex part 121A which is scattered in the multilayer film 12A. Due to this collision, the convex portion 121A receives stress in the plane direction of the multilayer film 12A.
At this time, as shown in FIG. 11, since the collision area between the wire 60 and the convex portion 121A is very small, as in the blade 20, the pressure received by the convex portion 121A from the collision location is extremely large.

For this reason, as shown in FIG. 12, the convex part 121 is detached from the multilayer film 12 instantaneously.
And since the stress by the collision of the wire 60 concentrates in the deformed part A like 1st Embodiment, when the convex part 121 is removed by the wire 60, the frequency which is detached | desorbed from this deformed part A as a starting point is high. Thereby, the hollow B will be formed in the location from which the convex part 121 was detached.

Therefore, in 2nd Embodiment, there can exist an effect similar to the effect (1)-(6) of 1st Embodiment. Furthermore, the following effects can be obtained.
(7) In the second embodiment, since the wire 60 is used, it can be easily curved along the surface shape of the multilayer film 12. Furthermore, since a linear wire is made to collide with the convex part 121, the convex part 121 can be easily detached without applying a strong force.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the first embodiment and the second embodiment, the blade 20 and the wire 60 are used to slide on the multilayer film 12 one by one, but the present invention is not limited to this.
For example, as shown in FIG. 13, it is good also as a structure which uses 3 each, respectively, and although not shown in figure, it is good also as a structure which combines and slides the braid | blade 20 and the wire 60. FIG.
In such a configuration, a removal effect corresponding to a plurality of times of sliding when one blade 20 or the wire 60 is used can be obtained by one time of sliding, so that work efficiency can be improved.

  The present invention can be used in a method of manufacturing a prism, a polarization conversion element, and other optical articles.

DESCRIPTION OF SYMBOLS 1 ... Polarization conversion element (optical article), 11 ... Glass substrate (1st optical substrate), 12 ... Multilayer film 13 ... Quartz plate (2nd optical substrate), 20 ... Blade (impact member), 30 ... Plasma polymerization film , 40 ... convex part removing device (jig), 121 ... convex part

Claims (6)

  1. A method of manufacturing an optical article in which a multilayer film serving as an optical functional film is formed on at least one surface of a plurality of optical substrates, and molecular bonding is performed with the multilayer film interposed therebetween,
    Sliding the impact imparting member along the surface of the multilayer film to release the convex part of the multilayer film;
    Forming a plasma polymerized film on at least one surface of the joint surface;
    Activating the surface of the joint surface;
    A method for producing an optical article, wherein the optical substrates on which the surfaces of the bonding surfaces are activated are bonded together to form molecular bonding.
  2. In the manufacturing method of the optical article according to claim 1,
    A method of manufacturing an optical article, wherein the impact imparting member is curved along the surface shape of the multilayer film.
  3. In the manufacturing method of the optical article according to claim 1 or 2,
    The method of manufacturing an optical article, wherein the impact imparting member is a member having a sharp and wedge-shaped cross section at a tip thereof.
  4. In the manufacturing method of the optical article according to claim 1 or 2,
    A method of manufacturing an optical article, wherein a wire is used as the impact applying member.
  5. In the manufacturing method of the optical article in any one of Claims 1-4,
    A method for producing an optical article, comprising: removing a convex portion on a surface of the multilayer film; attaching an adhesive tape to the surface of the multilayer film; and further peeling the adhesive tape.
  6. In the manufacturing method of the optical article in any one of Claims 1-5,
    The method of manufacturing an optical article, wherein the impact applying member is held by a rotatable jig that can freely change a direction of sliding along the surface of the multilayer film.
JP2009078377A 2009-03-27 2009-03-27 Method for manufacturing optical article Active JP5299022B2 (en)

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Publication number Priority date Publication date Assignee Title
JP4487636B2 (en) * 2004-05-26 2010-06-23 パナソニック電工株式会社 Manufacturing method of three-dimensional shaped object
JP4894713B2 (en) * 2007-10-17 2012-03-14 セイコーエプソン株式会社 Polarizing plate, image display device
JP2010230973A (en) * 2009-03-27 2010-10-14 Seiko Epson Corp Method of manufacturing optical article

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