JP5297190B2 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- JP5297190B2 JP5297190B2 JP2008515272A JP2008515272A JP5297190B2 JP 5297190 B2 JP5297190 B2 JP 5297190B2 JP 2008515272 A JP2008515272 A JP 2008515272A JP 2008515272 A JP2008515272 A JP 2008515272A JP 5297190 B2 JP5297190 B2 JP 5297190B2
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- JP
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- Prior art keywords
- vacuum pump
- bearing
- elastic support
- fluid
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/0563—Bearings cartridges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/04—Ball or roller bearings, e.g. with resilient rolling bodies
- F16C27/045—Ball or roller bearings, e.g. with resilient rolling bodies with a fluid film, e.g. squeeze film damping
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/66—Special parts or details in view of lubrication
- F16C33/6637—Special parts or details in view of lubrication with liquid lubricant
- F16C33/6659—Details of supply of the liquid to the bearing, e.g. passages or nozzles
- F16C33/6666—Details of supply of the liquid to the bearing, e.g. passages or nozzles from an oil bath in the bearing housing, e.g. by an oil ring or centrifugal disc
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/66—Special parts or details in view of lubrication
- F16C33/6637—Special parts or details in view of lubrication with liquid lubricant
- F16C33/6685—Details of collecting or draining, e.g. returning the liquid to a sump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/30—Application independent of particular apparatuses related to direction with respect to gravity
- F16C2300/34—Vertical, e.g. bearings for supporting a vertical shaft
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/0408—Passive magnetic bearings
- F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
- F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
Description
更に、ある期間にわたってエラストマー材料は、荷重下で、クリープおよび応力緩和を受ける。エラストマー材料は、また、軸受から吐出される潤滑剤との相互作用のために柔らかくなる。軸線方向減衰リングの軟化は、その減衰リングの剪断弾性率、かくして、下軸受の取付け装置の有効な半径方向剛性を増加させ、それによって時が経つにつれてポンプハウジングへの振動伝達を増加させ、望ましくない。
変形例では、軸受64をグリース(オイルと増粘剤の混合物)を用いて潤滑してもよい。潤滑剤を弾性支持体80のスロット82に供給するために、弾性支持体80の端面に形成された環状溝134、136を用いて、潤滑剤リザーバを提供し、該リザーバの各々は、少なくとも部分的に潤滑剤で満たされ、且つ、潤滑剤をスロットおよびリザーバの中に保持するために、弾性支持体80の端面に接着され、さもなければ取付けられたそれぞれの環状密封要素146、148で密封される。リザーバの一方を部分的にのみ満たすことによって、ポンプ50の使用中、潤滑剤の半径方向の圧搾が起こるとき、潤滑剤が弾性支持体80のスロット82間を循環することができる。
Claims (13)
- ハウジングと、軸受装置によって支持された、ハウジングに対して回転するロータと、を含む真空ポンプであって、
軸受装置が、複数の可撓性部材によって連結された内側環状部分および外側環状部分を含む弾性支持体によって、半径方向および軸線方向の両方に支持された軸受を含み、
弾性支持体は、50乃至500N/mmの範囲の半径方向剛性を有し、
前記弾性支持体は、前記可撓性部材を構成する複数のスロットを含み、
前記真空ポンプは、荷重支持減衰膜をもたらすために流体を前記スロットに供給するための手段を含み、前記流体供給手段は、弾性支持体に配置され且つ前記スロットと流通した流体リザーバを含み、
前記流体リザーバは、弾性支持体の端面に形成された環状溝からなる、
ことを特徴とする真空ポンプ。 - 可撓性部材の各々が、内側環状部分および外側環状部分とほぼ同心の細長い弓形部材である、請求項1に記載の真空ポンプ。
- 可撓性部材は、円周方向に配置されている、請求項2に記載の真空ポンプ。
- 可撓性部材は、複数の弾性支持体の一体板バネをなす、請求項1乃至3のいずれか1項に記載の真空ポンプ。
- 前記真空ポンプは、軸受ナットと、前記弾性支持体をハウジングに対して保持するためのカートリッジと、を含み、前記軸受ナットは、前記軸受ナットの端面が前記弾性支持体の端面に係合して、前記弾性支持体を前記カートリッジの中に保持し、且つ前記弾性支持体に軸線方向に予荷重をかけるように、相互螺合ネジ山によって前記カートリッジの内面に取付けられている、
請求項1乃至4のいずれか1項に記載の真空ポンプ。 - 弾性支持体が、金属材料で形成される、請求項1乃至5のいずれか1項に記載の真空ポンプ。
- 金属材料が、鍛鋼、アルミニウム、チタン、燐青銅、ベリリウム銅、アルミニウム合金、およびチタン合金の1つからなる、請求項6に記載の真空ポンプ。
- 流体供給手段が、流体を流体源から供給するための流体ポンプを含む、請求項1乃至7のいずれか1項に記載の真空ポンプ。
- 流体ポンプが、軸受の潤滑のための流体を軸受に供給するように構成される、請求項8に記載の真空ポンプ。
- 流体ポンプが、流体を流体源からロータに供給するためのウィックと、ロータの回転で流体を軸受に運ぶための、ロータに配置された円錐面と、を含む、請求項9に記載の真空ポンプ。
- 軸受および弾性支持体は、ハウジングに取付けられたカートリッジ内に配置され、カートリッジは、軸受から吐出された流体を受け入れるための環状キャビティを少なくとも部分的に構成し、吐出された流体が重力で環状キャビティから弾性支持体のスロットに供給される、請求項10に記載の真空ポンプ。
- 円錐面がロータに取付けられている、請求項10または11に記載の真空ポンプ。
- ターボ分子真空ポンプの形態である、請求項1乃至12のいずれか1項に記載の真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0511877.3A GB0511877D0 (en) | 2005-06-10 | 2005-06-10 | Vacuum pump |
GB0511877.3 | 2005-06-10 | ||
PCT/GB2006/001948 WO2006131694A1 (en) | 2005-06-10 | 2006-05-26 | Vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008542628A JP2008542628A (ja) | 2008-11-27 |
JP5297190B2 true JP5297190B2 (ja) | 2013-09-25 |
Family
ID=34855360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008515272A Active JP5297190B2 (ja) | 2005-06-10 | 2006-05-26 | 真空ポンプ |
Country Status (9)
Country | Link |
---|---|
US (1) | US8186937B2 (ja) |
EP (1) | EP1891332B2 (ja) |
JP (1) | JP5297190B2 (ja) |
CN (1) | CN100557248C (ja) |
AT (1) | ATE435978T1 (ja) |
CA (1) | CA2610255C (ja) |
DE (1) | DE602006007706D1 (ja) |
GB (1) | GB0511877D0 (ja) |
WO (1) | WO2006131694A1 (ja) |
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JP2004278580A (ja) * | 2003-03-13 | 2004-10-07 | Hiroshi Kamiyoshi | 筒状ダンパ要素 |
GB0309830D0 (en) * | 2003-04-29 | 2003-06-04 | Boc Group Plc | A vacuum pump |
DE10320851A1 (de) * | 2003-05-09 | 2004-11-25 | Leybold Vakuum Gmbh | Turbopumpe |
-
2005
- 2005-06-10 GB GBGB0511877.3A patent/GB0511877D0/en not_active Ceased
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2006
- 2006-05-26 US US11/921,983 patent/US8186937B2/en active Active
- 2006-05-26 JP JP2008515272A patent/JP5297190B2/ja active Active
- 2006-05-26 AT AT06744015T patent/ATE435978T1/de not_active IP Right Cessation
- 2006-05-26 CA CA2610255A patent/CA2610255C/en active Active
- 2006-05-26 WO PCT/GB2006/001948 patent/WO2006131694A1/en not_active Application Discontinuation
- 2006-05-26 DE DE602006007706T patent/DE602006007706D1/de active Active
- 2006-05-26 CN CNB2006800199625A patent/CN100557248C/zh active Active
- 2006-05-26 EP EP06744015.6A patent/EP1891332B2/en active Active
Also Published As
Publication number | Publication date |
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JP2008542628A (ja) | 2008-11-27 |
CA2610255C (en) | 2013-08-13 |
EP1891332A1 (en) | 2008-02-27 |
GB0511877D0 (en) | 2005-07-20 |
CN100557248C (zh) | 2009-11-04 |
EP1891332B1 (en) | 2009-07-08 |
US8186937B2 (en) | 2012-05-29 |
US20100215475A1 (en) | 2010-08-26 |
DE602006007706D1 (de) | 2009-08-20 |
CN101189436A (zh) | 2008-05-28 |
EP1891332B2 (en) | 2014-12-17 |
WO2006131694A1 (en) | 2006-12-14 |
ATE435978T1 (de) | 2009-07-15 |
CA2610255A1 (en) | 2006-12-14 |
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