JP5285861B2 - Load conversion for the tuning fork vibration device - Google Patents

Load conversion for the tuning fork vibration device Download PDF

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JP5285861B2
JP5285861B2 JP2007041974A JP2007041974A JP5285861B2 JP 5285861 B2 JP5285861 B2 JP 5285861B2 JP 2007041974 A JP2007041974 A JP 2007041974A JP 2007041974 A JP2007041974 A JP 2007041974A JP 5285861 B2 JP5285861 B2 JP 5285861B2
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tuning fork
piezoelectric element
signal
load
excitation
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JP2008203181A (en
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宇太郎 藤岡
三男 木村
光平 岡本
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新光電子株式会社
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本発明は、安定度の高い測定値が得られる荷重変換用音叉振動装置に関するものである。 The present invention relates to a load cell for the tuning fork vibrator having high stability measurements are taken.

従来の荷重変換用音叉振動子は、振動体に2枚の圧電素子(PZT)を貼り付け、1枚の圧電素子により駆動を行い、他方の圧電素子により振動を検出している。 Conventional load cell for the tuning fork vibrator, paste two piezoelectric elements (PZT) to the vibrating body performs driving by one piezoelectric element, and detects the vibration by other piezoelectric elements.

図9は特許文献1による荷重変換器の一部を構成する従来の荷重変換用音叉振動子1の一例を示し、中心軸に対称かつ平行した2枚の振動片1a、1bの両端を、コ字形結合部2a、2bにより結合している。 Figure 9 shows an example of a conventional load cell for the tuning fork vibrator 1 to constitute a part of the load converter according to Patent Document 1, the two vibrating piece 1a of symmetry and parallel to the central axis, the ends 1b, the co shaped coupling section 2a, linked by 2b. 一方の結合部2aの両側面に、第1、第2の圧電素子3a、3bをそれぞれ取り付け、第1の圧電素子3aの出力を発振増幅器4に接続することにより、第1の圧電素子3aの出力を検出信号とし、その一部を第2の圧電素子3bの励振用として使用する。 On both sides of one coupling part 2a, the mounting first and second piezoelectric elements 3a, 3b, respectively, by connecting the output of the first piezoelectric element 3a to the oscillation amplifier 4, the first piezoelectric element 3a the output detection signal, using a part thereof for the excitation of the second piezoelectric element 3b.

このような構成において、発振増幅器4の利得や周波数特性を適切に選択することにより、図10に示すように振動片1a、1bは対称モードの基本振動数で発振し、図11に示すような波形信号Aが得られる。 In such a configuration, by appropriately selecting the gain and frequency characteristics of the oscillation amplifier 4, vibrating piece 1a as shown in FIG. 10, 1b oscillates at the fundamental frequency of the symmetric mode, as shown in FIG. 11 waveform signal A is obtained. この状態において、音叉振動子1の取付部5a、5bを介して軸方向に測定すべき荷重Fが加えられると、その発振振動数が変化することから、この振動数を周波数カウンタ6で読み取って、加えられた荷重Fを知ることができる。 In this state, when the mounting portion 5a of the tuning fork vibrator 1, the load F to be measured in the axial direction through the 5b applied, since the oscillation frequency is changed, reads this frequency in the frequency counter 6 , it is possible to know the load F applied.

特開昭60―86427号公報 JP-A-60-86427 JP

しかしながら、測定荷重F以外の振動的或いは衝撃的な加速度を伴う外力として、例えば軸に直角方向に力が加わると、振動数が突然大幅に変化するほか、正常な振動状態を維持できず、測定荷重Fと振動数との間の忠実な対応性が一時的に失われるというような現象が生ずる。 However, as an external force with the oscillatory or shocking acceleration other than measuring load F, for example, when a force is applied in the direction perpendicular to the axis, in addition to frequency changes abruptly significantly, it can not maintain normal vibration state, measured Symptoms such as faithful correspondence between frequency and load F is temporarily lost occurs.

このような外部からの衝撃により、圧電素子3aからは本来の荷重信号の他に、外乱による信号が重畳された出力が発生する。 The impact from such external, from the piezoelectric element 3a to other original load signal, an output signal due to disturbance is superimposed is generated. このため、信号波形Aが乱れて周波数カウンタ6は誤計数し、得られた荷重信号は誤ったものとなってしまうことがある。 Therefore, the frequency counter 6 is erroneously counted disturbed signal waveform A, the load signal obtained is sometimes becomes be incorrect.

本発明の目的は、上述の課題を解決し、外力が衝撃的に加わっても、それを相殺して、正確な荷重を測定し得る荷重変換用音叉振動装置を提供することにある。 An object of the present invention is to solve the problems described above, even if applied external force is shocking, to offset it, it is to provide a load cell for the tuning fork vibration device capable of measuring an accurate load.

上述の目的を達成するための本発明に係る荷重変換用音叉振動装置の技術的特徴は、平行な2枚の振動片の両端をそれぞれ結合部により結合した音叉振動子において、一方の結合部の両側面に信号検出用の圧電素子をそれぞれ貼り付け、前記一方の結合部又は他端の結合部の側面に励振用の圧電素子を貼り付け、前記信号検出用の2つの圧電素子の出力を加算して検出信号とし、該検出信号の一部を前記励振用の圧電素子に加えることにある。 Technical characteristics of the load cell for the tuning fork vibration device according to the present invention for achieving the above object, in the tuning fork vibrator bonded by the respective coupling portions at both ends of two parallel resonator element, the one coupling part paste the piezoelectric elements for signal detection on both sides, respectively, affixed to the piezoelectric element for excitation to the side of the coupling portion of the coupling portion or the other end of the one, adds the outputs of the two piezoelectric elements for the signal detection and as the detection signal is to add a portion of the detection signal to the piezoelectric element for the excitation.

本発明に係る荷重変換用音叉振動装置によれば、音叉振動子を使用した荷重の測定において、外部からの衝撃が加わっても安定した測定を可能とする。 According to the load conversion tuning fork device according to the present invention, in the measurement of the load using a tuning fork oscillator, to allow measurement of impact is even stable applied from the outside.

本発明を図1〜図8に図示の実施例に基づいて詳細に説明する。 It will be described in detail with reference to the embodiments thereof shown in the present invention in FIGS. 1-8.
図1に示すように、音叉振動子10の平行な2枚の振動片11a、11bの両端は、コ字型に結合部12a、12bにより結合されている。 As shown in FIG. 1, two parallel vibrating piece 11a of the tuning fork vibrator 10, both ends of 11b is coupled portion 12a in a U-shape, are joined by 12b. 結合部12a、12bはそれぞれ荷重測定端に接続され、音叉振動子10はこれらの荷重測定端間に作用する荷重を測定するようにされている。 Coupling portions 12a, 12b are connected to respective load measuring end, tuning fork vibrator 10 is adapted to measure the load acting between these load measurement end.

一方の結合部12aの両側面には、検出信号用の圧電素子13a、13bがそれぞれ貼り付けられ、他方の結合部12bの一方の側面には励振用の圧電素子13cが貼り付けられている。 On both sides of one of the coupling portions 12a, the piezoelectric element 13a for the detection signal, 13b is attached respectively to one side surface of the other coupling portion 12b is attached the piezoelectric elements 13c for excitation is. これらの圧電素子13a〜13cの貼付位置は、振動片11a、11bと結合部12a、12bのそれぞれの境界部付近とされ、振動片11a、11bの振動を効率良く検知でき、また効率良く励振できる個所とされている。 Attaching position of the piezoelectric element 13a~13c is vibrating piece 11a, 11b and the coupling portion 12a, is a near each boundary of 12b, resonator element 11a, the vibration of 11b can be efficiently detected also can be efficiently excited there is a point.

圧電素子13a、13bの出力は加算器14に加えられて検出信号とされ、更にこの検出信号の一部は増幅器15を経て他端の励振用の圧電素子13cに帰還されている。 The piezoelectric element 13a, the output of 13b is the detection signal is applied to an adder 14, and is further fed back to the piezoelectric element 13c for some for excitation of the other end through the amplifier 15 of the detection signal.

音叉振動子10においては、背景技術で説明したように、荷重測定端間に荷重が作用すると、検出信号の発振振動数が変化するので、この振動数を計数することにより荷重測定が可能となる。 In the tuning fork vibrator 10, as described in the background art, when the load is applied between the load measuring end, the oscillation frequency of the detection signal changes, it is possible to load measured by counting the frequency .

いま、音叉振動子10に横方向から衝撃的な外力が加わり、音叉振動子10が極端には図2又は図3に示すように変形し、圧電素子13aには例えば模式的に図4に示す波形信号Bが加わり、圧電素子13bには図5に示すような、図4とは極性が反転した波形信号Cが加わる。 Now, joined by shocking external force from the lateral direction to the tuning fork vibrator 10, to the extreme tuning fork vibrator 10 is deformed as shown in FIG. 2 or FIG. 3, is shown in FIG. 4, for example schematically piezoelectric element 13a added waveform signal B, the piezoelectric element 13b, as shown in FIG. 5, a waveform signal C polarity is inverted is applied to the FIG.

従って、圧電素子13aにおいては、図11に示すような本来の波形信号Aと図4に示す波形信号Bとを加えた図6に示す波形信号Dが得られる。 Accordingly, in the piezoelectric element 13a, the waveform signal D shown in FIG. 6 plus the waveform signal B indicating the original waveform signal A and 4 as shown in FIG. 11 is obtained. また、圧電素子13bにおいては、波形信号Aと図5に示す波形信号Cとを加えた図7に示す波形信号Eが得られる。 Further, in the piezoelectric element 13b is a waveform signal E shown in FIG. 7 plus the waveform signal C shown in waveform signal A and Figure 5 is obtained.

これらの圧電素子13a、13bで得られた波形信号D、Eを加算器14において加算すると、波形信号B、Cは極性が呈する対称的な信号であるので相殺され、図8に示す本来の荷重信号と同等の振動周波数を有する波形信号Fが得られる。 These piezoelectric elements 13a, the waveform signal D obtained in 13b, when added in adder 14 to E, waveform signals B, C is canceled because it is symmetric signal exhibiting polarity, the original load shown in FIG. 8 waveform signal F having a signal equivalent to the oscillation frequency is obtained. この波形信号Fは図11に示す波形信号Aに対し、大きさは2倍となるが同じ周波数であり、衝撃による波形信号B、Cは極性が反転しているので相殺される。 For this waveform signal F waveform signal A shown in FIG. 11, the size is becomes twice the same frequency, the waveform signal B due to the impact, C is is offset because the polarity is reversed.

通常の状態における測定においては、音叉振動子10に加わる荷重が変化すると、図11に示すような波形信号Aが圧電素子13a、13bから同相で得られる。 In the measurement in the normal state, when the load applied to the tuning fork vibrator 10 changes, the waveform signal A as shown in FIG. 11 is obtained in phase from the piezoelectric elements 13a, 13b. 従って、これらの2つの波形信号Aは加算器14により加算され波形信号Fと同様の信号となって検出信号とされ、検出信号の一部は増幅器15により増幅され圧電素子13cに帰還されて励振用に使用される。 Therefore, these two waveform signals A are the detection signal has the same signal as the summed waveform signal F by the adder 14, a portion of the detection signal is fed back to the piezoelectric element 13c is amplified by the amplifier 15 excitation used to use.

この場合に、励振用の圧電素子13cに対しても、正常の周波数が帰還されるので測定は正しく行われることになり、外部からの衝撃があっても、検出信号を誤計数することがなくなり、安定した荷重測定が可能となる。 In this case, also the piezoelectric element 13c for excitation, the normal frequency is fed back measurement becomes properly carried out it, even if there is an external impact, there is no counting erroneous detection signal , it is possible to stable load measurement.

なお、励振用の圧電素子13cは結合部12bに貼り付けるのではなく、結合部12aにおいて、圧電素子13a又は圧電素子13bに並べて貼り付けてもよい。 The piezoelectric element 13c for excitation rather than pasting the junction 12b, the coupling portion 12a, may be attached side by side to the piezoelectric element 13a or the piezoelectric element 13b.

音叉振動子10に加わる外力は、横方向からの外力が問題となり、横方向からの外力は極性が異なる現象を発生するモードが問題となる。 External force applied to the tuning fork vibrator 10, the external force from the lateral direction becomes a problem, the external force from the lateral mode generated a phenomenon different polarity becomes a problem. 従って、この外力による悪影響を本発明により解消することができる。 Therefore, it is possible to solve by the present invention an adverse effect due to the external force.

実施例の構成図である。 A block diagram of an embodiment. 衝撃により音叉振動子が変形した状態の説明図である。 It is an explanatory view showing a state in which the tuning fork vibrator is deformed by the impact. 衝撃により音叉振動子が変形した状態の説明図である。 It is an explanatory view showing a state in which the tuning fork vibrator is deformed by the impact. 外力が加わった状態の一方の圧電素子の模式的な信号波形図である。 It is a schematic signal waveform diagram of one of a piezoelectric element in a state where external force is applied. 外力が加わった状態の他方の圧電素子の模式的な信号波形図である。 It is a schematic signal waveform diagram of the other piezoelectric element in a state where external force is applied. 基本信号波形に外力による信号波形を合成した状態の一方の圧電素子の模式的な信号波形図である。 It is a schematic signal waveform diagram of one of a piezoelectric element in a state of combining the signal waveform due to an external force to the basic waveform. 基本信号波形に外力による信号波形を合成した状態の他方の圧電素子の模式的な信号波形図である。 Is a schematic signal waveform diagram of the other piezoelectric element in a state in which the basic signal waveform obtained by combining the signal waveform due to an external force. 2つの圧電素子の出力を加算した状態の信号波形図である。 It is a signal waveform diagram of a state obtained by adding the outputs of two piezoelectric elements. 従来例の構成図である。 It is a configuration diagram of a conventional example. 従来例の荷重による音叉振動子の発振モードの説明図である。 It is an explanatory view of the oscillation mode of the tuning fork vibrator due to the load of the conventional example. 基本的な発振振動数の信号波形図である。 It is a signal waveform diagram of a basic oscillation frequency.

符号の説明 DESCRIPTION OF SYMBOLS

10 音叉振動子 11a、11b 振動片 12a、12b 結合部 13a、13b、13c 圧電素子 14 加算器 15 増幅器 10 tuning fork vibrator 11a, 11b vibrating piece 12a, 12b coupling portion 13a, 13b, 13c piezoelectric element 14 adder 15 amplifier

Claims (2)

  1. 平行な2枚の振動片の両端をそれぞれ結合部により結合した音叉振動子において、一方の結合部の両側面に信号検出用の圧電素子をそれぞれ貼り付け、前記一方の結合部又は他端の結合部の側面に励振用の圧電素子を貼り付け、前記信号検出用の2つの圧電素子の出力を加算して検出信号とし、該検出信号の一部を前記励振用の圧電素子に加えることを特徴とする荷重変換用音叉振動装置。 In the tuning fork vibrator bonded by the respective coupling portions at both ends of two parallel vibrating piece affixed one piezoelectric element for detecting signals on both sides of the coupling portion, respectively, binding of a binding portion or the other end of the one paste the piezoelectric element for excitation to the side surface parts, and a detection signal by adding the outputs of two piezoelectric elements for the signal detection, characterized by adding a portion of the detection signal to the piezoelectric element for the excitation load conversion tuning fork vibrator to.
  2. 前記信号検出用の2枚の圧電素子による前記検出信号を増幅器で増幅してから前記励振用の圧電素子に加えることを特徴とする請求項1に記載の荷重変換用音叉振動装置。 Load conversion tuning fork device according to claim 1, characterized in that applied to the piezoelectric element for the excitation of the detection signal according to two piezoelectric elements for the signals detected are amplified by an amplifier.
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US8656550B2 (en) 2002-01-03 2014-02-25 Irobot Corporation Autonomous floor-cleaning robot
US8739355B2 (en) 2005-02-18 2014-06-03 Irobot Corporation Autonomous surface cleaning robot for dry cleaning
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