JP5265181B2 - 保護膜製造方法 - Google Patents
保護膜製造方法 Download PDFInfo
- Publication number
- JP5265181B2 JP5265181B2 JP2007315770A JP2007315770A JP5265181B2 JP 5265181 B2 JP5265181 B2 JP 5265181B2 JP 2007315770 A JP2007315770 A JP 2007315770A JP 2007315770 A JP2007315770 A JP 2007315770A JP 5265181 B2 JP5265181 B2 JP 5265181B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- anodic oxide
- temperature
- film
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000001681 protective effect Effects 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 80
- 239000010407 anodic oxide Substances 0.000 claims description 62
- 238000011282 treatment Methods 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 239000007864 aqueous solution Substances 0.000 claims description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 8
- 239000003513 alkali Substances 0.000 claims description 5
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 238000000280 densification Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 15
- 238000005260 corrosion Methods 0.000 abstract description 13
- 230000007797 corrosion Effects 0.000 abstract description 13
- 239000010408 film Substances 0.000 description 84
- 238000010438 heat treatment Methods 0.000 description 27
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 21
- 238000007789 sealing Methods 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 16
- 239000008151 electrolyte solution Substances 0.000 description 16
- 230000003647 oxidation Effects 0.000 description 13
- 238000007254 oxidation reaction Methods 0.000 description 13
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 235000006408 oxalic acid Nutrition 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000007743 anodising Methods 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 3
- 229910001593 boehmite Inorganic materials 0.000 description 3
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum ions Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001680 bayerite Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- WMWXXXSCZVGQAR-UHFFFAOYSA-N dialuminum;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3] WMWXXXSCZVGQAR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- LMYQFCDLMRNPLY-UHFFFAOYSA-L hydroxy(oxo)alumane Chemical compound O[Al]=O.O[Al]=O LMYQFCDLMRNPLY-UHFFFAOYSA-L 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
- C25D11/246—Chemical after-treatment for sealing layers
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Treatment Of Metals (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007315770A JP5265181B2 (ja) | 2007-12-06 | 2007-12-06 | 保護膜製造方法 |
PCT/JP2008/072024 WO2009072546A1 (fr) | 2007-12-06 | 2008-12-04 | Procédé pour former un film protecteur |
CN2008801191634A CN101889108B (zh) | 2007-12-06 | 2008-12-04 | 保护膜制造方法 |
KR1020107010913A KR101222921B1 (ko) | 2007-12-06 | 2008-12-04 | 보호막 제조방법 |
TW097147427A TWI481748B (zh) | 2007-12-06 | 2008-12-05 | 保護膜之製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007315770A JP5265181B2 (ja) | 2007-12-06 | 2007-12-06 | 保護膜製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009138229A JP2009138229A (ja) | 2009-06-25 |
JP2009138229A5 JP2009138229A5 (fr) | 2010-09-16 |
JP5265181B2 true JP5265181B2 (ja) | 2013-08-14 |
Family
ID=40717723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007315770A Active JP5265181B2 (ja) | 2007-12-06 | 2007-12-06 | 保護膜製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5265181B2 (fr) |
KR (1) | KR101222921B1 (fr) |
CN (1) | CN101889108B (fr) |
TW (1) | TWI481748B (fr) |
WO (1) | WO2009072546A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5361627B2 (ja) * | 2009-09-14 | 2013-12-04 | 株式会社アルバック | 真空用バルブ筐体及び真空用バルブ |
WO2011149317A2 (fr) * | 2010-05-28 | 2011-12-01 | 성균관대학교산학협력단 | Film protecteur composite organique/inorganique souple permettant d'empêcher la perméation d'humidité et/ou d'oxygène, son procédé de préparation et élément électronique contenant le film protecteur composite organique/inorganique souple |
DE102012204636A1 (de) * | 2012-03-22 | 2013-09-26 | Nanogate Ag | Behandlung einer anodisch oxidierten Oberfläche |
CN102660763B (zh) * | 2012-05-07 | 2014-09-03 | 复旦大学 | 一种高催化性质TiO2纳米管阵列薄膜的制备方法及应用 |
US9702053B2 (en) * | 2012-06-29 | 2017-07-11 | Apple Inc. | Elimination of crazing in anodized layers |
JP6562500B2 (ja) * | 2015-03-31 | 2019-08-21 | 地方独立行政法人山口県産業技術センター | 表面処理アルミニウム材とその製造方法 |
CN107849725A (zh) * | 2015-07-30 | 2018-03-27 | 富士胶片株式会社 | 铝板及铝板的制造方法 |
TWI588300B (zh) * | 2016-04-08 | 2017-06-21 | 科閎電子股份有限公司 | 利用真空與噴射蒸氣對陽極氧化膜封孔的封孔設備及其方法 |
US11312107B2 (en) * | 2018-09-27 | 2022-04-26 | Apple Inc. | Plugging anodic oxides for increased corrosion resistance |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB965837A (en) * | 1962-06-19 | 1964-08-06 | Charles Calvin Cohn | Treatment of aluminum oxide coatings |
JPS5273140A (en) * | 1975-12-15 | 1977-06-18 | Matsushita Electric Ind Co Ltd | Production process for alumite products |
DE2960565D1 (en) * | 1978-05-22 | 1981-11-05 | Alcan Res & Dev | Process for sealing anodised aluminium and product so obtained |
CN1003656B (zh) * | 1986-07-09 | 1989-03-22 | 国家海洋局海洋技术研究所 | 阳极氧化铝的封闭方法 |
JP2614133B2 (ja) * | 1990-04-20 | 1997-05-28 | 富士写真フイルム株式会社 | 印刷版用支持体の表面処理装置 |
JPH04141600A (ja) * | 1990-10-01 | 1992-05-15 | Showa Alum Corp | アルミニウム製品の陽極酸化皮膜封孔処理法 |
JP2767727B2 (ja) * | 1991-11-05 | 1998-06-18 | 富士写真フイルム株式会社 | 平版印刷版用支持体の封孔処理方法及び装置 |
CA2300859A1 (fr) * | 1997-08-22 | 1999-03-04 | Henkel Corporation | Bouchage plus rapide en deux etapes des pores de surfaces d'aluminium anodisees |
-
2007
- 2007-12-06 JP JP2007315770A patent/JP5265181B2/ja active Active
-
2008
- 2008-12-04 KR KR1020107010913A patent/KR101222921B1/ko active IP Right Grant
- 2008-12-04 CN CN2008801191634A patent/CN101889108B/zh active Active
- 2008-12-04 WO PCT/JP2008/072024 patent/WO2009072546A1/fr active Application Filing
- 2008-12-05 TW TW097147427A patent/TWI481748B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20100072084A (ko) | 2010-06-29 |
TW200938663A (en) | 2009-09-16 |
TWI481748B (zh) | 2015-04-21 |
CN101889108B (zh) | 2012-07-04 |
KR101222921B1 (ko) | 2013-01-17 |
WO2009072546A1 (fr) | 2009-06-11 |
JP2009138229A (ja) | 2009-06-25 |
CN101889108A (zh) | 2010-11-17 |
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