JP5223021B2 - Liquid discharge head - Google Patents

Description

  The present invention relates to a liquid discharge head that discharges droplets and a liquid discharge apparatus including the liquid discharge head.

  Ink jet technology for ejecting ink droplets onto recording paper has recently been applied to pattern formation and uniform thin film formation in various device manufacturing processes. Liquid discharge heads used for such pattern formation are required to discharge further small droplets and high-viscosity liquids. In order to realize a head having a high discharge capacity that satisfies these requirements, it is necessary to apply a higher pressure to the liquid in the pressure chamber.

  For example, in the liquid discharge head disclosed in Patent Document 1, a part of the pressure chamber is partitioned by an elastic body that can be elastically deformed, and the volume of the pressure chamber is changed by driving the actuator to deform the elastic body. . With this configuration, energy generated by driving the actuator is efficiently converted into a pressure applied to the liquid in the pressure chamber, and a high pressure is applied to the liquid.

Japanese Patent No. 2721127

  However, in the liquid discharge head having the structure described in the above document, even if the pressure applied to the liquid is further increased in order to improve discharge capability, the elastic body that partitions the pressure chamber as the pressure in the pressure chamber increases. However, it escapes and deforms toward the outside of the pressure chamber. As a result, the pressure applied to the liquid is reduced by the amount of the escape deformation. That is, there is a problem that it is difficult for the liquid discharge head having the conventional structure to further improve the discharge capability.

  SUMMARY An advantage of some aspects of the invention is that it provides a liquid discharge head having a high discharge capability and a liquid discharge apparatus including the liquid discharge head.

  According to an aspect of the present invention, the liquid discharge head includes a pressure chamber that stores the liquid, a nozzle that communicates with the pressure chamber and discharges the liquid in the pressure chamber, and an elastic partition that partitions at least a part of the pressure chamber. An actuator for applying pressure to the liquid in the pressure chamber by deforming the elastic partition portion in a predetermined deformation direction, and when applying pressure to the liquid in the pressure chamber by driving the actuator The head main body includes a restricting portion that restricts the elastic partition portion from escaping and deforming toward the outside of the pressure chamber.

  According to this configuration, at least a part of the pressure chamber is partitioned by the elastic partition that is deformed by driving of the actuator. A pressure is applied to the liquid in a pressure chamber with a deformation | transformation of an elastic partition part, and a liquid is discharged from a nozzle.

  Since the liquid discharge head includes a restricting portion, when the elastic partition portion is deformed by driving the actuator, the elastic partition portion is restricted from escaping toward the outside of the pressure chamber. This reliably reduces the volume in the pressure chamber and ensures that a high pressure is applied to the liquid. As a result, the discharge capability of the liquid discharge head is improved.

  The head body is disposed opposite to the nozzle plate on which the nozzles are formed, the nozzle plate, and abuts against the elastic partition portion, and is relative to the elastic partition portion in the deformation direction as the actuator is driven. Displacement has a pressurizing part that expands and contracts the elastic partition part, and a through hole into which the pressurizing part is inserted, thereby holding the pressurizing part displaceable in the deformation direction. It is good also as being comprised by the laminated structure containing a holding | maintenance part.

  In this way, when the actuator is driven, the pressurizing part held by the holding part is relatively displaced in the deformation direction with respect to the elastic partition part, and the elastic partition part is stretched and deformed in the deformation direction. Thus, the volume in the pressure chamber changes, and a high pressure is applied to the liquid.

  Since the head body has a laminated structure, it is relatively easy to assemble, and can be manufactured at a low cost.

  The head body further includes a pressure chamber wall portion that is interposed between the nozzle plate and the holding portion and divides a part of the pressure chamber, and the elastic partition portion includes the pressure chamber wall portion and the holding portion. The regulating portion is configured by an adhesive layer that surrounds the outer peripheral surface of the elastic partition portion and bonds the pressure chamber wall portion and the holding portion to each other. Also good.

  By doing so, the adhesive layer that bonds the pressure chamber wall portion and the holding portion to each other functions as a restricting portion that restricts deformation of the elastic partition portion to the outside of the pressure chamber. The shared use of such members is advantageous in terms of reducing the number of parts and reducing the size of the head body.

  A depression may be formed in a surface of the pressure chamber wall portion that joins the holding portion, and the elastic partition portion may be disposed in the depression.

  By doing so, alignment adjustment of the elastic partition portion is facilitated when the head body is manufactured.

  The head body further includes a pressure chamber wall portion that is bonded to the nozzle plate and defines a part of the pressure chamber, and the pressure chamber wall portion has a surface opposite to a bonding surface of the nozzle plate. In addition, a recess recessed from the surface may be formed, the elastic partition portion may be disposed in the recess, and the restricting portion may be configured by an inner peripheral wall of the recess.

  In this configuration, the pressure chamber wall portion and the holding portion may be integrally formed, whereby the concave portion of the pressure chamber wall portion and the through hole of the holding portion may be continuous with each other.

  By doing so, the number of members is substantially reduced, which is advantageous in terms of downsizing the head body.

  The elastic partitioning portion is interposed between the nozzle plate and the holding portion stacked on each other, and the restricting portion surrounds an outer peripheral surface of the elastic partitioning portion, and the nozzle plate and the holding portion It is good also as being comprised by the contact bonding layer which mutually adhere | attaches.

  Since the head body has a structure in which the pressure chamber wall member is omitted, the number of members is reduced. Further, since the pressure chamber wall member is omitted, the volume of the pressure chamber is reduced, and the volume change rate of the pressure chamber (= volume change amount / volume of the pressure chamber) is relatively increased. As a result, the discharge capability of the liquid discharge head is further enhanced.

  In the nozzle plate, a recess may be formed in a joint surface with the holding portion, and the elastic partition portion may be disposed in the recess.

  Further, the nozzle plate is formed with a concave portion recessed from the surface on the holding portion side surface, the elastic partition portion is disposed in the concave portion, and the regulating portion is formed by an inner peripheral wall of the concave portion. It may be configured.

  Further, the nozzle plate and the holding portion may be integrally formed, whereby the concave portion of the nozzle plate and the through hole of the holding portion may be continuous with each other.

  The pressurizing part has a through hole that divides a part of the pressure chamber therein, and the head body is disposed on the opposite side of the nozzle plate with the holding part interposed therebetween. And further including a second pressure chamber wall portion that divides a part of the pressure chamber, wherein the elastic partition portion is interposed between the second pressure chamber wall portion and the holding portion, and the restriction portion May be constituted by an adhesive layer that surrounds the outer peripheral surface of the elastic partition portion and bonds the second pressure chamber wall portion and the holding portion to each other.

  That is, the elastic partitioning portion is not limited to be disposed between the pressurizing portion and the nozzle plate, but may be disposed on the opposite side to the nozzle plate sandwiching the pressurizing portion.

  The pressurizing unit may be provided with a supply hole that communicates with the pressure chamber and supplies the liquid to the pressure chamber.

  By doing so, the configuration of the liquid supply path for supplying the liquid to the pressure chamber is simplified.

  In the through hole of the holding part, there is a filler that fills a gap between the through hole and the pressurizing part and allows the pressurizing part to be displaced relative to the holding part by elastic deformation. It may be filled.

  By doing so, for example, when the head body is assembled, the pressing portion can be fixed to the holding portion, so that the assembly can be facilitated.

  Moreover, when the elastic partition part is deformed by the displacement of the pressurizing part, the elastic partition part is prevented from entering the gap between the pressurizing part and the through hole of the holding part. As a result, a high pressure is reliably applied to the liquid in the pressure chamber.

  The head main body further includes a head plate disposed at a position opposite to the nozzle plate with the holding portion interposed therebetween with a predetermined interval with respect to the holding portion, and the pressurizing portion includes: The actuator is fixed to a head plate, and the actuator is disposed between the holding unit and the head plate so as to surround the pressurizing unit, and is joined to both the holding unit and the head plate, respectively. It is good as well.

  Also, unlike this, the actuator is bonded to the nozzle plate and is also disposed so as to surround the pressurizing part, and also serves as a holding part for holding the pressurizing part, The head body further includes a head plate to which the actuator is joined, the pressurizing portion is fixed to the head plate, and the elastic partitioning portion is interposed between the actuator and the nozzle plate. The restricting portion may be configured by an adhesive layer that surrounds the outer peripheral surface of the elastic partitioning portion and adheres the actuator and the nozzle plate to each other. This reduces the number of members and further simplifies the structure of the head body.

  The pressurizing part passes through the head plate in the thickness direction, and the pressurizing part is formed with a supply hole that communicates with the pressure chamber and supplies the liquid to the pressure chamber. It is good.

  By doing so, the configuration of the liquid supply path is simplified, and the supply of the liquid to the pressure chamber becomes smooth.

  The actuator may be a piezoelectric actuator, and the pressurizing unit may be formed of an electrical insulator.

  By doing so, it is possible to reduce the distance between the actuator and the pressure unit, and the head body can be downsized.

  The actuator may be a piezoelectric actuator that is integrally formed with the pressure unit. This substantially reduces the number of members.

  A groove separating the two may be formed between the integrated piezoelectric actuator and the pressure unit.

  By doing so, the pressure unit integrated with the piezoelectric actuator is easily displaced by driving the piezoelectric actuator, and the driving efficiency of the liquid ejection head is improved.

  The head body may be configured such that the nozzle plate side is displaced among the nozzle plate side and the head plate side by driving the actuator.

  That is, the driving efficiency of the liquid discharge head is improved by displacing the relatively small mass side by driving the actuator.

  The liquid ejection head further includes at least two head bodies, and a base to which a head plate of each head body is fixed so that the nozzles of the head bodies are arranged in a predetermined arrangement. Also good.

  With this configuration, a configuration in which the nozzle plate side of the nozzle plate side and the head plate side is displaced by driving the actuator is realized.

  Further, in order to omit the base portion, the liquid discharge head includes at least two head bodies, and the head plate of each head body is common so that the nozzles of the head bodies are arranged in a predetermined arrangement. It is good also as being.

  According to another aspect of the invention, a liquid ejection apparatus includes the above-described liquid ejection head. For this reason, a liquid discharge apparatus with high discharge capability is realized.

  As described above, according to the present invention, it is possible to prevent the elastic partition section partitioning at least a part of the pressure chamber from escaping outward toward the outside of the pressure chamber, and to apply a high pressure to the liquid in the pressure chamber. Since it can be applied with certainty, the discharge capability is increased, and the discharge of small droplets and the discharge of high viscosity liquid can be realized.

It is a schematic perspective view which shows the liquid discharge apparatus which concerns on embodiment. FIG. 3 is a transverse cross-sectional view showing the head body according to the first embodiment. It is a cross-sectional view which expands and shows the vicinity of the elastic partition member of the said head main body. FIG. 6 is a transverse cross-sectional view showing a head body according to a modification of the first embodiment. FIG. 10 is a transverse cross-sectional view showing a head body according to another modification of the first embodiment. FIG. 6 is a transverse sectional view showing a head body according to a second embodiment. FIG. 6 is a transverse sectional view showing a head body according to a third embodiment. FIG. 6 is a transverse sectional view showing a head body according to a fourth embodiment. FIG. 9 is a transverse sectional view showing a head body according to a fifth embodiment. FIG. 10 is a transverse cross-sectional view showing a head body according to a modified example of Embodiment 5. FIG. 10 is a cross-sectional view showing a head body according to yet another modification of the fifth embodiment. FIG. 10 is a transverse sectional view showing a liquid head main body according to a sixth embodiment. FIG. 10 is a transverse sectional view showing a head body according to a seventh embodiment. FIG. 10 is a transverse sectional view showing a head body according to a modification of the seventh embodiment. FIG. 16 is a transverse sectional view showing a head body according to still another modification example of the seventh embodiment. FIG. 10 is a transverse sectional view showing a head body according to an eighth embodiment. FIG. 10 is a transverse sectional view showing a liquid ejection head according to a ninth embodiment. FIG. 10 is a cross-sectional view illustrating a liquid ejection head according to a modification example of Embodiment 9. FIG. 10 is a transverse sectional view showing a liquid ejection head according to a tenth embodiment. FIG. 22 is a transverse cross-sectional view illustrating a liquid ejection head according to a modification of the tenth embodiment. FIG. 20 is a transverse sectional view showing a liquid ejection head according to Embodiment 11. 14 is a plan view showing a liquid ejection head according to Embodiment 11. FIG. FIG. 22 is a transverse cross-sectional view illustrating a liquid ejection head according to a modified example of Embodiment 11.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It should be noted that the following description of the preferred embodiment is merely illustrative in nature, and is not intended to limit the present invention, its application, or its use.

(Embodiment 1)
FIG. 1 shows a schematic configuration of the liquid ejection apparatus A. The liquid ejection apparatus A includes a liquid ejection head 21 including one or a plurality of head main bodies (see FIG. 2 and the like), and a stage 31 that supports the recording material 4.

  The liquid discharge head 21 is reciprocated in the main scanning direction (X direction shown in FIG. 1) by the head moving device 2 supported on the apparatus base 6, and the stage 31 is also moved on the stage supported on the apparatus base 6. The apparatus 3 reciprocates in the sub-scanning direction (Y direction shown in FIG. 1).

  The head moving device 2 includes a carriage 22 that supports the liquid discharge head 21. The carriage 22 is guided by a carriage shaft 23 extending in the main scanning direction, and reciprocates in the main scanning direction by a driving source (for example, a motor) (not shown).

  The stage moving device 3 includes two stage shafts 32 and 32 that are arranged at a predetermined interval in the main scanning direction and extend in the sub scanning direction, respectively. The stage 31 is guided by these stage shafts 32 and 32 and reciprocates in the sub-scanning direction by a driving source (for example, a motor) (not shown).

  With this configuration, the liquid ejection apparatus A ejects a liquid material from the liquid ejection head 21 (head body) toward the recording material 4 while relatively moving the liquid ejection head 21 and the recording material 4 on the stage 31. Then, a desired pattern or a uniform thin film is formed on the recording material 4.

  As shown in FIG. 2, the head main body 91 includes a pressure chamber 11 in which a liquid material is accommodated, and a nozzle 12 that communicates with the pressure chamber 11. The head body 91 includes a nozzle plate 13 on which the nozzles 12 are formed, a pressure chamber wall member 14 that partitions the side surface of the pressure chamber 11, a holding member 16 that holds a pressurizing member 15 described later, an actuator 19, Is laminated in the vertical direction.

  The nozzle plate 13 is a plate-like member made of stainless steel having a thickness of about 0.3 mm, for example, and the bottom surface of the pressure chamber 11 is defined by the upper surface thereof.

  The nozzle 12 is formed so as to penetrate the nozzle plate 13 in the plate thickness direction, and the diameter thereof has a tapered shape that decreases from the proximal end toward the distal end. The diameter of the proximal end opening may be about φ0.2 mm, for example, and the diameter of the distal end opening may be about φ0.03 mm, for example.

  Although not shown, the lower surface of the nozzle plate 13 is preferably covered with a water repellent film from the viewpoint of liquid material ejection stability. This water repellent film can be formed by a known method.

  The pressure chamber wall member 14 is a plate-like member made of, for example, about 0.4 mm thick stainless steel, and is bonded to the upper surface of the nozzle plate 13 via an adhesive layer. The pressure chamber wall member 14 is formed with a pressure chamber hole 14a penetrating in the thickness direction. The pressure chamber hole 14a is a hole that divides the side surface of the pressure chamber 11 by the inner peripheral surface thereof, and may be formed, for example, in a circular cross section. Further, the diameter of the pressure chamber hole 14a may be, for example, about φ0.25 mm.

  The pressure chamber wall member 14 is also formed with a supply port 14b that extends in the horizontal direction in the middle in the thickness direction and communicates with the pressure chamber hole 14a. The supply port 14 b is a hole for supplying the liquid material from the liquid material supply source (not shown) into the pressure chamber 11. The supply port 14b may be, for example, a hole having a rectangular cross section with a side length of about 0.07 mm.

  The holding member 16 is a plate-like member having a thickness of about 0.3 mm, for example, and is bonded to the upper surface of the pressure chamber wall member 14 via an adhesive layer 18a. The holding member 16 is also formed with a through hole 16a penetrating in the plate thickness direction. The through hole 16a is a hole into which a pressure member 15 described later is inserted. In a state where the holding member 16 is bonded to the upper surface of the pressure chamber wall member 14, the pressure chamber hole 14 a of the pressure chamber wall member 14 and the through hole 16 a of the holding member 16 are coaxial with each other. What is necessary is just to set the diameter of the through-hole 16a suitably according to the diameter of the pressurization member 15, for example, may be about (phi) 0.8mm.

  The upper surface of the holding member 16 is fixed to other components of the head main body 91 (not shown in FIG. 2), so that the holding member 16 is not displaced even when the actuator 19 is driven. Yes.

  Between the holding member 16 and the pressure chamber wall member 14, an elastic partition member 18 that partitions the upper end portion of the side surface of the pressure chamber 11 is interposed. As will be described later, the elastic partition member 18 is a member for changing the volume of the pressure chamber 11 by elastically expanding and contracting when the pressure member 15 is displaced in the stacking direction as the actuator 19 is driven. For example, it is formed in an annular shape. The elastic partition member 18 may have, for example, an outer diameter of about φ0.9 mm and an inner diameter of about φ0.3 mm. The thickness may be about 0.02 mm to 0.1 mm, preferably about 0.05 mm. The elastic partition member 18 may be formed of, for example, a solvent-resistant rubber, specifically, fluorine rubber, silicon rubber, or the like in consideration of corrosion resistance against the liquid material.

  An adhesive layer 18 a that joins the holding member 16 and the pressure chamber wall member 14 to each other surrounds the outer peripheral surface of the elastic partition member 18. As a result, the adhesive layer 18 a regulates the elastic partition member 18 from being deformed to escape outward from the pressure chamber 11 when the elastic partition member 18 is elastically deformed.

  The pressure member 15 is inserted into and held in the through hole 16 a of the holding member 16, thereby abutting against the upper surface of the elastic partition member 18, and the pressure chamber 11 is pressed by the lower surface of the pressure member 15. The upper surface of is partitioned. The pressure member 15 is held by the holding member 16 so as to be displaceable in the stacking direction, and is displaced in the stacking direction (vertical direction) as the actuator 19 is driven, so that the elastic partition member 18 is expanded and contracted in the stacking direction. . The pressure member 15 is a disk-shaped member made of a relatively high rigidity material such as stainless steel or ceramic, and has an outer diameter of about φ0.7 mm, for example. About 0.3 mm which is the same as the above.

  A gap between the pressure member 15 and the through hole of the holding member 16 is filled with a filler 16b. The filler 16b is elastically deformed so that the pressure member 15 can be displaced in the stacking direction. The filler 16b can be omitted.

  The actuator 19 is made of, for example, a laminated piezoelectric material having a thickness of 1 mm. One end (lower end) in the stacking direction is joined to the upper surface of the pressure member 15 and the other end (upper end) is not shown. It is being fixed to the structural member. The actuator 19 expands and contracts in the vertical direction in FIG. 2 when a voltage is applied to an electrode not shown in FIG. 2 (see the arrow in FIG. 2). As the actuator 19 is driven, the pressure member 15 is displaced in the vertical direction in FIG. 2, and the elastic partition member 18 is expanded and contracted in the vertical direction accordingly, whereby the volume of the pressure chamber 11 is increased or decreased. .

  Next, the operation of the head main body 91 having the above configuration will be described. A predetermined voltage (for example, 20 V) is applied to the actuator 19 in a state where the supply port 14b, the pressure chamber 11, and the nozzle 12 are filled with the liquid material. As a result, the actuator 19 is extended and deformed (see the arrow in the figure).

  As the pressure member 15 is displaced downward as the actuator 19 is extended and deformed, the elastic partition member 18 is contracted and deformed, and pressure is applied to the liquid material in the pressure chamber 11. Then, the liquid material is pushed out from the nozzle 12 and ejected as droplets toward the recording material 4. The droplets adhere to the upper surface of the recording material 4 in the form of dots.

  By canceling the voltage application to the actuator 19, the actuator 19 that has been extended returns to its original state, the pressurizing member 15 is displaced upward, and the volume of the pressure chamber 11 returns to its original state. At this time, the liquid material is replenished into the pressure chamber 11 from the supply source of the liquid material through the supply port 14b.

  In the head main body 91, as shown in FIG. 3, when the elastic partition member 18 is compressed in the stacking direction by driving the actuator 19, the pressure of the pressure chamber 11 is increased to cause the elastic partition member 18 to move to the pressure chamber 11. The evacuation deformation of the elastic partition member 18 is restricted by the adhesive layer 18 a (see the arrow in FIG. 3), and the elastic partition member 18 is inward of the pressure chamber 11. Deforms toward. This ensures that a high pressure is applied to the liquid material in the pressure chamber 11.

  As a result, the discharge capacity of the head main body 91 is increased, and small droplet discharge and high viscosity liquid discharge are realized. The head main body 91 having the above-described configuration can discharge a high-viscosity liquid having a viscosity of, for example, 50 cP (0.05 Pa · s) with a small droplet amount of about 20 pl (picoliter).

  In addition, by filling the through hole 16a of the holding member 16 with the filler 16b, when the elastic partition member 18 is compressed, the elastic partition member 18 enters the gap between the pressure member 15 and the through hole 16a. In this case, a higher pressure can be applied to the liquid material in the pressure chamber 11.

  Here, the actuator 19 is not driven by the so-called push-pull drive as described above, but after the pressurizing member 15 is displaced upward to fill the pressure chamber 11 with the liquid material, the pressurizing member 15 is moved. It is good also as what is called pulling drive which discharges a liquid material from the nozzle 12 by returning to the original.

(Modification)
Various modifications can be considered as the arrangement position of the actuator 19 in the head body. For example, the lower end of the actuator 19 may be joined to the upper surface of the holding member 16 as in a head main body 92 shown in FIG. In this case, the upper end of the actuator 19 and the pressure member 15 may be fixed to, for example, the other constituent members described above. By doing so, when the actuator 19 is driven, the elastic partitioning member 18 is relatively displaced with respect to the pressing member 15 in the stacking direction, so that the elastic partitioning member 18 expands and contracts.

  Further, in the head main body 92 shown in FIG. 4, the upper end of the actuator 19 and the pressure member 15 may be connected to each other by a connecting member or the like. By doing so, when the actuator 19 is driven, the pressurizing member 15 is displaced via the connecting member, whereby the elastic partition member 18 is expanded and contracted.

  Further, the upper end of the actuator 19 may be joined to the lower surface of the nozzle plate 13 as in the head main body 93 shown in FIG. In this case, the lower end of the actuator 19 and the pressure member 15 are fixed to other constituent members, respectively. By doing so, when the actuator 19 is driven, the elastic partitioning member 18 is relatively displaced with respect to the pressing member 15 in the stacking direction, so that the elastic partitioning member 18 expands and contracts.

(Embodiment 2)
FIG. 6 shows a head body 94 according to the second embodiment. In the head main body 94 of the second embodiment, the same components as those of the head main body 91 shown in FIG.

  In the head main body 94, a recess 14c is formed on the upper surface of the pressure chamber wall member 14 coaxially with the pressure chamber hole 14a, and the elastic partition member 18 is disposed in the recess 14c. Here, the recess 14c may have an inner diameter of about 1.0 mm and a depth of about 0.03 mm, for example.

  By forming the recess 14c for arranging the elastic partition member 18 in this manner, there is an advantage that the elastic partition member 18 can be easily positioned when the head main body 94 is assembled.

(Embodiment 3)
FIG. 7 shows a head body 95 according to the third embodiment. In addition, in the head main body 95 of Embodiment 3, the same code | symbol is attached | subjected about the same structure as the head main body 94 shown in FIG. 6, and the description is abbreviate | omitted suitably.

  In the head main body 95, the pressure chamber wall member 14 and the holding member 16 in the head main body 94 shown in FIG. 6 are integrated with each other instead of being bonded via the adhesive layer 18a (one point in FIG. 6). (Refer to the chain line, hereinafter, this integrated member is referred to as an integrated member 40).

  In the integrated member 40, the recess 14c in the pressure chamber wall member 14 and the through hole 16a in the holding member 16 are continuous to form an accommodation recess 40a, and the elastic partition member 18 is formed on the bottom surface of the accommodation recess 40a. Is disposed, and the pressurizing member 15 inserted into the accommodating recess 40a is in contact with the elastic partition member 18. The gap between the pressure member 15 and the accommodation recess 40a is filled with a filler 16b.

  In the head main body 95 of this structure, the outer peripheral surface of the elastic partition member 18 is surrounded by the inner peripheral wall of the housing recess 40a, and when the elastic partition member 18 is compressed in the stacking direction by driving the actuator 19, the housing recess 40a The inner peripheral wall restricts the elastic partition member 18 from being deformed toward the outside of the pressure chamber 11. Thus, a high pressure is reliably applied to the liquid material in the pressure chamber 11.

  Further, the head main body 95 having this structure is advantageous in terms of downsizing the head main body 95 because the number of members is substantially reduced.

(Embodiment 4)
FIG. 8 shows a head body 96 according to the fourth embodiment. In addition, in the head main body 96 of Embodiment 4, the same code | symbol is attached | subjected about the same structure as the head main body 92 shown in FIG. 4, and the description is abbreviate | omitted suitably.

  In the head body 96, the pressure chamber wall member 14 is omitted as compared with the head body 92 shown in FIG. That is, in the head main body 96, the holding member 16 is bonded to the upper surface of the nozzle plate 13 via the adhesive layer 18 a, and the elastic partition member 18 is interposed between the holding member 16 and the nozzle plate 13. It is installed. In the example shown in the figure, a recess 13a for arranging the elastic partition member 18 is formed on the upper surface of the nozzle plate 13. However, the recess 13a can be omitted.

  In the head main body 96 having this structure, the side surface of the pressure chamber 11 is partitioned by the inner peripheral surface of the elastic partition member 18, and the outer peripheral surface of the elastic partition member 18 is formed by the holding member 16 and the nozzle plate 13. Are surrounded by an adhesive layer 18a. Therefore, when the elastic partition member 18 is compressed in the stacking direction by driving the actuator 19, the adhesive layer 18a regulates the escape deformation of the elastic partition member 18.

  In the illustrated example, the pressing member 15 is disposed so as to protrude above the upper surface of the holding member 16. A through hole 15a is formed in the pressure member 15 along the central axis. The lower end opening of the through hole 15 a communicates with the pressure chamber 11, and the through hole 15 a functions as a supply port for supplying a liquid material to the pressure chamber 11. Thus, by forming the supply port in the pressure member 15, there is an advantage that the configuration of the liquid material supply system is simplified. The diameter of the through hole 15a (supply port) may be about φ0.07 mm, for example.

  In the head main body 96 having this structure, the volume of the pressure chamber 11 is reduced by omitting the pressure chamber wall member 14. As a result, the volume change rate (= volume change amount / volume of the pressure chamber) of the pressure chamber 11 becomes relatively large, and the discharge capacity of the head body 96 is further increased.

  Moreover, since the number of manufacturing steps is reduced by reducing the number of parts, the manufacturing cost can be reduced.

(Embodiment 5)
FIG. 9 shows a head body 97 according to the fifth embodiment. In addition, in the head main body 97 of Embodiment 5, the same code | symbol is attached | subjected about the same structure as the head main body 96 shown in FIG. 8, and the description is abbreviate | omitted suitably.

  The head main body 97 has a head plate 41 disposed on the opposite side of the nozzle plate 13 with the holding member 16 in between, and an actuator 19 is interposed between the head plate 41 and the holding member 16 as described later. An interval corresponding to the thickness of is provided.

  The head plate 41 is a plate-like member made of stainless steel having a thickness of about 2.0 mm, for example, and has a through hole 41a penetrating in the thickness direction. As will be described later, the through-hole 41a is a hole that becomes a part of the supply port of the liquid material, and the diameter thereof may be, for example, about φ0.06 mm.

  The pressurizing member 15 has an upper end fixed to the lower surface of the head plate 41, and the through hole 41 a of the head plate 41 and the through hole 15 a of the pressurizing member 15 communicate with each other. A supply port for supplying the material is configured.

  The actuator 19 is disposed so as to surround the outer periphery of the pressure member 15 so that the pressure member 15 is positioned in a through hole 19a formed so as to penetrate in the thickness direction. The actuator 19 is made of a laminated piezoelectric material, and its lower end is bonded to the upper surface of the holding member 16 and its upper end is bonded to the lower surface of the head plate 41. The actuator 19 may have, for example, a thickness of about 1.0 mm and a diameter of the through hole 19a of about φ0.9 mm.

  In the head body 97 having this structure, it is preferable that the pressure member 15 is made of an electrically insulating material such as alumina or ceramic. By doing so, it is possible to reduce the gap between the pressure member 15 and the actuator 19 made of a laminated piezoelectric material. In other words, this is advantageous in reducing the size of the head body 97.

  In addition, although illustration is abbreviate | omitted, you may make it fill the clearance gap between the pressurization member 15 and the actuator 19 with a filler. The filler used in this case may be an electrically insulating filler.

  Although illustration is omitted, the inner peripheral surface of the through hole may define a part of the side surface of the pressure chamber 11 by appropriately changing the shape of the through hole formed in the pressure member 15. That is, a part of the pressure chamber 11 may be formed inside the pressure member 15.

(Modification 1)
FIG. 10 shows a first modification. In the head main body 98, the pressurizing member 15 is disposed through the head plate 41.

  That is, the head plate 41 is formed with a relatively large-diameter through hole into which the pressure member 15 can be inserted. The pressure member 15 is disposed so as to protrude upward from the head plate 41 in a state where the pressure member 15 is inserted into the through hole. In the head main body 98, a supply port for supplying the liquid material to the pressure chamber 11 is configured by a through hole 15a formed through the pressurizing member 15 along the central axis thereof. The diameter of the through hole 15a may be set to about 0.08 mm.

  In this configuration, since the liquid material supply port is configured by a single member (that is, the pressurizing member 15), the filling of the liquid material into the pressure chamber 11 becomes smooth, and the assembly of the head body 98 is easy. Can also be achieved.

(Modification 2)
FIG. 11 shows a second modified example, and this head body 99 reduces the flow path resistance by devising the shape of the supply port formed of a through hole formed in the pressure member 15, thereby the pressure chamber 11. The liquid material can be supplied more smoothly.

  Specifically, the supply port 42 has, in order from the upper end (upstream side) to the lower end (downstream side), a relatively large-diameter large-diameter portion 42a and a neck portion whose diameter is reduced compared to the large-diameter portion 42a. 42b and the diameter-expanding part 42c which a diameter expands gradually toward the pressure chamber 11 are comprised by continuation.

  The supply port 42 having this configuration includes the neck portion 42 b, thereby preventing the backflow of the liquid material when the pressure of the pressure chamber 11 is increased by driving the actuator 19, so that the liquid material in the pressure chamber 11 is discharged from the nozzle 12. On the other hand, the flow path resistance is reduced by providing the large diameter portion 42a, and the supply of the liquid material to the pressure chamber 11 is improved. Further, by arranging the enlarged diameter portion 42c, the neck portion 42b, and the large diameter portion 42a in this order from the lower end to the upper end, the diameter does not rapidly decrease at the supply port 42, in other words, no step is generated. No bubbles remain on the surface. Thereby, discharge failure of the liquid material is prevented, and good discharge of the liquid material is realized.

  The diameter of the large diameter portion 42a may be, for example, about φ0.2 mm, the diameter of the neck portion 42b may be, for example, about φ0.08 mm, and the diameter of the lower end opening in the enlarged diameter portion 42c may be, for example, about φ0.25 mm.

(Embodiment 6)
FIG. 12 shows the head body 100 according to the sixth embodiment. In the head main body 100 of the sixth embodiment, the same components as those of the head main body 99 shown in FIG. 11 are denoted by the same reference numerals and description thereof is omitted as appropriate.

  In the head main body 100, the holding member 16 and the nozzle plate 13 in the head main body 99 shown in FIG. 11 are integrated with each other rather than being bonded via the adhesive layer 18a (see the one-dot chain line in FIG. 12). Hereinafter, this integrated member is referred to as an integrated member 43).

  In the integrated member 43, the recess 13a in the nozzle plate 13 and the through hole 16a in the holding member 16 are continuous to form an accommodation recess 43a. As in the third embodiment, the bottom surface of the accommodation recess 43a is formed. In addition, the elastic partition member 18 is disposed, and the pressurizing member 15 inserted in the housing recess 43 a is in contact with the elastic partition member 18. The gap between the pressure member 15 and the housing recess 43a is filled with a filler 16b.

  In the head main body 100 having this structure, the number of members is further reduced, and the manufacturing cost is further reduced.

(Embodiment 7)
FIG. 13 shows a head body 101 according to the seventh embodiment. In the head body 101 of the seventh embodiment, the same components as those of the head body 98 shown in FIG.

  Compared with the head main body 98 shown in FIG. 10, the head main body 101 has the holding member 16 omitted, and the actuator 19 also serves as a holding portion for holding the pressure member 15 instead.

  That is, in the head body 101, the lower end of the actuator 19 made of a laminated piezoelectric material is bonded to the nozzle plate 13 via the adhesive layer 18 a, and the elastic partition member 18 is formed between the actuator 19 and the nozzle plate 13. It is interposed between.

  Thus, in the head main body 101 having this structure, the outer peripheral surface of the elastic partition member 18 is surrounded by the adhesive layer 18 a that joins the actuator 19 and the nozzle plate 13, and the elastic partition member 18 is driven by the actuator 19. When compressed in the stacking direction, the adhesive layer 18a regulates the escape deformation of the elastic partition member 18.

  In the head main body 101 of this configuration, the filler 19 b is filled in the gap between the pressure member 15 and the through hole 19 a of the actuator 19. However, the filler 19b can be omitted as appropriate.

  The head body 101 having this structure is advantageous in terms of manufacturing cost because the number of members is further reduced.

(Modification)
In the configuration in which the actuator 19 also serves as the holding portion, for example, as shown in FIG. 14, for example, the pressure member and the actuator can be integrally formed.

  That is, in the head main body 102, an integrated member 44 in which a pressurizing member (pressurizing unit) and an actuator (multilayer piezoelectric actuator) are integrally formed is interposed between the nozzle plate 13 and the head plate 41. . The integrated member 44 is a plate-like member as a whole having a structure in which an actuator 44b in which an electrode 44d is surrounded surrounds a pressure portion 44a in which no electrode is formed. The integrated member 44 has an upper surface bonded to the head plate 41 via an adhesive layer, and a lower surface bonded to the nozzle plate 13 via an adhesive layer 18a. A through hole 44c that penetrates in the thickness direction and communicates with the pressure chamber 11 is formed at the center of the pressurizing unit 44a. The through hole 44c functions as a supply port for the liquid material.

  As an example, the integrated member 44 can be manufactured by the following procedure. That is, a plurality of green sheets on which an annular electrode is formed so as to surround a central portion where no electrode is formed are prepared, and a green laminate having a predetermined thickness is created by laminating them. Then, the green laminated body is fired, and then an appropriate processing method such as laser processing is adopted to form the through hole 44c through the center of the non-electrode forming portion.

  Thus, in the integrated member 44, the portion where the electrode 44d is formed functions as a stacked piezoelectric actuator 44b that expands and contracts in the vertical direction, while the portion where no electrode is formed is a deformation of the actuator 44b. It comes to function as a pressurizing part 44a that is displaced in the vertical direction as it is driven.

  For example, like the head main body 103 shown in FIG. 15, after firing the green laminate, an appropriate processing method such as etching or laser processing is adopted, and the surface on the side in contact with the elastic partition member 18 is used. A groove 44e that is recessed in the thickness direction may be formed. The groove 44e is a groove that separates the pressure unit 44a and the actuator 44b. For example, the groove 44e may have an annular shape with an outer diameter of about 0.9 mm, an inner diameter of about 0.7 mm, and a depth of about 0.9 mm.

  By forming such a groove 44e, the pressure portion 44a is easily displaced in the vertical direction when the actuator 44b is driven to deform, and the driving efficiency of the liquid ejection head is improved. In addition, although illustration is abbreviate | omitted, you may make it fill this groove | channel 44e with the filler which has electrical insulation, for example. By doing so, a short circuit of the actuator 44b can be prevented.

(Embodiment 8)
FIG. 16 shows the head body 104 according to the eighth embodiment. In the head body 104 of the eighth embodiment, the same components as those of the head body 96 shown in FIG. 8 are denoted by the same reference numerals, and the description thereof is omitted as appropriate.

  In the head main body 104, the pressure member 15 has a through hole 15a having a relatively large diameter along its central axis. A part of the side surface of the pressure chamber is formed by the inner peripheral surface of the through hole 15a. Is partitioned. The diameter of the through hole 15a of the pressing member 15 may be set to about φ0.3 mm, for example.

  The pressurizing member 15 is inserted and held in the through hole 16a of the holding member 16, whereby the lower end abuts against the upper surface of the elastic partition member 18, and the upper end is a second to be described later. The elastic partition member 52 is in contact with the lower surface.

  In the head main body 104, a second pressure chamber wall member 51 is disposed on the opposite side of the nozzle plate 13 with the holding member 16 interposed therebetween. The second pressure chamber wall member 51 is bonded to the holding member 16 via an adhesive layer 52a.

  The second pressure chamber wall member 51 is a plate-like member made of, for example, stainless steel, and defines the upper surface of the pressure chamber 11. The second pressure chamber wall member 51 is formed with a through hole 51 a penetrating in the thickness direction. The through hole 51 a communicates with the pressure chamber 11 and supplies a liquid material into the pressure chamber 11. To serve as a supply port. The diameter of the through hole 51a may be, for example, about φ0.06 mm.

  A second elastic partition member 52 is interposed between the holding member 16 and the second pressure chamber wall member 51. The second elastic partition member 52 partitions the upper end portion of the side surface of the pressure chamber 11 by its inner peripheral surface. The outer peripheral surface is surrounded by an adhesive layer 52a that joins the holding member 16 and the second pressure chamber wall member 51 to each other, whereby the second elastic partition member 52 is laminated by driving the actuator 19. When compressed in the direction, escape deformation of the second elastic partition member 52 is regulated by the adhesive layer 52a.

  The elastic partition member 18 that contacts the lower end of the pressure member 15 partitions the lower end portion of the side surface of the pressure chamber.

  Thus, the elastic partition member that partitions a part of the pressure chamber 11 is not limited to being disposed below the pressurizing member 15, and may be provided above the pressurizing member 15. In the head main body 104 having this configuration, the elastic partition member 18 disposed below the pressure member 15 can be omitted.

(Embodiment 9)
FIG. 17 shows a liquid ejection head 21 according to the ninth embodiment. The liquid discharge head 21 according to the ninth embodiment is configured by fixing a plurality of head main bodies to the base material 71.

  The base material 71 is a plate-shaped member made of stainless steel or ceramic, and a plurality of (four in the illustrated example) accommodating portions 72 that penetrate each in the thickness direction are formed at predetermined intervals in the longitudinal direction. ing.

  Each accommodating portion 72 accommodates the head main body 105 and the head plate 41 is fixed to the base material. The configuration of the head main body 105 is not particularly limited, and for example, a head main body having the configuration shown in each of FIGS.

  The head plate 41 and the base material 71 may be fixed using an adhesive or the like, or may be mechanically fixed using a fastening means such as a screw. Further, for example, mechanical fixing using means such as a clamp using a spring force may be employed. Then, the lower surface of the nozzle plate 13 of each head body 105 is exposed downward through the lower end opening of each housing portion 72.

  In this configuration in which the plurality of head main bodies 105 are fixed to the base material 71, there is an advantage that the nozzle pitch of the liquid discharge head 21 can be freely changed by changing the arrangement of the head main bodies 105.

  In addition, by fixing the head plate 41 to the base material 71, when the actuator of each head body 105 is driven, the nozzle plate 13 side of the head plate 41 and the nozzle plate 13 is displaced ( For example, see the dashed-dotted arrow shown in FIG. 9), whereby the elastic partition member 18 is compressed and deformed. Thus, the drive efficiency of the liquid ejection head 21 is improved by displacing the relatively small mass side, here the nozzle plate 13 side, by driving the actuator.

  The configuration of the head main body 105 fixed to the base 71 is not limited to the same one, and for example, head main bodies having different configurations may be fixed to the same base 71.

(Modification)
FIG. 18 shows a liquid ejection head 21 according to a modified example. In this example, the head plate 73 of the head main body 105 is shared among the plurality of head main bodies 105. By doing so, the substrate 71 can be omitted. Note that the thickness of the head plate 73 may be changed according to the number of head bodies 105 and the length thereof. The thickness of the head plate 73 may be about 3.0 mm to 5.0 mm, for example.

(Embodiment 10)
FIG. 19 shows the head body 106 according to the tenth embodiment. In addition, in the head main body 106 of Embodiment 10, the same code | symbol is attached | subjected about the same structure as the head main body 94 shown in FIG. 6, and the description is abbreviate | omitted suitably.

  The head main body 106 does not include a nozzle plate having a nozzle formed therethrough, and the nozzle 12 opens on the side surface of the pressure chamber wall member 14. That is, the pressure chamber wall member 14 is formed with a pressure chamber recess 14d that does not penetrate the pressure chamber wall member 14 so as to open on the upper surface thereof. The supply port 14b communicates with the side surface of the pressure chamber recess 14d, and the pressure chamber wall member 14 is positioned in the middle of the pressure chamber wall member 14 on the side opposite to the supply port 14b across the pressure chamber recess 14d. A discharge port 14e extending in the horizontal direction is formed. The discharge port 14e communicates with the side surface of the pressure chamber recess 14d, and the tip portion of the discharge port 14e is tapered to form the nozzle 12. As described above, the nozzle 12 is a pressure chamber wall member. 14 is open on the side surface.

  As described above, the head main body 106 may be configured to eject the liquid material in a direction (in this embodiment, the horizontal direction) different from the expansion / contraction direction (that is, the vertical direction) of the elastic partition member 18.

  FIG. 20 shows a modified example. In the head main body 107, a supply port for supplying a liquid material to the pressure chamber 11 is constituted by a through hole 15 a formed through the pressurizing member 15. . That is, the arrangement of the supply ports can be set as appropriate.

(Embodiment 11)
21 and 22 show the head main body 108 according to the eleventh embodiment. In the head body 108 of the eleventh embodiment, the same components as those in the head body 106 shown in FIG.

  The head body 108 is formed so that the pressure chamber 11 does not have a circular cross section and extends in the left-right direction in FIGS. That is, the pressure chamber wall member 14 is formed with a pressure chamber recess 14f that extends in the left-right direction on the upper surface and is recessed from the upper surface, and a recess 14g is formed on the upper surface of the pressure chamber recess 14f. It is formed slightly larger than the opening 14f. The pressure chamber wall member 14 is also formed with a discharge port 14h communicating with the pressure chamber 11 by opening at the bottom of one side (left side in the example) of the pressure chamber recess 14f in the left-right direction. The tip of the discharge port 14 h is tapered and opens on the lower surface of the pressure chamber wall member 14. The tip of the discharge port 14 h functions as the nozzle 12. In addition, as shown in FIG. 6 etc., you may make it adhere | attach the nozzle plate 13 in which the nozzle 12 was penetrated by the lower surface of the pressure chamber wall member 14. As shown in FIG.

  In the recess 14g of the pressure chamber wall member 14, an elastic partition member 18 having a substantially rectangular hole formed therein is disposed, and the holding member 16 adheres to the upper surface of the pressure chamber wall member 14. Has been. Accordingly, the adhesive layer 18 a that joins the holding member 16 and the pressure chamber wall member 14 to each other surrounds the outer peripheral surface of the substantially rectangular elastic partition member 18.

  A through hole 16c having a substantially rectangular cross section is formed in the holding member 16, and a substantially rectangular pressure member 15 elongated in the left and right directions is inserted into the through hole 16c and held.

  Thus, a substantially rectangular actuator 15 that is also elongated to the left and right is joined to the upper surface of the pressure member 15.

  Thus, the shape of the pressure chamber 11 is not limited to a circular shape, and can be set as appropriate.

  FIG. 23 shows a modified example. The head body 109 has a discharge port 14e extending in the middle in the plate thickness direction of the pressure chamber wall member 14 in the horizontal direction, and the nozzle 12 has a pressure chamber. An opening is formed on the side surface of the wall member 14. That is, there is no limitation on the combination of the shape of the pressure chamber 11 and the discharge direction of the liquid material.

(Other embodiments)
Note that the embodiments described above can be combined as appropriate.

  The actuator in the present invention is not limited to a piezoelectric actuator. Any member can be used as long as it deforms the elastic partition member by being displaced by receiving energy supply. For example, a magnetostrictive element or the like can be used.

  The liquid ejection head and the liquid ejection apparatus according to the present invention can also be applied to an ink ejection head and an image recording apparatus that form an image by ejecting ink onto recording paper or the like.

  As described above, since the present invention realizes discharge of small droplets and high-viscosity liquid, various patterns and uniform thin films are formed for manufacturing various devices such as liquid crystal panels and circuit boards. The present invention is useful as a liquid material discharge head and a liquid material discharge device, and an ink discharge head and an image forming apparatus that form an image on a recording medium such as recording paper by discharging ink.

11 Pressure chamber 12 Nozzle 13 Nozzle plates 13a, 14c, 14g Depression 14 Pressure chamber wall member (pressure chamber wall)
15 Pressurizing member (pressurizing part)
15a Through hole (supply hole)
16 Holding member (holding part)
16a, 16c Through-hole 16b Filler 18 Elastic partition member (elastic partition part)
18a Adhesive layer (Regulator)
19 Actuator 21 Liquid Discharge Head 40a, 43a Recess 41 Head Plate 44e Groove 51 Second Pressure Chamber Wall Member (Second Pressure Chamber Wall)
52 2nd elastic division member (elastic division part)
52a Adhesive layer (Regulator)
71 Base material (base)
91-109 Head Main Body A Liquid Discharge Device

Claims (6)

A pressure chamber containing liquid,
A nozzle that communicates with the pressure chamber and discharges the liquid in the pressure chamber;
An elastic partition section partitioning at least a part of the pressure chamber;
An actuator that applies pressure to the liquid in the pressure chamber by deforming the elastic partition portion in a predetermined deformation direction; and
A restricting portion for restricting the elastic partition portion from escaping toward the outside of the pressure chamber when a pressure is applied to the liquid in the pressure chamber by driving the actuator;
Including a head body including
The head body is
A nozzle plate on which the nozzle is formed,
The elastic partition is disposed to face the nozzle plate and abuts on the elastic partition, and is relatively displaced in the deformation direction with respect to the elastic partition as the actuator is driven. Pressure section, and
The pressurizing part has a through-hole into which the pressurizing part is inserted, thereby being configured in a laminated structure including a holding part that holds the pressurizing part displaceably in the deformation direction,
The elastic partitioning portion is interposed between the nozzle plate and the holding portion that are stacked on each other,
The restricting portion surrounds an outer peripheral surface of the elastic partition portion, and is configured by an adhesive layer that bonds the nozzle plate and the holding portion to each other. The liquid discharge head according to claim 1,
In the nozzle plate, a recess is formed in the joint surface with the holding portion,
The elastic partition portion is a liquid discharge head disposed in the recess. A pressure chamber containing liquid,
A nozzle that communicates with the pressure chamber and discharges the liquid in the pressure chamber;
An elastic partition section partitioning at least a part of the pressure chamber;
An actuator that applies pressure to the liquid in the pressure chamber by deforming the elastic partition portion in a predetermined deformation direction; and
A restricting portion for restricting the elastic partition portion from escaping toward the outside of the pressure chamber when a pressure is applied to the liquid in the pressure chamber by driving the actuator;
Including a head body including
The head body is
A nozzle plate on which the nozzle is formed,
The elastic partition portion is arranged to face the nozzle plate and abut against the elastic partition portion, and is relatively displaced in the deformation direction with respect to the elastic partition portion as the actuator is driven. Pressure section, and
The pressurizing part has a through hole into which the pressurizing part is inserted.
In the nozzle plate, a concave portion recessed from the surface is formed on the surface on the holding portion side, and the elastic partition portion is disposed in the concave portion,
The restricting portion is a liquid ejection head constituted by an inner peripheral wall of the recess. The liquid ejection head according to claim 3,
The nozzle plate and the holding portion are integrally formed, whereby the concave portion of the nozzle plate and the through hole of the holding portion are continuous with each other. The liquid ejection head according to claim 3,
The head main body further includes a head plate disposed at a position opposite to the nozzle plate across the holding portion with a predetermined interval with respect to the holding portion,
The pressurizing part is fixed to the head plate,
The actuator is disposed between the holding unit and the head plate so as to surround the pressure unit, and is joined to both the holding unit and the head plate. The liquid ejection head according to claim 5, wherein
The pressurizing part passes through the head plate in the thickness direction,
The liquid ejection head, wherein the pressurizing unit is formed with a supply hole that communicates with the pressure chamber and supplies the liquid to the pressure chamber.

Images