JP5221513B2 - 被覆窓ガラス - Google Patents
被覆窓ガラス Download PDFInfo
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- JP5221513B2 JP5221513B2 JP2009502115A JP2009502115A JP5221513B2 JP 5221513 B2 JP5221513 B2 JP 5221513B2 JP 2009502115 A JP2009502115 A JP 2009502115A JP 2009502115 A JP2009502115 A JP 2009502115A JP 5221513 B2 JP5221513 B2 JP 5221513B2
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- 239000005357 flat glass Substances 0.000 title claims description 46
- 238000000576 coating method Methods 0.000 claims description 108
- 150000001875 compounds Chemical class 0.000 claims description 89
- 239000011248 coating agent Substances 0.000 claims description 88
- 150000004767 nitrides Chemical class 0.000 claims description 53
- 230000004888 barrier function Effects 0.000 claims description 40
- 230000001737 promoting effect Effects 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 230000003667 anti-reflective effect Effects 0.000 claims description 21
- 239000011701 zinc Substances 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 18
- 229910003087 TiOx Inorganic materials 0.000 claims description 17
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052709 silver Inorganic materials 0.000 claims description 16
- 239000004332 silver Substances 0.000 claims description 15
- 229910007610 Zn—Sn Inorganic materials 0.000 claims description 11
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 4
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 229910008813 Sn—Si Inorganic materials 0.000 claims description 2
- 229910016338 Bi—Sn Inorganic materials 0.000 claims 1
- 238000005728 strengthening Methods 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 414
- 238000010438 heat treatment Methods 0.000 description 33
- 238000004544 sputter deposition Methods 0.000 description 20
- 239000011241 protective layer Substances 0.000 description 18
- 238000000151 deposition Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 13
- 230000008021 deposition Effects 0.000 description 11
- 238000002834 transmittance Methods 0.000 description 11
- 239000000126 substance Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000003750 conditioning effect Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910004205 SiNX Inorganic materials 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000005546 reactive sputtering Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000005329 float glass Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229940123973 Oxygen scavenger Drugs 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006392 deoxygenation reaction Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000012764 semi-quantitative analysis Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3694—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Description
ベース層5及び任意の成長促進層6からなる下方反射防止層2、
IR反射層3
任意のバリア層7、
上方反射防止層4及び
任意の最外保護層9を備える。
第一ベース層15及び第一(任意)の成長促進層16からなる第一下方反射防止層12、
第一IR反射層13、
第一(任意の)バリア層17、
中心層39及び第二(任意)の成長促進層26からなるスペーサ層20、
第二のIR反射層23、
第二(任意)のバリア層27及び
第二の上方反射防止層24を備える。
下記の表1に示すような数個の層を備えるコーティングを、下記のターゲット又はターゲット対を配置した数個の分離スパッタリング室を有するスパッタリングプラント内で窓ガラス上に堆積させた。
(1)第一のターゲット対は(a)約10重量%のAlを主ドーパントとして含む金属をドープしたSiターゲット(W.C.HeraeusからSISPA(商標)10として市販)と、(b)約2重量%のAl2O3を含むAlをドープしたセラミックZn酸化物ターゲット(W.C.HeraeusからZAO(商標)として市販)とを備える。
(2)亜鉛ターゲット;
(3)銀ターゲット;
(4)第二のターゲット対は(a)セラミックTiOxターゲット(x<2)(TiOxターゲットはW.C.HeraeusからCLATO(商標)として市販)と、(b)約2重量%のAl2O3を含むセラミックZnO:Alターゲット(W.C.HeraeusからZAO(商標)として市販)とを備える。
実施例1と本質的に同じ層順序と厚さを有するコーティングを堆積した。しかしながら、実施例1以外の化合物層は、基板をAlをドープしたSi(Si:Al)/AlをドープしたZnO(ZnO:Al)ターゲット対の下で約4倍早く通し、したがって8―16―8パスを用いて、実施例1と本質的に同じ全体厚みを有する三つの化合物層を堆積することにより堆積させた。堆積条件を表3に要約する。
実施例1及び2のものと同様の層順序を有する比較のコーティングを製造した。ただし、全ての化合物層15,39及び24を、スパッタガスとしてAr及びN2を含むスパッタリング雰囲気中で、AlをドープしたSiターゲットの反応性スパッタリングによって製造した適切な厚さの純粋な(Alをドープした)Si窒化物層と置換した。
本発明のコーティングの化合物層15,39及び24及び比較例コーティングのSiNx層の厚さを、それぞれ40,80及び40nm(実施例1の35,70及び35nmと比較して)に設定し、ターゲット下わずかに減じた速度の2―4―2パスで達成した。
10kW:4kWの電力比をSi:Al/ZnO:Alターゲットに用いて、更なる本発明の実施例の化合物層15,39及び24を堆積し、これにより約1:1.2のSi:Znの原子比(XPSによって分析)をこれらの層で達成した。
一連の更なる実験において、実施例1と類似の層順序を有するコーティングの化合物層のSi:Zn原子比を下記の違いで変更する。
本発明のコーティングの化合物層15,39及び24並びに比較例10の比較コーティング(Alをドープした)Si窒化物層の厚さを、それぞれ40,80及び40nm(実施例1及び比較例3における、35,70及び35nmと比較して)に設定し、ターゲット下わずかに減じた速度の2―4―2パスで達成した。
更なる発明の実施例の化合物層15,39及び24を堆積するためにSi:Al/ZnO:Alターゲットに用いた電力比を、15:2(実施例4)と15:8(実施例9)の間で変え、これによって下記の表5の第二欄に示したSi:Znの原子比(XPSによって分析)をこれらの層(実施例1及び2において約2:1と比較して)で達成した。
Claims (25)
- 少なくとも下方反射防止層、IR反射層、上方反射防止層の透過層を備える少なくとも一つの層順序からなる低放射率及び/又は日照調整コーティングを有する被覆窓ガラスにおいて、
前記反射防止層の少なくとも一つが、Siおよび/またはAlの(酸)窒化物と、ZnOとの混合物を含む少なくとも一つの化合物層を備え、
成長促進層を前記下方反射防止層の上部として前記IR反射層の下に設け、
前記成長促進層が、Alをドープしたおよび/若しくはSnをドープしたZnO又はSnをドープしたIn酸化物(ITO)を備えることを特徴とする被覆窓ガラス。 - 前記化合物層が、本質的に均質な層であることを特徴とする請求項1に記載の被覆窓ガラス。
- 前記化合物層が、Alおよび/またはSiの(酸)窒化物対ZnOの比が厚さの全域で著しく変化するような段階的な組成を有することを特徴とする請求項1に記載の被覆窓ガラス。
- 前記Siおよび/またはAlの(酸)窒化物対ZnOの比が、前記化合物層の厚さの全域で繰り返し増減することを特徴とする請求項3に記載の被覆窓ガラス。
- 前記化合物層におけるSiおよび/またはAlの(酸)窒化物対ZnOの平均原子比が、Siおよび/またはAl原子対Zn原子の比で表して、20:1と1:20の間であることを特徴とする請求項1〜4のいずれかに記載の被覆窓ガラス。
- 前記Siおよび/またはAlの(酸)窒化物とZnOとの混合物を含む化合物層が、10〜60nmの厚さを有することを特徴とする請求項1〜5のいずれかに記載の被覆窓ガラス。
- 前記成長促進層が、2と20nmの間の厚さを有することを特徴とする請求項1〜6のいずれかに記載の被覆窓ガラス。
- バリア層を前記IR反射層と前記上方反射防止層の間に設けることを特徴とする請求項1〜7のいずれかに記載の被覆窓ガラス。
- 前記バリア層が、Ti、TiOx、金属をドープしたZnO、SnをドープしたIn酸化物(ITO)、Zn−Si酸化物の一つ以上を備えることを特徴とする請求項8に記載の被覆窓ガラス。
- 前記バリア層が、TiOxの層及び金属をドープしたZnOの次の層、またはTiOx及び金属をドープしたZnOの両方を備える混合層のいずれかを備えることを特徴とする請求項9に記載の被覆窓ガラス。
- 前記金属をドープしたZnOが、本質的にAlをドープしたZnOから成ることを特徴とする請求項10に記載の被覆窓ガラス。
- 前記バリア層が、0.5と15nmの間の厚さを有することを特徴とする請求項8〜11のいずれかに記載の被覆窓ガラス。
- 前記反射防止層の各々が、Siおよび/またはAlの(酸)窒化物とZnOとの混合物を含む化合物層を備えることを特徴とする請求項1〜12のいずれかに記載の被覆窓ガラス。
- 前記反射防止層の少なくとも一つが、Zn−Si酸化物、Zn−Sn酸化物(例えば亜鉛スズ酸塩)、Si(酸)窒化物、Al(酸)窒化物、In−Sn酸化物(ITO)、Bi酸化物、Sn−Si酸化物、Bi−Sn酸化物、Ti酸化物(TiO2)の一つ以上を備える少なくとも一層からなることを特徴とする請求項1〜13のいずれかに記載の被覆窓ガラス。
- 前記IR反射層が、銀または銀系合金を備えることを特徴とする請求項1〜14のいずれかに記載の被覆窓ガラス。
- 前記IR反射層が、6〜20nmの厚さを有することを特徴とする請求項15に記載の被覆窓ガラス。
- 前記層順序の少なくとも二つを設け、任意のバリア層及び一方の層順序の前記上方反射防止層を、任意の成長促進層を含む次の層順序の前記下方反射防止層と組み合わせて、前記層順序の前記二つのIR反射層間にスペーサ層を設けることを特徴とする請求項1〜16のいずれかに記載の被覆窓ガラス。
- 前記スペーサ層が、Siおよび/またはAlの(酸)窒化物とZnOとの混合物を含み、10〜120nmの厚さを有する化合物層を備えることを特徴とする請求項17に記載の被覆窓ガラス。
- 前記反射防止層及び(複数の)スペーサ層の各々が、Siおよび/またはAlの(酸)窒化物とZnOとの混合物を含む化合物層を備えることを特徴とする請求項17または18に記載の被覆窓ガラス。
- 前記各IR反射層が、銀または銀系合金を備え、6〜15nmの厚さを有することを特徴とする請求項17〜19のいずれかに記載の被覆窓ガラス。
- 0.5%未満のヘイズ値を有する請求項1〜20のいずれかに記載の低放射率及び/又は日照調整コーティングを有する熱処理被覆窓ガラス。
- 請求項1〜21のいずれかに記載の少なくとも一つの熱処理した被覆窓ガラスと、少なくとも一つの接着剤プラスチック中間層と、任意の少なくとも一つの更なるガラスまたはプラスチック板とを備え、前記熱処理被覆窓ガラスのコーティングが前記中間層と対向する合わせ窓ガラス。
- 請求項1〜22のいずれかに記載の窓ガラスの自動車用窓ガラスへの使用。
- 請求項1〜22のいずれかに記載の窓ガラスの建物の窓ガラスへの使用。
- 請求項1〜20のいずれかに記載の被覆窓ガラスを580〜690℃で1〜10分間熱処理し、その後屈曲および/または強化することを特徴とする熱処理被覆窓ガラスの製造方法。
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IT000181A ITRM20060181A1 (it) | 2006-03-31 | 2006-03-31 | Lastra di vetro rivestita |
ITRM2006A000181 | 2006-03-31 | ||
PCT/EP2007/053116 WO2007113259A2 (en) | 2006-03-31 | 2007-03-30 | Coated glass pane |
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EP (1) | EP2010459B1 (ja) |
JP (1) | JP5221513B2 (ja) |
KR (1) | KR20080109899A (ja) |
CN (1) | CN101437771B (ja) |
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KR20080109899A (ko) | 2008-12-17 |
ITRM20060181A1 (it) | 2007-10-01 |
WO2007113259A2 (en) | 2007-10-11 |
EP2010459B1 (en) | 2012-05-16 |
US20090047509A1 (en) | 2009-02-19 |
US8003235B2 (en) | 2011-08-23 |
CN101437771B (zh) | 2013-03-13 |
WO2007113259A3 (en) | 2008-03-20 |
EP2010459A2 (en) | 2009-01-07 |
BRPI0709658A2 (pt) | 2011-07-19 |
JP2009531262A (ja) | 2009-09-03 |
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