JP5179158B2 - Dresser board - Google Patents

Description

The present invention relates to Doressabo de for shaping and dressing a grinding surface of the grinding wheel.

  A semiconductor substrate such as a silicon wafer used for manufacturing a semiconductor device is first molded in an ingot state and then sliced into a substrate shape by a wire saw or the like, and further flattened to a target thickness by lapping or grinding both sides. Finished well. In recent years, infeed type surface grinding apparatuses are frequently used in grinding. In this in-feed type grinding, the grinding wheel fixed on the spindle and the wafer held on the chuck table are arranged opposite to each other so that the side end of the grinding wheel coincides with the axis of the rotation axis of the chuck table. Has been. During grinding, the surface of the wafer is surface ground by pressing the grinding wheel against the wafer at a predetermined feed rate while rotating the spindle and the chuck table (see, for example, Patent Document 1). .

  Here, the grinding wheel is formed by holding diamond abrasive grains with a resin bond or a vitrified bond. When the grinding wheel is mounted on a grinding apparatus, it is a dresser for parallel feeding (for grinding stone shaping) composed of abrasive grains having a size larger than the grain size of the grinding wheel so that the chuck table and the grinding wheel are parallel. By fixing the board to the chuck table and cutting the dresser board, the chuck table and the grinding wheel are paralleled. Thereafter, dressing of the grinding wheel is performed instead of the dresser board having a size smaller than the particle size of the grinding wheel. The product is then ground.

Japanese Patent Laid-Open No. 2003-236736

  However, in the past, prepare a dresser board for parallel feeding (for grinding stone shaping) and a dresser board for sharpening, and when paralleling is finished, place it on the dressing board for sharpening and dressing The work efficiency of the dressing work is poor.

The present invention was made in view of the above, Doressabo de the dress work shaping dress and dressing dresses the grinding surface of the grinding wheel, without requiring changing loaded dresser board can be efficiently carried out The purpose is to provide.

In order to solve the above-mentioned problems and achieve the object, a dresser board according to the present invention is formed by fixing abrasive grains with a bonding agent, and shaping and sharpening a grinding surface of a grinding wheel of a grinding wheel. The grinding wheel shaping dressing part and the dressing dressing part are arranged so as to form a concentric circle with respect to the rotation center, and the grinding stone shaping dressing part is formed in an annular shape, and the dressing dressing The portion is thicker than the grinding stone dressing portion and is formed in a disk shape or an annular shape, and is disposed inside the grinding stone shaping dress portion, and the rotating grinding wheel touches only the dressing dress portion It is comprised so that it can be located in the position to perform.

According to Doressabo de according to the present invention, and a dresser board grindstone shaping dress portions and the dressing dresses portion so as to form a concentric circle with respect to the rotation center, dresses portion for dressing is, the grinding wheel to rotate the Since it is configured to be positioned at a position that contacts only the dressing dressing part, if the target grinding wheel is positioned at a position that contacts the dressing dressing part, the grinding wheel shaping can be performed by the grinding wheel shaping dressing part. If the grinding wheel is positioned at a position that only contacts the dressing dressing part, it can be sharpened by the dressing dressing part.Therefore, when dressing from grinding stone shaping, it is not necessary to change the dresser board, There is an effect that dressing can be performed efficiently.

  Embodiments of a dresser board and a dressing method, which are the best mode for carrying out the present invention, will be described below in detail with reference to the drawings. The present invention is not limited to the embodiment, and various modifications can be made without departing from the spirit of the present invention.

(Embodiment 1)
FIG. 1 is a schematic perspective view showing a configuration example of a grinding apparatus 10 to which the dressing method of the present embodiment is applied. The grinding apparatus 10 includes a chuck table 12 that holds and rotates a wafer 11, a grinding means 30 that rotatably supports a grinding wheel 20 that grinds the wafer 11 held on the chuck table 12, and a grinding feed of the grinding means 30. Grinding feed means 40.

  First, the chuck table 12 is connected to a drive source (not shown) and can rotate. The chuck table 12 is provided so as to be movable in the X-axis direction by a feed mechanism such as a ball screw, a nut, or a pulse motor.

  The grinding means 30 includes a grinding wheel 20, a housing 31, a wheel mount 33 that is rotatably attached to the lower end of the housing 31 and supports the grinding wheel 20 that is attached by a bolt 32, and supports and rotates the wheel mount 33. A spindle 34 that rotates, a motor 35 that rotationally drives the spindle 34, and a moving base 36 on which the housing 31 is mounted. Here, as shown in an enlarged view in FIGS. 3 and 4, the grinding wheel 20 is provided with a plurality of grinding wheels 21 formed in a segment mold on the lower surface side by bonding or the like. The moving base 36 has guided rails 36a. The guided rails 36a are movably fitted to the guide rails 15 provided on the support plate 14 of the housing 13, so that the grinding means 30 moves in the vertical direction. Supported as possible.

  The grinding feed means 40 is for grinding and feeding the grinding wheel 20 in the vertical direction by moving the moving base 36 of the grinding means 30 along the guide rail 15. The grinding feed means 40 includes a male screw rod 41 that is disposed on the support plate 14 in parallel with the guide rail 15 in the vertical direction and is rotatably supported, a pulse motor 42 for rotationally driving the male screw rod 41, and a moving base. 36 and a female screw block (not shown) that is screwed with the male screw rod 41.

  In such a grinding apparatus 10, the chuck table 12 holding the wafer 11 is positioned and rotated at the lower position of the grinding means 30, and the grinding means 30 is rotated by the motor 35 while the grinding wheel 20 is rotated. , The grinding surface 21a of the segment-type grinding wheel 21 of the rotating grinding wheel 20 comes into contact with the upper surface of the wafer 11, and finish grinding is performed. At this time, although not shown, the upper surface of the wafer 11 is ground around the grinding wheel 21 being ground from the grinding water supply source through the spindle 34, the path in the mount 33, and the grinding water supply path (not shown) of the grinding wheel 20. Water is supplied, and the grinding wheel 21 is cooled and the grinding waste is discharged.

  By performing such grinding, the grinding ability of the grinding surface 21a of the grinding wheel 21 of the grinding wheel 20 is reduced due to wear or clogging. Therefore, for example, when the grinding operation is performed for a predetermined time, the grinding surface 21a of the grinding wheel 21 is dressed (this dressing is performed by using a dresser board held on the chuck table 12 instead of the wafer 11).

  FIG. 2 is a perspective view showing a configuration example of the dresser board used in the first embodiment. The dresser board 50 according to the first embodiment includes a board base 51, a grindstone shaping dressing 52, and a dressing dressing 53. The board base 51 has a disk shape formed in the same size as the chuck table 12 and is sucked and held on the chuck table 12 during dressing.

  The grinding wheel shaping dressing 52 is configured by fixing abrasive grains having a size larger than the grain size of the grinding wheel 21 with an appropriate bonding agent, and makes the chuck table 12 and the grinding surface 21a of the grinding wheel 21 parallel to each other. It is for grindstone shaping. The grindstone shaping dressing 52 is formed in a disk shape and is fixed to the center on the rotation center of the board base 51.

  Further, the dressing portion 53 for dressing is configured by fixing abrasive grains having a size smaller than the particle size of the grinding stone with an appropriate bond agent, and for dressing the grinding surface 21a of the grinding stone 21. . The dressing portion 53 for sharpening is formed in an annular shape that is slightly larger than the dressing portion 52 for grinding stone shaping, and the dressing portion 52 for grinding stone with respect to the center of rotation at a position outside the grinding dressing dressing portion 52. It is fixed to the board base 51 so as to form a concentric circle.

  For example, WA (white alundum) or GC (green carbon) is used as the abrasive grains of the grindstone shaping dressing 52 and the dressing dressing 53, and suitable bond materials include, for example, resin bonds and vitrified bonds. Is used.

  Here, an appropriate gap 54 is formed between the grindstone shaping dressing 52 and the dressing dressing 53. The grinding wheel shaping dressing 52 and the dressing dressing 53 are formed at the same height (thickness), but the height (thickness) on the grinding stone shaping dressing 52 side is higher (thicker). It may be made to become.

  Next, the dressing method of the first embodiment using such a dresser board 50 will be described with reference to FIGS. 3 and 4. FIG. 3 is a perspective view of the main part showing a dressing method comprising the grinding wheel shaping process and the sharpening process of the first embodiment, and FIG. 4 is a side view thereof.

  First, the dresser board 50 is held on the chuck table 12 instead of the wafer 11. At this time, the center position of the dresser board 50 is aligned with the axis of the chuck table 12 and held. And a grindstone shaping process is performed as shown in FIGS. 3 (a) and 4 (a). That is, as in in-feed grinding, by adjusting the position of the chuck table 12 in the X-axis direction, the side end of the grinding wheel 21 is the center that is the innermost circumferential position of the disk-shaped grinding wheel shaping dressing 52. Position the grinding means 30 through the position. In this state, the grinding surface 21a of the grinding wheel 21 of the rotating grinding wheel 20 is brought into contact with the grinding wheel shaping dressing 52 while the chuck table 12 is rotated, so that the grinding surface 21a of the grinding wheel 21 is shaped. In this grinding wheel shaping process, there is no problem even if the grinding surface 21a of the grinding wheel 21 to be contacted contacts the dressing portion 53 for sharpening located outside the grinding stone shaping dressing portion 52. Further, if the grinding wheel shaping dressing portion 52 is formed to be thicker than the dressing dressing portion 53, the grinding stone shaping dressing portion 52 is ground even if the grinding stone shaping dressing portion 52 is worn out by the dress. It is possible to avoid a situation in which the grindstone 21 does not come into contact, and to secure a grindstone shaping function by the grindstone shaping dressing 52.

  After performing such a grinding wheel shaping step, a sharpening step is performed as shown in FIGS. 3 (b) and 4 (b). First, by slightly adjusting the position of the chuck table 12 in the X-axis direction, the grinding means 30 is positioned at a position where the grinding surface 21 a of the grinding wheel 21 contacts only the dressing dressing 53. In this state, the grinding surface 21a of the grinding wheel 21 is conspicuous by bringing the grinding surface 21a of the grinding wheel 21 of the rotating grinding wheel 20 into contact with the dressing portion 53 while rotating the chuck table 12.

  In this dressing process, the dresser board 50 has both the grinding stone shaping dressing portion 52 and the dressing dressing portion 53, but the dressing dressing portion 53 is formed in an annular shape, and a disc-shaped grinding stone shaping dress. Since it is arranged so as to form a concentric circle with respect to the rotation center at the outer position of the portion 52, the grinding surface 21a contacts only the dressing dressing 53 only by moving the position of the chuck table 12 in the X-axis direction. A state can be secured. Therefore, the grinding surface 21a does not come into contact with the coarse grinding stone shaping dressing 52 during the sharpening process.

  Here, in the dressing process, since the grinding wheel 20 and the chuck table 12 rotate together, depending on the contact position between the side edge of the grinding wheel 21 and the dressing portion 53 for dressing, the consumable portion of the dressing portion may not be used. A level difference is generated in the dressing part 53 for the dressing with the consumable part. In order to eliminate the influence of the step on the dressing, it is desirable to position the side end portion of the grinding wheel 21 at the inner peripheral edge position, which is the innermost circumferential position of the dressing dressing portion 53 formed in an annular shape. At this time, in the first embodiment, the gap 54 is provided between the grinding stone shaping dressing 52 and the dressing 53 and the dressing 53 so that the side edge of the grinding stone 21 is the inner periphery of the dressing 53. Even if it is positioned, it is easy to ensure that the grinding surface 21 a of the grinding wheel 21 does not contact the grinding wheel shaping dressing 52.

  As described above, according to the dresser board 50 and the dressing method of the first embodiment, the dresser board 50 can be efficiently dressed without changing the dresser board 50 with respect to the chuck table 12 when sharpening from grinding stone shaping. Can do.

  In the dresser board 50, the gap 54 may be omitted. FIG. 5 is a perspective view showing a modification of the dresser board 50. In this modified example, a disk-shaped grinding wheel shaping dressing 52 and an annular dressing dressing 53 are fixed on the board base 51 in a continuous state without any gap.

  In Embodiment 1, the grindstone shaping dressing 52 disposed inside is formed in a disc shape, but is not limited to the disc shape, and may be formed in an annular shape, for example. In this case, in the grinding wheel shaping step, the side end portion of the grinding stone 21 may be positioned at the inner peripheral edge position that is the innermost circumferential position of the grinding wheel shaping dressing portion formed in an annular shape.

(Embodiment 2)
FIG. 6 is a perspective view showing a configuration example of the dresser board used in the second embodiment. The dresser board 60 according to the second embodiment includes a board base 61, a grindstone shaping dressing part 62, and a dressing dressing part 63. The board base 61 has a disk shape formed in the same size as the chuck table 12 and is sucked and held on the chuck table 12 during dressing.

  The grinding wheel shaping dressing part 62 is configured by fixing abrasive grains having a size larger than the grain size of the grinding wheel 21 with an appropriate bonding agent, and makes the chuck table 12 and the grinding surface 21 a of the grinding wheel 21 parallel to each other. It is for grindstone shaping. The grindstone shaping dressing 52 is formed in an annular shape and is fixed with its center position aligned with the center of rotation of the board base 61.

  Further, the dressing part 63 for dressing is configured by fixing abrasive grains having a size smaller than the particle size of the grinding stone with an appropriate bond agent, and for dressing the grinding surface 21a of the grinding stone 21. . The dressing part 63 for sharpening is formed in a disk shape that is slightly smaller than the dressing part 62 for shaping the stone, and is concentric with the dressing part 62 for shaping the grinding wheel with respect to the center of rotation at the inner position of the dressing part 62 for grinding stone. As shown, the board base 61 is fixed at the center position of the rotation center.

  For example, WA (white alundum) or GC (green carbon) is used as the abrasive grains of the grindstone shaping dressing part 62 and the dressing dressing part 63, and suitable bond materials include, for example, resin bonds and vitrified bonds. Is used.

  Here, an appropriate gap 64 is formed between the grindstone shaping dressing 62 and the dressing dressing 63. Further, the dressing part 63 for dressing 63 is formed so that the thickness (height) is thicker (higher) than the thickness (height) of the dressing part 62 for shaping a grindstone.

  Next, the dressing method according to the second embodiment using such a dresser board 60 will be described with reference to FIGS. FIG. 7 is a perspective view of a main part showing a dressing method including a grinding wheel shaping process and a sharpening process according to the second embodiment, and FIG. 8 is a side view thereof.

  First, the dresser board 60 is held on the chuck table 12 instead of the wafer 11. At this time, the center position of the dresser board 60 is aligned with the axis of the chuck table 12 and held. Then, a grinding wheel shaping step is performed as shown in FIGS. 7 (a) and 8 (a). That is, by adjusting the position of the chuck table 12 in the X-axis direction, grinding is performed so that the side end portion of the grinding wheel 21 passes through the inner peripheral edge position, which is the innermost peripheral position of the ring-shaped grinding wheel shaping dressing portion 62. Positioning means 30. In this state, while the chuck table 12 is being rotated, the grinding surface 21a of the grinding wheel 21 of the rotating grinding wheel 20 is brought into contact with the grinding wheel shaping dress portion 62, so that the grinding surface 21a of the grinding wheel 21 is shaped.

  Here, in the grinding wheel shaping step, both the grinding wheel 20 and the chuck table 12 rotate, so that depending on the contact position between the side end of the grinding stone 21 and the grinding stone shaping dressing 62, the consumable part of the dressing part. And a non-consumable part, a level | step difference will be produced in the dressing part 62 for grinding stone shaping. In order to eliminate the influence of this step on the grinding wheel shaping, as described above, the side end portion of the grinding stone 21 is located at the inner circumferential edge position which is the innermost circumferential position of the grinding wheel shaping dress portion 62 formed in an annular shape. It is desirable to position it. At this time, in the second embodiment, by providing a gap 64 between the grinding wheel shaping dressing portion 62 and the dressing dressing portion 63, the side edge of the grinding stone 21 is used as the inner peripheral edge of the grinding stone shaping dressing portion 62. Even when positioned, it is easy to ensure that the grinding surface 21a of the grinding wheel 21 does not contact the dressing portion 62 for sharpening.

  After performing such a grinding wheel shaping step, a sharpening step is performed as shown in FIGS. 7B and 8B. First, by slightly adjusting the position of the grinding wheel 21 in the Z-axis direction and the position of the chuck table 12 in the X-axis direction, the grinding surface 21 a of the grinding wheel 21 is ground to a position where it only contacts the dressing dressing 63. Positioning means 30. That is, the grinding means 30 is positioned so that the side end portion of the grinding wheel 21 passes through the center position, which is the innermost peripheral position of the disc-shaped dressing dress portion 63. In this state, the grinding surface 21a of the grinding wheel 21 is conspicuous by bringing the grinding surface 21a of the grinding wheel 21 of the rotating grinding wheel 20 into contact with the dressing portion 63 for grinding while rotating the chuck table 12.

  In this sharpening step, the dressing portion 63 for dressing is disposed inside the dressing portion 62 for shaping the grindstone, but the dressing portion 63 for sharpening is formed thicker than the thickness of the dressing portion 62 for shaping the grindstone. Therefore, only by adjusting the position of the grinding wheel 21 in the Z-axis direction and the position of the chuck table 12 in the X-axis direction, it is possible to ensure that the grinding surface 21 a is in contact with only the dressing dressing 63. Therefore, the grinding surface 21a does not come into contact with the coarse grinding stone shaping dressing 62 during the sharpening process.

  As described above, according to the dresser board 60 and the dressing method of the second embodiment, the dressing board 60 can be efficiently dressed without changing the dresser board 60 on the chuck table 12 when sharpening from the grinding wheel shaping. Can do.

  In the dresser board 60, the gap 64 may be omitted as in the case of FIG. Further, in the second embodiment, the dressing dressing portion 63 disposed on the inner side is formed in a disc shape, but is not limited to the disc shape, and may be formed in, for example, an annular shape. In this case, in the sharpening step, the side end portion of the grinding wheel 21 may be positioned at the inner peripheral edge position, which is the innermost peripheral position of the dressing portion for sharpening formed in an annular shape.

It is a schematic perspective view which shows the structural example of the grinding apparatus with which the dressing method of embodiment of this invention is applied. 3 is a perspective view illustrating a configuration example of a dresser board according to Embodiment 1. FIG. It is a perspective view of the principal part which shows the dressing method which consists of the grindstone shaping process and the sharpening process of Embodiment 1. FIG. 4 is a side view of FIG. 3. It is a perspective view which shows the modification of a dresser board. FIG. 6 is a perspective view illustrating a configuration example of a dresser board according to a second embodiment. It is a perspective view of the principal part which shows the dressing method which consists of the grindstone shaping process of Embodiment 2, and the sharpening process. FIG. 8 is a side view of FIG. 7.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Wafer 12 Chuck table 20 Grinding wheel 21 Grinding wheel 21a Grinding surface 30 Grinding means 50 Dresser board 52 Grinding stone dressing part 53 Dressing dressing part 60 Dresser board 62 Grinding stone shaping dressing part 63 Grinding dressing part

Claims (1)

A dresser board that is formed by fixing abrasive grains with a bonding agent, and that shapes and sharpens the grinding surface of the grinding wheel of the grinding wheel,
The grindstone shaping dressing part and the dressing dressing part are arranged so as to be concentric with the rotation center,
The grindstone shaping dressing part is formed in an annular shape,
The dressing part for dressing is thicker than the dressing part for shaping a grinding wheel and is formed in a disk shape or an annular shape, and is arranged inside the dressing part for grinding stone , and rotates the grinding stone that rotates. A dresser board characterized in that the dresser board can be positioned at a position in contact with only a portion.

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