JP5124690B2 - SiC epitaxial wafer - Google Patents

Description

The present invention relates to a SiC epitaxial web Ha SiC epitaxial web Ha, particularly short step bunching free.

  Improvement of energy-saving technology is required as a response to the global warming problem. While many technical items are taken up, power electronics technology that reduces energy loss during power conversion is positioned as a core technology. Conventionally, power electronics have been improved by using silicon (Si) semiconductors to improve the performance. However, it is said that the performance improvement is approaching the limit due to the limitations of the physical properties of silicon. For this reason, there is an expectation for silicon carbide (SiC) that can take a physical property limit larger than that of silicon. Silicon carbide, for example, has excellent physical properties such as a band gap of about 3 times, a breakdown electric field strength of about 10 times, and a thermal conductivity of about 3 times that of silicon. Application to operating devices is expected.

  In order to promote the practical application of SiC devices, it is essential to establish high-quality crystal growth technology and high-quality epitaxial growth technology.

  SiC has many polytypes, but 4H-SiC is mainly used to fabricate practical SiC devices. A SiC single crystal wafer processed from a bulk crystal produced by a sublimation method or the like is used as the substrate of the SiC device, and an SiC epitaxial film that becomes an active region of the SiC device is usually formed thereon by chemical vapor deposition (CVD). Form. A polytype different from the polytype used for the substrate is likely to be mixed in the epitaxial film. For example, when 4H—SiC is used for the substrate, 3C—SiC or 8H—SiC is mixed. Epitaxial growth is generally performed by performing a step flow growth (a lateral growth from an atomic step) with a slight inclination of the SiC single crystal substrate in order to suppress these contaminations.

<Step bunching and its observation and evaluation>
When the SiC substrate has a size of up to about 2 inches, the fine tilt angle (off angle) has been mainly 8 °. At this off angle, the terrace width on the wafer surface is small, and step flow growth can be easily obtained. However, the larger the off angle, the smaller the number of wafers that can be obtained from the SiC ingot. For this reason, an SiC substrate having an off angle of about 4 ° is mainly used for a SiC substrate of 3 inches or more from the viewpoint of cost reduction. At an off angle of about 4 °, the terrace width of the wafer surface is twice as large as that at an off angle of 8 °. Therefore, the migration rate of migration atoms incorporated at the step end, that is, the growth rate at the step end varies. Is likely to occur. As a result, a step with a fast growth rate catches up with a step with a slow growth rate and coalesces, and step bunching occurs. In particular, when the epitaxial surface is a Si surface, the migration of surface atoms is suppressed as compared with the C surface, so that step bunching occurs easily. Here, step bunching refers to a phenomenon in which atomic steps (usually about 2 to 10 atomic layers) gather on the surface and coalesce, and may also refer to the surface step itself. Non-Patent Document 1 shows a typical step bunching.

  Conventionally, observation / evaluation of step bunching has often been performed by a combination of an optical microscope such as a differential interference microscope and an atomic force microscope (AFM) having atomic resolution (for example, Non-Patent Documents 1 and 2).

<Gas etching and supply of source gas>
Conventionally, when a SiC epitaxial film is formed on a SiC single crystal substrate, after mechanical polishing, chemical mechanical polishing (CMP) and gas etching are sequentially performed to perform surface treatment of the SiC single crystal substrate. An SiC epitaxial film was formed by chemical vapor deposition. In the gas etching, etching is mainly performed using hydrogen gas at a high temperature of about 1500 ° C. as a pretreatment in order to remove damage caused by the polishing process, polishing marks (scratches), and planarize the surface.

Gas etching was performed while adding propane (C ₃ H ₈ ) gas, which is a raw material gas for the SiC epitaxial film, to a hydrogen atmosphere (Patent Document 1, Paragraph [0002] of Patent Document 2, and Non-Patent Document). 3). As shown in Non-Patent Document 3, hydrogen gas etching is essential to obtain a good epitaxial surface, but it is shown that Si droplets are generated only by hydrogen, It is said that the addition of C ₃ H ₈ has an effect of suppressing the generation.
However, if damage or scratches (scratches) due to polishing remain on the substrate surface after the gas etching, then there are different polytypes, dislocations, stacking faults, etc. in the epitaxial film formed on the substrate surface. There was a problem of being introduced. Therefore, in order to avoid this, if the gas etching time is extended to increase the etching amount too much, this time, surface reconstruction occurs on the substrate surface, and step bunching occurs on the substrate surface before the start of epitaxial growth. There was a problem that.

Therefore, in order to suppress the occurrence of this step bunching, as a method for reducing the etching amount, there has been proposed a method in which silane (SiH ₄ ) gas, which is a raw material gas, is added to hydrogen gas during gas etching (Patent Document). 2).

In both methods of Patent Documents 1 and 2, gas etching is performed by adding C ₃ H ₈ gas or SiH ₄ gas, which is a raw material gas of the SiC epitaxial film, and after the gas etching, the added gas is exhausted. Without continuing, the other gas is introduced and the SiC epitaxial film is formed (FIG. 2 of Patent Document 1 and FIG. 4 of Patent Document 2). That is, propane (C ₃ H ₈ ) gas or silane (SiH ₄ ) gas already exists on the surface of the SiC substrate before starting the growth of the SiC epitaxial film.

As described above, in the currently generally performed methods represented by Patent Documents 1 and 2, when starting the growth of the SiC epitaxial film, the supply of the C ₃ H ₈ gas and the SiH ₄ gas as the source gases are simultaneously performed. Did not do.

Japanese Patent No. 4238357 JP 2005-277229 A

Mater. Sci. Forum 527-529, (2006) pp. 239-242 Journal Cryst. Growth 291, (2006) pp. 370-374 Journal Cryst. Growth 291, (2002) pp. 1213-1218

  Although AFM having atomic resolution (hereinafter referred to as “normal AFM”) can directly observe the atomic arrangement on the surface, the maximum observation range is about 10 to 20 μm □, and measurement over a wide range beyond that is difficult due to the mechanism. However, since step bunching on the surface of the SiC epitaxial film was recognized as being continuous from end to end of the wafer, the mechanical defects of the AFM were not particularly inconvenient when combined with an optical microscope. .

  In Non-Patent Document 2, a differential interference microscope is used to observe a range of about 200 μm to 1 mm □, which is wider than AFM. However, with this differential interference microscope, the step height cannot be quantified, and there is a disadvantage that a step having a height of several nm cannot be detected particularly when the magnification is large.

  Since step bunching hinders flattening of the surface of the SiC epitaxial film, it is necessary to suppress its generation in order to improve the performance of the SiC device. Since step bunching is a step in the surface, the presence of an oxide film on the surface of the SiC epitaxial film and the current flowing through the interface may have a fatal effect on the operating performance and reliability. Therefore, research on the suppression of step bunching has been energetically performed.

  The active region of the SiC power device including this MOSFET is larger than the normal AFM measurement range. For this reason, in order to obtain an epitaxially grown surface capable of producing a device having excellent characteristics, evaluation with a normal AFM or differential interference microscope is not sufficient.

Further, as described above, it is common to add C ₃ H ₆ gas or SiH ₄ gas, which is a raw material gas, during gas etching, and then continue without adding the added gas. Then, the other gas was introduced to perform the SiC epitaxial film forming process. In this case, these source gases have not been supplied to the substrate surface at the same time. Although etching may be performed using only hydrogen gas, the importance of simultaneous supply of source gas to the substrate surface has not been recognized.

<Short step bunching>
The present inventors have developed an optical surface inspection apparatus capable of observing a wider range than a differential interference microscope, using a laser beam and having a sensitivity in the height direction similar to that of an AFM, and a wide-range observation type. In combination with AFM (hereinafter referred to as "wide-range observation type AFM"), SiC epitaxial wafers that have been considered to suppress step bunching by conventional methods are observed and evaluated, and captured by ordinary AFMs and differential interference microscopes. It was found that difficult step bunching exists as a standard state of the surface.

  The step bunchings that have been newly clarified existed at an average interval of about 100 μm and had a length of 100 to 500 μm in the [1-100] direction. As will be described later, this step bunching is caused by shallow pits formed by screw dislocations appearing on the growth surface and forming steps on the surface, and screw dislocations are originally formed in the epitaxially grown film. Since it is contained in the SiC single crystal substrate used as a substrate, it can be said that it originates in the substrate.

  On the other hand, conventionally known step bunching (hereinafter referred to as “conventional step bunching”) is present at an average interval of about 1.5 μm and has a length of 5 mm or more in the [1-100] direction (note that In this specification, in the notation of Miller index, “-” means a bar attached to the index immediately after that). Moreover, since the surface of the SiC single crystal substrate originally has an off angle, there is an atomic step corresponding to the surface, and this atomic step moves during the process of epitaxial growth or gas etching. When the movement speed varies, these steps are combined with each other, and occur regardless of dislocations in the substrate.

  Therefore, in the present specification, step bunching whose presence has been newly clarified is described as “short step bunching” in distinction from conventional step bunching.

  FIG. 1 shows a 10 μm square AFM image (stereoscopic surface perspective image) of the surface of an SiC epitaxial wafer observed by a normal AFM (Dimension V manufactured by Veeco Instrument). FIG. 1A is an AFM image showing conventional step bunching, and FIG. 1B is an AFM image showing short step bunching.

  When an AFM image as indicated by an arrow A in FIG. 1B is obtained, or when a part of such an AFM image is obtained by several reciprocating scans of the cantilever instead of a single screen scan Is judged as noise, or does not indicate the standard state of the surface, it is determined that it has happened to observe an area that has a peculiar state, and it moves to another area for observation. It was normal. Therefore, although it can be said that short step bunching has been observed in conventional AFM and differential interference microscope, it has not been recognized as showing at least the standard state of the SiC epitaxial film surface.

FIG. 2 shows an AFM image of 200 μm □ on the surface of the SiC epitaxial film observed by the wide-area observation type AFM (Nanoscale Hybrid Microscope VN-8000 manufactured by Keyence Co., Ltd.) used in the present invention.
2A is an AFM image showing conventional step bunching, and FIG. 2B is an AFM image showing short step bunching.

  As shown in FIG. 2A, it can be observed that conventional step bunching exists at an average interval of about 1.5 μm, as in a normal AFM image. In contrast, FIG. 2B shows that two lines (arrows B and C) are observed stably at equal intervals. The fact that steps can be observed stably in a wide range of 200 μm □ does not indicate mere noise or a peculiar surface area, and confirms the existence of step bunching that is different from conventional step bunching.

  In order to confirm the presence of short step bunching with another surface inspection apparatus, observation was performed with an optical surface inspection apparatus using a laser beam (Candela CS20 manufactured by KLA-Tencor). This optical surface inspection apparatus is suitable for measuring the density of short step bunching because the measurement range is larger than the entire surface of the wafer having a measuring range of several μm □ to 4 inches or more and the wide-area observation type AFM.

  The optical surface inspection apparatus used in the present invention (apparatus that performs surface inspection based on the same principle as CANDELA CS20 manufactured by KLA-Tencor) is a method in which laser light is incident on a wafer obliquely and scattered light from the wafer surface It has the system which detects intensity | strength, the intensity | strength of reflected light, and a reflective position, It is characterized by the above-mentioned. The surface of the wafer is spiral scanned. Since the reflection position changes so as to trace the unevenness of the wafer surface, roughness (surface roughness) can be calculated from this position information. In order to extract surface roughness information having a period corresponding to step bunching, a 100 μm filter is used in the calculation, and long-period waviness information on the wafer surface is removed.

  However, since step bunching is parallel to the [1-100] direction, a step is not detected in a region where the laser beam and the scanning direction are parallel during spiral scanning. Therefore, for the calculation of roughness information, a range of 70 ° between 55 ° to 125 ° and 235 ° to 305 ° in general polar coordinates is selected. Further, since the center of the spiral scan is a singular point where the laser beam hardly moves, the position information of the reflected light in the vicinity does not reflect the roughness. Therefore, the central φ10 mm range was excluded from the calculation area. The calculation range set in this way is about 35% of the entire wafer surface. However, with respect to step bunching, the morphology in this range almost reflects the entire wafer surface. Since the roughness calculated in this way has a correlation with the roughness measured using the AFM, it can be seen that the roughness is in accordance with the actual surface morphology.

<Origin of short step bunching>
FIG. 3 shows the observation result of the SiC epitaxial wafer in which short step bunching is observed with the optical surface inspection apparatus, using a differential interference microscope. As shown by the arrows, a noticeable shallow pit and accompanying short step bunching can be confirmed. The depth of the shallow pits on the epilayer surface was 6.3 nm.

  Further, FIG. 4 shows an observation result by a differential interference microscope after performing KOH etching in order to confirm the origin of the shallow pit. As indicated by the arrows, the presence of screw dislocations and the accompanying short step bunching can be confirmed. From this, it can be inferred that the short step bunching occurred as a result of step follow growth being hindered by the step of the shallow pit generated on the surface. Thus, it can be understood that the origin of the short step bunching is the shallow pit caused by the screw dislocation in the epi layer inherited from the substrate.

  As described above, the present inventors have observed this short step bunching on the surface by observing and evaluating the surface of the SiC epitaxial film by combining an optical surface inspection device and a surface inspection device different from the conventional one called a wide-range observation type AFM. It was found that it exists as a standard state, not a unique state. As a result of intensive studies, the present inventors have clarified the origin of short step bunching and suppressed the occurrence of the step bunching, thereby reaching a method for manufacturing a step bunching-free SiC epitaxial wafer.

  The presence of this short step bunching is considered to be one of the main causes of quality variation.

In addition, the present inventor considers the importance of simultaneously supplying SiH ₄ gas and C ₃ H ₈ gas in amounts necessary for epitaxial growth of silicon carbide on the surface of the SiC single crystal substrate in the formation of the SiC epitaxial film. I found it.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a step bunching-free SiC epitaxial wafer having no step bunching on the entire surface of the wafer and a method for manufacturing the same.

The inventors of the present invention differed from the origin of conventional step bunching and started by discovering step bunching caused by the SiC substrate. First, in order to prevent generation of step bunching caused by the substrate, in the polishing process of the substrate I found the necessary conditions. Then, the SiC single crystal substrate polished under such conditions is subjected to gas etching to prepare a SiC single crystal substrate. If this SiC single crystal substrate is used, the amount of SiH ₄ gas and C required for epitaxial growth of silicon carbide can be obtained. ₃ H ₈ gas is simultaneously supplied to the substrate surface at a predetermined concentration ratio to form a film. Further, the supply is stopped at the same time, the substrate temperature is maintained until the gas is removed, and then the temperature is lowered. It has been found that a SiC epitaxial wafer can be obtained.

Epitaxial growth is performed by performing a step flow growth (a lateral growth from an atomic step) with a slight inclination of the SiC single crystal substrate in order to suppress mixing of a polytype different from the polytype used for the substrate. In general, by setting the inclination angle to 0.4 ° or more, the step end is brought out on the growth surface and the step flow growth is performed. In the present invention, it is desirable that the inclination angle is 0.4 ° or more.
The present invention is effective in the case of 5 ° or less, which is a low off-angle substrate where step bunching easily occurs. The effect of the present invention is effective in the range of an inclination angle of 0.4 ° to 5 °. However, when the inclination angle is 2 ° or more, the terrace width on the substrate is narrow, and step flow growth is promoted to obtain a mirror surface. It is particularly effective because it is easily handled.
Furthermore, a 4 ° off substrate that is generally sold has a tilt angle specification range of 3.5 ° to 4.5 °, and is particularly effective for a 4 ° off substrate having this tilt angle range. The 4 ° off substrate is inexpensive because it has less loss when it is cut out from a single crystal than the 8 ° off substrate, which is a standard product that has been used in the past, because a mirror surface is easily obtained. Therefore, by applying the technique of the present application to a 4 ° off substrate, an epitaxial wafer with good quality and low cost can be obtained.

The present invention provides the following means.
(1) SiC epitaxial wafer in which an epitaxial layer of SiC is formed on a 4H—SiC single crystal substrate inclined at an off angle of 0.4 ° to 5 °, and has no short step bunching. Epitaxial wafer .
“ Amount required for epitaxial growth of silicon carbide” means that desorption (sublimation) and adsorption (growth) of Si and C from the substrate occur simultaneously on the surface of the substrate at an elevated temperature. away> adsorption when the gas etching, becomes the form of growth in the case of desorption <adsorption, the case of adding SiH ₄ and / or C ₃ H ₈ in the gas etching (cleaning step) Since the amount of these source gases is small, only preferential gas etching occurs even if the source gas is added. Therefore, the difference from the supply amount of SiH ₄ gas and / or C ₃ H ₈ at the time of gas etching is different. It is a will to clarify.
SiH ₄ gas and C ₃ H ₈ gas can be supplied at the same time. In this case, “simultaneous supply” does not need to be completely the same time, but is within a few seconds. Means. In the apparatus shown in the examples described later, when the time difference between the SiH ₄ gas supply and the C ₃ H ₆ gas supply was within 5 seconds, the occurrence of step bunching could be suppressed. The mechanism of how simultaneous supply relates to the occurrence of step bunching is unknown, but it is presumed to be related to the spatial concentration distribution of two types of source gases at the beginning of film formation. Since the spatial concentration distribution of this raw material gas also depends on the shape and configuration of the apparatus, it is not possible to describe a specific numerical value for the allowable supply time difference. However, those skilled in the art will recognize step bunching with a time difference of several seconds. By examining the occurrence, the time difference allowed by the simultaneous supply can be found.
Further, in this case, the cleaning step is performed by adding SiH ₄ gas and / or C ₃ H ₈ gas to the hydrogen atmosphere, and the epitaxial growth step is started after exhausting the added gas. May be.

  According to said structure, a step bunching free SiC epitaxial wafer can be provided.

It is the image which observed the step bunching of the SiC epitaxial wafer surface by normal AFM, and is an image which shows (a) conventional step bunching and (b) short step bunching. It is the image which observed the step bunching of the SiC epitaxial wafer surface with the wide observation type AFM, and is an image which shows (a) conventional step bunching and (b) short step bunching. It is the image which observed the SiC epitaxial wafer containing a short step bunching with the differential interference microscope. It is the image which observed the wafer used in FIG. 3 after the KOH etching with the differential interference microscope. It is the image which observed the SiC epitaxial wafer surface by wide observation type AFM, and is an image which shows (a) SiC epitaxial wafer of the present invention, and (b) conventional SiC epitaxial wafer. It is the image which observed the SiC epitaxial wafer surface with the optical surface inspection apparatus using a laser beam, (a) SiC epitaxial wafer of this invention, (b) The image which shows the conventional SiC epitaxial wafer. (A) It is the image which observed the cross section of the SiC single crystal substrate surface of this invention with the transmission electron microscope, (b) is an enlarged image of (a). (A) It is the image which observed the cross section of the conventional SiC single crystal substrate surface with the transmission electron microscope, (b) is an enlarged image of (a). It is the image which observed the SiC epitaxial wafer surface of the comparative example 2 with the optical surface test | inspection apparatus which uses a laser beam (a), (b) It is the image observed with wide observation type AFM.

  Hereinafter, an SiC epitaxial wafer which is an embodiment to which the present invention is applied and a manufacturing method thereof will be described in detail with reference to the drawings.

[SiC epitaxial wafer]
FIGS. 5 and 6 show a SiC epitaxial wafer according to an embodiment of the present invention in which a SiC epitaxial layer is formed on a 4H—SiC single crystal substrate tilted at an off angle of 4 °. The result observed with the optical surface inspection apparatus (Kandela CS20 by KLA-Tencor) using a laser beam is shown.

  FIG. 5A is a wide-range observation type AFM image of 200 μm □ on the surface of the SiC epitaxial wafer of the present invention. FIG. 5 (b) shows a 200 μm □ wide-range observation type AFM image of the surface of a conventional SiC epitaxial wafer.

In the SiC epitaxial wafer of the present invention, no steps were observed (step linear density 0 / mm ⁻¹ ). Few steps were observed for other areas of this sample. Therefore, step bunching free including short step bunching is realized, and it can be seen that the step linear density is 5 mm ⁻¹ or less. Further, the root mean square roughness Rq was 0.4 nm, and the maximum height difference Ry was 0.7 nm. The average Rq of three regions randomly selected from the same sample was 0.52 nm, and the average Ry was 0.75 nm. Therefore, it can be seen that the observed root mean square roughness Rq is 1.0 nm or less and the maximum height difference Ry is 3.0 nm or less.

On the other hand, in the conventional SiC epitaxial wafer, step bunching in which many steps were combined at a linear density of 340 lines / mm ⁻¹ was observed. The average step line density of the other three regions of this sample was 362 lines / mm ⁻¹ . It can also be seen that the steps extend beyond the observation range.
Further, the root mean square roughness Rq was 2.4 nm, and the maximum height difference Ry was 3.6 nm. The average Rq of three regions randomly selected from the same sample was 3.2 nm, and the average Ry was 4.5 nm.

FIGS. 6 (a) and 6 (b) are images observed by an optical surface inspection apparatus using laser light (hereinafter referred to as “candela image”) for the 1 mm □ range of the same sample in FIGS. 5 (a) and 5 (b), respectively. ).
The observed surface root mean square roughness Rq was 1.2 nm in the SiC epitaxial wafer of the present invention. Therefore, it can be seen that the thickness is 1.3 nm or less.
On the other hand, it is 1.7 nm in the conventional SiC epitaxial wafer, and it can be seen that there is a clear difference in surface flatness between the present invention and the conventional SiC epitaxial wafer.

[Manufacturing method of SiC epitaxial wafer]
Hereinafter, a manufacturing method of a SiC epitaxial wafer which is one embodiment to which the present invention is applied will be described in detail.

<Polishing process>
In the polishing step, the 4H—SiC single crystal substrate is polished until the lattice disorder layer on the surface becomes 3 nm or less.
In this specification, the “lattice disordered layer” is a TEM lattice image (image in which the lattice can be confirmed), and a striped structure corresponding to the atomic layer (lattice) of the SiC single crystal or a part of the stripe is clear. A layer that is not.

  First, in order to explain the existence and characteristics of the “lattice disordered layer”, FIGS. 7 and 8 show transmission electron microscope (TEM) images near the surface of the SiC single crystal substrate after the polishing step.

7A and 7B are TEM images showing examples of the SiC single crystal substrate of the present invention.
In the TEM image shown in FIG. 7A, the surface flatness disorder cannot be observed. In the lattice image (FIG. 7B), which is an enlarged image, disorder is observed only in the uppermost atomic layer (lattice), and a clear striped structure is observed from the lower atomic layer (lattice). it can. A layer sandwiched by arrows is a “lattice disorder layer”.
From this TEM image, it can be confirmed that the “lattice disordered layer” on the surface is 3 nm or less.

FIGS. 8A and 8B are TEM images showing an example of a SiC single crystal substrate having a lattice disorder layer of 3 nm or more on the surface.
In the TEM image shown in FIG. 8A, a clear disturbance of surface flatness is observed, and a lattice image (FIG. 8B) which is an enlarged image of a portion which appears flat in FIG. 8A. In FIG. 5, the disturbance of the stripe structure can be observed over 6 nm from the surface.
In this TEM image, a “lattice disorder layer” of about 7 nm (a layer sandwiched between arrows on the right side in the image) can be observed, and it can be seen that the surface “lattice disorder layer” cannot achieve 3 nm or less in this sample. .

Below, the embodiment of this process is described.
The polishing process includes a plurality of polishing processes such as rough polishing usually called lapping, precision polishing called polishing, and chemical mechanical polishing (hereinafter referred to as CMP) which is ultra-precision polishing. The polishing process is often performed in a wet manner, but the common process in this process is to apply a polishing head to which a silicon carbide substrate is bonded while supplying polishing slurry to a rotating surface plate to which a polishing cloth is attached. Is to be done. The polishing slurry used in the present invention is basically used in such a form, but the form is not limited as long as it is wet polishing using the polishing slurry.

  The particles used as the abrasive grains may be particles that do not dissolve and disperse in this pH range. In the present invention, the pH of the polishing liquid is preferably less than 2. In this case, diamond, silicon carbide, aluminum oxide, titanium oxide, silicon oxide, or the like can be used as the abrasive particles. In the present invention, abrasive particles having an average diameter of 1 to 400 nm, preferably 10 to 200 nm, more preferably 10 to 150 nm are used as abrasive grains. In order to obtain a good final finished surface, silica is preferred in that small particles are commercially available at low cost. More preferred is colloidal silica. The particle size of an abrasive such as colloidal silica can be appropriately selected depending on processing characteristics such as processing speed and surface roughness. When a higher polishing rate is required, an abrasive having a large particle size can be used. When the surface roughness is small, that is, when a highly smooth surface is required, an abrasive having a small particle diameter can be used. Those having an average particle diameter exceeding 400 nm are expensive because they are expensive and the polishing rate is not high. When the particle diameter is extremely small such as less than 1 nm, the polishing rate is remarkably reduced.

  The addition amount of the abrasive particles is 1% by mass to 30% by mass, desirably 1.5% by mass to 15% by mass. If it exceeds 30% by mass, the drying speed of the abrasive particles becomes high, which increases the risk of causing scratches, and is uneconomical. Further, if the abrasive particles are less than 1% by mass, the processing speed becomes too low, which is not preferable.

  The polishing slurry in the present invention is a water-based polishing slurry, and the pH at 20 ° C. is less than 2.0, desirably less than 1.5, and more desirably less than 1.2. In the region where the pH is 2.0 or more, a sufficient polishing rate cannot be obtained. On the other hand, by making the slurry less than pH 2, the chemical reactivity with respect to silicon carbide is remarkably increased even under a normal indoor environment, and ultraprecision polishing becomes possible. The silicon carbide is not directly removed by the mechanical action of the oxide particles in the polishing slurry, but the polishing liquid causes the silicon carbide single crystal surface to chemically react with the silicon oxide, and the silicon oxide is mechanically treated by the abrasive grains. It is thought that it is a mechanism that removes it. Therefore, making the polishing composition liquid so that silicon carbide can easily react, that is, setting the pH to less than 2, and selecting oxide particles having an appropriate hardness as abrasive grains can cause scratches and scratches. It is very important to obtain a smooth surface without an altered layer.

  The polishing slurry is adjusted to have a pH of less than 2 using at least one or more, preferably two or more, acids of hydrochloric acid, nitric acid, phosphoric acid, and sulfuric acid. The reason why it is effective to use a plurality of acids is unknown, but it has been confirmed by experiments, and there is a possibility that a plurality of acids interact with each other and enhance the effect. As the addition amount of the acid, for example, in a range of 0.5 to 5% by mass of sulfuric acid, 0.5 to 5% by mass of phosphoric acid, 0.5 to 5% by mass of nitric acid, and 0.5 to 5% by mass of hydrochloric acid, The type and amount are selected so that the pH is less than 2.

The inorganic acid is effective because it is a stronger acid than the organic acid and is extremely convenient for adjusting to a predetermined strongly acidic polishing liquid. If an organic acid is used, it is difficult to adjust the strongly acidic polishing liquid.
The polishing of silicon carbide is performed by removing the oxide layer with oxide particles due to the reactivity to the oxide film generated on the surface of silicon carbide by the strongly acidic polishing liquid. In order to accelerate this surface oxidation, polishing is performed. When an oxidizing agent is added to the slurry, a further excellent effect is recognized. Examples of the oxidizing agent include hydrogen peroxide, perchloric acid, potassium dichromate, ammonium persulfate sulfate, and the like. For example, in the case of hydrogen peroxide solution, the polishing rate is improved by adding 0.5 to 5% by mass, preferably 1.5 to 4% by mass, but the oxidizing agent is not limited to hydrogen peroxide solution. .

  An anti-gelling agent can be added to the polishing slurry in order to suppress gelation of the abrasive. As the type of the gelation inhibitor, phosphate ester-type chelating agents such as 1-hydroxyethylidene-1,1-diphosphonic acid and aminotriethylenephosphonic acid are preferably used. The anti-gelling agent is added in the range of 0.01 to 6% by mass, preferably 0.05 to 2% by mass.

In order to make the surface disordered layer of 3 nm or less in the polishing process of the present invention, the damage pressure is reduced to 50 nm by using a polishing pressure of 350 g / cm ² or less and using abrasive grains having a diameter of 5 μm or less in mechanical polishing before CMP. Further, in CMP, the polishing slurry contains abrasive particles having an average particle size of 10 nm to 150 nm and an inorganic acid, and preferably has a pH of less than 2 at 20 ° C. Silica, more preferably 1 to 30% by mass, and more preferably at least one of inorganic acid, hydrochloric acid, nitric acid, phosphoric acid and sulfuric acid.

<Cleaning (gas etching) process>
In the cleaning step, the polished substrate is cleaned (gas etching) at 1400 to 1600 ° C. in a hydrogen atmosphere.

Hereinafter, an embodiment of this process will be described.
The gas etching is performed for 5 to 30 minutes by holding the SiC single crystal substrate at 1400 to 1600 ° C., setting the flow rate of hydrogen gas to 40 to 120 slm, and the pressure to 100 to 250 mbar.

  After the polished SiC single crystal substrate is cleaned, the substrate is set in an epitaxial growth apparatus, for example, a mass production type multiple planetary CVD apparatus. After introducing hydrogen gas into the apparatus, the pressure is adjusted to 100 to 250 mbar. Thereafter, the temperature of the apparatus is raised, the substrate temperature is set to 1400 to 1600 ° C., preferably 1480 ° C. or higher, and gas etching of the substrate surface is performed with hydrogen gas for 1 to 30 minutes. When gas etching with hydrogen gas is performed under such conditions, the etching amount is about 0.05 to 0.4 μm.

  The surface of the substrate is damaged by the polishing process, and it is considered that not only damage that can be detected as a “lattice disorder layer” in the TEM but also distortion of the lattice that cannot be detected by the TEM exists. The purpose of gas etching is to remove the damaged layer (hereinafter referred to as “damage layer”). However, when the gas etching is not sufficient and the damaged layer remains, different types of polytypes and Dislocations, stacking faults, and the like are introduced, and if etching is performed too much, surface reconstruction occurs on the substrate surface, and step bunching occurs before the start of epitaxial growth. For this reason, it is important to optimize the damaged layer and the amount of gas etching. However, as a result of intensive studies, the present inventors have found that the substrate surface has a lattice disorder as a sufficient condition in the production of a step bunching-free SiC epitaxial wafer. They found a combination of the damage layer when the layer was thinned to 3 nm or less and the gas etching conditions described above.

About the surface of the substrate after the cleaning (gas etching) step, the root mean square roughness Rq of the outermost surface of the epitaxial layer obtained by analyzing an area of 35% or more of the entire wafer surface using an optical surface inspection apparatus is 1.3 nm or less. I can confirm that. In addition, when measured using an atomic force microscope, the step bunching is 1.0 nm or less at 10 μm □, 1.0 nm or less at 200 μm □, and 100 to 500 μm in length observed at 200 μm □. It can be confirmed that the maximum height difference Ry in (short step bunching) is 3.0 nm or less. Moreover, it can confirm that the linear density of this step is 5 mm <^-1> or less.
It is important to maintain the flatness of the substrate surface in the subsequent film forming process and temperature lowering process.

SiH ₄ gas and / or C ₃ H ₈ gas may be added to the hydrogen gas. Although short step bunching may occur along with shallow pits caused by screw dislocation, SiH ₄ gas having a concentration of less than 0.009 mol% is added to hydrogen gas to make the environment in the reactor Si-rich. By performing gas etching, the depth of the shallow pit can be reduced, and the occurrence of short step bunching associated with the shallow pit can be suppressed.

<Film formation (epitaxial growth) process>
In the film formation (epitaxial growth) step, SiH ₄ gas and C ₃ H ₈ gas in an amount required for epitaxial growth of silicon carbide are added to the surface of the cleaned substrate at a concentration ratio C / Si of 0.7 to 0.7. At the same time in 1.2, silicon carbide is epitaxially grown.

Further, as described above, “simultaneous supply” means that it is not necessary to be completely at the same time, but is within several seconds. In the case of using Hot Wall SiC CVD manufactured by Ixtron shown in the examples described later, if the difference in supply time between SiH ₄ gas and C ₃ H ₈ gas is within 5 seconds, a step-bunching-free SiC epitaxial wafer can be manufactured. It was.

Each flow rate, pressure, and substrate temperature of SiH ₄ gas and C ₃ H ₈ gas are 15 to 150 sccm, 3.5 to 60 sccm, 80 to 250 mbar, and 1400 to 1600 ° C., respectively, and the film thickness and carrier concentration are uniform. Determine while controlling the growth rate. By introducing nitrogen gas as a doping gas simultaneously with the start of film formation, the carrier concentration in the epitaxial layer can be controlled. As a method for suppressing step bunching during growth, in order to increase the migration of Si atoms on the growth surface, it is known to lower the concentration ratio C / Si of the source gas to be supplied. 0.7-1.2. The growth rate is about 3 to 20 μm per hour. The epitaxial layer to be grown is usually about 5 to 20 μm in thickness and about 2 to 15 × 10 ⁻¹⁵ cm ^{−3 in} terms of carrier concentration.

<Cooling process>
The cooling step, to stop the supply of the SiH ₄ gas and a _C 3 _{H 8} gas is simultaneously holds the substrate temperature until the exhaust and SiH ₄ gas and a _C 3 _{H 8} gas is, then cooled.

After film formation, the supply of SiH ₄ gas and C ₃ H ₈ gas and the introduction of nitrogen gas as a doping gas are stopped and the temperature is lowered. At this time as well, gas etching occurs on the surface of the SiC epitaxial film, deteriorating the surface morphology. obtain. In order to suppress the deterioration of the surface morphology, the timing of stopping the supply of the SiH ₄ gas and the C ₃ H ₈ gas and the timing of temperature decrease are important. By simultaneously stopping the supply of SiH ₄ gas and C ₃ H ₈ gas, holding the growth temperature until these supplied gases disappear from the substrate surface, and then lowering the temperature to room temperature at an average rate of about 50 ° C. It was found that deterioration of morphology was suppressed.

EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited to these Examples.
In this embodiment, SiH ₄ gas and C ₃ H ₈ gas are used as source gases, N ₂ gas is used as a doping gas, H ₂ gas or HCl gas is used as a carrier gas and an etching gas, and mass production type multiple planetary CVD is used. A SiC epitaxial film was grown on a Si surface inclined by 4 ° in the <11-20> axial direction with respect to the (0001) plane of 4H—SiC single crystal by Hot Wall SiC CVD manufactured by Ixtron, which is an apparatus. The roughness of the obtained epitaxial wafer surface was examined using an optical surface inspection apparatus (Candela CS20 manufactured by KLA-Tencor), a normal AFM, and a wide-area observation type AFM. The wide-area observation type AFM is an AFM having an observation area of about 200 μm □, instead of having a lower vertical resolution than a normal AFM.

Example 1
In the polishing step, mechanical polishing before CMP was performed at a processing pressure of 350 g / cm ² using abrasive grains having a diameter of 5 μm or less. Further, CMP was performed for 30 minutes using silica particles having an average particle diameter of 10 to 150 nm as abrasive particles, and using a polishing slurry containing sulfuric acid as an inorganic acid and having a pH of 1.9 at 20 ° C.
The polished substrate was introduced into the growth apparatus after RCA cleaning. The RCA cleaning is a wet cleaning method generally used for Si wafers, and a substrate is prepared by using a mixed solution of sulfuric acid / ammonia / hydrochloric acid and hydrogen peroxide solution and a hydrofluoric acid aqueous solution. Organic substances, heavy metals and particles on the surface can be removed.
The cleaning (gas etching) step was carried out at a hydrogen gas flow rate of 90 slm, a reactor pressure of 200 mbar, and a substrate temperature of 1550 ° C. for 10 minutes.
In the SiC epitaxial growth process, after supplying C ₃ H ₈ gas so that the flow rates of SiH ₄ gas and C ₃ H ₈ gas are simultaneously supplied to the substrate surface at 48 sccm and 17.6 sccm, SiH ₄ gas is supplied after 3 seconds. did. C / Si selected 1.1. A growth process was carried out for 2 hours at a reactor internal pressure of 200 mbar and a substrate temperature of 1550 ° C. to form a SiC epitaxial layer having a thickness of 10 μm.

  The SiC epitaxial wafer thus fabricated was measured with a wide-area observation type AFM and an optical surface inspection apparatus, as shown in FIGS. 5A and 6A, and measured with an optical surface inspection apparatus. The Rq measured was 1.2 nm, the Rq measured by the wide-range observation type AFM was 0.4 nm, the maximum height difference Ry was 0.7 nm, and no step bunching was observed.

(Example 2)
A SiC epitaxial wafer was manufactured under the same conditions as in Example 1 except for the gas etching conditions. The gas etching process is different from that in Example 1 in that SiH ₄ gas having a concentration of 0.008 mol% is added to hydrogen gas.

  The SiC epitaxial wafer thus produced was measured with an optical surface inspection apparatus and a wide-range observation type AFM. An image similar to that in Example 1 was observed, Rq measured by the optical surface inspection apparatus was 1.1 nm, Rq measured by the wide-range observation type AFM was 0.4 nm, and the maximum height difference Ry was 0.7 nm. It was.

(Comparative Example 1)
In the SiC epitaxial growth process, SiH ₄ gas and C ₃ H ₈ gas were introduced at a concentration ratio C / Si of 1.9, and SiH ₄ gas was introduced 30 seconds after the introduction of C ₃ H ₈ gas. The SiC epitaxial wafer was produced on the same conditions as Example 1 except the above.

Images of the manufactured SiC epitaxial wafer measured by an optical surface inspection apparatus and a wide-area observation type AFM are as shown in FIGS. 6B and 5B, respectively.
In the candela image and the AFM image, conventional step bunching was observed over the entire wafer surface. The root mean square roughness Rq measured by the optical surface inspection apparatus was 1.7 nm, the root mean square roughness Rq measured by the wide-range observation type AFM was 2.4 nm, and the maximum height difference Ry was 3.6 nm. .

(Comparative Example 2)
In the SiC epitaxial growth step, a SiC epitaxial wafer was produced under the same conditions as in Example 1 except that the C ₃ H ₈ gas was introduced and the SiH ₄ gas was introduced 30 seconds later. Therefore, the comparison with Comparative Example 1 is that SiH ₄ gas and C ₃ H ₈ gas are introduced at a concentration ratio C / Si of 1.1.

9A and 9B show a candela image and a wide-range observation type AFM image of the manufactured SiC epitaxial wafer.
The root mean square roughness Rq measured by the optical surface inspection apparatus was 1.4 nm, the root mean square roughness Rq measured by the wide range observation type AFM was 1.4 nm, and the maximum height difference Ry was 2.8 nm. . The linear density of the step was 10 / mm ⁻¹ .

Conventional step bunching was not observed in either the candela image or the AFM image. This result shows that the concentration ratio C / Si between SiH ₄ gas and C ₃ H ₈ gas is important for suppressing the occurrence of conventional step bunching. And it confirmed that generation | occurrence | production of the conventional step bunching can be suppressed by making density | concentration ratio C / Si into the range of 0.7-1.2.

On the other hand, in the candela image of FIG. 9A, a plurality of short step bunchings of 1 mm □ were observed as indicated by a part of the arrows. This short step bunching was discovered by the present inventors, but it is indispensable for the production of a step bunching free SiC epitaxial wafer to suppress the occurrence of this short step bunching. As a result of intensive studies, the present inventors have found that an amount of SiH ₄ gas and C required for epitaxial growth of silicon carbide are formed on the surface after gas etching of an SiC single crystal substrate having a “lattice disordered layer” of 3 nm or less. It has been found that the occurrence of short step bunching can be suppressed by simultaneously supplying ₃ H ₈ gas with a concentration ratio C / Si of 0.7 to 1.2.

  The SiC epitaxial wafer of the present invention is a step bunching-free SiC epitaxial wafer, and can be used for manufacturing various silicon carbide semiconductor devices such as power devices, high-frequency devices, and high-temperature operation devices.

Claims (1)

  A SiC epitaxial wafer, wherein an SiC epitaxial layer is formed on a 4H-SiC single crystal substrate tilted at an off angle of 0.4 ° to 5 °, and has no short step bunching.