JP5117038B2 - ロータにおける非接触式温度測定装置 - Google Patents
ロータにおける非接触式温度測定装置 Download PDFInfo
- Publication number
- JP5117038B2 JP5117038B2 JP2006323804A JP2006323804A JP5117038B2 JP 5117038 B2 JP5117038 B2 JP 5117038B2 JP 2006323804 A JP2006323804 A JP 2006323804A JP 2006323804 A JP2006323804 A JP 2006323804A JP 5117038 B2 JP5117038 B2 JP 5117038B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- rotor
- coils
- magnet
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/36—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils
- G01K7/38—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils the variations of temperature influencing the magnetic permeability
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/04—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies
- G01K13/08—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies in rotary movement
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
本発明による装置は、従来技術とは対照的に、ロータの温度を広範囲にわたり測定することを可能にし、しかもこのためにただ1つの装置しか必要としない。温度測定は強磁性体のキュリー温度とは無関係であり、このことは、きわめて多数の強磁性体による一定でかつ正確なキュリー温度を必要しないので、装置の製造における問題点が低減する。温度測定は、さらに、ロータおよびステータの表面特性とは無関係なので、表面堆積は実際上問題とはならない。
他の実施形態は、磁石の動作温度が、磁化と温度との関係が線形でかつ可逆である温度範囲内にあるように構成されている。これにより、測定が、実際上任意の頻度で反復可能であることが達成できる。温度限界値に達した後においても、さらに温度決定が可能である。また、精度が向上し、しかも信号電圧を温度に比例する信号へ変換することが簡単となる。
2 キュリー温度発生点
201、301 軸(ロータ)
202 ディスク状部分(ロータ)
203 リング
204、302 磁石
205、206 コイル
207 電圧測定電子装置(電子手段)
208 電子装置の一部
209、409 マイクロコントローラ
303、403 コイル(駆動磁石)
401 電源電子装置
402 駆動電子装置
405 電圧測定装置(電子手段)
406 整流器回路
M 磁気分極(磁化)
T 温度
TC キュリー温度
Claims (4)
- ロータの温度を測定する装置であって、該ロータはロータ軸を有し、前記装置は、
2つのコイルであって、該コイルのうちの一方と前記ロータ軸との間の距離が、該コイルのうちの他方と前記ロータ軸との間の距離と異なるようにステータに配置された、2つのコイルと、
前記2つのコイルに電圧を誘導するため、前記ロータと共に回転するための前記ロータに装着された磁石であって、前記ロータの回転により生ずる円軌道上において該磁石が前記2つのコイル間の間隙を通過するように該ロータに配置された、磁石と、
前記2つのコイルに前記磁石によって誘導された電圧を測定するための電子手段であって、前記電圧を温度に比例した信号に変換する手段を含む、電子手段と、
を含む装置。 - 前記温度に比例した信号が電圧である、請求項1記載の装置。
- 磁石の動作温度が、磁化と温度との関係が線形でかつ可逆である温度範囲内にある、請求項1または2に記載の装置。
- 前記円軌道に沿って複数のコイル対が配置された、請求項1記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005057641.9 | 2005-12-02 | ||
DE102005057641.9A DE102005057641B4 (de) | 2005-12-02 | 2005-12-02 | Turbomolekularvakuumpumpe mit berührungsloser Rotortemperaturmessung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007155723A JP2007155723A (ja) | 2007-06-21 |
JP5117038B2 true JP5117038B2 (ja) | 2013-01-09 |
Family
ID=37746959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006323804A Expired - Fee Related JP5117038B2 (ja) | 2005-12-02 | 2006-11-30 | ロータにおける非接触式温度測定装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7575372B2 (ja) |
EP (1) | EP1793214B1 (ja) |
JP (1) | JP5117038B2 (ja) |
DE (1) | DE102005057641B4 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007001065B4 (de) * | 2007-01-03 | 2021-07-22 | Leybold Gmbh | Gaspumpe |
US7965054B2 (en) * | 2007-07-26 | 2011-06-21 | Shimadzu Corporation | Vacuum pump |
EP2108930A1 (en) * | 2008-04-09 | 2009-10-14 | VARIAN S.p.A. | Contact-less device for measuring operating parameters of rotors of high-speed rotary machines |
DE102008037157A1 (de) * | 2008-08-08 | 2010-02-11 | Oerlikon Textile Gmbh & Co. Kg | Verfahren zum Betreiben einer Rotorspinnmaschine |
WO2011106825A2 (en) * | 2010-03-01 | 2011-09-09 | Applidyne Australia Pty Ltd | Contactless temperature sensing |
CN102403666A (zh) * | 2011-11-25 | 2012-04-04 | 浙江开关厂有限公司 | 可在线测量柜内温度的开关设备 |
US9383267B2 (en) * | 2013-05-31 | 2016-07-05 | Purdue Research Foundation | Wireless sensor for rotating elements |
CN104132736B (zh) * | 2014-07-31 | 2017-02-15 | 华中科技大学 | 一种直流激励磁场下的非侵入式快速温度变化的测量方法 |
Family Cites Families (27)
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US1742138A (en) * | 1924-11-28 | 1929-12-31 | Gen Electric | Temperature-responsive device |
DE946092C (de) * | 1941-08-27 | 1956-07-26 | Siemens Ag | Einrichtung zur Messung oder Regelung der Temperatur von rotierenden Koerpern |
DE958600C (de) * | 1955-10-11 | 1957-02-21 | Licentia Gmbh | Anordnung zur Temperaturmessung an umlaufenden Wellen |
US3391576A (en) * | 1965-03-13 | 1968-07-09 | Hitachi Ltd | Thermometric device for rotating structures |
GB1309906A (en) * | 1969-06-09 | 1973-03-14 | English Electric Co Ltd | Temperature sensors |
DE2300167C3 (de) * | 1973-01-03 | 1980-04-17 | Nautschno-Issledovatelskij I Opytno- Konstruktorskij Institut Avtomatisacii Tschernoj Metallurgii, Dnepropetrowsk (Sowjetunion) | Einrichtung zur Messung der Temperatur ferromagnetischer Körper |
GB1359574A (en) * | 1973-01-31 | 1974-07-10 | Davall Sons Ltd S Somervell R | Temperature sensors |
DE2305388A1 (de) * | 1973-02-03 | 1974-08-08 | Eickhoff Geb | Vorrichtung zur beruehrungslosen temperaturueberwachung von sich drehenden maschinenteilen, insbesondere von bremstrommeln od. dgl |
JPS58180437U (ja) * | 1982-05-28 | 1983-12-02 | 東北金属工業株式会社 | 回転体の温度検出装置 |
JPS59108960A (ja) * | 1982-12-14 | 1984-06-23 | Yaskawa Electric Mfg Co Ltd | 温度検出機能をもつ回転速度検出装置 |
JPS60104740U (ja) * | 1983-12-21 | 1985-07-17 | シャープ株式会社 | 温度検出装置 |
DE3416340A1 (de) * | 1984-05-03 | 1985-11-07 | Robert Bosch Gmbh, 7000 Stuttgart | Vorrichtung zur beruehrungslosen temperaturmessung von rotierenden koerpern |
JPH04143644A (ja) * | 1990-10-05 | 1992-05-18 | Canon Inc | 電子素子用温度制御装置 |
DE4133365C2 (de) * | 1991-10-09 | 1994-04-28 | Innotech Microelectronic Gmbh | Meßwertübertragungssystem |
DE4137559A1 (de) * | 1991-11-15 | 1993-05-19 | Heidelberger Druckmasch Ag | Einrichtung zur erfassung mindestens einer zustandsgroesse eines buerstenlosen gleichstrommotors |
JPH06117943A (ja) * | 1992-10-02 | 1994-04-28 | Canon Inc | 温度測定方法、該温度測定方法を用いた装置およびエネルギー貯蔵装置 |
DE4309018A1 (de) * | 1993-03-20 | 1994-09-22 | Balzers Pfeiffer Gmbh | Temperatur-Meßanordnung |
US5907202A (en) * | 1995-08-28 | 1999-05-25 | Mikuni Corporation | Thermo-sensitive actuator and idle speed controller employing the same |
DE19616258C2 (de) * | 1996-04-24 | 2000-04-20 | Wolfgang Wuttke | Verfahren und Vorrichtung zur Überwachung des Wärmezustandes eines bewegten Körpers |
DE19702140C2 (de) * | 1997-01-22 | 1998-12-03 | Siemens Ag | Vorrichtung und Verfahren zur Messung der Temperatur eines rotierenden Trägers |
DE19739587B4 (de) * | 1997-09-10 | 2006-05-11 | Pfeiffer Vacuum Gmbh | Temperatur-Überwachungsanordnung |
DE19857453B4 (de) * | 1998-12-12 | 2008-03-20 | Pfeiffer Vacuum Gmbh | Temperaturüberwachung an Rotoren von Vakuumpumpen |
US6262574B1 (en) * | 1999-03-12 | 2001-07-17 | The United States Of America As Represented By The Secretary Of The Navy | Sensor for measuring magnetic field strength and temperature for an electric motor |
US6424148B1 (en) * | 2000-10-30 | 2002-07-23 | Sauer-Danfoss Inc. | Apparatus and method for sensing and magnetically communicating physical parameters of rotating shaft |
JP2003287463A (ja) | 2002-03-28 | 2003-10-10 | Boc Edwards Technologies Ltd | 放射温度測定装置及び該放射温度測定装置を搭載したターボ分子ポンプ |
US7023201B2 (en) * | 2003-12-15 | 2006-04-04 | Texas Instruments Incorporated | Magnetic position sensor apparatus and method |
DE102004016477A1 (de) * | 2004-03-31 | 2005-10-20 | Fag Kugelfischer Ag | Vorrichtung zum Erfassen wenigstens eines Zustandes |
-
2005
- 2005-12-02 DE DE102005057641.9A patent/DE102005057641B4/de not_active Expired - Fee Related
-
2006
- 2006-11-07 EP EP06023138.8A patent/EP1793214B1/de not_active Not-in-force
- 2006-11-16 US US11/601,016 patent/US7575372B2/en not_active Expired - Fee Related
- 2006-11-30 JP JP2006323804A patent/JP5117038B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1793214B1 (de) | 2017-06-14 |
US20070127551A1 (en) | 2007-06-07 |
DE102005057641A1 (de) | 2007-06-06 |
US7575372B2 (en) | 2009-08-18 |
DE102005057641B4 (de) | 2017-06-01 |
EP1793214A1 (de) | 2007-06-06 |
JP2007155723A (ja) | 2007-06-21 |
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