JP5065703B2 - Model identification method of rotating machine body in rotating machine apparatus, rotating machine apparatus - Google Patents

Model identification method of rotating machine body in rotating machine apparatus, rotating machine apparatus Download PDF

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JP5065703B2
JP5065703B2 JP2007035425A JP2007035425A JP5065703B2 JP 5065703 B2 JP5065703 B2 JP 5065703B2 JP 2007035425 A JP2007035425 A JP 2007035425A JP 2007035425 A JP2007035425 A JP 2007035425A JP 5065703 B2 JP5065703 B2 JP 5065703B2
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controller
rotating machine
connector
machine
identification information
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JP2008196463A (en
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敦 大山
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株式会社荏原製作所
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  In the present invention, a controller having different control conditions for each model of the rotating machine body (a controller having optimum control conditions set for each model) is connected to a rotating machine body that supports a rotating body with a bearing via a control cable. In particular, the present invention relates to a method for identifying the type of a rotating machine body in a rotating machine device such as a turbo molecular pump or a gas circulation fan whose rotating body is supported by a magnetic bearing, and the rotating machine device.

  A rotating machine that supports a rotating body such as a turbo molecule with a magnetic bearing requires a control compensation circuit using an electronic circuit in accordance with the intrinsic characteristics of the rotor in order to control the magnetic levitation support of the rotating body (rotor) at a predetermined position. . In addition, an inverter device for driving a drive motor that rotationally drives the rotating body also requires an inverter device having output characteristics that match the characteristics of the drive motor.

  FIG. 1 is a diagram showing a configuration example of a rotating machine device in which a control device (controller) is connected to a magnetic bearing portion (magnetic bearing mechanism portion) of a turbo molecular pump which is an example of a rotating machine via a dedicated control cable. FIG. 2 is a block diagram showing a circuit configuration of the magnetic bearing unit and the controller. The magnetic bearing unit 10 of the turbo molecular pump fixes the radial magnetic bearing targets 12A and 12B made of a magnetic material, the radial displacement detection sensor targets 13A and 13B, the axial magnetic bearing target 14 and the rotor 15 of the rotating body drive motor M to the rotating shaft 11. The rotating body R having the above-described configuration is provided. The rotating body R is controlled by magnetic levitation support (5-axis control) with radial electromagnets 16A and 16B arranged opposite to the radial magnetic bearing targets 12A and 12B and an axial electromagnet 17 arranged opposite to the axial magnetic bearing target 14. It has come to be. Although illustration is omitted, a rotor blade of a turbo molecular pump is attached to the upper part of the rotating shaft.

  Reference numeral 18 denotes a stator of the rotating body drive motor M, which is disposed opposite to the outer periphery of the rotor 15. By supplying a driving current to the stator 18, the rotor 15 rotates and the rotating body R rotates. Reference numerals 19A and 19B denote radial displacement sensors, which are arranged to face the radial displacement detection sensor targets 13A and 13B, and detect radial displacements of the radial displacement detection sensor targets 13A and 13B. Reference numeral 20 denotes an axial displacement detection sensor, which is disposed opposite to the lower end of the rotating shaft 11 and detects the displacement of the rotating shaft 11 in the axial direction. Reference numeral 21 denotes a casing of the magnetic bearing unit 10, and the casing 21 is provided with an insertion port 22 into which a plug 31 attached to one end of a dedicated control cable 30 is inserted. Further, the casing of the controller 40 is provided with an insertion port 41 into which the plug 32 attached to the other end of the control cable 30 is inserted, so that the controller 40 can be connected to the magnetic bearing portion 10 via the dedicated control cable 30. ing.

  As shown in FIG. 2, the magnetic bearing unit 10 includes a position displacement sensor unit 51, a temperature sensor unit 52, a rotation sensor unit 53, a magnetic bearing electromagnet unit 54, and a motor drive coil unit 55. The controller 40 includes a compensation circuit 61, other signal processing circuit 62, a bearing drive power amplifier 63, an inverter device 64, and a circuit drive power supply 65.

  The position displacement sensor unit 51 of the magnetic bearing unit 10 is suitable for amplifying the output signals of the radial displacement sensors 19A and 19B and the output signal of the axial displacement detection sensor 20 with a preamplifier or the like and sending them to the compensation circuit 61 of the controller 40. It is a circuit unit for processing a signal. Further, the temperature sensor unit 52 of the magnetic bearing unit 10 amplifies an output signal of a temperature sensor (not shown) provided at a predetermined position of the magnetic bearing unit 10 with a preamplifier or the like, and sends it to the other signal processing circuit 62 of the controller 40. This is a circuit unit that processes signals suitable for the above. The rotation sensor unit 53 is a circuit unit that processes an output of a rotation sensor (not shown) for detecting the rotation speed of the rotating body into a signal suitable for sending to the other signal processing circuit 62 of the controller 40. Further, the magnetic bearing electromagnet portion 54 of the magnetic bearing portion 10 is the radial electromagnets 16A and 16B and the axial electromagnet 17, and the motor drive coil portion 55 is the coil portion of the stator 18 of the rotating body drive motor M.

  The compensation circuit 61 of the controller 40 is a control signal generation circuit, which receives the output signals of the radial displacement sensors 19A and 19B from the position displacement sensor unit 51 and the output signal of the axial displacement detection sensor 20 and receives the radial electromagnets 16A and 16B and A control signal for controlling the axial electromagnet 17 is generated. The control signal generated by the compensation circuit 61 is output to the bearing drive power amplifier 63, amplified by the bearing drive power amplifier 63, and used as a control current so that the magnetic bearing electromagnet 54, that is, the radial electromagnets 16A and 16B and the axial electromagnet. 17 is supplied. As a result, the rotating body R is levitated and supported by the magnetic force generated by the radial electromagnets 16A and 16B and the axial electromagnet 17. Further, a drive current is supplied from the inverter device 64 to the stator 18 of the rotating body drive motor M, and the rotating body R rotates.

  In recent years, a controller used for a turbo molecular pump in which a rotating body R is supported by a magnetic bearing has to be provided with a dedicated controller corresponding to the model of the turbo molecular pump in order to balance the product cost and the number of manufactured units. Instead, it has become more common to prepare controllers that are integrated within a certain range of specifications, change the internal settings (adjustments) of the controllers, and use them. That is, in terms of electrical circuit design configuration, it has become technically and cost-effective to operate a plurality of turbo molecular pumps with the same controller.

  However, as a result of this, even if the controller is structurally the same, the internal settings are wrong, causing troubles such as the turbo molecular pump not being able to operate normally, In response to a request to use it for a molecular pump, there is an unreasonable situation where the internal settings are changed by returning to the manufacturer, which is an obstacle to controller integration and cost reduction does not progress. there were.

  As a countermeasure, there is a method for setting the turbo molecular pump connected to the controller side, and setting it according to the model of the turbo molecular pump to be connected at the time of connection. Since the setting distance is long or the wiring inside the device is complicated, it is not practical because it is impossible to determine which turbo molecular pump the controller is connected to, so it is connected as a controller function. A function to discriminate the model of the turbo molecular pump used by the controller itself has been demanded.

  On the other hand, the magnetic bearing mechanism that supports the rotator magnetically levitated is designed so that the rotator can be installed freely in terms of its function. Due to the difference, it is known that the magnetic bearing control characteristics can be changed and used more stably.

  In order to identify the model of the turbo molecular pump body, in the method proposed in the past, the model identifying element such as a resistor incorporated in the pump body is identified by a signal means sent from the host controller, and the turbo molecular pump and the controller A method of obtaining compatibility, a method of detecting the uniqueness of the turbo molecular pump by detecting the magnetic characteristics of the motor coil on the controller side, a method of obtaining compatibility with the controller, and a rotating body using a DSP A method for identifying the turbo molecular pump model based on the unique data of the turbo molecular pump obtained by the movement and vibration of the turbo molecular pump is proposed.

  Among the above-mentioned conventional turbo molecular pump model identification methods, the method of mounting a model identification element inside the turbo molecular pump requires that the identification element be incorporated from the beginning of the turbo molecular pump manufacture, and the identification element is installed. The model identification function cannot be operated on existing turbo molecular pumps.

  Also, the method for detecting the magnetic characteristics of the motor coil on the controller side is to detect even the same type of motor due to manufacturing errors, variations caused by installation environment, variations caused by temperature fluctuations of the body, etc. When certain data cannot be obtained during operation and a new identification function is applied to the existing turbo molecular pump motor, desired data cannot be obtained due to deterioration of motor characteristics, etc. There are cases where identification becomes difficult.

  Also, in the method of identifying the model by mechanically moving the rotating body of the turbo molecular pump, measuring the gap and detecting the gap amount specific to the model, in order to clarify the difference between the models, One of the mechanical dimensions must be changed for the difference, and even with slight changes to improve the performance of the same model, the model identification function may be affected. For turbo molecular pumps that have already begun to be used and turbo molecular pumps that have been overhauled, there have been practical restrictions such as the model cannot be identified because the dimensions have changed. .

  In addition, a method has been proposed in which a dip switch-like switch or parallel switch is wired separately from the turbo molecular pump control cable and used as a model switch, but a cable with a special structure is required. Was a practical limitation.

In addition, for determining the installation direction of the magnetic bearing, there are a method of estimating and detecting the turbo molecular pump mounting direction from a change in the magnetic bearing coil current, or a method of detecting the pump mounting direction by incorporating an acceleration sensor or the like in the pump body. Although it has been proposed, if an error in the current due to the manufacturing error of the magnetic bearing coil body occurs, the correct installation direction cannot be estimated, or the existing turbo molecular pump with no acceleration sensor installed can be used. In any case, there was a practical problem such as the detection function could not be validated.
Japanese Patent No. 3382627 Japanese Patent No. 3457353 JP-A-10-77993 Japanese Patent Laid-Open No. 10-122182 JP 11-294454 A JP 11-311249 A Japanese Utility Model Publication No. 04-46226 Japanese Utility Model Publication No. 04-62393 Japanese Patent Laid-Open No. 04-42290 JP 2003-148386 A

  The present invention has been made in view of the above points, and can easily identify the model of the rotating machine body with a simple configuration, and can easily set the controller connected to the rotating machine to the optimal control conditions for the model, It is another object of the present invention to provide a rotary machine main body model identifying method in a rotary machine apparatus that can be reliably set and connected, and a rotary machine apparatus inexpensively.

In order to solve the above-mentioned problem, the invention of claim 1 is directed to a rotating machine body that supports a rotating body with a magnetic bearing , and a controller adapted to control conditions for each model of the rotating machine body via a control cable. In the rotary machine main body model identification method in the rotary machine device configured to be connected, the control cable is provided with connectors at both ends, and the rotary machine main body and the controller are each provided with a connector connection portion for connecting a cable connector, A connector at one end of the cable is connected to the connector connecting portion of the rotating machine main body, and a connector at the other end of the cable is connected to the connector connecting portion of the controller. The connector connecting portion of the rotating machine main body and the control cable Between the connectors at one end of the controller or at the connector at the other end of the control cable. The adapter unit installed between the motor, the mounted model identification information that can identify the type of the rotary machine body to the adapter unit, characterized in that to be able to recognize the model identification information from the controller side.

According to a second aspect of the present invention, in the method of identifying a model of a rotating machine main body in the rotating machine device according to the first aspect, the rotating machine main body is a turbo molecular pump or a gas circulation fan that supports the rotating body with a magnetic bearing. It is characterized by being.

According to a third aspect of the present invention, there is provided a rotary machine device having a configuration in which a controller adapted to control conditions for each model of the rotary machine main body is connected to a rotary machine main body that supports a rotating body with a magnetic bearing via a control cable. The control cable is provided with connectors at both ends thereof, the rotary machine body and the controller are each provided with a connector connection part for connecting a cable connector, and the connector at one end of the cable is connected to the connector connection part of the rotary machine body. The connector connecting portion of the controller is connected to the connector at the other end of the cable, between the connector connecting portion of the rotating machine body and the connector at one end of the control cable, or the connector connecting portion of the controller the adapter unit is installed between the other end of the connector of the control cable, the adapter unit Serial equipped with model identification information capable of identifying the type of rotary machine body, characterized in that to be able to recognize the model identification information from the controller side.

According to a fourth aspect of the present invention, in the rotary machine device according to the third aspect , in the adapter unit, signal wiring used for controlling the rotary machine main body and wiring for relaying power wiring used for power supply are provided. And one or more wires are connected to the control cable connected to the connector connecting portion of the controller, and the model identification information means is a passive electronic component such as a resistor or a capacitive element. And a passive component switching circuit configured by the switching element, the passive electronic component corresponding to the model identification information of the connected rotating machine body is switched by the manual component switching circuit, and the rotating machine body of the rotating machine body is switched from the controller side. The feature is that the model can be recognized.

According to a fifth aspect of the present invention, in the rotary machine device according to the third aspect , in the adapter unit, signal wiring used for controlling the rotary machine main body and wiring for relaying power wiring used for power supply are provided. And a constant current circuit in which one or more wires are connected to the control cable connected to the connector connecting portion of the previous controller, and the model identification information means can be set to an arbitrary current value And setting means for setting the current value to an arbitrary value, and by setting the constant current value of the constant current circuit to a current value corresponding to the model identification information of the connected rotating machine body, from the controller side It is possible to recognize the model of the rotating machine body.

According to a sixth aspect of the present invention, in the rotary machine device according to the third aspect , in the adapter unit, signal wiring used for controlling the rotary machine main body and wiring for relaying power wiring used for power supply are provided. And one or more wires are connected to the control cable connected to the connector connecting portion of the previous controller, and the model identification information means stores predetermined data relating to the model of the rotating machine body. A stored data storage element, a communication circuit, and data switching means are provided, and the data stored in the data storage element is switched and set to data corresponding to the model identification information of the connected rotating machine body. By switching from the controller side to data corresponding to the model identification information of the rotating machine body, the controller side machine Characterized in that to be able to recognize.

According to a seventh aspect of the present invention, in the rotary machine device according to the sixth aspect , the operation information supplied by communication from the controller via the communication circuit can be written in the data storage element. The written operation information can be read out from the controller via the communication circuit, or the data stored in the data storage element can be read out by an external signal processing device by providing a separate communication line. It is made possible to do.

According to an eighth aspect of the present invention, in the rotary machine device according to the sixth aspect of the present invention, an installation direction detection for detecting in the adapter unit which direction the installation direction of the adapter unit is relative to the direction of gravity. An installation direction detection signal from the installation direction detection element is transmitted to the controller together with the model identification signal so that the model and installation direction of the rotating machine body can be recognized from the controller side. Features.

According to a ninth aspect of the present invention, in the rotary machine device according to the sixth aspect , in the adapter unit, the orientation of the installation direction of the adapter unit with respect to the direction of gravity is determined by manual operation. A switching means capable of setting an output signal is provided, and an installation direction signal set by the manual operation is transmitted to the controller together with the model identification signal, and the model and installation direction of the rotating machine body are identified from the controller. It is possible to do it.

According to a tenth aspect of the present invention, in the rotary machine device according to the third aspect , an internal circuit driving power source in the adapter unit and a model identification signal of the rotary machine main body are used for controlling the rotary machine main body. A signal injection circuit that overlaps either the signal wiring to be used or the wiring that relays the power wiring used for power supply, and the model identification signal is superimposed on the signal wiring or the wiring that relays the power wiring to thereby make the controller side From the above, it is possible to recognize the model of the rotating machine body.

According to an eleventh aspect of the present invention, in the rotary machine device according to any one of the third to tenth aspects, the rotary machine body is a turbo molecular pump or a gas circulation fan that supports the rotating body with a magnetic bearing. It is characterized by that.

According to a twelfth aspect of the present invention, in the rotary machine device according to any one of the third to eleventh aspects, the controller recognizes the model recognition information and recognizes the model of the connected rotary machine body. And a control condition setting means for setting the control condition to an optimum condition for the recognized rotating machine body.

According to the first aspect of the present invention , the adapter unit is installed between the connector connecting portion of the rotating machine body and the connector at one end of the control cable, or between the connector connecting portion of the controller and the connector at the other end of the control cable . The adapter unit is equipped with model identification information that can identify the model of the rotating machine body, so that the model identification information can be recognized from the controller side, so the model of the rotating machine body connected by the controller is recognized, and this It is possible to easily and reliably set the optimal control conditions for the recognized rotary machine body. In addition, by installing an adapter unit between the connector connection part of the rotating machine body and the connector at one end of the control cable, the machine identification function of the rotating machine body can be easily added to a rotating machine device already installed in production equipment. can do. Also, by installing the adapter unit between the connector connection part of the rotating machine main body and the connector at one end of the control cable, the model of the rotating machine main body is confirmed and the model identification information is securely mounted (set) on the adapter unit. it can.

According to the second aspect of the present invention, in the rotary machine device including the turbo molecular pump or the gas circulation fan that supports the rotating body with the magnetic bearing as the rotary machine body, the effect of the invention of the first aspect is achieved. Similar effects can be obtained.

According to the invention described in claim 3 , the adapter unit is installed between the connector connecting portion of the rotating machine main body and the connector at one end of the control cable, or between the connector connecting portion of the controller and the connector at the other end of the control cable. Since the model identification information means having information capable of identifying the model of the rotary machine main body connected to the adapter unit is mounted so that the identification information can be recognized on the controller side, the rotary machine main body connected on the controller side It is possible to easily and reliably set the optimum control conditions for controlling the rotary machine body of the recognized model. In addition, by installing an adapter unit between the connector connection part of the rotating machine body and the connector at one end of the control cable, or between the connector connection part of the controller and the connector at the other end of the control cable, it is already installed in the production facility. In addition, a model identification function of the rotating machine body can be easily added to the rotating machine device. In addition, by installing the adapter unit between the connector connection part of the rotating machine body and the connector at one end of the control cable, the model of the rotating machine body can be confirmed, and the model identification information can be reliably mounted (set) on the adapter unit. .

According to the invention described in claim 4 , the model identification information means includes a passive component switching circuit configured by a passive electronic component such as a resistor or a capacitance element and a switching element, and switches the passive component switching circuit. Thus, the model identification information of the connected rotating machine main body is set so that the model identification information of the rotating machine main body can be recognized from the controller side. Therefore, in addition to the same effect as the effect of the invention of claim 3 above, The model identification information of the rotating machine body can be easily mounted, and the model identification information can be easily recognized on the controller side.

According to the invention described in claim 5 , the model identification information means includes a constant current circuit that can be set to an arbitrary current value, and a setting means that sets the current value to an arbitrary value. set current value corresponding to the model identification information of a rotary machine body that is connected to a constant current value, since to be able to recognize the model identification information of the rotating machine body from the controller side, the invention described in claim 3 In addition to the effects similar to the above, the model identification information of the rotating machine body can be easily set, and the model identification information can be easily recognized on the controller side.

According to the invention described in claim 6 , the model identification information means includes a data storage element storing predetermined data relating to the model of the rotating machine body, a communication circuit, and a data switching means, and is stored in the data storage element. The data according to claim 3 is switched to the data corresponding to the model identification information of the connected rotary machine main body so that the model identification information of the rotary machine main body can be recognized from the controller side. In addition to the effects similar to the above, the model identification information of the rotating machine body can be easily mounted, and the model identification information can be easily recognized on the controller side.

According to the seventh aspect of the present invention, it is possible to write operation information supplied by communication from the controller via a communication circuit to the data storage element, and the written operation information passes through the communication circuit. and can be read from the controller, or by providing a separate communication circuit, since to be able to read the data stored in the data storage device by an external signal processing device, the invention described in claim 6 In addition to the same effects, the controller-side upgrade firmware can be transmitted from the adapter unit, and it becomes easy to optimize control conditions such as various setting information on the controller side for each model of the rotating machine body. The external signal processing device can also read and process the data stored in the data storage element.

According to the invention of claim 8, arranging direction detecting signal from the arranging direction detecting element provided in the adapter unit, with model identification signal, because it is sent to the controller, the invention described in claim 6 In addition to the effects similar to the effects, it is easy to optimize the control conditions considering the installation direction.

According to the invention described in claim 9 , since the installation direction signal set by manual operation is transmitted to the controller together with the model identification signal, in addition to the effect similar to the effect of the invention described in claim 6 above, It becomes easy to optimize the control conditions considering the direction.

According to the invention of claim 10 , the signal injection for superimposing the model identification signal of the rotating machine body on either the signal wiring used for controlling the rotating machine body or the wiring relaying the power wiring used for power supply Since the circuit is provided and the model identification signal is superimposed on the wiring that relays the signal wiring or the power wiring so that the model identification information of the rotating machine body can be recognized from the controller side, the invention according to claim 3 In addition to the effects similar to the effects, the signal wiring for transmitting the model identification signal of the rotating machine body to the controller can be omitted.

According to an eleventh aspect of the present invention, in a rotary machine device including a turbo molecular pump or a gas circulation fan that supports a rotating body with a magnetic bearing as a main body of the rotary machine, the invention according to any one of the above third to tenth aspects. An effect similar to the effect can be obtained.

According to the invention described in claim 12, after the controller recognizes the model recognition information and recognizes the model of the connected rotating machine body, the controller sets the control conditions to the optimum conditions for the recognized rotating machine body. Since the control condition setting means is provided, it is possible to perform control capable of operating the rotating machine main body in an optimal state and maximizing its function.



  Embodiments of the present invention will be described below with reference to the drawings. FIG. 3 to FIG. 5 are diagrams showing configuration examples of a rotary machine device that uses a magnetic bearing portion of a turbo molecular pump as a rotary machine body. 3 to 5, the same reference numerals as those in FIG. 1 denote the same or corresponding parts. In other drawings, the same reference numerals as those in FIGS. 1 and 2 denote the same or corresponding parts. In FIG. 3, reference numeral 23 denotes an adapter unit equipped with model identification information means that can identify the model of the turbo molecular pump including the magnetic bearing unit 10, and the adapter unit 23 is interposed between the magnetic bearing unit 10 and the dedicated control cable 30. Specifically, it is installed between a plug 31 provided at one end of the control cable 30 and an insertion port 22 provided in the casing 21 of the magnetic bearing portion 10.

  The controller 40 connected to the magnetic bearing unit 10 via the control cable 30 is an integrated controller described above, and can set optimal control conditions for each model of the turbo molecular pump including the magnetic bearing unit 10. ing. The model identification information means of the adapter unit 23 is equipped (set) with model identification information that can identify the model of the turbo molecular pump provided with the magnetic bearing portion 10, so that the model identification information can be recognized from the controller 40. ing. The controller 40 recognizes the model identification information of the connected turbo molecular pump, sets optimal control conditions for controlling the turbo molecular pump of the model, and controls the magnetic bearing unit 10.

  The identification information mounted on the model identification means of the adapter unit 23 can be arranged as many as the number of patterns that can identify the turbo molecular pump. An example is shown below.

  If the model identification means of the adapter unit 23 continues to output a digital signal of about 4 bits and has a function of switching to 8 types of digital signals by switching the switch, it can be adapted to 8 types of turbo molecular pumps. On the controller 40 side, eight types of turbo molecular pumps are identified by digital signals, and the rotational speed setting and the like are automatically switched. In this case, “the identification information is a 4-bit digital signal”.

  If the model identifying means of the adapter unit 23 is an identification unit that outputs an analog current signal of 4-20 mA, an infinite switching signal can be generated by switching the switch, and a turbo molecular pump model for a predetermined current value. Is determined, and the turbo molecular pump corresponding to the current signal is determined on the controller 40 side, so that the rotational speed setting and the like are automatically switched. In this case, “the identification information is a 4-20 mA current signal”.

  A CPU and a memory are mounted inside the adapter unit 23, and model setting data required on the controller 40 side is transmitted from the adapter unit 23 to the controller 40 side. As a data transmission method, there are communication methods such as RS485, 232 and the like. In this case, the identification information is not a signal but a set value of the controller itself.

  In addition, the controller 40 may have either setting switching information according to the identification signal, or the setting information itself may be sent from the adapter unit 23. What is required is the turbo molecule from the adapter unit 23. It is only necessary to be able to output a different “identification signal” for each pump model.

  As the adapter unit, an adapter unit 24 having a shape different from that of the adapter unit 23 is provided between the magnetic bearing portion 10 and the dedicated control cable 30 as shown in FIG. It installs between the plug 31 and the insertion port 22 provided in the casing 21 of the magnetic bearing part 10, and the insertion direction of the plug 31 is changed. Further, the adapter unit 25 is connected between the controller 40 and the dedicated control cable 30 as shown in FIG. 5, more specifically, the plug 32 provided at the other end of the control cable 30 and the insertion port 41 provided in the casing of the controller 40. You may install between.

  FIG. 6 is a block diagram showing a circuit configuration of the rotary machine device of FIG. As shown in the figure, the adapter unit 23 is provided with a model identification information setting circuit 70 as model identification information means, and the model identification information S1 set in the model identification information setting circuit 70 is wired in the control cable 30. Via the other signal processing circuit 62 of the controller 40. Thus, the controller 40 can reliably recognize the model identification information S1 set in the model identification information setting circuit 70, and can recognize the model of the turbo molecular pump provided with the magnetic bearing portion 10 connected to the controller 40. Although not shown, the controller 40 includes data for optimally setting the control conditions for each turbo molecular pump model, and the control conditions are optimized according to the connected turbo molecular pump model based on the data. The control condition setting means is set, and after recognizing the model identification information S1 as described above and recognizing the connected turbo molecular pump model, the control condition is optimally set. As a result, the turbo molecular pump can be operated under optimal control conditions, and the functions of the turbo molecular pump can be maximized.

  FIG. 7A is a diagram illustrating an internal configuration example of the adapter unit 23, and FIG. 7B is a diagram illustrating details of the switching element. In the adapter unit 23, as shown in FIG. 7A, a model identification information setting circuit 70 and a wiring 71 are installed. The wiring 71 supplies a plurality of signal wirings used for transmitting a control signal from the magnetic bearing unit 10 to the controller 40 and from the controller 40 to the magnetic bearing unit 10, and supplies power to the magnetic bearing unit 10 from the controller 40. It is comprised by the some wiring 71-1 to 71-n for relaying the electric power wiring used in order to do. These wirings 71-1 to 71-n are connected to the control cable 30 on the controller 40 side. The model identification information setting circuit 70 includes a passive component switching circuit 74 including a passive electronic component 72 such as a resistor or a capacitance element and a switching element (switch) 73. As shown in FIG. 7B, the switching element 73 can be switched between models A, B, C, D, E, F, and G. By selecting a model, a model corresponding to the model can be selected. A passive electronic component 72 indicating identification information can be selected.

  The passive component switching circuit 74 is connected to the control cable 30 via the wiring 75 and can read the model identification information represented by the passive electronic component 72 selected from the controller 40. As a result, the passive component switching circuit 74 having a simple configuration can easily and accurately set the model identification information of the turbo molecular pump provided with the magnetic bearing unit 10, and the controller 40 reads the set model identification information and And optimal control conditions for the model can be set.

  FIG. 8A is a diagram showing an internal configuration of the adapter unit 23, and FIG. 8B is a diagram showing details of the switching element. In the adapter unit 23, as shown in FIG. 8A, a model identification information setting circuit 70 and a plurality of wires 71 are installed. The model identification information setting circuit 70 includes a switching element (switch) 73, a power supply circuit 76, and a constant current circuit 77. As shown in FIG. 8 (b), the switching element 73 is switched between models A, B, C, D, E, F, and G, and by selecting the model, the constant current of the constant current circuit is changed to the model. The level (current value) indicating the corresponding model identification information can be set.

  The constant current circuit 77 is connected to the control cable 30 via the wiring 75 so that the constant current of the constant current circuit 77 set from the controller 40 can be read. This makes it possible to easily and accurately set the model identification information of the turbo molecular pump provided with the magnetic bearing unit 10 with the constant current circuit 77 and the switching element 73 having a simple configuration, and the controller 40 sets the set model identification information. Reading, recognizing the model, and setting optimum control conditions for the model.

  FIG. 9A is a diagram illustrating an internal configuration of the adapter unit 23, and FIG. 9B is a diagram illustrating details of the switching element. In the adapter unit 23, as shown in FIG. 9A, a model identification information setting circuit 70 and a plurality of wires 71 are installed. The model identification information setting circuit 70 includes a switching element (switch) 73, a power supply circuit 76, a data storage element (ROM) 78, and a signal processing circuit 79. As shown in FIG. 9B, the switching element 73 can be switched between models A, B, C, D, E, F, and G. The data storage element 78 includes the magnetic bearing unit 10 and stores a plurality of data (model data) regarding the model of the turbo molecular pump. By selecting the model with the switching element 73, the corresponding model data can be selected. It is like that. The signal processing circuit 79 is a circuit (communication circuit) that processes selected model data into a signal suitable for transmission to the controller 40.

  The signal processing circuit 79 is connected to the control cable 30 via the wiring 75 and transmits the selected model data to the controller 40. As a result, a model identification information setting circuit 70 having a simple configuration including a data storage element (ROM) 78 storing model data, a switching element 73, and a signal processing circuit 79, and having a magnetic bearing 10 and corresponding to a model of a turbo molecular pump. Thus, the model data can be selected and the model identification information can be set easily and accurately. The controller 40 can receive this model identification information and set the optimum control condition for the model.

  FIG. 10 is a block diagram showing another circuit configuration example of the rotary machine device of FIG. As shown in the figure, the adapter unit 23 is provided with a model identification information setting circuit 70 as model identification information means, and the model identification information S1 set in the model identification information setting circuit 70 is transmitted via a signal injection unit 80. The signal S2 from the rotation sensor unit 53 in the wiring 71 is injected into the wiring 71-n relayed to one wiring (core wire) 30a in the control cable 30. Thus, the signal S2 from the rotation sensor unit 53 and the model identification information S1 are superimposed on the wiring 30a in the control cable 30 and transmitted to the other signal processing circuit 62 of the controller 40. The other signal processing circuit 62 recognizes the model by separating the model identification information S1, and optimally sets the control condition to the recognized model.

  FIG. 11A is a diagram showing an example of the internal configuration of the adapter unit 23, and FIG. 11B is a diagram showing details of the switching element. As shown in FIG. 11A, the adapter unit 23 includes a model identification information setting circuit 70 and a signal injection unit 80. The model identification information setting circuit 70 includes a power supply circuit 76, a switching element (switch) 73, and an oscillation circuit 81. The oscillation circuit 81 generates model identification information S1 having a frequency corresponding to the model set by the switching element 73, and the signal injection unit 80 transmits the model identification information S1 having the frequency to one of the wirings 71 of the wiring 71 by AC coupling. Inject to -n. As shown in FIG. 11 (b), the switching element 73 can be switched between models A, B, C, D, E, and FG. By selecting the model, the oscillation circuit 81 responds accordingly. It generates the model identification information of the specified frequency.

  The oscillation circuit 81 generates a high frequency signal of 100 kHz to 30 MHz, which is higher than a commercial frequency (50 Hz or 60 Hz), and passes a plurality of filter circuits that limit the frequency range of the high frequency signal to a specific range. By using the switching element 73, the model identification signal S1 having a frequency range corresponding to the model of the turbo molecular pump using the magnetic bearing unit 10 is generated. The other signal processing circuit 62 of the controller 40 that has received the model identification number S1 recognizes the model of the magnetic bearing unit 10 of the turbo molecular pump connected from the frequency range of the model identification number S1, and controls the optimum control conditions for the model. Can be set.

  FIG. 12A is a diagram showing an internal configuration of the adapter unit 23, and FIG. 12B is a diagram showing details of the switching element. As shown in FIG. 12A, the adapter unit 23 includes a model identification information setting circuit 70 including a switching element (switch) 73, a power supply circuit 76, and a constant current circuit 77. As shown in FIG. 12B, the switching element 73 selects one of the models A, B, C, D, E, F, and G so that the constant current of the constant current circuit is changed to the corresponding model. The level (current value) indicating the corresponding model identification information can be set.

  The constant current circuit 77 is connected to the control cable 30 via a single wiring 75, and the wiring 71-n is connected to the ground line. As a result, the constant current indicating the model identification information set by the constant current circuit 77 flows to the other signal processing circuit 62 of the controller 40 through the wiring 75 and the wiring 75 through the wiring in the control cable 30. It is possible to recognize the model of the magnetic bearing unit 10 of the turbo molecular pump. In this way, by setting the constant current of the constant current circuit 77 to a predetermined value by the switching element 73, the model identification information of the magnetic bearing unit 10 of the turbo molecular pump can be set. The controller 40 can recognize the model and set optimum control conditions by a constant current indicating the model identification information.

  The magnetic bearing unit 10 can be installed in the direction of installation of the rotating body R, that is, whether it is installed vertically as shown in FIG. 13 (a) or horizontally as shown in FIG. 13 (b). Although designed, it can be controlled more stably by changing the magnetic bearing control characteristics due to the difference in installation direction of the entire turbo molecular pump depending on the weight of the rotating body R and the structural requirements of the magnetic bearing. Is known.

  Therefore, here, as shown in FIG. 14A, the model identification information setting circuit 70 in the adapter unit 23 has a magnetic field in addition to the switching element 73, the power supply circuit 76, the data storage element (ROM) 78, and the signal processing circuit 79. An installation direction detector 82 for detecting the installation direction of the bearing unit 10 is provided. Together with the model data selected from the data storage element 78 by the switching element 73, the installation direction detector 82 detects the installation direction detection signal, and the signal processing circuit 79 processes the other signal processing circuit 62 of the controller 40 (see FIG. 10). Is transmitted to. As a result, the model of the magnetic bearing unit 10 of the turbo molecular pump connected by the controller 40 is recognized, and the installation direction of the magnetic bearing unit 10 is recognized, and the optimum control for the model is performed in consideration of the installation direction. The magnetic bearing portion can be controlled by setting conditions.

  As shown in FIG. 14 (c), the installation direction detector 82 includes a conductive ball 82c that is loosely fitted between a pair of guide cases 82a and 82b installed up and down. When the adapter unit 23 is installed in the horizontal direction (the magnetic bearing portion 10 is in the vertical direction), the electrode 82d and the electrode 82e provided at the center of the guide case 82a and the guide case 82b are interposed via the balls 82c. When the continuity confirmation circuit 82f detects this, it can be detected that the adapter unit 23 is installed in the lateral direction, that is, in the direction orthogonal to the gravity direction Fg. As shown in FIG. 13B, when the adapter unit 23 is installed in the vertical direction (the magnetic bearing portion 10 is in the horizontal direction), the ball 82c is detached from the electrodes 82d and 82e, and the adapter unit 23 is moved in the vertical direction. It can detect that it is installed other than. The installation direction detector 82 may be installed so that the electrode 82d and the electrode 82e are electrically connected by the ball 82c when the magnetic bearing unit 10 is installed in the horizontal direction or the vertical direction.

  FIG. 15A shows an example in which an installation direction changeover switch 83 that can set the installation direction manually is provided in the model identification information setting circuit 70. As shown in FIG. 15B, the installation direction changeover switch 83 can set whether the adapter unit 23 is installed in the vertical direction or the horizontal direction by sliding the operation unit 83a leftward or rightward. It is like that. The signal processing circuit 79 processes the model data in the data storage element (ROM) 78 selected by the switching element 73 and the installation direction data set by the installation direction changeover switch 83 and transmits them to the controller 40.

  FIG. 16A is a diagram illustrating an example of the internal configuration of the adapter unit 23, and FIG. 16B is a diagram illustrating details of the switching element. Here, as shown in FIG. 16A, the model identification information setting circuit 70 is provided with a data storage unit 84 having a ROM and a RAM, a power supply circuit 76, a signal processing circuit 79, and a switching element 73. Data stored in the ROM and RAM of the data storage unit 84 can be read from the controller 40 via the control cable 30, the wiring 75, and the signal processing circuit 79. Information can be written. In addition, a communication circuit 85 is provided separately from the signal processing circuit 79 so that data stored in the data storage unit 84 can be read out by an external signal processing device (not shown) via the communication circuit 85.

  As described above, the upgrade firmware on the controller 40 side can be transmitted from the adapter unit 23, and the control conditions such as various setting information on the controller 40 side are optimized for each model of the magnetic bearing unit 10 of the turbo molecular pump body. It becomes easy. In addition, since the data stored in the data storage unit 84 can be read and processed by the external signal processing device, it can be used for various analysis processes of the turbo molecular pump body including the magnetic bearing unit 10.

  Note that the internal configurations and functions of the adapter units 24 and 25 shown in FIGS. 4 and 5 are also substantially the same as the internal configuration and functions of the adapter unit 23, so that the description thereof is omitted.

  In the above embodiment, the turbo molecular pump that supports the rotating body R as the rotary machine body by the magnetic bearing unit 10 is described as an example. However, the present invention is not limited to the turbo molecular pump. The gas circulation fan 100 of the excimer laser device having the configuration shown in FIG.

  FIG. 17 is a cross-sectional view showing a basic configuration of a gas circulation fan for circulating excimer gas in the excimer laser device. In FIG. 17, the fan 103 is disposed in the chamber 101, and laser gas is sealed in the chamber 101. The magnetic bearing portions that support the rotating shaft 102 of the fan 103 are disposed on both sides of the chamber 101, and on the left side of FIG. 17 are a radial magnetic bearing 106 and an axial shaft each composed of a radial electromagnet 104 and a radial displacement sensor 105. An axial magnetic bearing 110 composed of electromagnets 107 and 108 and an axial displacement sensor 109, a motor 111 composed of a motor rotor 118 and a motor stator 117, and a touch capable of supporting the radial direction and the axial direction to protect the rotating shaft 102. A protective bearing 112 as a down bearing is disposed.

  In addition, on the right side of FIG. 17, a radial magnetic bearing 115 including a radial electromagnet 113 and a radial displacement sensor 114 and a protective bearing 116 that can support only in the radial direction are provided. An insertion port 22 is provided at a predetermined position of the chamber 101, and an adapter unit 23 is provided between the insertion port 22 and a plug 31 connected to one end of the control cable 30. The adapter unit 23 is equipped with a model identifying means that can identify the model of the gas circulation fan 100 including the magnetic bearing portion constituted by the radial magnetic bearing 106, the axial magnetic bearing 110, and the radial magnetic bearing 115. Although not shown, the controller 40 is connected to the other end of the control cable 30 through a plug 32 and an insertion port 41 as in FIG.

  The axial magnetic bearing 110 and the radial magnetic bearings 106 and 115 detect the position of the rotating shaft 102 by the axial displacement sensor 109 and the radial displacement sensors 105 and 114, respectively, and send the position detection signal to the controller 40 via the control cable 30. In the controller 40, each position detection signal is processed by the compensation circuit 61 as described above, the bearing drive power amplifier 63 is amplified, and the radial magnetic bearing 106, the axial magnetic bearing 110, the radial magnetic bearing 110 of the shaft bearing portion of the gas circulation fan 100 are amplified. The bearing 115 is controlled to magnetically support the rotating shaft 102 at a predetermined position. Further, by supplying a drive current to the coil portion of the motor stator 117 from the inverter device 64 of the controller 40, the fan 103 rotates together with the motor rotor 118, and the laser gas in the chamber 101 is agitated. In addition, although illustration is abbreviate | omitted, as an adapter unit, naturally it is good also as adapter units 24 and 25 as shown in FIG. 4, FIG.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Is possible. A rotating machine body that supports a rotating body by magnetic levitation using a magnetic bearing mechanism is provided, and the rotating body can be widely used for rotating machine devices that control by changing control conditions for each type of rotating machine body. It also has a rotating machine body that supports the rotating body with a bearing mechanism, such as a dry vacuum pump such as a screw or roots type, or a fluid machine such as a gas circulation fan, and controls it by changing the control conditions for each model of the rotating machine body. It can also be used for rotating machinery.

It is a figure which shows the structural example which connected the controller to the magnetic bearing part of the turbo-molecular pump as a conventional rotary machine apparatus. It is a block diagram which shows the circuit structure of the magnetic bearing part and controller of a turbo-molecular pump as a conventional rotary machine apparatus. It is a figure which shows the structural example which connected the controller to the magnetic bearing part of the turbo molecular pump as a rotary machine apparatus which concerns on this invention. It is a figure which shows the structural example which connected the controller to the magnetic bearing part of the turbo molecular pump as a rotary machine apparatus which concerns on this invention. It is a figure which shows the structural example which connected the controller to the magnetic bearing part of the turbo molecular pump as a rotary machine apparatus which concerns on this invention. It is a block diagram which shows the circuit structural example of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a block diagram which shows the circuit structural example of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the example of an installation direction of the magnetic bearing part of a turbo-molecular pump as a rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the internal structural example of the adapter unit of the rotary machine apparatus which concerns on this invention. It is a figure which shows the basic composition of the gas circulation fan of an excimer laser apparatus as a rotary machine apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Magnetic bearing part 11 Rotating shaft 12A Radial magnetic bearing target 12B Radial magnetic bearing target 13A Radial displacement detection sensor target 13B Radial displacement detection sensor target 14 Axial magnetic bearing target R Rotating body M Rotating body drive motor 15 Rotor 16A Radial electromagnet 16B Radial electromagnet 17 Axial Electromagnet 18 Stator 19A Radial Displacement Sensor 19B Radial Displacement Sensor 20 Axial Displacement Detection Sensor 21 Casing 22 Insertion Port 23 Adapter Unit 30 Control Cable 31 Plug 32 Plug 40 Controller 41 Insertion Port 51 Position Displacement Sensor Portion 52 Temperature Sensor Portion 53 Rotation sensor section 54 Magnetic bearing electromagnet section 55 Motor drive coil section 61 Compensation circuit 62 Other signal processing circuit 63 Bearing Dynamic power amplifier 64 an inverter device 65 circuit driving power supply 70 model identification information setting circuit 71 wiring 72 Passive electronic components 73 switching element (changeover switch)
74 Passive component switching circuit 75 Wiring 76 Power supply circuit 77 Constant current circuit 78 Data storage element (ROM)
79 Signal Processing Circuit 80 Signal Injection Unit 81 Oscillation Circuit 82 Installation Direction Detector 100 Gas Circulation Fan 101 Chamber 102 Rotating Shaft 103 Fan 104 Radial Electromagnet 105 Radial Displacement Sensor 106 Radial Magnetic Bearing 107 Axial Electromagnet 108 Axial Electromagnet 109 Axial Displacement Sensor 110 Axial Magnetic bearing 111 Motor 112 Protective bearing 113 Radial electromagnet 114 Radial displacement sensor 115 Radial magnetic bearing 116 Protective bearing

Claims (12)

  1. In a method for identifying a machine type of a rotating machine body in a rotating machine apparatus configured to connect a controller adapted to control conditions for each model of the rotating machine body to a rotating machine body that supports a rotating body with a magnetic bearing via a control cable. ,
    Provided with connectors at both ends of the control cable, the rotating machine main body and the controller are each provided with a connector connecting portion for connecting a cable connector, the connector at one end of the cable is connected to the connector connecting portion of the rotating machine main body, Configured to connect the connector at the other end of the cable to the connector connector of the controller,
    An adapter unit is installed between the connector connection part of the rotating machine body and the connector at one end of the control cable, or between the connector connection part of the controller and the connector at the other end of the control cable, and the rotation is performed on the adapter unit. A model identification method for a rotating machine body in a rotating machine apparatus, wherein model identification information capable of identifying a model of a machine body is mounted so that the model identification information can be recognized from the controller side.
  2. In the rotary machine main body model identification method of the rotary machine device according to claim 1,
    The rotary machine main body is a turbo molecular pump or a gas circulation fan that supports a rotary body with a magnetic bearing, and the model identification method of the rotary machine main body in the rotary machine device.
  3. In a rotating machine device configured to connect a controller adapted to control conditions for each model of the rotating machine body via a control cable to the rotating machine body that supports the rotating body with a magnetic bearing ,
    Provided with connectors at both ends of the control cable, the rotating machine main body and the controller are each provided with a connector connecting portion for connecting a cable connector, the connector at one end of the cable is connected to the connector connecting portion of the rotating machine main body, Configured to connect the connector at the other end of the cable to the connector connector of the controller,
    An adapter unit is installed between the connector connection part of the rotating machine body and the connector at one end of the control cable, or between the connector connection part of the controller and the connector at the other end of the control cable, and the rotation is performed on the adapter unit. A rotating machine apparatus, wherein model identification information capable of identifying a model of a machine body is mounted so that the model identification information can be recognized from the controller side.
  4. The rotary machine device according to claim 3 ,
    In the adapter unit, the signal wiring used for controlling the rotating machine main body and the wiring that relays the power wiring used for power supply, and one or more wirings are connected to the connector connecting portion of the controller. Configured to be connected to a cable,
    The model identification information means includes a passive component switching circuit constituted by a passive electronic component such as a resistor or a capacitance element and a switching element, and corresponds to the model identification information of the connected rotating machine body by the manual component switching circuit. A rotary machine device characterized in that a passive electronic component to be switched is set so that the model of the rotary machine body can be recognized from the controller side.
  5. The rotary machine device according to claim 3 ,
    In the adapter unit, the signal wiring used for controlling the rotating machine main body and the wiring that relays the power wiring used for power supply, and one or more wirings are connected to the connector connecting portion of the previous controller. Configured to be connected to a cable,
    The model identification information means includes a constant current circuit that can be set to an arbitrary current value, and a setting means that sets the current value to an arbitrary value, and the rotating machine body to which the constant current value of the constant current circuit is connected A rotary machine apparatus characterized in that the model of the rotary machine body can be recognized from the controller side by setting the current value corresponding to the model identification information.
  6. The rotary machine device according to claim 3 ,
    In the adapter unit, the signal wiring used for controlling the rotating machine main body and the wiring that relays the power wiring used for power supply, and one or more wirings are connected to the connector connecting portion of the previous controller. Configured to be connected to a cable,
    The model identification information means includes a data storage element that stores predetermined data relating to the model of the rotating machine body, a communication circuit, and a data switching means, and the data stored in the data storage element is connected to the data storage element. By switching to the data corresponding to the model identification information of the rotating machine body, the model of the rotating machine body from the controller side by switching to the data corresponding to the model identification information of the rotating machine body from the controller side. It is possible to recognize the rotating machine device.
  7. The rotary machine device according to claim 6 ,
    The data storage element can be written with the operation information supplied from the controller via the communication circuit, and the written operation information can be read from the controller via the communication circuit. Alternatively, by providing a separate communication line, the data stored in the data storage element can be read out by an external signal processing device.
  8. The rotary machine device according to claim 6 ,
    An installation direction detection element for detecting in which direction the installation direction of the adapter unit is with respect to the direction of gravity is provided in the adapter unit, and the installation direction detection signal from the installation direction detection element is the model identification. A rotary machine device that is transmitted to the controller together with a signal so that the model and installation direction of the rotary machine body can be recognized from the controller side.
  9. The rotary machine device according to claim 6 ,
    In the adapter unit, there is provided switching means capable of setting a predetermined output signal by manual operation as to which direction the installation direction of the adapter unit is with respect to the direction of gravity, and the installation set by the manual operation A direction signal is transmitted to the controller together with the model identification signal so that the model and installation direction of the main body of the rotating machine can be identified from the controller.
  10. The rotary machine device according to claim 3 ,
    In the adapter unit, the internal circuit drive power supply unit and the model identification signal of the rotating machine body are superimposed on either the signal wiring used for controlling the rotating machine body or the wiring relaying the power wiring used for power supply. A rotating machine characterized in that a model of the rotating machine body can be recognized from the controller side by superimposing the model identification signal on a wiring that relays the signal wiring or the power wiring. apparatus.
  11. The rotary machine device according to any one of claims 3 to 10 ,
    The rotary machine device according to claim 1, wherein the rotary machine body is a turbo molecular pump or a gas circulation fan that supports the rotary body with a magnetic bearing.
  12. The rotary machine device according to any one of claims 3 to 11 ,
    The controller comprises control condition setting means for recognizing the model recognition information and recognizing the model of the connected rotating machine body, and then setting the control condition to an optimum condition for the recognized rotating machine body. Rotating machinery characterized.
JP2007035425A 2007-02-15 2007-02-15 Model identification method of rotating machine body in rotating machine apparatus, rotating machine apparatus Active JP5065703B2 (en)

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JP2007035425A JP5065703B2 (en) 2007-02-15 2007-02-15 Model identification method of rotating machine body in rotating machine apparatus, rotating machine apparatus
EP07016836A EP1895180A2 (en) 2006-08-30 2007-08-28 Magnetic bearing device, rotating system therewith and method of identification of the model of the main unit in a rotating system
US11/847,665 US7737590B2 (en) 2006-08-30 2007-08-30 Magnetic bearing device, rotating mechanism, and model identification method of rotating machinery main unit

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US9816965B2 (en) 2014-11-14 2017-11-14 General Electric Company Method to detect vibration nodes between a sensor and an actuator in a rotatable component

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JP5549541B2 (en) * 2010-10-28 2014-07-16 ダイキン工業株式会社 Rotor position detection method, motor control method, motor control device, and program
EP3620660A1 (en) * 2019-08-06 2020-03-11 Pfeiffer Vacuum Gmbh Vacuum device

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JP2002021851A (en) * 2000-07-04 2002-01-23 Koyo Seiko Co Ltd Magnetic bearing control device
JP2002339971A (en) * 2001-05-16 2002-11-27 Ebara Corp Magnetic bearing device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9816965B2 (en) 2014-11-14 2017-11-14 General Electric Company Method to detect vibration nodes between a sensor and an actuator in a rotatable component

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