JP5035300B2 - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device Download PDF

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JP5035300B2
JP5035300B2 JP2009142120A JP2009142120A JP5035300B2 JP 5035300 B2 JP5035300 B2 JP 5035300B2 JP 2009142120 A JP2009142120 A JP 2009142120A JP 2009142120 A JP2009142120 A JP 2009142120A JP 5035300 B2 JP5035300 B2 JP 5035300B2
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trench
etching
protective film
film forming
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JP2010287823A (en
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淳士 大原
竹内  幸裕
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株式会社デンソー
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  The present invention relates to a method for manufacturing a semiconductor device in which trenches having different widths are formed at the same depth.

  When the trench is formed by the dry etching technique, the etching rate depends on the mask opening width. This dependency is called “microloading effect” or “RIE-Lag”, and makes it difficult to make the trench depth the same when simultaneously forming trenches having different widths. FIG. 9 is a graph showing the relationship of the trench depth with respect to the mask opening width when the trench is formed by dry etching under a certain condition. As shown in this figure, when the mask opening width is increased to some extent, the trench depth approaches a constant value. However, when the mask opening width is small, the trench depth becomes shallower as the mask opening width decreases. For this reason, as shown in the sectional view when the trenches A and B are formed with different mask opening widths shown in FIG. 10, the depths of the trenches A and B are different. For this reason, for example, by using an expensive substrate on which a buried oxide film is formed, such as an SOI (Silicon on insulator) substrate, each trench is formed up to the buried oxide film, so that the mask opening width is increased. Even if they are different, the trenches have the same depth.

JP 2002-158214 A

  However, it is desired that trenches having different widths can be controlled to the same depth without using an expensive semiconductor substrate such as an SOI substrate, for example, even when a general silicon substrate is used. Even if an SOI substrate is used, it is also desired that trenches having different widths can be controlled to the same depth at shallow positions that do not reach the buried oxide film.

  SUMMARY OF THE INVENTION In view of the above, an object of the present invention is to provide a method for manufacturing a semiconductor device in which trenches having different widths can be controlled to the same depth.

  In order to achieve the above object, the present inventors have studied an etching technique (hereinafter referred to as Si deep etching technique) in forming a deep trench in a silicon substrate.

  First, a general Si deep etching technique will be outlined with reference to FIGS. FIG. 11 is a schematic cross-sectional view of the dry etching apparatus 1 used in the trench formation process. As shown in this figure, the dry etching apparatus 1 has a configuration including a vacuum chamber 4 provided with a pedestal 3 on which a silicon substrate 2 is installed, a vacuum pump 5, and a pressure adjustment valve 6.

A plurality of gas introduction holes 7 (7 a to 7 c) are provided so that two or more systems of gas can be introduced into the vacuum chamber 4. In the present embodiment, a structure provided with three gas introduction holes 7a to 7c so that an etching gas, a gas for forming a protective film during trench formation, and an inert gas are independently introduced into the vacuum chamber 4. It is said that. SF 6 gas is used as an etching gas, C 4 F 8 gas forming a polymer protective film is used as a protective film forming gas, and Ar gas is used as an inert gas.

  The vacuum pump 5 vacuums the gas in the vacuum chamber 4 to control the inside of the vacuum chamber 4 to a desired pressure. The pressure adjustment valve 6 controls the amount of gas sucked by the vacuum pump 5, and the pressure in the vacuum pump 5 can be adjusted by adjusting the pressure adjustment valve 6.

  Further, the dry etching apparatus 1 includes an RF power source 8 for generating plasma and an RF power source 9 for bias. RF can be applied to the vacuum chamber 4 from the RF power source 8 for generating plasma, and RF can be applied to the silicon substrate 2 installed on the pedestal 3 via a capacitor (not shown) from the RF power source 9 for bias. It is configured.

  In the dry etching apparatus 1 having such a configuration, when RF is applied from the outside of the vacuum chamber 4 by the RF power source 8 for plasma generation after setting the gas pressure to an appropriate value using the vacuum pump 5 and the pressure adjusting valve 6, The introduced gas is turned into plasma in the vacuum chamber 4 to generate plasma. Further, when RF is applied to the silicon substrate 2 via a capacitor by the bias RF power source 9 during plasma generation, an accelerating electric field for ions in the plasma is generated between the plasma and the silicon substrate 2, and the silicon substrate 2 So that it can be incident almost perpendicularly.

  Then, when a protective film forming gas is introduced to generate plasma, a polymer protective film can be formed on the bottom and side surfaces of the trench. Further, when an etching gas is introduced while RF is applied to the silicon substrate 2 by the RF power source 9 for bias, the polymer-based protective film can be removed from the bottom surface of the trench and the bottom surface of the trench can be etched further deeply. At this time, since ions in the plasma are incident substantially perpendicular to the silicon substrate 2, the trench is dug in a direction perpendicular to the surface according to the mask shape.

  FIG. 12 is a timing chart showing the gas flow rate, the application state of RF for plasma generation, and the application state of RF for bias. As shown in this figure, a protective film forming gas and an etching gas are alternately introduced repeatedly, and a polymer protective film is deposited as the protective film 10 (hereinafter referred to as a protective film forming step) and dry etching. A step of deepening the trench slightly (hereinafter referred to as an etching step) is repeated.

The execution times of these steps are T D and T E, and one cycle is extracted as shown in FIG. In FIG. 13, the upper graph shows the film thickness of the protective film 10 deposited on the bottom surface of the trench 20, and the lower graph shows the etching depth from the bottom surface of the trench 10.

At the end of the protective film formation step, a polymer-based protective film having a thickness t 0 is formed as the protective film 10 on the bottom surface. In the subsequent etching step, first, after the elapse of time t, a portion of the protective film 10 formed on the bottom surface of the trench 20 is removed by the sputtering effect of incident ions during etching to expose the Si surface. Thereafter, etching of Si starts. If the etching rate proceeding in the depth direction at this time is R, the etching amount δd at the end of the etching step is δd = R · (T E −t).

  Next, the case of simultaneously etching two trenches A and B having different opening widths will be described with reference to FIGS.

FIG. 14 is a cross-sectional view showing the states of the trenches A and B in the protective film forming step and the etching step. FIG. 15 is a timing chart showing the thickness of the protective film 10 made of a polymer protective film deposited on the bottom surfaces of the trenches A and B and the etching depth from the bottom surface in the protective film forming step and the etching step. In Figure 15, the period during the implementation of time T D is a protective film forming step, the time T E is the period during performance of the etching step. As shown in FIG. 14, assuming that the opening widths of the two trenches A and B are W a , W b and W a <W b, and the depth between the trenches A and B is initially equal, Details of the steps will be described.

First, as shown in FIG. 14A, when the protective film forming step is performed in the state where the trenches A and B having the opening widths W a and W b are formed using the desired mask 11, each trench is formed. A polymer protective film is formed on the bottom surfaces of A and B. However, since the deposition species enter the silicon substrate 2 from a random direction regardless of the electric field between the plasma and the silicon substrate 2 in the deposition process, more deposition species reach the bottom of the trench B having a wider opening. . For this reason, as shown in FIG. 14B, the film thickness of the polymer-based protective film deposited on the bottom surface of the trench is larger in the trench B than in the trench A.

Thereafter, the polymer-based protective film is removed by the sputtering action of ions at the beginning of the etching step, but the incident ions at this time are incident on the silicon substrate 2 almost perpendicularly, so the incident density does not depend on the opening width, The rate of removal is almost the same in trenches A and B. For this reason, the removal times t a and t b required to remove the polymer protective film from the bottom surfaces of the trenches A and B are t a <t b , and the polymer as shown in FIG. Even if the system protective film is removed from the bottom surface of the trench A, the bottom surface of the trench B still remains. Accordingly, the Si etching from the bottom surface starts in the trench A before the trench B, and the Si etching from the bottom surface also starts in the trench B after a while.

At this time, since both electrically neutral etching species (radicals) and ions are involved in the etching of Si, the etching rate increases as the opening width increases. Therefore, the Si etching rates R a and R b of the trenches A and B respectively satisfy R a <R b . In other words, although the start it is a Si etching trenches B delayed, then the rate for early compared to trench A, usually a etching depth δd a <δd b as shown in FIGS. 14 and 15.

Here, the etching depth .delta.d a, .delta.d b is to be computed by multiplying the etching time for the etching rate, δd a = R a · ( T E -t a), · δd b = R b (T E −t b ).

However, the time setting of T E, since the process specific circumstances is irrelevant, if here and t 0 the time from the etching step starts until δd a = δd b, t a <T E <t 0 range by setting the T E δd a> δd b next, towards trench a is the amount of etching increases (hereinafter, the etching amount of the bottom surface than the trench B it is wide in this way narrow trench a A state in which there is a large amount of etching is referred to as a reverse cycle, and conversely, a state in which trench B has more bottom etching than trench A is referred to as a normal cycle.

However, when T E is set in the range of t a <T E <t 0 in this way, the polymer-based protective film is not sufficiently removed. May remain locally. If etching is continued with such a setting, a polymer protective film accumulates, for example, deposits near the entrance of the trench to close the opening, or what remains on the bottom becomes a micromask. As shown in FIG. 16, a conical Si etching residue is formed.

Therefore, in the first aspect of the invention, in the trench formation step, the introduced gas is turned into plasma in the vacuum chamber (4), and the protective film (10) is formed on the side walls and the bottom surface of the first and second trenches (A, B). The protective film forming step is performed by superimposing a plurality of different protective films while switching the introduced gas, and the protective film is formed on the bottom surfaces of the first and second trenches (A, B). This is performed while repeating the etching step of removing the portion to expose the silicon layer and deepening the first and second trenches (A, B) by etching. In such a method of manufacturing a semiconductor device, in the trench formation step, as the protective film formation step, plasma is formed while introducing a gas containing oxygen as one of a plurality of types of gases, and O 2 plasma irradiation is performed. The oxide film forming step for forming the oxide film (10a) in the second trench (A, B), and the plasma is formed while introducing a gas for forming a polymer protective film as one of a plurality of types of gases, and deposited. Thus, the polymer protective film forming step for forming the polymer protective film (10b) in the first and second trenches (A, B) is performed, and the polymer protective film forming step and the etching step are performed as one cycle. After the film formation step is performed once, the cycle of repeating the polymer protective film formation step and the etching step is performed N cycles (N ≧ 1) .Delta.d a etching amount from the bottom of the first trench (A) carried out during the N cycles, when the etching amount from the bottom surface of the second trench (B) and .delta.d b, the range to be δd a ≧ δd b By performing etching while setting the etching step time T E , the narrow first trench (A) includes a reverse cycle in which the etching amount of the bottom surface is larger than that of the wide second trench (B). It is characterized by that.

As described above, when the protective film forming step and the etching step are repeated, the protective film forming step is divided into an oxide film forming step and a polymer-based protective film forming step, and remains by O 2 plasma irradiation in the oxide film forming step. The polymer protective film (10b) can be removed. For this reason, even if the polymer-based protective film (10b) remains, the remaining polymer-based protective film (10b) can be removed by O 2 plasma irradiation in the next oxide film forming step. Thereafter, an oxide film is formed. The In the etching step, the etching of Si after removing the protective film of these two layers will start, and the etching amount per one step is decreased, and shorten the time T E substantially etch step The same effect as the above, and the etching amount between the two trenches (A, B) can be easily aligned. On the other hand, the remaining polymer film since no shorter T E does not occur. Although the time from the removal of the underlying oxide film to the end of the etching step is shortened, the oxide film formed by plasma oxidation is very thin and reattachment after removal is less likely to occur. As such, it has the property of hardly remaining. Therefore, it can be suppressed that the polymer-based protective film (10b) remains and etching residue occurs.

  Therefore, in the method of manufacturing a semiconductor device in which the trench forming step is performed, the first and second trenches (A, B) having different opening widths can be controlled to the same depth with respect to the same semiconductor substrate (2).

For example, as described in claim 2, in the trench formation process, the time required for removing the portions on the bottom surfaces of the first and second trenches (A, B) in the oxide film (10a) by the etching step is set. T aox, T box, first of polymeric protective layer (10b), the second trenches (a, B) the bottom surface on the portion of the time T Apoly applied to remove by etch step, T bpoly, etching step The etching rate from the bottom surface of the first and second trenches (A, B) by R a and R b is the time T E of the etching step and the number of cycles N for performing the polymer protective film forming step and the etching step, R if set within a range which becomes a · {N (T E -T apoly) -T aox} ≧ R b · {N (T E -T bpoly) -T box}, it can be reversed cycles

  According to a third aspect of the present invention, in the trench formation step, the oxide film (10a) remains on the bottom surfaces of the first and second trenches (A, B) until the (N-1) th cycle, and the Nth cycle 1. The oxide film (10a) is removed from the bottom surface of the first and second trenches (A, B), and etching is performed from the bottom surface of the first and second trenches (A, B).

  In this way, if the oxide film (10a) is not removed and removed before the Nth cycle, and the oxide film (10a) is completely removed at the Nth cycle, the polymer system protection corresponds to the number of cycles. Since the difference in the removal time of the polymer protective film (10b) according to the film thickness difference of the film (10b) can be increased, an effect that the difference in etching amount in the reverse cycle can be increased can be obtained.

According to a fourth aspect of the present invention, in the trench forming process, after the polymer-based protective film forming step is performed, the protective film forming step is performed by simultaneously introducing the oxygen-containing gas and the etching gas into the vacuum chamber (4). perform oxide film formation step and the etching step of simultaneously, .delta.d a etching amount from the bottom of the first trench (a), when the etching amount from the bottom surface of the second trench (B) and δd b, δd a ≧ .delta.d b and within range of set time T E of the etching step is characterized by including a reverse cycle to be etched.

  Thus, after performing the polymer-based protective film forming step, the oxide film forming step and the etching step can be performed simultaneously. As a result, it is possible to simultaneously perform formation of the protective film of the oxide film and Si etching of the bottom surface while removing the polymer-based protective film (10b) remaining on the bottom surfaces of the first and second trenches (A, B). Therefore, the number of steps can be reduced and the throughput can be further improved.

According to a fifth aspect of the present invention, in the trench forming step, the polymer protective film in the protective film forming step is introduced by simultaneously introducing the gas for forming the polymer protective film and the etching gas into the vacuum chamber (4). After performing forming and etching steps simultaneously, oxidation film formation step, .delta.d a etching amount from the bottom of the first trench (a), and .delta.d b etching amount from the second bottom surface of the trench (B) then, it is characterized in that it comprises a reverse cycle to perform etching by setting δd a ≧ δd b scope within the time T E of the etching step.

  In this way, the oxide film forming step can be performed after the polymer protective film forming step and the etching step are simultaneously performed. Thus, after the formation of the polymer protective film (10b) and the Si etching of the bottom surface are simultaneously performed, the polymer film remaining on the bottom surfaces of the first and second trenches (A, B) is removed and replaced with the oxide film. Can do. For this reason, the number of steps can be reduced, and the throughput can be further improved.

According to the sixth aspect of the present invention, in the trench formation process, a combination of sequentially performing the polymer protective film forming step and the etching step and then sequentially performing the oxide film forming step and the etching step is defined as one cycle, and this cycle is repeated. performed, and .delta.d a one time of the etching step the etching amount of the total from the bottom surface of the first trench in the second time etching step carried out after oxide film formation step (a) carried out after the polymer-based protective film forming step If the etching amount of the total from the second bottom surface of the trench (B) and .delta.d b while the δd a ≧ δd b become within first time and the second time etch step time T E 1, T E 2 It is characterized by including a reversal cycle in which etching is performed by setting.

  In this way, the oxide film forming step can be performed after repeating the reverse rotation cycle and the normal cycle once or a plurality of times. In this way, the etching time can be increased in the normal cycle, so that the etching amount can be increased. Therefore, it is possible to shorten the time required for etching to a desired depth.

  In the invention according to claim 7, the trench forming step includes a normal cycle in which the etching amount from the bottom surface of the second trench (B) is larger than the etching amount from the bottom surface of the first trench (A), And the reverse cycle, the first and second trenches (A, B) are aligned at a predetermined depth.

  Thus, the first and second trenches (A, B) can be aligned at a predetermined depth by combining the normal cycle and the reverse cycle. For example, if the first and second trenches (A, B) are dug using a normal Si deep etching technique, the first trench (B) is more likely to be dug in a normal cycle. Deeper than. Therefore, even if only the reverse rotation cycle is repeated thereafter, the depths of both trenches (A, B) can be finally made uniform.

In the trench forming process, the polymer protective film forming step and the etching step are sequentially performed. In the etching step, the etching amount from the bottom surface of the first trench (A) is set to δd a , and the second trench ( If the etching amount from the bottom surface of the B) and .delta.d b, becomes the reverse cycle for etching by setting the time T E 1 in the etching step to the extent that the δd a ≧ δd b, and δd a <δd b range in set time T E 2 in the etching step as one cycle to perform a normal cycle for etching in this order, the etching step in reversing cycles and normal cycles within which the δd a ≧ δd b as a total of the cycle deeds time T E 1, 1 times the cycle set to T E 2 or more times, then the oxide film formed stearyl It is characterized by performing a flop.

  In this way, the oxide film forming step can be performed after repeating the reverse rotation cycle and the normal cycle once or a plurality of times. In this way, the etching time can be increased in the normal cycle, so that the etching amount can be increased. Therefore, it is possible to shorten the time required for etching to a desired depth.

For example, as described in claim 9, a material that is decomposed and removed by the O 2 plasma generated in the oxide film forming step is used as the polymer protective film (10b) formed in the polymer protective film forming step. Can do. In the polymer protective film forming step, a gas containing C 4 F 8 can be used as the polymer protective film forming gas. Further, as described in claim 11, in the etching step, a gas containing SF 6 can be used as an etching gas.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

It is a cross-sectional schematic diagram of the dry etching apparatus 1 used for the trench formation process of the manufacturing method of the semiconductor device concerning 1st Embodiment of this invention. It is sectional drawing which showed the mode of each trench A and B in a protective film formation step and an etching step. It is a timing chart showing the thickness and the etching depth from the bottom surface of the SiO 2 film 10a and the polymer-based protective film 10b deposited on the bottom surfaces of the trenches A and B in the protective film forming step and the etching step. (A) is a sectional view when a trench A by etching after forming the polymeric protective layer 10b, (b) the depth D of the trench A versus time T E from the start of the etching step It is the graph which showed the relationship. FIG. 10 is a timing chart when two deposition / etching cycles are inserted into one oxide film forming step as shown in the second embodiment of the present invention. It is a timing chart which showed the thickness of the polymer type protective film 10b deposited on the bottom face of each trench A, B at the time of implementing the manufacturing method of 5th Embodiment of this invention, and the etching depth from a bottom face. It is a timing chart which showed the thickness of the polymer type protective film 10b deposited on the bottom face of each trench A, B at the time of implementing the manufacturing method of 6th Embodiment of this invention, and the etching depth from a bottom face. It is sectional drawing at the time of repeating a reverse rotation cycle and a normal cycle. It is the graph which showed the relationship of the trench depth with respect to the mask opening width at the time of forming a trench by dry etching on fixed conditions. It is sectional drawing when trenches A and B are formed with different mask opening widths. It is a cross-sectional schematic diagram of the dry etching apparatus 1 used for a trench formation process. 4 is a timing chart showing a gas flow rate, an application state of RF for plasma generation, and an application state of RF for bias. In the case where the protective film forming step and the etching step are repeatedly performed, the execution time of each step is T E and T D, and is a timing chart when one cycle is extracted. It is sectional drawing which showed the mode of each trench A and B in a protective film formation step and an etching step. It is the timing chart which showed the thickness of the protective film 10 which consists of a polymer type protective film deposited on the bottom face of each trench A and B in the protective film formation step and the etching step, and the etching depth from the bottom face. It is sectional drawing which showed the etching remainder of Si resulting from the residual of a polymer type protective film.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals in the drawings.

(First embodiment)
A first embodiment of the present invention will be described. FIG. 1 is a schematic cross-sectional view of a dry etching apparatus 1 used in a trench formation step in the method for manufacturing a semiconductor device according to the present embodiment.

The dry etching apparatus 1 of the present embodiment has basically the same structure as that shown in FIG. 11 described above, but is provided with a gas introduction hole 7d. Specifically, in the present embodiment, four gas introduction holes 7a are provided so that the etching gas, two types of protective film forming gas at the time of trench formation, and an inert gas are independently introduced into the vacuum chamber 4. To 7d. As an etching gas, for example, a gas containing SF 6, and as a protective film forming gas, for example, a gas containing a polymer protective film such as a gas containing C 4 F 8 and a gas containing oxygen forming a SiO 2 film ( hereinafter referred to O 2 gas), as the inert gas, for example, using such as Ar gas. Other structures are the same as those in FIG.

  Using this dry etching apparatus 1, a trench formation process in the manufacturing process of the semiconductor device is performed, and trenches (first and second trenches) A and B having different widths with the same depth are formed on the same silicon substrate 2. Form. The widths of the trenches A and B are defined by the mask opening width, and the trench A is a first width and the trench B is a second width wider than the first width.

  First, prior to describing the details of the trench forming process of the present embodiment by the dry etching apparatus 1, the concept of forming trenches having two different opening widths at the same depth will be described.

As described above, as t 0 the time from the etching step starts until δd a = δd b, by setting the time T E of the etching step so that T E ≦ t 0, trench A, etching of B depth .delta.d a, the relationship .delta.d b becomes δd a ≧ δd b. That is, the amount of etching increases in the trench A. In this case, it is important not to produce an etching residue of conical Si due to the remaining of the polymer protective film. If the polymer protective film does not remain, the etching residue can be suppressed.

Therefore, in the present embodiment, the protective film has a two-layer structure including a SiO 2 film in addition to the polymer-based protective film, and the top of the trench becomes an SiO 2 film (oxide film). Even if the time T E is shortened, the polymer protective film is made difficult to remain. Further, the time T E is shortened, and a reverse cycle is provided by using a time difference between timings at which the bottom surfaces of the narrow trench A and the wide trench B are exposed by removing the SiO 2 film (hereinafter referred to as exposure timing). . Then, the etching amount is controlled so that the depths of the trenches A and B are equal to each other at a desired depth by repeatedly performing the reverse rotation cycle or combining with the normal cycle as necessary. Specifically, the etching process is performed as follows.

FIG. 2 is a cross-sectional view showing the states of the trenches A and B in the protective film forming step and the etching step when the protective film 10 has a two-layer structure of the SiO 2 film 10a and the polymer-based protective film 10b as described above. It is. FIG. 3 is a timing chart showing the thickness and the etching depth from the bottom surface of the SiO 2 film 10a and the polymer-based protective film 10b deposited on the bottom surfaces of the trenches A and B in the protective film forming step and the etching step. 2A to 2D show cross-sectional states at time points T1, T2, T3, and T4 in FIG. 3, respectively.

First, as shown in FIG. 2A, etching is performed on the silicon substrate 2 using a mask 11 having a surface formed of an oxide film or the like and provided with openings of widths W a and W b , thereby opening the opening width. W a and W b trenches A and B are formed. First, in that state, a protective film forming step is performed. In the present embodiment (time T1 in FIG. 3), as the protective film forming step, an oxide film forming step and a polymer-based protective film forming step are sequentially performed.

  Specifically, when an RF gas is applied from the outside of the vacuum chamber 4 by the RF power source 8 for generating plasma after the vacuum pump 5 and the pressure adjusting valve 6 are used to set an appropriate gas pressure, the introduced gas is changed. Plasma is generated in the vacuum chamber 4 to generate plasma.

Then, as an oxide film forming step, when O 2 gas is introduced when plasma is generated, O 2 is turned into plasma, and O 2 plasma is irradiated to the trenches A and B. If this is continued for time Tox, as shown in FIG. 2B, the SiO 2 film 10a having a predetermined film thickness can be formed on the bottom and side surfaces of the trenches A and B (time T2 in FIG. 3). Note that mixing Ar with O 2 has an effect of promoting the formation of an oxide film, and therefore Ar may be mixed with O 2 as an introduction gas. The formation of the SiO 2 film 10a has the following characteristics.

(1) Even if the polymer-based protective film 10b remains, it can be decomposed and removed by O 2 plasma, and the SiO 2 film 10a can be formed on the surface where the polymer-based protective film 10b does not remain. it can.

(2) The SiO 2 film 10a is relatively more resistant to etching than the polymer-based protective film 10b.

(3) Since the film thickness of the SiO 2 film 10a is saturated for a sufficient irradiation time, it is constant regardless of the trench opening width.

(4) The absolute film thickness of the SiO 2 film 10a is thinner than that of the polymer-based protective film 10b, and is less likely to remain than the polymer-based protective film 10b when removed by sputtering.

Therefore, even if the polymer-based protective film 10b remains locally in the previous step, the thin SiO 2 film 10a of about several nm (for example, 5 nm) can be formed after removing it. Then, the SiO 2 film 10a can be formed on the bottom surfaces of the trenches A and B with the same film thickness.

Subsequently, as a polymer-based protective film forming step, when C 4 F 8 gas is introduced at the time of plasma generation, the polymer-based protective film 10b can be formed on the bottom and side surfaces of the trenches A and B. At this time, in the deposition process, the deposition species enter the silicon substrate 2 from a random direction regardless of the electric field between the plasma and the silicon substrate 2, so that a larger number of deposition species reach the bottom surface in the trench B having a wider opening. To do. For this reason, as shown in FIG. 2C, the film thickness of the polymer protective film 10b deposited on the bottom surface of the trench is larger in the trench B than in the trench A (time T3 in FIG. 3). The film thickness of the polymer protective film 10b at this time is arbitrary, but if it is too thin, a sufficient film thickness difference cannot be secured between the trenches A and B, and if it is too thick, it tends to remain in the etching step. For this reason, it is preferable to set the film thickness of the polymer-based protective film 10b in consideration of both of these. For example, it is preferable that the film thickness on the bottom surface of the trench A be about 20 nm or less.

Thereafter, when an etching gas is introduced while RF is applied to the silicon substrate 2 by the RF power source 9 for bias, the polymer-based protective film 10b and the SiO 2 film 10a are removed from the bottom surfaces of the trenches A and B. The bottom surfaces of the trenches A and B can be etched further deeply. At this time, since ions in the plasma are incident substantially perpendicular to the silicon substrate 2, the trenches A and B are dug in a direction perpendicular to the surface according to the mask shape.

Since the polymer protective film 10b formed on the bottom surface of the trench A is thinner than that formed on the bottom surface of the trench B, the polymer protective film 10b on the bottom surface of the trench A is first. Removed. Further, since the film thickness of the SiO 2 film 10a formed on the bottom surface of the trench A and the bottom surface of the trench B is constant, as shown in FIG. The two films 10a are also removed (time T4 in FIG. 3). For this reason, the etching proceeds in the trench A earlier than the trench B.

Here, as shown in FIG. 3, the times when the polymer-based protective film 10b and the SiO 2 film 10a on the bottom surface of the trench A are removed are T apoly and T aox , respectively. In addition, the time for removing the polymer protective film 10b and the SiO 2 film 10a on the bottom surface of the trench B is defined as T bpoly and T box , respectively. Based on these, the Si etching times T E a and T E b of the trenches A and B, respectively, the time taken from the etching step time T E to the removal of the polymer protective film 10b and the SiO 2 film 10a. Since it is sufficient to subtract, it is expressed as follows.

(Equation 1)
T E a = T E −T apoly −T aox
T E b = T E −T bpoly −T box
Since T apoly <Tbpoy and T aox ≈T box , T E a> T E b.

On the other hand, trench A, B each Si etching rate is larger in the rate R b of the wide trench B than the rate R a for narrow trench A (R a> R b). Therefore, both trench A from the etching step starts, Si etching amount .delta.d a in B, and compared to the time t 0 until .delta.d b is δd a = δd b, A shorter time T E of the etching step The reverse cycle is such that the trench A can be deeper than the trench B.

  Therefore, it is possible to repeatedly execute such a reverse cycle a plurality of times or to make the trenches A and B have the same depth at a desired depth by a combination of the normal cycle and the reverse cycle. When only the reverse cycle is repeated, theoretically, the trench A always becomes deeper than the trench B, but actually, the deeper the trenches A and B, the narrower the etching rate of the trench A becomes. May decrease. For this reason, even if only the reverse rotation cycle is repeated, the depths of both trenches A and B may eventually be made uniform. Further, when the trenches A and B are dug by a normal Si deep etching technique, the trenches B are deeper than the trench A because they are dug in a normal cycle. Therefore, even if only the reverse rotation cycle is repeated thereafter, the depths of both trenches A and B can be finally made uniform.

The times T apoly and T bpoly are experimentally performed in advance by performing a polymer protective film forming step in which the formation conditions of the polymer protective film 10b are fixed in advance on the trenches A and B until the silicon surface is exposed. It can be obtained by measuring the time. The times T aox and T box can also be obtained by measuring the time until the silicon surface is exposed after performing the oxide film forming step in which the O 2 plasma irradiation conditions are fixed. Further, the Si etching rates R a and R b in the trenches A and B can be obtained in advance by experiments. Therefore, based on the experimental results, it is possible to set the film thickness of the polymer-based protective film 10b, the Si etching times T E a, T E b, etc. so that the reverse cycle can be performed.

For example, the time T apoly and the etching rate R a can be obtained as follows. This will be described with reference to FIG.

FIG. 4 illustrates a method for calculating the relationship between Tapoly and the etching rate Ra, and FIG. 4A is a cross-sectional view when the trench A is formed by etching after forming the polymer-based protective film 10b. b) is a graph showing the relationship between the depth D of the trench a versus time T E from the start of the etching step.

When the time T D of the polymer protective film forming step is fixed and the relationship of the depth D of the trench A is plotted with the time T E of the etching step as a variable, the etching rate Ra is the slope of the straight line It becomes. In addition, the time Tapoly taken until the Si etching is started on the bottom surface of the trench A becomes an intercept. The Si etching time T E a is a time obtained by subtracting the time Ta poly from the time T E after the etching step is started. For this reason, the depth D of the trench A is expressed by the following equation when the N cycle protective film forming step and the etching step are performed.

(Equation 2)
D = N · R a · T E a (= N · R a · (T E −T apoly ))
Therefore, advance fixed time T D of the polymer-based protective film forming step, experimentally the polymeric protective film forming and etching steps repeated N times, to chart the depth of the trench A. Thus, it is possible to obtain an etching rate R a from the slope of the graph, it is possible to determine the time T Apoly from the intersection of the X axis.

The time T bpoly and the etching rate R b can also be obtained by the same method as described above. The time T aox, for even T box, using the same technique as described above, by performing an oxide film forming step, instead of the polymer-based protective film forming step, can be obtained.

In the reverse cycle, the time for removing the SiO 2 film 10a is shortened. However, as described above, the SiO 2 film 10a formed by O 2 plasma is very thin and is easily removed by sputtering and hardly remains. Therefore, the conical etching residue as shown in FIG. 16 hardly occurs when the SiO 2 film 10a remains.

As described above, when the protective film forming step and the etching step are repeated, the protective film forming step is divided into an oxide film forming step and a polymer protective film forming step, and the previous cycle is performed by O 2 plasma irradiation in the oxide film forming step. The remaining polymer protective film can be removed. For this reason, even if the polymer-based protective film remains, the remaining polymer-based protective film can be removed by O 2 plasma irradiation in the next oxide film forming step. Therefore, it can be suppressed that the polymer-based protective film remains and etching residue occurs.

  Therefore, in the semiconductor device manufacturing method in which the trench forming step is performed, the trenches A and B having different opening widths can be controlled to the same depth with respect to the same silicon substrate 2.

In the present embodiment, the SiO 2 film 10a is formed on the bottom surfaces of the trenches A and B, and the polymer-based protective film 10b is formed thereon. For this reason, when the bottom surfaces of the trenches A and B are dug by etching, it can be suppressed that the polymer-based protective film 10b remains and etching residue occurs. Thereby, the trenches A and B having different opening widths can have the same depth.

(Second Embodiment)
A second embodiment of the present invention will be described. In the present embodiment, the method of the protective film formation step is changed with respect to the first embodiment, and the other parts are the same as those in the first embodiment. Therefore, only the parts different from the first embodiment will be described. .

  In this embodiment, when the protective film forming step and the etching step are repeated, the oxide film forming step in each protective film forming step is performed only once every plural times. That is, once the oxide film forming step is performed, the polymer protective film forming step and the etching step cycle (hereinafter referred to as a deposition / etching cycle) are performed for N cycles (N ≧ 2) or more, and then the oxide film forming step is performed again. A protective film forming step is performed.

Then, the time T E and the number of cycles of the etching step to the extent that etching amount .delta.d b is δd a ≧ δd b from the bottom surface of the etching amount .delta.d a trench B from the bottom of the trench A performed during the N cycles N is set so that a reverse rotation cycle is set. That is, this condition may be set within a range where the number of cycles N and T E satisfy the following expression.

(Equation 3)
R a · {N (T E −T apoly ) −T aox } ≧ R b · {N (T E −T bpoly ) −T box }
As described above, even if a plurality of deposition / etching cycles are inserted into one oxide film forming step, the polymer protective film remaining in the deposition / etching cycle is replaced with O 2 plasma in the oxide film forming step. Can be removed by irradiation. In this way, it is possible to improve throughput by reducing the number of oxide film forming steps.

Further, when a plurality of deposition / etching cycles are inserted into one oxide film forming step, the SiO 2 film 10a is removed and cut off during the repetition of the deposition / etching cycle up to (N−1) times. If it remains, the time until the etching amounts of the two trenches are aligned (δd a = δd b ) in the reverse cycle can be lengthened. This will be described with reference to FIG.

FIG. 5 is a timing chart when two deposition / etching cycles are inserted in one oxide film formation step. In this figure, the thickness of the SiO 2 film 10a and the polymer-based protective film 10b deposited on the bottom surfaces of the trenches A and B in the protective film forming step and the etching step and the etching depth from the bottom surface are shown.

As shown in FIG. 5, in the first protective film formation step, an oxide film formation step and a polymer protective film formation step are performed. Then, the polymer-based protective film 10b and the SiO 2 film 10a are removed by the etching step, but the second protective film forming step is performed again before the SiO 2 film 10a is completely removed. At this time, only the polymer-based protective film forming step is performed, and the oxide film forming step is not performed. Then, a second etching step is performed to remove the polymer-based protective film 10b and the SiO 2 film 10a, and the SiO 2 film 10a is completely removed so that Si etching is performed. In this case, since the polymer protective film 10b is formed twice, the time difference δt required for removing the polymer protective film 10b on the bottom surfaces of the trenches A and B until the Si surface is exposed. Is doubled 2 · δt. Accordingly, it is possible to lengthen the time until the etching amounts of the two trenches are equal (δd a = δd b ) in the reverse cycle. As the trenches become deeper, the etching rates R a and R b both decrease due to physical circumstances such as increased scattering of incident ions, so that the length of time for which the etching amount is equal can be extended to make the depths even in deeper trenches. Means that.

  Thus, if the time of the reverse rotation cycle can be increased, the trench A can be further dug deeper. Further, by repeating the protective film forming step and the etching step twice, the time of the reverse rotation cycle can be doubled as compared with the case of one time, but the oxide film forming step of the protective film forming step can be omitted, so It is possible to simplify the process and improve the throughput.

In FIG. 5, the case where the number N of deposition / etching cycles performed for one oxide film formation step is taken as an example, but the number of cycles N may be larger than that. In this case, (N-1) to cycle is in that cut SiO 2 film 10a is removed, if so SiO 2 film 10a is as possible be removed by the N-th cycle, longer more reverse cycle time The effect that it is possible can be obtained.

(Third embodiment)
A third embodiment of the present invention will be described. The present embodiment is different from the first embodiment in the method of forming the protective film and the etching step, and the other parts are the same as those in the first embodiment, and therefore, different parts from the first embodiment. Only explained.

  In the first embodiment, the example in which the oxide film forming step, the polymer protective film forming step, and the etching step are cyclically repeated by switching the introduced gas is shown. On the other hand, in the present embodiment, by performing some of them simultaneously, the number of steps is reduced and the throughput is further improved.

Specifically, in this embodiment, after the polymer protective film forming step, the etching step and the oxide film forming step are simultaneously performed. That is, after an appropriate gas pressure is set using the vacuum pump 5 and the pressure adjusting valve 6, RF is applied from the outside of the vacuum chamber 4 by the RF power source 8 for plasma generation, and plasma is generated in the vacuum chamber 4. . Then, in the polymer protective film forming step, C 4 F 8 gas is introduced into plasma to form a polymer protective film 10b on the bottom and side surfaces of the trenches A and B. Thereafter, an etching gas is introduced while RF is applied to the silicon substrate 2 by the RF power source 9 for bias, and an O 2 gas is introduced, and etching and O 2 plasma irradiation are simultaneously performed. Thereby, it is possible to perform etching while completely removing the polymer protective film 10b on the bottom surfaces of the trenches A and B.

  Therefore, since it is possible to perform Si etching on the bottom surface while preventing the polymer protective film 10b from remaining on the bottom surfaces of the trenches A and B, the number of steps can be reduced and the throughput can be further improved. It becomes.

When such a method is used, the SiO 2 film 10a is formed on the side and bottom surfaces of the trenches A and B simultaneously with the Si etching. However, since the deposition rate of the SiO 2 film 10a is determined by the introduction ratio of the etching gas and O 2 gas, etc., by adjusting this ratio, the Si etching of the bottom surfaces of the trenches A and B is advanced and after the etching step. It is possible to make a state in which the SiO 2 film 10a remains slightly. In this way, since the SiO 2 film 10a can be disposed on the bottom surfaces of the trenches A and B before the formation of the polymer protective film 10b, the polymer protective film 10b is further formed on the bottom surfaces of the trenches A and B. And the effects of the first embodiment can be further obtained.

(Fourth embodiment)
A fourth embodiment of the present invention will be described. As in the third embodiment, the present embodiment is also a modification of the method for forming the protective film and the etching step with respect to the first embodiment, and the rest is the same as in the first embodiment. Only parts different from the first embodiment will be described.

Specifically, in this embodiment, the polymer protective film forming step and the etching step are performed simultaneously, and then the oxide film forming step is performed. That is, after an appropriate gas pressure is set using the vacuum pump 5 and the pressure adjusting valve 6, RF is applied from the outside of the vacuum chamber 4 by the RF power source 8 for plasma generation, and plasma is generated in the vacuum chamber 4. . Then, as the polymer protective film forming step, C 4 F 8 gas is introduced when plasma is generated, and the polymer protective film 10b is formed on the bottom and side surfaces of the trenches A and B. At the same time, RF is applied to the silicon substrate 2 by the bias RF power source 9 and an etching gas is introduced to remove the polymer-based protective film 10b on the bottom surfaces of the trenches A and B, and to etch Si on the bottom surface. Also proceed. Thereafter, application of RF to the silicon substrate 2 by the bias RF power source 9 is stopped, and then O 2 gas is introduced, and the polymer protective film 10b is completely formed on the bottom surfaces of the trenches A and B by irradiation with O 2 plasma. To remove.

Even in this case, the polymer protective film 10b can be removed from the bottom surfaces of the trenches A and B each time the oxide film forming step is performed. For this reason, the number of steps can be reduced, and the throughput can be further improved. In addition, since the SiO 2 film 10a can be disposed on the bottom surfaces of the trenches A and B before the formation of the polymer protective film 10b, the polymer protective film 10b remains on the bottom surfaces of the trenches A and B. Can be prevented, and the effects of the first embodiment can be further obtained.

(Fifth embodiment)
A fifth embodiment of the present invention will be described. This embodiment is also a modification of the method for forming the protective film and the etching step with respect to the first embodiment, and the other parts are the same as those in the first embodiment, and therefore different parts from the first embodiment. Only explained.

  Specifically, in this embodiment, two cycles of performing the polymer protective film forming step and the etching step in order, and then sequentially performing the oxide film protective forming step and the etching step are defined as one cycle, and this cycle is repeated. The implementation method of each step is the same as that of 1st Embodiment.

  FIG. 6 is a timing chart showing the thickness of the polymer-based protective film 10b deposited on the bottom surfaces of the trenches A and B and the etching depth from the bottom surface when the manufacturing method of the present embodiment is performed.

As shown in this figure, the trench A by performing polymeric protective film forming step time T D, different thicknesses of the polymer-based protective film 10b to B is formed. Then, the time T E 1 of the first etching step is set to a time equal to or less than t 0 so as to be a reverse cycle. Thereafter, an oxide film forming step is performed. As a result, even if the polymer-based protective film 10b remains on the bottom surfaces of the trenches A and B, it is completely removed. Then, the SiO 2 film 10a having the same film thickness is formed on the bottom surfaces of the trenches A and B.

Thereafter, the second etching step is performed for a time T E 2 shorter than t 0, so that the Si etching of the bottom surfaces of the trenches A and B is performed in a reverse cycle. And the said process is repeated again in order from a polymer type protective film formation step again. At this time, the second etching step after the previous oxide film forming step is also performed in the reverse cycle, but the SiO 2 film 10a formed by the O 2 plasma irradiation is thin as described above. Even if the etching step is short, it is difficult to remain. Therefore, the SiO 2 film 10a does not remain locally on the bottom surfaces of the trenches A and B, and the problem of etching residue due to this does not occur.

  As described above, in this embodiment, the cycle of sequentially performing the polymer protective film forming step and the etching step and then sequentially performing the oxide film protective forming step and the etching step is repeated. During this cycle, the etching step is performed twice in reverse. For this reason, compared with the first embodiment, although the polymer-based protective film forming step and the oxide film forming step are performed only once, it is possible to incorporate an etching step of two reversal cycles. Therefore, the number of steps can be reduced and the throughput can be further improved.

Here, the first and second etching steps in one cycle are set to be reversed cycles, but the total etching amount of the two etching steps only needs to be reversed cycles. Therefore, the relationship between the etching amounts δa1 and δb1 of the bottom surfaces of the trenches A and B in the first etching step and the etching amounts δa2 and δb2 of the bottom surfaces of the trenches A and B in the second etching step satisfies the following expression. The times T E 1 and T E 2 of each etching step and the times T D and Tox of the polymer protective film forming step and the oxide film forming step can be set.

(Equation 4)
(Δb1 + δb2) − (δa1 + δa2) ≦ 0
Then, T apoly , T bpoly , T aox , T box , R a , R b can be calculated by the method described in the first embodiment (see FIG. 4), and based on these, times T E 1, T E 2, T D , Tox can be determined.

  Further, here, a cycle in which one oxide film forming step and an etching step are performed with respect to one polymer protective film forming step and an etching step is used. However, a cycle of performing one oxide film forming step and etching step for a plurality of polymer protective film forming steps and etching steps may be used. That is, since it is only necessary to remove the polymer-based protective film 10b to such an extent that the remaining polymer-based protective film 10b does not cause etching residue, depending on the state of the remaining etching, a plurality of polymer-based protective film forming steps can be performed. Alternatively, a cycle in which the oxide film formation step is inserted once may be used.

(Sixth embodiment)
A sixth embodiment of the present invention will be described. In the present embodiment, a normal cycle etching step is combined with the first and fifth embodiments. Others are the same as those in the first embodiment, and therefore only the parts different from the first embodiment will be described.

  Specifically, in this embodiment, the combination of the polymer-based protective film forming step and the etching step is performed in the order of the reverse cycle and the normal cycle, and the oxide film forming step is performed after repeating this one or more times.

  FIG. 7 is a timing chart showing the thickness of the polymer-based protective film 10b deposited on the bottom surfaces of the trenches A and B and the etching depth from the bottom surface when the manufacturing method of this embodiment is performed. Here, only the state when the combination of the polymer protective film forming step and the etching step is performed in the order of the reverse cycle and the normal cycle is shown.

As shown in this figure, the polymer-based protective film 10b having different film thicknesses is formed in the trenches A and B by performing the polymer-based protective film forming step for the time T D 1. Then, the time T E 1 of the first etching step is set to a time equal to or less than t 0 so as to be a reverse cycle. Thereafter, the polymer-based protective film 10b having different thicknesses is formed in the trenches A and B by performing the polymer-based protective film forming step for the time T D 2. The time T D 2 may be the same as or different from the time T D 1. Then, the time T E 2 of the second etching step is set longer than t 0 so that the normal cycle is achieved. At this time, if the time is long enough to completely remove the polymer-based protective film 10b remaining on the bottom surfaces of the trenches A and B, the problem of residual etching can be suppressed even if the reverse cycle is performed again thereafter. It becomes possible.

  However, if the normal cycle time is lengthened, the Si etching amount on the bottom surface of the trench B becomes larger than the Si etching amount on the bottom surface of the trench A. However, when the reverse rotation cycle and the normal cycle are performed once, the etching amount on the bottom surface of the trench A is totally larger than the etching amount on the bottom surface of the trench B, and the reverse rotation cycle is required. There is a limit to lengthening the cycle time. For example, in FIG. 8, as shown in the cross-sectional view when the reverse cycle and the normal cycle are repeated, the polymer-based protective film 10b locally remains on the bottom surfaces of the trenches A and B, or a narrow trench. In A, the polymer protective film 10b remaining in the vicinity of the entrance may be deposited to narrow the opening width and eventually close.

For this reason, after repeating the reverse rotation cycle and the normal cycle once or a plurality of times, an oxide film forming step is inserted to completely remove the polymer protective film 10b remaining on the bottom surfaces of the trenches A and B and in the vicinity of the entrance by O 2 plasma irradiation. To remove. As shown in the first embodiment, the oxide film forming step performed at this time is performed as a pre-process of the polymer protective film forming process in the protective film forming step, so that the SiO 2 film 10a is formed as a base of the polymer protective film 10b. Can be formed. Further, as shown in the fifth embodiment, an etching step may be performed subsequent to the oxide film forming step, and the etching step in the reverse cycle may be performed after the formation of the SiO 2 film 10a.

  In this way, the oxide film forming step can be performed after repeating the reverse rotation cycle and the normal cycle once or a plurality of times. In this way, the etching time can be increased in the normal cycle, so that the etching amount can be increased. Therefore, it is possible to shorten the time required for etching to a desired depth.

(Other embodiments)
(1) In the first to fifth embodiments, the reverse cycle is performed such that the etching amount on the bottom surface of the trench A is larger than the etching amount on the bottom surface of the trench B. In the sixth embodiment, A total reverse rotation cycle is made by repeating the normal cycle. Only the trench forming process that becomes such a reverse cycle may be repeatedly executed a plurality of times, but in combination with the normal cycle, the depths of the trenches A and B may be finally aligned.

  As described in the first embodiment, when only the reverse cycle is repeated, theoretically, the trench A is always deeper than the trench B, but actually the trenches A and B are deeper. As a result, the etching rate of the narrow trench A may decrease. For this reason, also in the second to sixth embodiments, even if only the reverse rotation cycle is repeated, the depths of both trenches A and B can be finally made uniform. Further, when the trenches A and B are dug by a normal Si deep etching technique, the trenches B are deeper than the trench A because they are dug in a normal cycle. Therefore, even if only the reverse rotation cycle is repeated thereafter, the depths of both trenches A and B can be finally made uniform.

  (2) Any two or more of the trench formation steps that constitute the reverse cycle shown in the above embodiments may be combined.

(3) In each of the above embodiments, a gas containing C 4 F 8 is used as the polymer protective film forming gas. However, any material can be used as long as the material of the polymer protective film 10b is decomposed and removed by O 2 plasma. A suitable gas may be used. Further, although a gas containing SF 6 is used as a gas for etching, any gas capable of etching the SiO 2 film 10a and the polymer protective film 10b may be used. For example, a halide gas such as Cl 2 or HBr A gas containing can be used.

  (4) In each of the above embodiments, the silicon substrate 2 is described as an example of the semiconductor substrate. However, trenches A and B having different opening widths with respect to the active layer of another semiconductor substrate, for example, an SOI substrate, have the same depth. This can also be applied to the case where it is desired to form the film. In other words, the present invention can be applied to other semiconductor substrates as long as the semiconductor substrate includes a silicon layer.

  (5) In each of the above-described embodiments, the case where two trenches A and B are formed as trenches having different opening widths has been described. Embodiments can be applied.

1 dry etching apparatus 2 silicon substrate 3 base 4 vacuum chamber 5 a vacuum pump 6 pressure adjusting valve 7a~7d gas inlet holes 8, 9 RF Power 10 protective layer 10a SiO 2 film 10b polymer based protective film 11 masks A, B trench

Claims (11)

  1. A substrate (2) including a silicon layer is placed in a vacuum chamber (4), and a first trench (A) having a first width defined by an opening of a mask (11) formed on the silicon layer. ) And a second trench (B) having a second width wider than that of the first trench (A), and a plurality of types of the trench forming steps in the vacuum chamber (4). The protective film forming step of forming a protective film (10) on the side walls and bottom surface of the first and second trenches (A, B) and the first of the protective films, while introducing and gasifying the gas of the first and second trenches (A, B) While repeating the etching step of removing the portion formed on the bottom surface of the second trench (A, B) to expose the silicon layer and deepening the first and second trenches (A, B) by etching Do A method of manufacturing a conductor arrangement,
    The trench forming step includes
    As the protective film forming step, plasma is generated while introducing a gas containing oxygen as one of the plurality of kinds of gases, and O 2 plasma irradiation is performed to oxidize the first and second trenches (A, B). The oxide film forming step for forming the film (10a) and the first and second trenches (A) are formed by plasmaizing and depositing a polymer protective film forming gas as one of the plurality of types of gases. B) performing a polymer protective film forming step of forming the polymer protective film (10b) in B,
    The polymer protective film forming step and the etching step are set as one cycle, and after the oxide film forming step is performed once, the cycle of performing the polymer protective film forming step and the etching step is performed N cycles (N ≧ 1). If the etching amount from the bottom surface of the first trench (A) performed during the N cycles is δd a and the etching amount from the bottom surface of the second trench (B) is δd b , then δd a ≧ δd b By performing the etching by setting the time T E and the number of cycles N of the etching step within the range, the narrow first trench (A) is wider than the wide second trench (B). A method for manufacturing a semiconductor device comprising a reverse cycle in which the etching amount on the bottom surface is increased.
  2. In the trench forming step, wherein one of the oxide film (10a) first, second trenches (A, B) the bottom surface on the portion of the time it takes to remove by etch step T aox of, T box, the The time taken to remove portions of the polymer-based protective film (10b) on the bottom surfaces of the first and second trenches (A, B) by the etching step is Ta poly , T bpoly , and the time taken by the etching step. 1. Etching rates from the bottom surface of the second trench (A, B) are R a and R b , and the etching step time T E and the number of cycles N for performing the polymer protective film forming step and the etching step are as follows :
    R a · {N (T E −T apoly ) −T aox } ≧ R b · {N (T E −T bpoly ) −T box }
    The method of manufacturing a semiconductor device according to claim 1, wherein the semiconductor device is set within a range.
  3.   In the trench formation step, the oxide film (10a) remains on the bottom surfaces of the first and second trenches (A, B) until the (N-1) th cycle, and the first and second trenches remain in the Nth cycle. 3. The semiconductor device according to claim 2, wherein the oxide film (10a) is removed from the bottom surface of (A, B), and etching is performed from the bottom surface of the first and second trenches (A, B). Manufacturing method.
  4. A substrate (2) including a silicon layer is placed in a vacuum chamber (4), and a first trench (A) having a first width defined by an opening of a mask (11) formed on the silicon layer. ) And a second trench (B) having a second width wider than that of the first trench (A), and a plurality of types of the trench forming steps in the vacuum chamber (4). The protective film forming step of forming a protective film (10) on the side walls and bottom surface of the first and second trenches (A, B) and the first of the protective films, while introducing and gasifying the gas of the first and second trenches (A, B) While repeating the etching step of removing the portion formed on the bottom surface of the second trench (A, B) to expose the silicon layer and deepening the first and second trenches (A, B) by etching Do A method of manufacturing a conductor arrangement,
    The trench forming step includes
    As the protective film forming step, plasma is generated while introducing a gas containing oxygen as one of the plurality of kinds of gases, and O 2 plasma irradiation is performed to oxidize the first and second trenches (A, B). The oxide film forming step for forming the film (10a) and the first and second trenches (A) are formed by plasmaizing and depositing a polymer protective film forming gas as one of the plurality of types of gases. B) performing a polymer protective film forming step of forming the polymer protective film (10b) in B,
    After performing the polymer-based protective film forming step, the oxygen-containing gas and the etching gas are simultaneously introduced into the vacuum chamber (4), whereby the oxide film forming step in the protective film forming step, Perform the etching step simultaneously,
    .Delta.d a etching amount from the bottom of the first trench (A), when the .delta.d b etching amount from the bottom surface of the second trench (B), the etching step to the extent that the δd a ≧ δd b by set time T E perform the etching, to include multi-reversing cycle the etching amount of the bottom surface than the second trench it is wide in the narrow first trench (a) (B) A method of manufacturing a semiconductor device.
  5. A substrate (2) including a silicon layer is placed in a vacuum chamber (4), and a first trench (A) having a first width defined by an opening of a mask (11) formed on the silicon layer. ) And a second trench (B) having a second width wider than that of the first trench (A), and a plurality of types of the trench forming steps in the vacuum chamber (4). The protective film forming step of forming a protective film (10) on the side walls and bottom surface of the first and second trenches (A, B) and the first of the protective films, while introducing and gasifying the gas of the first and second trenches (A, B) While repeating the etching step of removing the portion formed on the bottom surface of the second trench (A, B) to expose the silicon layer and deepening the first and second trenches (A, B) by etching Do A method of manufacturing a conductor arrangement,
    The trench forming step includes
    As the protective film forming step, plasma is generated while introducing a gas containing oxygen as one of the plurality of kinds of gases, and O 2 plasma irradiation is performed to oxidize the first and second trenches (A, B). The oxide film forming step for forming the film (10a) and the first and second trenches (A) are formed by plasmaizing and depositing a polymer protective film forming gas as one of the plurality of types of gases. B) performing a polymer protective film forming step of forming the polymer protective film (10b) in B,
    The polymer protective film forming step and the etching step in the protective film forming step were simultaneously performed by simultaneously introducing the polymer protective film forming gas and the etching gas into the vacuum chamber (4). Then, the oxide film forming step is performed,
    .Delta.d a etching amount from the bottom of the first trench (A), when the .delta.d b etching amount from the bottom surface of the second trench (B), the etching step to the extent that the δd a ≧ δd b by set time T E perform the etching, to include multi-reversing cycle the etching amount of the bottom surface than the second trench it is wide in the narrow first trench (a) (B) A method of manufacturing a semiconductor device.
  6. A substrate (2) including a silicon layer is placed in a vacuum chamber (4), and a first trench (A) having a first width defined by an opening of a mask (11) formed on the silicon layer. ) And a second trench (B) having a second width wider than that of the first trench (A), and a plurality of types of the trench forming steps in the vacuum chamber (4). The protective film forming step of forming a protective film (10) on the side walls and bottom surface of the first and second trenches (A, B) and the first of the protective films, while introducing and gasifying the gas of the first and second trenches (A, B) While repeating the etching step of removing the portion formed on the bottom surface of the second trench (A, B) to expose the silicon layer and deepening the first and second trenches (A, B) by etching Do A method of manufacturing a conductor arrangement,
    The trench forming step includes
    As the protective film forming step, plasma is generated while introducing a gas containing oxygen as one of the plurality of kinds of gases, and O 2 plasma irradiation is performed to oxidize the first and second trenches (A, B). The oxide film forming step for forming the film (10a) and the first and second trenches (A) are formed by plasmaizing and depositing a polymer protective film forming gas as one of the plurality of types of gases. B) performing a polymer protective film forming step of forming the polymer protective film (10b) in B,
    After sequentially performing the polymer protective film forming step and the etching step, a combination of sequentially performing the oxide film forming step and the etching step is one cycle, and this cycle is repeated.
    The total etching amount from the bottom surface of the first trench (A) in the first etching step performed after the polymer protective film forming step and the second etching step performed after the oxide film forming step is as follows. When .delta.d b etching total amount of from bottom of the second trench (B) with a δd a, δd a ≧ δd b become first time within the scope and second time of the etching step time T E 1 , T E 2 is set and the etching is performed, so that the first trench (A) having a narrow width includes a reverse cycle in which the etching amount of the bottom surface is larger than that of the second trench (B) having a larger width. A method for manufacturing a semiconductor device.
  7.   The trench forming step includes a normal cycle in which an etching amount from the bottom surface of the second trench (B) is larger than an etching amount from the bottom surface of the first trench (A), and the normal cycle and the reverse cycle, The method for manufacturing a semiconductor device according to claim 1, wherein the first and second trenches (A, B) are aligned at a predetermined depth in combination.
  8. A substrate (2) including a silicon layer is placed in a vacuum chamber (4), and a first trench (A) having a first width defined by an opening of a mask (11) formed on the silicon layer. ) And a second trench (B) having a second width wider than that of the first trench (A), and a plurality of types of the trench forming steps in the vacuum chamber (4). The protective film forming step of forming a protective film (10) on the side walls and bottom surface of the first and second trenches (A, B) and the first of the protective films, while introducing and gasifying the gas of the first and second trenches (A, B) While repeating the etching step of removing the portion formed on the bottom surface of the second trench (A, B) to expose the silicon layer and deepening the first and second trenches (A, B) by etching Do A method of manufacturing a conductor arrangement,
    The trench forming step includes
    As the protective film forming step, plasma is generated while introducing a gas containing oxygen as one of the plurality of kinds of gases, and O 2 plasma irradiation is performed to oxidize the first and second trenches (A, B). The oxide film forming step for forming the film (10a) and the first and second trenches (A) are formed by plasmaizing and depositing a polymer protective film forming gas as one of the plurality of types of gases. B) forming a polymer protective film (10b) in the polymer protective film forming step,
    The polymer protective film forming step and the etching step are sequentially performed. In the etching step, the etching amount from the bottom surface of the first trench (A) is δd a , and the etching amount from the bottom surface of the second trench (B) is When δd b, δd a ≧ δd b ranges within the etch step time comprising T E 1 by performing the etching by setting the direction of the narrow first trench (a) is wider performing a multi-reversing cycle the etching amount of the bottom surface than the second trench (B), and a normal cycle by setting the time T E 2 of said etch step within an amount of δd a <δd b perform the etching in order wherein one cycle, said error in said reversing cycles and the normal cycles to the extent that the δd a ≧ δd b as a total of the cycle Set the time T E 1, T E 2 of quenching step is performed one or more times the cycle, then, a method of manufacturing a semiconductor device which is characterized in that the oxide film forming step.
  9. 2. The material according to claim 1, wherein a material that is decomposed and removed by O 2 plasma generated in the oxide film forming step is used as the polymer protective film (10 b) formed in the polymer protective film forming step. 9. A method for manufacturing a semiconductor device according to any one of 8 above.
  10. In the polymer-based protective film forming step, a method of manufacturing a semiconductor device according to any one of claims 1 to 9, characterized by using a gas containing C 4 F 8 as the polymer-based protective film forming gas.
  11. The method of manufacturing a semiconductor device according to claim 1, wherein a gas containing SF 6 is used as the etching gas in the etching step.
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