JP5000914B2 - Video projection device - Google Patents

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JP5000914B2
JP5000914B2 JP2006093711A JP2006093711A JP5000914B2 JP 5000914 B2 JP5000914 B2 JP 5000914B2 JP 2006093711 A JP2006093711 A JP 2006093711A JP 2006093711 A JP2006093711 A JP 2006093711A JP 5000914 B2 JP5000914 B2 JP 5000914B2
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dimensional array
semiconductor laser
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JP2007271667A (en
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秀雄 原
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Nitto Optical Co Ltd
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本発明は、光源として半導体素子を用いる映像プロジェクション装置に関する。   The present invention relates to a video projection apparatus using a semiconductor element as a light source.

最新の映像プロジェクターは、マイクロディスプレイパネルと言われる映像表示素子を半導体素子であるLED光源で照明光学系を介して照明し、映像表示素子上で作られた映像を投射レンズでスクリーンへ投映する(例えば特許文献1参照)。
映像表示素子としては、透過型や反射型の液晶パネルや、MEMS(micro electro mechanical systems)デバイスである反射型のDMD(digital micro mirror device)パネルなどがある(例えば特許文献2参照)。
また、半導体レーザあるいは半導体レーザ励起の固定レーザさらにそれらの波長変換光を投射光源としたシステムがあり、このシステムでは、ビームスキャン光学系を用いてスクリーン面を走査して映像を表示する(例えば特許文献3参照)。本走査方法には、光の点を走査する方法と光の線を走査する方法がある。
特開2001−42431号公報 特開2006−65192号公報 特開2003−279943号公報
The latest image projector illuminates an image display element called a micro display panel with an LED light source, which is a semiconductor element, via an illumination optical system, and projects an image created on the image display element onto a screen by a projection lens ( For example, see Patent Document 1).
Examples of the image display element include a transmissive and reflective liquid crystal panel, and a reflective DMD (digital micro mirror device) panel which is a MEMS (micro electro mechanical systems) device (see, for example, Patent Document 2).
Further, there is a system using a semiconductor laser or a semiconductor laser-pumped fixed laser and a wavelength converted light thereof as a projection light source. In this system, a screen is scanned using a beam scanning optical system to display an image (for example, patents). Reference 3). This scanning method includes a method of scanning a spot of light and a method of scanning a line of light.
JP 2001-42431 A JP 2006-65192 A Japanese Patent Laid-Open No. 2003-279943

ところで、LEDを投射光源に用いた照明光学系では、映像表示素子のEtendue(集光面積と立体角の積)の制約から一般に光利用効率が低く、さらに、高出力LEDの発光効率が低いという問題から、総合的な電気効率が低いという問題がある。
一方、レーザを光源に用いる光学系では、レーザ及びスキャン光学系が高価であり、また、スペックルと言われる光の干渉を抑制しなければならないという問題がある。また、レーザ光は、眼に対する安全性の視点からも問題が残る。
By the way, in an illumination optical system using an LED as a projection light source, the light use efficiency is generally low due to the restriction of Etendue (product of light collection area and solid angle) of the image display element, and further, the light emission efficiency of the high output LED is low. The problem is that the overall electrical efficiency is low.
On the other hand, in an optical system using a laser as a light source, the laser and the scanning optical system are expensive, and there is a problem that interference of light called speckle must be suppressed. Laser light also has a problem from the viewpoint of safety for eyes.

本発明の課題は、光の利用効率を向上し、コストを軽減し、光の干渉をなくす等して、構成が簡単で長寿命かつ信頼性の高い映像プロジェクション装置を提供することである。   An object of the present invention is to provide a video projection apparatus that has a simple configuration, a long life, and high reliability by improving light utilization efficiency, reducing costs, and eliminating light interference.

以上の課題を解決するため、請求項1に記載の発明は、投射光源と映像表示素子を兼用する面発光型半導体レーザ(VCSEL)2次元アレイを光学エンジンとして搭載し
前記面発光型半導体レーザ2次元アレイからのレーザ光の光軸上に挿入されているビームスプリッターと撮像レンズ及び2次元アレイ撮像素子からなる光サンプリング撮像系により前記面発光型半導体レーザ2次元アレイの発光強度分布を計測して前記面発光型半導体レーザ2次元アレイの各単一要素面発光型半導体レーザ間の出力のバラツキを補正する2次元信号を面発光型半導体レーザ駆動回路へフィードバックする映像プロジェクション装置を特徴とする。
In order to solve the above problems, the invention according to claim 1 is equipped with a surface emitting semiconductor laser (VCSEL ) two- dimensional array that serves both as a projection light source and an image display element as an optical engine ,
The surface-emitting semiconductor laser two-dimensional array is formed by an optical sampling imaging system comprising a beam splitter, an imaging lens, and a two-dimensional array imaging device inserted on the optical axis of the laser light from the surface-emitting semiconductor laser two-dimensional array. Video projection that measures the emission intensity distribution and feeds back to the surface emitting semiconductor laser drive circuit a two-dimensional signal for correcting the output variation between the single element surface emitting semiconductor lasers of the surface emitting semiconductor laser two-dimensional array. Features the device.

請求項2に記載の発明は、請求項1に記載の映像プロジェクション装置であって、前記VCSEL2次元アレイは波長変換器を備えていることを特徴とする。   A second aspect of the present invention is the video projection apparatus according to the first aspect, wherein the VCSEL two-dimensional array includes a wavelength converter.

請求項3に記載の発明は、請求項1または2に記載の映像プロジェクション装置であって、映像信号に基づいて前記VCSEL2次元アレイの各要素VCSELのレーザ光出力が強度変調することを特徴とする。   A third aspect of the present invention is the video projection apparatus according to the first or second aspect, wherein the laser light output of each element VCSEL of the VCSEL two-dimensional array is intensity-modulated based on a video signal. .

請求項4に記載の発明は、請求項1から3のいずれか一項に記載の映像プロジェクション装置であって、光の3原色の1色を放射する前記VCSELまたはその波長変換器2次元アレイからのレーザ光を3原色分合成してフルカラー映像を投映することを特徴とする。   A fourth aspect of the present invention is the image projection apparatus according to any one of the first to third aspects, wherein the VCSEL that emits one of the three primary colors of light or a two-dimensional array of wavelength converters thereof is used. A full-color image is projected by synthesizing the laser light of three primary colors.

請求項5に記載の発明は、請求項1に記載の映像プロジェクション装置であって、面発光型半導体レーザまたはその波長変換器2次元アレイ単板中に光の3原色を放射する3種類の面発光型半導体レーザ2次元アレイを含むことを特徴とする。   A fifth aspect of the present invention is the image projection apparatus according to the first aspect of the present invention, wherein the surface emitting semiconductor laser or its wavelength converter emits three primary colors of light into a two-dimensional array single plate. It includes a two-dimensional array of light emitting semiconductor lasers.

本発明によれば、投射光源と映像表示素子を兼用する面発光型半導体レーザ(VCSEL)2次元アレイを光学エンジンとして搭載したことにより、従来の映像プロジェクターにおける投射光源と映像表示素子の役目をVCSEL2次元アレイという一つの素子で兼用しているので、光学エンジンは投射光学系のみのシンプルな構成となり、照明光学系やスキャン光学系が不要となるので、光学系のコストを圧縮できるとともに、光の損失を抑えられる。
さらに、光源の面発光型半導体レーザ(VCSEL)は、その製造プロセスが半導体メモリー等のLSIとほとんど同じなので、量産に適し、通常の半導体レーザに比べて長寿命・高信頼性という特長がある。また、元来レーザ光なので、発光ダイオード(LED)からの放射光と比較すると輝度が高く、そのため発光の利用効率が高い。
また、各画素VCSELはレーザ発振の動作上独立しているので、各画素VCSEL間での光波の干渉が無く、そのため照明光が直接眼に到達する映像表示装置にも適している。
そして、MEMS素子やスキャン系に比べると機械的可動部分がなく、また、液晶パネルの偏光子のように光吸収材を用いていないため、光学部品の光劣化も少なく、従来技術に比べるとかなり高信頼・長寿命である。
According to the present invention, a surface emitting semiconductor laser (VCSEL ) two- dimensional array that serves both as a projection light source and an image display element is mounted as an optical engine, so that the role of the projection light source and the image display element in a conventional image projector is represented by VCSE. Since the L2D array is also used as a single element, the optical engine has a simple configuration with only a projection optical system, and no illumination optical system or scan optical system is required. Loss can be suppressed.
Further, the surface emitting semiconductor laser (VCSEL) as a light source is suitable for mass production because its manufacturing process is almost the same as that of an LSI such as a semiconductor memory, and has a feature that it has a longer life and higher reliability than a normal semiconductor laser. In addition, since it is originally a laser beam, its luminance is higher than that of the emitted light from the light emitting diode (LED), and therefore the efficiency of light emission is high.
In addition, since each pixel VCSEL is independent in laser oscillation operation, there is no interference of light waves between the respective pixel VCSELs. Therefore, the pixel VCSEL is also suitable for an image display apparatus in which illumination light directly reaches the eye.
In addition, there are no mechanically movable parts compared to MEMS elements and scan systems, and since no light absorbing material is used like a polarizer of a liquid crystal panel, there is little optical deterioration of optical components, which is considerably higher than that of the prior art. High reliability and long life.

以下、図を参照して本発明を実施するための最良の形態を詳細に説明する。
〔第1実施形態〕
図1は本発明を適用した第一の実施形態の構成を示すもので、面発光型半導体レーザの2次元マトリックス配列を投射光源及び映像表示素子として用いたものである。
すなわち、映像プロジェクション装置は、図示のように、プロジェクター光学エンジン1内の色合成プリズム2の各原色の入射面に、各原色に対応した波長でレーザ発振する3種類(赤色用、緑色用、青色用)の面発光型半導体レーザ(VCSEL)の単一要素VCSELをマトリックス状に配列したVCSEL2次元アレイ3を配置している。ここで、必要に応じて各要素VCSELに波長変換器を組み合わせても良い。
Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.
[First Embodiment]
FIG. 1 shows a configuration of a first embodiment to which the present invention is applied, in which a two-dimensional matrix array of surface emitting semiconductor lasers is used as a projection light source and an image display element.
That is, as shown in the figure, the image projection apparatus has three types (red, green, and blue) that oscillate at a wavelength corresponding to each primary color on the incident surface of each primary color of the color synthesis prism 2 in the projector optical engine 1. VCSEL two-dimensional array 3 in which single element VCSELs of a surface emitting semiconductor laser (VCSEL) are arranged in a matrix. Here, a wavelength converter may be combined with each element VCSEL as necessary.

図2はVCSEL2次元アレイ3の一部を拡大して示したもので、単位(単一要素)VCSEL4間の配列ピッチは15ミクロンで横に1920列、縦に1080行のフルHD表示になっており、発光部の全体サイズは約3cm×1.5cmである。
このVCSEL2次元アレイ3は、従来のプロジェクター装置における光源と映像表示素子を兼ねた役割を担うものである。
FIG. 2 is an enlarged view of a part of the VCSEL two-dimensional array 3. The arrangement pitch between unit (single element) VCSELs 4 is 15 microns, 1920 columns horizontally, and 1080 rows vertically. The overall size of the light emitting part is about 3 cm × 1.5 cm.
The VCSEL two-dimensional array 3 serves as both a light source and a video display element in a conventional projector apparatus.

また、色合成プリズム2の出射面側には、投射レンズ5の入射面を、VCSEL2次元アレイ3面からバックフォーカスの距離だけ離れた位置に配置している。
投射レンズ5は、VCSEL2次元アレイ3面をスクリーン6に投映する。
Further, the incident surface of the projection lens 5 is arranged at a position away from the surface of the VCSEL two-dimensional array 3 by a back focus distance on the emission surface side of the color synthesis prism 2.
The projection lens 5 projects the VCSEL two-dimensional array 3 surface on the screen 6.

ここで、VCSEL2次元アレイ3は、図示しないレーザドライバーによって駆動され、レーザドライバーは図示しない映像エンジンにより制御される。
すなわち、各原色(赤色、緑色、青色)毎のVCSEL2次元アレイ3面内の各単一要素VCSEL4は、各原色映像に対応した画素として動作し、対応する画素の明るさを指定する信号の変化に応じてレーザ発振の光量が変化する。つまり、映像信号に基づいてVCSEL2次元アレイ3の各要素VCSEL4のレーザ光出力が強度変調する。
Here, the VCSEL two-dimensional array 3 is driven by a laser driver (not shown), and the laser driver is controlled by a video engine (not shown).
That is, each single element VCSEL4 in the VCSEL two-dimensional array 3 surface for each primary color (red, green, blue) operates as a pixel corresponding to each primary color image, and a signal change that specifies the brightness of the corresponding pixel The amount of laser oscillation changes according to the above. That is, the laser light output of each element VCSEL4 of the VCSEL two-dimensional array 3 is intensity-modulated based on the video signal.

以上は基本構成であり、実際には、各単一要素VCSEL4間の光量バラツキを補正するために、図示のように、ビームスプリッター7と撮像レンズ8及び2次元アレイ撮像素子9からなる光サンプリング撮像系を光軸10上に挿入している。
これにより、プロジェクター光学エンジン1は各単一要素VCSEL4の放射光量の不均一を校正する校正機能を具備している。
すなわち、VCSEL2次元アレイ3面の発光強度分布を計測して各単一要素VCSEL4間の出力のバラツキを補正する2次元信号を図示しないVCSEL駆動回路へフィードバックする。このフィードバックは各単一要素VCSEL4の光出力の経時変化も同時に補正することができる。
The above is the basic configuration. Actually, in order to correct the variation in the amount of light between each single element VCSEL 4, as shown in the figure, an optical sampling imaging comprising a beam splitter 7, an imaging lens 8, and a two-dimensional array imaging device 9. The system is inserted on the optical axis 10.
Thereby, the projector optical engine 1 has a calibration function for calibrating the non-uniformity of the amount of radiated light of each single element VCSEL 4.
That is, the two-dimensional signal for measuring the emission intensity distribution on the surface of the VCSEL two-dimensional array 3 and correcting the output variation between the single element VCSELs 4 is fed back to a VCSEL driving circuit (not shown). This feedback can simultaneously correct the temporal change of the light output of each single element VCSEL4.

以上のような構成により、長時間に渡り均一で色バランスに優れた映像を保証することができる。   With the configuration as described above, it is possible to guarantee an image that is uniform and excellent in color balance over a long period of time.

〔第2実施形態〕
次に、図3は本発明を適用した第二の実施形態の構成を示すもので、面発光型半導体レーザの2次元マトリックス配列を投射光源及び映像表示素子として用いていることは前述した第一の実施形態と同じである。
本実施形態の光学エンジン1で用いるVCSEL2次元アレイパネル13は、第一の実施形態とは異なり、1枚のみであるが、図4に拡大して示すように、本パネル13中のVCSEL2次元アレイは、赤色(R)、緑色(G)、青色(B)の3種類の光の原色をそれぞれ放射する3種類の単色VCSEL2次元アレイ14から構成されている。
本実施形態によれば、第一の実施形態と比較すると、画素サイズは大きくなるが、色の合成系が不要となるので、光学エンジン1の構成がシンプルになり、コストメリットが大きいという利点がある。
[Second Embodiment]
Next, FIG. 3 shows a configuration of a second embodiment to which the present invention is applied. The first embodiment described above uses a two-dimensional matrix array of surface emitting semiconductor lasers as a projection light source and an image display element. This is the same as the embodiment.
Unlike the first embodiment, there is only one VCSEL two-dimensional array panel 13 used in the optical engine 1 of this embodiment, but as shown in an enlarged view in FIG. 4, the VCSEL two-dimensional array panel 13 in this panel 13 is used. Is composed of three types of single-color VCSEL two-dimensional arrays 14 that respectively emit three primary colors of red (R), green (G), and blue (B).
According to the present embodiment, compared with the first embodiment, the pixel size is increased, but since a color synthesis system is not required, the configuration of the optical engine 1 is simplified and the cost merit is large. is there.

なお、以上の実施形態においては、リア投射型の映像プロジェクターとしたが、本発明はこれに限定されるものではなく、フロント投射型の映像プロジェクターであっても良い。
なお、実施形態の他、光学部品の具体的な配置や細部構造等について適宜に変更可能であることは勿論である。
In the above embodiment, the rear projection type image projector is used. However, the present invention is not limited to this, and a front projection type image projector may be used.
In addition to the embodiment, it is a matter of course that the specific arrangement and detailed structure of the optical components can be changed as appropriate.

本発明を適用した第一の実施形態の構成を示すもので、映像プロジェクション装置の概略構成図である。1 shows a configuration of a first embodiment to which the present invention is applied, and is a schematic configuration diagram of a video projection apparatus. 図1の矢印A部の拡大図である。It is an enlarged view of the arrow A part of FIG. 本発明を適用した第二の実施形態の構成を示すもので、映像プロジェクション装置の概略構成図である。FIG. 2 is a schematic configuration diagram of a video projection apparatus, showing a configuration of a second embodiment to which the present invention is applied. 図3の矢印A部の拡大図である。It is an enlarged view of the arrow A part of FIG.

符号の説明Explanation of symbols

1 光学エンジン
2 色合成プリズム
3 VCSEL2次元アレイ(赤色用、緑色用、青色用)
4 単一要素VCSEL
5 投射レンズ
6 スクリーン
7 ビームスプリッター
8 撮像レンズ
9 2次元アレイ撮像素子
10 光軸
13 単板式3原色VCSEL2次元アレイパネル
14 単色VCSEL2次元アレイ
1 Optical engine 2 Color synthesis prism 3 VCSEL two-dimensional array (for red, green, and blue)
4 Single element VCSEL
5 Projection lens 6 Screen 7 Beam splitter 8 Imaging lens 9 Two-dimensional array imaging device 10 Optical axis 13 Single plate type three primary color VCSEL two-dimensional array panel 14 Single-color VCSEL two-dimensional array

Claims (5)

投映光源と映像表示素子を兼用する面発光型半導体レーザ2次元アレイを光学エンジンとして搭載し
前記面発光型半導体レーザ2次元アレイからのレーザ光の光軸上に挿入されているビームスプリッターと撮像レンズ及び2次元アレイ撮像素子からなる光サンプリング撮像系により前記面発光型半導体レーザ2次元アレイの発光強度分布を計測して前記面発光型半導体レーザ2次元アレイの各単一要素面発光型半導体レーザ間の出力のバラツキを補正する2次元信号を面発光型半導体レーザ駆動回路へフィードバックすることを特徴とする映像プロジェクション装置。
The surface-emitting type semiconductor lasers 2-dimensional array also serves as a projection light source and the image display device equipped with an optical engine,
The surface-emitting semiconductor laser two-dimensional array is formed by an optical sampling imaging system comprising a beam splitter, an imaging lens, and a two-dimensional array imaging device inserted on the optical axis of the laser light from the surface-emitting semiconductor laser two-dimensional array. Measuring the emission intensity distribution and feeding back to the surface emitting semiconductor laser driving circuit a two-dimensional signal for correcting the output variation between the single element surface emitting semiconductor lasers of the two-dimensional surface emitting semiconductor laser. A featured video projection device.
前記面発光型半導体レーザ2次元アレイは波長変換器を備えていることを特徴とする請求項1に記載の映像プロジェクション装置。   The image projection apparatus according to claim 1, wherein the two-dimensional surface emitting semiconductor laser two-dimensional array includes a wavelength converter. 映像信号に基づいて前記面発光型半導体レーザ2次元アレイの各要素のレーザ光出力が強度変調することを特徴とする請求項1または2に記載の映像プロジェクション装置。   3. The video projection apparatus according to claim 1, wherein the laser light output of each element of the two-dimensional surface emitting semiconductor laser two-dimensional array is intensity-modulated based on the video signal. 光の3原色の1色を放射する前記面発光型半導体レーザまたはその波長変換器2次元アレイからのレーザ光を3原色分合成してフルカラー映像を投映することを特徴とする請求項1から3のいずれか一項に記載の映像プロジェクション装置。   4. A full-color image is projected by synthesizing laser light from the surface-emitting type semiconductor laser that emits one of the three primary colors of light or a laser beam from the two-dimensional array of wavelength converters thereof into three primary colors. The video projection device according to any one of the above. 面発光型半導体レーザ2次元アレイ単板中に光の3原色を放射する3種類の面発光型半導体レーザ2次元アレイを含むことを特徴とする請求項1に記載の映像プロジェクション装置。   2. The image projection apparatus according to claim 1, wherein the two-dimensional surface emitting semiconductor laser two-dimensional array that emits three primary colors of light is included in a single plate of the surface emitting semiconductor laser two-dimensional array.
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