JP4968493B2 - ポリイミドフィルム、およびポリイミドフィルムの製造方法 - Google Patents
ポリイミドフィルム、およびポリイミドフィルムの製造方法 Download PDFInfo
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- JP4968493B2 JP4968493B2 JP2011541016A JP2011541016A JP4968493B2 JP 4968493 B2 JP4968493 B2 JP 4968493B2 JP 2011541016 A JP2011541016 A JP 2011541016A JP 2011541016 A JP2011541016 A JP 2011541016A JP 4968493 B2 JP4968493 B2 JP 4968493B2
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- Prior art keywords
- polyimide film
- film
- linear expansion
- expansion coefficient
- self
- Prior art date
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- 229920001721 polyimide Polymers 0.000 title claims description 153
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 238000010438 heat treatment Methods 0.000 claims description 53
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 239000004642 Polyimide Substances 0.000 claims description 33
- 150000004985 diamines Chemical class 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 28
- 239000002243 precursor Substances 0.000 claims description 28
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 claims description 27
- 150000000000 tetracarboxylic acids Chemical class 0.000 claims description 27
- 239000002904 solvent Substances 0.000 claims description 18
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 16
- 239000000853 adhesive Substances 0.000 claims description 11
- 239000011888 foil Substances 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 6
- 238000005266 casting Methods 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 112
- 239000000243 solution Substances 0.000 description 41
- -1 aromatic tetracarboxylic acid Chemical class 0.000 description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 17
- 239000007822 coupling agent Substances 0.000 description 15
- 239000002585 base Substances 0.000 description 14
- 229910052802 copper Inorganic materials 0.000 description 13
- 239000010949 copper Substances 0.000 description 13
- 239000003960 organic solvent Substances 0.000 description 12
- 239000000843 powder Substances 0.000 description 12
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 11
- 239000003054 catalyst Substances 0.000 description 11
- 239000010419 fine particle Substances 0.000 description 11
- 229920005575 poly(amic acid) Polymers 0.000 description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000012756 surface treatment agent Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 239000002738 chelating agent Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 238000007363 ring formation reaction Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000006087 Silane Coupling Agent Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 239000012024 dehydrating agents Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 4
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- UMHKOAYRTRADAT-UHFFFAOYSA-N [hydroxy(octoxy)phosphoryl] octyl hydrogen phosphate Chemical compound CCCCCCCCOP(O)(=O)OP(O)(=O)OCCCCCCCC UMHKOAYRTRADAT-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 150000004984 aromatic diamines Chemical class 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- ZHDTXTDHBRADLM-UHFFFAOYSA-N hydron;2,3,4,5-tetrahydropyridin-6-amine;chloride Chemical compound Cl.NC1=NCCCC1 ZHDTXTDHBRADLM-UHFFFAOYSA-N 0.000 description 3
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 3
- 235000021317 phosphate Nutrition 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- FBHPRUXJQNWTEW-UHFFFAOYSA-N 1-benzyl-2-methylimidazole Chemical compound CC1=NC=CN1CC1=CC=CC=C1 FBHPRUXJQNWTEW-UHFFFAOYSA-N 0.000 description 2
- JYYNAJVZFGKDEQ-UHFFFAOYSA-N 2,4-Dimethylpyridine Chemical compound CC1=CC=NC(C)=C1 JYYNAJVZFGKDEQ-UHFFFAOYSA-N 0.000 description 2
- XWKFPIODWVPXLX-UHFFFAOYSA-N 2,5-dimethylpyridine Chemical compound CC1=CC=C(C)N=C1 XWKFPIODWVPXLX-UHFFFAOYSA-N 0.000 description 2
- ILCOCZBHMDEIAI-UHFFFAOYSA-N 2-(2-octadecoxyethoxy)ethanol Chemical compound CCCCCCCCCCCCCCCCCCOCCOCCO ILCOCZBHMDEIAI-UHFFFAOYSA-N 0.000 description 2
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 2
- NURQLCJSMXZBPC-UHFFFAOYSA-N 3,4-dimethylpyridine Chemical compound CC1=CC=NC=C1C NURQLCJSMXZBPC-UHFFFAOYSA-N 0.000 description 2
- HWWYDZCSSYKIAD-UHFFFAOYSA-N 3,5-dimethylpyridine Chemical compound CC1=CN=CC(C)=C1 HWWYDZCSSYKIAD-UHFFFAOYSA-N 0.000 description 2
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 2
- UCQABCHSIIXVOY-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]phenoxy]aniline Chemical group NC1=CC=CC(OC=2C=CC(=CC=2)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 UCQABCHSIIXVOY-UHFFFAOYSA-N 0.000 description 2
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical compound CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 description 2
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 2
- HYDATEKARGDBKU-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]phenoxy]aniline Chemical group C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 HYDATEKARGDBKU-UHFFFAOYSA-N 0.000 description 2
- XPAQFJJCWGSXGJ-UHFFFAOYSA-N 4-amino-n-(4-aminophenyl)benzamide Chemical compound C1=CC(N)=CC=C1NC(=O)C1=CC=C(N)C=C1 XPAQFJJCWGSXGJ-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- WPMWEFXCIYCJSA-UHFFFAOYSA-N Tetraethylene glycol monododecyl ether Chemical compound CCCCCCCCCCCCOCCOCCOCCOCCO WPMWEFXCIYCJSA-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- JQVDAXLFBXTEQA-UHFFFAOYSA-N dibutylamine Chemical compound CCCCNCCCC JQVDAXLFBXTEQA-UHFFFAOYSA-N 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 108010025899 gelatin film Proteins 0.000 description 2
- 238000006358 imidation reaction Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 150000004712 monophosphates Chemical class 0.000 description 2
- WRKCIHRWQZQBOL-UHFFFAOYSA-N octyl dihydrogen phosphate Chemical compound CCCCCCCCOP(O)(O)=O WRKCIHRWQZQBOL-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 2
- 230000000930 thermomechanical effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GIWQSPITLQVMSG-UHFFFAOYSA-N 1,2-dimethylimidazole Chemical compound CC1=NC=CN1C GIWQSPITLQVMSG-UHFFFAOYSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- MCTWTZJPVLRJOU-UHFFFAOYSA-N 1-methyl-1H-imidazole Chemical compound CN1C=CN=C1 MCTWTZJPVLRJOU-UHFFFAOYSA-N 0.000 description 1
- CSHOPPGMNYULAD-UHFFFAOYSA-N 1-tridecoxytridecane Chemical compound CCCCCCCCCCCCCOCCCCCCCCCCCCC CSHOPPGMNYULAD-UHFFFAOYSA-N 0.000 description 1
- IEKHISJGRIEHRE-UHFFFAOYSA-N 16-methylheptadecanoic acid;propan-2-ol;titanium Chemical compound [Ti].CC(C)O.CC(C)CCCCCCCCCCCCCCC(O)=O.CC(C)CCCCCCCCCCCCCCC(O)=O.CC(C)CCCCCCCCCCCCCCC(O)=O IEKHISJGRIEHRE-UHFFFAOYSA-N 0.000 description 1
- NOGFHTGYPKWWRX-UHFFFAOYSA-N 2,2,6,6-tetramethyloxan-4-one Chemical compound CC1(C)CC(=O)CC(C)(C)O1 NOGFHTGYPKWWRX-UHFFFAOYSA-N 0.000 description 1
- VOZKAJLKRJDJLL-UHFFFAOYSA-N 2,4-diaminotoluene Chemical compound CC1=CC=C(N)C=C1N VOZKAJLKRJDJLL-UHFFFAOYSA-N 0.000 description 1
- RLYCRLGLCUXUPO-UHFFFAOYSA-N 2,6-diaminotoluene Chemical compound CC1=C(N)C=CC=C1N RLYCRLGLCUXUPO-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- OIALIKXMLIAOSN-UHFFFAOYSA-N 2-Propylpyridine Chemical compound CCCC1=CC=CC=N1 OIALIKXMLIAOSN-UHFFFAOYSA-N 0.000 description 1
- OWAFONKLAVPSGE-UHFFFAOYSA-N 2-[2-(2-hydroxyethoxy)ethoxy]ethyl tridecyl hydrogen phosphate Chemical compound P(=O)(OCCCCCCCCCCCCC)(O)OCCOCCOCCO OWAFONKLAVPSGE-UHFFFAOYSA-N 0.000 description 1
- DVYLAOQBFOJZNX-UHFFFAOYSA-N 2-[2-[2-[2-(2,2-dimethylpropoxy)ethoxy]ethoxy]ethoxy]ethanol Chemical compound CC(C)(C)COCCOCCOCCOCCO DVYLAOQBFOJZNX-UHFFFAOYSA-N 0.000 description 1
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical group C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- SMDGQEQWSSYZKX-UHFFFAOYSA-N 3-(2,3-dicarboxyphenoxy)phthalic acid Chemical compound OC(=O)C1=CC=CC(OC=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O SMDGQEQWSSYZKX-UHFFFAOYSA-N 0.000 description 1
- DFSUKONUQMHUKQ-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phthalic acid Chemical compound OC(=O)C1=CC=CC(C(C=2C(=C(C(O)=O)C=CC=2)C(O)=O)(C(F)(F)F)C(F)(F)F)=C1C(O)=O DFSUKONUQMHUKQ-UHFFFAOYSA-N 0.000 description 1
- PAHZZOIHRHCHTH-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)(C)C1=CC=CC(C(O)=O)=C1C(O)=O PAHZZOIHRHCHTH-UHFFFAOYSA-N 0.000 description 1
- DKKYOQYISDAQER-UHFFFAOYSA-N 3-[3-(3-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=C(OC=3C=C(N)C=CC=3)C=CC=2)=C1 DKKYOQYISDAQER-UHFFFAOYSA-N 0.000 description 1
- FJWUJUIPIZSDTR-UHFFFAOYSA-N 3-[3-[2-[3-(3-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=CC(OC=2C=C(N)C=CC=2)=CC=1C(C)(C)C(C=1)=CC=CC=1OC1=CC=CC(N)=C1 FJWUJUIPIZSDTR-UHFFFAOYSA-N 0.000 description 1
- GZBHMJRTCUJCBO-UHFFFAOYSA-N 3-[3-[3-(3-aminophenoxy)phenoxy]phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=C(OC=3C=C(OC=4C=C(N)C=CC=4)C=CC=3)C=CC=2)=C1 GZBHMJRTCUJCBO-UHFFFAOYSA-N 0.000 description 1
- MFIONUVRAOILLH-UHFFFAOYSA-N 3-[3-[3-(3-aminophenoxy)phenyl]phenoxy]aniline Chemical group NC1=CC=CC(OC=2C=C(C=CC=2)C=2C=C(OC=3C=C(N)C=CC=3)C=CC=2)=C1 MFIONUVRAOILLH-UHFFFAOYSA-N 0.000 description 1
- LBPVOEHZEWAJKQ-UHFFFAOYSA-N 3-[4-(3-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 LBPVOEHZEWAJKQ-UHFFFAOYSA-N 0.000 description 1
- NYRFBMFAUFUULG-UHFFFAOYSA-N 3-[4-[2-[4-(3-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=C(N)C=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=CC(N)=C1 NYRFBMFAUFUULG-UHFFFAOYSA-N 0.000 description 1
- NQZOFDAHZVLQJO-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenoxy]phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(OC=3C=CC(OC=4C=C(N)C=CC=4)=CC=3)=CC=2)=C1 NQZOFDAHZVLQJO-UHFFFAOYSA-N 0.000 description 1
- WCXGOVYROJJXHA-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]sulfonylphenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(=CC=2)S(=O)(=O)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 WCXGOVYROJJXHA-UHFFFAOYSA-N 0.000 description 1
- OXYZDRAJMHGSMW-UHFFFAOYSA-N 3-chloropropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCCCl OXYZDRAJMHGSMW-UHFFFAOYSA-N 0.000 description 1
- ITQTTZVARXURQS-UHFFFAOYSA-N 3-methylpyridine Chemical compound CC1=CC=CN=C1 ITQTTZVARXURQS-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/24—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of indefinite length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C55/00—Shaping by stretching, e.g. drawing through a die; Apparatus therefor
- B29C55/02—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets
- B29C55/04—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets uniaxial, e.g. oblique
- B29C55/08—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets uniaxial, e.g. oblique transverse to the direction of feed
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2079/00—Use of polymers having nitrogen, with or without oxygen or carbon only, in the main chain, not provided for in groups B29K2061/00 - B29K2077/00, as moulding material
- B29K2079/08—PI, i.e. polyimides or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
- C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
- Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
Landscapes
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- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Shaping By String And By Release Of Stress In Plastics And The Like (AREA)
Description
製造されたポリイミド前駆体溶液を支持体上に流延し、これを乾燥して自己支持性フィルムを製造する工程と、
製造された自己支持性フィルムを加熱してポリイミドフィルムを製造する工程と
を有し、
自己支持性フィルムの熱変形開始温度より低い温度では自己支持性フィルムを延伸せず、熱変形開始温度より高い温度で自己支持性フィルムを幅方向に延伸することを特徴とするポリイミドフィルムの製造方法。
幅方向の配向角のバラツキが±10°以内である配向異方性を有することを特徴とするポリイミドフィルム。
(1)ポリアミック酸溶液、またはポリアミック酸溶液に必要に応じてイミド化触媒、有機リン含有化合物、無機微粒子などを選択して加えたポリアミック酸溶液組成物をフィルム状に支持体上に流延し、加熱乾燥して自己支持性フィルムを得た後、熱的に脱水環化、脱溶媒させてポリイミドフィルムを得る方法、
(2)ポリアミック酸溶液に環化触媒及び脱水剤を加え、さらに必要に応じて無機微粒子などを選択して加えたポリアミック酸溶液組成物をフィルム状に支持体上に流延し、化学的に脱水環化させて、必要に応じて加熱乾燥して自己支持性フィルムを得た後、これを加熱脱溶媒、イミド化することによりポリイミドフィルムを得る方法
が挙げられる。
試料長さ:15mm
試料幅:4mm
昇温開始温度:25℃
昇温終了温度:適宜500℃(500℃での保持時間はなし)
昇温速度:20℃/min
測定雰囲気:空気
ここで、Aは、延伸後の製造されたポリイミドフィルムの幅方向の長さ、Bは、延伸前の自己支持性フィルムの幅方向の長さである。
ここで、L1は、220℃でのフィルムの幅方向の長さ、L2は、180℃でのフィルムの幅方向の長さ、Bは、延伸前の自己支持性フィルムの幅方向の長さである。
重合槽に所定量のN,N−ジメチルアセトアミドを加え、次いで略等モルの3,3’,4,4’−ビフェニルテトラカルボン酸二無水物とパラフェニレンジアミンを加えて混合して、ポリマー濃度が18質量%、溶液粘度(測定温度:30℃)が1800ポイズのポリイミド前駆体溶液を得た。
100℃×1分−150℃×1分−170℃×1分−200℃×1分−260℃×1分の加熱時の延伸を表1に示すように変更した以外は実施例1と同様にして、長尺状ポリイミドフィルムを連続的に製造し、配向角のバラツキ、ピンまわりの穴の広がり、および線膨張係数を求めた。結果を表1に示す。
Claims (19)
- テトラカルボン酸成分と、ジアミン成分とを反応させて得られるポリイミドフィルムであって、
幅が1000mm以上であり、
ポリイミドフィルムの幅方向5cm間隔でフィルム面内の各方向の音速を測定し、ピーク角度のTD方向からのズレを求め、その最大値と最小値から求めた幅方向の配向角のバラツキが±10°以内である配向異方性を有し、
幅方向(TD方向)の線膨張係数が長さ方向(MD方向)の線膨張係数よりも小さなMD方向とTD方向の線膨張係数の異方性を有することを特徴とするポリイミドフィルム。 - 幅方向の配向角のバラツキが±5°以内であることを特徴とする請求項1記載のポリイミドフィルム。
- 前記テトラカルボン酸成分が3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を主成分とし、前記ジアミン成分がパラフェニレンジアミンを主成分とすることを特徴とする請求項1または2記載のポリイミドフィルム。
- 前記テトラカルボン酸成分が3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を70モル%以上含み、前記ジアミン成分がパラフェニレンジアミンを70モル%以上含むことを特徴とする請求項1または2記載のポリイミドフィルム。
- ポリイミドフィルムのTD方向の線膨張係数(CTE−TD)とMD方向の線膨張係数(CTE−MD)とが、[(CTE−MD)−(CTE−TD)]>3ppm/℃の関係であることを特徴とする請求項1〜4のいずれか1項に記載のポリイミドフィルム。
- ポリイミドフィルムのMD方向の線膨張係数(50〜200℃)が10〜30ppm/℃であり、TD方向の線膨張係数(50〜200℃)が10ppm/℃未満であることを特徴とする請求項1〜5のいずれか1項に記載のポリイミドフィルム。
- 幅が1500mm以上であることを特徴とする請求項1〜6のいずれか1項に記載のポリイミドフィルム。
- 請求項1〜7のいずれか1項に記載のポリイミドフィルムに、接着剤を介して金属箔を積層してなる金属積層ポリイミドフィルム。
- 請求項1〜7のいずれか1項に記載のポリイミドフィルムに、メタライジング法により金属層を形成してなる金属積層ポリイミドフィルム。
- テトラカルボン酸成分と、ジアミン成分とを溶媒中で反応させて、ポリイミド前駆体の溶液を製造する工程と、
製造されたポリイミド前駆体溶液を支持体上に流延し、これを乾燥して自己支持性フィルムを製造する工程と、
製造された自己支持性フィルムを加熱してポリイミドフィルムを製造する工程と
を有し、
自己支持性フィルムの熱変形開始温度より低い温度では自己支持性フィルムを延伸せず、熱変形開始温度より高い温度で自己支持性フィルムを幅方向に延伸し、且つ
自己支持性フィルムの熱変形開始温度より20〜120℃高い温度領域で、全延伸倍率の25%以上を延伸することにより、
ポリイミドフィルムの幅方向5cm間隔でフィルム面内の各方向の音速を測定し、ピーク角度のTD方向からのズレを求め、その最大値と最小値から求めた幅方向の配向角のバラツキが±10°以内である配向異方性を有し、幅方向(TD方向)の線膨張係数が長さ方向(MD方向)の線膨張係数よりも小さなMD方向とTD方向の線膨張係数の異方性を有するポリイミドフィルムを得ることを特徴とするポリイミドフィルムの製造方法。 - 自己支持性フィルムの熱変形開始温度より50〜90℃高い温度領域で、全延伸倍率の25%以上を延伸することを特徴とする請求項10記載のポリイミドフィルムの製造方法。
- 自己支持性フィルムを、幅方向の両端を把持部材により把持しながら、キュア炉の中を連続して搬送して加熱し、ポリイミドフィルムを製造することを特徴とする請求項10または11記載のポリイミドフィルムの製造方法。
- 前記把持部材が突き刺しピンであることを特徴とする請求項12記載のポリイミドフィルムの製造方法。
- 自己支持性フィルムの熱変形開始温度より低い温度では、自己支持性フィルムの幅方向の両端を把持している把持部材の間隔の拡大量をゼロもしくはマイナスとすることを特徴とする請求項12または13記載のポリイミドフィルムの製造方法。
- 幅方向(TD方向)の全延伸倍率は、1.01〜1.6倍の範囲であることを特徴とする請求項10〜14のいずれか1項に記載のポリイミドフィルムの製造方法。
- ポリイミドフィルムのTD方向の線膨張係数(CTE−TD)とMD方向の線膨張係数(CTE−MD)とが、[(CTE−MD)−(CTE−TD)]>3ppm/℃の関係であることを特徴とする請求項10〜15のいずれか1項に記載のポリイミドフィルムの製造方法。
- ポリイミドフィルムのMD方向の線膨張係数(50〜200℃)が10〜30ppm/℃であり、TD方向の線膨張係数(50〜200℃)が10ppm/℃未満であることを特徴とする請求項10〜16のいずれか1項に記載のポリイミドフィルムの製造方法。
- 幅が1000mm以上であることを特徴とする請求項10〜17のいずれか1項に記載のポリイミドフィルムの製造方法。
- 請求項10〜18のいずれか1項に記載の方法により製造された、幅が1000mm以上であるポリイミドフィルム。
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US8829088B1 (en) * | 2013-04-29 | 2014-09-09 | Xerox Corporation | Fuser member compositions |
CN104151822A (zh) * | 2013-05-14 | 2014-11-19 | 昆山杉木电子科技有限公司 | 一种聚酰亚胺薄膜的制备方法 |
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US9329506B2 (en) * | 2014-03-12 | 2016-05-03 | Xerox Corporation | Alcohol phosphate treated carbon black compositions |
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US9477148B1 (en) * | 2015-05-26 | 2016-10-25 | Industrial Technology Research Institute | Polymer, method for preparing the same, and a photosensitive resin composition thereof |
JP2019090843A (ja) * | 2016-03-31 | 2019-06-13 | コニカミノルタ株式会社 | 光学フィルムの製造方法 |
CN111432999B (zh) * | 2017-12-04 | 2022-04-15 | 可隆工业株式会社 | 聚酰亚胺类膜的制造方法和由此制造的聚酰亚胺类膜 |
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JP2007063417A (ja) * | 2005-08-31 | 2007-03-15 | Fujifilm Corp | フィルムおよびフィルムの製造方法、ガスバリア層付フィルム、透明導電層付フィルム、並びに、画像表示装置 |
JP2008012776A (ja) * | 2006-07-05 | 2008-01-24 | Kaneka Corp | ポリイミドフィルムの製造方法 |
WO2009148060A1 (ja) * | 2008-06-02 | 2009-12-10 | 宇部興産株式会社 | 幅方向の線膨張係数が搬送方向の線膨張係数よりも小さい芳香族ポリイミドフィルムの製造方法 |
JP2011068867A (ja) * | 2009-08-21 | 2011-04-07 | Du Pont Toray Co Ltd | ポリイミドフィルム |
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TWI494207B (zh) | 2015-08-01 |
US20130011651A1 (en) | 2013-01-10 |
WO2011125563A1 (ja) | 2011-10-13 |
TW201208859A (en) | 2012-03-01 |
CN102917859B (zh) | 2015-12-16 |
KR20130025391A (ko) | 2013-03-11 |
JPWO2011125563A1 (ja) | 2013-07-08 |
CN102917859A (zh) | 2013-02-06 |
KR101867107B1 (ko) | 2018-06-12 |
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