JP4739121B2 - Scanning probe microscope - Google Patents

Description

  The present invention relates to a scanning probe microscope that acquires sample information and processes the sample.

Conventionally, a scanning probe microscope such as an atomic force microscope or a scanning tunneling microscope is used to measure a sample such as an electronic material or an organic material generally in a minute region, observe a surface shape of the sample, and acquire physical property information. It has been known.
In addition, since the scanning probe microscope is accurate as a three-dimensional positioning mechanism, it has also been proposed as a processing device for a minute portion utilizing this performance.

As such a processing apparatus (as an application to manipulation of a probe microscope), a so-called AFM tweezer technology is proposed in which a sample is inserted between two probes and the sample is gripped. There are proposed a technique in which two carbon nanotubes are attached on a silicon probe, a technique in which carbon nanotubes are attached to a glass tube, and a technique in which two cantilevers are produced from a silicon substrate by a MEMS process. The former two conventional tweezers are techniques for opening and closing tweezers by applying static electricity between two carbon nanotube probes. The AFM tweezers created by the latter MEMS use a Mems process to create two cantilevers, and use a technique in which a comb-shaped electrostatic actuator is constructed to hold the current. A technique has been proposed in which heat is applied to generate heat to expand the linear expansion of silicon and use it for driving. (See, for example, Patent Document 1)
IEEJ Transactions E IEEJ Trans.SM, Vol 125, No. 11, 2005, Tetsuya Takekawa, Hashiguchihara, Eiichi Minutani, etc.

  The present invention provides a probe structure for performing both operations such as sample observation and processing (appropriately described as “non-observation”), and a scanning probe microscope using the probe structure. This is the issue.

  In order to achieve the above object, a probe structure used in a scanning probe microscope according to the present invention includes at least one observation probe and one or a plurality of non-observation probes. Structure (cantilever array). This is used by being mounted on a scanning probe microscope. In the apparatus, one or a plurality of (including all) probes are simultaneously used in accordance with the purpose of each probe. That is, the observation probe is used for observing the sample (reading information), and the other probes are used according to their respective purposes. In other words, each probe adopts a configuration intended for each, and in order to realize this configuration, each probe is formed into an optimal shape by an optimal manufacturing method using an optimal material.

  This probe structure is extremely important in that it includes a probe for observation purposes in addition to an observation probe. If such a structure is used in a scanning probe microscope, naturally, the scanning probe microscope does not need to be reattached in accordance with the work. This means that there is no detachment of the probe or movement of the sample in switching between observation of the sample and non-observation of the sample (operation such as processing). In other words, in observation and non-observation, the positional relationship between the sample and the probe (probe structure) is not displaced in a strict sense, or non-observation is performed using the sample information obtained by observation. This means that the present invention can be realized for the first time. Therefore, the accuracy of non-observation can be significantly increased as compared with a scanning probe microscope equipped with a conventional non-observation probe.

  It is preferable that one or a plurality (including all) of the probe structures be detachable. Each probe has a lifetime, etc., especially for observation and non-observation probes, because the conditions used are different, such as different methods used and durability, so the usable period may differ. Because there is.

One or a plurality (including all) of the non-observation probes may be, for example, working probes for processing a sample. If the probe has a so-called knife structure, the sample can be cut. In this case, it is possible to cut the sample along with the observation of the sample, preferably using the observation result.
Further, a tweezer structure (a structure capable of performing tweezer work) may be employed. Specifically, it may be configured such that at least one of the observation probes and at least one of the non-observation probes can carry the sample by them. Further, a plurality of non-observation probes may be configured to carry a sample by them.
As described above, when the probe structure according to the present invention is employed, the observation probe and the working probe are integrated, and may be used for each purpose at the same time without replacement or the like. Work).

A scanning probe microscope according to the present invention is an apparatus including the probe structure. This device uses each probe according to its own purpose. For example, an observation probe is used by a known scanning method for observing a sample. In this microscope, the probe structure is preferably removable from the scanning probe microscope. For example, when a so-called knife structure probe is employed as a non-observation probe, this probe is used by a known method for cutting a sample. When a tweezers-type probe group is employed, these probes are used by a known tweezer processing method such as sandwiching part or all of a sample. In other words, the scanning probe microscope has a plurality of probes, that is, a cantilever with a probe, and scans the sample surface with at least one probe (observation probe). It is an apparatus that obtains information such as surface shape information and physical property information of a sample and operates (manipulates) a specific part of the sample with another probe (working probe). Of course, a scanning probe microscope having a probe structure that observes a sample in accordance with the principle of AFM with an observation probe and constitutes an AFM tweezer with a non-observation probe is also a suitable configuration for the technical scope. Including.
Thus, since the scanning probe microscope includes the probe structure and employs a configuration in which the probes are sequentially or simultaneously operated according to the purpose, the above-described operation is achieved.

  The scanning probe microscope preferably controls the positional relationship between the other probe and the sample so that the other probe and the sample do not affect each other when the observation probe is used. The positional relationship between the probe structure and the sample may be controlled. The influence refers to direct effects such as collision between the two and indirect effects due to electromagnetics and interatomic forces, etc., and only one of them may be considered, or a plurality of such effects may be considered. Also good.

In the scanning probe microscope as described above, the probe structure may further have the relative position of another probe substantially fixed with reference to the position of any one observation probe when not in use. . When controlling multiple probes, it is desirable to have a control system that can control the movement of each probe or set of probes so that they are separated from the sample (in the Z-axis direction). Therefore, such a configuration is also preferable. In particular, when the distance between the probes is narrow, if the positional relationship between each probe and the sample is controlled by a single Z-axis direction control system, the microscope / probe structure can be easily manufactured. Naturally, since control becomes easy, substantial feasibility can be improved.
When such a configuration is adopted, in particular, when observing a sample using an observation probe, the probe that is observing the other probe and the sample is not affected. Control means for controlling the relative positional relationship with the sample, that is, the positional relationship between the probe structure and the sample may be provided. This is because it is possible to prevent other probes from affecting each other by being caught on the unevenness of the sample surface, for example, scattering or moving the projections of the sample. Naturally, it is possible to prevent the probe, particularly the probe, from being affected by the unevenness of the sample surface.

  The control means may realize the above-described control by controlling the movement of the probe structure (generally also referred to as fine movement control), or by controlling the movement of a stage (generally also referred to as a sample holder) for supporting the sample. Control may be realized or may be realized by movement control of both. Regardless of which control is performed, so-called position control in the Z-axis direction, which controls the distance between the sample and the probe structure, is the main control. However, as a matter of course, the control means may be able to control the position in the Z-axis direction for each probe or probe set in the probe structure.

In the scanning probe microscope as described above, in particular, in a configuration in which the probe structure includes one observation probe and one non-observation probe, the observation probe is an abbreviation of the probe of each probe. The control means scans substantially parallel to the straight line connecting the tips, and the control means determines whether the non-observation probe is a sample based on the information on the sample (particularly information on the unevenness of the sample surface) obtained using the observation probe. The positional relationship between the sample and the probe structure may be appropriately controlled so that they do not affect each other (for example, collide).
As such a configuration, for example, a displacement detection system such as an optical lever system is attached to one of the two cantilevers and used for observation, for example, the sample is aligned, and the sample is gripped. The side (other) cantilever does not have its own displacement detection system, and naturally includes a configuration in which the sample surface is moved following the observation side probe. In this configuration, the other cantilevers move up and down in synchronization with the observation probe separated from the gap width of the tweezers (generally about 2 to 3 μm). The control means controls the positional relationship between the sample surface and the probe structure when the projection comes under the other cantilever based on the unevenness information of the sample surface in the scanning direction. Do not give influences such as collision with the probe. When a projection (protrusion on the probe side on the sample surface) comes under the observation cantilever, the displacement detection system senses the deflection of the observation cantilever and moves the Z scanner up and down (Z A known response such as avoiding protrusions (by moving the probe structure in the direction) may be performed.

Moreover, the following structure can be mentioned as a suitable example of a control means.
A positional relationship between a probe used for observation and another probe is stored. That is, the coordinates in the XYZ directions of each probe are stored with any one of the probes as a reference. This information is referred to as “probe relative position information” as appropriate.
・ Understanding the uneven shape of the sample surface from the sample surface information created using the observation probe. That is, so-called sample surface information such as unevenness information on the sample surface is grasped (generally input). In addition, although uneven | corrugated shape is repeated, it may be a physical uneven shape, may be a magnetic uneven shape or an electric uneven shape, or may be an uneven shape taking into account a plurality of scales. Good.
Using the probe relative position information and the sample surface information, the relative position on the sample surface at which the probe and the sample that are not used for observation affect each other is determined.
When the target probe is approaching the relative position on the sample surface that is determined to be affected, the relative distance between the probe structure and the sample is controlled so that they do not affect each other. In general, movement in the so-called Z-axis direction is performed to avoid convex portions on the sample surface. However, this may be avoided by movement in the XY plane direction, or may be avoided by movement in the XYZ direction (that is, movement in an oblique direction with respect to the sample surface).
If the above control is performed, even in the scanning probe microscope provided with the probe structure having the above-described configuration, it is effective that the probe and the sample that are not used for observation are affected (has an adverse effect). Can be prevented. In addition, since the above control is performed only in such a case, sample observation using an observation probe can be performed in other portions. In other words, even if a single Z servo system (Z fine movement mechanism) is used, the sample on the substrate is not scattered by the gripping probe. It is also possible to provide a scanning probe microscope capable of accurately observing the area. Naturally, this microscope can grip a predetermined sample very accurately using the result of the sample observation, and becomes a microscope having an AFM tweezers function with extremely good controllability.

  As described above, the term “influence” includes “collision”. Therefore, in the above control example, instead of the position on the sample surface where the probe and the sample that are not used for the observation “influence” each other, the control means determines the position that “collides” with each other, and determines that the collision occurs. Naturally, a configuration is also included in which when the target probe is located at a position on the sample surface, the relative distance between the probe structure and the sample is controlled so that they do not collide with each other. This is emphasized because, in general, when a probe (particularly its probe) collides with a sample, there is a high possibility that at least one of them will have a specific influence or injury.

The present invention includes the above-described configurations in the technical idea, and the following can be given as particularly preferable configurations.
The direction in which the tips of the probes for observation and the arbitrary probe are connected to each other is defined as the scanning direction X, perpendicular to this direction and parallel to the plane when the sample surface is set as a plane. The control unit stores the amount of displacement in the Y direction of each probe with reference to the X axis, and grasps the positional relationship between the probe used for observation and the other probe. Also, the amount of deviation in the Z direction may be stored, and preferably both are stored.
This is also equivalent to grasping the positional relationship of each probe using XYZ coordinates generally defined with reference to the sample surface. In this case, it is preferable that all values of the X coordinate, the Y coordinate, and the Z coordinate are stored and controlled using the values.

・ When observing a sample using an observation probe, the probe of the observation probe is brought close to the sample for each pixel, and the amplitude due to the interaction with the sample is attenuated by the interaction with the sample, and the amplitude is set. Based on the relative distance between the sample and the probe structure when the value falls below the value, information on the height of the sample surface in the pixel is created, and when the control means separates the position of the probe structure from the sample The amplitude of the observation probe is increased according to the distance, and the observation of the sample is continued by the probe.
・ When observing a sample using an observation probe, the probe of the observation probe was brought close to the sample for each pixel, and the deflection when the observation probe contacted the sample surface exceeded the set value. Based on the distance between the sample and the probe structure, information on the height of the sample surface in the pixel is created, and when the control means separates the position of the probe structure and the sample, observation is performed according to the distance. The amplitude of the probe is increased, and observation of the sample is continued by the probe.
In order to avoid the influence of the non-observation probe and the sample by performing such control, the observation probe was used at that time even if the control was performed to increase the distance between the probe structure and the sample. Observation can be performed.

  As is clear from the above description, according to the present invention, there is provided a probe structure for performing both observation and processing of a sample, and a scanning probe microscope using the probe structure. Is possible.

  Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.

<First probe structure and first scanning probe microscope including the same>
[Construction]
A schematic diagram of a first probe structure (cantilever array) according to the present invention is shown in FIG. As shown in FIG. 1, the first probe structure (cantilever array) 1 includes a probe carrier 10 provided with an observation probe 11 and a carrying probe 12 which is a non-observation probe. In the first probe structure 1, both probes 11 and 12 are configured to be detachable from the probe carrier 10. As the desorption mechanism, a well-known desorption mechanism can be appropriately employed.

  The observation probe 11 is a probe for observing sample information, particularly information on the sample surface. In this embodiment, a probe used in the contact mode is employed. The scanning probe microscope equipped with the observation probe 11 is measured by oscillating the observation probe 11, particularly the tip, and measuring changes in the frequency and resonance due to the influence of the sample surface. The shape and state of the sample surface is detected based on the change. As a method for measuring changes in probe vibration, in this embodiment, a so-called optical lever method is used in which light (laser) is applied to the observation probe from the side opposite to the sample and the reflected light is observed. Is adopted.

At least the tip of the carrying probe 12 is brought close to the observation probe 11 side, and a part of the sample, generally a part of the sample surface, is sandwiched between the probes of both probes 11 and 12, and in some cases This is a probe that realizes a so-called AFM tweezer structure in which this portion is lifted or pulled away from the sample. In the present embodiment, in order to realize the AFM tweezer structure, a thermal actuator 13 is provided in the XY plane direction with respect to the carrying probe 12, and at least the tip of the carrying probe 12 is arranged on the observation probe 11 side by the thermal actuator 13. You are approaching and leaving. The observation probe 11 and the carrying probe 12 can be moved to the sample side (in the Z direction) by a known Z-axis fine movement mechanism. In the present embodiment, the Z-axis fine movement mechanism is a mechanism that moves the first probe structure 1 up and down in the Z direction. In other words, by moving the probe carrier 10 in the Z direction, the distance between the observation probe 11 and the carrying probe 12 with the sample is controlled. The observation probe 11 may be moved to the carrying probe 12 side in the XY plane, or the both probes 11 and 12 may be moved closer to each other in the XY plane.
Next, an observation method using the first scanning probe microscope will be described focusing on the control method of the probe structure 1 by the microscope and its control means. In this specification, the control by the “control means” and other controls in the claims are described as controls by the scanning probe microscope, but the essence is not different from the description in the claims. Absent.

[Action]
(Understanding the positional relationship between both probes)
The first scanning probe microscope grasps the positional relationship between the observation probe 11 and the carrying probe 12. Specifically, what is necessary is just to grasp | ascertain both positions (distance and Z-axis height) in XYZ coordinates. Various methods can be adopted as the method of grasping, and for example, the following methods can also be adopted. Of course, it is possible to obtain an accurate positional relationship by combining the following methods and taking the average value.
-From the design information of the first probe structure 1, the positional relationship between the two is grasped (or stored).
-Both states are obtained (or calculated / input) from data (photographs) using SEM or the like.
The distance in the X and Y directions is determined by measuring the alignment sample (board) with the observation probe 11 and then performing the same measurement on the gripping probe 12 and using the sample images obtained from both measurements. The distance between the tips of two probes is grasped (or calculated / input). The height in the Z direction is obtained from the number of pulses of the Z coarse step motor when entering the force area by placing a flat substrate such as a silicon wafer so that there is no tilt, performing Z coarse movement with each probe. You can also.

(Determination of scanning direction)
The first scanning probe microscope determines (or inputs) the scanning direction using the observation probe 11. In this embodiment, the scanning direction is determined so that the grasping probe 12 traces the trajectory of the observation probe 11. Specifically, a direction substantially parallel to a line connecting substantially the tips of the probes of the probes 11 and 12 is defined as a scanning direction.

(Observation / Scanning)
The first scanning probe microscope performs scanning in a contact mode in the scanning direction using the observation probe 11.
The probe 11 for observation changes the bending of the probe (cantilever) according to the unevenness of the sample, and the servo system works. Then, the piezo provided in the Z direction expands and contracts to measure the shape while avoiding the unevenness of the sample.
After the observation probe 11 measures the convex portion of the sample, the time delay until the probe of the gripping probe 12 reaches the convex portion is the distance between the observation probe 11 and the gripping probe 12 and the scanning speed. It is estimated by taking this into consideration. In this estimated time (when the holding probe 12 and the sample are in a positional relationship that is estimated to affect each other, for example), the Z-axis is set only for the time when the gripping probe 12 passes the convex portion. By the fine movement mechanism (Z scanner), the first probe structure is separated from the sample by an amount that the supporting probe 12 does not influence the convex portion. As a result, the non-observation probe and the sample influence each other when observing using the observation probe (during scanning), such as the gripping probe 12 being caught by the convex portion of the sample. Can be prevented.
The above processing will be described in more detail with reference to FIGS. 2 to 4 showing the positional relationship between the probes 11, 12 and the sample S actually produced and measured by the inventors of the present application.

More detailed conditions and data of the structure of the first probe structure actually produced are as follows.
The relative distance between the probes of the probes 11 and 12 (distance in the X-axis direction) was 4 μm.
The observation probe 11 and the gripping probe 12 have different resonance frequencies. Therefore, the observation probe (cantilever) 11 was resonated, the image of the sample S was confirmed, and alignment was performed.
The distance in the Z direction between the surface Ss of the sample S and the probe 11 for observation 11 and the tip 11p of the probe is about the resonance amplitude (A0) of the observation probe 11. Generally, the maximum is about 100 nm.
The gripping probe 12 is approximately this distance (flying height Fd, = A0) from the sample surface Ss. Since the first probe structure has the above-described structure, the carrying probe 12 naturally moves in the Z direction in synchronization with the observation probe 11.
The scanning direction was the left direction indicated by an arrow in the cross-sectional schematic diagram shown in FIG. That is, the observation probe 11 is positioned in front of the traveling direction (scanning direction) in the direction in which both ends of the observation probe 11 and the carrying probe 12 are connected.

  FIG. 2 is a cross-sectional view of the sample S drawn by the observation probe 11 based on the observation result that the height of the convex portion Sr of the sample is Fd or more (in this example, a height of 100 nm or more from Ss). It shows a state. The observation result may be stored as data in which the scanning direction and the height from the sample surface Ss (the height in the Z direction) correspond to each other as shown in FIG. 3, for example. FIG. 3 shows the scanning direction (XY coordinates on the sample surface Ss, X coordinate in this example), the height Dz in the Z direction from the reference plane on the sample surface Ss, and the movement locus (height of the observation probe 11). ) A graph showing the correspondence with Dp. In the first scanning probe microscope, the probe is brought close to the sample surface Ss for each pixel of the image, and the vibration amplitude due to the resonance of the probe 11 becomes the set value of the amplitude attenuation due to the interaction with the sample surface Ss. The Z position information (Z-direction height information) dz of the scanner (of the probe structure 1 / observation probe 11) at the time is acquired, and this information is used to (at the scanning point) the pixel. The height of the sample surface Ss) is determined. After determining the height, the observation probe 11 is lifted from the sample side in the Z direction by a fixed amount D1 (10 nm in this example) and moved to the next pixel. At a point other than the pixel, the probe 11 is retracted over the sample S and moved to the next pixel. If the next pixel is higher than the height D1 plus the height Dz of the previous pixel, that is, if it collides with the protrusion Sr, scanning in the X direction is stopped. Then, the probe carrier 10 is pulled up in the Z direction by a certain amount D1 until it exceeds the protrusion Sr. The first scanning probe microscope acquires the information on the sample surface Ss by repeatedly applying the above processing to each pixel.

  The first scanning probe microscope uses the observation result of the sample surface Ss, the information on the scanning direction described above, and the information on the positional relationship between the probes 11 and 12, and the probe 12 for holding is fixed to the convex portion Sr. After a period of time (after a predetermined amount of scanning), grasp that they will affect each other. In this example, it is determined whether there is a scanning position where the carrying probe 12 and the convex portion Sr collide with each other, and if there is, the position is calculated. If the carrying probe 12 and the convex portion Sr collide, the position of the convex portion Sr on the sample surface Ss is changed, or the probe of the carrying probe 12 is damaged. This is because problems arise. A control example of the carrier probe 12 in this example will be described in more detail with reference to FIG.

  FIG. 4 shows information on the surface of the sample S shown in FIG. 2 (Ss, Sr) measured using the observation probe 11 with the scanning direction (one direction on the XY plane, in this example, the X direction) as the horizontal axis. ) And a graph with the locus Dt of the carrying probe 12 as the vertical axis. The convex part Sr is assumed to have a height Dr and a width in the X direction of Xl. The scanning speed is Vx, and the interval between the probe of the observation probe 11 and the probe of the grasping probe 12 is Pl. Under this condition, after the probe of the observation probe 11 passes the convex portion Sr and the Pl / Vx time elapses, the supporting probe 12, that is, the probe carrier 10 is moved to a height nD1> Dr in the Z direction. The Xl / Vx time scan is performed with the pulling up. When this control is performed, the carrying probe 12 (probe) passes above the convex portion Dr as shown by a broken line Dt in FIG. As a result, the gripping probe 12 (generally a probe) can be prevented from colliding with the projection (projection Sr) of the sample. That is, it is possible to prevent a lateral force (X direction) accompanying the scanning from occurring between the convex portion Sr and the carrying probe 12, for example, a part or all of the convex portion Sr is moved or scattered. Can be prevented.

  A vertical force may be generated between the convex portion Sr and the carrying probe 12. That is, when the spring constant in the Z direction of the probe 12 for holding is set to Kz, a force F of KzDr is generated, which may cause an influence such as collapse of the convex portion Sr when the convex portion Sr is soft. . In order to avoid such a possibility, the height of the tip of the holding probe 12 (tip of the probe / sample side) is increased after Pl / Vx time has elapsed since the observation probe 11 observed the convex portion Sr. , Dr. or more, it may be held for Xl / Vx time.

Thus, the first scanning probe microscope controls one of the two probes, and the other probe is on the sample based on the information on the relative positional relationship from the controlled probe. Avoid obstacles such as protrusions.
That is, when specifying the position of the sample to be gripped, a wide area of the substrate is scanned, and then the predetermined position is zoomed up, the sample is inserted between the two probes, and the gripping probe is moved to grip the sample. Has become practically possible. It provides a practically feasible configuration for constructing a probe carrier that moves the grasping probe following the observation probe, and further allows the sample to be moved by the loading probe during observation. This is because it can be very effectively prevented from moving and scattering. This is because the position at which the probe for gripping and the sample influence each other is predicted using the observation result of the sample, and the probe carrier is pulled up. As a result, it is possible to prevent the state of the sample from being changed by the holding probe after observing with the observation probe, so that the information on the sample can be grasped more accurately, and as a result, a specific part of the sample can be obtained. (Target position) can now be held securely.
In addition, it is possible to provide a substantially realizable configuration in which two or more probes are controlled by one set of Z servo systems (one Z-axis fine movement mechanism).
Next, a second probe structure according to the present invention and a second scanning probe microscope equipped with the same will be described.

<Second probe structure and second scanning probe microscope equipped with the same>
The second probe structure has a structure equivalent to that of the first probe structure, and the second scanning probe microscope basically performs control equivalent to that of the first scanning probe microscope. However, the control method (observation method) of the probe for observation when controlling the carrying probe to pass through the convex part of the sample surface is different as follows. Has an effect.

  When the supporting probe reaches the position where the convex portion exists on the sample, the second scanning probe microscope pulls up the probe carrier to pull up the supporting probe as described above. At this time, the amplitude of the probe for observation is made larger than the amplitude in the scan before avoiding the convex portion. As a result, in the period in which the probe carrier is pulled up higher than usual, it is avoided that the observation becomes impossible by making the amplitude larger than in the normal period. The magnitude of the amplitude may be determined in consideration of the amount required according to the amount of the probe carrier pulled up based on the sample information obtained by the observation probe.

<Third probe structure and third scanning probe microscope equipped with the same>
The third probe structure has a structure equivalent to the first probe structure, and the third scanning probe microscope basically performs the same control as the first scanning probe microscope. The sample observation method using the observation probe is different in that a contact mode is adopted in which the probe tip is always brought into contact with the sample for observation. That is, it is a particularly excellent method in the contact mode.

  In this mode, the scanner (/ probe carrier) when the deflection of the observation probe reaches the set value without pressing the observation probe directly against the sample for each pixel without resonating. The height of the sample at that pixel is determined from the Z position information. This process is performed along the scanning direction (line scanning). By this scanning, the height Dr of the convex portion and the spread Xl in the X direction can be grasped in the same manner as described above. From the grasped result, the scanning speed Vx, and the interval Pl between the probe of the observation probe and the probe of the grasping probe, after the passage of Pl / Vx time after the probe of the observation probe passes the convex portion If the state where the amount of lifting of the probe carrier is set to Dr or more is maintained for Xl / Vx time or more, the probe of the carrying probe can be prevented from physically contacting and colliding with the convex portion. By using such an observation method, it is not necessary to resonate the probe, and it is not necessary to employ a configuration for detecting the frequency or amplitude of the probe. A scanning probe microscope having a simpler configuration can be provided. Further, from the viewpoint of detection accuracy and the like, the scanning probe microscope according to the present embodiment can make the scanning speed faster than the first and second scanning probe microscopes.

  When the carrying probe is pulled up to avoid a collision with the convex portion in the sample, the observation probe is vibrated with a predetermined amplitude as in the second scanning probe microscope. It is preferable that the sample information can be acquired by the probe of the probe.

<Fourth probe structure and fourth scanning probe microscope equipped with the same>
FIG. 5 shows a fourth probe structure. The fourth probe structure 2 is a first probe 21 that is an observation probe (cantilever), a second probe 22 that is a carrying probe, and other non-observation probes, which are predetermined in this example. A third probe 23. . . The structure is such that the (i + 1) -th probe 2 (i + 1) is carried on a probe carrier (cantilever array) 20. Similar to the probes in the first to third probe structures, each probe may be removable from the probe carrier 20 or may be fixed. The interval between the first probe and the second probe, more precisely, the interval between the two probes is Pl1, and the interval between the second probe and the third probe is Pl2. . . Let Pli be the interval between the i-th probe and the i + 1-th probe. The length of each probe was made shorter as the assigned number became larger. That is, the length of the first probe ≧ the second probe ≧. . . . ≧ i-th probe ≧ i + 1-th probe.

The scanning direction is a straight line connecting the probes of the first probe and the second probe. The direction perpendicular to the straight line and parallel to the sample surface (the surface of the sample having an ideal plane) is defined as the Y direction, and the direction perpendicular to X and Y, that is, the vertical direction of the sample surface, is the Z direction. And set. The scanning speed is Vx, the Y-direction scanning line interval is Yl, and the contour is L.
When line scanning is performed with an observation probe (first probe), the height D of the projection (projection) of the sample and the spread Xl in the X direction can be measured in the same manner as described above. After the passage of the observation probe, after the PL1 / Vx time has passed, if the probe carrier is lifted to D or more and held for Xl / Vx time or more, the gripping probe (second probe) Passes above and prevents collisions between the two. A process similar to this is performed at any time between the first probe and the i-th probe. Specifically, for the i-th probe, after the elapse of (ΣPli−1 / Vx) + Round [(Yi / Yl)] * (L / Vx) time, the lifting amount is set to D or more and Xl / Vx time If held above, the i-th probe passes above the convex portion and does not collide with the convex portion, as with the second probe. A function called Round [m] is a function for converting m into an integer.

When the above control is performed, the necessary amount may be raised based on the relative height of each probe. That is, the lifting amount may be changed between the second probe and another probe. Of course, depending on the probe, there is a case where it is not necessary to pull up, and in this case, even if the probe is approaching the convex portion, the probe, that is, the probe carrier may not be lifted.
When the probe carrier is pulled up, the amplitude of the probe may be increased as necessary as compared with the case where the probe carrier is not pulled up, so that the observation probe can obtain the sample information satisfactorily.
It is naturally possible to avoid not only convex portions and the like by control in the Z direction but also comprehensively considering the XY direction and the XYZ direction.

  Each of the above embodiments is not construed as limiting the preferred invention according to the present invention to the above embodiment, but is construed in accordance with the spirit and spirit of the invention disclosed in the application documents. Is. Therefore, for example, the following configurations are naturally included in the technical idea of the present invention.

(A) In an apparatus comprising a plurality of probes, observing the position of a sample on a substrate using an observation probe, and then sequentially performing a specific operation on the sample using a plurality of operation probes. An observation / manufacture scanning probe apparatus having a plurality of probes that perform scanning so that a sample is not affected by a working probe that moves in the XYZ directions in synchronization with the observation probe during observation.

(B) In the observation / manufacture scanning probe apparatus having the plurality of probes described in (a) above, a plurality of features characterized by an observation probe and a tweezers structure that holds a sample with a working probe A scanning probe device for observation and manipulation with a probe.

(C) An observation / manufacture scanning probe apparatus having a plurality of probes as described in (a) above, wherein the working probe has a knife structure in which a sample is cut by a working probe. .

(D) In the apparatus according to any one of the above (a) to (c), the observation is made of a plurality of probes and has a plurality of probes each having an alignment board for measuring the relative positions of the observation probe and the working probe.・ Scanning probe device for manipulation.

(E) In any of the devices (a) to (d) above, a line connecting the probes of the two probes so that the working probe accurately follows the scanning trajectory of the observation probe. A scanning probe apparatus for observation / manipulation having a plurality of probes characterized by scanning in parallel.

(F) In the above apparatus, the Z position of the scanner when the probe is brought close to the sample surface for each pixel and the vibration amplitude due to the resonance of the probe is attenuated by the interaction with the sample surface to reach the set value. Is used to measure the height of the protrusion measured by the observation probe when the gripping probe reaches the protrusion sample. A scanning probe apparatus for observation / manipulation having a plurality of probes characterized in that the holding probe is lifted and the collision with the projection is avoided for a time corresponding to the length and width.

(G) In the apparatus as described above, the probe is brought close to the sample surface for each pixel, and the Z position information of the scanner at the time when the deflection when the observation probe contacts the sample surface reaches the set value is acquired. Using the measurement mode for pixel height information, grasp the shape of the protrusion sample, and then when the gripping probe reaches the protrusion sample, the height and width of the protrusion measured with the observation probe A scanning probe apparatus for observation / manipulation having a plurality of probes characterized in that the gripping probe is lifted for a time corresponding to the above to avoid collision with the projection.

(H) In the apparatus as described above, the first probe (observation probe) and the second probe are connected in order to cause two or more working probes to accurately follow the trajectory of the observation probe. The direction is the scanning direction X, the amount of displacement Yi of the i-th probe from this line in the Y direction is measured, and after the observation probe detects the projection, it is scanned so that the i-th probe does not collide with the projection A scanning probe apparatus for observation and manipulation having a plurality of probes.

Thus, the present invention discloses a cantilever array having at least one observation probe and one or more working probes. In addition, a method for controlling the working probe so that it does not collide with the protrusion of the sample during observation of the sample was also provided. For example, the following controls 1) to 3) are also suitable.
1) Measure the difference in distance and height between the observation probe and the working probe in advance.
2) The scanning direction is determined so that the working probe scans as close as possible to the scanning locus of the observation probe.
3) Before the working probe passes through the protruding portion of the sample, the amount of lifting of the probe is set to be equal to or higher than the protruding portion height, and measurement is performed by lifting.

The 1st figure which showed the structure of the probe structure which concerns on this Embodiment. Sectional drawing which showed typically the relationship between the probe structure shown in FIG. 1, and a sample. The graph for demonstrating the height information of the sample surface which the probe structure shown in FIG. 1 observed, and the moving amount | distance of the Z direction of a probe carrier (carrying probe). The figure which showed the locus | trajectory (control example) of the probe tip of the probe for carrying | support with respect to the sample shown in FIG. The 2nd figure which showed the structure of the probe structure which concerns on this Embodiment. The figure which showed the setting conditions (the length of a probe, a scanning direction) of the probe structure shown in FIG.

Explanation of symbols

  1, 2: Probe structure (cantilever array), 10, 20: Probe carrier, 11, 21: Probe for observation (observation cantilever), 12, 22: Probe for carrying (probe for non-observation, carrying) Cantilever), 13: Actuator, 23, 2i, 2i + 1: Non-observation probe

Claims (10)

1 or 2 or more observation probes, 1 or 2 or more non-observation probes, and a structure supporting the probe, and a sample is observed with the observation probe, and the observation result is used. In the scanning probe microscope, the operation according to the use of the probe by the non-observation probe is controlled by a control means.
The control means determines the relative position of the other probe with respect to the non-use position of any one of the observation probes and the relative position of the observation probe and the other probe at the time of observation. Memorize, from the uneven surface information of the sample surface created using the observation probe, determine the position where the other probe not used for observation and the sample affect each other on the sample surface; A scanning probe microscope characterized by controlling a relative distance between the structure and the sample so as to avoid the influence when the target probe reaches the position. Said control means, instead of the position in the sample surface and the other probe that is not used for the observation and the sample influence each other in the sample surface, determines the position of collision with each other, that to the position The scanning probe microscope according to claim 1 , wherein when a target probe arrives, a relative distance between the structure and the sample is controlled so as to avoid the collision . The direction in which the tips of the probes of the observation probe and the arbitrary probe are connected to each other is defined as the scanning direction X, and is orthogonal to this direction and on a plane parallel to the plane when the sample surface is set as a plane. upon the direction as Y,
It said control means, are stored in the shift amount in the Y direction of each probe relative to the X axis, to claim 1 or 2 to grasp the relative positional relationship between the observation time of the observation probe and other probes of The scanning probe microscope described. The direction in which the tips of the probes of the observation probe and the arbitrary probe are connected to each other is defined as the scanning direction X, and is orthogonal to this direction and on a plane parallel to the plane when the sample surface is set as a plane. the direction and the direction Y, the direction perpendicular to the respective X and Y upon a Z,
Claim wherein the control means, which is offset amount storing shift amount and the Z-direction Y-direction of the probe relative to the X axis, to grasp the positional relationship between the observation time of the observation probe and other probes of The scanning probe microscope according to 1 or 2 . When the observation probe observes, the probe is brought close to the sample for each pixel, the amplitude due to the resonance of the probe is attenuated by the interaction with the sample,
When the attenuation of the amplitude of the observation probe is equal to or less than a set value, the control means obtains information on the height of the surface of the sample in the pixel based on the relative distance between the sample and the structure. 5. The sample is observed with the probe by increasing the amplitude of the observation probe according to the distance when the structure and the sample are separated from each other. scanning probe microscope crab according. When the observation probe observes, the probe is brought close to the sample for each pixel, and is brought into contact with the surface of the sample to cause bending.
When the amount of deflection of the observation probe exceeds a set value, the control means creates information on the height of the surface of the sample in the pixel based on the relative distance between the sample and the structure. and, upon release the position of the sample and the structure, by increasing the amplitude of the probe for observation in accordance with the distance, from claim 1 and performs observation of the sample by the probe 4 A scanning probe microscope according to any one of the above. The scanning probe microscope according to claim 1 , wherein one or more of the observation probe and the non-observation probe are detachable from the structure. Wherein among the probe for non-observation, 1 or 2 or more, scanning probe microscope according to any one of claims 1 to 6 which is a probe for work for performing processing on a sample. The scanning probe microscope according to claim 8, wherein the processing to be performed on the sample is cutting . Scanning probe microscope according to any one the observation probe and the non-observing probe from Claim 1 configured to grip the sample becomes a pair 9 of.

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