JP4711044B2 - Spindle device, processing device and measuring device - Google Patents

Description

  The present invention relates to a spindle device, a machining device, and a measuring device. Specifically, a spindle device that includes a main shaft that is rotatably provided with an axis as a rotation axis, and a processing unit or a measurement unit that is detachably attached to the main shaft, and performs processing of the workpiece or measurement of the measurement target, and the main shaft. The present invention relates to a processing apparatus and a measuring apparatus including the apparatus.

Conventionally, as a mechanism for attaching a tool, for example, a processing tool or a measurement tool, to a main shaft that is rotatably provided, a structure in which a rear portion of the tool is gripped by a collet chuck (for example, see Patent Document 1), or The thing of the structure which grips a tool using the thermal expansion of a main axis | shaft is known (for example, refer patent document 2).
In Patent Document 1, the tool has a pull stud at the rear end, and the main shaft has a collet chuck configured to be able to grip the pull stud. The collet chuck is opened and closed by moving the draw bar back and forth in the axial direction of the main shaft. In order to attach the tool to the main shaft, the pull stud of the tool is inserted into the collet chuck in an open state, and then the collet chuck is closed by the draw bar, and the pull stud is gripped by the collet chuck. Further, if the collet chuck is opened by the draw bar, the tool can be easily detached from the main shaft.
Moreover, in patent document 2, the tool insertion hole for inserting a tool in the front-end | tip of a main axis | shaft is drilled. Since the diameter of the tool insertion hole is finished slightly smaller than the shank diameter of the tool at room temperature, the tool inserted into the tool insertion hole is firmly held by the main shaft. In order to attach and detach the tool, the tip part which is the tool attachment end part of the spindle is heated. The spindle is made of a material having a larger linear expansion coefficient than that of the tool, and when heated to a predetermined temperature, the diameter of the tool insertion hole becomes larger than the shank diameter of the tool. Therefore, the tool can be attached and detached.

Japanese Patent Laying-Open No. 2003-291048 (page 3, FIG. 1) JP 2003-11036 A (page 4, FIG. 1)

In Patent Document 1, in order to attach the tool to the main shaft, it is necessary to provide a collet chuck and a draw bar on the main shaft, and a pull stud on the tool, which incurs a component cost or manufacturing cost, and the structure becomes complicated. There is a problem that it ends up. In particular, when a plurality of types of tools according to the machining purpose are prepared, each tool must be provided with a pull stud, which increases manufacturing costs.
In Patent Document 2, it is necessary to heat and cool the spindle in order to change the tool. That is, first, the spindle is heated to increase the diameter of the tool insertion hole, the tool before replacement is removed, and the tool after replacement is inserted into the tool insertion hole. Thereafter, the spindle is cooled to room temperature, thereby reducing the diameter of the tool insertion hole so that the tool is firmly held by the spindle. In this way, the spindle must be heated and cooled each time the tool is replaced, which is cumbersome and takes time for the replacement work, resulting in poor productivity.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a spindle device capable of simplifying the attaching / detaching mechanism of the machining means or the measuring means, and easily and quickly exchanging the machining means or the measuring means, and a machining apparatus and a measuring apparatus including the spindle device. Is to provide.

The spindle device of the present invention includes a main body, a main shaft that is attached to the main body and is rotatably provided with an axis as a rotation axis, and an exchange member that is detachably attached on the same axis of the main axis. In a spindle device that is one of a processing unit that processes a workpiece and a measurement unit that measures a workpiece, at least one of the opposing end portions of the spindle and the exchange member includes a magnet, said switching member is attached to the main shaft by the magnetic force of the magnet, the main body includes a first outer circumferential member formed over at least the axial portion of the outer peripheral surface of the main shaft, at least the outer peripheral surface of said exchange member and a second outer circumferential member formed to cover the axial portion, the first air bearing for supplying air between an inner circumferential surface of the outer peripheral surface and the first peripheral member of said main shaft are provided, Second air bearing is provided for supplying air between an outer peripheral surface and the inner circumferential surface of the second outer peripheral member of the serial exchange member, wherein the first peripheral member and the vertical for the second peripheral member made up of a series on a bearing An air supply hole is formed extending in the axial direction of the main shaft, and air sent into the bearing vertical air supply hole enters the first air bearing and the second air bearing .

In the present invention, at the same time as the main shaft is rotated, the replacement member attached to the main shaft is rotated. Here, when the replacement member is the processing means, the workpiece is processed, and when the replacement member is the measurement means, the measurement target is measured.
In this invention, a magnetic attraction force is generated by a magnet between the replacement member and the main shaft. Therefore, if the replacement member is brought close to the main shaft to some extent, the replacement member automatically moves to the main shaft by the magnetic attraction force. Adsorbed. Further, in order to remove the replacement member from the main shaft, it is only necessary to apply an external force equal to or greater than the magnetic attraction force to separate them.
As described above, according to the present invention, the replacement member can be attached to and detached from the main shaft only by providing a magnet on at least one of the main shaft and the opposite end of the replacement member. Therefore, the attaching / detaching mechanism can be simplified as compared with the conventional collet chuck mechanism, and the component cost and the manufacturing cost can be reduced. Furthermore, since it is not necessary to heat and cool the spindle when replacing the replacement member as in Patent Document 2, the replacement member can be easily and quickly replaced, and productivity and workability can be improved.

Moreover, in this invention, the main shaft is rotatably supported by the first outer peripheral member. The main shaft is lifted from the inner peripheral surface of the first outer peripheral member by the air supplied from the first air bearing. Therefore, the frictional resistance when the main shaft rotates can be reduced, and the main shaft and thus the replacement member can be rotated smoothly.
Further, by controlling the amount of air supplied from the first air bearing, the pressure, etc., the floating state of the main shaft from the first outer peripheral member can be accurately determined, so the positioning of the main shaft axis (so-called centering) Can be precise. Therefore, according to the present invention, it is possible to provide a spindle device suitable for ultraprecision machining or ultraprecision measurement.

Furthermore, in this invention, the replacement member is rotatably supported by the second outer peripheral member. The replacement member is lifted from the inner peripheral surface of the second outer peripheral member by the air supplied from the second air bearing. Therefore, the frictional resistance when the replacement member rotates can be reduced, and the replacement member, and thus the main shaft can be rotated smoothly.
Further, by controlling the amount of air supplied from the second air bearing, the pressure, and the like, the floating state of the replacement member from the second outer peripheral member can be accurately determined, so that the replacement member can be accurately centered. Therefore, by providing the second air bearing of the present invention in addition to the first air bearing, the spindle and the replacement member can be more accurately centered, and the spindle device is more suitable for ultra-precision machining or ultra-precision measurement. Can provide.

  In the present invention, it is preferable that the second outer peripheral member is detachably attached to the first outer peripheral member.

  In this invention, since the second outer peripheral member can be attached to and detached from the first outer peripheral member, a plurality of different types of second outer peripheral members are prepared, appropriately selected from these, and attached to the first outer peripheral member. be able to. In particular, the second outer peripheral member that best matches the shape of the replacement member can be selected and attached to the first outer peripheral member, so that the replacement member is appropriately rotatably supported by the second outer peripheral member according to this selection. . Therefore, according to this invention, rotation of an exchange member can be performed appropriately and processing and measurement by an exchange member can be performed with high accuracy. Moreover, according to this invention, even if it is an exchange member from which a shape differs mutually by exchanging a 2nd outer peripheral member suitably according to the shape of the exchange member attached to a main axis | shaft, it can process and measure using this. . Therefore, it is possible to provide a highly versatile spindle device that can be operated by attaching various shapes of replacement members.

  In the present invention, a concave portion is provided on one of the main shaft and the replacement member, and a convex portion that is fitted to the concave portion is provided on the other side of the main shaft and the replacement member. It is preferable that at least one of the convex portions is formed on the magnet.

In the spindle device of the present invention, the spindle and the exchange member are coupled by the magnetic force of the magnet, and torque is transmitted between them, so that the spindle and the exchange member are rotated together. .
In the present invention, in particular, in a state where the main shaft and the replacement member are coupled, the concave portion and the convex portion are fitted to each other, and torque is transmitted more appropriately between the main shaft and the replacement member. ing. Therefore, the main shaft and the replacement member can be reliably rotated integrally, and both can be prevented from idling, so that a main shaft device with good operability can be obtained.

  Moreover, in this invention, it is preferable that the turbine blade provided in at least any one of the outer periphery of the said main shaft and the outer periphery of the said replacement member, and the gas spraying means which blows gas to this turbine blade are provided.

  In the present invention, gas energy is converted into rotational power by the turbine blades, and the main shaft and the exchange member coupled to each other by the magnet are rotated integrally.

  Moreover, in this invention, the structure provided with the electric motor which rotates the said main axis | shaft by making the axis line into a rotating shaft may be sufficient.

  In the present invention, the main shaft and the exchange member coupled to each other by the magnet are integrally rotated by the power generated by the electric motor.

Moreover, according to this invention, it is a processing apparatus provided with the said main-axis | shaft apparatus, Comprising: The said exchange member is used as the said process means which processes a workpiece, The processing apparatus characterized by the above-mentioned can be provided.
Since this machining apparatus is provided with the above-described spindle device, the various effects described above can be achieved with respect to this spindle device.

In addition, according to the present invention, there can be provided a measuring apparatus provided with the spindle device, wherein the exchange member is the measuring means for measuring an object to be measured.
Since this measuring apparatus is provided with the above-mentioned main shaft device, the various operational effects described above can be obtained with respect to this main shaft device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First embodiment>
1 to 3 show a spindle device according to a first embodiment of the present invention.
FIG. 1 is a perspective view showing a configuration of the entire spindle device. FIG. 2 is a vertical cross-sectional view when cut along a plane including the axis L of the main shaft 1 of the main shaft device and the pair of turbine vertical air supply holes 324. 3 is a cross-sectional view taken along the line III-III in FIG.
This spindle device is a device that forms part of a machining device such as an NC machine tool. As will be described later, in this spindle device, the tool 2 provided rotatably is rotated to perform processing such as cutting of a workpiece. The spindle device can be moved by one or a plurality (not shown) provided in the machining device, and therefore the tool 2 provided in the spindle device is movable with respect to the workpiece. In such a configuration, the tool 2 is moved along the surface of the workpiece and processed. At this time, the feed speed (moving speed) of the tool 2, the cutting amount, and the like are numerically controlled by an NC device (not shown) so that the machining is appropriately performed.

As shown in FIG. 1, the spindle device includes a spindle 1 that is rotatably provided with an axis L as a rotation axis, and a tool 2 as a processing means attached to the tip of the spindle 1. In this spindle device, the spindle 1 and the tool 2 arranged on the same axis are integrally rotated to process the workpiece. FIG. 1 shows an end mill having a pointed end as an example of the tool 2. The tool 2 can be attached to and detached from the spindle 1, and a tool most suitable for the purpose of machining at that time can be selected from a plurality of types of prepared tools and attached to the spindle 1. For this reason, the tool 2 comprises the exchange member of this invention.
The spindle device also includes a thick, substantially cylindrical housing 3 that is formed to cover the outer periphery of the spindle 1 and the tool 2. The housing 3 constitutes the main body of the present invention, and the first outer peripheral member of the present invention formed to cover at least a part of the outer peripheral surface of the main shaft 1 in the axial direction, and the outer peripheral surface of the tool 2 as an exchange member. The second outer peripheral member of the present invention is formed so as to cover at least a part in the axial direction. Here, the tip end portion of the tool 2 protrudes outside the housing 3, and the tip end portion can be brought into contact with the workpiece to perform processing.

  The main shaft 1 has a substantially cylindrical shape and has a flange portion 11 having a circular cross section formed so as to protrude from the outer peripheral surface thereof. As shown in FIG. 2, a circular hole 12 is formed at the tip of the main shaft 1. Here, the bottom surface of the circular hole 12 is formed of a magnet having a strong magnetic force such as a samarium cobalt magnet or a neodymium magnet.

  The tool 2 is formed in a substantially cylindrical shape having substantially the same diameter as the main shaft 1 and has a processing portion 21 for processing a workpiece at the tip thereof. The processing part 21 is formed in a shape including a tip and a cutting edge according to the processing purpose. A plurality of types of tools 2 having different shapes of the processing parts 21 are prepared, and the tool 2 having the most appropriate processing part 21 is selected according to the processing purpose and attached to the spindle 1 to process the workpiece. Can be done properly.

The tool 2 has a short cylindrical magnet 22 arranged so as to protrude from the rear end face. The magnet 22 is a magnet having a strong magnetic force such as a samarium cobalt magnet or a neodymium magnet, similar to the surface of the circular hole 12 of the main shaft 1. The diameter of the magnet 22 in the cylindrical shape is smaller than the diameter of the circular hole 12 of the main shaft 1. When the rear end of the tool 2 is joined to the front end of the main shaft 1 in order to attach the tool 2 to the main shaft 1, At the same time when the magnet 22 is fitted into the circular hole 12, a gap S is formed between the outer peripheral surface of the magnet 22 and the inner peripheral surface of the circular hole 12. Here, the magnet on the bottom surface of the circular hole 12 and the magnet 22 are formed with magnetic poles so as to attract each other, and when the magnet 22 is fitted into the circular hole 12, both are joined to each other by magnetic attraction. In this way, when the rear end portion of the tool 2 is brought close to the tip end portion of the main shaft 1, both are joined to each other by magnetic force, and the tool 2 is attached to the main shaft 1.
A turbine blade row 23 is provided on the outer periphery near the rear end of the tool 2. As shown in FIG. 3, the turbine blade row 23 is configured by a plurality of turbine blades 23 </ b> A arranged in an annular shape along the outer peripheral surface of the tool 2.

As shown in FIG. 1, the housing 3 includes an inner peripheral housing 31 formed so as to cover the outer periphery of the spindle 1 and the tool 2, and an outer peripheral housing 32 formed so as to cover the outer periphery of the inner peripheral housing 31. It is comprised by two members inside and outside.
The inner peripheral housing 31 has a substantially cylindrical shape with a through hole 311 having a circular cross section formed on the central axis thereof. The main shaft 1 is rotatably accommodated in the upper part (in FIG. 1) of the through hole 311, and the tool 2 is rotatably accommodated in the lower part of the through hole 311. A thrust bearing portion 312 that supports the main shaft 1 so as to be rotatable and not movable in the axial direction is formed on the inner peripheral surface of the upper portion of the through hole 311. The thrust bearing portion 312 supports the flange portion 11 of the main shaft 1 to support the load in the axial direction of the main shaft 1 and prevent the main shaft 1 from being moved in the axial direction.

The inner peripheral housing 31 includes a rotation speed sensor 313 that detects the rotation speed of the tool 2, and a gap sensor 314 that detects a gap between the inner peripheral surface of the inner peripheral housing 31 and the outer peripheral surface of the tool 2. Have
The rotation speed sensor 313 is a capacitance type sensor disposed at a position facing the turbine blade row 23 of the tool 2. Each turbine blade 23A is provided with electrodes, and a capacitor is configured between each of these electrodes and a detection electrode provided in the rotation speed sensor 313. When the turbine blade row 23 is rotated in order to rotate the tool 2, the capacitance of the capacitor is changed, so that the rotation speed of the tool 2 is detected through this change. The rotation speed sensor 313 is not limited to a capacitance type, and may be, for example, a photoelectric type.
The gap sensor 314 is a sensor that senses the posture of the tool 2 through detection of a gap between the inner peripheral surface of the inner peripheral housing 31 and the outer peripheral surface of the tool 2. The gap sensor 314 is disposed near the tip of the inner peripheral housing 31. The detection method of the gap sensor 314 may be a capacitance type or a photoelectric type.

  The outer peripheral housing 32 has a through hole 321 having a circular cross section on the center axis thereof, and has a substantially cylindrical shape concentric with the inner peripheral housing 31. An inner peripheral housing 31 is accommodated in the through hole 321. Here, the inner peripheral surface of the outer peripheral side housing 32 and the outer peripheral surface of the inner peripheral side housing 31 are in close contact with each other, and high airtightness is ensured.

A pair of bearing vertical air supply holes 322 are formed in the outer peripheral side housing 32 at positions symmetrical to the axis L of the main shaft 1. The bearing vertical air supply hole 322 is a hole formed in parallel with the axis L direction.
A plurality (four in FIG. 1) of horizontal holes 323A to 323D are formed in the direction toward the axis L on the side surface of the bearing vertical air supply hole 322. The horizontal holes 323A to 323D are formed in a direction perpendicular to the axis L direction.
The inner peripheral housing 31 has radial bearing air supply holes 315A to 315D formed in the same direction as the horizontal holes 323A to D and smaller in diameter than the horizontal holes 323A to D, continuously from the horizontal holes 323A to 323D. Is done. One end of each of the radial bearing supply holes 315 </ b> A to 315 </ b> D is opened in the horizontal hole 323 </ b> A to D, and the other end is opened in the through hole 311 of the inner peripheral housing 31.

A thrust bearing air supply hole 316A parallel to the direction of the axis L is formed on the side surface of the radial bearing air supply hole 315A formed at a position above (in FIG. 1) the flange 11 of the main shaft 1 (in FIG. 1). It is drilled toward. The other end of the thrust bearing air supply hole 316 </ b> A is opened at a position facing the upper surface (in FIG. 1) of the flange portion 11 of the main shaft 1.
Further, a thrust bearing air supply hole 316B parallel to the direction of the axis L is formed on the side surface of the radial bearing air supply hole 315B formed at a position below (in FIG. 1) the flange portion 11 of the main shaft 1 (FIG. 1). Drilled toward the middle. The other end of the thrust bearing air supply hole 316 </ b> B is opened at a position facing the lower surface (in FIG. 1) of the flange portion 11 of the main shaft 1. The thrust bearing air supply hole 316B is formed on the same extension line as the thrust bearing air supply hole 316A.

In the configuration as described above, when air pressurized by a compressor (not shown) provided above FIG. 1 is sent into the pair of bearing vertical air supply holes 322, the compressed air becomes lateral holes 323A to 323D. , Enters the radial bearing air supply holes 315A to 315D and is sprayed from the other end of the radial bearing air supply holes 315A to 315D to the outer periphery of the spindle 1 and the tool 2. Then, air enters between the outer peripheral surface of the main shaft 1 and the tool 2 and the inner peripheral surface of the inner peripheral housing 31, and the first air bearing and the second air bearing of the present invention are configured. The frictional resistance when rotating is extremely small. Therefore, the rotation of the spindle 1 and the tool 2 can be made smoothly and precisely.
Further, the amount and pressure of pressurized air supplied from the compressor to each bearing vertical air supply hole 322 are numerically controlled by the NC device, so that the air is blown from the radial bearing air supply holes 315C, D to the outer peripheral surface of the tool 2. The pressurized air to be adjusted is adjusted, and the floating state from the inner peripheral surface of the inner peripheral side housing 31 of the tool 2 is strictly determined. Therefore, the centering of the tool 2 can be made precise and a spindle device suitable for ultra-precision machining can be obtained. As shown in FIG. 2, since a gap S is formed between the magnet 22 of the tool 2 and the circular hole of the main shaft 1, the main shaft 1 becomes an obstacle when the tool 2 is centered. There is nothing.

  Since the radial bearing supply holes 315A to 315D have a smaller diameter than the lateral holes 323A to 323D, the air is pressurized when entering the radial bearing supply holes 315A to 315D from the lateral holes 323A to 323D. Therefore, high-pressure air can be blown from the radial bearing supply holes 315A to 315D to the main shaft 1 and the tool 2, and the effect of reducing frictional resistance can be increased.

  On the other hand, a part of the air that has entered the radial bearing air supply hole 315A enters the thrust bearing air supply hole 316A and is blown to the upper surface of the flange portion 11 of the main shaft 1 from the other end. A part of the air that has entered the radial bearing air supply hole 315B enters the thrust bearing air supply hole 316B and is blown to the lower surface of the flange portion 11 from the other end. Then, air enters between the upper and lower surfaces of the flange portion 11 and the thrust bearing portion 312 of the inner peripheral housing 31. The air plays a role of supporting the load in the axial direction of the main shaft 1 and reducing the frictional resistance between the flange portion 11 and the thrust bearing portion 312 when the main shaft 1 is rotated.

As shown in FIG. 2, a pair of vertical air supply holes 324 for the turbine are formed in the outer peripheral side housing 32 at positions symmetrical to the axis L of the main shaft 1. The turbine vertical air supply hole 324 is a hole formed in parallel with the axis L direction.
A lateral hole 325 is bored in the direction toward the axis L on the side surface in the vicinity of the lower end portion (in FIG. 2) of the vertical air supply hole 324 for the turbine. The lateral hole 325 is formed in a direction perpendicular to the axis L direction.
In the inner peripheral housing 31, a turbine horizontal air supply hole 317 that is continuous with the horizontal hole 325 and has the same direction as the horizontal hole 325 and has a smaller diameter than the horizontal hole 325 is formed. One end of the turbine horizontal supply hole 317 is opened in the horizontal hole 325, and the other end is opened at a position facing the turbine blade row 23 of the tool 2.

When air pressurized by a compressor (not shown) provided in the upper part of FIG. 2 is sent into the vertical air supply hole 324 for the turbine, the compressed air passes through the horizontal hole 325 and passes through the horizontal air supply hole 317 for the turbine. The turbine blade row 23 is sprayed from the end. Here, the turbine horizontal supply hole 317 constitutes the gas blowing means of the present invention. The turbine blade row 23 that has received air is rotated as indicated by the arrow in FIG. 3 (in FIG. 3, it is rotated counterclockwise), and the tool 2 is rotated accordingly. Here, since the main shaft 1 and the tool 2 are joined to each other by magnetic force, they are rotated together. Note that the amount and pressure of pressurized air supplied from the compressor are numerically controlled by the NC device, and the rotational speeds of the spindle 1 and the tool 2 are controlled. At this time, since the pressurized air is supplied into the pair of bearing vertical air supply holes 322 as described above, the main shaft 1 and the tool 2 can rotate smoothly with little frictional resistance.
The surface to be processed is processed by bringing the tool 2 thus rotated into contact with the surface to be processed. If an end mill as shown in FIG. 1 is used as the tool 2, the surface to be processed can be cut.
Since the turbine horizontal air supply hole 317 has a smaller diameter than the horizontal hole 325, the air is pressurized when entering the turbine horizontal air supply hole 317 from the horizontal hole 325. Therefore, high-pressure air can be blown from the turbine horizontal supply holes 317 to the turbine blade rows 23, and the turbine blade rows 23 can be efficiently rotated.

  If the rotational speed of the tool 2 detected by the rotational speed sensor 313 deviates from the intended rotational speed during processing of the workpiece, the rotational speed sensor 313 transmits a correction signal to the NC device. To do. The NC device that has received this correction signal automatically corrects numerical information for numerical control as appropriate to correct the amount and pressure of pressurized air supplied from the compressor to the vertical supply holes 324 for the turbines. Is adjusted to the desired rotational speed so that the rotational speed detected by the rotational speed sensor 313 is equal to the intended rotational speed. Thus, since the rotation speed of the tool 2 is always kept at the desired rotation speed, the workpiece can be processed precisely.

  Further, during machining of the workpiece, the posture of the tool 2 may deviate from the intended posture due to the load received from the workpiece, and the machining accuracy may deteriorate due to the tilt of the axis. In particular, when the feed speed or cutting depth of the tool 2 is large, the load applied to the tool 2 from the workpiece increases, and the inclination of the axis of the tool 2 also increases. In addition, when the tool 2 is tilted, the axis L of the main shaft 1 coupled integrally with the tool 2 is also tilted from the intended direction. Thus, when the inclination of the axis of the main shaft 1 and the tool 2 is increased, the outer peripheral surface of the main shaft 1 or the tool 2 may be brought into contact with the inner peripheral surface of the inner peripheral housing 31 and may be worn out. is there.

  On the other hand, in the present embodiment, the tool 2 can be held in a predetermined posture through the gap detection by the gap sensor 314, and the spindle and the tool 2 and the inner peripheral housing 31 can be prevented from being contacted and worn. . That is, when the inclination of the axis of the tool 2 increases and the gap dimension detected by the gap sensor 314 deviates from a predetermined allowable dimension range, the gap sensor 314 transmits a correction signal to the NC device (not shown). . The NC device that has received this correction signal automatically corrects numerical information for numerical control as appropriate, and is supplied from the compressor (not shown) to each bearing vertical air supply hole 322 and sprayed to the outer periphery of the tool 2. The amount or pressure of the pressurized air to be corrected is corrected, or the feed speed or the cutting amount of the tool 2 driven by the drive mechanism is corrected. By this correction, the detection gap dimension in the gap sensor 314 is corrected to a value within the allowable dimension range. Since the allowable dimension range is set in advance so that the spindle 1 and the tool 2 are in the desired posture, according to the above configuration, the posture of the spindle 1 and the tool 2 is maintained in the desired posture. Thus, the machining accuracy can be kept good, and contact between the main shaft 1 and the tool 2 and the inner peripheral housing 31 can be prevented, so that damage can be prevented and high safety can be secured.

  In this embodiment, since a magnetic attraction force is generated between the tool 2 and the main shaft 1, if the tool 2 is brought close to the main shaft 1 to some extent, the tool 2 is automatically generated by this magnetic attraction force. It is attached to the main shaft 1. Further, in order to remove the tool 2 from the main shaft 1, it is only necessary to apply an external force equal to or greater than the magnetic attraction force to separate them. Thus, according to this embodiment, since the tool 2 can be easily attached to and detached from the spindle 1, the tool 2 can be easily and quickly replaced, and productivity and workability can be improved.

<Second embodiment>
Next, a spindle device according to a second embodiment of the present invention will be described.
In addition, about the component which is the same as or corresponds to the component in said 1st embodiment, the code | symbol same as the code | symbol in 1st embodiment is attached | subjected, and the description is abbreviate | omitted or simplified.
4 and 5 show the spindle device according to the present embodiment. FIG. 4 is a vertical cross-sectional view (IV-IV cross-sectional view in FIG. 5) when cut along a plane including the main shaft 1. 5 is a cross-sectional view taken along the line VV in FIG.

The spindle device includes a spindle 1, a tool 2 that is detachably attached to the spindle 1, and a housing 3 that is formed to cover the outer periphery of the spindle 1 and the tool 2.
The main shaft 1 and the tool 2 are coupled to each other by the magnetic force of the magnet 13 provided at the tip (left end in FIG. 4) of the main shaft 1. The rear end portion of the tool 2 is formed of a ferromagnetic material such as a magnet or iron so as to magnetically attract the magnet 13. The magnet 13 is formed with a polygonal hole 131 whose contour is formed in a polygonal shape. This polygonal hole 131 constitutes a recess of the present invention. On the other hand, the rear end of the tool 2 is provided with a polygonal convex portion 24 that is formed in substantially the same shape as the polygonal hole 131 and can be fitted into the polygonal hole 131. When attaching the tool 2 to the main shaft 1, the polygonal hole 131 and the polygonal convex portion 24 are fitted to each other, and both are coupled to each other by the magnetic force of the magnet 13. Since the polygonal hole 131 and the polygonal convex portion 24 are fitted to each other, the transmission of the rotational torque between the main shaft 1 and the tool 2 is favorably performed, so that the main shaft 1 and the tool 2 are idle. And can rotate integrally. Moreover, since the positional relationship of the tool 2 with respect to the spindle 1 is uniquely determined by fitting the polygonal hole 131 and the polygonal convex portion 24 to each other, the positioning of the tool 2 can be made precise and the machining accuracy is improved. it can.

In the first embodiment, the turbine blade row 23 is provided on the outer periphery of the tool 2, but in this embodiment, the turbine blade row 14 is provided on the outer peripheral side surface of the flange portion 11 in the main shaft 1 (FIG. 5). Pressurized air supplied from a compressor (not shown) into the turbine air supply port 33 shown in FIG. 4 enters the air passage 34 formed in a ring shape concentric with the main shaft 1. As shown in FIG. 5, a plurality of (four in FIG. 5) air ejection holes 35 are formed in the side surface of the ring-shaped air passage 34, and the pressurized air is supplied to the turbine blades through the air ejection holes 35. Each turbine blade 14A constituting the row 14 is sprayed. Then, rotational power for rotating the main shaft 1 is generated in the turbine blade row 14, the main shaft 1 is rotated, and the tool 2 that can rotate integrally with the main shaft 1 is also rotated.
At this time, pressurized air is blown to the outer peripheral surface of the main shaft 1 and the tool 2 from each radial bearing air supply hole 315 (see FIG. 4) and each thrust bearing air supply hole 316 to form an air bearing. ing. Therefore, since the spindle 1 and the tool 2 can be rotated in a state where the frictional resistance is remarkably reduced, it is possible to provide a spindle apparatus with good operability. Further, the amount of pressurized air blown from the radial bearing air supply holes 315 to the outer peripheral surface of the main shaft 1 and the tool 2 and the pressure thereof are numerically controlled by the NC device, whereby the inner peripheral surface of the housing 3 of the main shaft 1 and the tool 2 The levitation state from is strictly determined. Therefore, the spindle 1 and the tool 2 can be accurately centered, and a spindle apparatus suitable for ultra-precision machining can be obtained.

As shown in FIG. 4, the housing 3 includes a main shaft housing 3 </ b> A as a first outer peripheral member that covers the outer periphery of the main shaft 1, and a second outer periphery that is detachably attached to the main shaft housing 3 </ b> A and covers the outer periphery of the tool 2. It is comprised by the housing 3B for tools as a member. The main shaft housing 3A has a main shaft storage hole 31A for storing the main shaft 1 therein, and the tool housing 3B has a tool mounting hole 31B for inserting and mounting the tool 2.
In the present embodiment, a plurality of types of tools 2 having different diameters are prepared, and correspondingly, a plurality of types of tool housings 3B having different tool mounting holes 31B are prepared. When processing a workpiece, first, the most appropriate tool 2 is selected in light of the processing purpose, and at the same time, a tool housing 3B having a tool mounting hole 31B diameter suitable for the tool 2 to be selected is selected. To do. Then, the tool housing 3B according to this selection is attached to the spindle housing 3A with screws 36, and then the tool 2 according to this selection is inserted into the tool mounting hole 31B, and the tool 2 is attached to the spindle 1. In this way, the tool 2 is appropriately supported by the tool housing 3B and can rotate smoothly, so that the machining can be performed appropriately.
When the tool 2 is replaced with a tool having a different diameter, the tool housing 3B may be replaced accordingly. As described above, in the spindle device of the present embodiment, the tool 2 having an appropriate diameter can be appropriately selected in processing the workpiece, and thus the usability is good. Further, if the tool housing 3B is appropriately replaced, even tools having different diameters can be processed using them, so that a highly versatile spindle device can be obtained.

<Third embodiment>
Subsequently, as a third embodiment of the present invention, an NC processing machine as a processing apparatus including the spindle device of the present invention will be described. In addition, about the component which is the same as or corresponds to the component in each said embodiment, the code | symbol same as the code | symbol in each said embodiment is attached | subjected, and the description is abbreviate | omitted or simplified.
FIG. 6 is a perspective view showing the NC processing machine according to the present embodiment. In this figure, the spindle device of the present invention is used in a spindle head, which will be described later, indicated by reference numeral 418.

  The NC processing machine 4 according to the present embodiment is a machine tool controlled by an NC device, and includes a base 41, a machine body 411 installed on the base 41, and an NC that controls driving of the machine body 411. Device 43.

  The machine body 411 includes a bed 412 installed on the upper surface of the base 41 via a leveler, a table 413 provided on the upper surface of the bed 412 so as to be movable in the front-rear direction (Y-axis direction), and the bed A pair of columns 414, 415 erected on both sides of 412, a cross rail 416 spanned between the upper portions of both columns 414, 415, and in the left-right direction (X-axis direction) along the cross rail 416 A slider 417 provided movably, a spindle head 418 provided on the slider 417 so as to be movable up and down (Z-axis direction), and a front portion between the columns 414 and 415 are provided so as to cover the inside. A splash guard 419 that can be seen through and can be opened and closed in the vertical direction with the upper end as a fulcrum.

The bed 412 is provided with a Y-axis drive mechanism 421 that moves the table 413 in the Y-axis direction together with a guide (not shown) for guiding the table 413. As the Y-axis drive mechanism 421, a feed screw mechanism including a motor and a feed screw shaft rotated by the motor is used.
Each of the columns 414 and 415 is formed in a substantially triangular shape in which the side surface is wider at the lower part than at the upper part. Thereby, since the lower part has a stable structure, even if the spindle head 418 rotates at high speed, generation of vibration can be reduced.

The cross rail 416 is provided with two guide rails 423 for movably guiding the slider 417 and an X-axis drive mechanism 424 for moving the slider 417 in the X-axis direction.
The slider 417 is provided with a guide (not shown) for guiding the spindle head 418 in the Z-axis direction, and a Z-axis drive mechanism 425 for raising and lowering the spindle head 418 in the Z-axis direction. As for these drive mechanisms 424 and 425, similarly to the Y-axis drive mechanism 421, a feed screw mechanism including a motor and a feed screw shaft rotated by the motor is used.

  The spindle head 418 is constituted by the spindle device of the present invention. The spindle head 418 includes a main shaft 1 (not shown in FIG. 6), and a tool 2 is rotatably attached to the tip of the main shaft 1. The tool 2 and the main shaft 1 are coupled by the magnetic force of a magnet and are configured to be detachable from each other. The main shaft 1 and the tool 2 can be integrally rotated by an air turbine.

  The NC device 43 is a device that drives the X-axis drive mechanism 424, the Y-axis drive mechanism 421, the Z-axis drive mechanism 425, and the spindle head 418 based on an appropriately input machining program.

Next, the operation of this embodiment will be described.
When machining the workpiece, the tool 411 mounted on the spindle 1 is moved while the table 413 and the spindle head 418 (spindle device) are moved relative to each other in the X, Y, and Z axis directions according to a command from the NC device 43. Process the work piece. That is, the table 413 is mounted on the spindle 1 while moving the table 413 in the Y direction via the Y axis drive mechanism 421 and the spindle head 418 in the X and Z axis directions via the X axis drive mechanism 424 and the Z axis drive mechanism 425, respectively. The processed tool 2 is rotated to process the workpiece.

  According to this embodiment, since the spindle device of the present invention is used for the spindle head 418, this spindle device can exhibit the same operations and effects as those described in the above embodiments.

<Fourth embodiment>
Subsequently, as a fourth embodiment of the present invention, a coordinate measuring machine as a measuring apparatus including the spindle device of the present invention will be described. In addition, about the component which is the same as or corresponds to the component in each said embodiment, the code | symbol same as the code | symbol in each said embodiment is attached | subjected, and the description is abbreviate | omitted or simplified.

FIG. 7 is a front view showing the coordinate measuring machine according to the present embodiment.
The coordinate measuring machine 5 according to the present embodiment includes a table 513 and a spindle head 518 that are provided so as to be relatively movable in the X-axis, Y-axis, and Z-axis directions. An object to be measured is placed on the table 513. The spindle device of the present invention is used for the spindle head 518, and a measuring probe 2 as a measuring means is rotatably attached to the tip of the main shaft 1 (not shown in FIG. 7). A plurality of types of measurement probes 2 are prepared in advance, and can be appropriately selected according to the purpose of measurement and attached to the main shaft 1. The main shaft 1 and the measurement probe 2 are coupled to each other by the magnetic force of the magnet, and are configured to be easily attached and detached. That is, when the measuring probe 2 is brought close to the main shaft 1, the two are automatically coupled to each other by magnetic attraction, and when the external probe is pulled by applying an external force greater than the magnetic attraction, they can be easily separated.

  The measurement of the measurement object is performed by bringing the measurement probe 2 into contact with each point on the measurement object while appropriately moving the measurement probe 2 relative to the measurement object, and detecting the position coordinates of each contact point. Done. Here, the measurement probe 2 and the object to be measured can be linearly moved relative to each other by the X-axis, Y-axis, and Z-axis drive mechanisms, and the measurement probe 2 is appropriately rotated by an air turbine or an electric motor. By doing so, the measurement probe 2 and the object to be measured can be relatively moved. The relative movement amounts in the X-axis, Y-axis, and Z-axis directions are detected by a linear scale or the like provided for each direction, and the rotation speed of the measurement probe 2 is, for example, as shown in FIG. It is detected by the rotation speed sensor 313. By appropriately calculating based on these four detected amounts, the position coordinates of the contact point between the measurement probe 2 and the object to be measured can be accurately calculated. Based on this, the surface shape of the object to be measured and the like can be calculated. The measurement can be done properly.

According to the present embodiment, since the measurement probe 2 is configured to be rotatable, the posture of the measurement probe 2 with respect to the object to be measured can be adjusted as appropriate, so that a user-friendly measurement device can be provided. Further, according to the present embodiment, since the spindle device of the present invention is used for the spindle head 518, this spindle device can exhibit the same operations and effects as those described in the above embodiments. .
In the above description, the measurement probe 2 is a contact type, but it may be a non-contact type probe, for example, a probe in an atomic force microscope or an objective lens in a focused displacement detector.

Note that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in each of the embodiments described above, the main shaft 1 and the tool 2 are rotated by blowing air onto the turbine blade row, but the main shaft 1 and the tool 2 are rotated by the rotational power generated by the electric motor. It may be configured.
Here, as the electric motor, an induction motor, a synchronous motor, a high-frequency motor, and the like are suitable, and a rotational speed of 10,000 to 100,000 revolutions per minute or more can be realized.

In the present invention, it is sufficient that the main shaft 1 and the tool 2 are connected by the magnetic force of the magnet, and it is sufficient that the magnet is provided on either the main shaft 1 or the tool 2. Here, either one of the main shaft 1 and the tool 2 does not need to have a magnet, and may be made of a ferromagnetic material such as iron, nickel, or cobalt. In short, what is necessary is just to be comprised with the substance which produces a magnetic attraction between the said magnets.
Here, when only one of the main shaft 1 and the tool 2 includes a magnet, the magnet is preferably provided on the main shaft 1. Since a plurality of types of tools 2 are prepared as described above, if a magnet is provided for each tool 2, the cost is increased accordingly. However, if a magnet is provided for the main shaft 1, only one magnet is required. Can be cheap.
In the present invention, it goes without saying that both the spindle 1 and the tool 2 may be provided with magnets.

  Further, in the second embodiment, the magnet 13 is provided with the contour polygonal hole 131, and the contour polygonal convex portion 24 is provided at the rear end of the tool 2. As a result, the torque is properly transmitted between the main shaft 1 and the tool 2. On the other hand, in the present invention, the contour shape of the hole 131 and the convex portion 24 may be any shape as long as it is not circular, and is not limited to a polygonal shape, and may be, for example, an elliptical shape. Further, even if the contour shapes of the hole 131 and the convex portion 24 are circular, if the center of the circular shape does not coincide with the rotation center of the main shaft 1, that is, the center of the circular shape is the rotation center of the main shaft 1. Is included in the technical scope of the present invention. According to the above configuration, torque is properly transmitted between the spindle 1 and the tool 2 in a state where the hole 131 and the convex portion 24 are fitted, and the spindle 1 and the tool 2 are integrally formed. Can rotate.

Further, in the second embodiment, the protrusion 131 that fits the hole 131 in the magnet 13 and the hole 131 at the rear end of the tool 2 so that torque is properly transmitted between the spindle 1 and the tool 2. In the present invention, instead of providing the hole 131 and the convex portion 24, for example, one surface irregularity of a plane wave shape or a zigzag shape is provided on the surface of the magnet 13 and the rear end of the tool 2 You may provide the other unevenness | corrugation which can be fitted with one unevenness | corrugation.
According to such a configuration, in a state where the main shaft 1 and the tool 2 are coupled, one unevenness on the surface of the magnet 13 and the other unevenness on the rear end of the tool 2 are fitted, and between them Sliding is less likely to occur. Therefore, torque transmission between the main shaft 1 and the tool 2 can be appropriately performed, so that the main shaft 1 and the tool 2 are integrated with each other without causing the main shaft 1 and the tool 2 to idle. It can be rotated automatically and can be made into a spindle device with good operability.
Moreover, since the positional relationship of the tool 2 with respect to the spindle 1 can be uniquely determined by fitting one unevenness on the surface of the magnet 13 with the other unevenness at the rear end of the tool 2, the positioning of the tool 2 can be precisely performed. It is possible to process the workpiece with high accuracy.
On the other hand, in order to precisely position the tool 2, it is not necessary to perform a complicated operation, and it is only necessary to attach the tool 2 to the spindle 1 so that one unevenness and the other unevenness are fitted to each other. Good work can be done easily.
In addition, although the one and the other concavities and convexities were assumed to be a plane wave shape or a zigzag shape, the shape is not limited to this, and any shape may be used as long as torque is properly transmitted between the spindle 1 and the tool 2. But you can.

  In each of the above embodiments, the spindle device has two purposes: the purpose of rotating the turbine cascade and the purpose of configuring the air bearing (air bearing) to smoothly rotate the spindle 1 and the tool 2. Was supplied with pressurized air. Here, if this pressurized air is supplied by a single compressor, there is no need to provide two compressors, so the number of parts can be reduced and an inexpensive spindle device can be provided.

  Further, for example, in the first embodiment, the purpose is to reduce the frictional resistance when the spindle 1 and the tool 2 are rotated, and the spindle 1 and the tool 2 are held in an intended posture to maintain a high machining accuracy. For the two purposes, the pressurized air is blown from the common radial bearing air supply holes 315A to 315D to the outer peripheral surface of the main shaft 1 and the tool 2. However, in the present invention, the air is separately provided for each of the above purposes. These air supply holes may be provided, and pressurized air may be blown from each of the air supply holes. According to such a configuration, the amount or pressure of the pressurized air supplied from the air supply hole for the one purpose and the amount or pressure of the pressurized air supplied from the air supply hole for the other purpose. Can be appropriately set individually by numerical control or the like using an NC device or the like.

  In the second embodiment, the torque transmission unevenness (such as the polygonal hole 131 in FIG. 4) between the main shaft 1 and the tool 2 is formed in the magnet. The unevenness may be formed at a portion where the main shaft 1 and the tool 2 are in contact with each other, and is not necessarily formed on the magnet.

  Moreover, in each said embodiment, although permanent magnets, such as a samarium cobalt magnet, were used as a magnet for joining the main axis | shaft 1 and the tool 2 mutually, an electromagnet may be sufficient in this invention. When the tool 2 is attached to the main shaft 1, an electric current is passed through the electromagnet to generate a magnetic force to join the two, and when the tool 2 is removed from the main shaft 1, the current of the electromagnet is stopped and the two are pulled apart. The tool 2 is attached and detached. According to such a configuration, since no magnetic force is generated when the tool 2 is removed from the main shaft 1, both can be pulled apart with a weak force, and the removal work can be simplified.

  In each of the above embodiments, the air bearing (particularly the hydrostatic bearing) is configured to make the rotation of the main shaft 1 and the tool 2 smooth. However, in the present invention, a magnetic bearing is used instead of the air bearing. May be provided, an air bearing and a magnetic bearing may be used in combination, or an air magnetic composite bearing may be provided.

  In each of the above embodiments, the housing 3 is formed so as to cover the outer peripheral surface of the main shaft 1 and the tool 2, but in the present invention, the housing may be formed so as to cover the outer peripheral surface of the main shaft. It is not necessary to be formed so as to cover the outer peripheral surface of the tool. In such a configuration, the main shaft is rotatably supported by the housing, and the main shaft can be smoothly rotated by an air bearing (air bearing) configured between the main shaft and the housing. Since the main shaft and the tool are rotated integrally, the tool is also rotated smoothly if the main shaft is rotated smoothly. Therefore, the processing accuracy can be kept good.

  The present invention can be used in various machine tools such as a milling machine, a drilling machine, a boring machine or a grinding machine, and also in various shape measuring machines such as a three-dimensional measuring machine having a portal frame and measuring a workpiece. Available.

The perspective view which shows the main axis | shaft apparatus concerning 1st embodiment of this invention. The longitudinal cross-sectional view of the main axis | shaft apparatus concerning said 1st embodiment. The cross-sectional view of the spindle device according to the first embodiment. The longitudinal cross-sectional view which shows the main axis | shaft apparatus concerning 2nd embodiment of this invention. The cross-sectional view of the spindle device according to the second embodiment. The perspective view which shows the NC processing machine concerning 3rd embodiment of this invention. The front view which shows the three-dimensional measuring machine concerning 4th embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Main shaft 2 ... Tool, measurement probe 3 ... Housing 3A ... Main shaft housing 3B ... Tool housing 4 ... NC processing machine 13 ... Magnet 14 ... Turbine blade row 22 ... Magnet 23 ... Turbine blade row 24 ... Polygon convex part 35 ... Air jet holes 131 ... Polygonal holes 315A-D ... Air supply holes for radial bearings 316A, B ... Air supply holes for thrust bearings 317 ... Horizontal air supply holes for turbines 413 ... Tables 418, 518 ... Spindle head

Claims (7)

The body,
A main shaft attached to the main body and rotatably provided with an axis as a rotation axis;
An exchange member detachably mounted on the same axis of the main shaft,
This exchange member is a spindle device that is one of a processing means for processing a workpiece and a measuring means for measuring a measurement object.
At least one of the main shaft and the opposed end of the replacement member includes a magnet,
The replacement member is attached to the main shaft by the magnetic force of the magnet,
The body includes a first outer circumferential member formed over at least the axial portion of the outer peripheral surface of the main shaft, and a second outer circumferential member formed over at least the axial portion of the outer peripheral surface of said exchange member ,
A first air bearing is provided for supplying air between an outer peripheral surface of the main shaft and an inner peripheral surface of the first outer peripheral member;
A second air bearing is provided for supplying air between the outer peripheral surface of the replacement member and the inner peripheral surface of the second outer peripheral member ;
A series of bearing vertical air supply holes formed in the first outer peripheral member and the second outer peripheral member extend in the axial direction of the main shaft, and the air fed into the bearing vertical air supply holes is the first air. A main shaft device entering the bearing and the second air bearing . The spindle device according to claim 1,
The main shaft device, wherein the second outer peripheral member is detachably attached to the first outer peripheral member. The spindle device according to claim 1 or 2,
One of the main shaft and the replacement member is provided with a recess,
The other side of the main shaft and the replacement member is provided with a convex portion to be fitted with the concave portion,
At least one of the concave portion and the convex portion is formed on the magnet. The spindle device according to any one of claims 1 to 3,
A turbine blade provided on at least one of the outer periphery of the main shaft and the outer periphery of the replacement member;
Gas blowing means for blowing gas to the turbine blades;
Is provided with a spindle device. The spindle device according to any one of claims 1 to 3,
A main shaft device, characterized in that an electric motor is provided for rotating the main shaft about its axis as a rotation axis. A machining apparatus comprising the spindle device according to any one of claims 1 to 5,
The processing apparatus, wherein the replacement member is the processing means for processing a workpiece. A measuring device comprising the spindle device according to any one of claims 1 to 5,
The measuring apparatus, wherein the exchange member is the measuring means for measuring an object to be measured.

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