JP4646055B2 - Tantalum oxide sol and method for producing the same - Google Patents

Tantalum oxide sol and method for producing the same Download PDF

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JP4646055B2
JP4646055B2 JP2004305867A JP2004305867A JP4646055B2 JP 4646055 B2 JP4646055 B2 JP 4646055B2 JP 2004305867 A JP2004305867 A JP 2004305867A JP 2004305867 A JP2004305867 A JP 2004305867A JP 4646055 B2 JP4646055 B2 JP 4646055B2
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勇 山口
裕之 井筒
武利 黒田
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Taki Kasei Co Ltd
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本発明は、酸化タンタルゾル及びその製造方法に関する。更に詳しくはクエン酸、酒石酸及びリンゴ酸から選ばれた1種以上のオキシカルボン酸によって安定化された新規な酸化タンタルゾル及びその製造方法に関する。   The present invention relates to a tantalum oxide sol and a method for producing the same. More specifically, the present invention relates to a novel tantalum oxide sol stabilized by one or more oxycarboxylic acids selected from citric acid, tartaric acid and malic acid, and a method for producing the same.

近年、オプトエレクトロニクス材料をはじめ、半導体材料、反射防止材、屈折率調整材料、高屈折率レンズ、防錆材料、電極材料、触媒、機能性塗料等の様々な用途に酸化タンタルを使用する需要が高まっており、殊にこれら材料の微細化、高性能化の要求から粒子径が小さく、均一な粒度分布を有する酸化タンタル原料が要望されている。
このような要望に応じるべく粒子径数十nm以下の酸化タンタルゾルを提供する技術が開発されている。例えば、本願出願人は、各種用途に使用できるシュウ酸安定型酸化タンタルゾルに関する技術を開発し、先に出願を行なった(例えば特許文献1参照)。
In recent years, there has been a demand for using tantalum oxide in various applications such as optoelectronic materials, semiconductor materials, antireflection materials, refractive index adjusting materials, high refractive index lenses, rust prevention materials, electrode materials, catalysts, functional paints, etc. In particular, there is a demand for a tantalum oxide raw material having a small particle size and a uniform particle size distribution because of demands for finer and higher performance of these materials.
In order to meet such a demand, a technique for providing a tantalum oxide sol having a particle diameter of several tens of nanometers or less has been developed. For example, the applicant of the present application has developed a technology related to an oxalic acid-stable tantalum oxide sol that can be used for various applications, and filed an application first (see, for example, Patent Document 1).

特許文献1記載の発明は、活性な水酸化タンタル化合物に、シュウ酸をシュウ酸/Taモル比5〜30の範囲となるように添加し、加熱反応を行なうことにより、シュウ酸とタンタル酸化物がシュウ酸/Taモル比0.5〜5.0の範囲で構成される粒子径50nm以下の酸化タンタルゾルを得るものである。しかしながら、このゾルはシュウ酸で安定化しているため、シュウ酸は劇物であるとの理由からその使用が制限されている。一方、製造面から云えば水酸化タンタルの解膠に多量のシュウ酸を必要とし、反応後、多量のシュウ酸が系外に排出されるためその処理に多大な費用がかかり、シュウ酸を用いない酸化タンタルゾルの出現が強く要望されているのが現状である。 In the invention described in Patent Document 1, oxalic acid is added to an active tantalum hydroxide compound so that the oxalic acid / Ta 2 O 5 molar ratio is in the range of 5 to 30 and a heating reaction is performed. A tantalum oxide sol having a particle diameter of 50 nm or less, in which the tantalum oxide is in the range of oxalic acid / Ta 2 O 5 molar ratio 0.5 to 5.0, is obtained. However, since the sol is stabilized with oxalic acid, its use is limited because it is a deleterious substance. On the other hand, from the viewpoint of production, a large amount of oxalic acid is required for peptization of tantalum hydroxide, and after the reaction, a large amount of oxalic acid is discharged out of the system. At present, there is a strong demand for the appearance of tantalum oxide sols.

特開平8−143315号公報JP-A-8-143315

本発明者らは、上述のような現状に鑑み、シュウ酸を用いない酸化タンタルゾルについて鋭意検討を重ねた結果、ある特定のオキシカルボン酸の存在下でタンタルのフッ化水素酸溶液とアルカリ溶液を反応させることにより、粒子径が小さく、均一な粒度分布を有する新規な酸化タンタルゾルが得られることを見出し、係る知見に基づき本発明を完成させるに至ったものである。   In view of the above situation, the present inventors have conducted extensive studies on a tantalum oxide sol that does not use oxalic acid. As a result, a hydrofluoric acid solution and an alkali solution of tantalum in the presence of a specific oxycarboxylic acid are obtained. As a result of the reaction, it has been found that a novel tantalum oxide sol having a small particle size and a uniform particle size distribution can be obtained, and the present invention has been completed based on such knowledge.

即ち、本発明はクエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸の存在下で、Ta濃度として0.05〜5質量%のタンタルのフッ化水素酸溶液とアルカリ溶液を反応させ、反応後のpHが7以上となることを特徴とする酸化タンタルゾルの製造方法に関する。但し、オキシカルボン酸の存在量は、タンタルのフッ化水素酸溶液に対して、オキシカルボン酸/Ta(モル比)として0.05〜10の範囲である。

That is, the present invention is click-enoic acid, in the presence of at least one hydroxycarboxylic acid selected from tartaric acid and malic acid, and hydrofluoric acid solution of 0.05 to 5 wt% of tantalum Ta 2 O 5 concentration The present invention relates to a method for producing a tantalum oxide sol, wherein an alkaline solution is reacted and the pH after the reaction is 7 or more. However, the abundance of oxycarboxylic acid is in the range of 0.05 to 10 as oxycarboxylic acid / Ta 2 O 5 (molar ratio) with respect to the tantalum hydrofluoric acid solution.

本発明のクエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸で安定化された酸化タンタルゾルは、劇物であるシュウ酸を含まないので、工業的生産が容易であり、且つ各種材料の原料として特に限定されず使用することができる利点を有する。また、反応時のオキシカルボン酸の使用量を調整することにより粒子径を調整することができ、粒子径の小さな、均一な粒度分布を有する酸化タンタルゾルを得ることができる。   The tantalum oxide sol stabilized with at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid of the present invention does not contain oxalic acid, which is a deleterious substance, and thus is easily industrially produced. There is an advantage that it can be used without being particularly limited as a raw material of the material. Further, the particle diameter can be adjusted by adjusting the amount of oxycarboxylic acid used in the reaction, and a tantalum oxide sol having a small particle diameter and a uniform particle size distribution can be obtained.

先ず、本発明のクエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸をオキシカルボン酸/Ta(モル比)0.05〜10の範囲で含有してなる酸化タンタルゾルについて詳述する。本発明の酸化タンタルゾルは、酸化タンタルの粒子がクエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸と強固に結合することにより安定化された新規なゾルである。ところで、本発明の酸化タンタルゾルとは、Taに限定するものでなく、水酸化タンタル又は一部が水和された状態のゾルを意味する。以下、本発明のゾルを更に説明するため、具体例を用いて説明する。 First, a tantalum oxide sol containing at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid of the present invention in the range of oxycarboxylic acid / Ta 2 O 5 (molar ratio) 0.05-10. Detailed description. The tantalum oxide sol of the present invention is a novel sol that is stabilized by firmly bonding tantalum oxide particles with at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid. By the way, the tantalum oxide sol of the present invention is not limited to Ta 2 O 5 but means tantalum hydroxide or a partially hydrated sol. Hereinafter, in order to further explain the sol of the present invention, a specific example will be used.

「具体例1」
酸化タンタル(純度Ta99.995質量%)(多木化学(株)製)50gをフッ化水素酸(HF10質量%)525gに溶解した後、純水9,425gを添加しTa0.5質量%のタンタルのフッ化水素酸溶液を得た。この溶液にクエン酸/Taモル比4.0となるようにクエン酸・一水和物(和光純薬工業(株)製)95gを添加し、完全に溶解した。この溶液を攪拌下でアンモニア水(NH1.0質量%)7,216gに60分間で添加した。添加終了後、限外濾過モジュール(旭化成工業製SLP−1053)を使用し、ろ液の電気伝導度が20mS/mになるまで洗浄し、不純物の除去を行い、本発明のゾルを得た。得られたゾルの組成分析を行い、その結果を表1に示した。
"Example 1"
After dissolving 50 g of tantalum oxide (purity Ta 2 O 5 99.995 mass%) (manufactured by Taki Chemical Co., Ltd.) in 525 g of hydrofluoric acid (HF 10 mass%), 9,425 g of pure water was added and Ta 2 was added. A hydrofluoric acid solution of 0.5 mass% O 5 tantalum was obtained. To this solution, 95 g of citric acid / monohydrate (manufactured by Wako Pure Chemical Industries, Ltd.) was added so as to give a citric acid / Ta 2 O 5 molar ratio of 4.0 and completely dissolved. This solution was added to ammonia water (1.0 mass% of NH 3 ) 7,216 g with stirring for 60 minutes. After completion of the addition, an ultrafiltration module (SLP-1053 manufactured by Asahi Kasei Kogyo Co., Ltd.) was used, and the filtrate was washed until the electrical conductivity reached 20 mS / m to remove impurities, thereby obtaining the sol of the present invention. The composition analysis of the obtained sol was performed, and the results are shown in Table 1.

「具体例2、3」
具体例1のクエン酸・一水和物に代え、酒石酸(和光純薬工業(株)製)67.9g(具体例2)、リンゴ酸(和光純薬工業(株)製)60.6g(具体例3)を用いてアンモニア水(NH1.0質量%)6,447gに添加し、同様に本発明のゾルを得た。得られたゾルの組成分析を行い、その結果を表1に示した。
"Specific examples 2 and 3"
Instead of the citric acid monohydrate of Example 1, 67.9 g of tartaric acid (manufactured by Wako Pure Chemical Industries, Ltd.) (specific example 2), 60.6 g of malic acid (manufactured by Wako Pure Chemical Industries, Ltd.) ( Using Example 3), it was added to 6,447 g of ammonia water (NH 3 1.0% by mass) to obtain a sol of the present invention in the same manner. The composition analysis of the obtained sol was performed, and the results are shown in Table 1.

「比較例1」
具体例1のクエン酸に代え、乳酸(和光純薬工業(株)製)40.7gを用いて同様にアンモニア水(NH1.0質量%)5,678gに添加したが、凝集沈殿物が生成し、白濁しゾルを得ることはできなかった。その結果を表1に示した。
"Comparative Example 1"
In place of the citric acid in Example 1, 40.7 g of lactic acid (manufactured by Wako Pure Chemical Industries, Ltd.) was used and added to 5,678 g of ammonia water (NH 3 1.0% by mass) in the same manner. Produced and became cloudy, and a sol could not be obtained. The results are shown in Table 1.

「比較例2」
具体例1のクエン酸に代え、シュウ酸二水和物(和光純薬工業(株)製)57.0gを用いて同様にアンモニア水(NH1.0質量%)6,447gに添加したが、添加時直ちに凝集沈殿物が生成し、白濁しゾルを得ることはできなかった。その結果を表1に示した。
"Comparative Example 2"
In place of the citric acid of Example 1, oxalic acid dihydrate (manufactured by Wako Pure Chemical Industries, Ltd.) 57.0 g was similarly added to ammonia solution (NH 3 1.0 mass%) 6,447 g. However, immediately after the addition, an aggregated precipitate was formed and became cloudy and a sol could not be obtained. The results are shown in Table 1.

Figure 0004646055
Figure 0004646055

具体例1〜3で得たゾルを30℃で30日間静置した後,ゾルの状態を観察した結果、これら本発明のゾルは、30日後に於いても沈殿の生成は見られず、安定な溶液状を呈していた。   As a result of observing the state of the sol after leaving the sol obtained in Examples 1 to 3 at 30 ° C. for 30 days, these sols of the present invention showed no formation of precipitates even after 30 days and were stable. The solution was present.

本発明の酸化タンタルゾルの特徴を述べれば次の通りである。本発明のゾルは有機酸種であるオキシカルボン酸のうち、クエン酸、酒石酸及びリンゴ酸で安定化されたもののみが均一で安定性の高いゾルを得ることができ、同じオキシカルボン酸でも乳酸ではゾルを得ることはできない。また、従来の酸化タンタルゾルの製法において有効であったシュウ酸は、そのメカニズムについては定かでないが、本発明では使用することができなく、これまで問題になっていた劇物であるシュウ酸を含まないので製造上及び使用上非常に有意義なゾルである。更に述べれば、シュウ酸を使用した従来の酸化タンタルゾルは、その安定化のためシュウ酸/Taモル比0.5以上のシュウ酸が必要であったが、本発明のゾルは、限外濾過装置等を用いることにより、上記オキシカルボン酸の含有量をオキシカルボン酸/Ta(モル比)0.5以下に少なくすることができる。本発明の如きオキシカルボン酸を低減したゾルは、耐水性のコーティング剤や残留カーボンを低減させたい用途に特に有用である。 The characteristics of the tantalum oxide sol of the present invention will be described as follows. In the sol of the present invention, among oxycarboxylic acids which are organic acid species, only those stabilized with citric acid, tartaric acid and malic acid can obtain a uniform and highly stable sol. So you can't get a sol. Also, oxalic acid that was effective in the conventional tantalum oxide sol manufacturing method is not clear about its mechanism, but it cannot be used in the present invention, and contains oxalic acid, which is a deleterious substance that has been a problem until now. Therefore, it is a very significant sol in terms of production and use. More specifically, the conventional tantalum oxide sol using oxalic acid required oxalic acid with an oxalic acid / Ta 2 O 5 molar ratio of 0.5 or more for stabilization, but the sol of the present invention is limited. By using an external filtration device or the like, the content of the oxycarboxylic acid can be reduced to oxycarboxylic acid / Ta 2 O 5 (molar ratio) of 0.5 or less. The sol with reduced oxycarboxylic acid as in the present invention is particularly useful for water-resistant coating agents and applications where it is desired to reduce residual carbon.

尚、本発明の酸化タンタルゾルの粒子径に関しては、使用するタンタルのフッ化水素酸溶液やアルカリ溶液の濃度をはじめ、クエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸の使用量に応じて調整することができ、数nm〜800nmの範囲内で任意の粒子径を有する酸化タンタルゾルを提供することができる優れた特徴を有する。例えば、粒子径の小さなタンタルゾルを得たい場合、Taに対するオキシカルボン酸の量を増大させることにより、具体的には10nm以下にすることもでき、このような粒子径の小さなゾルは、外観的には透明であり、薄膜として利用した場合、濁りのない膜を提供することができる。 As for the particle size of the tantalum oxide sol of the present invention, the amount of at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid, as well as the concentration of the tantalum hydrofluoric acid solution and alkali solution used. The tantalum oxide sol having an arbitrary particle size within a range of several nm to 800 nm can be provided. For example, when it is desired to obtain a tantalum sol having a small particle size, it can be specifically reduced to 10 nm or less by increasing the amount of oxycarboxylic acid relative to Ta 2 O 5 . It is transparent in appearance, and when used as a thin film, a film without turbidity can be provided.

次に、本発明の酸化タンタルゾルの製造方法について詳記する。本発明のゾルの製造方法は、クエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸の存在下でタンタルのフッ化水素酸溶液とアルカリ溶液を反応させることを特徴とし、本発明の特筆すべきことは、従来技術からは全く予期することができなかった驚くべき簡単な方法で酸化タンタルゾルを製造できることである。   Next, the method for producing the tantalum oxide sol of the present invention will be described in detail. The sol production method of the present invention is characterized by reacting a hydrofluoric acid solution of tantalum with an alkaline solution in the presence of at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid. What is noteworthy is that the tantalum oxide sol can be produced in a surprisingly simple manner that could not have been anticipated from the prior art.

本発明で使用するタンタルのフッ化水素酸溶液としては、タンタルのフッ化水素酸又はフッ化水素酸と鉱酸の混酸溶液であり、例えば水酸化タンタル、酸化タンタル、塩化タンタル等のタンタル塩等を原料として利用し、これをフッ化水素酸又はフッ化水素酸と鉱酸の混酸溶液で分解溶解した溶液を用いることができる。また、タンタル鉱石を混酸で溶解せしめ、抽出したタンタルのフッ化水素酸溶液も用いることができる。このタンタルのフッ化水素酸溶液の濃度に関しては、Ta濃度として0.05〜5質量%の範囲で反応に供すればよい。下限を下廻ると反応容積が過大となり、生産効率が低下し、且つ製造時の排水量が多くなり工業的生産に於いては、経済的でない。一方上限を超えると中和時に生成するタンタルの水和物の凝集が強くなるため凝集沈殿を起こしやすくなり、安定なゾルを製造することができない。尚、タンタル溶解に使用するフッ化水素酸濃度に関して云えば、フッ化水素酸単独の場合はHFとして 1〜70質量%が良い。また、フッ化水素酸と鉱酸の混酸の場合は、鉱酸1モルに対してフッ化水素酸5モル以上使用し、混酸中のフッ化水素酸濃度は、HFとして1〜60質量%が良い。 The hydrofluoric acid solution of tantalum used in the present invention is a hydrofluoric acid of tantalum or a mixed acid solution of hydrofluoric acid and mineral acid, such as a tantalum salt such as tantalum hydroxide, tantalum oxide, tantalum chloride, etc. Can be used as a raw material, and a solution obtained by decomposing and dissolving this with hydrofluoric acid or a mixed acid solution of hydrofluoric acid and mineral acid can be used. Moreover, a hydrofluoric acid solution of tantalum ore extracted by dissolving tantalum ore with a mixed acid can also be used. Regarding the concentration of the tantalum hydrofluoric acid solution, the Ta 2 O 5 concentration may be used in the range of 0.05 to 5% by mass. Below the lower limit, the reaction volume becomes excessive, the production efficiency decreases, and the amount of waste water during production increases, which is not economical in industrial production. On the other hand, when the upper limit is exceeded, aggregation of the tantalum hydrate produced during neutralization becomes strong, and aggregation precipitation is likely to occur, and a stable sol cannot be produced. Regarding the concentration of hydrofluoric acid used for dissolving tantalum, 1 to 70% by mass as HF is preferable in the case of hydrofluoric acid alone. In the case of a mixed acid of hydrofluoric acid and mineral acid, 5 mol or more of hydrofluoric acid is used per 1 mol of mineral acid, and the hydrofluoric acid concentration in the mixed acid is 1 to 60% by mass as HF. good.

また、本発明で使用するアルカリ溶液としては、タンタルのフッ化水素酸溶液と反応して酸化タンタルを形成するものであれば特段限定されないが、アンモニア水、ナトリウム、カリウム等のアルカリ金属の水酸化物、カルシウム等のアルカリ土類金属の水酸化物等の水溶液等を例示することができる。このアルカリ溶液の濃度に関しては、使用するタンタルのフッ化水素酸溶液の種類、酸濃度、使用するアルカリ溶液の種類をはじめ、中和時に共存させるオキシカルボン酸の種類等によって特定できないが、大略0.05〜5質量%の範囲で反応に供すればよい。アルカリ溶液の使用量について云えば、タンタルのフッ化水素酸溶液が充分中和反応するだけ必要であり、反応後のpHが7以上となる必要がある。pHが7以下の場合、タンタルはイオン化したまま存在し、ゾルの形態をとることができないため収率が低下する。具体的に述べれば、クエン酸の存在下でタンタルのフッ化水素酸溶液とアンモニア水を反応させる場合は、(アンモニアのモル数)/(フッ化水素酸のモル数+クエン酸のモル数×3)が1以上必要である。   The alkali solution used in the present invention is not particularly limited as long as it reacts with a tantalum hydrofluoric acid solution to form tantalum oxide, but is not limited to hydroxide of alkali metal such as aqueous ammonia, sodium, potassium, etc. And aqueous solutions of alkaline earth metal hydroxides such as calcium and the like. The concentration of this alkaline solution cannot be specified by the type of tantalum hydrofluoric acid solution used, the acid concentration, the type of alkaline solution used, the type of oxycarboxylic acid that coexists during neutralization, etc. What is necessary is just to use for reaction in the range of 0.05-5 mass%. Regarding the amount of the alkaline solution used, it is necessary that the tantalum hydrofluoric acid solution is sufficiently neutralized, and the pH after the reaction needs to be 7 or more. When the pH is 7 or less, tantalum exists in an ionized state and cannot be in the form of a sol, resulting in a decrease in yield. Specifically, when the tantalum hydrofluoric acid solution and aqueous ammonia are reacted in the presence of citric acid, the number of moles of ammonia / (number of moles of hydrofluoric acid + number of moles of citric acid × 3) 1 or more is required.

本発明は、次いでクエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸の存在下で、上述の如き調整したタンタルのフッ化水素酸溶液とアルカリ溶液を反応に供する。本発明に使用するオキシカルボン酸としては、クエン酸、酒石酸及びリンゴ酸及びこれらの水溶性塩が望ましく、例えばクエン酸、酒石酸、リンゴ酸及びこれらのアンモニウム塩やナトリウム塩等を例示することができる。クエン酸、酒石酸及びリンゴ酸及びこれらの水溶性塩から選ばれた少なくとも一種を使用することは殊に重要であり、これら以外の乳酸やグリコール酸等のオキシカルボン酸及びこれらの塩やこれまで提案されているシュウ酸等のカルボン酸及びこれらの塩では本発明のゾルを得ることはできない。   In the present invention, in the presence of at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid, the prepared tantalum hydrofluoric acid solution and alkali solution are then subjected to the reaction. As the oxycarboxylic acid used in the present invention, citric acid, tartaric acid, malic acid, and water-soluble salts thereof are desirable, and examples thereof include citric acid, tartaric acid, malic acid, and ammonium salts and sodium salts thereof. . It is particularly important to use at least one selected from citric acid, tartaric acid and malic acid and their water-soluble salts. Other than these, oxycarboxylic acids such as lactic acid and glycolic acid, and salts thereof and proposals so far The sol of the present invention cannot be obtained with carboxylic acids such as oxalic acid and salts thereof.

オキシカルボン酸の使用量に関しては、タンタルのフッ化水素酸溶液中のタンタルに対してオキシカルボン酸/Ta(モル比)0.05〜10の範囲となるように添加することが重要である。即ち、オキシカルボン酸/Ta(モル比)が0.05を下廻ると粒子間の凝集が著しくなりゾルが得られず、また反対にオキシカルボン酸/Ta(モル比)が10を上廻るとゾル製造は可能であるが、添加に見合った効果はなく、経済的でない。 Regarding the amount of oxycarboxylic acid used, it is important to add oxycarboxylic acid / Ta 2 O 5 (molar ratio) in the range of 0.05 to 10 with respect to tantalum in the hydrofluoric acid solution of tantalum. It is. That is, when the oxycarboxylic acid / Ta 2 O 5 (molar ratio) is less than 0.05, aggregation between particles becomes remarkable and a sol cannot be obtained. On the contrary, oxycarboxylic acid / Ta 2 O 5 (molar ratio) If the ratio exceeds 10, sol production is possible, but there is no effect commensurate with the addition and it is not economical.

更に、本発明のオキシカルボン酸をタンタルのフッ化水素酸溶液とアルカリ溶液の反応時に共存させる方法に関しては、タンタルの酸性溶液に添加しても良いし、アルカリ溶液に添加して反応に供しても良い。また本発明のオキシカルボン酸溶液中にタンタルの酸性溶液とアルカリ溶液を同時添加してもよい。本発明で重要なことは、酸化タンタルが形成されるときにオキシカルボン酸が共存していることである。酸化タンタルの形成時に本発明のオキシカルボン酸が存在しないと、できた酸化タンタルはもはや本発明のオキシカルボン酸では解膠ゾル化することはできず、特許文献1記載の方法であるシュウ酸以外の有機酸ではゾル化することはできない。   Further, regarding the method of coexisting the oxycarboxylic acid of the present invention during the reaction of the tantalum hydrofluoric acid solution and the alkaline solution, it may be added to the acidic solution of tantalum or added to the alkaline solution for the reaction. Also good. Further, an acidic solution and an alkaline solution of tantalum may be added simultaneously to the oxycarboxylic acid solution of the present invention. What is important in the present invention is that oxycarboxylic acid coexists when tantalum oxide is formed. If the oxycarboxylic acid of the present invention is not present during the formation of tantalum oxide, the resulting tantalum oxide can no longer be peptized with the oxycarboxylic acid of the present invention, except for oxalic acid which is the method described in Patent Document 1. It cannot be made into a sol with any organic acid.

ところで、本発明のタンタルのフッ化水素酸溶液とアルカリ溶液との反応時の反応温度に関しては、特段限定されることはなく、品質の安定面から温度コントロールする程度で充分であり、通常20℃〜50℃で行なえばよい。反応時間に関しては、特段限定されないが、反応スケールに応じて30分〜3時間の範囲内で反応させればよい。   By the way, the reaction temperature at the time of the reaction between the tantalum hydrofluoric acid solution and the alkali solution of the present invention is not particularly limited, and it is sufficient to control the temperature from the standpoint of quality stability. What is necessary is just to perform at -50 degreeC. Although it does not specifically limit regarding reaction time, What is necessary is just to make it react within the range of 30 minutes-3 hours according to reaction scale.

上記の如く反応して得られる酸化タンタルゾルは、これをそのまま利用することもできるが、限外ろ過等の手段により、過剰のオキシカルボン酸、あるいは製造時に使用した原料のフッ素イオンや鉱酸イオン、アルカリ由来の陽イオン等の不純物を除去すると同時に所望の濃度に調整することができる。不純物を充分除去した場合、必要以上のオキシカルボン酸が除去されることがあるので、後工程で上述の範囲内で本発明のオキシカルボン酸を添加し、安定な酸化タンタルゾルとすることが重要である。このような反応を行なうことにより、本発明の酸化タンタルゾルは、オキシカルボン酸をオキシカルボン酸/Ta(モル比)0.05〜10の範囲で含有してなる酸化タンタルゾルを得ることができる。本発明の酸化タンタルゾルは、オキシカルボン酸で安定化されたものであるので、従来技術に基づき有機溶媒分散型酸化タンタルゾルを得ることもできる。 The tantalum oxide sol obtained by reacting as described above can be used as it is, but by means of ultrafiltration or the like, excess oxycarboxylic acid, or raw material fluorine ions or mineral acid ions used during production, Impurities such as alkali-derived cations can be removed and simultaneously adjusted to a desired concentration. When the impurities are sufficiently removed, more oxycarboxylic acid than necessary may be removed. Therefore, it is important to add the oxycarboxylic acid of the present invention within the above-mentioned range in a later step to obtain a stable tantalum oxide sol. is there. By performing such a reaction, the tantalum oxide sol of the present invention can obtain a tantalum oxide sol containing oxycarboxylic acid in the range of oxycarboxylic acid / Ta 2 O 5 (molar ratio) 0.05 to 10. it can. Since the tantalum oxide sol of the present invention is stabilized with oxycarboxylic acid, an organic solvent-dispersed tantalum oxide sol can be obtained based on the prior art.

以下に本発明の実施例を掲げ更に説明を行なうが、本発明はこれらに限定されるものではない。また、%は特に断らない限り全て質量%を示す。
本発明の酸化タンタルゾルの物性測定は、以下の方法による。
Examples of the present invention will be described below and further explained, but the present invention is not limited to these. Moreover, unless otherwise indicated,% shows the mass% altogether.
The physical properties of the tantalum oxide sol of the present invention are measured by the following method.

(1)平均粒子径の測定
平均粒子径の測定は、動的光散乱色粒度分布測定装置LB-500(堀場製作所(株)製)を用いて測定した。
(1) Measurement of average particle size The average particle size was measured using a dynamic light scattering color particle size distribution analyzer LB-500 (manufactured by Horiba, Ltd.).

(2)ヘイズ率の測定
ヘイズ率の測定は、色差計COH-300A(日本電色工業(株)製)を用いて測定した。測定条件としてはTa濃度10%の試料を光路長1cmのガラスセルに入れて測定した。
(2) Measurement of haze ratio The haze ratio was measured using a color difference meter COH-300A (manufactured by Nippon Denshoku Industries Co., Ltd.). As a measurement condition, a sample having a Ta 2 O 5 concentration of 10% was put in a glass cell having an optical path length of 1 cm and measured.

酸化タンタル(純度Ta99.995質量%)(多木化学(株)製)50gをフッ化水素酸(HF10%)525gに溶解した後、純水9,425gを添加しTa0.5%のタンタルのフッ化水素酸溶液を得た。この溶液にクエン酸/Taモル比1.5となるようにクエン酸・一水和物(和光純薬工業(株)製)35.6gを添加し、完全に溶解した。この溶液をアンモニア水(NH1.0%)5,774gに60分間で添加した。添加終了後、限外濾過モジュール(旭化成工業製SLP−1053)を使用し、ろ液の電気伝導度が20mS/mになるまで洗浄し、不純物の除去を行い、本発明のゾル(Ta濃度10%)を得た。得られたゾルは、ヘイズ率31%、平均粒子径109nm、クエン酸/Ta (モル比)0.31、フッ素290ppmの白色ゾルであった。これを30℃で30日間静置し、その状態を観察した結果、増粘や沈殿生成もなく安定なゾル状態を呈していた。 After dissolving 50 g of tantalum oxide (purity Ta 2 O 5 99.995 mass%) (manufactured by Taki Chemical Co., Ltd.) in 525 g of hydrofluoric acid (HF 10%), 9,425 g of pure water was added and Ta 2 O was added. 5 A 0.5% tantalum hydrofluoric acid solution was obtained. To this solution, 35.6 g of citric acid / monohydrate (manufactured by Wako Pure Chemical Industries, Ltd.) was added so that the citric acid / Ta 2 O 5 molar ratio was 1.5, and the solution was completely dissolved. This solution was added to 5,774 g of aqueous ammonia (NH 3 1.0%) over 60 minutes. After completion of the addition, an ultrafiltration module (SLP-1053 manufactured by Asahi Kasei Kogyo Co., Ltd.) is used, the filtrate is washed until the electric conductivity becomes 20 mS / m, impurities are removed, and the sol (Ta 2 O of the present invention) 5 concentration 10%). The obtained sol was a white sol having a haze ratio of 31%, an average particle diameter of 109 nm, citric acid / Ta 2 O 5 (molar ratio) of 0.31, and fluorine of 290 ppm. As a result of observing the state at 30 ° C. for 30 days, a stable sol state was exhibited without thickening or precipitation.

酸化タンタル(純度Ta99.995質量%)(多木化学(株)製)50gをフッ化水素酸と硫酸の混酸(HF/HSO(モル比)=8.0、HF40%) 150gに溶解した後、純水9,850gを添加しTa0.5%のタンタルのフッ化水素酸溶液を得た。実施例1のクエン酸/Taモル比が7.0となるようにクエン酸・一水和物(和光純薬工業(株)製)166.3gを用い、且つアンモニア水(NH1.0%)11,456gを用いて実施例1と同様に本発明のゾルを得た。得られたゾルは、ヘイズ率4.4%、平均粒子径11nm、クエン酸/Ta (モル比)0.61、フッ素266ppm、SO 197ppmの微白色ゾルであった。これを30℃で30日間静置し、その状態を観察した結果、増粘や沈殿生成もなく安定なゾル状態を呈していた。 50 g of tantalum oxide (purity Ta 2 O 5 99.995% by mass) (manufactured by Taki Chemical Co., Ltd.) was mixed with hydrofluoric acid and sulfuric acid (HF / H 2 SO 4 (molar ratio) = 8.0, HF40) %) After being dissolved in 150 g, 9,850 g of pure water was added to obtain a 0.5% Ta 2 O 5 tantalum hydrofluoric acid solution. 166.3 g of citric acid monohydrate (manufactured by Wako Pure Chemical Industries, Ltd.) was used so that the citric acid / Ta 2 O 5 molar ratio of Example 1 was 7.0, and aqueous ammonia (NH 3 1.0%) A sol of the present invention was obtained in the same manner as in Example 1 using 11,456 g. The obtained sol was a fine white sol having a haze ratio of 4.4%, an average particle diameter of 11 nm, citric acid / Ta 2 O 5 (molar ratio) 0.61, fluorine 266 ppm, and SO 4 197 ppm. As a result of observing the state at 30 ° C. for 30 days, a stable sol state was exhibited without thickening or precipitation.

実施例1のアンモニア水(NH1.0%)5,774gに代え水酸化ナトリウム水溶液(NaOH1.0%)13,586g用いた以外実施例1と同様に本発明のゾルを得た。得られたゾルは、ヘイズ率29%、平均粒子径91nm、クエン酸/Ta (モル比)0.32、フッ素238ppmの白色ゾルであった。これを30℃で30日間静置し、その状態を観察した結果、増粘や沈殿生成もなく安定なゾル状態を呈していた。
「比較例3」
A sol of the present invention was obtained in the same manner as in Example 1 except that 13,586 g of an aqueous sodium hydroxide solution (1.0% NaOH) was used instead of 5,774 g of aqueous ammonia (NH 3 1.0%) in Example 1. The obtained sol was a white sol having a haze ratio of 29%, an average particle diameter of 91 nm, citric acid / Ta 2 O 5 (molar ratio) of 0.32, and fluorine of 238 ppm. As a result of observing the state at 30 ° C. for 30 days, a stable sol state was exhibited without thickening or precipitation.
“Comparative Example 3”

実施例1のクエン酸/Taモル比が0.02となるようにクエン酸・一水和物(和光純薬工業(株)製)0.48gを用い、且つアンモニア水(NH1.0%)4,921gを用いた以外実施例1と同様に試験した。その結果、白色沈殿が生成し、ゾルを得ることはできなかった。
0.48 g of citric acid monohydrate (manufactured by Wako Pure Chemical Industries, Ltd.) was used so that the citric acid / Ta 2 O 5 molar ratio of Example 1 was 0.02, and ammonia water (NH 3 1.0%) Tested in the same manner as in Example 1 except that 4,921 g was used. As a result, a white precipitate was formed, and a sol could not be obtained.

Claims (1)

クエン酸、酒石酸及びリンゴ酸から選ばれた少なくとも一種のオキシカルボン酸の存在下で、Ta濃度として0.05〜5質量%のタンタルのフッ化水素酸溶液とアルカリ溶液を反応させ、反応後のpHが7以上となることを特徴とする酸化タンタルゾルの製造方法。
但し、オキシカルボン酸の存在量は、タンタルのフッ化水素酸溶液に対して、オキシカルボン酸/Ta(モル比)として0.05〜10の範囲である。
In the presence of at least one oxycarboxylic acid selected from citric acid, tartaric acid and malic acid, 0.05 to 5% by mass of a hydrofluoric acid solution of tantalum as a Ta 2 O 5 concentration and an alkali solution are reacted, A method for producing a tantalum oxide sol, wherein the pH after the reaction is 7 or more.
However, the abundance of oxycarboxylic acid is in the range of 0.05 to 10 as oxycarboxylic acid / Ta 2 O 5 (molar ratio) with respect to the tantalum hydrofluoric acid solution.
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