JP4639366B2 - Multi-core optical fiber probe - Google Patents

Multi-core optical fiber probe Download PDF

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JP4639366B2
JP4639366B2 JP2005231632A JP2005231632A JP4639366B2 JP 4639366 B2 JP4639366 B2 JP 4639366B2 JP 2005231632 A JP2005231632 A JP 2005231632A JP 2005231632 A JP2005231632 A JP 2005231632A JP 4639366 B2 JP4639366 B2 JP 4639366B2
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史子 樋渡
泰雄 新村
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株式会社システムズエンジニアリング
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Description

本発明は、一般的にはATRスペクトル検出に用いる光ファイバプローブに関し、詳しくは検出面での試料の測定領域を広く採ることを可能とした多芯光ファイバプローブに関する。   The present invention generally relates to an optical fiber probe used for ATR spectrum detection, and more particularly to a multi-core optical fiber probe that can take a wide measurement area of a sample on a detection surface.

ATR(Attenuated Total Reflectance)分光は、IR、UV等の光を試料と接触させたクリスタルの検出面に、臨界角以上の角度で照射して検出面で全反射させたときに、検出面から試料表層に染み出したエバネセント波が試料に特有の特定波長を吸収されて反射光に戻る現象を利用して、反射光について特定波長の吸収スペクトルを測定することにより、試料の表面状態や化学種等を検出するものである。   ATR (Attenuated Total Reflectance) spectroscopy is performed when a sample detection surface is irradiated with IR, UV, or other light at a critical angle or higher and totally reflected on the sample surface. By utilizing the phenomenon that the evanescent wave that exudes to the surface layer absorbs a specific wavelength peculiar to the sample and returns to the reflected light, the absorption spectrum of the specific wavelength for the reflected light is measured, so that the surface state of the sample, chemical species, etc. Is detected.

従来、このATR分光に用いるプローブの一つとして、プローブの筐体内に断面二等辺三角形の角柱状クリスタル(プリズム)を、二等辺の面に挟まれる面を検出面として該検出面が筐体の先端に開設した開口に位置するようにして設け、そのクリスタルの頂部を通る垂直面に対し対称にクリスタルの検出面を挟む一方の面に光照射側の光ファイバを配置し、他方の面に受光側の光ファイバを配置したものが知られている。   Conventionally, as one of the probes used for this ATR spectroscopy, a prismatic crystal (prism) having an isosceles triangle cross section is provided in a probe housing, and a surface sandwiched between isosceles surfaces is used as a detection surface. An optical fiber on the light-irradiation side is placed on one surface, sandwiching the detection surface of the crystal symmetrically with respect to the vertical plane passing through the top of the crystal, and received on the other surface. An arrangement in which an optical fiber on the side is arranged is known.

このプローブによれば、一方の光ファイバからクリスタルの検出面に光を照射して、検出面で全反射した光を他方の光ファイバで受光し、反射光を検出器に導いて検出することにより、吸収スペクトルを測定することができる。しかしながら、このクリスタルの検出面での光の反射は1回であるため、検出面での測定領域が狭く、検出精度が低い問題があった。   According to this probe, by irradiating the detection surface of the crystal from one optical fiber, the light totally reflected by the detection surface is received by the other optical fiber, and the reflected light is guided to the detector and detected. The absorption spectrum can be measured. However, since the light is reflected once on the detection surface of the crystal, there is a problem that the measurement area on the detection surface is narrow and the detection accuracy is low.

そこで、断面矩形の角柱状のクリスタルを横長に配置し、クリスタルの長手方向一端面から検出面に光ファイバから光を照射して、検出面で全反射した光を対向する面(この面にも試料を接触させて検出面とすることがある)で全反射させ、これをクリスタルの全長に亘って多数回繰返させて、反射光を他端面から光ファイバで受光する多重反射方式のプローブが考えられている。しかしながら、光は反射を繰返すたびに散乱するので、最終的に得られる反射光は強度が弱くなり、吸収スペクトルのピークが小さくなって、検出精度を大きく向上できない問題がある。   Therefore, a prismatic crystal with a rectangular cross section is arranged horizontally, and light is irradiated from the optical fiber from one end surface of the crystal in the longitudinal direction to the detection surface, and the light totally reflected on the detection surface is opposed to this surface (also on this surface). A multiple reflection type probe that receives the reflected light from the other end face with an optical fiber by repeating the reflection over many times over the entire length of the crystal. It has been. However, since light is scattered every time it is repeatedly reflected, the intensity of the finally obtained reflected light becomes weak, the peak of the absorption spectrum becomes small, and there is a problem that the detection accuracy cannot be greatly improved.

したがって、本発明の課題は、1つの光に全反射を複数回させなくても、検出面での試料の測定領域を広く採ることがき、吸収スペクトルの測定による試料の検出精度を向上することを可能とした多芯光ファイバプローブを提供することである。   Therefore, an object of the present invention is to take a wide measurement area of the sample on the detection surface without causing the light to undergo total reflection multiple times, and to improve the detection accuracy of the sample by measuring the absorption spectrum. It is to provide a multi-core optical fiber probe that is made possible.

(1) 多芯光ファイバプローブであって、筐体の先端面に開設した開口に検出面を位置させて該筐体内に配設した、該検出面が測定試料に接触されるクリスタルと、クリスタルの検出面を挟む一方の側に光学的に接続した光ファイバをクリスタルの長手方向に沿って複数本配設した、各光ファイバから検出面に向けて臨界角以上の角度で光を照射する光照射側リボンケーブルと、クリスタルの検出面を挟む他方の側に光学的に接続した光ファイバを前記光照射側リボンケールの光ファイバと対応する態様でクリスタルの長手方向に沿って複数本配設した、各光ファイバが前記光照射側リボンケールの対応する光ファイバから照射されて検出面で反射した光を受光する受光側リボンケーブルとを備えることを特徴とする。   (1) A multi-core optical fiber probe having a detection surface positioned in an opening formed in a front end surface of a housing and disposed in the housing, wherein the detection surface is in contact with a measurement sample; Light that irradiates light at an angle greater than the critical angle from each optical fiber toward the detection surface, with a plurality of optical fibers optically connected to one side across the detection surface A plurality of optical fibers optically connected to the irradiation side ribbon cable and the other side across the detection surface of the crystal are arranged along the longitudinal direction of the crystal in a manner corresponding to the optical fiber of the light irradiation side ribbon cable. Each optical fiber includes a light receiving side ribbon cable that receives light irradiated from the corresponding optical fiber of the light irradiation side ribbon kale and reflected by the detection surface.

(2) 請求項1の多芯光ファイバプローブにおいて、前記クリスタルが一つの面を検出面とした断面三角形またはその頭部を切断した台形の角柱体形状をなし、該クリスタルの検出面を挟む一方の面に前記光照射側リボンケーブルの光ファイバを配置し、該クリスタルの検出面を挟む他方の面に前記受光側リボンケーブルの光ファイバを配置したことを特徴とする。   (2) The multi-core optical fiber probe according to claim 1, wherein the crystal has a triangular shape with a cross section having one surface as a detection surface or a trapezoidal prismatic shape with its head cut, and sandwiches the detection surface of the crystal. The optical fiber of the light-irradiation side ribbon cable is arranged on the other surface, and the optical fiber of the light-receiving side ribbon cable is arranged on the other surface sandwiching the detection surface of the crystal.

(3) 請求項2記載の多芯光ファイバプローブにおいて、前記クリスタルが二等辺の面に挟まれる面を検出面とした断面二等辺三角形またはその頭部を切断した等脚台形の角柱体形状をなし、前記光照射側の光ファイバと受光側のリボンケーブルの光ファイバを該クリスタルの頂部を通る検出面に鉛直な面に対し対称に配置したことを特徴とする。   (3) The multi-core optical fiber probe according to claim 2, wherein an isosceles trapezoidal prismatic body shape having an isosceles triangle section or a head section cut by using a surface sandwiched between isosceles surfaces as a detection surface. None, the optical fiber on the light irradiation side and the optical fiber of the ribbon cable on the light receiving side are arranged symmetrically with respect to a plane perpendicular to the detection plane passing through the top of the crystal.

(4) 請求項3の多芯光ファイバプローブにおいて、前記クリスタルが断面直角二等辺三角形またはその頭部を切断した等脚台形の角柱体形状をなすことを特徴とする。   (4) The multi-core optical fiber probe according to claim 3, characterized in that the crystal has an isosceles trapezoidal prismatic shape with a right-angled isosceles triangle section or a truncated head.

(5) 請求項1〜4のいずれかの多芯光ファイバプローブにおいて、前記光照射側リボンケーブルおよび受光側リボンケーブルが、それぞれ複数の光ファイバを有する円筒状多芯ケーブルを加工し、または接続器を介して接続することによって、円筒状多芯ケーブルの先端側に形成されていることを特徴とする。   (5) In the multicore optical fiber probe according to any one of claims 1 to 4, the light irradiation side ribbon cable and the light receiving side ribbon cable each process or connect a cylindrical multicore cable having a plurality of optical fibers. It is formed in the front end side of a cylindrical multi-core cable by connecting through a container.

本発明の多芯光ファイバプローブによれば、クリスタルの検出面での各光1回の全反射を複数状の光によって複数箇所で行わせるので、検出面での試料の測定領域を複数倍に増し、反射光の吸収スペクトル測定による試料の検出精度を顕著に向上することができる。   According to the multi-core optical fiber probe of the present invention, the total reflection of each light on the detection surface of the crystal is performed at a plurality of locations by a plurality of light, so that the measurement area of the sample on the detection surface is multiplied by a multiple. In addition, the detection accuracy of the sample by measuring the absorption spectrum of reflected light can be remarkably improved.

以下、図面を参照して本発明の実施例を詳述する。図1は本発明の多芯光ファイバプローブの一実施例を一部切り欠いて示す斜視図、図2はプローブの検出部を示す横断面図、図3はプローブを示す水平断面図である。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing a multi-core optical fiber probe according to an embodiment of the present invention with a part cut away, FIG. 2 is a transverse sectional view showing a detection portion of the probe, and FIG. 3 is a horizontal sectional view showing the probe.

本実施例において、多芯光ファイバプローブ1は、筐体2内に断面直角二等辺三角形の角柱体のクリスタル3を備え、該クリスタル3は二等辺の面で挟む一面を検出面4として、該検出面4を筐体2の先端面中央に開設した矩形状の開口5に位置さて設置されている。筐体2内にはその上面から光照射側のリボンケーブル8A、受光側のリボンケーブル9Aを挿入し、該リボンケーブル8A、9Aをクリスタル3に向けて上方で曲げて、クリスタル3の検出面4を挟む一方の傾斜面6、他方の傾斜面7に配設している。   In this embodiment, the multi-core optical fiber probe 1 includes a prism 3 crystal 3 having a right-angled isosceles triangle cross section in a housing 2, and the crystal 3 is sandwiched between isosceles surfaces as a detection surface 4. The detection surface 4 is installed in a rectangular opening 5 opened at the center of the front end surface of the housing 2. A ribbon cable 8A on the light irradiation side and a ribbon cable 9A on the light receiving side are inserted into the housing 2 from the upper surface, and the ribbon cables 8A and 9A are bent upward toward the crystal 3 to detect the detection surface 4 of the crystal 3 Are disposed on one inclined surface 6 and the other inclined surface 7.

リボンケーブル8A、9Aは、それぞれ複数本、本例では7本の光ファイバ8、9を平行に束ねてなっており、この複数本の光ファイバ8、9を、リボンケーブル8A、9Aの被覆を剥がし、または剥がさずに、クリスタル3の頂部を通る検出面4に垂直な面νに対し対称に傾斜面6、7に配置して、光ファイバ8と9とが一つずつ対応するようにしてクリスタル3の長手方向に沿って配列している。そして光照射側の光ファイバ8を傾斜面6に直交する態様で端面を近接させて光学的に接続し、各光ファイバ8の光軸を検出面4と垂直面νとの交点と臨界角以上の角度θで交わらせている。同様に、受光側の光ファイバ9を傾斜面7に直交する態様で端面を近接させて光学的に接続し、各光ファイバ9の光軸を検出面4と垂直面νとの交点と上記と同一角度θで交わらせている。   Each of the ribbon cables 8A and 9A is formed by bundling a plurality of optical fibers 8, 9 in parallel in this example, and the plurality of optical fibers 8, 9 are coated with the ribbon cables 8A, 9A. With or without peeling, the optical fibers 8 and 9 are arranged one by one so as to correspond to the inclined surfaces 6 and 7 symmetrically with respect to the plane ν perpendicular to the detection surface 4 passing through the top of the crystal 3. The crystals 3 are arranged along the longitudinal direction. Then, the optical fibers 8 on the light irradiation side are optically connected with their end faces close to each other in a manner orthogonal to the inclined surface 6, and the optical axis of each optical fiber 8 is equal to or greater than the critical angle and the intersection of the detection surface 4 and the vertical surface ν. At an angle θ. Similarly, the optical fibers 9 on the light receiving side are optically connected with their end faces close to each other in a manner orthogonal to the inclined surface 7, and the optical axis of each optical fiber 9 is the intersection of the detection surface 4 and the vertical surface ν, and the above. They intersect at the same angle θ.

筐体2内に導入されるリボンケーブル8A、9Aは、それぞれ同数本の光ファイバ10、11を有する円筒状多芯ケーブル10A、11Bに接続器10a、11aを介して接続され、この光照射側の多芯ケーブル10Aは図示しない光源に接続され、受光側の多芯ケーブル11Bを光検出器に接続されている。   Ribbon cables 8A and 9A introduced into the housing 2 are connected to cylindrical multi-core cables 10A and 11B having the same number of optical fibers 10 and 11, respectively, via connectors 10a and 11a. The multi-core cable 10A is connected to a light source (not shown), and the multi-core cable 11B on the light receiving side is connected to a photodetector.

本実施例のプローブ1によれば、プローブ先端のクリスタル3の検出面4を試料に接触させ、光源で発生した光を円筒状多芯ケーブル10Aの光ファイバ10、リボンケーブル8Aの光ファイバ8を順次経てクリスタル3に導くと、計7本の光ファイバ8から7条の平行光がクリスタル3の検出面4に臨界角以上の入射角度(θ)で照射され、検出面4の7箇所で全反射して、7条の反射光が対応する受光側の計7本の光ファイバ9に1つずつ受光され、各光ファイバ9から多芯ケーブル11Aの各光ファイバ11を経て検出器に送られ、吸収スペクトルが測定される。   According to the probe 1 of this embodiment, the detection surface 4 of the crystal 3 at the tip of the probe is brought into contact with the sample, and the light generated by the light source is passed through the optical fiber 10 of the cylindrical multicore cable 10A and the optical fiber 8 of the ribbon cable 8A. When sequentially guided to the crystal 3, a total of seven parallel light beams are irradiated from a total of seven optical fibers 8 onto the detection surface 4 of the crystal 3 at an incident angle (θ) greater than the critical angle. The reflected light from the seven strips is received by a total of seven corresponding optical fibers 9 on the light receiving side, and sent from the optical fibers 9 to the detectors through the optical fibers 11 of the multicore cable 11A. The absorption spectrum is measured.

これによれば、7条の光を使用することによって、各光1回の全反射を検出面4の7箇所で行わせて、検出面4での試料の測定領域を7倍に増しているので、試料の測定精度を顕著に向上することができる。また、7条の光をそれぞれ波長の異なる光とすることもできる。   According to this, by using seven light beams, each light is totally reflected at seven locations on the detection surface 4 and the measurement area of the sample on the detection surface 4 is increased sevenfold. Therefore, the measurement accuracy of the sample can be significantly improved. Further, the seven light beams may be light having different wavelengths.

以上の実施例では、クリスタルは断面直角二等辺三角形の角柱体状としたが、角柱体は、断面が鋭角または鈍角の二等辺三角形であってもよく、さらに不等辺三角形であってもよい。また検出面に対応する三角柱の頂部を切断した断面が等脚台形、不等脚台形の角柱体でもよく、さらには断面矩形の角柱体でも、断面が5角形以上の角柱体でもよい。   In the embodiments described above, the crystal has a prismatic shape with an isosceles right angle triangle, but the prism may be an isosceles triangle having an acute or obtuse cross section, or may be an unequal triangle. Further, the cross section obtained by cutting the top of the triangular prism corresponding to the detection surface may be a prismatic body having an isosceles trapezoidal shape or an unequal leg trapezoidal shape, and may be a rectangular column having a rectangular cross section or a prism having a cross section of a pentagon or more.

また光ファイバは光照射側、受光側ともクリスタルの面に直交させて配置したが、クリスタルに対する光の入射、出謝についての反射による損失が許容できる範囲ならば、クリスタルの面に対し傾斜させて配置することもできる。   The optical fiber is arranged perpendicular to the crystal surface on both the light-irradiation side and the light-receiving side. However, if the loss due to reflection of light incident on the crystal is acceptable, tilt it with respect to the crystal surface. It can also be arranged.

リボンケーブルの光ファイバは、円筒状多芯ケーブルの光ファイバに接続器を介して接続したが、円筒状多芯ケーブルの先端部を加工してリボンケーブルに形成してもよい。   The optical fiber of the ribbon cable is connected to the optical fiber of the cylindrical multicore cable via a connector. However, the tip of the cylindrical multicore cable may be processed to form a ribbon cable.

本発明の多芯光ファイバプローブの一実施例を一部切り欠いて示す斜視図である。1 is a perspective view showing a multi-core optical fiber probe according to an embodiment of the present invention with a part cut away. FIG. 図1のプローブの検出部を示す横断面図である。It is a cross-sectional view which shows the detection part of the probe of FIG. 図1のプローブを示す水平断面図である。It is a horizontal sectional view which shows the probe of FIG.

符号の説明Explanation of symbols

1 多芯光ファイバプローブ 2 筐体
3 クリスタル 4 検出面
5 開口 6、7 傾斜面
8、9 光ファイバ 8A、9A リボンケーブル
10a、11a 接続器 10A、11A 円筒状多芯ケーブル
DESCRIPTION OF SYMBOLS 1 Multi-core optical fiber probe 2 Case 3 Crystal 4 Detection surface 5 Aperture 6, 7 Inclined surface 8, 9 Optical fiber 8A, 9A Ribbon cable 10a, 11a Connector 10A, 11A Cylindrical multi-core cable

Claims (5)

筐体の先端面に開設した開口に検出面を位置させて該筐体内に配設した、該検出面が測定試料に接触されるクリスタルと、
クリスタルの検出面を挟む一方の側に光学的に接続した光ファイバをクリスタルの長手方向に沿って複数本配設した、各光ファイバから検出面に向けて臨界角以上の角度で光を照射する光照射側リボンケーブルと、
クリスタルの検出面を挟む他方の側に光学的に接続した光ファイバを前記光照射側リボンケールの光ファイバと対応する態様でクリスタルの長手方向に沿って複数本配設した、各光ファイバが前記光照射側リボンケールの対応する光ファイバから照射されて検出面で反射した光を受光する受光側リボンケーブルとを備えることを特徴とする多芯光ファイバプローブ。
A crystal that contacts the measurement sample with the detection surface disposed in the housing with the detection surface positioned at the opening formed in the front end surface of the housing;
A plurality of optical fibers optically connected to one side across the detection surface of the crystal are disposed along the longitudinal direction of the crystal, and light is emitted from each optical fiber toward the detection surface at an angle greater than the critical angle. Light irradiation side ribbon cable,
A plurality of optical fibers optically connected to the other side across the detection surface of the crystal are arranged along the longitudinal direction of the crystal in a manner corresponding to the optical fiber of the light irradiation side ribbon kale. A multi-core optical fiber probe comprising: a light receiving side ribbon cable that receives light irradiated from a corresponding optical fiber of the light irradiation side ribbon kale and reflected by a detection surface.
前記クリスタルが一つの面を検出面とした断面三角形またはその頭部を切断した台形の角柱体形状をなし、該クリスタルの検出面を挟む一方の面に前記光照射側リボンケーブルの光ファイバを配置し、該クリスタルの検出面を挟む他方の面に前記受光側リボンケーブルの光ファイバを配置したことを特徴とする請求項1記載の多芯光ファイバプローブ。   The crystal has a triangular shape with a cross-section with one surface as a detection surface or a trapezoidal prismatic shape with its head cut, and the optical fiber of the light irradiation side ribbon cable is arranged on one surface sandwiching the detection surface of the crystal 2. The multi-core optical fiber probe according to claim 1, wherein an optical fiber of the light receiving side ribbon cable is arranged on the other surface sandwiching the detection surface of the crystal. 前記クリスタルが二等辺の面に挟まれる面を検出面とした断面二等辺三角形またはその頭部を切断した等脚台形の角柱体形状をなし、前記光照射側の光ファイバと受光側のリボンケーブルの光ファイバを該クリスタルの頂部を通る検出面に鉛直な面に対し対称に配置したことを特徴とする請求項2記載の多芯光ファイバプローブ。   The crystal is in the form of an isosceles triangle with a section sandwiched between two isosceles faces or an isosceles trapezoidal prismatic shape with its head cut off, and the optical fiber on the light irradiation side and the ribbon cable on the light receiving side The multi-core optical fiber probe according to claim 2, wherein the optical fiber is arranged symmetrically with respect to a plane perpendicular to a detection plane passing through the top of the crystal. 前記クリスタルが断面直角二等辺三角形またはその頭部を切断した等脚台形の角柱体形状をなすことを特徴とする請求項3記載の多芯光ファイバプローブ。   4. The multi-core optical fiber probe according to claim 3, wherein the crystal has an isosceles right triangle shape or an isosceles trapezoidal prismatic shape with its head cut. 前記光照射側リボンケーブルおよび受光側リボンケーブルが、それぞれ複数の光ファイバを有する円筒状多芯ケーブルを加工し、または接続器を介して接続することによって、円筒状多芯ケーブルの先端側に形成されていることを特徴とする請求項1〜4のいずれかの項に記載の多芯光ファイバプローブ。
The light irradiation side ribbon cable and the light receiving side ribbon cable are formed on the distal end side of the cylindrical multi-core cable by processing a cylindrical multi-core cable having a plurality of optical fibers or connecting them via a connector. The multi-core optical fiber probe according to any one of claims 1 to 4, wherein the multi-core optical fiber probe is formed.
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JPS6291840A (en) * 1985-10-18 1987-04-27 Hitachi Ltd Fuel characteristic detector
JPH0438552U (en) * 1990-07-27 1992-03-31
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JPS5935857U (en) * 1982-08-30 1984-03-06 豊田工機株式会社 Surface defect inspection equipment
JPS6291840A (en) * 1985-10-18 1987-04-27 Hitachi Ltd Fuel characteristic detector
JPH0438552U (en) * 1990-07-27 1992-03-31
JPH04138340A (en) * 1990-09-29 1992-05-12 Shimadzu Corp Infrared spectrum measuring head and measuring apparatus
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