JP4616059B2 - Fluid control valve - Google Patents

Description

  The present invention relates to a fluid control valve.

  In the fluid control valve 101 of Patent Document 1, holes 121 and 122 are provided in the valve box 111 as shown in FIGS. 5 and 6 for the purpose of increasing the flow area in order to increase the flow rate (Cv value). It is formed by cutting. Here, FIG. 5 is a sectional view of the fluid control valve 101, and FIG. 6 is a top view of the valve box 111.

In recent years, for example, in semiconductor manufacturing sites, the size of manufacturing equipment has been increased by increasing the size of wafers used for semiconductors. For this reason, in order to supply the chemicals necessary for wafer production to high-rise equipment, it is necessary to supply the chemicals in a high pressure state, and in order to supply a large amount of chemicals, the chemical flow path in the fluid control valve is enlarged. There is a tendency to form a flow path that is formed and has durability against high-pressure chemicals. Therefore, it is necessary to ensure a large flow path area by increasing the height of the valve body and increasing the cross-sectional area of the valve chamber formed with the piston cylinder. Accordingly, as shown in FIG. 7, a bellows valve (or diaphragm valve) corresponding to increasing the height of the valve body and having durability under high pressure is required. Under such circumstances, a crescent-shaped communication channel 229 is formed in the valve main body 211 of the fluid control valve 201, as shown in FIGS. Here, FIG. 7 is a cross-sectional view of the fluid control valve 201 as viewed from the side, and FIG. 8 is a top view of the valve body 211.
JP-A-8-105554 (paragraphs 0012 and 0013, FIGS. 1 and 2)

  In the fluid control valve 101 of Patent Document 1, holes 121 and 122 are formed in the valve box 111 by cutting. In the fluid control valve 101 of Patent Document 1, since the height of the valve box 111 in the axial direction of the fluid control valve 101 is not so large, a cutting tool is inserted from the upper surface direction of the valve box 111 to insert the hole 121, Cutting 122 is relatively easy.

  However, when the height of the valve body 211 in the axial direction of the fluid control valve 201 needs to be increased as in the fluid control valve 201 of the background art described above, a cutting tool is inserted from above the valve body 211. It becomes difficult to form a crescent-shaped communication channel 229 in the valve body 211. In particular, when the crescent-shaped communication channel 229 is cut with an end mill or the like, it is impossible to complete the cutting at a stroke, and it is necessary to complete the cutting by moving the end mill little by little while proceeding with the cutting. Therefore, much labor and time are spent on the cutting work, and the processing cost is increased. In addition, since the cutting work becomes difficult, the state of the cutting surface cannot be adjusted, and particles contained in the fluid accumulate when the fluid is flowed, or the cutting surface is peeled off and particles are generated. There is a risk that.

  Therefore, as shown in FIG. 9, a case where the height of the output port 227 is increased to be different from the input port 226 is considered. By doing so, the height of the valve body 211 at the portion where the crescent-shaped communication channel 229 is cut with an end mill or the like is not so large, so that the cutting operation becomes relatively easy. However, in this case, since the output port 227 and the input port 226 are formed in different levels, when installing the fluid control valve 201 on a production line or the like, piping work with other equipment is performed at different levels. It must be done and the work becomes difficult.

  Therefore, the present invention can control the fluid of high pressure and high flow rate by increasing the channel area, and can easily manufacture and adjust the state of the inner wall surface of the communication channel while suppressing the manufacturing cost. It is an object of the present invention to provide a fluid control valve that can reliably seal a communication flow path and can easily perform piping work with other equipment.

In order to achieve the above object, the present invention has the following features.
(1) The present invention provides a valve main body having a first port and a second port, a valve seat in a flow path for communicating the first port and the second port, and a valve body that comes into contact with and separates from the valve seat. A fluid control valve manufacturing method comprising: a valve chamber in which the valve body is disposed; a communication channel that communicates the valve chamber with the second port; and a drive mechanism that drives the valve body. A path is formed by cutting so as to be substantially crescent shaped by penetrating from the opposite side of the valve body to the valve mechanism to the valve chamber, and on the opposite side of the drive mechanism in the axial direction of the fluid control valve And attaching a cover member that covers the communication channel to the valve body, and attaching a cover member that covers the cover member to the valve body by a fastening component .

(2) The present invention is a fluid control valve manufactured by the manufacturing method described in (1) .

The present invention having such characteristics has the following operations and effects.
(1) The present invention provides a valve main body having a first port and a second port, a valve seat in a flow path for communicating the first port and the second port, and a valve body that comes into contact with and separates from the valve seat. In the fluid control valve having a valve chamber in which the valve body is disposed, a communication channel that communicates the valve chamber with the second port, and a drive mechanism that drives the valve body, the communication channel is on the drive mechanism side of the valve body. A lid member that is formed in a substantially crescent shape when viewed from above and covers the communication channel by penetrating the valve body and attaching to the valve body from the opposite side of the drive mechanism in the axial direction of the fluid control valve A cover member that covers the lid member and is attached to the valve body by a fastening part, so that the communication channel is formed in a substantially crescent shape, thereby increasing the channel area and increasing the pressure and flow rate. Can control the fluid, almost three The communication channel formed in a moon shape is formed by penetrating the valve body, and can be processed from either the drive mechanism side of the valve body or the opposite side, making it easy and manufacturing cost The inner wall surface of the communication channel can be adjusted while the communication channel is covered, and the communication channel is covered with the cover member, and the lid member is covered with the cover member, so that the communication channel can be reliably sealed. Since the first port and the second port are arranged at substantially the same height, the effect of facilitating piping work with other equipment can be obtained.

(2) The present invention provides the fluid control valve according to (1), wherein the lid member includes an annular wall over one circumference at a peripheral portion of one surface of the disk shape, and an annular protrusion on the inner circumferential side of the annular wall. Since the annular protrusion presses the inner wall side surface of the attachment groove in a state of being attached to the attachment groove included in the valve body, a part of the inner wall side surface of the attachment groove is further formed by the annular protrusion than the effect described in (1). Since the pressing is performed, the communication channel can be reliably sealed.

(3) The present invention provides a valve main body having a first port and a second port, a valve seat in a flow path for communicating the first port and the second port, and a valve body that comes into contact with and separates from the valve seat. In the manufacturing method of a fluid control valve having a valve chamber in which the valve body is disposed, a communication flow path that communicates the valve chamber with the second port, and a drive mechanism that drives the valve body, The valve body is formed so as to have a substantially crescent shape when viewed from the drive mechanism side, and a cover member that covers the communication flow path from the opposite side of the drive mechanism in the axial direction of the fluid control valve is formed in the valve body. And a step of attaching a cover member that covers the lid member to the valve body by a fastening part, so that the flow passage area is increased by forming the communication flow passage in a substantially crescent shape, and a high-pressure and high-flow rate fluid is supplied. Can be controlled and formed in a nearly crescent shape The communication flow path is formed by penetrating the valve body and can be processed from either the drive mechanism side of the valve body or the opposite side, so that it is easy to manufacture and the communication flow is reduced while suppressing the manufacturing cost. The state of the inner wall surface of the road can be adjusted, the communication flow path is covered by the lid member, and the lid member is covered by the cover member, so that the communication flow path can be reliably sealed, and the first port and the first port Since the two ports are arranged at substantially the same height, an effect of facilitating piping work with other equipment can be obtained.

Examples of the present invention will be described below.
FIG. 1 shows a sectional view of a fluid control valve 1 of the present invention. The fluid control valve 1 of the present invention has a valve body 11, a cylinder 12, and a cylinder cover 13 in appearance. The fluid control valve 1 is roughly composed of a drive mechanism and a valve mechanism. The drive mechanism unit includes a cylinder cover 13, a cylinder 12, a piston 21, a spring 22, and the like. Further, the valve mechanism section includes a valve body 11, a valve body 23, a lid member 24, a cover member 25, and the like.

  Since the valve body 11 is in direct contact with the fluid, for example, a material such as a fluororesin is used so as to have durability against fluids such as powerful drugs. An input port 26 and an output port 27 are formed in the valve body 11, and a valve seat 28 is formed at the end of the flow path communicating with the input port 26. The valve seat 28 contacts and separates from the valve body 23 that moves up and down by the drive of the piston 21 of the drive mechanism portion in the valve chamber 30. Here, in order to ensure a large flow path area, the shape of the valve body 11 in the height direction is lengthened to enlarge the valve chamber 30. Since the valve chamber 30 is thus enlarged, the piston 21 has a shape that is long in the vertical direction, and the valve body 23 is also long in the vertical direction. In this embodiment, a bellows valve is used as the valve body 23.

  In addition, by using the bellows valve in this way, when fluid is flowed, the pressure is dispersed in the bellows-shaped portion of the bellows valve. Therefore, even when a high-pressure fluid is flowed, the high-pressure fluid is not directly applied to the valve body 23, so that the valve body 23 can be protected. A diaphragm valve may be used as the valve body 23 as shown in FIG. In the present embodiment, description will be made using the bellows valve of FIG. 1 for convenience of explanation. Further, a crescent-shaped communication channel 29 as shown in FIG. 8 is formed in the valve body 11 as a communication channel that communicates the valve chamber 30 and the output port 27. By having the crescent-shaped communication channel 29 in this manner, the channel area can be increased, and an effect that the flow rate can be increased is obtained.

  Furthermore, an attachment groove 31 is formed in the valve body 11, and the width of the attachment groove 31 is W2 as shown in FIG. A lid member 24 is press-fitted into the attachment groove 31 to close the crescent-shaped communication channel 29 from the lower side of the valve body 11. Here, FIG. 10 shows an enlarged view of a portion surrounded by a dotted line shown in FIG. The lid member 24 is formed in a disk shape as shown in FIG. As shown in FIG. 4, the lid member 24 includes an annular wall 24b, and an annular protrusion 24a having a thickness W1 is formed on the inner peripheral side of the wall 24b. Here, since the lid member 24 is in direct contact with the fluid in the crescent-shaped communication channel 29, for example, a fluororesin sheet is used in order to ensure durability against fluids such as powerful drugs. The fluid control valve 1 having such a configuration controls the fluid flowing in from the input port 26 and flowing out from the output port 27 while adjusting the flow rate by opening and closing the valve body 23 by the action of the piston 21 of the drive mechanism unit. Is. Further, by having such a configuration, it is possible to realize a fluid control valve corresponding to an increase in the size of manufacturing equipment at a semiconductor manufacturing site or the like. In addition, since the input port 26 and the output port 27 are arrange | positioned at the substantially same height, even when constructing the fluid control valve 1 in a manufacturing line etc., piping construction work with another apparatus is easy.

  Here, the communication flow path 29 of the valve main body 11 and the seal structure thereof, which is a feature of the present invention, are manufactured as follows. First, a cutting tool is inserted from the lower side of the output port 27 side of the valve body 11 to form a communication channel 29 penetrating the valve chamber 30. Alternatively, the communication channel 29 penetrating the valve chamber 30 may be formed by injection molding the valve body 11. Thus, since the communication flow path 29 can be formed easily, the processing accuracy of the surface of the inner wall surface can be improved and the state of the surface can be adjusted. Therefore, even when a fluid flows through the communication channel 29, there is no possibility that particles contained in the fluid accumulate on the inner wall surface of the communication channel 29. Moreover, since there is no possibility that the cutting surface will be peeled off, there is no possibility that particles or the like are generated.

  Next, as shown in FIGS. 1 and 10, the lid member 24 is press-fitted into a mounting groove 31 formed in the valve main body 11, and the crescent-shaped communication channel 29 is formed on the lower side of the valve main body 11 (with the drive mechanism section). Close from the other side. Here, since the lid member 24 is made of a fluororesin and has elasticity, the annular protrusion 24a formed on the inner peripheral side of the wall 24b is crushed from its thickness W1 to the width W2 of the mounting groove 31. In this way, by pressing a part of the inner wall side surface 31a of the mounting groove 31 with the annular protrusion 24a, a peak value is given to the internal stress generated in the lid member 24, and a part of the inner wall side surface 31a of the mounting groove 31 is applied. Concentrate and act. Thereby, sealing performance can be ensured reliably, and safety can be secured even when a chemical solution or the like is flowed as a fluid. In particular, assuming the case of a fluid control valve used in a semiconductor production line, in recent years, as a semiconductor manufacturing apparatus is highly integrated, a highly permeable chemical solution is often handled. And since the highly penetrating chemical liquid contains dangerous substances such as hydrofluoric acid, there is an increasing need for ensuring further safety with respect to sealing performance. Therefore, by assuring the sealing performance as in the present invention, even when a highly permeable chemical solution is allowed to flow through the fluid control valve 1, the above-described needs can be met. FIG. 10 shows a state in which the lid member 24 is press-fitted into the attachment groove 31. For convenience of explanation, the lid member 24 is shown in order to make it easy to understand the relationship between the thickness W 1 of the annular protrusion 24 a and the width W 2 of the attachment groove 31. The annular protrusion 24a of the member 24 shows a state before (thickness W1) before being crushed by the width W2 of the mounting groove 31. Actually, the annular protrusion 24a is crushed by the mounting groove 31 as shown in FIG.

  In addition, as shown in FIG. 11, you may make the front-end | tip part 24b of the press fit part of the cover member 24, and the outer wall side surface 31b of the attachment groove | channel 31 into a taper shape. By forming the taper shape in this manner, the annular protrusion 24 a is guided and pressed in the direction of the inner wall side surface 31 a of the mounting groove 31 in a state where the lid member 24 is press-fitted into the mounting groove 31. Therefore, it is possible to concentrate and act on a part of the inner wall side surface 31a of the mounting groove 31 while giving a peak value to the internal stress generated in the lid member 24 more reliably. Accordingly, the sealing performance is further improved.

  Further, the cover member 25 is attached so as to cover the lid member 24 from the lower side of the valve body 11, and the screw 32 is inserted into the nut 33 formed on the cover member 25 as shown in FIG. To the valve body 11. By attaching the cover member 25 in this manner, an effect of sufficiently ensuring the sealing degree of the lid member 24 with respect to the communication flow path 29 is obtained. As described above, the communication flow path 29 of the valve body 11 and the seal structure thereof, which are the features of the present invention, are manufactured.

The following effects are obtained by the embodiment as described above.
(1) In the present invention, the valve body 11 including the input port 26 and the output port 27, the valve seat 28 in the flow path for communicating the input port 26 and the output port 27, and the valve seat 28 are brought into contact with and separated from each other. In a fluid control valve having a valve body 23, a valve chamber 30 in which the valve body 23 is disposed, a communication channel 29 that communicates the valve chamber 30 and the output port 27, and a drive mechanism that drives the valve body 23. The flow path 29 is formed in a substantially crescent shape when viewed from the drive mechanism side of the valve main body 11, and penetrates the valve main body 11 from the opposite side of the drive mechanism in the axial direction of the fluid control valve 1. Since it has the cover member 24 which covers the communication flow path 29 by being attached to the valve body 11, and the cover member 25 which covers the cover member 24 and is attached to the valve body 11 by the screw 32, the crescent shaped communication The flow passage area can be increased by the passage 29 to control a high-pressure and high-flow rate fluid. The communication passage 29 is formed by penetrating the valve body 11 and is provided on the side of the drive mechanism of the valve body 11 or vice versa. Since processing may be performed from either side, the manufacturing process is easy, and the state of the inner wall surface of the communication channel 29 can be adjusted while suppressing the manufacturing cost. The communication channel 29 is covered by the lid member 24. Furthermore, since the lid member 24 is covered with the cover member 25, the communication flow path 29 can be reliably sealed, and the input port 26 and the output port 27 are arranged at substantially the same height, so The effect of facilitating the pipe construction work is obtained.

(2) In the fluid control valve according to (1), in the present invention, the lid member 24 includes a wall 24b around the periphery of one of the disk-shaped surfaces, and is annular on the inner peripheral side of the wall 24b. Since the annular protrusion 24a presses the inner wall side surface 31a of the attachment groove 31 in a state in which the protrusion 24a is provided and attached to the attachment groove 31 provided in the valve body 11, the attachment by the annular protrusion 24a is more than the effect described in (1). Since a part of the inner wall side surface 31a of the groove 31 is pressed, the communication channel 29 can be reliably sealed.

(3) In the present invention, the valve main body 11 including the input port 26 and the output port 27, the valve seat 28 in the flow path that allows the input port 26 and the output port 27 to communicate with each other, and the valve seat 28 abuts and separates Manufacturing method of fluid control valve having valve body 23, valve chamber 30 in which valve body 23 is disposed, communication channel 29 that communicates valve chamber 30 and output port 27, and drive mechanism that drives valve body 23 , The communication channel 29 is formed so as to have a substantially crescent shape when viewed from the drive mechanism side of the valve body 11, and the process of penetrating the valve body 11 is opposite to the drive mechanism in the axial direction of the fluid control valve 1. Since it has the process of attaching the cover member 24 which covers the communication flow path 29 from the side to the valve main body 11, and the process of attaching the cover member 25 which covers the cover member 24 to the valve main body 11 with the screw 32, the crescent-shaped communication flow path 29 By flow High pressure and high flow rate fluid can be controlled by increasing the area, and the communication flow path 29 is formed by penetrating the valve body 11 and is processed from either the drive mechanism side of the valve body 11 or the opposite side. Therefore, it is easy to manufacture, and the state of the inner wall surface of the communication channel 29 can be adjusted while suppressing processing costs. The communication channel 29 is covered with the lid member 24, and the lid member 24 is further covered. Since the cover member 25 is covered, the communication flow path 29 can be reliably sealed, and the input port 26 and the output port 27 are arranged at substantially the same height, so that piping work with other equipment can be performed. The effect which becomes easy is acquired.

In addition, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the meaning.

It is sectional drawing of the fluid control valve of this invention (A bellows valve is used for a valve body). It is a top view of the fluid control valve of the present invention. It is sectional drawing of the fluid control valve of this invention (a diaphragm valve is used for a valve body). It is an external view of a cover member. 2 is a cross-sectional view of a fluid control valve of the invention of Patent Document 1. FIG. It is a top view of the valve box of invention of patent document 1. FIG. It is sectional drawing of the conventional fluid control valve in which the digging hole was formed. It is a top view of the valve main body in which the digging hole was formed. It is sectional drawing of the fluid control valve in which the flow path of different steps was formed. It is a figure which shows the seal structure of a cover member. It is a figure which shows the seal structure of a cover member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fluid control valve 11 Valve main body 12 Cylinder 13 Cylinder cover 23 Valve body 24 Cover member 25 Cover member 26 Input port 27 Output port 28 Valve seat 29 Communication flow path 30 Valve chamber 31 Mounting groove 32 Screw 33 Nut

Claims (2)

A valve body having a first port and a second port, a valve seat in a flow path communicating the first port and the second port, a valve body that contacts and separates from the valve seat, and the valve body is disposed A fluid control valve manufacturing method comprising: a valve chamber, a communication channel that communicates the valve chamber and the second port, and a drive mechanism that drives the valve body;
Forming the communication channel by cutting so as to be substantially crescent shaped by penetrating from the opposite side of the valve body to the valve chamber to the valve chamber ;
Attaching a lid member covering the communication channel from the opposite side of the drive mechanism to the valve body in the axial direction of the fluid control valve;
Attaching a cover member covering the lid member to the valve body with a fastening component;
A method for manufacturing a fluid control valve, comprising: A fluid control valve manufactured by the manufacturing method according to claim 1.

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