JP4559367B2 - Substrate connecting tape and printed circuit board manufacturing method using the substrate connecting tape - Google Patents

Substrate connecting tape and printed circuit board manufacturing method using the substrate connecting tape Download PDF

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JP4559367B2
JP4559367B2 JP2006015653A JP2006015653A JP4559367B2 JP 4559367 B2 JP4559367 B2 JP 4559367B2 JP 2006015653 A JP2006015653 A JP 2006015653A JP 2006015653 A JP2006015653 A JP 2006015653A JP 4559367 B2 JP4559367 B2 JP 4559367B2
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substrate
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邦弘 中川
宗利 入沢
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Mitsubishi Paper Mills Ltd
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Description

本発明は、基板接続用テープ、およびそれを用いたプリント基板の製造方法に関する。詳しくはシート状基板材料を導電接続し、電解メッキ、電着等が可能で、その後容易にシート状基板材料に分離可能な基板接続用テープ、およびプリント基板の製造方法に関する。   The present invention relates to a substrate connecting tape and a method of manufacturing a printed circuit board using the same. More specifically, the present invention relates to a substrate connection tape that can be electrically connected to a sheet-like substrate material, and can be electroplated, electrodeposited, and the like, and then easily separated into a sheet-like substrate material, and a method for manufacturing a printed board.

近年、フレキシブル基板(フレキシブルプリント配線板)は、携帯電話、液晶ディスプレイ、デジタルカメラ、ハードディスクその他多くの電子機器で使用されている。その屈曲性のゆえに、ヒンジ部や可動部に使用されたり、コンパクトに機器内に配線板を収納するために不可欠な存在となっている。しかし、その屈曲性のために、シート状のフレキシブル基板材料で搬送手段によりフレキシブル基板を製造すると、巻き付き、落下、斜行等の搬送トラブルが多発するため、屈曲性のないプリント基板の製造装置に見られるような、単純な搬送機構でシート状基板材料を搬送することはできない。   In recent years, flexible substrates (flexible printed wiring boards) have been used in mobile phones, liquid crystal displays, digital cameras, hard disks, and many other electronic devices. Because of its flexibility, it is indispensable for use in hinges and movable parts, or for compactly storing a wiring board in equipment. However, due to its flexibility, when a flexible substrate is manufactured by a conveying means using a sheet-like flexible substrate material, conveyance troubles such as winding, dropping, and skewing frequently occur. The sheet-like substrate material cannot be transferred by a simple transfer mechanism as can be seen.

フレキシブル基板材料の代表的な構成は、ポリイミドや液晶ポリマー等の絶縁フィルム/接着剤層/銅箔の、いわゆる3層材(両面板の場合、銅箔/接着剤層/絶縁フィルム/接着剤層/銅箔)が主流であるが、近年接着剤層のない2層材が増えつつあるが、屈曲性がより高くなり、搬送トラブルは3層材より深刻である。さらに銅箔や絶縁フィルムの厚みは今後ますます薄くなると予想されており、搬送性を確保するためには、ロール・トゥ・ロール加工が好ましい。   A typical configuration of the flexible substrate material is a so-called three-layer material of insulating film / adhesive layer / copper foil such as polyimide or liquid crystal polymer (in the case of double-sided board, copper foil / adhesive layer / insulating film / adhesive layer). / Copper foil) is the mainstream, but in recent years two-layer materials without an adhesive layer are increasing, but the flexibility becomes higher and the conveyance trouble is more serious than the three-layer material. Further, the thickness of copper foil and insulating film is expected to become thinner in the future, and roll-to-roll processing is preferable in order to ensure transportability.

しかし、全工程でロール・トゥ・ロール加工するには莫大な設備投資が必要なため、一部の工程はシート状材料で加工し、その後シート状材料を接続してロール状材料にして加工したいという要求がある。例えば、シート状材料をレーザー穿孔し、その後ロール状材料にしてメッキし、フォトレジストをラミネート、あるいは塗布し、パターン露光後、アルカリ現像、エッチング、レジスト除去工程の後でシート状材料に分離するという流れは、典型的なワークフローである。このフローにおいて、電解メッキする場合は、治具を用いるか、導電性テープ(例えば金属テープ)を用いてシート状基板材料間を導電接続する必要がある。また均一性にすぐれるため、イオン形成基を有する感光性樹脂組成物を電着することがあるが、この場合にも治具を用いるか、導電性テープを用いてシート状基板材料間を導電接続する必要がある。治具の装脱着は非常に工数のかかる作業で、作業効率的には好ましくなく、また導電性テープはシート状材料に分離する際に、切断するか、テープをはがす工程が必要になる。その際、フレキシブル基板材料の場合、変形する、伸びる、破れる、あるいは発塵する等の弊害があった。   However, roll-to-roll processing requires enormous capital investment, so some processes are processed with sheet-like materials, and then sheet-like materials are connected and processed into roll-like materials. There is a request. For example, laser drilling a sheet-like material, then plating it into a roll-like material, laminating or applying a photoresist, and after pattern exposure, after alkali development, etching, resist removal process, it is separated into a sheet-like material Flow is a typical workflow. In this flow, when electrolytic plating is performed, it is necessary to electrically connect between the sheet-like substrate materials using a jig or using a conductive tape (for example, a metal tape). In addition, because of excellent uniformity, a photosensitive resin composition having an ion-forming group may be electrodeposited. In this case as well, a jig is used or a conductive tape is used to conduct a conductive material between sheet-like substrate materials. Need to connect. The attachment and detachment of the jig is a very time-consuming operation, which is not preferable in terms of work efficiency. Further, when the conductive tape is separated into a sheet-like material, a process of cutting or peeling the tape is required. At that time, in the case of the flexible substrate material, there are problems such as deformation, elongation, tearing, or dust generation.

エッチング液に溶解する層とレジスト除去液に溶解し且つ耐エッチング性を有する層とレジスト除去液に溶解し且つ粘着性を有する層とが積層されてなる基板接続用テープで基板を連結することにより、エッチングの不均一現象を解消する技術が開示されており、同時にこれらにより、アルカリ現像・エッチング工程における搬送性が大幅に改善され、かつシート状材料に分離する際の変形する、伸びる、破れる、あるいは発塵する等の弊害も改善された。しかし、これらの基板接続用テープでシート状基板材料を連結した場合、シート状基板材料は絶縁されており、導電接続する新しい技術が求められていた(例えば、特許文献1参照)。
特開2004−43848号公報
By connecting the substrates with a substrate connecting tape in which a layer that dissolves in the etching solution, a layer that dissolves in the resist removal solution and has etching resistance, and a layer that dissolves in the resist removal solution and has adhesiveness are laminated. In addition, a technique for eliminating the non-uniform phenomenon of etching is disclosed, and at the same time, the transportability in the alkali development / etching process is greatly improved, and the sheet material is deformed, stretched, and torn. In addition, harmful effects such as dust generation have been improved. However, when the sheet-like substrate material is connected with these substrate-connecting tapes, the sheet-like substrate material is insulated, and a new technique for conducting conductive connection has been demanded (for example, see Patent Document 1).
JP 2004-43848 A

本発明の課題は、シート状基板材料を導電接続し、電解メッキ、電着等が可能で、その後容易にシート状基板材料に分離可能なプリント基板接続用テープ、およびプリント基板の製造方法を提案することにある。   The object of the present invention is to provide a printed circuit board connecting tape that can be electrically connected to a sheet-like board material, and can be electroplated, electrodeposited, etc., and then easily separated into a sheet-like board material, and a method for producing the printed board. There is to do.

本発明者らは検討した結果、少なくともエッチング液に溶解する金属層と、レジスト除去液に溶解し且つ耐エッチング性を有する層と、レジスト除去液に溶解し且つ粘着性を有する層とが順次積層されてなる基板接続用テープにおいて、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有することを特徴とする基板接続用テープで上記課題を解決することを見出した。   As a result of investigations by the inventors, at least a metal layer that dissolves in the etching solution, a layer that dissolves in the resist removal solution and has etching resistance, and a layer that dissolves in the resist removal solution and has adhesiveness are sequentially stacked. A substrate connecting tape, comprising: a region having both a layer that dissolves in a resist removing solution and has etching resistance and a layer that dissolves in a resist removing solution and has no adhesive layer It has been found that the above problems can be solved with a tape.

あるいは少なくともエッチング液に溶解する金属層と、レジスト除去液に溶解し且つ耐エッチング性を有する層と、レジスト除去液に溶解し且つ粘着性を有する層とが順次積層されてなる基板接続用テープでシート状基板材料の搬送方向の縁部同士を互いに連結して搬送するプリント基板の製造方法において、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有する基板接続用テープでシート状基板材料間を導電接続することを特徴とするプリント基板の製造方法で上記課題を解決することを見出した。   Alternatively, a substrate connecting tape in which at least a metal layer that dissolves in an etching solution, a layer that dissolves in a resist removal solution and has etching resistance, and a layer that dissolves in a resist removal solution and has adhesive properties are sequentially laminated. In a method of manufacturing a printed circuit board in which edges in the transport direction of a sheet-like substrate material are connected to each other and transported, the layer is dissolved in a resist removal solution and has an etching resistance and is dissolved in a resist removal solution and has adhesiveness. It has been found that the above-mentioned problems can be solved by a method for producing a printed circuit board characterized in that conductive connection is made between sheet-like board materials with a board-connecting tape having a region where both layers are absent.

好ましい態様としては、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域が直径2mmの円を包含可能な大きさであることにより上記課題を解決することを見出した。   As a preferred embodiment, the region having neither the layer that dissolves in the resist removing solution and has etching resistance and the layer that dissolves in the resist removing solution and has no adhesive layer has a size that can include a circle having a diameter of 2 mm. Has found that the above-mentioned problems can be solved.

本発明によれば、シート状基板材料を導電接続し、電解メッキ、電着等が可能で、その後容易にシート状基板材料に分離可能なプリント基板接続用テープ、およびプリント基板の製造方法を提供することができる。   According to the present invention, there is provided a printed circuit board connecting tape that can be electrically connected to a sheet substrate material, and can be electroplated, electrodeposited, etc., and then easily separated into a sheet substrate material, and a method for manufacturing the printed circuit board. can do.

以下に本発明を実施するための最良の形態について詳細に説明する。本発明において、基板接続用テープのエッチング液に溶解する金属層としては、銅、銀、アルミニウム、ステンレス、ニクロム、鉄、及びタングステン等の金属材料、銅、鉄、クロム、亜鉛、スズ等からなる合金等の、導電性を有するあらゆる金属を用いることができる。例えば銅の配線回路を形成するためのプリント基板であったら、回路となる金属と溶解性を同じくした方が簡便であるため、銅が好適に使用できる。エッチング液に溶解する金属層の厚みは1〜200μmであり、好ましくは5〜50μmがよい。   The best mode for carrying out the present invention will be described in detail below. In the present invention, the metal layer dissolved in the etching solution of the substrate connecting tape is made of a metal material such as copper, silver, aluminum, stainless steel, nichrome, iron and tungsten, copper, iron, chromium, zinc, tin or the like. Any conductive metal such as an alloy can be used. For example, if it is a printed circuit board for forming a copper wiring circuit, it is easier to use the same metal and solubility as the circuit, so copper can be used suitably. The thickness of the metal layer dissolved in the etching solution is 1 to 200 μm, preferably 5 to 50 μm.

本発明において、レジスト除去液に溶解し且つ耐エッチング性を有する層は、少なくともエッチング液に対して溶解または膨潤しない性質を有し、またそれらのスプレー圧に耐えうる強度を有する。レジスト除去部の途中でこの層はすべて除去される。このようなレジスト除去液に溶解し且つ耐エッチング性を有する層としては、例えば、支持フィルムと保護フィルムを剥離した感光層を熱もしくは紫外線照射によって硬化させたドライフィルムレジストフィルム、液状フォトレジストを塗布および乾燥後、熱もしくは紫外線照射によって硬化させたフィルム等が挙げられる。また、カルボン酸基、フェノール性水酸基、スルホン酸基、スルホンアミド基、スルホンイミド基、ホスホン酸基を有する、アクリル樹脂、エポキシ樹脂、ウレタン樹脂、フェノール樹脂等からなる強アルカリに溶解するフィルムやポリビニルアルコール等が挙げられる。レジスト除去液に溶解し且つ耐エッチング性を有する層の厚みは、1〜200μmであり、好ましくは5〜100μmがよい。   In the present invention, the layer that dissolves in the resist removal solution and has etching resistance has at least a property of not dissolving or swelling in the etching solution, and has a strength that can withstand those spray pressures. All of this layer is removed in the middle of the resist removal section. Examples of the layer that dissolves in such a resist removing solution and has etching resistance include, for example, a dry film resist film obtained by curing a photosensitive layer from which a support film and a protective film are peeled off by heat or ultraviolet irradiation, or a liquid photoresist. And a film cured by heat or ultraviolet irradiation after drying. In addition, films and polyvinyls having a carboxylic acid group, a phenolic hydroxyl group, a sulfonic acid group, a sulfonamide group, a sulfonimide group, and a phosphonic acid group, which are soluble in a strong alkali made of acrylic resin, epoxy resin, urethane resin, phenol resin, etc. Alcohol etc. are mentioned. The thickness of the layer dissolved in the resist removing solution and having etching resistance is 1 to 200 μm, preferably 5 to 100 μm.

本発明において、レジスト除去液に溶解し且つ粘着性を有する層は、基板接続用テープと基板を接着する役割を担い、エッチングが終了して不要となった際にレジスト除去部で速やかに除去される。必要であれば、加熱することで粘着性を増加させてもよい。このような層としては、例えばアクリル樹脂、エポキシ樹脂、ウレタン樹脂、フェノール樹脂等を主成分とする粘着樹脂が挙げられる。それらの粘着樹脂には、レジスト除去液に溶解または膨潤する必要があるため、カルボン酸基、フェノール性水酸基、スルホン酸基、スルホンアミド基、スルホンイミド基、ホスホン酸基を有するモノマーを含有する。粘着樹脂の具体例としては、スチレン/マレイン酸モノアルキルエステル共重合体、メタクリル酸/メタクリル酸エステル共重合体、スチレン/メタクリル酸/メタクリル酸エステル共重合体、アクリル酸/メタクリル酸エステル共重合体、メタクリル酸/メタクリル酸エステル/アクリル酸エステル共重合体、スチレン/メタクリル酸/アクリル酸エステル共重合体、スチレン/アクリル酸/メタクリル酸エステル共重合体、酢酸ビニル/クロトン酸共重合体、酢酸ビニル/クロトン酸/メタクリル酸エステル共重合体、安息香酸ビニル/アクリル酸/メタクリル酸エステル共重合体等のスチレン、アクリル酸エステル、メタクリル酸エステル、酢酸ビニル、安息香酸ビニル等とカルボン酸含有単量体との共重合体等が挙げられる。また、ポリエチレングリコール、ポリプロピレングリコール、ジエチルフタレート、o−トルエンスルホン酸アミド、p−トルエンスルホン酸アミド、クエン酸トリブチル、クエン酸トリエチル、アセチルクエン酸トリエチル等の可塑剤を含有してもよい。また、視認性を向上させるため、染料や顔料を含有してもよい。また、レジスト除去液に溶解し且つ粘着性を有する層として、支持フィルムと保護フィルムを剥離した未硬化の感光層からなるドライフィルムレジストを使用しても良い。一般的なレジストフィルムとしては例えばデュポンMRCドライフィルム株式会社のリストン、日立化成工業株式会社のフォテック、旭化成エレクトロニクス株式会社のサンフォート等を使用することができる。レジスト除去液に溶解し且つ粘着性を有する層の厚みは、1〜200μmであり、好ましくは5〜100μmがよい。   In the present invention, the layer that is dissolved in the resist removing solution and has adhesiveness plays a role of adhering the substrate connecting tape and the substrate, and is quickly removed by the resist removing unit when etching is no longer necessary. The If necessary, the adhesiveness may be increased by heating. Examples of such a layer include an adhesive resin mainly composed of an acrylic resin, an epoxy resin, a urethane resin, a phenol resin, and the like. These adhesive resins contain a monomer having a carboxylic acid group, a phenolic hydroxyl group, a sulfonic acid group, a sulfonamide group, a sulfonimide group, or a phosphonic acid group because they need to be dissolved or swelled in the resist removing solution. Specific examples of the adhesive resin include styrene / maleic acid monoalkyl ester copolymer, methacrylic acid / methacrylic acid ester copolymer, styrene / methacrylic acid / methacrylic acid ester copolymer, acrylic acid / methacrylic acid ester copolymer. , Methacrylic acid / methacrylic acid ester / acrylic acid ester copolymer, styrene / methacrylic acid / acrylic acid ester copolymer, styrene / acrylic acid / methacrylic acid ester copolymer, vinyl acetate / crotonic acid copolymer, vinyl acetate Styrene, acrylic acid ester, methacrylic acid ester, vinyl acetate, vinyl benzoate, etc., and carboxylic acid-containing monomers such as / crotonic acid / methacrylic acid ester copolymer, vinyl benzoate / acrylic acid / methacrylic acid ester copolymer And a copolymer thereof. Moreover, you may contain plasticizers, such as polyethyleneglycol, polypropylene glycol, diethyl phthalate, o-toluenesulfonic acid amide, p-toluenesulfonic acid amide, tributyl citrate, triethyl citrate, acetyl triethyl citrate. Moreover, in order to improve visibility, you may contain dye and a pigment. Moreover, you may use the dry film resist which consists of an unhardened photosensitive layer which peeled the support film and the protective film as a layer which melt | dissolves in a resist removal liquid and has adhesiveness. As a general resist film, for example, Liston from DuPont MRC Dry Film Co., Ltd., Fotec from Hitachi Chemical Co., Ltd., Sunfort from Asahi Kasei Electronics Co., Ltd. can be used. The thickness of the layer that dissolves in the resist removal solution and has adhesiveness is 1 to 200 μm, preferably 5 to 100 μm.

本発明の好ましい態様において、基板接続用テープは、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域(領域Aと呼ぶ)を有し、領域Aは直径2mmの円を包含しうる。領域Aの形状は、いかなる形状でもよく、領域Aの中に直径2mmの円が包含されればよい。領域Aに直径2mmの円が包含されないと、導電接続が得られない場合がある。図1〜3に直径2mmの円が包含される領域Aの例を示す。さらに、本発明において、領域Aは好ましくは直径10mmの円に包含されるのが好ましい。領域Aが大きく、直径10mmの円に包含されない場合、導電接続部を強く屈曲させると、導電接続が失われる場合がある。図1〜3に領域Aが直径10mmの円に包含される例を示す。本発明者らは、領域Aにおいてシート状基板材料の金属層と基板接続テープの金属層が接触することにより導電接続し、安定して再現良く導電接続を得るためには、領域Aが特定の大きさである必要があることを見出したのである。   In a preferred embodiment of the present invention, the substrate connecting tape is a region (referred to as region A) in which both the layer that dissolves in the resist removing solution and has etching resistance and the layer that dissolves in the resist removing solution and has adhesive properties are not present. And region A may include a 2 mm diameter circle. The shape of the region A may be any shape as long as a circle with a diameter of 2 mm is included in the region A. If a circle having a diameter of 2 mm is not included in the region A, a conductive connection may not be obtained. 1-3 show an example of a region A in which a circle with a diameter of 2 mm is included. Furthermore, in the present invention, the region A is preferably included in a circle having a diameter of 10 mm. When the region A is large and is not included in a circle having a diameter of 10 mm, the conductive connection may be lost if the conductive connection portion is strongly bent. 1-3 shows an example in which the region A is included in a circle having a diameter of 10 mm. In the region A, in order to obtain a conductive connection in a stable and reproducible manner by bringing the metal layer of the sheet-like substrate material into contact with the metal layer of the substrate connection tape in the region A, the region A is a specific region. I found out that it needs to be large.

本発明における基板接続用テープの構成例を図4に示す。エッチング液に溶解する金属層5と、レジスト除去液に溶解し且つ耐エッチング性を有する層6と、レジスト除去液に溶解し且つ粘着性を有する層7が順次積層されてなる基板接続用テープ4において、同一の機能を有する層が複数層で構成されていてもよい。また本発明の課題が解決される限り、その他の層が含まれていてもよい。   A configuration example of the substrate connecting tape in the present invention is shown in FIG. A substrate connecting tape 4 in which a metal layer 5 dissolved in an etching solution, a layer 6 dissolved in a resist removing solution and having etching resistance, and a layer 7 dissolved in a resist removing solution and having an adhesive property are sequentially laminated. The layer having the same function may be composed of a plurality of layers. Moreover, as long as the subject of this invention is solved, the other layer may be contained.

本発明の基板接続用テープは、上記の構成が得られる限り、いかなる方法でも製造することができるが、金属箔上にレジスト除去液に溶解し且つ耐エッチング性を有する層を塗設、あるいはラミネートし、その上にレジスト除去液に溶解し且つ粘着性を有する層を塗設、あるいはラミネートすることによって製造するのが最も簡便である。領域Aを得るためには、両層をパターン状に塗設、あるいはラミネートする必要がある。パターン状に塗設、あるいはラミネートする方法としては、当業者で知られるあらゆる方法を用いることができる。パターン状に塗設する方法としては、グラビア印刷法が簡便である。また、パターン状にラミネートする方法としては、ドライフィルムレジストのようなフィルム化した層をあらかじめパンチングによりパターン状に打ち抜いて、その後ラミネートするのが簡便である。   The substrate connecting tape of the present invention can be manufactured by any method as long as the above-described configuration is obtained. However, a layer that dissolves in a resist removing solution and has etching resistance is coated on or laminated on a metal foil. It is most convenient to manufacture by laminating or laminating an adhesive layer that is dissolved in the resist removing solution. In order to obtain the region A, it is necessary to coat or laminate both layers in a pattern. Any method known to those skilled in the art can be used as a method of coating or laminating in a pattern. A gravure printing method is simple as a method of coating in a pattern. As a method of laminating in a pattern, it is convenient to punch a film-like layer such as a dry film resist into a pattern by punching in advance, and then laminate.

領域Aを得るには、図5のように両層とも同じパターン(例えば15mm幅のテープで直径3mmの円形が等間隔で並んだパターン)で極力位置をあわせる方法がある。装置の精度上の問題や材料の伸縮により、連続して製造する場合、位置ずれが発生する場合がある。また図6のように両層で形状・サイズ・間隔を変えて領域Aを得る方法は、伸縮によるずれはないが、レジスト除去液に溶解し且つ耐エッチング性を有する層あるいはレジスト除去液に溶解し且つ粘着性を有する層のどちらか一方の層が存在しない領域が多く、基板接続用テープの機能に支障を来すおそれがあるが、領域Aが直径2mmの円を包含可能な大きさであれば、いずれの方法でもよい。その他いかなる方法で、レジスト除去液に溶解し且つ耐エッチング性を有する層とレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有する基板接続用テープを製造してもよい。   In order to obtain the region A, there is a method in which both layers are aligned as much as possible in the same pattern (for example, a pattern in which circles of 3 mm in diameter are arranged at equal intervals on a 15 mm wide tape) as shown in FIG. In the case of continuous production due to problems in accuracy of the apparatus and expansion / contraction of the material, positional displacement may occur. In addition, as shown in FIG. 6, the method of obtaining the region A by changing the shape, size, and spacing in both layers is not displaced due to expansion / contraction, but is dissolved in the resist removal solution and dissolved in the etching resistant layer or resist removal solution. However, there are many areas where either one of the layers having adhesiveness does not exist, and there is a risk of hindering the function of the substrate connecting tape. However, the area A has a size that can include a circle having a diameter of 2 mm. Any method can be used. Any other method may be used to manufacture a substrate connecting tape having a region in which both the layer that is dissolved in the resist removing solution and has etching resistance and the layer that is dissolved in the resist removing solution and has no adhesive layer.

本発明において、基板接続用テープは、シート状基板材料の搬送方向の縁部同士を基板接続用テープで互いに連結する。テープは両面に貼り付けてもよいし、片面だけに貼り付けてもよい。図7〜8に、両面、あるいは片面に基板接続用テープ4でシート状基板材料を連結し、導電接続している部分の断面構造を示す。領域Aにおいてシート状基板材料の金属層と基板接続テープの金属層が接触することにより導電接続している。図9〜11にテープの貼り付け例を示す。本発明において、シート状基板材料はその搬送方向の縁部同士、すなわち搬送方向前辺と後辺を基板接続用テープで互いに連結される。搬送時に切断、変形、ねじれ、ゆがみ等による搬送不良が起こらない範囲でいかなる貼り付け方であってもよい。シート状基板材料は、重ならないように連結されるのが好ましい。実生産において縁部同士をすき間なく合わせるのは困難であり、シート状基板材料の間隔をあけて連結するのがよい。間隔はテープの長さ、幅、貼り方、材料との密着性、工程等により異なるので一概には規定できないが、10mm以下がよい。好ましくは5mm以下がよい。より好ましくは0.5mm〜3mmがよい。基板接続用テープでシート状基板材料を連結する方法は、材料を確実に接続できればいずれの方法、装置を用いてもよい。なお、図9において、シート状基板材料11の幅が基板接続用テープ4の長さより長いが、本発明において、シート状基板材料の幅と基板接続用テープの長さの関係には特に制限はない。   In this invention, the board | substrate connection tape connects the edge parts of the conveyance direction of sheet-like board | substrate material mutually with a board | substrate connection tape. The tape may be affixed on both sides or only on one side. 7 to 8 show a cross-sectional structure of a portion in which a sheet-like substrate material is connected to both sides or one side with a substrate connecting tape 4 and conductively connected. In the region A, the metal layer of the sheet-like substrate material and the metal layer of the substrate connection tape are in contact with each other to be conductively connected. 9 to 11 show examples of tape application. In the present invention, the edges of the sheet-like substrate material in the carrying direction, that is, the front and rear sides in the carrying direction are connected to each other with a substrate connecting tape. Any attachment method may be used as long as no conveyance failure occurs due to cutting, deformation, twisting, distortion, or the like during conveyance. The sheet-like substrate materials are preferably connected so as not to overlap. In actual production, it is difficult to align the edges without gaps, and it is preferable to connect the sheet-like substrate materials with an interval. The interval varies depending on the length, width, sticking method, adhesion to the material, process, etc. of the tape, and thus cannot be defined unconditionally. Preferably it is 5 mm or less. More preferably, it is 0.5 mm to 3 mm. Any method and apparatus may be used for connecting the sheet-like substrate materials with the substrate connecting tape as long as the materials can be reliably connected. In FIG. 9, the width of the sheet-like substrate material 11 is longer than the length of the substrate connecting tape 4, but in the present invention, there is no particular limitation on the relationship between the width of the sheet-like substrate material and the length of the substrate connecting tape. Absent.

本発明において、基板接続用テープは加熱しながら加圧して貼り付けるのがよい。基板接続用テープの構成や成分、基板の材質、領域Aの大きさ、形状等により異なるので、貼り付け条件は一概に特定できないが、温度が40〜140℃で、0.01〜0.6MPaに加圧するのがよい。140℃を超える温度の場合、あるいは/および0.6MPaを超える圧力の場合、レジスト除去液に溶解し且つ粘着性を有する層が流動し、シート状基板材料の金属層と基板接続テープの金属層が接触せず、導電接続が得られなくなる場合がある。温度が140℃未満の場合、あるいは/および圧力が0.01MPa未満の場合、基板接続用テープのシート状基板材料への接着が不十分になり、接合したシート状基板材料が分離する場合がある。   In the present invention, the substrate connecting tape is preferably applied by applying pressure while heating. Since it varies depending on the configuration and components of the substrate connecting tape, the material of the substrate, the size and shape of the region A, etc., the pasting conditions cannot be specified in general, but the temperature is 40 to 140 ° C. and 0.01 to 0.6 MPa. It is better to pressurize. When the temperature exceeds 140 ° C. or / and the pressure exceeds 0.6 MPa, the layer having the adhesive property and the adhesive layer flows, and the metal layer of the sheet-like substrate material and the metal layer of the substrate connecting tape May not be in contact with each other and a conductive connection may not be obtained. When the temperature is less than 140 ° C. or / and the pressure is less than 0.01 MPa, the bonding of the substrate connecting tape to the sheet-like substrate material may be insufficient, and the joined sheet-like substrate material may be separated. .

図9のように1枚の基板接合テープで2枚のシート状基板材料を接合する場合は、図12のように、領域Aは、接合する2枚のシート状基板材料と基板接合用テープの2つの接着部にそれぞれ少なくとも1箇所ずつあればよいが、複数箇所あれば、より確実である。図10〜11のように複数の基板接合テープで2枚のシート状基板材料を接合する場合は、少なくとも1枚の基板接合テープにおいて、接合する2枚のシート状基板材料と基板接合用テープの2つの接着部にそれぞれ少なくとも1箇所ずつあればよいが、複数箇所あれば、より確実である。   When two sheet-like substrate materials are joined with one substrate joining tape as shown in FIG. 9, as shown in FIG. 12, the region A includes two sheet-like substrate materials to be joined and a substrate joining tape. It is sufficient if there are at least one place for each of the two bonding portions, but a plurality of places is more reliable. When two sheet-like substrate materials are joined with a plurality of substrate joining tapes as shown in FIGS. 10 to 11, at least one substrate joining tape includes two sheet-like substrate materials to be joined and a substrate joining tape. It is sufficient if there are at least one place for each of the two bonding portions, but a plurality of places is more reliable.

2つの接着部のうち、少なくとも1方において、図13のように領域Aが基板接続用テープのエッジ部にある場合や、図14のように領域Aがシート状基板材料のエッジ部にある場合は、気体・液体が入り込んだり、環境の変化を受けやすく、導電接続が得られなくなる場合があるので、図12のように、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がある領域10に囲まれ、かつ基板接続用テープ、およびシート状基板材料のエッジ部にない領域Aを有することが好ましい。   In at least one of the two bonding portions, when the region A is at the edge of the board connecting tape as shown in FIG. 13 or when the region A is at the edge of the sheet-like substrate material as shown in FIG. Since a gas / liquid may enter or it may be susceptible to environmental changes, and conductive connection may not be obtained. As shown in FIG. 12, a layer that dissolves in a resist removal solution and has etching resistance and a resist removal solution It is preferable to have a region A that is surrounded by the region 10 in which both the layer dissolved and the adhesive layer are present and that is not on the edge portion of the substrate connecting tape and the sheet-like substrate material.

本発明において、基板接続用テープのエッチング液に溶解する金属層は、エッチング工程の途中ですべて除去され、レジスト除去液に溶解し且つ耐エッチング性を有する層と、レジスト除去液に溶解し且つ粘着性を有する層は、レジスト除去工程の途中ですべて除去されることにより、基板接続用テープを構成する物質はレジスト除去工程で完全になくなり、シート状基板材料に分離される。したがってレジスト除去工程より前の工程では、単純な搬送機構を使用することができ、レジスト除去工程のみの搬送性を向上させれば、たわみやすい材料を安定して搬送し、プリント基板を製造することができる。   In the present invention, the metal layer dissolved in the etching liquid of the substrate connecting tape is completely removed during the etching process, dissolved in the resist removing liquid and has etching resistance, and dissolved in the resist removing liquid and adhered. The layer having the property is completely removed in the course of the resist removal process, so that the substance constituting the substrate connecting tape is completely eliminated in the resist removal process and separated into a sheet-like substrate material. Therefore, a simple transport mechanism can be used in the process before the resist removal process, and if the transportability of only the resist removal process is improved, a flexible material can be transported stably and a printed circuit board can be manufactured. Can do.

市販のドライフィルムレジスト(樹脂膜厚25μm)にポンチで表1に示す直径の円形の穴を50mmピッチで直交するX・Y方向に等間隔に開け、保護フィルムを剥離して、厚さ18μmの銅箔にラミネートし、紫外線を照射してレジストフィルムを硬化させた。支持フィルムを剥離してから、硬化したレジスト上に、同様に穴を開けたドライフィルムレジストを保護フィルムを剥離して、穴の位置をあわせてラミネートした(中心位置ずれ誤差0.2mm以内)。これを幅15mm×長さ480mmの長方形に裁断して、基板接続用テープを得た。その際、長辺(480mm辺)をY方向から1°傾くように裁断した。   A commercially available dry film resist (resin film thickness 25 μm) is punched with circular holes having the diameters shown in Table 1 at equal intervals in the X and Y directions perpendicular to each other at a 50 mm pitch, and the protective film is peeled off to obtain a thickness of 18 μm. The resist film was cured by laminating on a copper foil and irradiating with ultraviolet rays. After the support film was peeled off, the protective film was peeled off from the dry film resist, which was similarly perforated, on the cured resist, and the holes were aligned (lamination error within 0.2 mm). This was cut into a rectangle with a width of 15 mm and a length of 480 mm to obtain a substrate connecting tape. At that time, the long side (480 mm side) was cut so as to be inclined by 1 ° from the Y direction.

片面に銅箔を有するシート状基板材料(500mm×250mm、銅箔の厚み12μm、ポリイミド基材の厚み25μm)の長辺(500mm辺)の間隔が約1mmとなるように、基板接続用テープを支持フィルムを剥離してから、図9のように、フレキシブル基板材料の銅箔面の縁部に、90℃に加熱した熱ロールで0.1MPaで加圧して貼り付けて、シート状基板材料を連結して、連結基板(サンプル2〜5)を得た。またポンチで穴を開けていない以外は同様の方法で、連結基板(サンプル1)を得た。なお、基板接続用テープは、図8のように片面だけに貼り付けた。   The tape for connecting substrates is used so that the distance between the long sides (500 mm sides) of the sheet-like substrate material (500 mm × 250 mm, copper foil thickness 12 μm, polyimide base material thickness 25 μm) having copper foil on one side is about 1 mm. After peeling off the support film, as shown in FIG. 9, the sheet-like substrate material is attached to the edge of the copper foil surface of the flexible substrate material by applying pressure at 0.1 MPa with a hot roll heated to 90 ° C. It connected and obtained the connection board | substrate (samples 2-5). Moreover, the connection board | substrate (sample 1) was obtained by the same method except not making the hole with the punch. In addition, the board | substrate connection tape was affixed only on one side like FIG.

ケースレーインスツルメンツ株式会社製エレクトロメーター617型を用い、印加電圧1Vで、連結基板の隣接するシート状基板材料間の電気抵抗を測定した。表1の各サンプルについて同じ試料を10個ずつ作製し、電気抵抗が1Ω未満となる試料の割合(%)を導電接続率とした。結果を表1に示す。なおサンプル3の基板接続用テープには直径2mmの円を包含可能な大きさの領域Aがあった。本発明によれば、シート状基板材料を確実に導電接続できることが確認された。   Using an electrometer 617 model manufactured by Keithley Instruments Co., Ltd., the electrical resistance between the sheet-like substrate materials adjacent to the connection substrate was measured at an applied voltage of 1V. Ten identical samples were prepared for each sample in Table 1, and the ratio (%) of the samples having an electrical resistance of less than 1Ω was defined as the conductive connection rate. The results are shown in Table 1. Note that the substrate connection tape of Sample 3 had a region A having a size capable of including a circle having a diameter of 2 mm. According to the present invention, it has been confirmed that the sheet-like substrate material can be reliably conductively connected.

Figure 0004559367
Figure 0004559367

上記の連結基板をエッチング・レジスト剥離・水洗・乾燥の連続した処理機に材料を挿入したところ、エッチング工程の途中で基板接続用テープの銅箔が溶解して除去されたが、基板材料は強固に連結していた。そして次のレジスト剥離工程で基板接続用テープは完全に溶解除去され、フレキシブル基板材料はシート状に分離されて、処理機より排出された。   When the material was inserted into a processing machine that continued etching, resist stripping, washing with water, and drying the above connection board, the copper foil of the substrate connecting tape was dissolved and removed during the etching process, but the substrate material was strong. It was connected to. In the next resist stripping step, the substrate connecting tape was completely dissolved and removed, and the flexible substrate material was separated into a sheet and discharged from the processing machine.

市販のドライフィルムレジスト(樹脂膜厚25μm)に表2に示す長さの辺を有する正方形の穴を1個開け、保護フィルムを剥離して、厚さ12μmの銅箔にラミネートし、紫外線を照射してレジストフィルムを硬化させた。支持フィルムを剥離してから、硬化したレジスト上に、同様に穴を開けたドライフィルムレジストを保護フィルムを剥離して、穴が重なるようにラミネートした(位置ずれ誤差0.2mm以内)。穴が中心にくるように直径50mmの円形に裁断して、基板接続用テープを得た。   Open a square hole with the sides shown in Table 2 in a commercially available dry film resist (resin film thickness 25 μm), peel off the protective film, laminate it on a 12 μm thick copper foil, and irradiate with ultraviolet rays. The resist film was cured. After the support film was peeled off, the protective film was peeled off from the dry film resist which was similarly perforated on the cured resist, and laminated so that the holes overlapped (position error within 0.2 mm). The tape was cut into a circle with a diameter of 50 mm so that the hole was in the center, and a substrate connecting tape was obtained.

片面に銅箔を有するシート状基板材料(100mm×100mm、銅箔の厚み12μm、ポリイミド基材の厚み25μm)のほぼ中央に、基板接続用テープを支持フィルムを剥離してから、60℃に加熱した熱ロールで0.1MPaで加圧して、銅箔面に貼り付けて、貼付試料(サンプル7〜11)を得た。また穴を開けていない以外は同様の方法で、貼付試料(サンプル6)を得た。   At approximately the center of the sheet-like substrate material (100 mm × 100 mm, copper foil thickness 12 μm, polyimide base material thickness 25 μm) having copper foil on one side, the substrate connecting tape is peeled off and heated to 60 ° C. The applied hot roll was pressurized at 0.1 MPa and pasted on the copper foil surface to obtain pasted samples (samples 7 to 11). A pasted sample (sample 6) was obtained in the same manner except that no hole was formed.

ケースレーインスツルメンツ株式会社製エレクトロメーター617型を用い、印加電圧1Vで、貼付試料のシート状基板材料と基板接続用テープの間の電気抵抗を測定した。表2の各サンプルについて同じ試料を10個ずつ作製し、電気抵抗が1Ω未満となる試料の割合(%)を導電接続率とした。次に導電接続率を測定したすべての試料について、試料の1辺を支持して、5分間激しく揺動させた後、シート状基板材料と基板接続用テープの間の電気抵抗を測定し、電気抵抗が1Ω未満となる試料の割合(%)を強制試験後の導電接続率とした。結果を表2に示す。なおサンプル8の基板接続用テープの領域Aは直径2mmの円を包含可能であった。本発明によれば、シート状基板材料を確実に導電接続できることが確認された。またサンプル10の領域Aは直径10mmの円に包含されたが、サンプル11の領域Aは直径10mmの円に包含されなかった。   The electrical resistance between the sheet-like substrate material of the attached sample and the substrate connecting tape was measured with an applied voltage of 1 V using an electrometer type 617 manufactured by Keithley Instruments Co., Ltd. Ten identical samples were prepared for each sample in Table 2, and the ratio (%) of the samples with an electrical resistance of less than 1Ω was defined as the conductive connection rate. Next, for all samples for which the conductive connection ratio was measured, one side of the sample was supported and rocked vigorously for 5 minutes, and then the electrical resistance between the sheet substrate material and the substrate connecting tape was measured, The ratio (%) of the sample with a resistance of less than 1Ω was defined as the conductive connection rate after the forced test. The results are shown in Table 2. The region A of the substrate connecting tape of Sample 8 could include a circle with a diameter of 2 mm. According to the present invention, it has been confirmed that the sheet-like substrate material can be reliably conductively connected. The region A of the sample 10 was included in a circle with a diameter of 10 mm, but the region A of the sample 11 was not included in a circle with a diameter of 10 mm.

Figure 0004559367
Figure 0004559367

基板接続用テープのレジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域の平面図。The top view of the area | region which does not have both the layer which melt | dissolves in the resist removal liquid of a board | substrate connection tape, and has etching resistance, and the layer which melt | dissolves in a resist removal liquid, and has adhesiveness. 基板接続用テープのレジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域の平面図。The top view of the area | region which does not have both the layer which melt | dissolves in the resist removal liquid of a board | substrate connection tape, and has etching resistance, and the layer which melt | dissolves in a resist removal liquid, and has adhesiveness. 基板接続用テープのレジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域の平面図。The top view of the area | region which does not have both the layer which melt | dissolves in the resist removal liquid of a board | substrate connection tape, and has etching resistance, and the layer which melt | dissolves in a resist removal liquid, and has adhesiveness. 基板接続用テープの断面図。Sectional drawing of the tape for board | substrate connection. レジスト除去液に溶解し且つ耐エッチング性を有する層、およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有する基板接続用テープの平面図。The top view of the board | substrate connection tape which has an area | region which does not have both the layer which melt | dissolves in a resist removal liquid, and has etching resistance, and the layer which melt | dissolves in a resist removal liquid, and has adhesiveness. レジスト除去液に溶解し且つ耐エッチング性を有する層、およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有する基板接続用テープの平面図。The top view of the board | substrate connection tape which has an area | region which does not have both the layer which melt | dissolves in a resist removal liquid, and has etching resistance, and the layer which melt | dissolves in a resist removal liquid, and has adhesiveness. 両面に基板接続用テープでシート状基板材料を連結した部分の断面図。Sectional drawing of the part which connected the sheet-like board | substrate material with the tape for board | substrate connection on both surfaces. 片面に基板接続用テープでシート状基板材料を連結した部分の断面図。Sectional drawing of the part which connected the sheet-like board | substrate material with the tape for board | substrate connection on the single side | surface. 基板接続用テープで接続した基板の平面図。The top view of the board | substrate connected with the tape for board | substrate connection. 基板接続用テープで接続した基板の平面図。The top view of the board | substrate connected with the tape for board | substrate connection. 基板接続用テープで接続した基板の平面図。The top view of the board | substrate connected with the tape for board | substrate connection. 基板接続用テープで接続した基板の平面図。The top view of the board | substrate connected with the tape for board | substrate connection. 基板接続用テープで接続した基板の平面図。The top view of the board | substrate connected with the tape for board | substrate connection. 基板接続用テープで接続した基板の平面図。The top view of the board | substrate connected with the tape for board | substrate connection.

符号の説明Explanation of symbols

1 直径2mmの円
2 直径10mmの円
3 基板接続用テープのレジスト除去液に溶解し且つ耐エッチング性を有する層、およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域
4 基板接続用テープ
5 エッチング液に溶解する金属層
6 レジスト除去液に溶解し且つ耐エッチング性を有する層
7 レジスト除去液に溶解し且つ粘着性を有する層
8 基板接続用テープのレジスト除去液に溶解し且つ耐エッチング性を有する層があり、レジスト除去液に溶解し且つ粘着性を有する層がない領域
9 レジスト除去液に溶解し且つ粘着性を有する層があり、レジスト除去液に溶解し且つ耐エッチング性を有する層がない領域
10 基板接続用テープのレジスト除去液に溶解し且つ耐エッチング性を有する層、およびレジスト除去液に溶解し且つ粘着性を有する層の両方がある領域
11 シート状基板材料
12 シート状基板材料の金属層
13 シート状基板材料の絶縁層
DESCRIPTION OF SYMBOLS 1 Circle with a diameter of 2 mm 2 Circle with a diameter of 10 mm 3 Region having both a layer that is dissolved in a resist removing solution of a substrate connecting tape and has etching resistance, and a layer that is dissolved in a resist removing solution and has an adhesive property Connecting tape 5 Metal layer dissolved in etching solution 6 Layer dissolved in resist removing solution and having etching resistance 7 Layer dissolved in resist removing solution and having adhesiveness 8 Dissolved in resist removing solution of substrate connecting tape In addition, there is a layer having an etching resistance, which is dissolved in the resist removing solution and there is no adhesive layer. 9 There is a layer which is dissolved in the resist removing solution and has an adhesive property, and is dissolved in the resist removing solution and is resistant to etching. 10 A region that does not have a property layer 10 A layer that dissolves in the resist removal solution of the substrate connecting tape and has an etching resistance, and a solution in the resist removal solution Area where both the undissolved and adhesive layers are present 11 Sheet-like substrate material 12 Metal layer of sheet-like substrate material 13 Insulating layer of sheet-like substrate material

Claims (4)

少なくともエッチング液に溶解する金属層と、レジスト除去液に溶解し且つ耐エッチング性を有する層と、レジスト除去液に溶解し且つ粘着性を有する層とが順次積層されてなる基板接続用テープにおいて、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有することを特徴とする基板接続用テープ。   In a tape for connecting substrates, in which at least a metal layer that is dissolved in an etching solution, a layer that is dissolved in a resist removal solution and has etching resistance, and a layer that is dissolved in a resist removal solution and has adhesiveness are sequentially laminated. A tape for connecting a substrate, characterized in that it has a region free from both a layer that dissolves in a resist removing solution and has etching resistance and a layer that dissolves in a resist removing solution and has an adhesive property. 少なくともエッチング液に溶解する金属層と、レジスト除去液に溶解し且つ耐エッチング性を有する層と、レジスト除去液に溶解し且つ粘着性を有する層とが順次積層されてなる基板接続用テープでシート状基板材料の搬送方向の縁部同士を互いに連結して搬送するプリント基板の製造方法において、レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域を有する基板接続用テープでシート状基板材料間を導電接続することを特徴とするプリント基板の製造方法。   At least a metal layer that dissolves in an etching solution, a layer that dissolves in a resist removal solution and has etching resistance, and a substrate connection tape in which a layer that dissolves in a resist removal solution and has adhesive properties is sequentially laminated. In a printed circuit board manufacturing method in which edges in the transport direction of a substrate-like substrate material are connected to each other and transported, a layer that dissolves in a resist removal solution and has etching resistance and a layer that dissolves in a resist removal solution and has adhesiveness A method for producing a printed circuit board comprising conducting conductive connection between sheet-like board materials with a board-connecting tape having a region in which both are absent. レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域が直径2mmの円を包含可能な大きさであることを特徴とする請求項1に記載の基板接続用テープ。   The region in which both the layer that dissolves in the resist removing solution and has etching resistance and the layer that dissolves in the resist removing solution and does not have the adhesive layer has a size capable of including a circle having a diameter of 2 mm. Item 2. A substrate connecting tape according to Item 1. レジスト除去液に溶解し且つ耐エッチング性を有する層およびレジスト除去液に溶解し且つ粘着性を有する層の両方がない領域が直径2mmの円を包含可能な大きさであることを特徴とする請求項2に記載のプリント基板の製造方法。   The region in which both the layer that dissolves in the resist removing solution and has etching resistance and the layer that dissolves in the resist removing solution and does not have the adhesive layer has a size capable of including a circle having a diameter of 2 mm. Item 3. A printed circuit board manufacturing method according to Item 2.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0413789A (en) * 1990-05-08 1992-01-17 Shin Etsu Polymer Co Ltd Conductive adhesive film and production thereof
JP2003342543A (en) * 2002-05-29 2003-12-03 Nippon Tekku Kk Tape for joining board and etching method using the tape
JP2004043848A (en) * 2002-07-09 2004-02-12 Nippon Tekku Kk Tape for connecting substrate, and method for etching substrate
JP2006269560A (en) * 2005-03-22 2006-10-05 Mitsubishi Paper Mills Ltd Process for producing flexible substrate using substrate connection tape
JP2007096037A (en) * 2005-09-29 2007-04-12 Mitsubishi Paper Mills Ltd Method of manufacturing printed circuit board using board connecting tape

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0413789A (en) * 1990-05-08 1992-01-17 Shin Etsu Polymer Co Ltd Conductive adhesive film and production thereof
JP2003342543A (en) * 2002-05-29 2003-12-03 Nippon Tekku Kk Tape for joining board and etching method using the tape
JP2004043848A (en) * 2002-07-09 2004-02-12 Nippon Tekku Kk Tape for connecting substrate, and method for etching substrate
JP2006269560A (en) * 2005-03-22 2006-10-05 Mitsubishi Paper Mills Ltd Process for producing flexible substrate using substrate connection tape
JP2007096037A (en) * 2005-09-29 2007-04-12 Mitsubishi Paper Mills Ltd Method of manufacturing printed circuit board using board connecting tape

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