JP4478770B2 - ケイ素系ポリマーブレンドによる薄壁マイクロセラミックチューブの製造方法 - Google Patents
ケイ素系ポリマーブレンドによる薄壁マイクロセラミックチューブの製造方法 Download PDFInfo
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- JP4478770B2 JP4478770B2 JP2004331648A JP2004331648A JP4478770B2 JP 4478770 B2 JP4478770 B2 JP 4478770B2 JP 2004331648 A JP2004331648 A JP 2004331648A JP 2004331648 A JP2004331648 A JP 2004331648A JP 4478770 B2 JP4478770 B2 JP 4478770B2
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- fiber
- tube
- silicon
- based polymer
- ceramic tube
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- 238000004519 manufacturing process Methods 0.000 title claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 10
- 229910052710 silicon Inorganic materials 0.000 title claims description 10
- 239000010703 silicon Substances 0.000 title claims description 10
- 229920002959 polymer blend Polymers 0.000 title claims description 5
- 239000000835 fiber Substances 0.000 claims description 24
- 239000000919 ceramic Substances 0.000 claims description 14
- 229920003257 polycarbosilane Polymers 0.000 claims description 14
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 14
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000012510 hollow fiber Substances 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 230000005865 ionizing radiation Effects 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 229920002554 vinyl polymer Polymers 0.000 claims 1
- 230000005855 radiation Effects 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000004108 freeze drying Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002074 melt spinning Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- PTVDYARBVCBHSL-UHFFFAOYSA-N copper;hydrate Chemical compound O.[Cu] PTVDYARBVCBHSL-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229920005594 polymer fiber Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000012783 reinforcing fiber Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
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- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
- Inorganic Fibers (AREA)
Description
ビニルシランのポリマーブレンドを出発原料とすることにより、壁厚が5ミリミクロン以下のセラミックチューブを簡便に製造すると共に、従来の製造工程を簡略化する方法を提供することにある。
Claims (3)
- ポリカルボシランとポリビニルシランからなるケイ素系ポリマーブレンド繊維を、酸素を含む雰囲気下で電離放射線により表面のみ酸化架橋し、有機溶媒により繊維中心部の未架橋部分を抽出除去して中空繊維とし、これを不活性ガス中で焼成して、壁厚が5ミクロン以下のマイクロ炭化ケイ素セラミックチューブを製造する方法。
- ポリビニルシランのブレンドにより、従来のセラミックチューブの製造工程上で必要であった、放射線照射後の熱処理を不要にする請求項1記載の方法。
- ポリカルボシランとポリビニルシランの配合比により、セラミックチューブの壁厚を制御する請求項1記載の方法。
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004331648A JP4478770B2 (ja) | 2004-11-16 | 2004-11-16 | ケイ素系ポリマーブレンドによる薄壁マイクロセラミックチューブの製造方法 |
| US11/274,504 US7964171B2 (en) | 2004-11-16 | 2005-11-16 | Process for producing silicon carbide ceramic micro tube with thin wall |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004331648A JP4478770B2 (ja) | 2004-11-16 | 2004-11-16 | ケイ素系ポリマーブレンドによる薄壁マイクロセラミックチューブの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006144134A JP2006144134A (ja) | 2006-06-08 |
| JP4478770B2 true JP4478770B2 (ja) | 2010-06-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004331648A Expired - Fee Related JP4478770B2 (ja) | 2004-11-16 | 2004-11-16 | ケイ素系ポリマーブレンドによる薄壁マイクロセラミックチューブの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4478770B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4665132B2 (ja) * | 2004-12-22 | 2011-04-06 | 独立行政法人 日本原子力研究開発機構 | 炭化ケイ素マイクロチューブの冷却照射による壁厚制御法 |
| JP4999081B2 (ja) * | 2007-05-09 | 2012-08-15 | 独立行政法人日本原子力研究開発機構 | 高強度炭化ケイ素マイクロチューブの製造方法 |
| KR100915969B1 (ko) | 2007-05-10 | 2009-09-10 | 한국세라믹기술원 | 폴리카보실란 튜브의 제조방법, 기공율이 제어된 탄화규소계 튜브의 제조방법 및 그 탄화규소계 튜브 |
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2004
- 2004-11-16 JP JP2004331648A patent/JP4478770B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006144134A (ja) | 2006-06-08 |
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