JP4476760B2 - Optical measuring device and optical pickup lens adjusting device - Google Patents

Description

  The present invention relates to an optical measurement device and an optical pickup lens adjustment device.

  The optical pickup lens adjustment device is, for example, an optical pickup lens (hereinafter referred to as “lens W”) provided in an optical pickup device mounted on a CD (Compact Disk), a DVD (Digital Versatile Disk, or Digital Video Disk) or the like. Whether or not the assembly is correctly performed, that is, whether or not the lens W is assembled in a horizontal state (inclination is horizontal) is measured by an optical measurement device in the optical pickup lens adjustment device, and this Based on the measurement result, the inclination of the lens W is adjusted to a normal angle (horizontal) by the driving means.

Here, as an optical measuring apparatus, for example, an apparatus using an autocollimator is known as shown in FIG. This is because the light from the laser light source 1 serving as the light projecting means is converted into parallel light by the collimating lens 2 and irradiated onto the surface of the lens W, and the specularly reflected light is condensed by the converging lens 4 via the half mirror 3, and the CCD 5 The inclination of the lens W is measured based on the condensing position formed on the imaging surface 5A.
JP 2001-304831 A

  By the way, when assembling the lens W, not only the inclination but also the position of the lens W (the position in the horizontal direction) is not accurately assembled, so that no light is emitted toward a predetermined position. Can not achieve accuracy.

  On the other hand, since the position of the lens W (the position in the horizontal direction) cannot be measured with the above-described configuration, when trying to measure the position of the lens W, for example, a dedicated external camera is installed, and laser light irradiation is performed. A method for monitoring the position is conceivable. However, when an external camera is used, the cost increases correspondingly, and there is a problem of securing an arrangement space.

  The present invention has been completed based on the above circumstances, and provides an optical measuring device and an optical pickup lens adjusting device capable of measuring the angle and position of an optical component without increasing the size of the device. The purpose is to do.

As a means for achieving the above object, the invention of claim 1 is an optical measuring device for irradiating light to an optical component and measuring the mounting angle of the optical component based on the reflected light. A light projecting means for measuring an angle to be emitted; a collimating lens that collimates the light emitted from the light projecting means and irradiates the optical component having a size within the irradiation area of the parallel light; Branching means for branching specularly reflected light irradiated from the collimating lens and specularly reflected on the optical component in a direction different from the light projecting means, and convergence for converging the specularly reflected light reflected on the optical component An angle measuring image pickup means having an image pickup surface on which convergent light converged by the converging lens is incident, and parallel light that is irradiated from the collimating lens and is not obstructed by the optical component A position measurement pickup means having an imaging surface but is incident, a light projecting means for distance measurement for emitting parallel light so that the incident angle oblique to the optical component, projecting for the distance measurement A distance measuring imaging unit having an imaging surface on which reflected light emitted from the optical unit and reflected on the optical component is incident; and the optical component based on a light incident position on the imaging surface of the angle measuring imaging unit. and determines the mounting angle, and determines a position with respect to the direction perpendicular to the optical axis of the optical component based on the incident light position on the imaging plane of the position measuring imaging means, the imaging plane of the distance measuring image pickup means determining means for determining the distance in the optical axis direction of the optical component on the basis of said the incident position mounting angle, it becomes provided with a light projecting means for said angular measurement for the distance measurement Light is simultaneously emitted from the optical means to measure the angle and distance of the optical component at the same time. The angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are different in measurement timing. And a projection amount setting unit for determining the amount of light emitted from the angle measurement projection unit, and the projection amount setting unit includes an angle measurement projection mode and It is characterized in that a position measurement light projection mode having a larger light projection amount than the angle measurement light projection mode is provided .
Here, the light that has traveled without being blocked by the optical portion includes both transmitted light that has passed through the optical component and transmitted light that has passed through the side of the optical component.

According to a second aspect of the invention, there is provided the distance measuring convergent lens for converging the specularly reflected light for distance measurement reflected on the optical component according to the first aspect of the invention. The converging light is configured to enter the distance measuring imaging means, and
The distance measuring imaging means is configured to be arranged rearwardly with respect to the traveling direction of the convergent light with respect to the direction in which the converged light passing through the distance measuring convergent lens is focused, and the distance measuring A diverging lens is provided between the image pickup means and the distance measuring converging lens, located behind the focal point, and the converging light is set to pass through the periphery of the diverging lens. Have

According to a third aspect of the invention, there is provided the configuration according to the first or second aspect , wherein the angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings. In the position measurement, it is characterized in that the light projection from the distance measurement light projection means is stopped.

According to a fourth aspect of the present invention, there is provided the projector according to any one of the first to third aspects, wherein the optical component is a mirror body, and the angle measuring light projecting means and the distance measuring light projecting means. Can emit polarized light of the same polarization direction, the branching means is composed of a polarizing beam splitter, and a quarter wavelength plate is disposed between the polarizing beam splitter and the optical component. Has characteristics.

The invention according to claim 5 is the laser light source according to claim 4 , wherein the angle measuring light projecting means and the distance measuring light projecting means are capable of emitting polarized light having the same polarization direction. However, it has characteristics.

The invention according to claim 6 is an optical measuring device that irradiates light to an optical pickup lens that converges light from a light source and emits the light to the outside, and measures an attachment angle of the optical pickup lens based on the reflected light, and An optical pickup lens adjustment device including a lens adjustment unit that adjusts an attachment angle of the optical pickup lens based on a measurement result by an optical measurement device, wherein the lens adjustment unit can adjust an attachment angle of the optical pickup lens A first adjustment stage, a second adjustment stage capable of adjusting a position in a direction perpendicular to the optical axis of the optical pickup lens, a third adjustment stage capable of adjusting a distance of the optical pickup lens, and control means for driving and controlling each adjustment stage, the optical measuring device, for angle measurement for emitting light From the collimating lens, a collimating lens that collimates the light emitted from the light means, the light emitted from the light projecting means, and irradiates the collimated light to the optical pickup lens having a size within the collimated light irradiation area. Branching means for branching specularly reflected light that has been irradiated and specularly reflected on the optical pickup lens in a direction different from the light projecting means, and a converging lens for converging the specularly reflected light reflected on the optical pickup lens; An angle measuring imaging unit having an imaging surface on which convergent light converged by the convergent lens is incident, and parallel light that is irradiated from the collimator lens and is not blocked by the optical pickup lens is incident. a position measurement pickup means having an image pickup surface, the incident angle with respect to the optical pickup lens for distance measurement for emitting parallel light to be obliquely An optical unit, a distance measuring image pickup device having an imaging surface on which the distance measurement is the output from the light emitting means reflected light reflected on the optical pickup lens is incident, an imaging plane of the angle measuring image pickup means The mounting angle of the optical pickup lens is determined based on the light incident position at, and the position in the direction orthogonal to the optical axis of the optical pickup lens is determined based on the light incident position on the imaging surface of the position measuring imaging means. And determining means for determining a distance in the optical axis direction of the optical pickup lens based on a light incident position on the imaging surface of the distance measuring imaging means and the mounting angle, and measuring the angle. Angle measurement and distance measurement of the optical pickup lens by simultaneously emitting light from the light projection means for light and the light projection means for distance measurement The angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings, and are emitted from the angle measurement light projecting means. The projector includes a light projection amount setting unit that determines the magnitude of the amount of light, and the light projection amount setting unit includes an angle measurement projection mode and a position measurement projection mode having a larger projection amount than the angle measurement projection mode. provided, the angle of the control means an optical pickup lens obtained from the determining means, the position, the-out regular inclination of the optical pickup lens by driving each stage based on the distance information, the position and distance There is a feature in the adjustment.

According to a seventh aspect of the invention, there is provided the distance measuring converging lens according to the sixth aspect , wherein the distance measuring converging lens for converging the specularly reflected light for distance measurement reflected on the optical pickup lens is passed through the distance measuring converging lens. The distance measuring imaging means is configured to cause the convergent light to enter the distance measuring imaging means, and the distance measuring imaging means is configured to receive the converged light from the position where the convergent light passing through the distance measuring focusing lens is focused. A diverging lens is provided on the rear side of the focal point between the distance measuring imaging means and the distance measuring converging lens, with a configuration in which the position is shifted rearward with respect to the traveling direction. And the convergent light is set to pass through the periphery of the diverging lens .

The invention according to claim 8 is the structure according to claim 6 or 7 , wherein the angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings. In the position measurement, it is characterized in that the light projection from the distance measurement light projection means is stopped.

A ninth aspect of the present invention is the projector according to any one of the sixth to eighth aspects, wherein the optical pickup lens is a mirror body, and the light projecting means for measuring the angle and the light projecting for measuring the distance. It is possible to emit polarized light having the same polarization direction as the means, the branching means is composed of a polarizing beam splitter, and a quarter wavelength plate is disposed between the polarizing beam splitter and the optical pickup lens. However, it has characteristics.

A tenth aspect of the present invention is the laser light source according to the ninth aspect , wherein the angle measuring light projecting means and the distance measuring light projecting means are capable of emitting polarized light having the same polarization direction. However, it has characteristics.

<Invention of Claims 1 and 6 >
According to the first and sixth aspects of the invention, the angle measurement and the position measurement of the optical component (optical pickup lens) can be performed by one light projecting unit. In addition, by setting the light projection amount at the time of angle measurement to be small, measurement errors caused by energy saturation can be eliminated.

In addition to angle / position measurement, distance measurement is also possible. In addition, a signal with a higher output level can be obtained from the imaging means than when the emitted light is divergent light.

In addition, since the optical path is inclined, the distance can be measured even if the optical component is a specular body (one that reflects light regularly). In addition, since the angle measurement and the distance measurement are performed simultaneously, the measurement accuracy is increased.
<Invention of Claims 2 and 7 >
According to the second and seventh aspects of the invention, the specularly reflected light is incident on the distance measuring imaging means while converging, which contributes to downsizing of the imaging means and the like constituting the apparatus.

<Invention of Claim 3 and Claim 8 >
According to the third and eighth aspects of the present invention, the distance light does not enter the imaging surface of the position measuring imaging means. Therefore, measurement errors are eliminated, and highly reliable measurement results can be obtained.
<Invention of Claims 4 and 9 >
According to the invention of claim 4 and claim 9 , since the optical loss can be reduced, the S / N ratio can be improved.

<Invention of Claims 5 and 10 >
According to the fifth and tenth aspects of the present invention, the number of parts can be reduced because a filter for extracting linearly polarized light is not required.

<Embodiment 1>
The optical pickup lens adjusting device 20 of the present embodiment adjusts the mounting angle and the mounting position of the optical pickup lens of the optical pickup device 10 mounted on a CD (Compact Disk), a DVD (Digital Versatile Disk) or the like. It is for the purpose. In FIG. 1, the horizontal direction of the drawing is defined as the X axis, the direction orthogonal to the paper surface is defined as the Y axis, and the vertical direction of the drawing is defined as the Z axis. Hereinafter, the adjustment of the mounting position is the optical axis of the optical pickup lens (relative to the lens). The adjustment of the position in the direction orthogonal to the orthogonal axis L1 (X and Y axis directions in FIG. 1) is shown.

Configuration of Optical Pickup Device The optical pickup device 10 includes a pair of upper and lower casings 10A and 10B that are divided into upper and lower parts as shown in FIG. Among these, the lower casing 10B accommodates a light projecting / receiving element 11 (corresponding to the light source of the present invention), a quarter wavelength plate 12, a reflecting mirror 13, and a collimating lens. On the other hand, the lens unit 15 is accommodated in the upper casing 10A. The lens unit 15 has a built-in fixture 16 on which an optical pickup lens is mounted. These upper and lower casings 10A and 10B are combined after adjusting the mounting angle and position of the optical pickup lens by an optical pickup lens adjusting device 20 described later.

  The light emitted from the light projecting / receiving element 11 of the optical pickup device 10 is converted into parallel light by passing through the quarter-wave plate 12 and the reflecting mirror 13 through the collimating lens 14, and then converted into parallel light by the optical pickup lens. It is converged and emitted to the outside.

Configuration of Optical Pickup Lens Adjustment Device 20 The optical pickup lens adjustment device 20 is based on an optical measurement device 21 that measures the mounting angle and mounting position of an optical pickup lens (which will be described later, using a measuring workpiece W), and a measurement result. And an optical pickup lens (measuring workpiece W) is provided with a lens adjusting section 41 for adjusting the normal angle and the normal position.
In the present embodiment, the measurement work W (half mirror, light attenuating plate) made of partially transmissive glass having a flat surface instead of the optical pickup lens is used for the measurement by the optical measurement device 21 and the adjustment by the lens adjustment unit 41. The measurement workpiece W is assembled into an optical pickup lens when the measurement workpiece W is in a normal state (desired mounting angle / position). Yes. In this way, the optical pickup lens is not directly measured / adjusted, but instead of the measurement workpiece W, the surface of the optical pickup lens is a curved surface. This is because the accuracy of measurement is higher.

  The fixture 16 is provided with positioning means for the optical pickup lens (for example, using concave and convex fitting). Once the measurement workpiece W including the fixture 16 is adjusted to the normal state, If the measurement work W is replaced with an optical pickup lens, the optical pickup lens can be attached to the optical unit 15 in a positioned state. Further, the optical pickup lens and the measurement workpiece W used as a substitute for the optical pickup lens correspond to the optical component of the present embodiment.

(1) Optical Measuring Device As shown in FIG. 1, the optical measuring device 21 includes a laser light source 22 (corresponding to the angle measuring light projecting means of the present invention), a collimating lens 23 arranged in front thereof, a beam splitter (this 24 (corresponding to the branching means of the invention) 24, a converging lens 25, an angle measuring image pickup element 27 (corresponding to the angle measuring image pickup means of the invention) 27 and a position measuring image pickup element (for position measurement of the invention). It is mainly composed of an imaging unit 28), a CPU 35, and a memory 36 (corresponding to the light intensity setting unit of the present invention). The angle measuring image sensor 27 is arranged above the measuring work W in FIG. 1, whereas the position measuring image sensor 28 is on the opposite side, that is, below the measuring work W (beam). It is arranged on the front side in the traveling direction of the reflected light reflected by the splitter 24.

  When the projection signal Sa is sent from the CPU 35 to the laser drive circuit 22A, light is emitted from the laser light source 22. The light emitted from the laser light source 22 is converted into parallel light by the collimator lens 23, and this parallel light is reflected by the beam splitter 24 at a substantially right angle and is irradiated onto the measurement workpiece W (some light passes through the beam splitter 24). To Penetrate). The reflected parallel light irradiation area (the width of light, dimension A shown in FIG. 1) is set to be larger than the measurement work W, and the entire measurement work W is within the parallel light irradiation area. It comes to fit.

  Thereby, the light irradiated on the measurement work W among the parallel light is specularly reflected on the measurement work W and travels toward the converging lens 25, whereas the light passing through the side of the measurement work W is positioned. Light enters the image sensor 28 for measurement. Then, the angle measurement of the measurement workpiece W is performed based on the regular reflection light, and the position measurement of the measurement workpiece W is performed using the passing light.

  First, the angle measurement will be described. The specularly reflected light then passes through the beam splitter 24 (note that some of the light is branched off from the transmitted light and reflected to the laser light source 22 side). Thereafter, the transmitted light is converged by the converging lens 25 and condensed on the imaging surface 27 </ b> A of the angle measuring imaging device 27. Then, an image pickup signal Sc composed of a digital signal sequence corresponding to the condensing position is output to the CPU 35. On the other hand, an arithmetic expression (1) described later is written in the memory 36. The CPU 35 reads out the arithmetic expression (1) from the memory 36 in accordance with the output of the imaging signal Sc, and calculates the central position of the light collection based on the readout arithmetic expression (1) and the imaging signal Sc. The center position of the light collection can be calculated based on the area centroid or the volume centroid, but in the embodiment, the center position based on the area centroid (area centroid position) is adopted.

  Then, the CPU 35 performs an autocollimation method (details) from the distance and direction between the obtained condensing center position R1 and the reference position on the imaging surface 27A (the condensing spot position R0 when the measurement workpiece W has no inclination). The mounting angle (inclination) θ1 of the measurement workpiece W is calculated based on the following description (see FIG. 2). The CPU 35 corresponds to the determining means of the present invention.

<Calculation formula (1)>
Central alignment = {Σ (MI) / ΣM}
I: Position vector of each pixel on the imaging surface M: Sample pixel is 1 among each pixel, 0 is not
A sample pixel is a pixel of an output signal whose signal magnitude is equal to or greater than a predetermined reference value in the imaging signal.

  Next, the position measurement will be described. As shown in FIG. 3, the light that has passed through the measurement workpiece W then directly enters the imaging surface 28 </ b> A of the position measurement imaging element 28. As a result, a ring-shaped optical image M following the outer shape of the measurement workpiece W appears on the imaging surface 28A as shown in FIG. In addition, although the light which permeate | transmitted the workpiece | work W for a measurement also injects on the imaging surface 28A, the transmitted light has a low output level, In this embodiment, the data of transmitted light are not taken in as a sample pixel.

  Then, the image sensor 28 for position measurement outputs to the CPU 35 an image signal Sd composed of a digital signal sequence corresponding to the light image M. Thereafter, in the CPU 35, the center position C1 of the optical image M is calculated based on the arithmetic expression (1) described above. The distance between the center position C1 of the obtained optical image M and the reference position on the imaging surface (the central position C0 of the optical image M when the measurement workpiece W is not displaced), that is, the position of the measurement workpiece W. A deviation amount x is calculated (see FIG. 4B).

  Further, in the present embodiment, the angle measurement by the angle measurement image sensor 27 and the position measurement image sensor 28 are made to have different measurement timings, and the light emitted from the laser light source 22 by the angle measurement and the position measurement is different. The light emission level is changed. More specifically, the optical measuring device 21 is set with two light projection modes (angle measurement light projection mode and position measurement light projection mode). Among these, in the angle measurement light projection mode, the angle measurement imaging signal Sc is validated, and the position measurement imaging signal Sd is invalidated. On the other hand, during the position measurement light projection mode, the angle measurement imaging signal Sc is invalidated and the position measurement imaging signal Sd is validated. Thereby, the angle and position can be measured in a time-sharing manner (in this embodiment, when the measurement is started, the angle measurement and the position measurement are controlled to be executed sequentially).

  In addition, data for determining a light projection level in each light projection mode is written in the memory 36. When each projection mode is executed, data corresponding to each mode is read from the memory 36, and the projection level of light emitted from the laser light source 22 is determined based on the read data. It has come to be.

  As shown in FIG. 5, the light projection level (light projection level 1) in the angle measurement light projection mode is set smaller than the light projection level (light projection level 2) in the position measurement light projection mode. The reason for this setting is that the angle measurement is performed by converging the specularly reflected light on the image pickup surface 27A. Therefore, even when the light projection level is low (the amount of laser light from the laser light source 22 is small) While the imaging signal Sc having a large level is obtained from the element 27, the position measurement is performed without converging the passing light on the imaging surface 28A. Therefore, the imaging element 28 must be set to a high light projection level. Cannot obtain a high-level imaging signal Sd. If the mode is not set, the light projection level is measured in accordance with a high level (position measurement light projection level) regardless of the angle / position measurement. Then, since the level of the light incident on the angle measurement image sensor 27 becomes too high, energy saturation occurs and a measurement error occurs. However, as described above, if the angle measurement and the position measurement are performed at different timings, it is possible to suppress the light projection level at the time of angle measurement. I can do it.

(2) Lens adjustment unit 41
The lens unit 15 of the optical pickup device 10 has a tilt mechanism (corresponding to the first adjustment stage of the present invention) 42 for adjusting the attachment angle of the attachment 16 to the upper casing 10A, and eventually the measurement workpiece W, and the attachment position. An adjustment stage mechanism 44 (corresponding to the second adjustment stage of the present invention) 44 is attached. When a control signal is sent from the CPU 35, the driver drive circuits 43 and 45 are energized and a drive current is passed through both mechanisms 42 and 44. Thereby, both mechanisms 42 and 44 are driven, and the attachment angle and the attachment position of the measurement workpiece W are adjusted so as to be a desired angle and position (normal state). The CPU 35 corresponds to the control means of the present invention.

  The tilt mechanism 42 includes, for example, two screws (not shown) provided at diagonal positions. These screws are controlled to be stopped and driven by a drive current from a driver drive circuit 43. When one of the screws is turned, the θX direction (measurement work W around the X axis) is controlled. The measurement workpiece W is rotated in the θY direction (the direction in which the measurement workpiece W is rotated around the Y axis) by rotating and displacing the measurement workpiece W in the rotation direction) and rotating the screw on the other side. Is rotated and displaced.

On the other hand, for example, the adjustment stage mechanism 44 includes an X-axis slide mechanism (not shown) slidable in the X-axis direction and a Y-axis slide mechanism (not shown) slidable in the Y-axis direction. Arranged. Both of these slide mechanisms use a motor as a drive source, and stop and drive are controlled by a drive current from a driver drive circuit 43 for driving the motor.
Note that a servo motor is used as a motor for driving the lens adjusting unit 41, and this is feedback-controlled. Accordingly, the measurement workpiece W is automatically adjusted based on the measurement result of the optical measurement device 21 so as to have a desired normal angle and position.

The operation and effect of this embodiment will be described.
Prior to assembling the optical pickup lens to the lens unit 15, first, the measurement work W is used as a substitute to adjust the attachment angle and the attachment position. For this purpose, the measuring workpiece W is mounted on the fixture 16 and the optical measuring device 21 is operated from that state. Then, light is emitted from the laser light source 22 in response to the light projection signal Sa from the CPU 35. The emitted light is collimated by the collimator lens 23 and then irradiated toward the measurement workpiece W.

  Then, the specularly reflected light that is specularly reflected on the measurement workpiece W out of the irradiated light is then converged by the converging lens 25 and collected on the imaging surface 27A of the angle measuring image sensor 27. Then, from the angle measurement image pickup device 27, an image pickup signal Sc composed of a digital signal sequence corresponding to the condensing position is output to the CPU 35. The CPU 35 calculates the condensing center position R1 from the imaging signal Sc, and calculates the attachment angle θ1 of the measurement workpiece W from the distance and direction between the obtained condensing center position R1 and the reference position R0 on the imaging surface 27A. Calculate (see FIG. 2).

  On the other hand, of the parallel light emitted from the collimating lens 23, the light passing through the side of the measurement workpiece W is directly incident on the imaging surface 28A of the position measurement imaging device 28, and a ring is formed on the imaging surface 28A. A shaped optical image M is formed. From the image sensor 28 for position measurement, an image signal Sd composed of a digital signal sequence corresponding to the light image M is output to the CPU 35. Thereafter, the CPU 35 calculates the center position C of the optical image M. Then, the distance between the center position C1 of the obtained optical image M and the reference position C0 on the imaging surface, that is, the positional deviation amount x of the measurement workpiece W is calculated.

  When the measurement of the attachment angle of the measurement work W and the attachment position of the measurement work W is completed, the CPU 35 energizes the driver drive circuits 43 and 45 based on the obtained angle / position information (θ1, x). As a result, the tilt mechanism 42 and the adjustment stage mechanism 44 are respectively driven, and are automatically adjusted so that the attachment angle and attachment position of the measurement workpiece W become a desired angle / position (normal state). Thereafter, the measurement workpiece W is removed from the fixture 16 and reassembled into an optical pickup lens. Thereby, the optical pickup lens can be attached to the lens unit 15 in a normal state.

  As described above, according to the present embodiment, the mounting angle and the position of the measurement workpiece W can be measured by the light projected from the common laser light source 22, so that the position measurement light projecting means is provided separately. In addition, the structure is simpler than that of a configuration in which a dedicated instrument such as an external camera is separately provided, and the optical measuring device 21 does not increase in size. Further, since the position measurement is performed by the light that has passed through the side of the optical component, the attenuation of light due to reflection or the like is small, and the measurement accuracy is increased.

Further, as will be described with reference to FIGS. 6 to 10, a configuration for measuring the distance d of the measuring workpiece W can be added to the optical measuring device 21 of FIG . The distance d of the measurement workpiece W is a direction along the optical axis L1 of the measurement workpiece W and is a displacement along the Z-axis direction in FIG. Hereinafter, the same components as those in the apparatus of FIG. 1 are denoted by the same reference numerals, description thereof is omitted, and only different components will be described.

  Reference numeral 52 is a distance measuring laser light source (corresponding to the distance measuring light projecting means of the present invention), and 57 is a distance measuring image pickup element comprising a two-dimensional CCD. The distance measurement laser light source 52 emits light having a wavelength different from that of the angle measurement laser light source 22. For example, the distance measurement laser light source 52 emits laser light having a wavelength λ 2 for angle measurement. Laser light having a wavelength λ1 is emitted from the laser light source 22. In the following description, light emitted from the laser light source 22 is referred to as angle light La, and light emitted from the laser light source 52 is referred to as distance light Lb.

  Reference numerals 55 and 56 denote dichroic mirrors that both reflect light having a wavelength of λ2 and transmit light having other wavelengths. As a result, the light emitted from the laser light sources 22 and 52 is merged by the dichroic mirror 55 and then directed to the beam splitter 24 where it is irradiated toward the measurement workpiece W. As shown in FIG. 6, the laser beam emitted from the distance measuring laser light source 52 is smaller than the laser beam emitted from the angle measuring laser light source 22 in the spot diameter of the laser light irradiated to the measuring workpiece W. In addition, the laser light from the distance measuring laser light source 52 is irradiated within the irradiation range of the laser light from the angle measuring laser light source 22.

  On the other hand, the dichroic mirror 56 is for splitting light, and among the regular reflection light reflected by the measurement workpiece W, the light having a wavelength of λ1 passes through the dichroic mirror 56 and enters the angle measurement image sensor 27. Those having a wavelength of λ 2 are reflected by the dichroic mirror 56 and then enter the distance measuring image sensor 57.

In the apparatus of FIG. 1 , a collimating lens 23 is disposed between the laser light source 22 and the beam splitter 24, and a converging lens 25 is disposed between the beam splitter 24 and the angle measuring image sensor 27 . In the apparatus, a collimator lens 53 is disposed between the beam splitter 24 and the measurement workpiece W. With this arrangement, the collimator lens 53 has both the function of converting the light emitted from the laser light sources 22 and 52 into parallel light and the function of converging the light regularly reflected by the measurement workpiece W. It becomes the structure which combines. Reference numeral 52A denotes a laser drive circuit, which functions to supply a drive current to each laser light source 52 based on a light projection signal Sb from the CPU 35.

Further, the distance measuring image sensor 57 is disposed behind (on the left side in FIG. 6) the light traveling direction from the position where the distance light Lb is focused. The reason why the imaging surface 57A of the distance measuring image sensor 57 is not matched with the focal position F is that if the distance measuring image sensor 57 is shifted from the focal position F, the distance of the measuring workpiece W is set. Accordingly, the optical path leading to the focal position F changes, so that the optical image is formed at a different position according to the variation in distance. Therefore, the distance d of the measurement workpiece W can be calculated based on the distance between the center positions of the optical images (the distance between P0 and P1) (see FIGS. 7 and 8). In addition, when calculating the center position of the optical image formed on the imaging surface 57A, it may be performed based on the arithmetic expression (1) as described above. If there is an inclination, it is necessary to correct the optical image position based on the inclination (angle information obtained from the angle measuring image sensor 27). This is because, as shown in FIG. 9, the optical path of the distance light Lb changes according to the attachment angle even when the measurement workpiece W is at the same distance d.

  Incidentally, as shown in FIG. 7, the angle light La is irradiated almost at right angles to the irradiation surface Wa of the measurement workpiece W, whereas the distance light Lb is applied to the irradiation surface Wa of the measurement workpiece W. Irradiation is performed with the angle θ inclined. This corresponds to a configuration in which an optical path of light emitted from the distance measuring light projecting means of the present invention and directed toward the optical component is inclined with respect to the irradiation surface of the optical component.

As described above, the distance light Lb is irradiated with the angle θ inclined with respect to the irradiation surface Wa of the measurement workpiece W in order to improve the measurement accuracy of the distance measurement by using parallel light as the distance light Lb. It is. This is because the distance measurement can be performed using divergent light, and in this case, it is not always necessary to irradiate the distance light Lb with respect to the irradiation surface Wa of the work W for measurement. However, in the case of diverging light, the level of the imaging signal Se output from the distance measurement imaging element 57 is lower than that in the case of using parallel light, which causes measurement errors. In the present embodiment, the angle θ of the distance light Lb with respect to the irradiation surface Wa is set to an angle that does not affect the angle measurement even if the distance light Lb enters the angle measurement image sensor 27. .
In the apparatus of FIG. 6 as well, the position measurement of the measurement workpiece W is calculated based on the image pickup signal Sd output from the position measurement image pickup device 28, as in the apparatus of FIG .

Next, processing of the CPU 35 will be described.
The CPU 35 transmits the projection signals Sa and Sb at the same time to emit light from both the laser light sources 22 and 52 at the same time, and in synchronization with this, the imaging signal Sc from the angle measuring image sensor 27 and the distance measuring image sensor 57. The imaging signal Se is received. Thereby, the angle measurement and the distance measurement of the workpiece W for measurement are performed simultaneously. In this way, the simultaneous measurement of the angle and distance is because the calculation of the distance needs to be corrected based on the angle information as described above, so if the angle and the distance are measured at different measurement timings, It is because it becomes a factor which produces a measurement error regarding distance measurement. On the other hand, with respect to position measurement, angle measurement is performed in a time-sharing manner (see FIG. 10) as in the apparatus of FIG. As a matter of course, the position measurement is controlled so that light is not emitted from the distance measuring laser light source 52. As a result, the distance light Lb does not enter the position measuring image pickup device 28, so that a measurement error due to light interference is eliminated.

Next, the lens adjustment unit 51 will be described.
In the apparatus of FIG. 1 , the adjustment stage mechanism 44 has an X-axis slide mechanism that is slidable in the X-axis direction and a Y-axis slide mechanism that is slidable in the Y-axis direction are arranged one above the other . In addition to the apparatus shown in FIG. 1 , the adjustment stage mechanism 58 is provided with a height mechanism (for example, constituted by a ball screw and a nut screwed together) that moves the measuring workpiece W up and down along the Z axis. The stop / drive is controlled by a driver drive circuit 59 for driving the motor. The height mechanism corresponds to the third adjustment stage of the present invention.

Then, the effect | action and effect of this embodiment are demonstrated.
Light emitted from the angle measuring laser light source 22 and the distance measuring laser light source 52 is combined by the dichroic mirror 55 and then reflected downward by the beam splitter 24 in the drawing. Thereafter, the light is converted into parallel light by the collimator lens 53 and then irradiated onto the measurement workpiece W and reflected there. The specularly reflected light reflected on the measurement workpiece W is converted into convergent light by the collimator lens 53 and then reaches the dichroic mirror 56. The distance light Lb is reflected by the dichroic mirror 56 and then enters the distance measuring image sensor 57, and the angle light La passes through the dichroic mirror 56 and then enters the angle measuring image sensor 27.

  Then, the attachment angle of the measurement workpiece W is calculated based on the condensing position of the angle light La, and the distance d of the measurement workpiece W is calculated based on the attachment angle and the center position of the optical image of the distance light Lb.

  On the other hand, the passing light Lc that has passed through the side of the measurement workpiece W out of the parallel light irradiated to the measurement workpiece W is incident on the position measurement imaging device 28. Then, the position of the measurement workpiece W is calculated based on the center position of the optical image of the passing light Lc. When the measurement of the mounting angle of the measurement workpiece W and the position / distance is completed, the CPU 35 energizes the driver drive circuits 43 and 59 based on the obtained angle / position / distance information. As a result, the tilt mechanism 42 and the adjustment stage mechanism 58 are driven to automatically adjust the mounting angle / position / distance of the measurement workpiece W so as to be a desired angle / position / distance (normal state).

Thus, according to this configuration , in addition to the mounting angle and position of the measurement workpiece W, the distance can also be measured and adjusted.

  In addition to the measurement method for converging the distance light Lb, a measurement method for measuring the distance without converging the distance light Lb is possible. In this case, if the displacement of the distance d increases, the optical path of the distance light Lb However, the distance measuring image sensor 57 does not increase in size with the above configuration.

<Embodiment 2 >
The second embodiment of the present invention will be described with reference to FIG. 11.
In the apparatus of FIG. 6 , the distance light Lb is reflected by the dichroic mirror 56 and then directly incident on the distance measurement image sensor 57. However, in this embodiment, the distance light Lb is interposed between the dichroic mirror 56 and the distance measurement image sensor 57. A diverging lens 61 is arranged. With such a configuration, a larger light image is formed on the imaging surface 57A than when the diverging lens 61 is not disposed. If the optical image is formed in this way, the center position of the optical image can be accurately calculated, and as a result, highly accurate distance measurement can be performed. The distance light Lb is preferably applied to the peripheral portion of the diverging lens 61. This is because the distance light Lb is further diverged because the aberration is larger in the peripheral portion than in the central portion of the lens.

<Embodiment 3 >
A third embodiment of the present invention will be described with reference to FIG.
The difference between the present embodiment and the apparatus of FIG. 6 is that a polarizing beam splitter 64 that reflects S-polarized light and transmits P-polarized light is provided in place of the beam splitter 24, and this polarizing beam splitter 64 and the measurement work W are arranged. A quarter wavelength plate 65 is provided between the two laser light sources 22 and 52, and polarized light having the same polarization direction (S-polarized light in the present embodiment) can be emitted from both the laser light sources 22 and 52.
Further, a lens for collimating the laser light (collimator lenses 23 and 67) and a lens for converging the angle light La and the distance light Lb regularly reflected by the measurement work W (convergence lens 25) are individually provided. Provided (same configuration as the apparatus of FIG. 1 ).

  Laser beams from both laser light sources 22 and 52 are combined by a dichroic mirror 55 and then irradiated to a polarization beam splitter 64. Since both laser beams are S-polarized light, they are reflected by the polarization beam splitter 64 and travel toward the quarter-wave plate 65. The laser light (S-polarized wave) is converted into circularly polarized light by passing through the quarter-wave plate 65 and is irradiated onto the measurement workpiece W. The specularly reflected light from the measurement workpiece W passes through the quarter-wave plate 65 as circularly polarized light. At this time, the circularly polarized light is changed to P-polarized light, and the light is transmitted through the polarizing beam splitter 64. Thereafter, the light transmitted through the polarization beam splitter 64 is branched by the dichroic mirror 56, the angle light La having the wavelength λ1 enters the angle measurement image sensor 27, and the distance light Lb having the wavelength λ2 is the distance measurement image pickup. The light enters the element 57.

  By adopting the configuration as in this embodiment, optical loss can be reduced, and the S / N ratio can be improved. Further, since the light emitted from the laser light sources 22 and 52 is linearly polarized light, the configuration for emitting linearly polarized light can be greatly simplified (for example, there is no need to provide a filter or the like). Further, when an optical component (for example, a half mirror or a total reflection mirror) of a specular body is measured by the optical measurement device having the above configuration, the SN ratio can be further improved.

<Embodiment 4 >
Next, Embodiment 4 of the present invention will be described with reference to FIG. In the apparatus of FIG. 6, the light emitted from the distance measuring laser light source 52 is reflected by the beam splitter 24 and the specularly reflected light is irradiated onto the measuring work W. Then, the distance light Lb specularly reflected by the measurement work W is reflected again by the dichroic mirror 56 and is incident on the distance measurement image sensor 57. In the fifth embodiment, the distance light Lb is irradiated from the distance measurement laser light source 52. The measured light is directly incident on the measurement workpiece W, and the distance light Lb reflected on the measurement workpiece W is directly incident on the distance measurement image sensor 57. The lenses 81 and 82 are a collimating lens for collimating the light emitted from the laser light source 52, and a converging lens for converging the distance light Lb regularly reflected by the measurement workpiece W.

  Thus, with respect to the distance light Lb, the number of reflections from the distance measurement laser light source 52 to the distance measurement image sensor 57 can be reduced, so that the attenuation of light can be suppressed to the minimum, so that the reflection is performed several times. Compared to the case of repeating, an imaging signal Sd having a large output value is obtained from the distance measuring imaging element 57. Further, with the above configuration, the dichroic mirrors 55 and 56 can be eliminated.

<Reference example>
Next, a reference example of the present invention will be described with reference to FIG. In this embodiment, a reflection mirror 91 is added to the fourth embodiment. The reflection mirror 91 changes the optical path of the distance light Lb reflected by the measurement workpiece W to an optical path toward the beam splitter 24. As a result, the distance light Lb enters the angle measurement image sensor 27, and an optical image of the distance light Lb is formed on the image pickup surface 27A. An imaging signal Se corresponding to the optical image is output from the angle measurement imaging device 27, and the distance of the measurement workpiece W is calculated based on the imaging signal Se.
By adopting such a configuration, the image sensor 57 for distance measurement can be eliminated, so that the number of parts can be reduced and the apparatus can be simplified.

  When the angle light La and the distance light Lb are incident on the same image sensor, it is necessary to perform the distance light projection and the angle light projection at different timings. As a measurement pattern in this case, as shown in FIG. 15A, angle measurement, distance measurement, and position measurement may be performed as one cycle. In this case, the light projection of the laser light sources 22 and 52 is performed. In the laser light source 22, the pattern is ON → OFF → ON → ON. On the other hand, the laser light source 52 has a light projection pattern opposite to this, and the control is somewhat complicated.

  Therefore, in order to simplify the control, a pause may be provided during the measurement cycle as shown in FIG. In such a measurement cycle, the light projection pattern is a simple light projection pattern in which both the laser light sources 22 and 52 are alternately turned on and off.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further, within the scope not departing from the gist of the invention other than the following. Various modifications can be made.

  (1) In the first embodiment, the position measurement of the measurement workpiece W is calculated based on the light passing through the side of the measurement workpiece W. However, if the light travels without being blocked by the measurement workpiece W, the measurement is performed. For example, the position may be measured based on light transmitted through the measurement workpiece W.

(2) In Embodiment 1 (configuration of FIG. 6) , the laser beam for distance measurement is irradiated on the irradiation surface Wa of the workpiece W for measurement within the irradiation range of the laser beam for angle measurement. It is only necessary that a part of the irradiation areas Q1 and Q2 of both laser beams overlap on the irradiation surface of the measurement workpiece W (see FIG. 17). With such a configuration, since the overlapping portion is formed between the distance light and the angle light, the measurement accuracy of the measurement workpiece W is increased.

(3) In the first to fourth embodiments, the laser light emitted from the laser light source 22 is directly incident on the collimator lens 23. However, as shown in FIG. A slit plate 102 may be provided. With this configuration, the light emitted from the laser light source 22 is converted into divergent light by the diverging lens 101, and part of this divergent light passes through the light passage hole A of the slit plate 102 and is collimated by the collimating lens 23. It is said. Accordingly, only the light near the optical axis (light at the center of the light beam) passes through the light passage hole A of the slit plate 101 and enters the collimator lens 23, and thus the light intensity distribution is uneven. Can be eliminated.

(4) In the first to fourth embodiments, the laser light emitted from the laser light source 22 is directly incident on the collimator lens 23. However, as shown in FIG. A holographic diffuser 112 and a slit plate 113 may be provided. With this configuration, the light from the laser light source 22 is once converged by the condenser lens 111 and then incident on the incident surface of the holographic diffuser 112. Thereafter, the light diffused through the holographic diffuser 112 passes through the slit plate 73 and is converted into parallel light by the collimating lens 23.

(5) In the first to fourth embodiments, the angle and position of the measurement workpiece W are measured and the position and the like of the measurement workpiece W are adjusted based on the measurement result. The object to be measured and adjusted is not limited to the measurement workpiece W, but may be other optical components (for example, a simple mirror or glass plate).

(6) In the first to fourth embodiments, the measurement workpiece W (partially transmissive glass) is substituted when measuring the mounting angle, position, distance, etc., but the optical pickup lens 120 may be directly measured. In order to perform measurement without error in this case, the distance light and the angle light may be irradiated to the flat portion (the annular protrusion 121 provided on the outer periphery) of the optical pickup lens 120 as shown in FIG.

The figure which shows the whole structure of the optical pick-up lens adjustment apparatus which concerns on Embodiment 1. FIG. The figure which shows a mode that angle light enters into the image sensor for angle measurement The figure which shows a mode that passing light enters into the image sensor for position measurement Figure showing a light image The figure which shows the light projection level of light projection mode for angle measurement and position measurement The figure which shows the structure which added the structure for measuring the distance d of the workpiece | work W for a measurement to the optical pick-up lens adjustment apparatus of FIG. The figure which shows a mode that distance light enters into the image sensor for distance measurement The figure which shows the optical path of distance light when the workpiece | work for measurement W exists in the position of distance d The figure which shows the optical path of the distance light in case the workpiece | work W for a measurement exists in the inclined state The figure which shows the projection pattern of the laser light source when the angle and the distance are measured simultaneously The figure which shows the whole structure of the optical pick-up lens adjustment apparatus which concerns on Embodiment 2. FIG. The figure which shows the whole structure of the optical pick-up lens adjustment apparatus which concerns on Embodiment 3. FIG. The figure which shows the whole structure of the optical pick-up lens adjustment apparatus which concerns on Embodiment 4. FIG. The figure which shows the whole structure of the optical pick-up lens adjustment apparatus which concerns on a reference example . The figure which shows the light emission pattern of the measurement cycle and laser light source which concern on a reference example The figure which shows the structure of the light projection means in another Example . The figure which shows the state where the irradiation area of the laser beam for angle and the irradiation area of the laser beam for distance overlap The figure which shows the irradiation position of light when a to-be-measured object is an optical pick-up lens Figure showing a conventional example

22 ... Laser light source for angle measurement 23 ... Collimating lens 24 ... Beam splitter (branching means)
25 ... Converging lens 27 ... Image sensor for angle measurement 28 ... Image sensor for position measurement 35 ... CPU
W ... Work for measurement

Claims (10)

An optical measurement device that irradiates light to an optical component and measures the mounting angle of the optical component based on the reflected light,
A light projecting means for measuring the angle of emitting light;
A collimating lens that converts the light emitted from the light projecting means into parallel light and irradiates the parallel light to the optical component having a size that falls within an irradiation region of the parallel light;
Branching means for branching specularly reflected light irradiated from the collimating lens and specularly reflected on the optical component in a direction different from the light projecting means;
A converging lens for converging specularly reflected light reflected on the optical component;
An angle measuring imaging means having an imaging surface on which convergent light converged by the convergent lens is incident;
An imaging means for position measurement having an imaging surface on which parallel light irradiated from the collimating lens and advanced without being blocked by the optical component is incident;
Projection means for distance measurement that emits parallel light so that the incident angle is oblique with respect to the optical component;
Distance measuring imaging means having an imaging surface on which reflected light emitted from the distance measuring light projecting means and reflected on the optical component is incident;
The mounting angle of the optical component is determined based on the light incident position on the imaging surface of the angle measuring imaging means, and the optical axis of the optical component is determined based on the light incident position on the imaging surface of the position measuring imaging means. and determines a position with respect to the direction orthogonal, provided with a determination means for determining a distance in the optical axis direction of the optical component on the basis of said mounting angle and the light incident position on the imaging plane of the distance measuring image pickup means As
It is a configuration that simultaneously emits light from the angle measuring light projecting unit and the distance measuring light projecting unit to simultaneously measure the angle of the optical component and the distance measurement,
The angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings,
The light projection amount setting means for determining the amount of light emitted from the angle measurement light projection means includes an angle measurement light projection mode and the angle measurement light projection mode. An optical measurement apparatus provided with a position measurement light projection mode having a larger light projection amount . A distance measuring converging lens for converging specular reflected light for distance measurement reflected on the optical component, and the converging light that has passed through the distance measuring converging lens is incident on the distance measuring imaging means; As
The distance measuring imaging means is configured such that the position of the convergent light passing through the distance measuring convergent lens is shifted rearward with respect to the traveling direction of the convergent light rather than the position where the focused light is focused.
A diverging lens is provided between the distance measuring imaging means and the distance measuring converging lens, located behind the focal point, and the converging light is set to pass through the periphery of the diverging lens. The optical measuring device according to claim 1 . The angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings,
3. The optical measurement apparatus according to claim 1 , wherein the optical measurement apparatus is configured to stop the light projection from the distance measurement light projecting unit during the position measurement. 4. In the optical component is a mirror body,
The angle measuring light projecting means and the distance measuring light projecting means can emit polarized light having the same polarization direction,
It said branching means is made of a polarization beam splitter, further to any of claims 1 to 3, characterized in that the quarter-wave plate is disposed between said optical component and the polarization beam splitter The optical measuring device described. 5. The optical measuring apparatus according to claim 4 , wherein the angle measuring light projecting means and the distance measuring light projecting means are laser light sources capable of emitting polarized light having the same polarization direction. An optical measuring device that irradiates the optical pickup lens that converges the light from the light source and emits the light to the outside, measures the mounting angle of the optical pickup lens based on the reflected light, and the measurement result by the optical measuring device An optical pickup lens adjusting device including a lens adjusting unit that adjusts the mounting angle of the optical pickup lens based on
The lens adjustment unit includes a first adjustment stage capable of adjusting an attachment angle of the optical pickup lens;
A second adjustment stage capable of adjusting a position in a direction perpendicular to the optical axis of the optical pickup lens;
A third adjustment stage capable of adjusting the distance of the optical pickup lens, and a control means for driving and controlling each of the adjustment stages;
The optical measuring device comprises:
A light projecting means for measuring the angle of emitting light;
A collimating lens that converts the light emitted from the light projecting means into parallel light and irradiates the parallel light to the optical pickup lens having a size that falls within an irradiation region of the parallel light;
Branching means for branching specularly reflected light irradiated from the collimating lens and specularly reflected on the optical pickup lens in a direction different from the light projecting means;
A converging lens for converging specularly reflected light reflected on the optical pickup lens;
An angle measuring imaging means having an imaging surface on which convergent light converged by the convergent lens is incident;
An imaging means for position measurement having an imaging surface on which parallel light irradiated from the collimating lens and advanced without being blocked by the optical pickup lens is incident;
Projection means for distance measurement that emits parallel light so that the incident angle is oblique with respect to the optical pickup lens;
Distance measuring imaging means having an imaging surface on which reflected light emitted from the distance measuring light projecting means and reflected on the optical pickup lens is incident;
The mounting angle of the optical pickup lens is determined based on the light incident position on the imaging surface of the angle measuring imaging means, and the light of the optical pickup lens is determined based on the light incident position on the imaging surface of the position measuring imaging means. Determining a position in a direction orthogonal to the axis, and determining a distance in the optical axis direction of the optical pickup lens based on a light incident position on the imaging surface of the distance measuring imaging unit and the mounting angle ; along with the made with a,
The angle measurement and distance measurement of the optical pickup lens by simultaneously emitting light from the angle measurement light projection means and the distance measurement light projection means,
The angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings,
The light projection amount setting means for determining the amount of light emitted from the angle measurement light projection means includes an angle measurement light projection mode and the angle measurement light projection mode. A position measurement light projection mode with a larger light emission amount is provided.
Angle of the control means an optical pickup lens obtained from the determining means, the position, on the basis of the distance information-out inclination of the normal of the optical pickup lens by driving the respective stages, to adjust the position and distance An optical pickup lens adjusting device. A distance measuring convergent lens for converging specularly reflected light for distance measurement reflected on the optical pickup lens, and the convergent light passing through the distance measuring convergent lens is incident on the distance measuring imaging means; Composed and
The distance measuring imaging means is configured such that the position of the convergent light passing through the distance measuring convergent lens is shifted rearward with respect to the traveling direction of the convergent light rather than the position where the focused light is focused.
A diverging lens is provided between the distance measuring imaging means and the distance measuring converging lens, located behind the focal point, and the converging light is set to pass through the periphery of the diverging lens. The pickup lens adjusting device according to claim 6 . The angle measurement by the angle measurement imaging means and the position measurement by the position measurement imaging means are performed at different measurement timings,
8. The optical pickup lens adjusting device according to claim 6 , wherein the optical pickup lens adjusting device is configured to stop light projection from the distance measuring light projecting unit when the position is measured. In the optical pickup lens is a mirror body,
The angle measuring light projecting means and the distance measuring light projecting means can emit polarized light having the same polarization direction,
9. The branching unit according to claim 6 , further comprising a polarizing beam splitter, and a quarter-wave plate disposed between the polarizing beam splitter and the optical pickup lens. Optical pickup lens adjustment device. 10. The optical pickup lens adjusting device according to claim 9 , wherein the angle measuring light projecting unit and the distance measuring light projecting unit are laser light sources capable of emitting polarized light having the same polarization direction. .

Images