JP4433501B2 - Brush device and massage device - Google Patents

Description

  The present invention relates to a brush device and a massage device used for scalp massage and the like during hair washing.

Conventionally, as a seed of the brush device of this, for example, the oscillating head is provided through the elastic member to the casing with a built-in motor, is projected to the motor shaft of the motor in the vibrating head, the vibrator to the motor shaft A massage and electric hair-washing brush is known which is mounted eccentrically and further has a brush made of a flexible material attached to one side of the vibrating head (for example, Patent Document 1 ). In this massage and electric hair washing brush, the brush is composed of a brush body part as a substrate formed in a disk shape and needle-like body pieces as protrusions provided on a side surface of the brush body part. When using this massage and electric hair washing brush, the user first holds the casing, presses the brush against the head, operates the motor, and the vibrator built in the vibration head The vibration generated by the eccentric rotation is transmitted to the scalp through the vibration head and the brush. And since the said brush is comprised from the flexible material, it removes the grease of a pore, without damaging a scalp, and massages simultaneously.
JP 2001-258974 A

In the above-described slave came technology, when performing a massage, such as massage or diseased scalp during hair washing, vibration caused by the eccentric rotation of the oscillator built in the vibratory head, composed from the oscillating head and flexible material The brush is transmitted to the scalp etc. through the brush, but since the brush simply vibrates against the scalp etc., the scalp etc. cannot be massaged sufficiently. There was also a problem that the scalp could not be removed sufficiently.

The present invention solves the above problems, in such a case of performing shampooing and scalp massage, to provide a brush device which can perform且one effective in the scalp massage and wash gently by the brush unit the purpose, also, like in the case of the affected part of the massage, and an object thereof is to provide a massaging device which can perform且one effectively massage the patient part gently by treatment section.

The invention of claim 1 is a brush device having a drive part provided with a reciprocating drive means inside a cover, and a brush part provided in a direction crossing a plurality of protrusions on the surface of the flexible substrate, A frame is provided in the drive unit, the entire periphery of the substrate is fixed to the frame, and the center of the substrate is reciprocated in a direction intersecting the surface of the substrate by the reciprocating drive means. Thus, the brush portion is repeatedly deformed between a curved concave state bent upward and a curved convex state bent downward, and the substrate is substantially elliptical in plane, and is substantially centered on the axis of the substrate. The brush device is characterized in that a plurality of the protrusions arranged in a ring shape are set so that the height of the protrusions decreases from the periphery of the substrate toward the center.

The invention of claim 2 is a massage device having a drive part provided with a reciprocating drive means inside a cover, and a treatment part provided in a direction crossing a plurality of protrusions on the surface of the flexible substrate, A frame is provided in the drive unit, the entire periphery of the substrate is fixed to the frame, and the center of the substrate is reciprocated in a direction intersecting the surface of the substrate by the reciprocating drive means. Thus, the treatment portion is repeatedly deformed between the curved concave state bent upward and the curved convex state bent downward, and the substrate is substantially elliptical in plane, and is substantially centered on the axis of the substrate. A plurality of the protrusions arranged in a ring shape are set so that the height of the protrusions decreases from the periphery of the substrate toward the center.

According to the invention 請 Motomeko 1, with the substrate of the brush portion is fixed by the frame, flexing reliably in a direction intersecting the plane of the substrate a central portion of the substrate by the round trip drive means it is, by opening and closing mutually repeated a plurality of said projections, by applying these projections to the scalp or the like, Ru can or massaging or cleaning the scalp effectively.

Further, according to the invention of claim 2, with the substrate of the treating section is fixed by the frame body, be bent in a direction intersecting the plane of the substrate by the round-trip driving means a central portion of the substrate in, by opening and closing mutually repeated a plurality of said projections, by applying these projections to the affected area, Ru can be effectively massaging an affected part.

Preferred embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments described below do not limit the contents of the present invention described in the claims. In addition, all the configurations described below are not necessarily essential requirements of the present invention.
Reference example 1
1 to 5 show a first reference example for explaining the first embodiment shown in FIGS. Reference numeral 1 denotes a brush device that also serves as a massage device, and a brush portion 2 is provided on the lower side of the brush device 1. The brush portion 2 includes a substrate 3 and a plurality of protrusions 4 that are integrally provided so as to protrude toward the side surface 3A of the substrate 3. The substrate 3 has a disk shape with the axis A as the center, and is formed of a soft synthetic resin having flexibility. And the edge 3B of this board | substrate 3 is being fixed to the whole inner periphery of the frame 5 of the said brush apparatus 1. FIG. The plurality of protrusions 4 are formed in a single body with the substrate 3 so as to be substantially axially symmetric with respect to the axis A as well as having a base shape with the base end 4A slightly thicker. Further, each of the protrusions 4 is formed so as to protrude so that the axis D intersects the one side surface 3A of the substrate 3 substantially perpendicularly. Note that the base end 4 </ b> A of the protrusion 4 does not depend on the bending of the substrate 3, and remains substantially perpendicular to the one side surface 3 </ b> A of the substrate 3. The frame 5 is made of an inflexible hard synthetic resin, and is formed in an annular shape around the axis A with the entire circumference of the edge 3B of the substrate 3 being fixed. In the figure, B is the width direction of the substrate 3, the substrate 3 is widely formed in the width direction B intersecting perpendicularly to the axis A, and the plurality of protrusions 4 are spaced from each other by a distance C. Is placed.

  In addition, a cover 6 constituting a driving unit is provided integrally with the frame body 5 so as to cover the upper side of the substrate 3. A reciprocating drive means 7 for reciprocating the center of the substrate 3 along the axis A in the vertical direction is provided in the cover 6. The reciprocating drive means 7 includes a motor 8 provided integrally with the frame 5 via an attachment receiving member 6A such as a bracket in the cover 6, and a crank mechanism attached to the motor shaft 8A of the motor 8. 9 and the eccentric shaft 9A of the crank mechanism 9 are connected to one side 10A so as to be rotatable, and the other side 10B is connected to the substantial center of the other side surface 3C of the substrate 3 so as to be swingable. The connecting rod 10 is provided. The motor 8 has a speed reduction mechanism (not shown), and rotates the motor shaft 8A by decelerating the rotation at a predetermined speed reduction ratio. The eccentric distance between the motor shaft 8A of the motor 8 and the eccentric shaft 9A of the crank mechanism 9 is F. Therefore, when the motor shaft 8A of the motor 8 rotates, the rotation of the motor shaft 8A is converted into a reciprocating motion by the crank mechanism 9 and the connecting rod 10, and the central portion of the substrate 3 is moved to the axis A by the connecting rod 10. Reciprocate up and down. As described above, since the edge 3B of the substrate 3 is fixed to the frame body 5, even if the center of the substrate 3 reciprocates up and down along the axis A, the edge 3B Do not move. Accordingly, the substrate 3 is deformed between the curved concave state bent upward and the curved convex state bent downward as shown in FIGS. 4 and 5 by the rotation of the motor 8. Further, a battery case 11 for accommodating a battery (not shown) is provided in the cover 6, and a switch 12 for operating the motor 8 is provided on the surface of the cover 6.

  Next, the effect | action is demonstrated about the said structure. When washing hair, the user first holds the brush device 1 and presses the tip 4B of the protrusion 4 of the brush portion 2 against the scalp G. At this time, the tip 4B of the protrusion 4 is pressed against the scalp G with a light force. Next, when the switch 12 is closed, power is supplied from a battery (not shown), so that the motor 8 operates and the motor shaft 8A rotates. Along with this rotation, the crank mechanism 9 attached to the motor shaft 8A rotates, and the crank mechanism 9 and the connecting rod 10 connected to the eccentric shaft 9A of the crank mechanism 9 rotate the motor shaft 8A. Is converted into a reciprocating motion, and the substrate 3 connected to the connecting rod 10 reciprocates at the center along the axis A. The deformation with an amplitude of 2F is repeated between the bent curved convex states.

  Then, as shown in FIG. 4, when the eccentric shaft 9A of the crank mechanism 9 is above the motor shaft 8A, the substrate 3 is pulled upward by the connecting rod 10 so that the center of the substrate 3 is the uppermost portion. It will be in the bent curved concave state. Of the protrusions 4 formed integrally with the substrate 3 so as to be orthogonal to the one side surface 3A of the substrate 3, at least the base end 4A is accompanied by the bending of the one side surface 3A of the substrate 3. Thus, by moving integrally while maintaining an orthogonal state with the one side surface 3A, the tips 4B of the plurality of projections 4 are closed, that is, the axes D at least at the base ends 4A of the plurality of projections 4 are inward. It will move in the direction. In fact, as described above, the tip 4B of the projection 4 is always in contact with the scalp G because the tip 4B of the projection 4 is pressed against the scalp G with a light force. As a result, among the protrusions 4 formed of a soft synthetic resin having flexibility, at least the base end 4A formed thick at the protrusions 4 formed on the outer peripheral side of the substrate 3 is slightly bent. However, it is substantially not deformed and maintains a state substantially orthogonal to one side surface 3A of the substrate 3, while the thin tip 4B side comes into contact with the scalp G in a largely bent state. . Then, the motor 8 rotates in this way and the substrate 3 of the brush portion 2 bends upward, so that the protrusion 4 moves inward while in contact with the scalp G. At the same time that the scalp G is massaged by the tip 4B of the protrusion 4, not only the scalp G but also the hair H is washed by a hair wash or the like. In addition, as described above, the scalp G is softly massaged with a feeling that the scalp G is softly squeezed because the tip 4B of the protrusion 4 bends in accordance with the pressing force of the brush portion 2 to the scalp G and the movement of the protrusion 4. And will be washed.

  Thereafter, when the eccentric shaft 9A of the crank mechanism 9 is rotated downward from the top dead center, the substrate 3 is pushed by the connecting rod 10 to be gradually deformed, and as shown in FIG. It becomes the curved convex state bent downward. In this process, at least the base end 4A of the protrusions 4 moves integrally with the one side surface 3A substantially in an orthogonal state with the bending of the one side surface 3A of the substrate 3, thereby The protrusions 4B of the plurality of protrusions 4 open, that is, move so that the axes D of at least the base ends 4A of the plurality of protrusions 4 face outward. In fact, as described above, the tip 4B of the projection 4 is always in contact with the scalp G because the tip 4B of the projection 4 is pressed against the scalp G with a light force. As a result, among the protrusions 4 formed of the soft synthetic resin having flexibility, at least the base end 4A formed thick at the protrusion 4 formed at the central portion of the substrate 3 is slightly bent. However, it is substantially not deformed and maintains a state substantially orthogonal to one side surface 3A of the substrate 3, while the thin tip 4B side comes into contact with the scalp G in a largely bent state. . Then, the motor 8 rotates in this way and the substrate 3 of the brush portion 2 bends downward, so that the protrusion 4 moves outward in a state of being in contact with the scalp G. The scalp G is massaged so as to be spread by the tip 4B of the protrusion 4, and at the same time, not only the scalp G but also the hair H is washed by a hair wash or the like. In addition, as described above, the scalp G is softly massaged with a feeling that the scalp G is softly squeezed because the tip 4B of the protrusion 4 bends in accordance with the pressing force of the brush portion 2 to the scalp G and the movement of the protrusion 4. And will be washed.

  In this way, the rotational force of the motor 8 is converted into a reciprocating motion by the crank mechanism 9 and the connecting rod 10, and the substrate 3 of the brush portion 2 is repeatedly bent in a state where the protrusion 4 is kept in contact with the scalp G. Then, by repeatedly closing and opening the plurality of protrusions 4 integrally provided on the substrate 3, the scalp G is stimulated to be gripped or spread by the plurality of protrusions 4 and massaged. The hair H as well as the scalp G is washed by the friction of the tip 4B of the projection 4 with the scalp G due to the movement of the plurality of projections 4 and the action of the hair washing agent.

  As described above, in the reference example, the plurality of protrusions 4 are substantially axially symmetric about the axis A of the substrate 3 on the one side surface 3A of the flexible substrate 3 of the brush portion 2, and The projection 4 is formed integrally with the substrate 3 so that the axis D of the projection 3 is orthogonal to the side surface 3A of the substrate 3, the edge 3B of the substrate 3 is fixed to the frame body 5, and the motor 8 as a drive unit is provided. By operating, the substrate 3 connected to the reciprocating drive means 7 is moved along the axis A between the curved concave state bent upward and the curved convex state bent downward by the reciprocating drive means 7. By repeatedly deforming, the plurality of protrusions 4 provided on the substrate 3 are repeatedly opened and closed, and the operation of grabbing and spreading the scalp G is repeated, and the scalp G is massaged and the scalp G and the hair H are Cleaning can be performed.

  In the reference example, since the entire circumference of the edge 3B of the substrate 3 is fixed to the frame body 5, the substrate 3 can be uniformly deformed by bending, and the scalp G can be massaged and the scalp G evenly. And hair H can be washed well.

  In the reference example, since the base end 4A of the protrusion 4 is formed thicker than the tip 4B, the axis of the protrusion 4 with respect to one side surface 3A of the substrate 3 regardless of the bending of the substrate 3. By maintaining the state where D is orthogonal, the plurality of protrusions 4 can be repeatedly opened and closed even when the brush portion 2 is operated by pressing the tip 4B of the protrusion 4 against the scalp G. And scalp G and hair H can be cleaned.

  Further, since the tip 4B of the projection 4 is formed to be narrower than the base end 4A, the tip 4B of the projection 4 bends when pressed against the scalp G. And hair H can be washed.

Furthermore, by configuring the reciprocating drive means 7 with a motor 8, a crank mechanism 9, and a connecting rod 10, complicated movements of the plurality of protrusions 4 provided on the brush portion 2 can be easily realized. .
Reference example 2
FIG. 6 shows Reference Example 2. The same parts as those in Reference Example 1 are denoted by the same reference numerals, and detailed description thereof is omitted. In Reference Example 2, the reciprocating drive means 7 is connected to a plurality of locations on a single substrate 3 formed of a flexible soft synthetic resin and provided with a plurality of protrusions 4 integrally. It can be bent by reciprocating repeatedly. In this way, by connecting the reciprocating drive means 7 to a plurality of locations on the single substrate 3, even when the area of the substrate 3 is large, the substrate 3 can be flexed well. The scalp G can be massaged and the scalp G and hair H can be cleaned well by the large number of protrusions 4.
Reference example 3
7 to 8 show a reference example 3, and the same parts as those in the reference examples are denoted by the same reference numerals, and detailed description thereof is omitted. In Reference Example 3, an example using a massage device 1A is shown. This massage device 1A has the same configuration as the brush device 1 of each of the above reference examples, and has the brush portion 2 that is a treatment portion.

  And when massaging the affected part K, such as an arm, a shoulder, and a waist, a user hold | grips the said massage apparatus 1A and presses the front-end | tip 4B of the processus | protrusion 4 of the said brush part 2 against the affected part K first. At this time, the tip 4B of the protrusion 4 is pressed against the affected part K with a light force. Next, when the switch 12 is closed, the connecting rod 10 converts the rotational motion of the motor shaft 8A into a reciprocating motion as described above, and the substrate 3 connected to the connecting rod 10 is centered on the axis. By reciprocating along A, the crank mechanism 9 is repeatedly deformed so that the amplitude becomes 2F between the curved concave state bent upward and the curved convex state bent downward, as shown in FIG. When the eccentric shaft 9A is above the motor shaft 8A, the substrate 3 is pulled up by the connecting rod 10, so that the substrate 3 is bent upward with its center at the top, and thus the motor 8 is rotated and the substrate 3 of the brush part 2 bends upward, so that the protrusion 4 moves inward while in contact with the affected part K. At this time, the affected part is moved by the tip 4B of the protrusion 4 K grabbed Is massage to be.

  Subsequently, when the eccentric shaft 9A of the crank mechanism 9 is rotated downward from the top dead center, the substrate 3 is pushed by the connecting rod 10 and is gradually deformed. As shown in FIG. In this way, the motor 8 rotates and the substrate 3 of the brush portion 2 bends downward, so that the projection 4 is in contact with the affected area K. At this time, the affected part K is massaged so as to be spread by the tip 4B of the protrusion 4.

  In this manner, the tip 4B of the projection 4 bends in accordance with the pressing force of the brush portion 2 against the affected portion K and the movement of the projection 4, so that the affected portion K is massaged with a feeling that it is softly rubbed.

  In this reference example, the frame 5 is provided so as to hold the entire periphery of the substrate 3, and at least the base 4 </ b> A of the protrusion 4 has a substantially constant angle with respect to the substrate 3 regardless of the bending of the substrate 3. Further, at least the tip 4B of the protrusion 4 is made of a flexible material, and the reciprocating drive means 7 is provided with a motor 8 which is an electric motor provided in the drive section, and the motor 8 directly. Alternatively, since the crank mechanism 9 is connected indirectly, and the connecting rod 10 is connected to the crank mechanism 9 on one side 10A and connected to the substrate 3 on the other side 10B. Has an effective action and effect.

  9 and 10 show the first embodiment, and the same reference numerals are given to the same portions as those in the respective reference examples, and the detailed description thereof will be omitted. In Example 1, the brush device 1 or the massage device 1A includes projections 4 ′ and 4 ″ having different lengths and / or thicknesses in addition to the projections 4, and the substrate 3 is substantially elliptical in a plane. It is formed into a shape. Further, as shown in FIG. 9, the brush device 1 is integrally provided with a handle portion 13.

The protrusion 4 ′ is shorter than the protrusion 4, and the base end 4 A of the protrusion 4 ′ is thicker than the base end 4 A of the protrusion 4. Therefore, the protrusion 4 ′ is less flexible (easily bent) than the protrusion 4, and maintains a state almost orthogonal to the one side surface 3 </ b> A of the substrate 3 in use. The protrusion 4 ″ is shorter than the protrusions 4 and 4 ′, and the base end 4 A of the protrusion 4 ″ is formed to have the same thickness as the base end 4 A of the protrusion 4. Therefore, the projection 4'' is flexible as compared with only the projections 4 short minute low, in use, when subjected to the same force, the deflection of the tip 4 B is smaller Ri good the protrusion 4. The protrusions 4 ′ and 4 ″ have the same configuration as the protrusion 4 except that the lengths and / or thicknesses are different. A plurality of the protrusions 4, 4 ′, 4 ″ are integrally projected on the side surface 3 A side of the substrate 3. A plurality of the protrusions 4 are provided on the peripheral side of the one side surface 3A of the substrate 3, and the protrusion 4 'is formed in a substantially ring shape around the axis A at the center surrounded by the protrusions 4. A plurality of (in this example, 8) protrusions 4 and a plurality (in this example, 6) of the protrusions 4 in a substantially ring shape centered around the axis A at the center surrounded by the protrusions 4 '. "" Is arranged. By arranging in this way, the height of the projections 4, 4 ′, 4 ″ is set to decrease from the periphery of the one side surface 3A of the substrate 3 toward the central axis A. When the curved convex portion such as the scalp G is massaged and washed, the tips of the protrusions 4, 4 ′, 4 ″ can easily follow the portion.

As described above, when the switch 12 is closed, the center of the substrate 3 reciprocates along the axis A, so that the curved concave state bent upward and the curved convex state bent downward. The deformation in which the amplitude becomes 2F is repeated. In this case, before Symbol substrate 3 is flat condition and toward the curved concave deflected state above, the scalp G in a state where the projections 4 provided around the side of the substrate 3 is brought into contact with the scalp G The tip 4B moves inward while being bent, and moves inward with the projections 4 ′ and 4 ″ on the central side in contact with the scalp G. At this time, the tip 4B is mainly gripped by the tip 4B of the projection 4 At the same time as being massaged, not only scalp G but also hair H is washed with a hair wash or the like. Subsequently, when the substrate 3 returns to a flat state and then moves toward a curved convex state bent downward, the protrusion 4 provided on the peripheral side of the substrate 3 is in contact with the scalp G. motion outward while flexing the scalp G is the tip 4B, also after the thick projection 4 'of the center side in contact with the scalp G, with almost no flex tip 4 B in this contact state, along the scalp G Further, after the thin and short projection 4 ″ at the center comes into contact with the scalp G, the tip 4B moves outward while being slightly bent in this contact state, and the projections 4, 4 ′, 4 '' tip 4B, 4 B, 4 B to thus simultaneously scalp G is massage to be spread will be hair H even cleaning not only the scalp G by like shampoo.

  In this way, the pressing force of the brush part 2 to the scalp G and the tip 4B of the surrounding projection 4 bend in accordance with the movement of the projection 4, so that the scalp G is massaged with a touch that is softly swollen. The protrusions 4 ′ and 4 ″ on the center side move along the scalp G while being slightly bent. Thus, in this embodiment, the protrusions 4 and 4 ′ and 4 ″ are long and / or thick. Therefore, different massage effects can be obtained depending on the locations where the protrusions 4, 4 'and 4' 'are in contact. Further, since the height of the protrusions 4, 4 ′, 4 ″ is set to decrease from the periphery of the one side surface 3A of the substrate 3 toward the center, for example, on the curved convex portion of the top of the scalp G. Since the protrusions 4, 4 ′, 4 ″ are easy to follow, the massage effect on the curved convex portion is excellent.

  In addition, this invention is not limited to the above Example, A various deformation | transformation is possible within the range of the summary of invention. For example, in each of the above reference examples, the plurality of protrusions are formed so as to intersect substantially perpendicularly to the surface direction of the substrate, but the plurality of protrusions are slightly inclined with respect to the surface direction of the substrate. You may make it cross. In Reference Example 2, the plurality of connecting rods in the reciprocating drive means are set to the same phase, but these phases may be appropriately shifted. In each of the above reference examples, the reciprocating drive means is constituted by a motor, a crank mechanism, and a connecting rod, but is constituted by a solenoid and a plunger (not shown) or a linear motor (not shown). Also good. Further, in each of the above reference examples, the shape of the substrate in the brush unit alone is a flat shape. However, the shape of the substrate in the brush unit alone is desirably a shape that protrudes downward from the beginning. This is because, when the flat plate-like substrate is pushed downward by the connecting rod, the connecting rod is swingably connected to the substrate, so that the substrate is pushed obliquely when the connecting rod moves downward. Because it becomes. On the other hand, if the shape of the substrate in the brush unit alone is convex downward from the beginning, and more preferably, if the convex shape is bent to the lowest corresponding to the bottom dead center of the reciprocating drive means, the reciprocating drive When the means moves from the bottom dead center to the top dead center, the substrate is pulled up by the connecting rod, and when the reciprocating drive means moves from the top dead center to the bottom dead center, the restoring force of the substrate The substrate is pushed by the connecting rod at the same time as the substrate returns to the convex shape downward, and the substrate, and thus the brush part, is restored almost uniformly and convex downward. Can be performed satisfactorily. The affected area also includes the scalp.

  As described above, the brush device and the massage device according to the present invention can be applied to other uses such as massage and cleaning of the body surface in addition to the scalp.

It is a perspective view which shows the reference example 1 of this invention. It is the whole motor sectional view seen from the front side of the motor which shows reference example 1 of the present invention. It is the whole motor sectional view seen from the side of a motor which shows reference example 1 of the present invention. It is a whole sectional view in the state where the base which shows reference example 1 of the present invention became concave. It is a whole sectional view in the state where the base which shows reference example 1 of the present invention became convex. It is a whole sectional view showing reference example 2 of the present invention. It is a whole sectional view in the state where the base which shows reference example 3 of the present invention became concave. It is a whole sectional view in the state where the base which shows reference example 3 of the present invention became convex. It is a front view of the brush part which shows Example 1 of this invention. It is sectional explanatory drawing of the brush part which shows Example 1 of this invention.

DESCRIPTION OF SYMBOLS 1 Brush apparatus 1A Massage apparatus 2 Brush part (treatment part)
3 Substrate 3B Edge 4, 4 ′, 4 ″ Projection 5 Frame 6 Cover (Driver)
7 Reciprocating drive means 8 Motor (drive unit / motor)
A axis G scalp H hair K affected area

Claims (2)

A brush device having a drive part provided with a reciprocating drive means inside a cover and a brush part provided in a direction crossing a plurality of protrusions on a surface of a flexible substrate, wherein the drive part is provided with a frame The frame is held in a state where the entire periphery of the substrate is fixed, and the center portion of the substrate is reciprocated in a direction crossing the surface of the substrate by the reciprocating drive means, thereby bending upward. The brush portion is repeatedly deformed between a curved concave state and a curved convex state bent downward, and the substrate is substantially elliptical in a plane, and is arranged in a substantially ring shape around the axis of the substrate. The brush device is characterized in that the plurality of protrusions are set such that the height of the protrusions decreases from the periphery of the substrate toward the center. A massage device having a drive part provided with a reciprocating drive means inside a cover and a treatment part provided in a direction crossing a plurality of protrusions on the surface of a flexible substrate, wherein the drive part is provided with a frame The frame is held in a state where the entire periphery of the substrate is fixed, and the center portion of the substrate is reciprocated in a direction crossing the surface of the substrate by the reciprocating drive means, thereby bending upward. The treatment portion is repeatedly deformed between a curved concave state and a curved convex state bent downward, and the substrate has a substantially elliptical shape in a plane, and is arranged in a substantially ring shape around the axis of the substrate. A plurality of the protrusions are set so that the height of the protrusions decreases from the periphery to the center of the substrate.

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