JP4396744B2 - 電気光学装置及び電子機器 - Google Patents
電気光学装置及び電子機器 Download PDFInfo
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- JP4396744B2 JP4396744B2 JP2007207507A JP2007207507A JP4396744B2 JP 4396744 B2 JP4396744 B2 JP 4396744B2 JP 2007207507 A JP2007207507 A JP 2007207507A JP 2007207507 A JP2007207507 A JP 2007207507A JP 4396744 B2 JP4396744 B2 JP 4396744B2
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- 239000004065 semiconductor Substances 0.000 claims description 137
- 239000000758 substrate Substances 0.000 claims description 91
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 14
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 14
- 238000002834 transmittance Methods 0.000 claims description 12
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 6
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 6
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 4
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 4
- 239000010408 film Substances 0.000 description 239
- 239000010410 layer Substances 0.000 description 213
- 239000004973 liquid crystal related substance Substances 0.000 description 79
- 239000003990 capacitor Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 18
- 239000011229 interlayer Substances 0.000 description 17
- 239000010409 thin film Substances 0.000 description 16
- 238000003860 storage Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 239000003566 sealing material Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000000903 blocking effect Effects 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 3
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- GEIAQOFPUVMAGM-UHFFFAOYSA-N Oxozirconium Chemical compound [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical class [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
Description
また、本発明の一実施形態に係る電気光学装置は、前記遮光性の絶縁膜は、高誘電率材料から構成されていることを特徴とする。
また、本発明の一実施形態に係る電気光学装置は、前記遮光性の絶縁膜は、酸化ハフニウムと酸化ジルコニウムとのいずれかから構成されていることを特徴とする。
また、本発明の一実施形態に係る電気光学装置は、前記ゲート絶縁膜は酸化シリコンによって構成され、前記遮光性の絶縁膜は、前記酸化シリコンよりも可視光の透過率が低い材料から構成されていることを特徴とする。
また、本発明の一実施形態に係る電子機器は、上記に記載の電気光学装置を備えたことを特徴とする。
また本発明の参考例に係る電気光学装置は、基板に複数の薄膜が積層され、積層された前記複数の薄膜の一部によってトランジスタが形成された電気光学装置であって、前記トランジスタの半導体層の少なくとも一部を平面視した状態で覆うよう、前記基板に前記複数の薄膜の一部を構成する遮光性の絶縁膜が積層されていることを特徴とする。
図1は、本実施の形態を示す液晶装置の平面図、図2は、図1中のII−II線に沿って切断した断面図、図3は、図1のTFT基板に積層された各層の成膜パターンを示す平面図、図4は、図3中のIV-IV線に沿う位置における一つの画素に着目した図1の液晶装置の模式的断面図である。
図10は、本実施の形態を示す液晶装置において、遮光性の絶縁膜が形成された部位を拡大して示す部分断面図である。
図11は、本実施の形態を示す液晶装置において、遮光性の絶縁膜が形成された部位を拡大して示す部分断面図である。
図13は本発明の第4実施の形態に係る電気光学装置において、遮光性の絶縁膜が形成された部位を示す斜視図である。
図14は本発明の第5実施の形態に係る電気光学装置において、遮光性の絶縁膜が形成された部位を示す斜視図である。
Claims (5)
- 基板上に、走査線とデータ線と、前記走査線と前記データ線との交差部に対応して形成された画素電極と、前記画素電極に電気的に接続されたトランジスタを有する電気光学装置であって、
前記トランジスタは前記基板上に形成された半導体層と、前記半導体層に積層されたゲート絶縁膜と、ゲート電極と、を有し、かつ、前記半導体層に、チャネル領域とソース領域とドレイン領域とを具備するLDD構造を有しており、
前記ソース領域及び前記ドレイン領域のうち前記画素電極に電気的に接続された側のLDD領域のみを覆うよう、前記ゲート絶縁膜に接して島状に遮光性の絶縁膜が形成されており、
前記ゲート電極は、前記遮光性の絶縁膜の側面のうち、前記データ線の延在方向における前記ゲート電極側の第1側面及び前記第1側面を挟んで対向する第2、第3側面と接していることを特徴とする電気光学装置。 - 前記遮光性の絶縁膜は、高誘電率材料から構成されていることを特徴とする請求項1に記載の電気光学装置。
- 前記遮光性の絶縁膜は、酸化ハフニウムと酸化ジルコニウムとのいずれかから構成されていることを特徴とする請求項2に記載の電気光学装置。
- 前記ゲート絶縁膜は酸化シリコンによって構成され、
前記遮光性の絶縁膜は、前記酸化シリコンよりも可視光の透過率が低い材料から構成されていることを特徴とする請求項1に記載の電気光学装置。 - 請求項1から4のいずれか一項に記載の電気光学装置を備えた電子機器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007207507A JP4396744B2 (ja) | 2006-09-15 | 2007-08-09 | 電気光学装置及び電子機器 |
US11/900,943 US7652293B2 (en) | 2006-09-15 | 2007-09-14 | Electro-optical device and electronic apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006250398 | 2006-09-15 | ||
JP2007207507A JP4396744B2 (ja) | 2006-09-15 | 2007-08-09 | 電気光学装置及び電子機器 |
Publications (2)
Publication Number | Publication Date |
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JP2008096970A JP2008096970A (ja) | 2008-04-24 |
JP4396744B2 true JP4396744B2 (ja) | 2010-01-13 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007207507A Expired - Fee Related JP4396744B2 (ja) | 2006-09-15 | 2007-08-09 | 電気光学装置及び電子機器 |
Country Status (2)
Country | Link |
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US (1) | US7652293B2 (ja) |
JP (1) | JP4396744B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011133604A (ja) * | 2009-12-24 | 2011-07-07 | Seiko Epson Corp | 電気光学装置、および電子機器 |
CN201867561U (zh) * | 2010-11-09 | 2011-06-15 | 北京京东方光电科技有限公司 | 阵列基板和液晶显示器 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69230138T2 (de) * | 1991-11-29 | 2000-04-27 | Seiko Epson Corp | Flüssigkristall-anzeigevorrichtung und verfahren zu ihrer herstellung |
JPH0933944A (ja) | 1995-07-14 | 1997-02-07 | Toshiba Corp | 液晶表示装置 |
JPH1020298A (ja) * | 1996-07-03 | 1998-01-23 | Sharp Corp | 液晶表示装置 |
JP4396599B2 (ja) | 1997-10-31 | 2010-01-13 | セイコーエプソン株式会社 | 液晶装置及び電子機器並びに投射型表示装置 |
US6197458B1 (en) * | 1997-12-12 | 2001-03-06 | Canon Kabushiki Kaisha | Color filter, production process thereof, and liquid crystal display panel using the color filter |
TW518637B (en) * | 1999-04-15 | 2003-01-21 | Semiconductor Energy Lab | Electro-optical device and electronic equipment |
JP4637312B2 (ja) | 2000-01-28 | 2011-02-23 | 株式会社半導体エネルギー研究所 | 液晶表示装置およびその作製方法 |
TWI301915B (ja) * | 2000-03-17 | 2008-10-11 | Seiko Epson Corp | |
JP2002110993A (ja) | 2000-09-28 | 2002-04-12 | Seiko Epson Corp | 電気光学基板およびその製造方法、電気光学装置及び電子機器 |
JP3551952B2 (ja) | 2001-10-30 | 2004-08-11 | ソニー株式会社 | アクティブマトリクス型表示装置 |
JP3700679B2 (ja) | 2002-05-21 | 2005-09-28 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
JP2004205974A (ja) | 2002-12-26 | 2004-07-22 | Fuji Photo Film Co Ltd | 2次元マトリクス素子、2次元マトリクス平面表示素子及びその駆動方法 |
JP2004336019A (ja) | 2003-04-18 | 2004-11-25 | Advanced Lcd Technologies Development Center Co Ltd | 成膜方法、半導体素子の形成方法、半導体素子、表示装置の形成方法及び表示装置 |
JP4442245B2 (ja) | 2004-02-13 | 2010-03-31 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
-
2007
- 2007-08-09 JP JP2007207507A patent/JP4396744B2/ja not_active Expired - Fee Related
- 2007-09-14 US US11/900,943 patent/US7652293B2/en not_active Expired - Fee Related
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JP2008096970A (ja) | 2008-04-24 |
US7652293B2 (en) | 2010-01-26 |
US20080067521A1 (en) | 2008-03-20 |
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