JP4322722B2 - 走査型プローブ顕微鏡及び該顕微鏡による測定方法 - Google Patents
走査型プローブ顕微鏡及び該顕微鏡による測定方法 Download PDFInfo
- Publication number
- JP4322722B2 JP4322722B2 JP2004094101A JP2004094101A JP4322722B2 JP 4322722 B2 JP4322722 B2 JP 4322722B2 JP 2004094101 A JP2004094101 A JP 2004094101A JP 2004094101 A JP2004094101 A JP 2004094101A JP 4322722 B2 JP4322722 B2 JP 4322722B2
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- Japan
- Prior art keywords
- sample
- cantilever
- exposure
- scanning probe
- probe microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/12—Fluid environment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
2 探針
3 カンチレバー台
4 レーザー
5 レーザー光源
6 レーザー変位検出手段
7 変位検出手段
8 試料
9 試料保持手段
10 試料移動手段
11 露光用照射光
12 露光用光源
13 ウインドウ
14 気密容器(真空容器)
15 ガス導入パイプ
16 ガス流量調節手段
17 真空ポンプ
Claims (6)
- 先端に探針を有するカンチレバーと、
試料を移動させる試料移動手段と、
前記カンチレバーの上方から前記試料に光を露光する露光手段と、
前記カンチレバーと前記露光手段の間に載置し、レーザー光源と該光源からのレーザー光のカンチレバーでの反射光を検知する検知部を備えたカンチレバーの変位検出手段と、を備え、
前記露光手段による試料の露光時には、カンチレバーの変位検出手段そのものを露光光路外へ取出すことが可能であることを特徴とする走査型プローブ顕微鏡。 - 前記カンチレバーと前記試料と前記試料移動手段とを気密容器の内部に設置し、前記カンチレバー変位検出手段と前記露光手段とを前記気密容器の外部に設置し、前記レーザーと露光手段から照射される光が、光透過可能なウインドウを介して前記気密容器の内部に照射されることを特徴とする請求項1に記載の走査型プローブ顕微鏡。
- 前記ウインドウに石英ガラスを使用することで、前記露光手段から紫外線を試料に照射することを特徴とする請求項2に記載の走査型プローブ顕微鏡。
- 前記気密容器に、任意のガスを導入する機構および真空ポンプをさらに取り付け、露光時の雰囲気および圧力を制御可能としたことを特徴とする請求項2に記載の走査型プローブ顕微鏡。
- 前記試料の温度を調節する機構をさらに備えることで、露光時の温度を制御可能としたことを特徴とする請求項4に記載の走査型プローブ顕微鏡。
- 先端に探針を有するカンチレバーと、試料を移動させる試料移動手段と、レーザーによりカンチレバーの変位を検出する取り外し可能なカンチレバー変位検出手段と、前記カンチレバーの上方から前記試料に光を露光する露光手段と、を備えた走査型プローブ顕微鏡による測定方法であって、前記試料を走査型プローブ顕微鏡により測定した後、前記カンチレバー変位検出手段を取り外し、前記露光手段により試料を露光し、再び前記カンチレバー変位検出手段を取り付けて、露光後の試料を測定する走査型プローブ顕微鏡による測定方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004094101A JP4322722B2 (ja) | 2004-03-29 | 2004-03-29 | 走査型プローブ顕微鏡及び該顕微鏡による測定方法 |
US11/088,086 US7251987B2 (en) | 2004-03-29 | 2005-03-23 | Scanning probe microscope and measuring method by means of the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004094101A JP4322722B2 (ja) | 2004-03-29 | 2004-03-29 | 走査型プローブ顕微鏡及び該顕微鏡による測定方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005283189A JP2005283189A (ja) | 2005-10-13 |
JP4322722B2 true JP4322722B2 (ja) | 2009-09-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004094101A Expired - Fee Related JP4322722B2 (ja) | 2004-03-29 | 2004-03-29 | 走査型プローブ顕微鏡及び該顕微鏡による測定方法 |
Country Status (2)
Country | Link |
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US (1) | US7251987B2 (ja) |
JP (1) | JP4322722B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100147820A1 (en) * | 2008-05-13 | 2010-06-17 | Nanoink, Inc. | Heated cantilever |
JP5461917B2 (ja) * | 2009-08-12 | 2014-04-02 | 株式会社日立ハイテクサイエンス | 軟化点測定装置および熱伝導測定装置 |
US8484756B2 (en) * | 2011-01-19 | 2013-07-09 | The United States of America, as represented by the Secretary of Commerce, The National Institute of Standards and Technology | Tip-mounted nanowire light source instrumentation |
EP2682760A1 (en) * | 2012-07-05 | 2014-01-08 | Imec | Apparatus and method for atomic force microscopy in controlled atmosphere |
CN109745006B (zh) * | 2019-01-31 | 2024-03-15 | 北京超维景生物科技有限公司 | 分离式吸附装置、显微镜探测装置及激光扫描显微镜 |
CN109884343B (zh) * | 2019-02-22 | 2023-12-19 | 浙江中医药大学 | 一种用于透射电镜直投图像观察的挡光装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5157251A (en) * | 1991-03-13 | 1992-10-20 | Park Scientific Instruments | Scanning force microscope having aligning and adjusting means |
US6138503A (en) * | 1997-10-16 | 2000-10-31 | Raymax Technology, Inc. | Scanning probe microscope system including removable probe sensor assembly |
JP4846888B2 (ja) * | 1998-12-01 | 2011-12-28 | キヤノン株式会社 | 位置合わせ方法 |
US6468599B1 (en) * | 1998-12-25 | 2002-10-22 | International Business Machines Corporation | Method for removing organic compound by ultraviolet radiation |
US7076996B2 (en) * | 2002-10-31 | 2006-07-18 | Veeco Instruments Inc. | Environmental scanning probe microscope |
-
2004
- 2004-03-29 JP JP2004094101A patent/JP4322722B2/ja not_active Expired - Fee Related
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2005
- 2005-03-23 US US11/088,086 patent/US7251987B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US7251987B2 (en) | 2007-08-07 |
US20050210966A1 (en) | 2005-09-29 |
JP2005283189A (ja) | 2005-10-13 |
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