JP4261169B2 - Translucent thin film solar cell and method for producing translucent thin film solar cell module - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an integrated thin film solar cell and a method for manufacturing the same, and more particularly to a thin film solar cell having translucency and excellent appearance and productivity and a method for manufacturing the same.
[0002]
[Prior art]
In general, a thin film solar cell is formed by sequentially laminating a transparent conductive film, a semiconductor photoelectric conversion film, and a back electrode film on a light-transmitting insulating substrate such as glass using a method such as sputtering or CVD. ZnO, SnO ₂ , ITO, etc. are mainly used as the transparent conductive film, and Ag, Al, etc. are mainly used as the metal electrode material. Furthermore, in a large-area thin film solar cell, a plurality of photoelectric conversion cells formed by repeatedly performing patterning such as etching and laser scribing and lamination of each film include a transparent conductive film, a back electrode film, and a connection region. In general, a so-called integrated structure is connected in series.
[0003]
In recent years, depending on the application, such a large-area thin film solar cell has been required to have translucency.
[0004]
As a method for imparting translucency to a large-area thin-film solar cell module having an integrated structure, a transparent conductive film, a photoelectric conversion film made of an amorphous silicon-based semiconductor, and a back electrode film on an insulating translucent substrate There has been proposed a method in which a photoelectric conversion film and a back electrode film are removed by scanning a laminated body while irradiating a laser beam, and an opening groove having translucency is provided (for example, see Patent Document 1). .)
[0005]
[Patent Document 1]
JP 05-251723 A [0006]
[Problems to be solved by the invention]
However, in such a large area translucent thin film solar cell, in order to obtain sufficient translucency, it is necessary to ensure a certain area ratio of the translucent opening groove to the solar cell, and laser light irradiation is performed. However, in the case of forming by a method of removing the photoelectric conversion film and the back electrode film by scanning and providing a translucent opening groove, the load of a so-called laser scribing process for performing laser light irradiation and scanning, that is, the apparatus cost and processing There is a problem that time is excessive in the manufacturing process.
[0007]
[Means for Solving the Problems]
As a result of intensive studies in view of the above problems, the present inventors have made a photoelectric conversion comprising a transparent conductive film, an amorphous and / or a polycrystalline silicon-based semiconductor sequentially laminated on one main surface of an insulating translucent substrate. Film, including a multilayer film including a back electrode film, including a cell region including a plurality of photoelectric conversion cells connected in series, a translucent opening groove from which the photoelectric conversion film and the back electrode have been removed, and a connection region, The translucent thin film solar cell is characterized in that the translucent opening groove is formed by simultaneously irradiating a plurality of laser beams to different portions on the substrate on which the multilayer film is laminated. Thus, it has been found that the load of the laser scribing process can be greatly reduced. By simultaneously irradiating different portions on the substrate with a plurality of laser beams, a plurality of light-transmitting opening grooves are simultaneously formed, and a light-transmitting thin-film solar cell having a large area ratio of the light-transmitting opening grooves is reduced. It can be formed in a short time at a cost.
[0008]
By the way, each translucent opening groove reflects the state of the laser beam which formed each, and has a respectively different form. If the laser beam emission head is the same, the state of the laser beam is constant except for some time fluctuation. Therefore, when a plurality of light-transmitting aperture grooves are formed by simultaneously irradiating a plurality of laser beams as described above, the light-transmitting aperture grooves formed by the laser light emitted from the same laser light emitting head are There is a problem that adjacent areas look different from the surroundings.
[0009]
For this reason, it is effective that the number of regions on the substrate in which the adjacent translucent aperture grooves are formed by the laser beam from the same laser beam emitting head is larger than the number of the plurality of laser beams. is there. In this case, the region where the translucent opening grooves formed by the laser light emitted from the same laser light emitting head are adjacent to each other is separated by at least two regions in one substrate, that is, different from each other. Since they are located apart from each other, there is an effect that the appearance is averaged and uniform. Here, the different region is a region adjacent to a translucent opening groove formed by laser light emitted from the same laser light emitting head, which is different from the above.
[0010]
Furthermore, it is effective that the adjacent translucent opening grooves are formed by laser beams from different laser beam emitting heads. In this case, since there is no region where the transparent aperture groove formed by the laser beam emitted from the same laser beam emitting head is adjacent, the region accompanying the formation of the transparent aperture groove in the substrate As a result, there can be no uneven appearance.
[0011]
In addition, when the light-transmitting opening groove is a thin film solar cell formed in a straight line, the laser scribe process of simultaneously irradiating different portions on the substrate on which the multilayer film is laminated with a plurality of laser beams is high. Productivity is obtained and the appearance is also favorable.
[0012]
Furthermore, a thin film solar cell having a substantially equal spacing between adjacent translucent opening grooves is preferable because a translucent thin film solar cell having an excellent appearance is obtained.
[0013]
In particular, the relationship between the connection region and the translucent opening groove formed linearly is that the translucent opening groove formed linearly is parallel to the series connection direction of the photoelectric conversion cells. From the viewpoint of appearance, actual production and construction. In general, the series connection direction of the photoelectric conversion cells is a direction perpendicular to each linear connection region formed at the end of each photoelectric conversion cell formed in a strip shape.
[0014]
On the multilayer film of the translucent thin film solar cell as described above, a fluororesin or glass having a high transmittance and weather resistance is disposed as a back surface sealing material, thereby providing a highly translucent material with excellent reliability. A translucent thin film solar cell module can be obtained.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. In the drawings of the present application, the same reference numerals indicate the same or corresponding parts, and redundant description is not repeated.
[0016]
FIG. 1 is a perspective view for explaining a translucent thin film solar cell 1 of the present invention. As shown in FIG. 1, the photoelectric conversion cell 10 of the translucent thin film solar cell 1 has a structure in which a transparent conductive film 3, a photoelectric conversion film 4, and a back electrode film 5 are sequentially stacked on an insulating translucent substrate 2. have. That is, the translucent thin film solar cell 1 photoelectrically converts light incident from the side of the insulating translucent substrate 2 by the photoelectric conversion film 4.
[0017]
Next, each component of this translucent thin film solar cell 1 is demonstrated.
[0018]
As the insulating translucent substrate 2, for example, a glass plate or a transparent resin film can be used. As the glass plate, it is possible to use a float plate glass which can be obtained at a low cost, has high transparency and insulation, and has smooth both main surfaces mainly composed of SiO ₂ , Na ₂ O and CaO.
[0019]
The transparent conductive film 3 can be composed of a transparent conductive oxide layer such as an ITO film, a SnO ₂ film, or a ZnO film. The transparent conductive film 3 can be formed using a known vapor deposition method such as an evaporation method, a CVD method, or a sputtering method.
[0020]
The photoelectric conversion film 4 includes an amorphous and / or polycrystalline silicon-based semiconductor photoelectric conversion layer. For example, a p-type silicon-based semiconductor layer, an i-type silicon-based semiconductor layer, and an n-type silicon from the transparent conductive film 3 side. It has a structure in which system-based semiconductor layers are sequentially stacked. These p-type semiconductor layer, i-type semiconductor layer, and n-type semiconductor layer can all be formed by a plasma CVD method. Moreover, a tandem structure in which these pin structures are stacked in two stages, a triple structure in which three stages are stacked, or the like may be used.
[0021]
The p-type semiconductor layer constituting the photoelectric conversion film 4 can be formed, for example, by doping silicon or a silicon alloy such as silicon carbide or silicon germanium with p-conductivity determining impurity atoms such as boron or aluminum. The i-type semiconductor layer can be formed of an amorphous silicon-based semiconductor material and a crystalline silicon-based semiconductor material, respectively. Examples of such a material include intrinsic semiconductor silicon (such as silicon hydride) and silicon carbide. In addition, silicon alloys such as silicon germanium can be fisted. In addition, if the photoelectric conversion function is sufficiently provided, a weak p-type or weak n-type silicon-based semiconductor material containing a small amount of a conductivity type determining impurity may be used. Furthermore, the n-type semiconductor layer can be formed by doping silicon or a silicon alloy such as silicon carbide or silicon germanium with n-conductivity determining impurity atoms such as phosphorus or nitrogen.
[0022]
The back electrode film 5 not only has a function as an electrode, but also reflects light that enters the photoelectric conversion film 4 from the insulating translucent substrate 2 and arrives at the back electrode film 5 and re-enters the photoelectric conversion film 4. It also functions as a layer. The back electrode film 5 can be formed to a thickness of, for example, about 200 nm to 400 nm by vapor deposition or sputtering using silver, aluminum, or the like.
[0023]
A transparent conductive thin film (not shown) made of a nonmetallic material such as ZnO is provided between the back electrode film 5 and the photoelectric conversion film 4 in order to improve the adhesion between them, for example. be able to.
[0024]
Each photoelectric conversion cell 10 formed on the insulating translucent substrate 2 of the translucent thin-film solar cell 1 is sealed with a back surface sealing material 7 via a sealing resin layer 6 (not shown). For the sealing resin layer 6, a resin capable of bonding the back surface sealing material 7 to the cells 10 is used. As such a resin, for example, EVA (ethylene / vinyl acetate copolymer), PVB (polyvinyl butyral), PIB (polyisobutylene), silicone resin, and the like can be used. Moreover, as the back surface sealing material 7, the translucent insulation excellent in moisture resistance and water resistance like a fluororesin type film like a polyvinyl fluoride film (for example, Tedlar film (trademark name)) or glass. Material is used. These sealing resin layer 6 / back surface sealing material 7 can be simultaneously attached to the back surface side of the translucent thin film solar cell 1 by a vacuum laminating method.
[0025]
As shown in FIG. 1, the translucent thin film solar cell 1 is provided with first and second separation grooves 21 and 22 and a connection groove 23 for dividing the thin film. The first and second separation grooves 21 and 22 and the connection groove 23 are parallel to each other and extend in the upper right direction of the drawing in the perspective view of FIG. Moreover, as shown in FIG. 1, the translucent thin film solar cell 1 is provided with the translucent opening groove 8 which divides | segments the said thin film. The translucent opening grooves 8 are parallel to each other and extend in the left-right direction on the paper surface of the perspective view of FIG.
[0026]
The first separation groove 21 divides the transparent conductive film 3 corresponding to each cell 10, has an opening at the interface between the transparent conductive film 3 and the photoelectric conversion film 4, and has the insulating translucent substrate 2. The surface is the bottom. The first separation groove 21 is embedded with a silicon-based thin film that constitutes the photoelectric conversion film 4 and electrically insulates the adjacent transparent conductive films 3 from each other.
[0027]
The second separation groove 22 is provided at a position away from the first separation groove 21. The second separation groove 22 divides the photoelectric conversion film 4 and the back electrode film 5 corresponding to each cell 10, and has an opening at the interface between the back electrode film 5 and the resin sealing layer 6. The surface of the transparent conductive film 3 is the bottom surface. The second separation groove 22 is buried with the sealing resin layer 6 and electrically insulates the back electrode films 5 between the adjacent cells 10.
[0028]
The connection groove 23 is provided between the first separation groove 21 and the second separation groove 22. The connection groove 23 divides the photoelectric conversion film 4, has an opening at the interface between the photoelectric conversion film 4 and the back electrode film 5, and uses the surface of the transparent conductive film 3 as the bottom surface. The connection groove 23 is embedded with a metal material constituting the back electrode film 5 and electrically connects one back electrode film 5 and the other transparent conductive film 3 of the adjacent cells 10. That is, the connection groove 23 and the metal material filling the connection groove 23 serve to connect the cells 10 juxtaposed on the insulating translucent substrate 2 in series.
[0029]
A region sandwiched between the first and second separation grooves 21 and 22 and including one connection groove 23 is generally called a connection region 9 that does not contribute to photoelectric conversion.
[0030]
The translucent opening groove 8 divides the photoelectric conversion film 4 and the back electrode film 5 in order to impart translucency to the translucent thin film solar cell 1, and the back electrode film 5 and the resin sealing layer 6 has an opening at the interface with the surface of the transparent conductive film 3 as the bottom surface. The translucent opening groove 8 is embedded with the sealing resin layer 6.
[0031]
Then, the manufacturing method of this translucent thin film solar cell 1 is demonstrated.
[0032]
First, after forming the transparent conductive film 3 on one whole surface of the insulating translucent substrate 2, the first separation groove 21 for dividing the transparent conductive film 3 into strips by irradiating, for example, YAG fundamental wave laser light. Form.
[0033]
Next, amorphous silicon and / or polycrystalline silicon is once applied in the order of p-type, i-type, and n-type by the plasma CVD method or the like as the photoelectric conversion film 4 over the transparent conductive film 3 in which the first separation groove 21 is formed. After the above lamination, for example, YAG second harmonic laser light is irradiated to form connection grooves 23 that divide the photoelectric conversion film 4 into strips.
[0034]
Subsequently, after forming a transparent conductive thin film and a metal film as a back electrode film 5 in this order over the photoelectric conversion film 4 in which the connection groove 23 is formed by a sputtering method or the like, for example, YAG second harmonic laser light is insulated and transmitted. A second separation groove 22 that irradiates from the optical substrate 2 side and divides the back electrode film 5 into strips is formed.
[0035]
Thus, the transparent conductive film 3, the photoelectric conversion film 4 made of an amorphous and / or polycrystalline silicon semiconductor, and the back electrode film 5 are sequentially stacked on one main surface of the insulating translucent substrate 2. A so-called integrated thin-film solar cell in which a plurality of strip-shaped photoelectric conversion cells having the same shape, including a multilayer region and including a plurality of series-connected photoelectric conversion cells and a connection region 9 are connected in series is formed. The
[0036]
Finally, the YAG second harmonic laser beam is scanned from the insulating translucent substrate 2 side of the integrated thin-film solar cell formed as described above, and the method is the same as the division of the back electrode film 5 described above. 1 is formed. The area ratio of the translucent opening groove 8 to the cell region is 1/5 to 1/20 of a range in which the area efficiency related to power generation of the translucent thin film solar cell 1 is not extremely reduced .
[0037]
Further, the light-transmitting opening groove 8 for straight linear, may be non-contiguous, in order to improve transparency, it is preferable to provide continuously.
[0038]
Now, in the present invention, the formation of the translucent opening groove 8 of the translucent thin film solar cell 1 is different from each other on the insulating translucent substrate 2 on which the multilayer film is laminated simultaneously. This is done by irradiating the part. When only one laser beam is irradiated to one insulating translucent substrate 2 to form the translucent opening groove 8, this laser scribing process takes a long time and becomes a heavy burden in the manufacturing process. . On the contrary, if the number of laser beams simultaneously irradiated becomes extremely large, the structure of the laser scribing apparatus becomes complicated. Therefore, the number of laser beams simultaneously irradiated on one insulating translucent substrate 2 is preferably 10 or less, more preferably 8 or less.
[0039]
As described above, when a plurality of laser beams are simultaneously irradiated to one insulating translucent substrate 2 to form the translucent opening grooves 8, the adjacent translucent opening grooves 8 emit the same laser light. The number of regions on the substrate 2 formed by the laser light from the head is larger than the number of the plurality of laser lights, that is, the transmission processed using the laser light from the same laser light emitting head. There is a region where two or more optical aperture grooves 8 are continuously adjacent to each other, and it is effective to make the number of the regions larger than the number of laser beams.
[0040]
Hereinafter, description will be made with reference to the plan view of FIG. For example, when the translucent opening groove 8 is formed by scanning laser beams from two different laser beam emitting heads 31 and 32, the laser beam scanning of the laser beam emitting head 31 as shown in FIG. A region 311 in which the light-transmitting opening groove 8 is formed adjacent to each other and a region 312 in which the light-transmitting opening groove 8 is formed adjacent to each other by scanning of the laser light of the laser light emitting head 32 are adjacent to each other. If there is, the boundary 12 between these two regions 311 and 321 is noticeably recognized visually due to the difference in the state of the laser light emitted from the two laser light emitting heads 31 and 32, and the light transmitting property The appearance of the thin film solar cell 1 is greatly impaired.
[0041]
Therefore, as shown in FIG. 3 and FIG. 4, the region 311 in which the translucent opening groove 8 is formed adjacently by the laser beam scanning of the laser beam emitting head 31 and the laser beam scanning of the laser beam emitting head 32. A plurality of adjacent regions 312 in which the light-transmitting opening grooves 8 are formed are arranged on a single insulating light-transmitting substrate 2 with at least one region sandwiching another region. By averaging the differences from 321 as a whole, it is possible to improve the appearance of the translucent thin film solar cell 1.
[0044]
As shown in FIG. 6, a first region 311 in which a translucent opening groove is formed adjacent to the insulating translucent substrate 2 by scanning the laser beam of the first laser beam emitting head 31. When there is a second region 312 in which a translucent opening groove is formed adjacent to each other by the scanning of the laser light of the second laser light emitting head 32, the light is emitted from the first laser light emitting head 31, respectively . alternately a first type translucent opening groove 811 formed by scanning the laser beam, and a second type translucent opening groove 821 formed by scanning of the laser beam emitted from the second laser beam emitting head 32 It is preferable that the first region 311 and the second region 321 exist through the arranged region.
[0045]
Further, a region where the translucent opening groove 8 is formed adjacently by scanning of laser light emitted from the same laser light emitting head, and a transparent formed by scanning of laser light emitted from different laser light emitting heads. By disposing the optical opening groove 8 according to a specific arrangement method, the appearance of the translucent thin film solar cell 1 as a whole can be improved.
[0046]
For example, as shown in FIG. 7, a first transparent light-transmitting groove 8 is formed on a single insulating light-transmissive substrate 2 adjacent to each other by scanning with laser light from the first laser light emitting head 31 . The region 311 and the region sandwiched between the second region 321 in which the translucent opening groove 8 is formed adjacently by the scanning of the laser beam of the second laser beam emitting head 32 exists at a certain distance So in the vicinity of the first region 311 and a number of the first kind light transmitting opening groove 811 formed by the scanning of the laser beam emitted from the first laser beam emitting head 31, in the vicinity of the second region 321 second by increasing the second type translucent open groove 821 which is formed by the scanning of the laser light emitted from the second laser beam emitting head 32, an abrupt change in appearance from the first region 311 to the second area 321 It is possible to move slowly without accompanying.
[0047]
The above arrangement method can be similarly applied to the case where the translucent opening groove 8 is formed by scanning three or more laser beams.
[0048]
In order to facilitate laser beam scanning, the region 311 in which the transparent aperture grooves 8 are formed adjacent to each other by scanning of the laser beam emitted from the same laser beam emitting head has 10 or more transparent apertures. It is preferable that the groove 8 is a continuously adjacent region. Particularly preferred is 30 or more.
[0049]
When the above-described translucent thin film solar cell 1 is made into a module, a part of light such as sunlight incident from the side of the insulating translucent substrate 2 is transmitted through the translucent opening groove 8. In order to be visible from the back electrode film 5 side of the conductive thin-film solar cell 1 and to improve the weather resistance, a sealing resin layer 6 having translucency such as EVA (Ethylene Vinyl Acetate) and the like, glass, fluorine resin film, etc. It is preferable to use a non-colored light-transmitting back surface sealing material 7 and finish the moisture-proof treatment by enclosing the laminate.
[0050]
【Example】
EXAMPLES Hereinafter, although this invention is demonstrated in detail based on some Examples with a comparative example, this invention is not limited to the following description examples, unless the meaning is exceeded.
[0051]
According to the above-described embodiment, a light-transmitting thin film solar cell 1 having a light-transmitting opening groove 8 was manufactured using four laser light emitting heads.
[0052]
First, on the glass substrate 2 having an area of 910 mm × 910 mm and a thickness of 5 mm, an SnO ₂ film having a thickness of about 700 nm was formed as a transparent conductive film 3 by a thermal CVD method. By irradiating this SnO ₂ film 3 with a YAG fundamental wave laser beam from the SnO ₂ film 3 side, a first separation groove 21 was formed by patterning. Next, after the fine powder generated by the processing was washed and removed, the glass substrate 2 was carried into a plasma CVD film forming apparatus, and a photoelectric conversion film 4 made of amorphous silicon having a thickness of about 300 nm was formed. After unloading the glass substrate 2 from the CVD apparatus, the photoelectric conversion film 4 was irradiated with YAG second harmonic laser light from the glass substrate 2 side to form connection grooves 23.
[0053]
Next, as the back electrode film 5, a ZnO film having a thickness of about 80 nm and an Ag film having a thickness of about 300 nm were formed on the photoelectric conversion film 4 in this order by a sputtering method. Furthermore, the back electrode film 5 was irradiated with YAG second harmonic laser light from the glass substrate 2 side, and divided into strips to form second separation grooves 22. In order to insulate the cell region and the connection region from the periphery of the glass substrate 2, YAG laser light is irradiated along the periphery of the glass substrate 2, and the SnO ₂ film 3, the amorphous silicon photoelectric conversion film 4, and the back electrode film 5. Was removed. As described above, an integrated thin film solar cell in which 100 photoelectric conversion cells 10 having an area of approximately 79.21 cm ² were connected in series was obtained.
[0054]
Next, similarly to the case where the back electrode film 5 is divided into strips and the second separation grooves 22 are formed, the translucent opening grooves 8 are formed in the integrated thin film solar cell using four laser light emitting heads. Formed. A total of 889 light-transmitting opening grooves 8 having a length of 888 mm and intervals of 1 mm were arranged substantially parallel to the integration direction 11 of the integrated thin film solar cell.
[0055]
The outline of the arrangement method of these translucent opening grooves 8 is shown in FIG. In this figure, a translucent opening groove 811 formed by scanning a laser beam emitted from the laser beam emitting head 31 is formed as a translucent opening groove 811 and a region where the translucent opening groove 811 is formed adjacently. A region 311 was set, and a region sandwiched between the region 311 and the region 321 was set as a region 123. FIG. 9 shows a combination arrangement pattern of the translucent opening groove 811 by the laser beam emitting head 31 and the translucent opening groove 821 by the laser beam emitting head 32 arranged in the region 123.
[0056]
Finally, an electrode for power extraction is arranged in the vicinity of the photoelectric conversion cells 10 at both ends, EVA as the sealing resin layer 6, and a glass plate having an area of 910 mm × 910 mm and a thickness of 5 mm as the back surface sealing material 7; Were vacuum-sealed using a vacuum lamination device in a state of being sequentially stacked on the back electrode film 5. The solar cell performance of the translucent thin film solar cell module obtained by modularizing the translucent thin film solar cell 1 was measured.
[0057]
The total area of all the photoelectric conversion cells 10, all the translucent opening grooves 8, and all the connection regions 9 of this translucent thin film solar cell module is 890 mm × 888 mm.
[0058]
As a result of irradiating light with a spectrum and light amount of AM 1.5 (100 mW / cm ² ) and measuring at 25 ° C., the short-circuit current is 0.114 A, the open-circuit voltage is 86.5 V, the fill factor is 0.596, and the maximum output is 58.8 W. Good output was obtained.
[0059]
Further, the difference in appearance of the translucent opening groove 8 due to the difference in the state of the laser beams emitted from four different laser beam emitting heads is the arrangement of the translucent opening groove 8 shown in FIGS. Therefore, the translucent thin film solar cell module as a whole had a good appearance.
[0060]
【The invention's effect】
As described above, according to the present invention, a translucent thin film solar cell capable of producing a large area integrated thin film solar cell module having excellent translucency and excellent in appearance with high productivity. A battery and a translucent thin film solar cell module can be provided.
[Brief description of the drawings]
FIG. 1 is a conceptual perspective view for explaining a translucent thin film solar cell of the present invention. FIG. 2 is a plan view of a processing example in which a boundary is remarkably recognized visually. FIG. 3 is a concept of one processing example of the present invention. Fig. 4 is a plan view conceptually showing one processing example of the present invention. Fig. 5 is a plan view conceptually showing one processing example of the present invention. FIG. 7 is a plan view conceptually showing one processing example of the present invention. FIG. 8 is a plan view conceptually showing one processing example of the present invention. 8 is an enlarged view of a part of FIG. 8, and is a plan view conceptually showing one processing example of the present invention.
DESCRIPTION OF SYMBOLS 1 Translucent thin film solar cell 2 Insulating translucent substrate 3 Transparent conductive film 4 Photoelectric conversion film 5 Back surface electrode film 6 Sealing resin layer 7 Back surface sealing material 8 Translucent opening groove 9 Connection area 10 Photoelectric conversion cell 11 Integration Direction 12 Boundary 21 First separation groove 22 Second separation groove 23 Connection groove 31 Laser light emission head 32 Laser light emission head 311 Formation region 321 by laser light emission head 31 Formation region 123 by laser light emission head 32 Region 311 Region 811 sandwiched between regions 321 Translucent opening groove 821 by laser light emitting head 31 Translucent opening groove by laser light emitting head 32

Claims (3)

On one principal surface of the insulating translucent substrate, Toru Akirashirubedenmaku, amorphous and / or polycrystalline silicon comprises a semiconductor photoelectric conversion layer, the multilayer film including a back electrode film are laminated in this order, were connected in series a cell region including a plurality of photoelectric conversion cells, and the photoelectric conversion layer and a back electrode film is removed translucent opening groove, and a connection region to a method for producing a free MuToruhikari thin film solar cells,
The translucent opening groove is formed by a laser scribing process so as to divide the photoelectric conversion film and the back electrode film in a straight line parallel to the series connection direction of the photoelectric conversion cells and at equal intervals. The area ratio to the cell region is 1/5 to 1/20,
In the laser scribing step, the multilayer film stacks two or more laser beams emitted from two or more laser beam emitting heads including the first laser beam emitting head and the second laser beam emitting head. By simultaneously irradiating different portions on the insulated translucent substrate, the translucent opening groove is formed,
A plurality of first-type translucent opening grooves formed by scanning the laser beam of the first laser beam emitting head are formed by scanning the laser beam of the second laser beam emitting head and the adjacent first region. The second region where the plurality of second-type translucent opening grooves are adjacent to each other exists at a certain distance,
Within the region sandwiched between the first region and the second region, the number of first-type translucent opening grooves is increased near the first region, and the second-type translucent opening is disposed near the second region. A method of manufacturing a translucent thin film solar cell , characterized by averaging the translucent appearance difference between the first region and the second region by increasing the number of grooves . The first region is formed with 10 or more first-type translucent opening grooves adjacent to each other, and the second region is formed with 10 or more second-type translucent opening grooves adjacent to each other. The manufacturing method of the translucent thin film solar cell of Claim 1 characterized by the above-mentioned. To produce a thin film solar by the method of claim 1, wherein, on the multilayer film, Ru with a fluorine-based resin or glass as the back sealing material, manufacturing method of the thin film solar module.

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