JP4243779B2 - Diffusion plate manufacturing method, diffusion plate, microlens array manufacturing method, and microlens array - Google Patents

Diffusion plate manufacturing method, diffusion plate, microlens array manufacturing method, and microlens array Download PDF

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Publication number
JP4243779B2
JP4243779B2 JP31406897A JP31406897A JP4243779B2 JP 4243779 B2 JP4243779 B2 JP 4243779B2 JP 31406897 A JP31406897 A JP 31406897A JP 31406897 A JP31406897 A JP 31406897A JP 4243779 B2 JP4243779 B2 JP 4243779B2
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Prior art keywords
indentation
indenter
row
indentations
predetermined
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JPH11142609A (en
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泰央 冨田
正明 山崎
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株式会社ニコン
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Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a diffusing plate or a microlens array used for a screen of an optical device, a single-lens reflex camera, or the like.
[0002]
[Prior art]
Conventionally, it is known to provide an array of microlenses (hereinafter referred to as a microlens array) on a screen or a diffusion plate of an optical device. The screen of the microlens array has the advantage that it is not rough and bright compared to the screen where the fine irregularities are transferred from the sanding surface of the mold, but when the microlenses are arranged periodically, diffraction is difficult. There are also disadvantages that the direction of light is limited to a specific direction and blurring becomes unnatural, or when used together with a Fresnel lens, it causes interference with the ring zone structure of the Fresnel lens and causes moire fringes.
[0003]
In addition, even if a diffusing plate is formed by forming minute recesses in the metal plate and uniformly diffusing light over the entire screen, the same phenomenon occurs, making it difficult to see the image projected on the screen. .
By the way, there is a method called an indentation method as a method for forming a recess in a mold or workpiece used when manufacturing such a microlens array and a diffusion plate. In this method, an indenter is formed by pressing an indenter against the surface of a mold forming a microlens array or the surface of a metal plate serving as a diffusion plate. To achieve this, a die or metal plate is fixed to a table that can be moved in the XY-axis direction using a machining center, and an indenter that can be moved in the Z direction by a hydraulic cylinder or moving coil. Is pressed to form an indentation.
[0004]
[Problems to be solved by the invention]
By the way, the microlens array and the diffuser plate used for the above-mentioned application can solve the above-described problems by randomizing the arrangement of the microlenses and the minute concave portions. Therefore, it is necessary to form indentations so that regularity is lost.
By the way, when indentations with different sizes are formed without regularity using a plurality of indenters having different diameters, for example, in the case of a machine that can perform indentation formation by computer control, a machining center that controls the entire machine is used. Each indentation position must be entered individually, which can be very expensive and time consuming to create software for control. In addition, when forming an indentation with a machine that cannot be controlled by a computer as described above, the indentation must be formed while a human being visually confirms the position one by one. In either case, a great deal of labor and time is spent on the operator.
[0005]
Therefore, the present invention is not uneven even if the arrangement formed by machining is random, without inputting the position of each indentation to be formed or allowing the human to check the position and controlling the machine tool. It is an object of the present invention to provide a diffusing plate or microlens array having good diffusibility and a method for manufacturing them.
[0006]
[Means for Solving the Problems]
Therefore, in order to solve the above problems, the present invention provides a method of manufacturing a diffuser plate having a concavo-convex shape on the surface or a microlens array having a plurality of lens shapes, with a plurality of indenters each having a different diameter. The following method of manufacturing using a plurality of indenters having different diameters is provided.
[0007]
First, when forming an indentation with a first indenter on a workpiece such as a mold for forming a diffusion plate substrate or a microlens array, a predetermined direction from the first start position in the first row is used. Indentations are formed on the workpiece at regular intervals.
If all the indentations to be formed with the first indenter are formed in the first row, then in the second row next to the first row, the indentation existing at the first start position is not adjacent. Indentation formation is started from the position, and indentations are formed at the same intervals as the indentations formed in the first row in a predetermined direction.
[0008]
Such an operation is repeated to form an indentation formed on the workpiece with the first indenter.
Next, when forming the indentation on the workpiece with the second indenter having a diameter different from that of the first indenter, from the second start position where the indentation is not already formed on the first row. Indentations are formed in the predetermined direction and at the same intervals as the indentations formed by the first indenter.
[0009]
When all the indentations to be formed with the second indenter are formed in the first row, then in the second row, the indentation by the first indenter in the first row and the second indenter The indentation by the second indenter is formed in a predetermined direction and at the same interval as that of the indentation formed by the first indenter. .
[0010]
Furthermore, when forming the indentation with other indenters, the indentation formation start position in each row was arbitrarily determined, the indentation formation was started, and the indentation was formed in the predetermined direction and with the first indenter. Indentations were formed at the same intervals as the indentations, and indentations were formed on the workpiece.
Furthermore, in the second aspect of the present invention, the indentation interval is shorter than the length of all the indenter diameters used for forming the indentation on the workpiece, and no indentation is formed. Was reduced as much as possible.
[0011]
Further, in the third aspect of the present invention, in a diffusion plate or microlens array in which a plurality of types of concave portions having different diameters or depths, or a plurality of types of lenses having different diameters or heights are arranged in a two-dimensional direction, The arrangement intervals of the recesses having the same diameter and depth are equal in one direction, and the recesses having the same diameter and height are not adjacent to each other in the direction perpendicular to the one direction. By doing so, it is possible to reduce the arrangement of the periodic indents as much as possible, and to reduce the data input to the machining center.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Next, the present invention will be described in detail with reference to embodiments. By the way, in the embodiment according to the present invention, the concave shape of the diffusion plate and the shape of the lens of the microlens array are all formed by the indentation method. This indentation method is a method of forming indentations of indenters by pressing indenters against a substrate of a mold or a diffusion plate with a predetermined load to form a large number of indentations at predetermined intervals. And when producing a microlens array, a microlens array is formed by injection molding, compression molding, cast molding, etc. using the metal mold | die in which the impression was formed. Next, a microlens array according to the present invention will be described as a first embodiment of the present invention.
[0013]
The microlens array according to the present invention is manufactured with the apparatus configuration shown in FIG. FIG. 2 is a schematic view of an indenter pressing device for manufacturing a focusing screen according to the present invention. After the indentation is formed by the indentation method, the mold base material 5 is placed on the XY stage 6 by a mechanical method or a fixing method such as adhesion. In this XY stage, the mold base material 5 can be moved two-dimensionally by an X-direction drive stage motor 7X and a Y-direction drive stage motor 7Y. The stage moving motors 7X and 7Y are controlled by the stage drive circuit 20. Further, the position of the XY stage 6 can be detected by the X direction digital micrometer 8X and the Y direction digital micrometer 8Y. The output signals obtained from the digital micrometers 8X and 8Y are input to the stage movement amount detection circuit 21, and the stage movement amount detection circuit 21 can monitor the drive amounts of the stage movement motors 7X and 7Y.
[0014]
Next, the moving coil device 2 shown in FIG. 2 is fixed to the housing 4 of the indenter pressing device, and gives the indenter 1 a force for pressing the mold base material 5. Incidentally, the moving coil device 2 has a structure shown in FIG. A shaft 11 is attached to the moving coil device 2 as shown in FIG. 3, and an indenter 1 is attached to the shaft 11. The moving coil device 2 includes a motor 3 for rotating the shaft 11 to which the indenter 1 is attached. The motor 3 is a stepping motor, and the rotation angle is controlled by the number of pulses from the rotation angle indexing circuit 23 as shown in FIG. The moving coil drive circuit 22 is a circuit for driving the shaft of the moving coil device 2 in the vertical direction, and is controlled by an output signal from the computer 24. Similarly, signals for control are output to the other stage drive circuits 20, the movement amount detection circuit 21, and the rotation angle indexing circuit 23. Further, since the computer 24 is provided with an input device (not shown), it is possible to input work conditions using this input device. Examples of the input device include a keyboard and a recording medium reading device.
[0015]
By the way, the structure of the moving coil drive device 2 will be described with reference to FIG. This moving coil drive device 2 is provided with a cylindrical permanent magnet 12, is provided so as to be externally attached to the shaft 11, and is fixed to the base plate 10c. The coil support frame 13 is attached to the shaft 11 so as to be extrapolated to the permanent magnet, and the coil 14 is wound around the coil support frame 13 in an annular shape. Further, an annular permanent magnet 15 is provided so as to be extrapolated to the coil 14, and this permanent magnet 15 is fixed to the base plate 10a.
[0016]
Further, the moving coil driving device 2 is provided with plate springs 9a and 9b, and the base end of the plate spring 9a is fixed to a block 17 fixed to the base plate 10c by a pressing plate 17a and bolts. And the front-end | tip of the leaf | plate spring 9a is connected with the shaft 11 by pinching | pinching with the pressing plate 16a and the block 16 with the connection ring 18 integrated with the shaft 11 with the pin 18a. On the other hand, the base end of the leaf spring 9b is fixed to the block 17 fixed to the base plate 10a by a pressing plate 17a and a bolt. And the front-end | tip of the leaf | plate spring 9b is connected with the shaft 11 by pinching | pinching with the press plate 13a and the support frame 13 with the connection ring 18. FIG.
[0017]
Accordingly, the shaft 11 is elastically supported by the plate springs 9a and 9b so as to be reciprocally movable on the vertical line, but the shaft 11 itself can be rotated. The upper end of the shaft 11 is connected to the indenter rotating motor 3 via a joint 19. Since the joint 19 has rigidity in the rotation (radial) direction and has a flexible structure in the vertical (thrust) direction, the rotation of the motor 3 is transmitted to the shaft 11, but the movement of the shaft 11 in the vertical direction is There is no transmission to the motor 3.
[0018]
Next, details of the shaft drive section of the moving coil device 2 will be described with reference to FIG. As shown in FIG. 4, the permanent magnet 15 is magnetized in the lower part with the S pole and the upper part with the N pole, while the permanent magnet 12 is magnetized with the lower part with the N pole and the upper part with the S pole. As indicated by arrow B, the direction of the magnetic field lines is vertically downward. Here, when a current is applied so that the magnetic field lines generated in the coil 14 are vertically downward as indicated by an arrow B on the central axis of the shaft 11, a vertically downward force acts on the coil 14 and the shaft 11 moves downward vertically. Moving. On the other hand, when a reverse current is applied to the coil 14, a vertically upward force works and the shaft 11 moves vertically upward. The moving coil drive circuit 22 has a variable pulse current generator (not shown), and moves the indenter 1 up and down at high speed by outputting to the coil 14 a pulse wave current whose polarity changes periodically. Can do. The period of this vertical movement can be set to 0.1 to 50 Hz. The vertical stroke is about 50 μm. Further, the pressing force of the indenter 1 can be changed by changing the magnitude of the current supplied to the coil 14.
[0019]
In this way, the indenter 1 can be pressed against the mold base material 5 to form indentations on the mold base material 5. In the present invention, the XY stage is moved each time an indentation is formed, and the next indentation is formed after the mold base material is moved in a predetermined direction by a predetermined amount.
Next, a method for forming indentations on the mold base 5 will be described.
[0020]
The microlens array according to the present invention is manufactured as follows in order to prevent irregularities in the diffused light and the arrangement of the microlenses to be random so that a phenomenon such as moire fringes does not occur.
First, in order to form the microlens array 30 of the present invention, the indentation forming surface of the mold base 5 is finished to a mirror state by metal polishing. As a material for the mold base, martensitic stainless steel which is a crystalline material is suitable. In addition, in order to obtain a microlens array determined by the optical design, trial placement is performed using a test piece made of the same material as that used in advance for the mold, and the coil is necessary to obtain a predetermined indentation depth. Check the supply voltage value. Note that in the microlens array according to the embodiment of the present invention, it is necessary to form a plurality of types of indentations so that the diffused light is not uneven and moire fringes are not generated. Therefore, it is necessary to confirm the supply voltage value to the coil in accordance with the type of indentation.
[0021]
Next, the position where the indentation is first formed in each row in each indenter and the interval between the indentations formed with the same indenter are input to the computer 24 using the input device. In addition, the position where the indentation is first formed in each row using the same indenter is such that the indentation first formed in one row and the indentation formed first in a row adjacent to a row are not adjacent to each other as much as possible. You can do it. However, it is often the case that the necessary performance of the microlens array manufactured with it is ensured without making all the same indentations next to each other.
[0022]
Therefore, in the first embodiment of the present invention, the formation start position of the indentation A1 is set so that the indentations A1 formed by the first used indenter are not adjacent to each other, and the second largest indenter is used. The formation start position of the indentation A2 is set so that the positional relationship between the indentation A2 formed in step 1 and the indentation A1 formed by the largest indenter is different between adjacent rows.
[0023]
Incidentally, FIG. 1 shows a state in which an indentation is formed on the mold base material 5 in the first embodiment of the present invention, but the formed indentation can be seen from FIG. Lined up in parallel. In this way, one row arranged on the same straight line is referred to as a “column”.
In the microlens array forming method, the intervals between the indentations formed with the same indenter are the same. Further, the position at which the indentation is formed at the beginning of each indenter in each row is set so that at least a part of the indentation in the same row overlaps. This is because a microlens array with good diffusibility can be manufactured by reducing the area where no indentation is formed as much as possible. The interval between the rows is also set so that the indentations partially overlap for the same reason.
[0024]
By the way, in the embodiment of the present invention, the indentation is formed by using four types of indenters. Therefore, for each row, the position where the indentation is first formed is input for each indenter, and further, the same indenter is used. The interval between the formed indentations is entered.
Specifically, as shown in FIG. 1, first, the computer 24 supplies the moving coil device 2 with the supply voltage values V1 (for indentation A1 processing), V2 (for indentation A2 processing),..., Vn (indentation An processing). ), Movement distance P in the X direction (constant), coordinates (x11, y1) of the start position of the first row of indentation A1, coordinates (x12, y2) of the start position of the second row of indentation A1,. , The coordinates of the start position of the mth row of the indentation A1 (x1m, ym), the coordinates of the start position of the first row of the indentation A2 (x21, y1), the coordinates of the start position of the second row of the indentation A2 (x22, y2), ..., the coordinates of the start position of the mth row of the impression A2 (x2m, ym), ..., the coordinates of the start position of the first row of the impression An (xn1, y1), the second row of the impression An Start coordinates (xn2, y2), ..., the coordinates (xnm, ym) of the start position of the mth column of the impression An . In the first embodiment of the present invention, since there are four types of indenters, n = 4. The distance of P μm in the X direction is set to be shorter than the sum of the sizes of all the indentations up to the indentations A1, A2,. This is because the indentations adjacent to each other in the same row are formed so as to partially overlap. In the first embodiment of the present invention, the start position is determined not to be adjacent to the same indentation in the adjacent row only in the case of the indentation A1. For the other indentations, at least the same indentations are not arranged in parallel to the X-axis direction or in parallel to the Y-axis direction.
[0025]
At the same time, the range in which the impression is formed on the mold base 5 is also input to the computer 24.
Next, the mold base material 5 is placed at a predetermined position on the XY stage 6 to start. Then, after the origin is found on the mold base material 5, the indenter 1 is moved so as to be positioned on the coordinates (x11, y1) of the start position of the first row of the indentation A1. When the movement is completed, the voltage V <b> 1 is supplied to the moving coil device 2, and an indentation A <b> 1 is formed on the mirror surface of the mold base 5 by the indenter 1. The die base material 5 is moved by P micrometers (μm) in the X direction by the XY stage 6. If the mold base 5 is within a predetermined range, the voltage V1 is again supplied to the moving coil device 2, and an indentation A1 is formed on the mirror surface of the mold base 5 by the indenter 1. In this way, if the movement in the X direction is within the range in which the indentation is formed, the above-described operation is repeated, but if the range is exceeded, the XY stage 6 moves to the second row of the indentation A1 (on the Y axis in FIG. It moves so that the indenter 1 is positioned on the coordinates (x12, y2) of the start position of y2).
[0026]
Then, the voltage V <b> 1 is supplied to the moving coil device 2, and an indentation A <b> 1 is formed on the mirror surface of the mold base material 5 by the indenter 1. The die base material 5 is moved by P μm in the X direction by the XY stage 6. Then, it is determined whether or not it is a range where an indentation is to be formed, and when the range is exceeded, it is further moved to the start position of movement in the adjacent row. The above operation is repeated up to m rows so that the indentation A1 is formed in a desired range on the surface of the mold base material.
[0027]
Next, instead of the indenter forming the indentation A2, the indenter is mounted on the moving coil device 2. Then, the XY stage 6 moves so that the indenter 1 is positioned on the coordinates (x21, y1) of the start position of the first row of the indentation A2. A voltage V <b> 2 is supplied to the moving coil device 2, and an indentation A <b> 2 is formed on the mirror surface of the mold base material 5 by the indenter 1. Next, the die base material 5 is moved in the X direction by P micrometers (μm) by the XY stage 6. If the mold base 5 is within a predetermined range, the voltage V2 is supplied again to the moving coil device, and the indenter A2 is formed on the mirror surface of the mold base 5 by the indenter 1. In this way, if the movement in the X direction is within the range in which the indentation is formed, the above-described operation is repeated, but if the range is exceeded, the XY stage 6 moves to the second row of the indentation A2 (on the Y axis in FIG. The indenter 1 moves so as to be positioned on the coordinates (x22, y2) of the start position of y2). Thereafter, a voltage V2 is supplied to the moving coil device 2, and an indentation A2 is formed on the mirror surface of the mold base 5 by the indenter 1. Then, the die base material 5 is moved by P μm in the X direction by the XY stage 6.
[0028]
Similarly, up to the impression An is formed in a desired range on the surface of the mold base material.
The mold base material 5 in which the indentation is formed in this way has a shape shown in FIG.
Next, the mold base material 5 is used as a part of the mold to form a mold. Then, the microlens array is manufactured by enclosing an acrylic resin in the formed mold and compression-molding it.
[0029]
By the way, the manufacturing method of the diffusing plate that reflects and diffuses incident light uses a metal constituting the diffusing plate instead of a mold, and the microlens array is made until the indentation is formed on a predetermined surface of the diffusing plate. What is necessary is just to perform the process similar to a manufacturing method. The diffuser plate manufactured in this way has the same shape as FIG.
The coordinate input of the indentation formation position can be simplified by inputting CAD data obtained by optical design to the computer 24 as it is. Even in such a case, since the number of data input to the computer 24 is much smaller than that of the conventional one, the transfer time can be shortened.
[0030]
Further, the indentation A1 to An may not be continuously processed, and an intermittent operation may be performed in which the formation state is confirmed after the indentation A1 is completed, and the processing of the indentation A2 is started again.
In the present invention, when one type of indentation is formed for each row, the indenter may be changed to form an indentation for each row. However, when forming an indentation in this way, there is a disadvantage that the number of times the indenter is changed increases. However, when position correction is performed for each column, such a method may be used.
[0031]
【Example】
Next, an Example is given and this invention is demonstrated. FIG. 5 is a plan view of an embodiment of a microlens according to the present invention. A diamond indenter with a hemispherical tip having a curvature of 30 μm is used for indentation processing of the mold. With this indenter, the indentation A1 size φ22 μm, the depth 2.1 μm, the indentation A2 size φ20 μm, the depth 1.7 μm, the indentation A3 size φ18 μm, the depth 1.4 μm, the indentation A4 size φ16 μm, the depth 1. Four types of indentations of 1 μm are formed on the mold surface in a range of 27 mm in length and 44 mm in width with a pitch of 68 μm in the X direction. A microlens array 30 composed of four types of microlenses L1, L2, L3, and L4 was manufactured by compression molding of acrylic resin using this mold.
[0032]
【The invention's effect】
As described above, according to the present invention, a microlens array having no unevenness and good diffusibility can be manufactured by a simple method.
[Brief description of the drawings]
FIG. 1 is a plan view of a mold used to manufacture a microlens array according to the present invention.
FIG. 2 is a perspective view schematically showing an indenter pressing device.
3 is a cross-sectional view showing details of the moving coil device 2. FIG.
FIG. 4 is a diagram for explaining the operation of the moving coil device 2;
FIG. 5 is a plan view of an embodiment of a microlens array according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Indenter 2 ... Moving coil apparatus 3 ... Motor 5 ... Mold base material, Die 6 ... XY stage 20 ... Stage drive circuit 21 ... Stage movement amount detection circuit 22 ... Moving coil drive circuit 23 ... Rotation angle indexing circuit 24 ... Computer 30 ... Micro lens array

Claims (8)

  1. In the manufacturing method of the diffusion plate manufactured by forming indentations on the workpiece by the indentation method using three or more types of indenters with different diameters,
    When forming an indentation on the workpiece with the first indenter, form an indentation on the workpiece at regular intervals in a predetermined direction from the first start position in the first row,
    After all the indentations to be formed with the first indenter are formed in the first row, the indentation existing at the first start position in the second row next to the first row is next. Indentation is started from a position that is not adjacent to, and indentations are formed at the same intervals as the indentations formed in the first row in the predetermined direction,
    Next, when forming an indentation on the workpiece with a second indenter having a diameter different from that of the first indenter, a second start in which no indentation has already been formed on the first row. From the position, indentations are formed at the same intervals as the indentations formed in the predetermined direction and with the first indenter,
    When all the indentations to be formed with the second indenter are formed in the first row, then in the second row, the indentation by the first indenter in the first row and the second indentation Indentation formation is started from a position that is different from the positional relationship with the indentation by the indenter, and the second indentation is formed in the predetermined direction and at the same interval as the indentation formed by the first indenter. Forming an indentation with an indenter,
    Further, when forming an indentation using another indenter having a different indentation diameter from the first indenter and the second indenter, an indentation start position in each row is arbitrarily determined, and the indentation is determined. The diffusion plate is characterized in that formation is started, indentations are formed in the predetermined direction and at the same intervals as the indentations formed by the first indenter, and the indentations are formed on the workpiece. Production method
  2. The method for manufacturing a diffusion plate according to claim 1, wherein the interval between the indentations is shorter than a length obtained by adding all kinds of indenter diameters used for forming indentations on the workpiece.
  3. The type of indentation formed on the workpiece on the coordinates where the direction parallel to the predetermined direction is the X-axis and the Y-axis is a direction perpendicular to the predetermined direction on the workpiece surface. The x-coordinate component of the position of the indentation formed by the other indenters from the first row to the n-th row is formed so as to be different in the case of n. Manufacturing method of diffusion plate of 1
  4. In a method of forming an indentation on a mold base by an indentation method using three or more types of indenters with different diameters, and manufacturing a microphone lens array using the mold base,
    When forming an indentation on the mold base with the first indenter, form an indentation on the mold base at regular intervals in a predetermined direction from the first start position of the first row,
    Once all the indentations to be formed with the first indenter are formed in the first row, the second row next to the first row is not next to the first start position. Indentation formation is started from a position, and indentations are formed at the same intervals as the indentations formed in the first row in the predetermined direction,
    Next, when forming an indentation on the workpiece with a second indenter having a diameter different from that of the first indenter, a second start in which no indentation is already formed on the first row. From the position, forming an indentation by the second indenter in the predetermined direction and at the same interval as the interval of the indentation formed by the first indenter,
    When all the indentations to be formed with the second indenter are formed in the first row, the indentation by the first indenter in the first row and the second indentation are then performed in the second row. Indentation formation is started from a position that is different from the positional relation with the indentation by the indenter, and the second indenter is formed in the predetermined direction and at the same interval as the indentation formed by the first indenter. Form an indentation due to
    Further, when forming an indentation with another indenter having a diameter different from the diameters of the first indenter and the second indenter, an indentation start position in each row is arbitrarily determined, and the indentation is determined. A microlens that starts forming, forms indentations in the predetermined direction and at the same intervals as the indentations formed by the first indenter, and forms indentations on the mold base Array manufacturing method
  5. 5. The interval between the indentations formed by the first indenter is the same as a length obtained by adding all kinds of indenter diameters used for forming the indentation to the workpiece. Method for manufacturing microlens array
  6. An indentation formed on the mold base material on a coordinate having an X axis in a direction parallel to the predetermined direction and a Y axis in a direction perpendicular to the predetermined direction on the mold base material. When the number of types is n, X-coordinate components at positions where the other indenters from the first column to the n-th column are formed are formed to be different from each other. 4. A manufacturing method of the microlens array according to 4
  7. In a diffuser plate in which three or more types of recesses having different diameters or depths are arranged in a two-dimensional direction,
    Having a plurality of rows each including a plurality of each of the three or more types of recesses in one direction;
    The arrangement interval between the recesses having the same diameter and height is equal in the one direction, and the recesses having the same diameter and height are not adjacent to each other.
    In the direction perpendicular to the one direction, recesses having the same diameter and height are not adjacent to each other,
    All the concave portions are formed so that at least a part of the region overlaps another adjacent concave portion.
  8. In a microlens array in which three or more types of microlenses having different diameters or heights are arranged in a two-dimensional direction,
    A plurality of rows each including a plurality of each of the three or more types of microlenses in one direction;
    At equal intervals arrangement intervals equal microlenses each other diameter and height in the one direction, and is equal microlenses each other diameter and height is formed so as not adjacent,
    In the direction perpendicular to the one direction, microlenses having the same diameter and height are not adjacent to each other,
    All the microlenses are formed so that at least a part of the region overlaps another adjacent microlens.
JP31406897A 1997-11-14 1997-11-14 Diffusion plate manufacturing method, diffusion plate, microlens array manufacturing method, and microlens array Expired - Lifetime JP4243779B2 (en)

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